TW202316547A - load port - Google Patents

Abstract

Provided is a load port which, when a front-opening unified pod (FOUP) is moved toward a door, makes it possible to prevent the FOUP and the door to contact each other, thereby preventing the removal of seal between the load port and the FOUP or the door.

Description

load port

The present invention relates to a load port capable of circulating air in a wafer transfer chamber without exposing wafers being transferred to outside air.

Conventionally, semiconductors are manufactured by applying various processes to wafers as substrates. In recent years, the high integration of components and the miniaturization of circuits have been progressing, and it is required to maintain a high degree of cleanliness around the wafer in a way that prevents the adhesion of oxygen, moisture, and dust to the surface of the wafer. Furthermore, in order to prevent changes in surface properties such as oxidation on the surface of the wafer, the periphery of the wafer is made into an inert gas, that is, a nitrogen atmosphere, or into a vacuum state.

In order to properly maintain the atmosphere around the wafer, the wafer is managed inside a closed storage container called FOUP (Front-Opening Unified Pod). is filled with nitrogen. Furthermore, it is used in a processing apparatus for processing wafers, and a load port for transferring wafers to and from FOUPs. The load port is a part of the wall that isolates the wafer processing device from the outside space, and functions as an interface between the processing device and the FOUP. The processing device and the load port are directly connected, and the other On the one hand, an EFEM (Equipment Front End Module) is also configured between the processing device and the loading port. EFEM is a wafer transfer chamber that is closed slightly inside the frame, and has a loading port that functions as an interface with the FOUP on one side of the facing wall, and is connected to an anti-processing chamber on the other side. The device and transfer room are directly connected to the common load lock room. In the wafer transfer chamber, a wafer transfer device for transferring wafers is installed. Using this wafer transfer device, wafers are carried in and out between the FOUP connected to the load port and the load lock chamber. In the wafer handling room, clean air, that is, flows downward from the fan filter unit arranged on the upper part of the handling room as a constant flow.

Furthermore, in recent years, in the cutting-edge processing of wafers, even oxygen, moisture, and the like contained in clean air used as downward flow may change the properties of wafers. Therefore, as in Patent Document 1, the practical application of a technique for circulating an inert gas in the EFEM is required.

[Prior art literature]

[Patent Document]

[Patent Document 1] Japanese Unexamined Patent Publication No. 2014-112631

However, in the loading port of Patent Document 1, the end surface of the door of the loading port protrudes toward the FOUP (container) side. Therefore, when the FOUP is moved toward the door, the FOUP and the door come into contact with each other, and there is a problem that the seal of the load port, the FOUP, or the door is released. Further, the door to the loading port Even if the end face of the FOUP does not protrude toward the FOUP side, as a result of the inert gas being injected to increase the pressure inside the FOUP, a part of the lid of the FOUP is inflated by the pressure or the entire lid protrudes toward the loading port side. would cause the same problem.

Here, the present invention is to solve the above-mentioned problems, and an object thereof is to provide a loading port that prevents the FOUP from contacting the door when the FOUP is moved toward the door, and can prevent the sealing of the loading port, the FOUP, or the door from being released.

The loading port according to the first invention is provided with: a base constituting a part of the wall that isolates the transfer space from the external space; and an opening provided on the base; and a door capable of opening and closing the opening; and a cover. The fixing of the body to the container containing the content and the release of the fixing; and the first sealing member sealing between the aforementioned base and the aforementioned container; and the second sealing member sealing between the aforementioned base and the aforementioned door; After the container is placed on the mounting table on which the container is placed, the door is in contact with the second sealing member, and the end surface of the door on the container side is closer to the contact surface of the door and the second sealing member. The initial position on the side of the container retracts the door in the direction opposite to the container.

In the present invention, after the container is placed on the mounting table, the door is in contact with the second sealing member, and the end surface of the door on the container side is closer to the container side than the contact surface of the door and the second sealing member. position, retract the door in the direction opposite to the container. Thereby, it will be accommodated until it comes into contact with the first sealing member. When the device is moved towards the door, it prevents contact between the container and the door. Therefore, it is possible to prevent the seal between the base, and the container or the door from being released.

In the loading port according to the second invention, the door is retracted at the door retreat position, and the door is in contact with the second sealing member.

In the present invention, at the door retreat position where the door is retracted, the door is in contact with the second sealing member. Thus, when the container is moved toward the door and the container contacts the first sealing member, at least the base, the first sealing member, the second sealing member, the lid, and the door can form a sealed space.

In the loading port of the third invention, when the door is at the door retreat position and the container is in a state of contacting the opening through the first sealing member, at least the first sealing member and the second sealing member , the lid, and the door form a closed space, and after the closed space is filled with gas, the door is advanced from the withdrawn position toward the container.

In the present invention, after the closed space is filled with gas, the door is advanced from the withdrawn position toward the container. Thereby, when the container and the door are approached, the door releases the fixing of the lid to the container, and the lid can be removed from the container.

In the loading port according to the fourth invention, the door is in a door advance position where the door is advanced, and the door is in contact with the cover.

In the present invention, the door is in contact with the cover at the door advancing position where the door is advanced. Thereby, the door can reliably release the fixing of the lid to the container, and the lid can be removed from the container. And the door is in contact with the cover, assuming that even if the door is tilted, the seal between the door and the second sealing member is released. In addition, the atmosphere will not invade the handling space because the enclosed space is filled with gas.

In the loading port according to the fifth invention, the dimension of the second sealing member in the direction of advancing and retreating of the door is larger than the dimension of the first sealing member in the direction of advancing and retreating of the door.

In the present invention, the dimension of the second seal member in the direction of door advance and retreat is larger than the dimension of the first seal member in the direction of door advance and retreat. Thereby, in the state where the door and the 2nd sealing member contact|abut and seal, the advance and retreat (movement) distance of a door can be ensured largely.

The loading port according to the sixth invention is provided with: a base constituting a part of a wall that isolates the transfer space from the external space; and an opening provided in the base; and a door capable of opening and closing the opening; and a cover. The fixing of the body to the container containing the content and the release of the fixing; and the first sealing member sealing between the aforementioned base and the aforementioned container; and the second sealing member sealing between the aforementioned base and the aforementioned door; After the container is placed on the mounting table on which the container is placed, the container is the container-side end surface of the door that contacts the first sealing member and the second sealing member from the mounting position, and the container. The container is advanced toward the door to a container retreat position with a predetermined interval therebetween.

In the present invention, after the container is placed on the mounting table on which the container is placed, the container is in contact with the first sealing member from the placement position, and the container-side end surface of the door that is in contact with the second sealing member is separated from the container. Advance the container toward the door until the container retreat position with a predetermined interval. Thus, when the container is moved toward the door until it abuts against the first sealing member, the container and door contacts. Therefore, it is possible to prevent the seal between the base, and the container or the door from being released.

In the loading port of the seventh invention, when the container is at the container retreat position, at least the first sealing member, the second sealing member, the lid, and the door form a sealed space, and the sealed space is filled with gas. Thereafter, the container is advanced from the container retreat position toward the door.

In the present invention, after the closed space is filled with gas, the container is advanced from the container retreat position toward the door. Thereby, when the container and the door are approached, the door releases the fixing of the lid to the container, and the lid can be removed from the container.

In the eighth invention, the loading port is in a container advance position for advancing the container, and the cover is in contact with the door.

In the present invention, the lid is in contact with the door at the container advance position where the container is advanced. Thereby, the door can reliably release the fixing of the lid to the container, and the lid can be removed from the container. Moreover, the door is in contact with the cover body. Even if the door is tilted, the seal between the door and the second sealing member is released. Since the airtight space is filled with gas, the atmosphere will not invade the transfer space.

In the loading port according to the ninth invention, the size of the first sealing member in the direction in which the container advances and retreats opposite to the advancing direction is larger than the size of the second sealing member in the direction in which the container advances and retreats.

In the present invention, the container advances in the opposite direction The size of the first sealing member in the retracting direction is larger than the size of the second sealing member in the container advancing and retreating direction. Accordingly, in a state where the container and the first sealing member are in contact with each other and sealed, a large advancing and retreating (moving) distance of the container can be ensured.

In the first invention, after the container is placed on the mounting table, the door is in contact with the second sealing member, and the end surface of the door on the container side is closer to the container side than the contact surface of the door and the second sealing member. In the initial position, retract the door in the direction opposite to the container. Thereby, when the container is moved toward the door until it comes into contact with the first sealing member, it is possible to prevent the container from coming into contact with the door. Therefore, it is possible to prevent the seal between the base, and the container or the door from being released.

In the second invention, the door is in contact with the second sealing member at the door retreat position where the door is retracted. Thus, when the container is moved toward the door and the container contacts the first sealing member, at least the base, the first sealing member, the second sealing member, the lid, and the door can form a sealed space.

In the third invention, after the closed space is filled with gas, the closed space is advanced toward the container door from the retracted position. Thereby, when the container and the door are approached, the door releases the fixing of the lid to the container, and the lid can be removed from the container.

In the fourth invention, the door is in contact with the lid body at the door advancing position where the door is advanced. Thereby, the door can reliably release the fixing of the lid to the container, and the lid can be removed from the container. And the door is in contact with the cover, assuming that even if the door is tilted, the seal between the door and the second sealing member is released. In addition, the atmosphere will not invade the handling space because the enclosed space is filled with gas.

In the fifth invention, the dimension of the second seal member in the direction of door advance and retreat is larger than the dimension of the first seal member in the direction of door advance and retreat. Thereby, in the state where the door and the 2nd sealing member contact|abut and seal, the advance and retreat (movement) distance of a door can be ensured largely.

In the sixth invention, after the container is placed on the mounting platform on which the container is placed, the container is in contact with the first sealing member from the placement position, and the container-side end surface of the door and the container that are in contact with the second sealing member are The container is advanced toward the door to the container retreat position with a predetermined interval therebetween. Thereby, when the container is moved toward the door until it comes into contact with the first sealing member, it is possible to prevent the container from coming into contact with the door. Therefore, it is possible to prevent the seal between the base, and the container or the door from being released.

In the seventh invention, after the closed space is filled with gas, the container is advanced from the container retreat position toward the door. Thereby, when the container and the door are approached, the door releases the fixing of the lid to the container, and the lid can be removed from the container.

In the eighth invention, the lid is in contact with the door at the container advance position where the container is advanced. Thereby, the door can reliably release the fixing of the lid to the container, and the lid can be removed from the container. Moreover, the door is in contact with the cover body. Even if the door is tilted, the seal between the door and the second sealing member is released. Since the airtight space is filled with gas, the atmosphere will not invade the transfer space.

In the ninth invention, the container advances in the opposite direction to the advancing direction The size of the first sealing member in the retracting direction is larger than the size of the second sealing member in the container advancing and retreating direction. Accordingly, in a state where the container and the first sealing member are in contact with each other and sealed, a large advancing and retreating (moving) distance of the container can be ensured.

2: Wafer handling device

3: frame

4: Loading port

5: Control means

7: FOUP (front opening type universal container, container)

8: Separate components

9: Moving space

10: Gas return route

11: Gas outlet

12: Gas suction port

13: Fan filter unit

13a: fan

13b: filter

15: fan

16: Gas supply means

17: Gas discharge means

18: Support member

21: base

21a: Pillars

21b: Base body

21c: window

23: Horizontal base

24: Carrying table

24a: positioning pin

24b: Locking claw

25: feet

31: Ontology

31a: opening

31b: Contact surface

32: cover body

33: Gas supply valve

34: Gas discharge valve

40: window unit

41: window frame

42: Opening

43: 1st O-ring (1st sealing member)

44: 2nd O-ring (2nd sealing member)

45: clamp unit

46: snap-in piece

47: Press cylinder

50: Opening and closing mechanism

51: door department (door)

51a: end face

52: Support frame

53:Sliding support means

54: Movable block

55: sliding track

56: Adsorption part

57: Connection means

60:Positioning sensor

70: Gas injection part

71: Gas exhaust part

73: Gas injection nozzle

74: Gas discharge nozzle

81: Door position detection sensor

82: Stage detection sensor

83: Atmosphere sensor

85: Stage drive unit

86:Door driver

87: Gripper unit drive unit

88: Gas supply device

89: Gas exhaust device

90: door push mechanism

91: Press cylinder

92: Rod

93: Roller

94: Pedestal

Sd: confined space

Sf: inner space

W: wafer (container)

[Fig. 1] A side view showing the state where the side wall of the EFEM is removed.

[Fig. 2] A perspective view of the loading port shown in Fig. 1.

[Fig. 3] A side sectional view showing the FOUP and the loading port.

[Fig. 4] An enlarged perspective view showing the main parts of the window unit and door constituting the EFEM.

[FIG. 5] A sectional view of the first O-ring of the first embodiment.

[FIG. 6] A sectional view of a second O-ring of the first embodiment.

[FIG. 7] A cross-sectional view of each member forming a closed space.

[Fig. 8] A block diagram showing the connection state of the control unit, each sensor, and each drive unit.

[FIG. 9] A flow chart of the first embodiment when taking out and taking in wafers in the FOUP.

[FIG. 10] A cross-sectional view showing a state in which FOUP is placed on a mounting table.

[FIG. 11] A cross-sectional view showing a state in which the FOUP is advanced toward the loading port from the state shown in FIG. 10 and the door is retracted.

[FIG. 12] A sectional view showing a state in which the door portion is moved toward the FOUP from the state shown in FIG. 11.

[FIG. 13] A cross-sectional view showing a state in which the opening of the loading port is opened from the state shown in FIG. 12.

[FIG. 14] A sectional view of the first O-ring of the second embodiment.

[FIG. 15] A sectional view of a second O-ring of the second embodiment.

[FIG. 16] A flowchart of the second embodiment when taking out and taking in wafers in the FOUP.

[FIG. 17] A cross-sectional view showing a state in which the FOUP is advanced to the retracted position.

[FIG. 18] A cross-sectional view showing a state in which the FOUP is further advanced toward the door from the state in FIG. 17.

[FIG. 19] A sectional view of a first O-ring according to a third embodiment.

[FIG. 20] A cross-sectional view of a second O-ring of the third embodiment.

[FIG. 21] A flow chart of the third embodiment when taking out and taking in wafers in the FOUP.

[Fig. 22] A cross-sectional view showing a state in which the FOUP is moved forward to the retracted position and the door is retracted to the retracted position.

[FIG. 23] A cross-sectional view showing a state where the FOUP and the door are approached from the state in FIG. 22.

[FIG. 24] A cross-sectional view showing a modified example of the first O-ring and the second O-ring.

[FIG. 25] A cross-sectional view showing a modified example in which the first O-ring and the second O-ring are integrated.

Hereinafter, embodiments of the present invention will be described based on attached drawings.

<The first embodiment>

Fig. 1 is a side view in which the inside of EFEM1 is visible by removing the side walls of EFEM1. As shown in FIG. 1, EFEM 1 is composed of a wafer transfer device 2 that transfers a wafer W between predetermined transfer positions, and a box-shaped frame 3 that surrounds the wafer transfer device 2. , and the loading port 4 connected to the outside of the wall on the front side of the frame body 3, and the control means 5 constitute. Here, in this case, the direction of the side connected to the loading port 4 seen from the housing 3 is defined as the front, and the direction opposite to the side connected to the loading port 4 seen from the housing 3 is defined as the rear.

By controlling the operation of the wafer transfer device 2 by the control means 5, it becomes possible to transfer the wafer (container) W accommodated in the FOUP (container) 7 placed on the loading port 4 to the inside of the housing 3 After the transport in the space 9 and the respective processes are performed, the wafer W is transported into the FOUP 7 again.

The loading port 4 is equipped with a door 51 (see FIG. 2 ), and the door 51 is connected to and moved by the cover 32 provided on the FOUP 7 to open the FOUP 7 to the transfer space 9 . In the FOUP 7, a large number of mounting sections are provided in the vertical direction, whereby a large number of wafers W can be accommodated. And, nitrogen is usually filled in FOUP7, and through the control of control means 5 The atmosphere in the FOUP 7 may be replaced with nitrogen through the loading port 4 .

The control means 5 is configured as a controller unit provided in the upper space of the casing 3 . And the control means 5 performs: the drive control of the wafer transfer device 2, the nitrogen replacement control of the FOUP 7 generated by the loading port 4, the opening and closing control of the door 51, and the nitrogen circulation control in the housing 3, etc. The control means 5 is to pre-store the necessary programs for processing in the memory by a common microprocessor with CPU, memory and interface, and the CPU takes out and executes the necessary programs successively, and communicates with the peripheral Hard resources cooperate to achieve the desired function. Note that the nitrogen cycle control will be described later.

The internal space of the housing 3 is partitioned by a partition member 8 into a transfer space 9 which is a space where the wafer transfer device 2 is driven, and a gas return path 10 . The transfer space 9 and the gas return path 10 communicate only in the gas outlet 11 extending widthwise at the upper portion of the transfer space 9 and the gas suction port 12 extending widthwise at the lower portion of the transfer space 9 . In addition, the gas delivery port 11 and the gas suction port 12 circulate the inert gas by generating a downflow in the transfer space 9 and an updraft in the gas return path 10 . In addition, in this embodiment, nitrogen is used as an inert gas, but the gas to be circulated is not limited thereto, and other gases may be used.

A gas supply means 16 for introducing nitrogen into the housing 3 is connected to an upper portion on the rear side of the return path 10 . The gas supply means 16 is capable of controlling the supply and stop of nitrogen in accordance with the command from the control means 5 . Therefore, when part of the nitrogen flows out of the frame 3, The gas supply means 16 can maintain a constant nitrogen atmosphere in the housing 3 by supplying the effluent nitrogen. Furthermore, a gas exhaust means 17 for exhausting nitrogen gas in the housing 3 is connected to the lower portion on the back side. The gas discharge means 17 operates according to commands from the control means 5, and can communicate with the inside of the frame body 3 and the nitrogen gas discharge place provided outside by opening a shutter (not shown). In addition, by using in combination with the supply of nitrogen generated by the gas supply means 16 described above, it becomes possible to replace the inside of the frame 3 with a nitrogen atmosphere or to control the pressure inside the frame 3 . Also, in this embodiment, since the gas to be circulated is nitrogen, the gas supply means 16 supplies nitrogen, but when circulating other gases, the gas supply means 16 supplies the gas to be circulated.

And the fan filter unit 13 (FFU13) which consists of the fan 13a and the filter 13b which are 1st air blowing means is provided in the gas outlet 11. As shown in FIG. The fan filter unit 13 removes the dust contained in the nitrogen gas circulating in the housing 3 , and generates a downdraft in the conveyance space 9 by blowing air downward in the conveyance space 9 . Also, the FFU 13 is supported by a support member 18 connected to the partition member 8 and extending in the horizontal direction.

And the nitrogen gas in the housing 3 descends in the transfer space 9 by the fan 13 a and the fan 15 of the FFU 13 described above, and circulates in the gas return path 10 in an ascending manner. Since the gas delivery port 11 is opened downward, the nitrogen gas is sent downward by the FFU 13 . Because the gas suction port 12 is opened upward, nitrogen gas can be sucked directly downward without disturbing the descending air flow generated by the FFU 13. Body, through these can make a smooth flow of nitrogen gas. Also, by generating a downdraft in the transfer space 9, the dust adhering to the upper portion of the wafer W and the outgas temporarily released from the processed wafer are removed, and by moving the wafer in the transfer space 9 Device 2, etc., to prevent those emitted gases and dust from floating.

FIG. 2 is a perspective view showing the loading port 4 . Next, the configuration of the load port 4 will be described.

The loading port 4 erects the base 21 vertically from the rear of the foot 25 on which casters and feet are installed, and a horizontal base 23 is provided toward the front at a height position of about 60% of the base 21 . Furthermore, on the upper part of this horizontal base part 23, the mounting table 24 for mounting FOUP7 is provided.

FOUP 7, as shown in FIG. 3, is composed of: a main body 31 having an internal space Sf for accommodating wafer W (refer to FIG. 1 ), and an opening provided on one side of main body 31 to serve as an inlet and outlet for wafer W. 31a is composed of a cover 32 that opens and closes. When the FOUP 7 is correctly placed on the mounting table 24 , the lid body 32 faces the base 21 .

Returning to FIG. 2 , positioning pins 24 a for positioning the FOUP 7 are provided on the mounting table 24 , and lock claws 24 b for fixing the FOUP 7 to the mounting table 24 are provided. The locking claws 24b can fix the FOUP 7 by performing a locking operation after the FOUP 7 is properly positioned on the mounting table 24, and can separate the FOUP 7 from the mounting table 24 by performing an unlocking operation. In addition, in the state where the FOUP 7 is placed on the stage 24, it is formed by the stage drive unit (not shown). To be able to move forward and backward.

Whether or not the FOUP 7 is positioned at an appropriate position is detected by the positioning sensor 60 disposed near the positioning pin 24a. The positioning sensors 60 are respectively disposed near each positioning pin 24a. Here, being appropriately positioned means that the height of the bottom surface of the FOUP 7 of the mounting table 24 is within a predetermined range from the upper surface of the mounting table 24 .

Moreover, in the mounting table 24, the gas injection part 70 which supplies nitrogen gas into FOUP7, and the gas exhaust part 71 which discharges nitrogen gas from inside FOUP7 are each provided in two places. The gas injection part 70 and the gas exhaust part 71 are usually located below the bottom surface of the FOUP 7 in a properly positioned state, and when in use, go in and out of the gas supply valve 33 respectively equipped with the FOUP 7 (see FIG. 3 ). ) and the gas discharge valve 34 are connected.

In use, the upper end of the gas injection part 70 is in contact with the gas supply valve 33 of the FOUP7, and similarly, the upper end of the gas exhaust part 71 is in contact with the gas discharge valve 34 of the FOUP7. Then, gas such as dry nitrogen gas can be supplied from the gas injection part 70 to the internal space Sf of the FOUP 7 through the gas supply valve 33 , and the nitrogen gas in the internal space Sf can be discharged from the gas exhaust part 71 through the gas discharge valve 34 . In addition, the positive pressure setting may be such that the pressure of the internal space Sf is increased with respect to the pressure of the outside and the conveyance space 9 of the housing 3 by increasing the nitrogen gas supply amount more than the nitrogen gas discharge amount.

The base 21 constituting the loading port 4 is a part constituting a front wall that isolates the transfer space 9 from the external space. As shown in Figure 2, the base 21 is composed of: pillars 21a, 21a erected on both sides, and supported thereby. The base body 21b and the window unit 40 in which the base body 21b is attached to the window portion 21c opened in a substantially rectangular shape are constituted. Here, the approximate rectangle in this case refers to a shape in which four corners are smoothly connected by circular arcs while taking a rectangle having four sides as a basic shape.

The window unit 40 is provided at a position facing the cover body 32 (see FIG. 3 ) of the above-mentioned FOUP 7 . The window unit 40 is provided with a substantially rectangular opening 42 (see FIG. 4 ) as will be described in detail later, so that the transport space 9 of the housing 3 can be opened through the opening 42 .

The window unit 40 is composed of: a window frame portion 41, a first O-ring (first sealing member) 43 of elastic material mounted thereto, a second O-ring (second sealing member) 44, and a first O-ring The ring 43 is constituted by the pinch unit 45 of the pulling means for the FOUP 7 to closely adhere to the window frame portion 41 .

The window frame portion 41 has a frame shape in which a substantially rectangular opening 42 is formed. The window frame portion 41 is a part of the above-mentioned base 21 (see FIG. 2 ) as a component of the window unit 40 , so the opening portion 42 can open the front wall of the frame body 3 .

On the front surface of the window frame portion 41 , a first O-ring 43 is arranged so as to go around around the periphery of the opening portion 42 . On the rear surface of the window frame portion 41 , a second O-ring 44 is arranged around the vicinity of the periphery of the opening portion 42 .

Fig. 5 is a cross-sectional view showing the first O-ring 43 cut in a direction perpendicular to the longitudinal direction of the first O-ring 43, and Fig. 6 is a cross-sectional view perpendicular to the longitudinal direction of the second O-ring 44. A cross-sectional view of the second O-ring 44 cut in the direction of FIG. 1st O-ring 43 and 2nd O-ring 44 The cross-sectional shape is convex. In the figure, arrows indicate the front-rear direction of the window unit 40 , that is, the advancing and retreating direction of the FOUP 9 and the door portion 51 which will be described later. The dimension L1 is a dimension indicating the height of the first O-ring 43 in the advancing and retreating direction of the door portion 51 . The dimension L2 is a dimension indicating the height of the second O-ring 44 in the advancing and retreating direction of the door portion 51 . That is, in this embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43 .

The opening 42 is slightly larger than the outer circumference of the cover 32 of the FOUP 7 , and the cover 32 can move through the opening 42 . And, in the state where the FOUP 7 is placed on the mounting table 24, the front surface of the main body 31 forming the periphery of the cover body 32 as shown in FIG. The front of the base 21) abuts. Accordingly, when the FOUP 7 is attached to the window unit 40 , the first O-ring 43 seals (closes) the periphery of the opening 42 (base 21 ) and the FOUP 7 . In this sealed (closed) state, as shown in FIG. 7, the abutment surface 31b is a plane extending toward the outer periphery of the cover surface located on the door portion 51 side of the cover body 32 and the FOUP 7 side of the cover body 32. Between the planes extending toward the periphery on the back of the cover.

Furthermore, on the rear surface of the window frame portion 41 , the above-mentioned door portion 51 abuts through the second O-ring 44 . Thus, the second O-ring 44 seals between the peripheral edge of the opening 42 and the door 51 .

The pinch unit 45 is provided at a total of four places separated in the vertical direction on both sides of the window frame portion 41 . Each pinch unit 45 is roughly constituted by an engaging piece 46 and a press cylinder 47 for actuating this, and the FOUP 7 is pressed toward the base 21 side while the FOUP 7 is attached to the window unit 40 .

In addition, when the engaging piece 46 protrudes forward, its tip is directed upward, and when it is pulled in backward, the tip is directed toward the inner FOUP 7 . The engaging piece 46 can be engaged with the flange portion protruding laterally from the FOUP 7 by turning the tip end of the engaging piece 46 inward by the clamp operation.

Furthermore, the loading port 4 is provided with an opening and closing mechanism 50 for opening and closing the window unit 40 constituting the mountable FOUP 7 .

As shown in FIG. 3, the opening and closing mechanism 50 is equipped with: a door 51 for opening and closing the opening 42, a support frame 52 for supporting this, and the support frame 52 can move forward and backward through a sliding support means 53. The movable block body 54 supported by ground, and the slide rail 55 which supports this movable block body 54 movably in an up-down direction with respect to the base main body 21b.

The door part 51 is provided with: the suction part 56 (see FIG. 4 ) for sucking the lid body 32 of the FOUP7, the locking operation for opening and closing the lid body 32 of the FOUP7, and the connecting means for holding the lid body 32 57. The door portion 51 fixes and releases the cover 32 , and enables the cover 32 to be detached and attached from the FOUP 7 . In the connection means 57 , the cover 32 can be opened by performing the unlocking operation of the cover 32 , and the cover 32 and the door 51 can be connected and integrated. On the contrary, in the connecting means 57, the connection between the cover 32 and the door 51 is released by performing the locking operation of the cover 32, and the cover 32 may be attached to the main body 31 to be in the closed state.

As shown in FIG. 3, in the door part 51, it is provided that when the FOUP7 is installed on the window unit 40, nitrogen gas is injected between the FOUP7 and the door part 51. A gas injection nozzle 73 for the body, and a gas discharge nozzle 74 for discharging nitrogen gas between the FOUP 7 and the door portion 51 . The upper end of the gas injection nozzle 73 extends to the outer surface of the door portion 51, and the lower end is connected to a gas supply device (not shown). Similarly, the upper end of the gas discharge nozzle 74 extends to the outer surface of the door portion 51, and the lower end is connected to a gas discharge device (not shown). In the state where the FOUP 7 and the door portion 51 are integrated by the clamp unit 45, the gas injection nozzle 73 supplies nitrogen in communication with the closed space Sd (see FIG. 7 ), and the gas discharge nozzle 74 supplies nitrogen by communicating with the closed space Sd. Connected to discharge nitrogen, the closed space Sd can be replaced and filled with nitrogen.

Furthermore, actuators (not shown) for moving the door 51 in the front-rear direction and in the up-and-down direction are provided in each direction, and by giving these drive commands from the control unit Cp, it is possible to The door portion 51 is moved in the front-back direction and the up-down direction. In this way, the loading port 4 operates by giving a drive command to each part through the control part Cp.

As shown in FIG. 8 , the input side of the control unit Cp is connected to the positioning sensor 60 , the door position detection sensor 81 , the stage detection sensor 82 , and the atmosphere sensor 83 . The positioning sensor 60 detects whether or not the FOUP 7 is positioned at an appropriate position on the mounting table 24 . The door position detection sensor 81 detects the forward and backward position of the door portion 51 . The stage detection sensor 82 detects the position of the advancing and retreating direction of the stage 24 . The atmosphere sensor 83 detects the humidity and oxygen concentration in the closed space Sd, and detects whether the closed space Sd is replaced with nitrogen.

The output side of the control part Cp is connected with the stage driving part 85 The gate drive unit 86 and clamp unit drive unit 87 are connected to the gas supply device 88 and the gas discharge device 89 . The gas supply device 88 is connected to the gas injection nozzle 73, and supplies nitrogen to the sealed space Sd. The gas discharge device 89 is connected to the gas discharge nozzle 74, and discharges nitrogen from the closed space Sd.

Next, the operation of the FOUP 7 and the door portion 51 in the case of using the loading port 4 of the first embodiment will be described.

First, in step S1 shown in FIG. 9 , the unmanned overhead transport machine (not shown) places the FOUP 7 on the container delivery position of the loading table 24 . The container delivery position refers to a position where the FOUP 7 can be placed on the mounting table 24 within the moving range of the mounting table 24 .

At this time, as shown in FIG. 10, the door part 51 is arrange|positioned at the door closing position. The door closed position means that the door portion 51 is in contact with the second sealing member 44, and the end surface 51a of the door portion 51 on the FOUP7 side is located closer to the FOUP7 side than the contact surface of the door portion 51 and the second sealing member 44. Location. Specifically, the end surface 51 a of the door portion 51 is located closer to the FOUP 7 side than the base 21 of the loading port 4 , and is within the range of the dimension in the front-rear direction of the first O-ring 43 .

In step S2 , the positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24 . If FOUP7 is not positioned properly, it will repeatedly send an error message to the upper controller.

If the FOUP 7 is properly positioned, it proceeds to step S3, and the door drive unit 86 retracts the door 51 in the direction opposite to the FOUP 7 from the door closing position to the door retreat position (see FIG. 11 ). door retreat The position refers to a position where the door portion 51 is retracted in the direction opposite to the FOUP 7 from the door closed position (initial position), and the door portion 51 is in contact with the second sealing member 44 . The door portion 51 advances from the rear of the loading port 4 toward the front, and retracts from the front of the loading port 4 toward the rear. These advancing and retreating directions are horizontal directions. By retracting the door portion 51, the second O-ring 44 is more elongated than in FIG. 10 . Whether or not the door portion 51 has retracted to the door retracted position is detected by the door position detection sensor 81 .

In step S4, the stage drive unit 85 advances the stage 24 and the FOUP 7 from the container receiving position to the door opening and closing position (see FIG. 11 ). The door opening and closing position refers to a position where the lid body 32 of the FOUP 7 is fixed or released by the connecting means 57 and the lid body 32 is attached or detached within the moving range of the door portion 51 . The movement amount of FOUP 7 from the container delivery position to the door opening and closing position was 71 mm. Whether or not the mounting table 24 moves toward the door opening and closing position is detected by the mounting table detection sensor 82 . When the stage detection sensor 82 detects that the stage 24 is in the door opening/closing position, the pinch unit 45 is actuated by a signal from the pinch unit driving portion 87 . As a result, the FOUP 7 is brought closer to the loading port 4 side, and the sealing properties of the FOUP 7, the base 21, and the first O-ring 43 are improved. Also, the FOUP 7 advances from the front of the loading port 4 toward the rear, and retreats (retreats) from the rear of the loading port 4 toward the front. These advancing and retreating directions are horizontal directions.

The door portion 51 is located at the door retreat position, and when the FOUP 7 contacts the window frame portion 41 of the loading port 4 through the first O-ring 43 at the door opening and closing position, a closed space Sd is formed. This airtight space Sd, is by base 21, The first sealing member 43 , the second sealing member 44 , the lid body 32 , the FOUP 7 , and the door portion 51 are formed. And in step S5 , the closed space Sd is replaced with nitrogen gas from the atmosphere through the gas injection nozzle 73 and the gas discharge nozzle 74 . Whether or not the closed space Sd is replaced with nitrogen gas is detected by the atmosphere sensor 83 .

Thereafter, in step S6, the door driver 86 advances the door 51 toward the FOUP 7 from the door retreat position to the door opening and closing position (door advance position) (see FIG. 12 ). When the door 51 is at the door opening and closing position, the door 51 and the cover 32 are in contact, and the connecting means 57 releases the fixing of the cover 32 to the FOUP 7 to hold the cover 32 . In addition, the distance between the door retreat position and the door opening and closing position is set to 3 mm.

In step S7, the door driver 86 moves the door 51 and the cover 32 held by the door 51 from the door opening and closing position to the door opening position, and opens the opening 42 of the loading port 4 (see FIG. 13 ). . The door open position refers to a position where the opening 42 is opened and the wafer transfer device 2 can enter and exit the FOUP 7 . In this state, the wafer transfer apparatus 2 carries out taking out and taking in the wafer W in the FOUP 7 .

When the unloading and loading of the wafer W is completed, in step S8 , the door drive unit 86 moves the door unit 51 from the door open position to the door open and close position. At this time, the connecting means 57 is for attaching and fixing the cover body 32 to the FOUP 7 . Then, the fixation of the FOUP 7 and the loading port 4 by the clamp unit 45 is released, and in step S9, the stage driving unit 85 retreats the stage 24 and the FOUP 7 to the container receiving position.

[Characteristics of the load port of the present embodiment]

The loading port 4 of this embodiment has the following features.

In the loading port 4 of the present embodiment, after the FOUP 7 is placed on the mounting table 24, the door 51 is in contact with the second sealing member 44, and the end surface 51a on the FOUP 7 side of the door 51 is located at a lower position than the door 51. The contact surface of the second seal member 44 is closer to the initial position of the FOUP 7 side, and the door portion 51 is retracted in the direction opposite to the FOUP 7 . Thereby, when the FOUP 7 is moved toward the door 51 until it contacts the first sealing member 43 , contact between the FOUP 7 and the door 51 can be prevented. Therefore, even if the FOUP 7 or the door 51 is pushed out or tilted by contact, it is possible to prevent the seal between the base 21 and the FOUP 7 or the door 51 from being released.

In the loading port 4 of the present embodiment, the door portion 51 is in contact with the second sealing member 44 at the door retreat position where the door portion 51 is retracted. Thus, when the FOUP 7 is moved toward the door portion 51, when the FOUP 7 abuts against the first sealing member 43, it can be formed by at least the base, the first sealing member 43, the second sealing member 44, the cover body 32, and the door portion 51. Confined Space Sd.

In the loading port 4 of this embodiment, after the closed space Sd is filled with nitrogen gas, the door part 51 is advanced toward the FOUP 7 from the retracted position. Thereby, the FOUP 7 and the door 51 are approached, and the fixing of the lid 32 to the FOUP 7 is released by the connecting means 57 of the door 51 , so that the lid 32 can be detached from the FOUP 7 .

In the loading port 4 of the present embodiment, the door portion 51 is in contact with the cover body 32 at the door advance position where the door portion 51 is advanced. Thus, the release of the fixation of the lid body 32 of the FOUP 7 can be achieved by the connecting means of the door 51. 57, the lid body 32 can be removed from the FOUP7. And the door portion 51 contacts the cover body 32, even if the door portion 51 is inclined to release the seal between the door portion 51 and the second sealing member 44, since the sealed space Sd is filled with nitrogen gas, the atmosphere does not Will invade the handling space9.

In the loading port 4 of this embodiment, the size of the second sealing member 44 in the direction in which the door 51 advances and retreats is larger than the dimension of the first sealing member 43 in the direction in which the door 51 advances and retreats. Thereby, in the state where the door part 51 and the 2nd sealing member 44 contact|abut and seal, the advance and retreat (movement) distance of the door part 51 can be ensured largely.

<Second embodiment>

In the second embodiment, for example, each structure of the loading port 4 is the same as that of the first embodiment, so description thereof will be omitted. However, in the first embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43 . However, as shown in FIGS. 14 and 15, the second embodiment differs from the first embodiment in that the dimension L1 of the first O-ring 43 is larger than the dimension L2 of the second O-ring 44 .

Next, the operation of the FOUP 7 and the door 51 in the case of using the loading port 4 of the second embodiment will be described. In addition, since the definition of each position of the FOUP 7 such as the container receiving position and the door portion 51 such as the door closing position is the same as that of the first embodiment, description thereof will be omitted.

First, in step S1 shown in FIG. 16 , the overhead traveling type unmanned transporter (not shown) loads the FOUP 7 on the container delivery position of the loading table 24 .

At this time, as shown in FIG. 17, the door portion 51 is arranged at the door closed position, and the door clamping by the door pushing mechanism 90 is actuated. The door pushing mechanism 90 is arranged in plural on the wall surface of the base 21 on the side of the conveyance space 9 and along the opening peripheral edge of the opening 42 . The door pushing mechanism 90 is mainly composed of a cylinder 91 , a rod 92 that can protrude from the cylinder 91 , and a roller 93 rotatably provided at the tip of the rod 92 . The cylinder 91 is attached to the pedestal 94 so that the roller 93 is in proper contact with the door portion 51 and can be arranged obliquely from the base 21 . By abutting the roller 93 appropriately on the door portion 51 , the sealing performance by the base 21 , the door portion 51 and the second O-ring 44 can be improved.

In step S2 , the positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24 . Repeat if FOUP7 is not properly positioned.

If the FOUP 7 is properly positioned, proceed to step S3. In step S3, the mounting table 24 and the FOUP 7 advance toward the door 51 from the container receiving position to the container retracting position (see FIG. 17 ). The container retracted position is a position where the FOUP 7 is in contact with the first O-ring 43 and the end surface of the door 51 on the FOUP 7 side, which is in contact with the second O-ring 44 , is at a predetermined distance from the FOUP 7 . In addition, the container withdrawal position is located between the container opening and closing position and the container receiving and receiving position which will be described later.

At this time, since the airtight space Sd is formed, the airtight space Sd is filled with nitrogen gas replaced by the gas injection nozzle 73 and the gas discharge nozzle 74 in step S4.

In step S5, the stage driving unit 85 retreats from the container The mounting table 24 and the FOUP 7 are advanced toward the door portion 51 from the position to the container opening and closing position (container advancing position) (see FIG. 18 ). The container opening and closing position refers to a position where the wafer transfer device 2 can take out the wafer W in the FOUP 7 through the opening 42 within the moving range of the mounting table 24 . When the FOUP 7 is in the container opening and closing position, the door 51 and the cover 32 are in contact, and the connecting means 57 releases the fixing of the cover 32 to the FOUP 7 to hold the cover 32 . The movement amount of the FOUP 7 from the container retreat position to the container opening and closing position is set to 8mm.

Thereafter, the door clamping is released, and in step S6, the door portion 51 and the cover body 32 are moved from the door opening and closing position toward the door opening position. In this state, the wafer transfer apparatus 2 carries out taking out and taking in the wafer W in the FOUP 7 .

When the unloading and loading of the wafer W is completed, the process proceeds to step S7. In step S7, the door drive part 86 moves the door part 51 from a door opening position to a door opening and closing position. At this time, the connecting means 57 attaches the cover body 32 to the FOUP 7 and performs the operation of pinching the door.

Then, the fixation of the FOUP 7 and the loading port 4 by the clamp unit 45 is released, and in step S8, the stage driving unit 85 retreats the stage 24 and the FOUP 7 to the container receiving position.

[Characteristics of the load port of the present embodiment]

The loading port 4 of this embodiment has the following features.

In the loading port 4 of the present embodiment, the FOUP 7 is placed behind the loading table 24 on which the FOUP 7 is placed, and the FOUP 7 is loaded from the loading position. The FOUP 7 is advanced toward the door 51 until the end surface of the door 51 on the FOUP 7 side that is in contact with the first O-ring 43 and the second O-ring 44 and the FOUP 7 are container retreat positions at a predetermined interval. Accordingly, when the FOUP 7 is moved toward the door portion 51 until it comes into contact with the first O-ring 43 , contact between the FOUP 7 and the door portion 51 can be prevented. Therefore, even if the FOUP 7 or the door 51 is tilted by contact, it is possible to prevent the seal between the base 21 and the FOUP 7 or the door 51 from being released.

In the loading port 4 of the present embodiment, after the sealed space Sd is filled with nitrogen gas, the FOUP 7 is advanced from the container retreat position toward the door 51 . As a result, the FOUP 7 and the door 51 are approached, and the fixing of the cover 32 to the FOUP 7 is released by the suction portion 56 of the door 51 , so that the cover 32 can be detached from the ROUP 7 .

In the loading port 4 of this embodiment, the lid body 32 is in contact with the door portion 51 at the container advance position where the FOUP 7 is advanced. Accordingly, the fixing of the lid body 32 to the FOUP 7 can be reliably released by the suction portion 56 of the door portion 51 , and the lid body 32 can be detached from the FOUP 7 . And the door 51 is contacted with the cover body 32, even if the seal between the door 51 and the second O-ring 44 is released assuming that the door 51 is inclined, the air will not be released because the closed space Sd is filled with nitrogen gas. Invasion of the handling space9.

<Third embodiment>

In the third embodiment, for example, each structure of the loading port 4 is the same as that of the first embodiment, so description thereof will be omitted. However, in the first embodiment, the dimension L2 of the second O-ring 44 is larger than the dimension L1 of the first O-ring 43 . but In the third embodiment shown in FIG. 19 and FIG. 20, the point that the dimension L1 of the first O-ring 43 and the dimension L2 of the second O-ring 44 are substantially equal is different from the first embodiment.

Next, the operation of the FOUP 7 and the door 51 in the case of using the loading port 4 of the third embodiment will be described. In addition, since the definition of each position of the FOUP 7 such as the container receiving position and the door portion 51 such as the door closing position is the same as that of the first embodiment, description thereof will be omitted.

First, in step S1 shown in FIG. 21 , the overhead traveling type non-entry transfer machine (not shown) places the FOUP 7 on the container receiving and receiving position of the placing table 24 .

In step S2 , the positioning sensor 60 detects whether the FOUP 7 is positioned at an appropriate position on the mounting table 24 . Repeat if FOUP7 is not properly positioned.

If the FOUP 7 is properly positioned, it proceeds to step S3, and the door portion 51 is retracted from the door closed position to the door retracted position (see FIG. 22). Simultaneously or with a delay, the mounting table 24 and the FOUP 7 are advanced from the container receiving position to the container retracting position in step S4. Therefore, in a state where the door 51 is in contact with the second O-ring 44 and the FOUP 7 is in contact with the first O-ring 43 , contact between the door 51 and the cover 32 can be reliably prevented. Also, the distance between the door closing position and the door retreat position is preferably 4 mm or less.

At this time, since the closed space Sd is formed, the closed space Sd is filled with nitrogen gas replaced from the atmosphere by the gas injection nozzle 73 and the gas discharge nozzle 74 in step S5.

Next, in step S6, the mounting table 24 and the FOUP 7 are brought close to the door portion 51 from the container mounting position. In other words, the mounting table 24 and the FOUP 7 are advanced toward the door 51 . Simultaneously with this, in step S7, the door part 51 is approached to FOUP7 from a door retreat position. In other words, the door portion 51 is advanced toward the FOUP 7 .

Through step S6 and step S7, as shown in FIG. 23, the cover body 32 and the door part 51 contact. At this time, by setting the driving force of the stage driver 85 and the closing force of the door 51 of the door driver 86 to be equal, even if the lid 32 and the door 51 are in contact, the lid 32 and the door 51 can be prevented from collapsing. Either one of the portions 51 is inclined.

In a state where the lid body 32 and the door portion 51 are in contact, the fastening means 57 releases the fixing of the lid body 32 to the FOUP 7 and holds the lid body 32 .

And in step S8, the door drive part 86 moves the door part 51 and the cover body 32 to a door opening position. After the operation in step S8 is completed or in conjunction with the operation, the mounting table 24 is advanced toward the door portion 51 and moved to a predetermined position where the wafer W can be taken out. In this state, the wafer transfer apparatus 2 carries out taking out and taking in the wafer W in the FOUP 7 .

When the unloading and loading of the wafer W is completed, the process proceeds to step S9. In step S7, the door drive part 86 moves the door part 51 from a door opening position to a door opening and closing position. At this time, the connecting means 57 is for attaching the cover body 32 to the FOUP 7 and performing the operation of pinching the door.

And the fixation of FOUP 7 and loading port 4 generated by clamp unit 45 is released, and in step S10, placing table driving unit 85 will place the The platform 24 and the FOUP7 retreat to the receiving and receiving position of the container.

As mentioned above, although the embodiment of this invention was demonstrated based on drawing, the specific structure is not limited to these embodiment. The scope of the present invention is not limited to the description of the above-mentioned embodiments but is shown by the claims, and all modifications within the meaning and scope equivalent to the claims are included.

The loading port 4 of the foregoing embodiment is located at the EFEM1. However, it is not limited to these, and it can be applied directly to a processing device without passing through EFEM1, or a sorter device for exchanging or transposing the wafer W in the FOUP7, or temporarily transferring the wafer W in the FOUP7. Storage facility for safekeeping.

In the foregoing embodiments, the FOUP 7 was used as an example for the container, but it is not limited thereto. For example, MAC (Multi Application Carrier) and FOSB (Front Opening Shipping Box) which are used for wafer handling may be used as containers. In addition to wafer transfer, the present invention may be applied to containers for transferring articles to be maintained in a predetermined environment different from the outside air.

In the above-mentioned embodiments, although the wafer W was exemplified as the content stored in the container, it is not limited thereto. For example, it is also possible to store substrates used for electronic components and flat-panel displays, cell culture containers for storing cells, and the like.

In the foregoing examples, nitrogen was used as the gas, but it is not limited thereto. For example, desired ambient gases such as dry gas and argon gas can be used.

In the foregoing embodiments, whether the door portion 51 has retracted to the door retracted position is detected by the door position detection sensor 81 . However, it is not limited thereto, and detection may be performed from the drive state of the door drive unit 86, or whether or not a predetermined time has elapsed may be detected by a timer.

In the foregoing embodiments, whether the stage 24 moves toward the base position is detected by the stage detection sensor 82 . However, it is not limited thereto, and it may be detected by a signal from the stage drive unit 85, or whether or not a predetermined time has elapsed may be detected by a timer.

In the foregoing embodiments, whether the closed space Sd is replaced with nitrogen gas is detected by the atmosphere sensor 83 . However, it is not limited to this, and it is also possible to detect whether or not a predetermined time has elapsed by a timer.

In the foregoing embodiment, after the FOUP 7 is placed on the mounting table 24, nitrogen gas is ejected from the gas injection part 70 while the mounting table 24 is moving forward to the container opening and closing position or the container retreat position. However, it is not limited thereto, and the atmosphere around the door portion 51 may be exhausted from the gas exhaust portion 71 at the same time.

The material of the first O-ring 43 and the second O-ring 44 is not particularly limited. The sealing member is preferably an elastic member such as an O-ring made of fluororubber or silicon rubber, and a sponge made of ethylene propylene rubber such as EPDM (ethylene propylene diene monomer). In the case of O-rings made of fluororubber and silicone rubber, hollow structures are also possible because they have elasticity. In the case of a hollow structure, the airtightness and the contact position with other members can be adjusted by supplying or discharging gas into the hollow portion.

In the foregoing embodiments, the 10th O with a convex cross-section is used. Ring 43 and the second O-ring 44. However, it is not limited thereto, as shown in FIG. 24 , a sealing member having a gently curved thin plate-shaped cross section may be used. Thereby, the atmosphere in the sealed space Sd is less likely to intrude into the conveyance space 9 , and it is possible to prevent outside air from entering the sealed space Sd from the FOUP 7 .

In the foregoing embodiments, separate first O-rings 43 and second O-rings 44 are used. However, as shown in FIG. 25 , an integral O-shape that seals the closed space Sd is adopted by being mounted on the opening edge of the base 21 so that one end abuts the FOUP 7 and the other end abuts the door 51 . Ring 43 is also possible. At this time, the sealed space Sd is formed by at least the O-ring 43 which integrated the 1st O-ring and the 2nd O-ring, the cover body 32, and the door part 51. As shown in FIG.

In the aforementioned embodiment, although the cover body 32 protrudes from the abutting surface 31b of the FOUP 7 toward the loading port 4 side, the protruding amount is set to, for example, ±5 mm from the designed dimension. In addition, the amount by which the lid body 32 protrudes when nitrogen gas is injected into the FOUP 7 is set to about 3 mm.

In the aforementioned embodiment, the attachment and detachment of the cover 32 to the FOUP 7 is performed by moving the door 51 to the FOUP 7 in a state where the door 51 holds the cover 32 . However, it is not limited to these. In the state where the door 51 fixes the lid 32 (see FIG. 18), by moving the mounting table 24 and the FOUP 7 to the position shown in FIG. 17, the lid 32 is fixed to the FOUP 7 It is also possible to install and remove it. Furthermore, both the mounting table 24 and the door part 51 may be moved, and the cover body 32 may be attached to and detached from the FOUP 7 . That is, it is preferable to perform attachment and detachment of the cover body 32 by changing the relative distance between the FOUP 7 and the cover body 32 .

The present invention can also be applied to a loading port where the first O-ring 43 and the second O-ring 44 are not provided. In this loading port, the configuration other than the first O-ring 43 and the second O-ring 44 is not provided, and since it is the same as that of the above-mentioned embodiment, description thereof will be omitted. That is to say, Patent Document 1, which is exemplified as a prior document of this case, has a case where the door protrudes toward the outer space side than the base surface of the loading port, or the pressure in the FOUP increases so that a part of the cover body or When all of the FOUPs jump out or expand toward the loading port side, when the door and the FOUP come into contact with each other, either the door or the FOUP is tilted, and the locking action of the door cannot be performed properly. However, applying the present invention, by moving at least one of the door and the FOUP toward the withdrawn position, the distance between the door and the FOUP can be relatively adjusted before the locking action. Of course, this effect can also be produced in the aforementioned embodiment in which the first O-ring 43 and the second O-ring 44 are provided.

Furthermore, the present invention can also be applied to a loading port provided with only either one of the first O-ring 43 and the second O-ring 44 .

Sd: confined space

Sf: inner space

4: Loading port

7: FOUP (container)

9: Moving space

21: base

24: Carrying table

31: Ontology

31a: opening

31b: Contact surface

32: cover body

40: window unit

41: window frame

42: Opening

43: 1st O-ring (1st sealing member)

44: 2nd O-ring (2nd sealing member)

51: door department (door)

51a: end face

73: Gas injection nozzle

74: Gas discharge nozzle

Claims (5)

A loadport having: a base forming part of a wall separating the handling space from the external space; and provided in the opening of the aforementioned base; and a mounting table for placing the container containing the content on the container receiving position and moving the container forward and backward relative to the opening; and The door is capable of: opening and closing the opening, and fixing and releasing the cover to the container on the mounting table; and a first sealing member on the side of the container that seals between the base and the container; and a second sealing member on the transport space side that seals between the base and the door; The mounting table on which the container is placed is moved forward toward the opening, and the mounting table moves from the container receiving position to a position where a predetermined interval is provided between the lid body of the container and the container-side end surface of the door portion. That is, when the container advances toward the door from the retracted position, the gas is injected into the portion separated by a predetermined interval through the gas injection nozzle provided on the door. As in the load port of claim 1, wherein, The aforementioned door portion is further provided with a gas discharge nozzle, The gas injection nozzle injects nitrogen gas into the portion with a predetermined interval, and the gas discharge nozzle discharges nitrogen gas from the portion with a predetermined interval. As in the load port of claim 1, wherein, The opening and closing position of the container is a position where the content in the container can be taken out through the opening, and the retracting position of the container is located between the receiving and receiving position of the container and the opening and closing position of the container. As in the load port of claim 1, wherein, It further includes a door pushing mechanism for pushing the door portion toward the base so that the sealing performance between the base and the door portion can be improved by the second sealing member. As in the load port of claim 1, wherein, It further includes a pinch unit for pressing the container toward the base, so that the sealing performance between the base and the container can be improved by the first sealing member.

Images