JP6687840B2 - Load port - Google Patents

Description

  The present invention relates to a load port capable of circulating gas in a wafer transfer chamber so that a wafer being transferred is not exposed to the outside air.

  Conventionally, a semiconductor has been manufactured by performing various processing steps on a wafer as a substrate. In recent years, high integration of elements and miniaturization of circuits have been promoted more and more, and it is required to maintain high cleanliness around the wafer to prevent oxygen, moisture and particles from adhering to the wafer surface. ing. Furthermore, in order to prevent the surface properties of the wafer from changing, such as being oxidized, the periphery of the wafer is set to a nitrogen atmosphere which is an inert gas or a vacuum state.

  In order to properly maintain the atmosphere around the wafer, the wafer is placed inside a closed storage pod called a FOUP (Front-Opening Unified Pod), which is filled with nitrogen. Further, a processing device for processing the wafer and a load port for transferring the wafer to and from the FOUP are used. The load port forms a part of a wall that isolates the wafer processing apparatus from the external space, and functions as an interface unit between the processing apparatus and the FOUP. While the processing device and the load port may be directly connected, an EFEM (Equipment Front End Module) may be arranged between the processing device and the load port. The EFEM constitutes a wafer transfer chamber that is substantially closed inside the housing, has a load port that functions as an interface section with the FOUP on one of the opposing wall surfaces, and has a processing device and a transfer chamber on the other side. A load lock chamber is connected to prevent direct communication between and. A wafer transfer device for transferring a wafer is provided in the wafer transfer chamber, and the wafer transfer device is used to take a wafer in and out between a FOUP connected to a load port and a load lock chamber. . In the wafer transfer chamber, normally, a clean air downflow is constantly flowed from a fan filter unit arranged above the transfer chamber.

  Further, in recent years, in the most advanced wafer process, even the oxygen and water contained in the clean air used as a downflow may change the properties of the wafer. Therefore, there is a demand for practical application of a technique of circulating an inert gas in the EFEM, as in Patent Document 1.

Japanese Unexamined Patent Publication No. 2014-112631

  However, in the load port described in Patent Document 1, the end surface of the door of the load port projects toward the FOUP (container) side. Therefore, when the FOUP is moved toward the door, there is a problem that the FOUP and the door come into contact with each other and collide with each other, and the seal between the load port and the FOUP or the door is released. Further, even if the end surface of the door of the load port does not project to the FOUP side, as a result of the inert gas being injected and the pressure inside the FOUP increasing, a part of the FOUP lid expands or the lid increases due to the pressure. The same problem may occur when the whole project to the load port side.

  Therefore, the present invention has been made to solve the above problems, and prevents contact between the FOUP and the door when the FOUP is moved toward the door, and prevents the load port, the FOUP or An object is to provide a load port that can prevent the seal with the door from being released.

The load port according to the first invention is
A base that forms part of the wall that separates the transfer space from the external space,
An opening provided in the base,
A door capable of opening and closing the opening, fixing and releasing the fixation of the lid with respect to the container containing the contents,
A first seal member for sealing between the base and the container;
A second seal member for sealing between the base and the door;
Equipped with
After the container is mounted on the mounting table on which the container is mounted, the door contacts the second seal member, and the end surface of the door on the container side is the door and the second seal member. It is characterized in that the door is retracted in a direction opposite to the container from an initial position closer to the container than the contact surface.

  In the present invention, after the container is placed on the mounting table, the door contacts the second seal member, and the container-side end surface of the door is closer to the container than the contact surface between the door and the second seal member. From the initial position, retract the door away from the container. This can prevent contact between the container and the door when the container is moved toward the door until it comes into contact with the first seal member. Therefore, it is possible to prevent the seal between the base and the container or the door from being released.

The load port according to the second invention is
The door is in contact with the second seal member at a door retracted position where the door is retracted.

  In the present invention, the door is in contact with the second seal member at the door retracted position where the door is retracted. Thereby, when the container is moved toward the door and the container comes into contact with the first seal member, at least the base, the first seal member, the second seal member, the lid, and the door can form a closed space.

The load port according to the third invention is
The door is in the door retracted position,
When the container is in contact with the opening via the first seal member, a sealed space is formed by at least the first seal member, the second seal member, the lid, and the door,
After the closed space is filled with gas, the door is advanced from the retracted position toward the container.

  In this invention, the door is advanced from the retracted position toward the container after the closed space is filled with gas. As a result, the container and the door are brought close to each other, the lid releases the fixation of the lid to the container, and the lid can be removed from the container.

The load port according to the fourth invention is
It is characterized in that the door is in contact with the lid at the door forward position where the door is moved forward.

  In the present invention, the door is in contact with the lid at the door advance position where the door is advanced. This ensures that the door releases the fixation of the lid to the container, and the lid can be removed from the container. Further, even if the door is tilted and the seal between the door and the second seal member is released due to the door coming into contact with the lid, the sealed space is filled with gas, so that the atmosphere enters the transfer space. There is nothing to do.

The load port according to the fifth invention is
The dimension of the second seal member in the direction in which the door advances and retracts is larger than the dimension of the first seal member in the direction in which the door advances and retracts.

  In the present invention, the dimension of the second seal member in the direction in which the door advances and retracts is larger than the dimension of the first seal member in the direction in which the door advances and retracts. This makes it possible to secure a large forward / backward (moving) distance of the door in a state where the door and the second sealing member are in contact with each other and sealed.

The load port according to the sixth invention is
A base that forms part of the wall that separates the transfer space from the external space,
An opening provided in the base,
A door capable of opening and closing the opening, fixing and releasing the fixation of the lid with respect to the container containing the contents,
A first seal member for sealing between the base and the container;
A second seal member for sealing between the base and the door;
Equipped with
The container side of the door in which the container contacts the first seal member and contacts the second seal member from the mounting position after the container is mounted on a mounting table on which the container is mounted. The container is advanced toward the door to a container retreat position where the end surface of the container and the container are separated by a predetermined distance.

  In the present invention, after the container is placed on the placing table for placing the container, the container-side end surface of the door that comes into contact with the first seal member and comes into contact with the second seal member from the placement position The container is advanced toward the door to a container retreat position where the container and the container are separated by a predetermined distance. This can prevent contact between the container and the door when the container is moved toward the door until it comes into contact with the first seal member. Therefore, it is possible to prevent the seal between the base and the container or the door from being released.

The load port according to the seventh invention is
When the container is in the container retreat position, at least a sealed space is formed by the first seal member, the second seal member, the lid, and the door,
After the closed space is filled with gas, the container is advanced from the container retreat position toward the door.

  In this invention, after the closed space is filled with gas, the container is advanced from the container retracted position toward the door. As a result, the container and the door are brought close to each other, the lid releases the fixation of the lid to the container, and the lid can be removed from the container.

The load port according to the eighth invention is
The lid body is in contact with the door at a container advance position where the container is advanced.

  In the present invention, the lid body is in contact with the door at the container advance position where the container is advanced. This ensures that the door releases the fixation of the lid to the container, and the lid can be removed from the container. Further, even if the door is tilted and the seal between the door and the second seal member is released due to the door coming into contact with the lid, the sealed space is filled with gas, so that the atmosphere enters the transfer space. There is nothing to do.

The load port according to the ninth invention is
The dimension of the first seal member in the direction in which the container advances and retracts in the direction opposite to the advance direction is larger than the dimension of the second seal member in the direction in which the container advances and retracts.

  In the present invention, the size of the first seal member in the direction in which the container advances and retracts in the direction opposite to the advance direction is larger than the size of the second seal member in the direction in which the container advances and retracts. This makes it possible to secure a large advance / retreat (movement) distance of the container in a state where the container and the first sealing member are in contact with each other and sealed.

  In the first invention, after the container is placed on the mounting table, the door contacts the second seal member, and the end surface of the door on the container side is closer to the container than the contact surface between the door and the second seal member. From the initial position in, retract the door away from the container. This can prevent contact between the container and the door when the container is moved toward the door until it comes into contact with the first seal member. Therefore, it is possible to prevent the seal between the base and the container or the door from being released.

  In the second aspect, the door is in contact with the second seal member at the door retracted position where the door is retracted. Thereby, when the container is moved toward the door and the container comes into contact with the first seal member, at least the base, the first seal member, the second seal member, the lid, and the door can form a closed space.

  In the third invention, after the closed space is filled with gas, the door is advanced from the retracted position toward the container. As a result, the container and the door are brought close to each other, the lid releases the fixation of the lid to the container, and the lid can be removed from the container.

  In the fourth aspect of the invention, the door is in contact with the lid at the door forward position where the door is moved forward. This ensures that the door releases the fixation of the lid to the container, and the lid can be removed from the container. Further, even if the door is tilted and the seal between the door and the second seal member is released due to the door coming into contact with the lid, the sealed space is filled with gas, so that the atmosphere enters the transfer space. There is nothing to do.

  In the fifth invention, the dimension of the second seal member in the direction in which the door advances and retracts is larger than the dimension of the first seal member in the direction in which the door advances and retracts. This makes it possible to secure a large forward / backward (moving) distance of the door in a state where the door and the second sealing member are in contact with each other and sealed.

  In the sixth invention, after the container is placed on the mounting table on which the container is placed, from the mounting position, the container is in contact with the first seal member and is in contact with the second seal member. The container is advanced toward the door to a container retracted position where the end surface and the container are separated by a predetermined distance. This can prevent contact between the container and the door when the container is moved toward the door until it comes into contact with the first seal member. Therefore, it is possible to prevent the seal between the base and the container or the door from being released.

  In the seventh invention, after the closed space is filled with gas, the container is advanced from the container retreat position toward the door. As a result, the container and the door are brought close to each other, the lid releases the fixation of the lid to the container, and the lid can be removed from the container.

  In the eighth invention, the lid body is in contact with the door at the container advancing position where the container is advanced. This ensures that the door releases the fixation of the lid to the container, and the lid can be removed from the container. Further, even if the door is tilted and the seal between the door and the second seal member is released due to the door coming into contact with the lid, the sealed space is filled with gas, so that the atmosphere enters the transfer space. There is nothing to do.

  In the ninth invention, the size of the first seal member in the direction in which the container advances and retracts in the direction opposite to the advance direction is larger than the size of the second seal member in the direction in which the container advances and retracts. This makes it possible to secure a large advance / retreat (movement) distance of the container in a state where the container and the first sealing member are in contact with each other and sealed.

The side view which shows the state which removed the side wall of EFEM. The perspective view of the load port shown in FIG. The side sectional view showing FOUP and a load port. The principal part expansion perspective view which expands and shows the window unit and door part which comprise EFEM. Sectional drawing of the 1st O-ring of 1st Embodiment. Sectional drawing of the 2nd O-ring of 1st Embodiment. Sectional drawing of each member which forms a closed space. The block diagram which shows the connection state of a control part, each sensor, and each drive part. The flowchart of 1st Embodiment at the time of taking out the wafer in FOUP, and also taking in. Sectional drawing which shows the state which mounted FOUP on the mounting base. Sectional drawing which shows the state which advanced the FOUP toward the load port from the state of FIG. 10, and retracted the door part. Sectional drawing which shows the state which advanced the door part toward FOUP from the state of FIG. Sectional drawing which shows the state which opened the opening part of the load port from the state of FIG. Sectional drawing of the 1st O-ring of 2nd Embodiment. Sectional drawing of the 2nd O-ring of 2nd Embodiment. The flowchart of 2nd Embodiment at the time of taking out and taking in the wafer in FOUP. Sectional drawing which shows the state when advancing FOUP to a retracted position. FIG. 18 is a cross-sectional view showing a state in which the FOUP is further advanced from the state of FIG. 17 toward the door portion. Sectional drawing of the 1st O-ring of 3rd Embodiment. Sectional drawing of the 2nd O-ring of 3rd Embodiment. The flowchart of 3rd Embodiment at the time of taking out the wafer in FOUP, and also taking in it. Sectional drawing which shows the state which advanced FOUP to a retracted position, and retracted the door part to the retracted position. FIG. 23 is a cross-sectional view showing a state where the FOUP and the door portion are brought close to each other from the state of FIG. 22. Sectional drawing which shows the modification of a 1st O-ring and a 2nd O-ring. Sectional drawing which shows the modification which integrated the 1st O ring and the 2nd O ring.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

<Ist Embodiment>
FIG. 1 is a side view in which the inside is visible by removing the side wall of the EFEM 1. As shown in FIG. 1, the EFEM 1 includes a wafer transfer device 2 that transfers a wafer W between predetermined transfer positions, a box-shaped case 3 provided so as to surround the wafer transfer device 2, and a case. 3, a load port 4 connected to the outside of the front wall and a control means 5. Here, in the present application, the direction of the side to which the load port 4 is connected as viewed from the housing 3 is defined as the front, and the direction of the side opposite to the side to which the load port 4 is connected as viewed from the housing 3 is defined as the rear.

  By controlling the operation of the wafer transfer device 2 by the control means 5, the wafers (containers) W stored in the FOUPs (containers) 7 placed on the load ports 4 are transferred to the transfer space 9 inside the housing 3. It is possible to carry and carry the wafer W after each processing into the FOUP 7.

  The load port 4 includes a door portion 51 (see FIG. 2), and the door portion 51 is connected to the lid 32 provided on the FOUP 7 and moves together, so that the FOUP 7 is opened to the transport space 9. It has become so. A large number of mounting portions are provided in the FOUP 7 in the up-down direction, so that a large number of wafers W can be accommodated. Further, the FOUP 7 is usually filled with nitrogen, and the atmosphere in the FOUP 7 can be replaced with nitrogen through the load port 4 under the control of the control means 5.

  The control means 5 is configured as a controller unit provided in the upper space of the housing 3. The control means 5 also controls the drive of the wafer transfer device 2, the nitrogen replacement control of the FOUP 7 by the load port 4, the opening / closing control of the door 51, the nitrogen circulation control in the housing 3, and the like. The control means 5 is composed of a CPU, an ordinary microprocessor having a memory and an interface, and the like, and a program necessary for processing is stored in advance in the memory, and the CPU sequentially fetches and executes the necessary program. However, the desired functions are realized in cooperation with peripheral hardware resources. The nitrogen circulation control will be described later.

  The internal space of the housing 3 is partitioned by the partition member 8 into a transfer space 9 in which the wafer transfer device 2 is driven and a gas return path 10. The transfer space 9 and the gas return path 10 are provided with a gas outlet 11 provided in the upper part of the transfer space 9 extending in the width direction and a gas suction provided in the lower part of the transfer space 9 extending in the width direction. It communicates only with the mouth 12. Then, the gas outlet 11 and the gas suction port 12 generate a descending airflow in the transfer space 9 and an ascending airflow in the gas return path 10, whereby the inert gas is circulated. In this embodiment, nitrogen is used as the inert gas, but the gas to be circulated is not limited to this, and other gas may be used.

  A gas supply means 16 for introducing nitrogen into the housing 3 is connected to the upper portion of the return path 10 on the back side. The gas supply means 16 can control the supply and stop of supply of nitrogen based on the command from the control means 5. Therefore, when a part of the nitrogen flows out of the housing 3, the gas supply unit 16 supplies the outflowing nitrogen so that the nitrogen atmosphere in the housing 3 can be kept constant. Further, a gas discharge means 17 for discharging the nitrogen gas in the housing 3 is connected to the lower portion on the back side. The gas discharge means 17 operates based on a command from the control means 5, and by opening a shutter (not shown), the inside of the housing 3 and the nitrogen gas discharge destination provided outside can be connected to each other. Has become. Then, by using the gas supply means 16 together with the supply of nitrogen as described above, it is possible to replace the inside of the housing 3 with a nitrogen atmosphere or control the pressure inside the housing 3. In this embodiment, since the gas to be circulated is nitrogen, the gas supply means 16 supplies nitrogen, but when other gas is circulated, the gas supply means 16 supplies the circulated gas.

  Further, the gas outlet 11 is provided with a fan filter unit 13 (FFU 13) including a fan 13a and a filter 13b as a first air blower. The fan filter unit 13 removes particles contained in the nitrogen gas circulating in the housing 3 and blows air downward into the transfer space 9 to generate a downward airflow in the transfer space 9. . The FFU 13 is supported by a support member 18 connected to the partition member 8 and extending in the horizontal direction.

  Then, by the fan 13a and the fan 15 of the FFU 13 described above, the nitrogen gas in the housing 3 descends in the transfer space 9 and rises in the gas return path 10 to circulate. Since the gas outlet 11 is opened downward, the FFU 13 sends out nitrogen gas downward. Since the gas suction port 12 is opened upward, the nitrogen gas can be sucked downward as it is without disturbing the descending airflow generated by the FFU 13, and the smooth flow of nitrogen gas can be achieved by these. Can be produced. The descending airflow generated in the transfer space 9 removes particles adhering to the upper part of the wafer W and the release gas temporarily released from the processed wafer, and the wafer transfer device 2 in the transfer space 9 is also removed. The movement of such devices prevents the released gas and particles from floating.

  FIG. 2 shows a perspective view of the load port 4. The configuration of the load port 4 will be described below.

  The load port 4 has a base 21 standing vertically from the rear of a leg 25 to which casters and installation legs are attached, and a horizontal base 23 is provided forward from a height position of about 60% of the base 21. There is. Further, a mounting table 24 for mounting the FOUP 7 is provided above the horizontal base 23.

  As schematically shown in FIG. 3, the FOUP 7 is provided on one surface of the main body 31 so as to serve as a main body 31 having an internal space Sf for accommodating the wafer W (see FIG. 1) and a loading / unloading port for the wafer W. It is composed of a lid 32 that opens and closes the opening 31a. When the FOUP 7 is properly placed on the placing table 24, the lid 32 faces the base 21.

  Returning to FIG. 2, a positioning pin 24a for positioning the FOUP 7 is provided on the mounting table 24, and a lock claw 24b for fixing the FOUP 7 to the mounting table 24 is provided. After the FOUP 7 is properly positioned on the mounting table 24, the lock claw 24b can lock the FOUP 7 by performing a locking operation, and can unlock the FOUP 7 from the mounting table 24 by performing an unlocking operation. Can be The mounting table 24 can be moved in the front-rear direction by a mounting table driving unit (not shown) with the FOUP 7 mounted thereon.

  Whether or not the FOUP 7 is positioned at an appropriate position is detected by a positioning sensor 60 arranged near the positioning pin 24a. The positioning sensor 60 is preferably arranged near each positioning pin 24a. Here, being properly positioned means that the height of the bottom surface of the FOUP 7 with respect to the mounting table 24 is within a predetermined range from the upper surface of the mounting table 24.

  Further, the mounting table 24 is provided with two gas injection portions 70 for supplying nitrogen gas into the FOUP 7 and two gas exhaust portions 71 for discharging nitrogen gas from the FOUP 7. The gas injecting part 70 and the gas exhausting part 71 are usually located below the bottom surface of the FOUP 7 in a properly positioned state, and are advanced upward when in use so that the gas supply valve 33 provided in the FOUP 7 (see FIG. 3). ) And the gas discharge valve 34, respectively.

  During use, the upper end of the gas injection part 70 contacts the gas supply valve 33 of the FOUP 7, and similarly, the upper end of the gas exhaust part 71 contacts the gas exhaust valve 34 of the FOUP 7. Then, gas such as dry nitrogen gas is supplied to the internal space Sf of the FOUP 7 from the gas injection part 70 via the gas supply valve 33, and nitrogen gas in the internal space Sf is discharged from the gas exhaust part 71 via the gas discharge valve 34. It is possible. Further, by setting the supply amount of nitrogen gas to be larger than the discharge amount of nitrogen gas, it is possible to set the positive pressure in which the pressure in the internal space Sf is higher than the pressure in the transfer space 9 of the outside or the housing 3.

  The base 21 that constitutes the load port 4 constitutes a part of the front wall that separates the transfer space 9 from the external space. As shown in FIG. 2, the base 21 is attached to columns 21a, 21a that are erected on both sides, a base body 21b supported by these, and a window portion 21c opened in a substantially rectangular shape in the base body 21b. And the window unit 40. Here, the substantially rectangular shape in the present application means a shape in which four corners are smoothly connected by arcs while a rectangular shape having four sides is a basic shape.

  The window unit 40 is provided at a position facing the lid 32 (see FIG. 3) of the FOUP 7 described above. Since the window unit 40 is provided with a substantially rectangular opening 42 (see FIG. 4) as described later in detail, the transfer space 9 of the housing 3 can be opened through this opening 42. it can.

  The window unit 40 includes the window frame 41, the first O-ring (first seal member) 43, the second O-ring (second seal member) 44 as elastic materials attached to the window frame 41, and the FOUP 7 via the first O-ring 43. And a clamp unit 45 as a pulling-in means for bringing the above into close contact with the window frame portion 41.

  The window frame portion 41 has a frame shape in which a substantially rectangular opening 42 is formed inside. Since the window frame portion 41 constitutes a part of the base 21 (see FIG. 2) described above as a component of the window unit 40, the opening portion 42 opens the front wall of the housing 3. You can

  On the front surface of the window frame portion 41, a first O-ring 43 is arranged so as to circulate around the periphery of the opening portion 42. On the rear surface of the window frame portion 41, a second O-ring 44 is arranged so as to circulate around the periphery of the opening 42.

  FIG. 5 is a cross-sectional view of the first O-ring 43 cut in a direction orthogonal to the lengthwise direction of the first O-ring 43, and FIG. 6 is a cross-sectional view of the second O-ring 44 cut in a direction orthogonal to the lengthwise direction. FIG. The cross-sectional shapes of the first O-ring 43 and the second O-ring 44 are convex. In the figure, the arrow indicates the front-back direction of the window unit 40, that is, the forward / backward direction of the FOUP 9 and the door portion 51, which will be described later. The dimension L1 indicates the height dimension of the first O-ring 43 in the advancing / retreating direction of the door portion 51. The dimension L2 indicates the height dimension of the second O-ring 44 in the advancing / retreating direction of the door portion 51. That is, in this embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43.

  The opening 42 is slightly larger than the outer circumference of the lid 32 of the FOUP 7, and the lid 32 is movable through the opening 42. Further, when the FOUP 7 is mounted on the mounting table 24, as shown in FIG. 7, the front surface of the main body 31 that surrounds the lid 32 serves as a contact surface 31b, and the window frame portion 41 via the first O-ring 43. It contacts the front surface of the (base 21). As a result, when the FOUP 7 is attached to the window unit 40, the first O-ring 43 seals (closes) the periphery of the opening 42 (base 21) and the FOUP 7.

  Further, the door portion 51 described above abuts on the rear surface of the window frame portion 41 via the second O-ring 44. As a result, the second O-ring 44 seals the periphery of the opening 42 and the door 51.

  The clamp units 45 are provided at a total of four locations on both sides of the window frame 41, which are spaced apart in the vertical direction. Each clamp unit 45 is generally composed of an engagement piece 46 and a cylinder 47 that operates the engagement piece 46, and presses the FOUP 7 toward the base 21 side in a state where the FOUP 7 is attached to the window unit 40.

  When the engaging piece 46 is projected forward, the tip of the engaging piece 46 faces upward, and when the engaging piece 46 is pulled rearward, the tip is directed toward the inner FOUP 7. By the clamping operation, the tip of the engaging piece 46 faces inward, so that the engaging piece 46 can be engaged with the flange portion that projects laterally from the FOUP 7.

  Further, the load port 4 includes an opening / closing mechanism 50 for opening / closing the window unit 40 configured so that the FOUP 7 can be attached.

  As shown in FIG. 3, the opening / closing mechanism 50 includes a door portion 51 for opening / closing the opening 42, a support frame 52 for supporting the same, and the support frame 52 in the front-rear direction via the slide support means 53. A movable block 54 that supports the movable block 54 and a slide rail 55 that supports the movable block 54 in the vertical direction relative to the base body 21b are provided.

  The door portion 51 includes a suction portion 56 (see FIG. 4) that sucks the lid body 32 of the FOUP 7, a latching operation for opening and closing the lid body 32 of the FOUP 7, and a connecting means 57 for holding the lid body 32. Is equipped with. The door portion 51 can fix and release the lid body 32 to remove and attach the lid body 32 from the FOUP 7. In the connecting means 57, the lid body 32 can be opened by performing the unlatching operation of the lid body 32, and the lid body 32 can be connected to the door portion 51 to be in an integrated state. On the contrary, in the connecting means 57, the lid 32 is latched to release the connection between the lid 32 and the door 51, and the lid 32 is attached to the main body 31 to be in the closed state. You can also

  As shown in FIG. 3, the door unit 51 has a gas injection nozzle 73 for injecting nitrogen gas between the FOUP 7 and the door unit 51 when the FOUP 7 is attached to the window unit 40, the FOUP 7 and the door unit 51. And a gas discharge nozzle 74 for discharging the nitrogen gas between them. The upper end of the gas injection nozzle 73 extends to the outer surface of the door portion 51, and the lower end is connected to a gas supply device (not shown). Similarly, the upper end of the gas discharge nozzle 74 extends to the outer surface of the door portion 51, and the lower end is connected to a gas discharge device (not shown). In a state where the FOUP 7 and the door portion 51 are integrated by the clamp unit 45, the gas injection nozzle 73 communicates with the sealed space Sd (see FIG. 7) to supply nitrogen, and the gas discharge nozzle 74 communicates with the sealed space Sd. By discharging nitrogen by means of this, the closed space Sd can be replaced and filled with nitrogen.

  Furthermore, actuators (not shown) for moving the door portion 51 in the front-rear direction and in the up-down direction are provided for each direction, and drive commands from the control unit Cp are given to these actuators. Thus, the door portion 51 can be moved in the front-rear direction and the vertical direction. In this way, the load port 4 is operated by the drive command given to each unit by the control unit Cp.

  As shown in FIG. 8, the input side of the control unit Cp is connected to the positioning sensor 60, the door position detection sensor 81, the mounting table detection sensor 82, and the atmosphere sensor 83. The positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24. The door position detection sensor 81 detects the forward / backward position of the door portion 51. The mounting table detection sensor 82 detects the position of the mounting table 24 in the forward / backward direction. The atmosphere sensor 83 detects the humidity and the oxygen concentration in the closed space Sd, and detects whether the closed space Sd is replaced with nitrogen.

  The output side of the control unit Cp is connected to the mounting table drive unit 85, the door drive unit 86, the clamp unit drive unit 87, the gas supply device 88, and the gas discharge device 89. The gas supply device 88 is connected to the gas injection nozzle 73 and supplies nitrogen to the closed space Sd. The gas discharge device 89 is connected to the gas discharge nozzle 74 and discharges nitrogen from the closed space Sd.

  Hereinafter, operations of the FOUP 7 and the door portion 51 when the load port 4 of the first embodiment is used will be described.

  First, in step S1 shown in FIG. 9, the FOUP 7 is mounted on the container delivery position of the mounting table 24 by an unillustrated overhead traveling type automatic carrier. The container delivery position refers to a position within the moving range of the mounting table 24 where the FOUP 7 can be mounted on the mounting table 24.

  At this time, as shown in FIG. 10, the door portion 51 is arranged at the door closing position. The door closing position means that the door portion 51 is in contact with the second seal member 44, and the end surface 51a of the door portion 51 on the FOUP7 side is closer to the FOUP7 side than the contact surface between the door portion 51 and the second seal member 44. Refers to the initial position. Specifically, the end surface 51a of the door portion 51 is located closer to the FOUP 7 side than the base 21 of the load port 4 and is within the dimension of the first O-ring 43 in the front-rear direction.

  In step S2, the positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24. If FOUP7 is not properly positioned, send an error to the host controller and repeat.

  If the FOUP 7 is properly positioned, the process proceeds to step S3, and the door drive unit 86 retracts the door unit 51 from the door closed position to the door retracted position in the direction opposite to the FOUP 7 (see FIG. 11). The door retracted position refers to a position where the door 51 is retracted from the door closed position (initial position) in the direction opposite to the FOUP 7, and the door 51 is in contact with the second seal member 44. The door portion 51 advances from the rear of the load port 4 toward the front and retracts from the front of the load port 4 toward the rear. The forward and backward directions are horizontal. By retracting the door portion 51, the second O-ring 44 extends as compared with FIG. 10. The door position detection sensor 81 detects whether the door portion 51 has retracted to the door retracted position.

  In step S4, the mounting table drive unit 85 advances the mounting table 24 and the FOUP 7 from the container delivery position to the door opening / closing position (see FIG. 11). The door opening / closing position refers to a position within the moving range of the door portion 51 where the connecting means 57 fixes or releases the lid 32 to / from the FOUP 7, and the lid 32 is attached / detached. The amount of movement of the FOUP 7 from the container delivery position to the door opening / closing position is 71 mm. The mounting table detection sensor 82 detects whether the mounting table 24 has moved to the door opening / closing position. When the mounting table detection sensor 82 detects that the mounting table 24 is at the door opening / closing position, the clamp unit 45 is operated by a signal from the clamp unit driving section 87. As a result, the FOUP 7 is pulled toward the load port 4 side, and the sealing performance between the FOUP 7, the base 21 and the first O-ring 43 is enhanced. The FOUP 7 advances from the front of the load port 4 toward the rear, and retracts (retracts) from the rear of the load port 4 toward the front. The forward and backward directions are horizontal.

  When the door portion 51 is in the door retreat position and the FOUP 7 is in the door opening / closing position and abuts the window frame portion 41 of the load port 4 via the first O-ring 43, the closed space Sd is formed. The closed space Sd is formed by the base 21, the first seal member 43, the second seal member 44, the lid 32, the FOUP 7, and the door portion 51. Further, in step S5, the closed space Sd is replaced with nitrogen gas from the atmosphere by the gas injection nozzle 73 and the gas discharge nozzle 74. The atmosphere sensor 83 detects whether or not the closed space Sd is replaced with nitrogen gas.

  After that, in step S6, the door drive unit 86 advances the door unit 51 toward the FOUP 7 from the door retreat position to the door opening / closing position (door advance position) (see FIG. 12). When the door portion 51 is in the door open / close position, the door portion 51 and the lid body 32 come into contact with each other, and the connecting means 57 releases the fixation of the lid body 32 to the FOUP 7 and holds the lid body 32. The distance between the door retreat position and the door opening / closing position is set to 3 mm.

  In step S7, the door drive unit 86 moves the door portion 51 and the lid 32 held by the door portion 51 from the door opening / closing position to the door opening position to open the opening 42 of the load port 4 (see FIG. 13). . The door open position refers to a position where the opening 42 is opened and the wafer transfer device 2 can access the FOUP 7. In this state, the wafer transfer device 2 takes out and takes in the wafer W in the FOUP 7.

  When the wafer W is taken out and taken in, the door drive unit 86 moves the door unit 51 from the door open position to the door open / close position in step S8. At this time, the connecting means 57 attaches and fixes the lid 32 to the FOUP 7. Then, the fixing of the FOUP 7 and the load port 4 by the clamp unit 45 is released, and in step S9, the mounting table drive unit 85 retracts the mounting table 24 and the FOUP 7 to the container delivery position.

[Characteristics of the load port of this embodiment]
The load port 4 of this embodiment has the following features.

  In the load port 4 of the present embodiment, after the FOUP 7 is placed on the mounting table 24, the door portion 51 abuts on the second seal member 44, and the end surface 51a of the door portion 51 on the FOUP 7 side is located near the door portion 51. The door portion 51 is retracted in the direction opposite to the FOUP 7 from the initial position on the FOUP 7 side of the contact surface with the 2 seal member 43. This can prevent the FOUP 7 and the door portion 51 from coming into contact with each other when the FOUP 7 is moved toward the door portion 51 until it comes into contact with the first seal member 43. Therefore, even if the FOUP 7 or the door portion 51 is pushed out or inclined due to the contact, it is possible to prevent the seal between the base 21 and the FOUP 7 or the door portion 51 from being released.

  In the load port 4 of the present embodiment, the door portion 51 is in contact with the second seal member 44 at the door retracted position where the door portion 51 is retracted. Accordingly, the FOUP 7 is moved toward the door portion 51, and when the FOUP 7 contacts the first seal member 43, at least the base, the first seal member 43, the second seal member 44, the lid 32, and the door portion. The closed space Sd can be formed by 51.

  In the load port 4 of this embodiment, after the closed space Sd is filled with nitrogen gas, the door portion 51 is advanced from the retracted position toward the FOUP 7. As a result, the FOUP 7 and the door portion 51 are brought close to each other, and the fixing of the lid body 32 to the FOUP 7 is released by the connecting means 57 of the door portion 51, so that the lid body 32 can be detached from the FOUP 7.

  In the load port 4 of the present embodiment, the door portion 51 is in contact with the lid 32 at the door advance position where the door portion 51 is advanced. Accordingly, the fixing of the lid 32 to the FOUP 7 is reliably released by the connecting means 57 of the door portion 51, and the lid 32 can be removed from the FOUP 7. Further, even if the door 51 is tilted and the seal between the door 51 and the second seal member 44 is released by the contact of the door 51 with the lid 32, the sealed space Sd is filled with nitrogen gas. Therefore, the atmosphere does not enter the transfer space 9.

  In the load port 4 of this embodiment, the dimension of the second seal member 44 in the direction in which the door portion 51 moves forward and backward is larger than the dimension of the first seal member 43 in the direction in which the door portion 51 moves forward and backward. This makes it possible to secure a large forward / backward (moving) distance of the door portion 51 in a state where the door portion 51 and the second seal member 44 are in contact with each other and sealed.

<Second Embodiment>
The respective configurations of the second embodiment, such as the load port 4 and the like, are the same as those of the first embodiment, and thus the description thereof will be omitted. However, in the first embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43. However, as shown in FIGS. 14 and 15, the second embodiment differs from the first embodiment in that the dimension L1 of the first O-ring 43 is larger than the dimension L2 of the second O-ring 44.

  Hereinafter, operations of the FOUP 7 and the door portion 51 when the load port 4 of the second embodiment is used will be described. The definitions of the respective positions such as the container delivery position of the FOUP 7 and the door portion 51, such as the door closing position, are the same as those in the first embodiment, and therefore the description thereof is omitted.

  First, in step S1 shown in FIG. 16, the FOUP 7 is mounted on the container delivery position of the mounting table 24 by an unillustrated overhead traveling type automatic carrier.

  At this time, as shown in FIG. 17, the door portion 51 is arranged at the door closing position, and the door clamp by the door pushing mechanism 90 is operating. A plurality of the door pushing mechanisms 90 are arranged along the opening peripheral edge of the opening 42 on the wall surface of the base 21 on the transport space 9 side. The door pushing mechanism 90 mainly includes a cylinder 91, a rod 92 that can project and retract from the cylinder 91, and a roller 93 that is rotatably provided at the tip of the rod 92. The cylinder 91 is attached to a pedestal 94 that can be arranged with an inclination from the base 21 so that the roller 93 can be appropriately pressed against the door portion 51. By appropriately pressing the roller 93 against the door portion 51, it is possible to enhance the sealing performance of the base 21, the door portion 51 and the second O-ring 44.

  In step S2, the positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24. If FOUP 7 is not properly positioned, repeat.

  If the FOUP 7 is properly positioned, the process proceeds to step S3. In step S3, the mounting table 24 and the FOUP 7 advance toward the door portion 51 from the container delivery position to the container retreat position (see FIG. 17). The container retreat position refers to a position where the FOUP 7 is in contact with the first O-ring 43 and the FOUP 7-side end surface of the door 51 in which the FOUP 7 is in contact with the second O-ring 44 is separated from the FOUP 7 by a predetermined distance. The container retreat position is located between the container open / close position and the container delivery position described later.

  At this time, since the closed space Sd is formed, the closed space Sd is filled with the gas injection nozzle 73 and the gas discharge nozzle 74 after replacing the atmosphere with nitrogen gas in step S4.

  In step S5, the mounting table drive unit 85 advances the mounting table 24 and the FOUP 7 toward the door portion 51 from the container retracted position to the container opening / closing position (container advancing position) (see FIG. 18). The container opening / closing position refers to a position within the moving range of the mounting table 24 where the wafer transfer apparatus 2 can take out the wafer W in the FOUP 7 via the opening 42. When the FOUP 7 is in the container opening / closing position, the door 51 and the lid 32 are in contact with each other, and the connecting means 57 releases the fixing of the lid 32 to the FOUP 7 and holds the lid 32. The movement amount of the FOUP 7 from the container retreat position to the container opening / closing position is set to 8 mm.

  After that, the door clamp is released, and in step S6, the door portion 51 and the lid 32 are moved from the door opening / closing position to the door opening position. In this state, the wafer transfer device 2 takes out and takes in the wafer W in the FOUP 7.

  When the taking out and taking in of the wafer W are completed, the process proceeds to step S7. In step S7, the door drive unit 86 moves the door unit 51 from the door open position to the door open / close position. At this time, the connecting means 57 attaches the lid 32 to the FOUP 7 and operates the door clamp.

  Then, the fixing of the FOUP 7 and the load port 4 by the clamp unit 45 is released, and in step S8, the mounting table drive unit 85 retracts the mounting table 24 and the FOUP 7 to the container delivery position.

[Characteristics of the load port of this embodiment]
The load port 4 of this embodiment has the following features.

  In the load port 4 of the present embodiment, after the FOUP 7 is mounted on the mounting table 24 on which the FOUP 7 is mounted, the FOUP 7 contacts the first O-ring 43 and the second O-ring 44 from the mounting position. The FOUP 7 is advanced toward the door portion 51 to a container retreat position where the FOUP 7 side end surface of the portion 51 and the FOUP 7 are separated by a predetermined distance. Thereby, when the FOUP 7 is moved toward the door portion 51 until it comes into contact with the first O-ring 43, it is possible to prevent the FOUP 7 and the door portion 51 from coming into contact with each other. Therefore, even if the FOUP 7 or the door portion 51 is inclined due to the contact, it is possible to prevent the seal between the base 21 and the FOUP 7 or the door portion 51 from being released.

  In the load port 4 of this embodiment, after the closed space Sd is filled with nitrogen gas, the FOUP 7 is advanced from the container retreat position toward the door 51. As a result, the FOUP 7 and the door portion 51 are brought close to each other, and the fixing of the lid body 32 to the FOUP 7 is released by the suction portion 56 of the door portion 51, so that the lid body 32 can be removed from the ROUP 7.

  In the load port 4 of the present embodiment, the lid 32 is in contact with the door portion 51 at the container advance position where the FOUP 7 is advanced. Accordingly, the adsorption of the lid 32 to the FOUP 7 is reliably released by the suction portion 56 of the door 51, and the lid 32 can be removed from the FOUP 7. Further, even if the door 51 is tilted and the seal between the door 51 and the second O-ring 44 is released by the contact of the door 51 with the lid 32, the sealed space Sd is filled with the nitrogen gas. Therefore, the atmosphere does not enter the transfer space 9.

<Third Embodiment>
Since the respective configurations of the third embodiment, such as the load port 4, are the same as those of the first embodiment, the description thereof will be omitted. However, in the first embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43. However, the third embodiment shown in FIGS. 19 and 20 differs from the first embodiment in that the dimension L1 of the first O-ring 43 and the dimension L2 of the second O-ring 44 are substantially equal.

  Hereinafter, operations of the FOUP 7 and the door portion 51 when the load port 4 of the third embodiment is used will be described. The definitions of the respective positions such as the container delivery position of the FOUP 7 and the door portion 51, such as the door closing position, are the same as those in the first embodiment, and therefore the description thereof is omitted.

  First, in step S1 shown in FIG. 21, the FOUP 7 is mounted on the container delivery position of the mounting table 24 by an unillustrated overhead traveling type automatic carrier.

  In step S2, the positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24. If FOUP 7 is not properly positioned, repeat.

  If the FOUP 7 is properly positioned, the process proceeds to step S3 to retract the door portion 51 from the door closed position to the door retracted position (see FIG. 22). Simultaneously with or after this, in step S4, the mounting table 24 and the FOUP 7 are advanced from the container delivery position to the container retreat position. Therefore, it is possible to reliably prevent contact between the door portion 51 and the lid body 32 in a state where the door portion 51 is in contact with the second O ring 44 and the FOUP 7 is in contact with the first O ring 43. The distance between the door closed position and the door retracted position is preferably 4 mm or less.

  At this time, since the closed space Sd is formed, the closed space Sd is filled with the gas injection nozzle 73 and the gas discharge nozzle 74 by replacing the atmosphere with nitrogen gas in step S5.

  Next, in step S6, the mounting table 24 and the FOUP 7 are brought closer to the door portion 51 from the container mounting position. In other words, the mounting table 24 and the FOUP 7 are advanced toward the door 51. At the same time, in step S7, the door portion 51 is moved closer to the FOUP 7 from the door retracted position. In other words, the door portion 51 is advanced toward the FOUP 7.

  By steps S6 and S7, as shown in FIG. 23, the lid 32 and the door portion 51 come into contact with each other. At this time, by setting the driving force of the mounting table drive unit 85 and the closing force of the door unit 51 of the door drive unit 86 to be equal, even if the lid body 32 and the door unit 51 come into contact with each other, the lid body 32 is in contact. It is possible to prevent one of the door portion 51 and the door portion 51 from inclining.

  In the state where the lid body 32 and the door portion 51 are in contact with each other, the connecting means 57 releases the fixation of the lid body 32 to the FOUP 7 and holds the lid body 32.

  Then, in step S8, the door drive unit 86 moves the door unit 51 and the lid 32 to the door open position. After or in conjunction with the operation of step S8, the mounting table 24 is advanced toward the door portion 51 and moved to a predetermined position where the wafer W can be taken out. In this state, the wafer transfer device 2 takes out and takes in the wafer W in the FOUP 7.

  When the taking out and taking in of the wafer W are completed, the process proceeds to step S9. In step S7, the door drive unit 86 moves the door unit 51 from the door open position to the door open / close position. At this time, the connecting means 57 attaches the lid 32 to the FOUP 7 and operates the door clamp.

  Then, the fixing of the FOUP 7 and the load port 4 by the clamp unit 45 is released, and in step S10, the mounting table drive unit 85 retracts the mounting table 24 and the FOUP 7 to the container delivery position.

  Although the embodiments of the present invention have been described above with reference to the drawings, it should be considered that the specific configurations are not limited to these embodiments. The scope of the present invention is shown not only by the above description of the embodiments but also by the claims, and further includes meanings equivalent to the claims and all modifications within the scope.

  The load port 4 of the above embodiment is provided in the EFEM 1. However, the present invention is not limited to these, it is directly applied to a processing apparatus without going through the EFEM 1, a sorter apparatus that exchanges and rearranges the wafers W in the FOUP 7, and a stocker apparatus that temporarily stores the wafers W in the FOUP 7. Can be applied to.

  In the above-mentioned embodiment, FOUP7 was used as an example as a container, but it is not limited to this. For example, a MAC (Multi Application Carrier) or a FOSB (Front Opening Shipping Box) used for wafer transportation may be used as the container. In addition to the wafer transfer, the present invention may be applied to a container for transferring an article whose desired environment is to be maintained rather than the outside air.

  In the above-described embodiment, the wafer W is illustrated as an item to be stored in the container, but the present invention is not limited to this. For example, a substrate used for an electronic component or a flat panel display, a cell culture container for storing cells, and the like may be stored.

  Although nitrogen is used as the gas in the above-described embodiment, the gas is not limited to this. For example, a desired environmental gas such as dry gas or argon gas can be used.

  In the above-described embodiment, the door position detection sensor 81 detects whether the door portion 51 has retracted to the door retracted position. However, the present invention is not limited to this, and it may be detected from the driving state of the door driving unit 86, or may be detected by a timer whether a predetermined time has elapsed.

  In the above-described embodiment, the mounting table detection sensor 82 detects whether the mounting table 24 has moved to the dock position. However, the present invention is not limited to this, and it may be detected by a signal from the mounting table drive unit 85, or may be detected by a timer depending on whether a predetermined time has elapsed.

  In the above embodiment, the atmosphere sensor 83 detects whether or not the closed space Sd is replaced with nitrogen gas. However, the present invention is not limited to this, and a timer may be used to detect whether a predetermined time has elapsed.

  In the above-described embodiment, immediately after the FOUP 7 is placed on the mounting table 24, nitrogen gas is ejected from the gas injection unit 70 while the mounting table 24 is advanced to the container open / close position or the container retreat position. However, the present invention is not limited to this, and at the same time, the atmosphere around the door portion 51 may be exhausted from the gas exhaust portion 71.

  The materials for the first O-ring 43 and the second O-ring 44 are not particularly limited. The seal member may be an elastic member such as an O-ring made of fluororubber or silicon rubber or a sponge made of ethylene propylene rubber such as EPDM (ethylene propylene diene monomer). In the case of an O-ring made of fluororubber or silicone rubber, it may have a hollow structure in order to give an elastic force. In the case of a hollow structure, by supplying or discharging a gas in the hollow portion, the sealing property and the contact position of other members can be adjusted.

  In the above embodiment, the first O-ring 43 and the second O-ring 44 having a convex cross section are used. However, the present invention is not limited to this, and as shown in FIG. 24, a seal member having a gently curved thin plate-shaped cross section may be used. As a result, the atmosphere in the closed space Sd is unlikely to enter the transfer space 9, and the atmosphere outside the FOUP 7 can be prevented from entering the closed space Sd.

  In the above embodiment, the first O-ring 43 and the second O-ring 44 which are separate bodies are adopted. However, as shown in FIG. 25, an integrated O-ring 43 that seals the sealed space Sd by being attached to the opening edge of the base 21, one end abutting the FOUP 7, and the other end abutting the door 51 is provided. You may adopt it. At this time, the sealed space Sd is formed by the O-ring 43 in which at least the first O-ring and the second O-ring are integrated, the lid 32, and the door 51.

  In the above-described embodiment, the lid 32 projects from the contact surface 31b of the FOUP 7 toward the load port 4 side, but this projection amount is set to ± 5 mm with respect to the designed size, for example. The amount by which the lid 32 projects when nitrogen gas is injected into the FOUP 7 is set to about 3 mm.

  In the above embodiment, the lid 32 is attached to and detached from the FOUP 7 by moving the door 51 with respect to the FOUP 7 while the lid 51 holds the lid 32. However, the present invention is not limited to these, and by mounting the lid 32 to the FOUP 7 by moving the mounting table 24 and the FOUP 7 to the position shown in FIG. 17 with the door 51 fixing the lid 32 (see FIG. 18). And it may be removed. Further, both the mounting table 24 and the door portion 51 may be moved to attach and detach the lid 32 to and from the FOUP 7. That is, the relative distance between the FOUP 7 and the lid 32 may be changed to attach and detach the lid 32.

  The present invention can also be applied to a load port that does not have the first O-ring 43 and the second O-ring 44. The configuration of this load port is the same as that of the above-described embodiment except that the first O-ring 43 and the second O-ring 44 are not provided, and thus the description thereof is omitted. That is, as in Patent Document 1 exemplified as a prior document of the present application, when the door is projected toward the external space side from the base surface of the load port, or when the pressure in the FOUP becomes high and a part of the lid body or Even when the whole is popping out to the load port side or expanding, when the door and the FOUP come into contact and collide with each other, either the door or the FOUP may tilt and the door latching operation may be properly performed. There is a problem that you cannot do it. However, by applying the present invention, by moving at least one of the door and the FOUP to the retracted position, the distance between the door and the FOUP can be relatively adjusted before the latching operation. Of course, this effect also occurs in the above embodiment in which the first O-ring 43 and the second O-ring 44 are provided.

  The present invention can also be applied to a load port provided with only one of the first O ring 43 and the second O ring 44.

4 load port 7 FOUP (container)
9 Transport Space 21 Base 32 Lid 42 Opening 43 First O-Ring (First Seal Member)
44 Second O-ring (second seal member)
51 Door (door)
Sd Closed space W Wafer (inclusion)

Claims (8)

A base that forms part of the wall that separates the transfer space from the external space,
An opening provided in the base,
A door capable of opening and closing the opening, fixing and releasing the fixation of the lid with respect to the container containing the contents,
A first seal member for sealing between the base and the container;
A second seal member for sealing between the base and the door;
Equipped with
After the container is mounted on the mounting table on which the container is mounted, the door contacts the second seal member, and the end surface of the door on the container side is the door and the second seal member. From the initial position on the container side of the contact surface, retract the door in the direction opposite to the container ,
A load port , wherein the door is in contact with the second seal member at a door retracted position where the door is retracted . The door is in the door retracted position,
When the container is in contact with the opening via the first seal member, a sealed space is formed by at least the first seal member, the second seal member, the lid, and the door,
Loading port of claim 1, wherein the sealed space after being filled with gas, characterized in that advancing the door toward the container from the retracted position. The load port according to claim 2 , wherein the door is in contact with the lid at a door forward position where the door is moved forward. The load according to any one of claims 1 to 3 , wherein a dimension of the second seal member in a direction in which the door advances and retracts is larger than a dimension of the first seal member in a direction in which the door advances and retracts. port. A base that forms part of the wall that separates the transfer space from the external space,
An opening provided in the base,
A door capable of opening and closing the opening, fixing and releasing the fixation of the lid with respect to the container containing the contents,
A first seal member for sealing between the base and the container;
A second seal member for sealing between the base and the door;
Equipped with
The container side of the door in which the container contacts the first seal member and contacts the second seal member from the mounting position after the container is mounted on a mounting table on which the container is mounted. A load port, wherein the container is advanced toward the door to a container retracted position in which an end surface of the container and the container are separated by a predetermined distance. When the container is in the container retreat position, at least a sealed space is formed by the first seal member, the second seal member, the lid, and the door,
The load port according to claim 5 , wherein after the closed space is filled with gas, the container is advanced from the container retracted position toward the door. The load port according to claim 6 , wherein the lid is in contact with the door at a container advancing position where the container is advanced. Claim 5 wherein the container is advanced, and the size of the first sealing member in a direction to retract opposite to the forward direction, the container being greater than the dimension of the second sealing member in a direction back and forth The load port according to any one of 1 to 7 .

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