JP6686134B2 - 加熱器の寿命及び性能を強化するための一体型装置及び方法 - Google Patents
加熱器の寿命及び性能を強化するための一体型装置及び方法 Download PDFInfo
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- JP6686134B2 JP6686134B2 JP2018516712A JP2018516712A JP6686134B2 JP 6686134 B2 JP6686134 B2 JP 6686134B2 JP 2018516712 A JP2018516712 A JP 2018516712A JP 2018516712 A JP2018516712 A JP 2018516712A JP 6686134 B2 JP6686134 B2 JP 6686134B2
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- leakage current
- resistance heater
- heater
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- dielectric
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- 238000000034 method Methods 0.000 title claims description 15
- 230000002708 enhancing effect Effects 0.000 title 1
- 239000003989 dielectric material Substances 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 230000015556 catabolic process Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0014—Devices wherein the heating current flows through particular resistances
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/0288—Applications for non specified applications
- H05B1/0291—Tubular elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
- H05B3/48—Heating elements having the shape of rods or tubes non-flexible heating conductor embedded in insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/012—Heaters using non- flexible resistive rods or tubes not provided for in H05B3/42
Landscapes
- Control Of Resistance Heating (AREA)
- Testing And Monitoring For Control Systems (AREA)
Description
12 抵抗加熱器
14 抵抗要素
16 誘電材料
18 金属シース
20 保護層
22 加熱器動作制御モジュール
24 誘電パラメータ測定モジュール
26 診断モジュール
28 予測モジュール
29 温度計測モジュール
30 漏れ電流監視モジュール
34 障害検出制御(FDC)モジュール
50 漏れ電流計測用の一体型装置
Claims (17)
- 抵抗加熱器の動作を制御するための制御システムであって、
前記抵抗加熱器がアクティブモードにあるときに当該抵抗加熱器の誘電材料を通る漏れ電流に関連した誘電パラメータ、を測定するための誘電パラメータ測定モジュールと、
前記漏れ電流に基づいて前記抵抗加熱器の推定寿命を予測するための予測モジュールと、
前記漏れ電流及び前記推定寿命に基づいて前記抵抗加熱器の動作を変更するための加熱器動作制御モジュールと、
を備えている制御システム。 - 前記誘電パラメータ測定モジュールは、前記抵抗加熱器の前記誘電材料を通る前記漏れ電流を監視するためのトランスデューサーを含む監視モジュールを更に含んでいる、請求項1に記載の制御システム。
- 前記監視モジュールは前記漏れ電流の変化を測定する、請求項2に記載の制御システム。
- 前記漏れ電流と閾値漏れ電流の比較に基づいて前記抵抗加熱器の性能を判定する診断モジュールを更に備える、請求項1乃至3のいずれか一項に記載の制御システム。
- 前記診断モジュールは、前記漏れ電流が前記閾値漏れ電流に達したときに警告信号を生成する障害検出制御モジュールを更に含んでいる、請求項4に記載の制御システム。
- 前記予測モジュールは、前記漏れ電流と前記推定寿命と前記抵抗加熱器の動作温度との間の相関を含んでいる、請求項1乃至5のいずれか一項に記載の制御システム。
- 前記予測モジュールは前記相関に基づいて前記推定寿命を求める、請求項6に記載の制御システム。
- 前記加熱器動作制御モジュールが、前記漏れ電流に基づいて、動作温度と立ち上がり速度と立ち下がり速度とのうちの少なくとも一つを変更することによって、前記抵抗加熱器を動作させるようにされた、請求項1乃至7の何れか一項に記載の制御システム。
- 抵抗加熱器を制御するための方法であって、
前記抵抗加熱器の誘電材料を通る漏れ電流を測定する段階と、
前記漏れ電流に基づいて前記抵抗加熱器の推定寿命を予測する段階と、
前記漏れ電流及び前記推定寿命に基づいて前記抵抗加熱器を制御する段階と、
を備えている方法。 - 前記漏れ電流と、前記抵抗加熱器の動作温度と、動作時間との間の相関を予め判定する段階を更に備えている、請求項9に記載の方法。
- 前記漏れ電流に基づいて、動作温度と立ち上がり速度と立ち下がり速度とのうちの少なくとも一つを変更することによって、前記抵抗加熱器を制御する段階を更に備えている、請求項9又は10に記載の方法。
- 前記漏れ電流を動作温度及び動作時間に相関させる段階を更に備えている、請求項9乃至11のいずれか一項に記載の方法。
- 閾値漏れ電流を確立して、前記漏れ電流が前記閾値漏れ電流に達したときに加熱器損傷を判定する段階、を更に備えている請求項9乃至12のいずれか一項に記載の方法。
- 動作温度と誘電パラメータと時間との間の相関を事前に記憶しておく段階を更に備えている、請求項9乃至13のいずれか一項に記載の方法。
- 前記相関に基づいて、前記抵抗加熱器の前記推定寿命を予測する段階を更に備えている、請求項14に記載の方法。
- 所与の温度と時間での前記抵抗加熱器の前記推定寿命を動的に予測するために、数式又はアルゴリズムを予測モジュールに設定する段階を更に備えている、請求項9乃至15のいずれか一項に記載の方法。
- 誘電パラメータの変化及び相関係数を診断及び故障検出制御(FDC)のためのフィードバックとして提供する段階、を更に備えている請求項9乃至16のいずれか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562235719P | 2015-10-01 | 2015-10-01 | |
US62/235,719 | 2015-10-01 | ||
PCT/US2016/055131 WO2017059409A1 (en) | 2015-10-01 | 2016-10-03 | Integrated device and method for enhancing heater life and performance |
Publications (3)
Publication Number | Publication Date |
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JP2018535511A JP2018535511A (ja) | 2018-11-29 |
JP2018535511A5 JP2018535511A5 (ja) | 2019-08-15 |
JP6686134B2 true JP6686134B2 (ja) | 2020-04-22 |
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JP2018516712A Active JP6686134B2 (ja) | 2015-10-01 | 2016-10-03 | 加熱器の寿命及び性能を強化するための一体型装置及び方法 |
Country Status (7)
Country | Link |
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US (2) | US10420173B2 (ja) |
EP (1) | EP3357301B1 (ja) |
JP (1) | JP6686134B2 (ja) |
KR (1) | KR102143091B1 (ja) |
CN (1) | CN108476557B (ja) |
TW (1) | TWI654900B (ja) |
WO (1) | WO2017059409A1 (ja) |
Families Citing this family (14)
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EP3357301B1 (en) * | 2015-10-01 | 2019-05-01 | Watlow Electric Manufacturing Company | Integrated device and method for enhancing heater life and performance |
US10895592B2 (en) | 2017-03-24 | 2021-01-19 | Rosemount Aerospace Inc. | Probe heater remaining useful life determination |
US10914777B2 (en) | 2017-03-24 | 2021-02-09 | Rosemount Aerospace Inc. | Probe heater remaining useful life determination |
US11060992B2 (en) | 2017-03-24 | 2021-07-13 | Rosemount Aerospace Inc. | Probe heater remaining useful life determination |
US10636630B2 (en) * | 2017-07-27 | 2020-04-28 | Applied Materials, Inc. | Processing chamber and method with thermal control |
US11061080B2 (en) * | 2018-12-14 | 2021-07-13 | Rosemount Aerospace Inc. | Real time operational leakage current measurement for probe heater PHM and prediction of remaining useful life |
US10962580B2 (en) | 2018-12-14 | 2021-03-30 | Rosemount Aerospace Inc. | Electric arc detection for probe heater PHM and prediction of remaining useful life |
US11639954B2 (en) | 2019-05-29 | 2023-05-02 | Rosemount Aerospace Inc. | Differential leakage current measurement for heater health monitoring |
US11930563B2 (en) | 2019-09-16 | 2024-03-12 | Rosemount Aerospace Inc. | Monitoring and extending heater life through power supply polarity switching |
US11614497B2 (en) * | 2019-12-03 | 2023-03-28 | International Business Machines Corporation | Leakage characterization for electronic circuit temperature monitoring |
US11630140B2 (en) | 2020-04-22 | 2023-04-18 | Rosemount Aerospace Inc. | Prognostic health monitoring for heater |
CN112462824A (zh) * | 2020-11-12 | 2021-03-09 | 宣城睿晖宣晟企业管理中心合伙企业(有限合伙) | 一种薄膜沉积设备加热控制系统及方法 |
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- 2016-10-03 EP EP16785281.3A patent/EP3357301B1/en active Active
- 2016-10-03 TW TW105131891A patent/TWI654900B/zh active
- 2016-10-03 US US15/283,769 patent/US10420173B2/en active Active
- 2016-10-03 CN CN201680057409.4A patent/CN108476557B/zh active Active
- 2016-10-03 KR KR1020187012411A patent/KR102143091B1/ko active IP Right Grant
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Publication number | Publication date |
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CN108476557A (zh) | 2018-08-31 |
KR20180059540A (ko) | 2018-06-04 |
US10420173B2 (en) | 2019-09-17 |
KR102143091B1 (ko) | 2020-08-10 |
US11917730B2 (en) | 2024-02-27 |
WO2017059409A1 (en) | 2017-04-06 |
JP2018535511A (ja) | 2018-11-29 |
CN108476557B (zh) | 2021-08-27 |
EP3357301A1 (en) | 2018-08-08 |
EP3357301B1 (en) | 2019-05-01 |
US20170099699A1 (en) | 2017-04-06 |
US20190357311A1 (en) | 2019-11-21 |
TWI654900B (zh) | 2019-03-21 |
TW201717696A (zh) | 2017-05-16 |
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