JP6681972B2 - 容量性シリンダ圧力センサ - Google Patents
容量性シリンダ圧力センサ Download PDFInfo
- Publication number
- JP6681972B2 JP6681972B2 JP2018503242A JP2018503242A JP6681972B2 JP 6681972 B2 JP6681972 B2 JP 6681972B2 JP 2018503242 A JP2018503242 A JP 2018503242A JP 2018503242 A JP2018503242 A JP 2018503242A JP 6681972 B2 JP6681972 B2 JP 6681972B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- cylinder
- pressure sensor
- elastically bendable
- capacitive pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000002485 combustion reaction Methods 0.000 claims description 35
- 239000003990 capacitor Substances 0.000 claims description 32
- 238000009413 insulation Methods 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 16
- 239000012212 insulator Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- KENZYIHFBRWMOD-UHFFFAOYSA-N 1,2-dichloro-4-(2,5-dichlorophenyl)benzene Chemical compound ClC1=CC=C(Cl)C(C=2C=C(Cl)C(Cl)=CC=2)=C1 KENZYIHFBRWMOD-UHFFFAOYSA-N 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 3
- 239000010445 mica Substances 0.000 description 2
- 229910052618 mica group Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000011490 mineral wool Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M15/00—Testing of engines
- G01M15/04—Testing internal-combustion engines
- G01M15/08—Testing internal-combustion engines by monitoring pressure in cylinders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/12—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by changing capacitance or inductance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/12—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by changing capacitance or inductance
- G01L23/125—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by changing capacitance or inductance by changing capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0033—Transmitting or indicating the displacement of bellows by electric, electromechanical, magnetic, or electromagnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
- F01L19/00—Slide valve-gear or valve arrangements with reciprocatory and other movement of same valve, other than provided for in F01L17/00, e.g. longitudinally of working cylinder and in cross direction
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
Description
・弾性的に屈曲可能な電極は、底面の少なくとも一部分を形成する。
・静止電極は、弾性的に屈曲可能な電極と略平行である。
・底面は、燃焼機関のシリンダに露出されるように構成される。
・弾性的に屈曲可能な電極は、燃焼機関のシリンダに露出されるように構成される。
・容量性圧力センサは、底面と回路との間に少なくとも部分的に配置された断熱構成部品を更に備える。
・弾性的に屈曲可能な電極は、底面にかけられた2MPa(20bar)、5MPa(50bar)、8MPa(80bar)、10MPa(100bar)、20MPa(200bar)、30MPa(300bar)、又は40MPa(400bar)より小さい圧力で弾性的に屈曲可能である。
・底面と回路との間の熱伝導率は、3.5(W/(m・K))未満である。
・静止電極は、低温同時焼成セラミック(LTCC)などのセラミックから構成される。
・容量性圧力センサは、静止電極に電気的に接続された第1の伝導構造体と、弾性的に屈曲可能な電極に電気的に接続された第2の伝導構造体とを更に備える。
12 底面
14 外面
20 可変キャパシタ
22 静止電極
24 弾性的に屈曲可能な電極
30 回路
32 ワイヤ
34 同軸ワイヤ
40 ねじ山
50 断熱構成部品
52 絶縁体
60 電気的接触子
62 第1の伝導構造体
64 第2の伝導構造体
66 締め付け接触子
70 プリント回路基板(PCB)
72 支持プレート
74 ばね
76 圧縮ナット
78 構造材料の層
80 接着剤
82 締めねじ
100 圧力センサ
P 圧力
Claims (16)
- − 内燃機関のシリンダ内の圧力を測定するために、鋼製で、前記内燃機関のシリンダヘッドに取り付け可能なシリンダ形状筐体であって、前記シリンダ形状筐体が前記内燃機関の前記シリンダヘッドに取り付けられる際に、前記内燃機関の前記シリンダ内の圧力及び高温環境に露出される外面と、底面とを有するシリンダ形状筐体と、
− 静止電極と、弾性的に屈曲可能な電極とを有する可変キャパシタであって、前記静止電極が、前記弾性的に屈曲可能な電極と略平行な前記シリンダ形状筐体の中に配置され、鋼製の前記シリンダ形状筐体の前記底面を形成する前記弾性的に屈曲可能な電極が、前記底面にかけられた圧力に反応して曲げられるように配設され、これにより、前記可変キャパシタの可変キャパシタンスが、前記底面にかけられた前記圧力を表す、可変キャパシタと、
− 前記シリンダ形状筐体から前記静止電極を絶縁し、前記静止電極と前記弾性的に屈曲可能な電極との間の空隙を画定する絶縁構造と
を備える容量性圧力センサ。 - 前記静止電極が、前記筐体の前記外面に対し略垂直に配置される、請求項1に記載の容量性圧力センサ。
- 前記可変キャパシタの前記可変キャパシタンスに基づく信号を生成するように構成された回路を備え、前記信号が、前記底面にかけられた前記圧力を表す、請求項1または2に記載の容量性圧力センサ。
- 前記底面と前記回路との間に少なくとも部分的に配置された断熱構成部品を更に備える、請求項3に記載の容量性圧力センサ。
- 前記弾性的に屈曲可能な電極が、前記底面にかけられた2MPa(20bar)より小さい圧力で弾性的に屈曲可能である、請求項1から4までのいずれか一項に記載の容量性圧力センサ。
- 前記底面(12)と前記回路(30)との間の熱伝導率が、3.5W/(m・K)未満である、請求項3に記載の容量性圧力センサ。
- 前記静止電極に電気的に接続された第1の伝導構造体と、前記弾性的に屈曲可能な電極に電気的に接続された第2の伝導構造体とを更に備える、請求項1から6までのいずれか一項に記載の容量性圧力センサ。
- 前記静止電極を、前記可変キャパシタの前記可変キャパシタンスに基づく信号を生成するように構成された回路と電気的に接続するための接続手段を更に備え、前記信号が、前記底面にかけられた前記圧力を表す、請求項1から7までのいずれか一項に記載の容量性圧力センサ。
- 前記外面が、ねじ切りされた外面を備える、請求項1から8までのいずれか一項に記載の容量性圧力センサ。
- 機関のシリンダ内の圧力を測定するための容量性圧力センサ装置であって、前記センサ装置が、
− 鋼製で、前記内燃機関のシリンダヘッドに取り付け可能なシリンダ形状筐体であって、前記シリンダ形状筐体が前記内燃機関の前記シリンダヘッドに取り付けられる際に、前記内燃機関の前記シリンダ内の圧力及び高温環境に露出される側壁と、底壁とを有するシリンダ形状筐体と、
− 前記筐体の中に配置された静止電極と、
− 前記シリンダ形状筐体が前記内燃機関の前記シリンダヘッドに取り付けられる際に、前記内燃機関の前記シリンダ内の圧力及び高温環境に露出される、前記シリンダ形状筐体の前記底壁の少なくとも1つを形成し、前記シリンダ内の圧力変化に反応する、弾性的に屈曲可能な電極であって、前記静止電極と前記弾性的に屈曲可能な電極は、前記内燃機関の前記シリンダ内の前記圧力変化に従って変化するキャパシタンスを有する可変キャパシタを形成する、弾性的に屈曲可能な電極と、
− 前記シリンダ形状筐体から前記静止電極を絶縁し、前記静止電極と前記弾性的に屈曲可能な電極との間の空隙を画定する絶縁構造と、
− 前記変化するキャパシタンスを表す信号を生成するための、前記可変キャパシタに接続された回路と
を備える、容量性圧力センサ装置。 - 前記弾性的に屈曲可能な電極が、前記筐体の前記底壁の少なくとも一部分を形成する、請求項10に記載の容量性圧力センサ装置。
- 前記静止電極が、前記弾性的に屈曲可能な電極と略平行である、請求項10又は11に記載の容量性圧力センサ装置。
- 前記底壁と前記回路との間に少なくとも部分的に配置された断熱構成部品を更に備える、請求項10から12までのいずれか一項に記載の容量性圧力センサ装置。
- 前記弾性的に屈曲可能な電極が、前記底壁にかけられた2MPa(20bar)、5MPa(50bar)、8MPa(80bar)、10MPa(100bar)、20MPa(200bar)、30MPa(300bar)、又は40MPa(400bar)より小さい圧力で弾性的に屈曲可能である、請求項10から13までのいずれか一項に記載の容量性圧力センサ装置。
- 前記静止電極に電気的に接続された第1の伝導構造体と、前記弾性的に屈曲可能な電極に電気的に接続された第2の伝導構造体とを更に備える、請求項10から14までのいずれか一項に記載の容量性圧力センサ装置。
- 前記静止電極を、前記可変キャパシタの前記キャパシタンスに基づく信号を生成するように構成された回路と電気的に接続するための接続手段を更に備え、前記信号が、前記底壁にかけられた前記圧力を表す、請求項10から15までのいずれか一項に記載の容量性圧力センサ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/805,478 US10139313B2 (en) | 2015-07-22 | 2015-07-22 | Capacitive cylinder pressure sensor |
US14/805,478 | 2015-07-22 | ||
PCT/EP2016/067161 WO2017013109A1 (en) | 2015-07-22 | 2016-07-19 | Capacitive cylinder pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018521325A JP2018521325A (ja) | 2018-08-02 |
JP6681972B2 true JP6681972B2 (ja) | 2020-04-15 |
Family
ID=56418536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018503242A Active JP6681972B2 (ja) | 2015-07-22 | 2016-07-19 | 容量性シリンダ圧力センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US10139313B2 (ja) |
EP (1) | EP3325932A1 (ja) |
JP (1) | JP6681972B2 (ja) |
CN (1) | CN107923810B (ja) |
WO (1) | WO2017013109A1 (ja) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4382377A (en) | 1980-05-16 | 1983-05-10 | Siemens Aktiengesellschaft | Pressure sensor for an internal combustion engine |
JPH0812123B2 (ja) * | 1987-11-27 | 1996-02-07 | 日本碍子株式会社 | 圧力センサ |
JPH01182729A (ja) * | 1988-01-16 | 1989-07-20 | Ngk Insulators Ltd | 圧力センサ |
US5902933A (en) * | 1993-02-22 | 1999-05-11 | Omron Corporation | Pressure sensor and its application |
JPH08121308A (ja) * | 1994-10-25 | 1996-05-14 | Unisia Jecs Corp | 筒内圧センサ一体型点火装置 |
JPH10111206A (ja) | 1996-10-07 | 1998-04-28 | Denso Corp | 静電容量式圧力センサ |
US6938491B2 (en) * | 2003-04-17 | 2005-09-06 | Cts Corporation | Engine cylinder pressure sensor |
EP1486653B1 (en) * | 2003-06-12 | 2016-04-13 | Denso Corporation | Combustion pressure sensor |
JP4107235B2 (ja) * | 2003-12-25 | 2008-06-25 | 株式会社デンソー | 力学量センサ構造 |
EP2075563A3 (en) * | 2007-12-31 | 2011-10-19 | Rosemount Aerospace Inc. | High temperature capacitive static/dynamic pressure sensors |
FR2947629B1 (fr) * | 2009-07-06 | 2012-03-30 | Tronic S Microsystems | Dispositif de mesure de pression et son procede de fabrication |
DE102012112920A1 (de) | 2012-12-21 | 2014-06-26 | BD Sensors GmbH | Vorrichtung zur Bestimmung und/oder Überwachung eines Druckes |
CA2907419C (en) * | 2013-03-15 | 2020-06-23 | Endotronix, Inc. | Pressure sensing implant |
-
2015
- 2015-07-22 US US14/805,478 patent/US10139313B2/en active Active
-
2016
- 2016-07-19 WO PCT/EP2016/067161 patent/WO2017013109A1/en unknown
- 2016-07-19 CN CN201680050824.7A patent/CN107923810B/zh active Active
- 2016-07-19 JP JP2018503242A patent/JP6681972B2/ja active Active
- 2016-07-19 EP EP16739512.8A patent/EP3325932A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
CN107923810A (zh) | 2018-04-17 |
EP3325932A1 (en) | 2018-05-30 |
US20170023440A1 (en) | 2017-01-26 |
JP2018521325A (ja) | 2018-08-02 |
US10139313B2 (en) | 2018-11-27 |
WO2017013109A8 (en) | 2017-03-16 |
WO2017013109A1 (en) | 2017-01-26 |
CN107923810B (zh) | 2020-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106488366B (zh) | 具有位置传感器的mems扬声器 | |
US6617764B2 (en) | High temperature piezoelectric sensor | |
US9291512B2 (en) | Sensor for measuring pressure and/or force | |
KR20130016647A (ko) | 초음파 센서 | |
ATE479385T1 (de) | Selbsteichender drucksensor | |
US20200033218A1 (en) | Pressure sensor | |
US9835523B2 (en) | Combustion pressure detection device, and internal combustion engine equipped with combustion pressure detection device | |
CN102155987A (zh) | 一种差容式微振动传感器 | |
CN107667279B (zh) | 压力感测设备 | |
CN109212264B (zh) | 环形剪切式挠曲电加速度传感器及层叠结构加速度传感器 | |
JP6681972B2 (ja) | 容量性シリンダ圧力センサ | |
JP2019168456A (ja) | 圧力センサ | |
US10697844B2 (en) | Compact pressure transducer | |
US20040237659A1 (en) | Pressure sensor | |
WO2014034640A1 (ja) | 燃焼圧センサ | |
CN107850498B (zh) | 信号传导装置 | |
CN113720250A (zh) | 一种绝热式磁致伸缩传感器 | |
JPS60157032A (ja) | 内燃機関のシリンダ圧力伝送装置 | |
WO2012063477A1 (ja) | 圧力センサ | |
JPH0295232A (ja) | 圧電型圧力センサ | |
JPH01501962A (ja) | 圧力センサ | |
JP2020016513A (ja) | 圧力センサ | |
JPH0522837Y2 (ja) | ||
RU2004121451A (ru) | Емкостный датчик давления | |
JP2017181191A (ja) | 圧力検出装置および圧電素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180316 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20181129 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20181128 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190226 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190507 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190521 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190912 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20191212 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200210 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200304 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200324 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6681972 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |