JP6681099B1 - Liquid pressure processing apparatus and liquid pressure processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To limit the area of high pressure at the time of pressurization to the pressurization processing section as much as possible, thereby making it possible to integrate the apparatus, downsize it, and improve the safety. Provided is a liquid pressure processing apparatus capable of suppressing the pressurized liquid from remaining and reducing the risk of leakage of the pressurized liquid. SOLUTION: The interior is provided with a first flow path 07 provided above the mounting base 03 and having an opening at the uppermost part of the inner side surface, and a second flow path 06 having an opening at the lowermost part of the inner side surface. A pressure vessel 02 whose upper surface is inclined with respect to the vertical direction with the opening side of the first channel 07 being the uppermost part, and an opening / closing connected to the outer side surface of the pressure vessel 02 and connected to the second channel 06. The opening / closing valve 30 connected to the valve 20 and the first flow path 07, the pressure container 02 provided through the inner upper surface of the pressure container 02 and the mounting base 03 are fitted to each other, and the opening / closing valves 20 and 30 are closed. The pressurizing mechanism 10 that pressurizes the inside of the closed space by reducing the volume of the closed space formed when the closed space is formed. [Selection diagram] Figure 1

Description

  The present invention relates to a liquid pressure processing apparatus that performs high-quality high-pressure liquid pressurization such as adhesion of electronic components to substrates, sealing of electronic components, attachment of films to the surface of various members, and fine transfer processing. It is a thing.

  Conventionally, pressure is applied to a work piece to bond an adherend (adhesive material such as an adhesive sheet) and impregnate a liquid. In recent years, due to technological advances, workpieces have become more complicated and finer, and more and more diverse adherends and impregnating materials have been used.

  For example, in the process of bonding electronic components to a substrate, first, the work piece is placed in a depressurized environment to remove fine air bubbles remaining inside the adhesive layer and at the bonding interface between the substrate and the electronic component to bond the workpiece. It prevents the generation of layer voids. After that, the adhesive layer is exposed to a high-pressure environment and a uniform pressure is applied to the adhesive layer to improve the adhesiveness of the adhesive layer and improve the processing quality.

  Currently, in order to perform these processing operations, a work piece is placed in a pressure vessel, a flexible film is provided on the upper surface of the pressure vessel, and the inside of the pressure vessel is separated into two spaces. After depressurizing with a vacuum pump connected to the upper space and the bottom space to eliminate residual air, high pressure air is introduced only into the upper space of the pressure vessel using an air pressure pump, and through a flexible membrane. A uniform pressure is applied to a work piece.

  However, as described above, the tendency toward miniaturization of the work piece and the demand for improvement of the processing quality have been increasing, and a larger pressing force has been demanded for the pressure processing apparatus. With a pressure processing device that uses high-pressure air, it is possible to increase the pressure of the high-pressure air to be used, but since highly compressible air is used, the pressure resistance and safety of the device can be ensured. It was a challenge.

  In order to deal with this problem, as shown in the following patent documents, a system using a liquid having a low compressibility as a pressurizing medium to be used has been proposed.

  The conventional technique described in Patent Document 1 aims at sticking electronic components. An object to be processed is placed in an openable / closable vacuum chamber 2 (see FIG. 5 of Patent Document 1), and an extensible film sandwiched by a press inner member 4-1 and a peripheral wall portion 4-2 on an upper portion thereof. The members 5 are brought close to each other. Then, the liquid stored inside the extensible film member expansion cylinder mechanism 6 is sent from the outside of the vacuum chamber 2 to the upper surface of the extensible film member 5 via the press inner member 4-1. After the extensible film member 5 is expanded, it is brought into contact with the upper surface of the workpiece. Further, the liquid feed passage of the expandable membrane member expansion cylinder mechanism 6 is closed by the opening / closing means 6-4, and the liquid is contained by the upper press member elevating mechanism 8 provided on the upper part of the press inner member 4-1. The stretchable film member 5 is pressed against a work piece and pressed. Since the extensible film member 5 expanded by the liquid is brought into contact with the workpiece, a relatively uniform pressing force can be generated, and the pressing force is controlled by using the thrust of the upper press member lifting mechanism 8. are doing. (For the above codes, refer to the codes of Patent Document 1)

  Similarly, the prior art described in Patent Document 2 aims at the pressure processing of electronic components. As shown in FIG. 1 of Patent Document 2, the upper mold 10 containing the working liquid 34 as a pressurized liquid is hermetically sealed at its bottom with a pressure equalizing member 6 and a thin film 32, and the lower side thereof. A lower die and a cylinder device 92 are arranged outside via a workpiece. When the cylinder 91 moves upward, the work piece is pressed against the bottom surface of the upper mold to form a pressure vessel, and the pressure increasing pump 208 provided outside increases the pressure of the pressurized liquid via the liquid supply pipe. The structure is such that uniform pressure is applied to the work piece. (For the above codes, refer to the codes of Patent Document 2)

  In the present application, the “pressurized liquid” includes not only a liquid used exclusively for pressurization but also a liquid for performing various processing / treatments on a workpiece.

JP, 2005-246417, A JP, 2014-147957, A

  As described above, it is required to increase the pressure to a higher pressure (1 MPa or more). However, in the conventional techniques described in Patent Documents 1 and 2, a large size including a piping system due to the high pressure and an increase in pressure are applied. There was a problem such as leakage of pressure fluid.

  The conventional technique described in Patent Document 1 has a problem that the configuration becomes complicated and the device becomes large in size, as shown in FIG. 5 of Patent Document 1.

  Further, in the conventional technique described in Patent Document 2, the area of the pressurized liquid having a high pressure spreads not only to the inside of the upper mold for processing, but also to the piping up to the booster pump, the piping member, etc. It is expected that the risk of liquid leakage increases, the pressurized liquid control system including the booster pump becomes complicated, and the device becomes large.

  Therefore, an object of the present invention is to provide a liquid pressure processing apparatus capable of miniaturizing and preventing leakage of pressurized liquid by limiting the region of high pressure during pressurization to the pressure processing section as much as possible. Especially.

  In order to achieve the above object, a liquid pressure processing apparatus according to the present invention includes a mounting base on which a workpiece can be mounted, and a mounting base that is disposed so as to face the mounting base and is fitted to the mounting base. A device main body having a pressure container capable of forming an internal space between the mounting base and the mounting base, and relative movement in a direction in which at least one of the mounting base and the pressure container approaches or separates from the other. And a second flow passage capable of supplying a pressurized liquid to the internal space. And a second opening / closing valve for opening / closing the first flow path and a second opening / closing valve for opening / closing the second flow path are provided, and the pressurized liquid filled in the internal space is provided. Is configured to be pressurizable.

  In the liquid pressure processing apparatus according to the present invention, the opening of the first channel facing the internal space is formed vertically above the opening of the second channel facing the internal space. Preferably.

  In the liquid pressure processing apparatus according to the present invention, the pressure vessel is arranged vertically above the placement base, and is formed in a shape having an inner upper surface and an inner side surface, and the first flow path is provided. The opening facing the internal space is formed on the internal upper surface or the upper part of the internal side surface of the pressure vessel, and the opening facing the internal space of the second flow path is the pressure vessel. It is preferably formed on the lower part of the inner side surface or on the mounting base.

  In the liquid pressure processing apparatus according to the present invention, it is preferable that the inner upper surface of the pressure container is inclined with respect to the vertical direction so that the opening of the first flow path is the uppermost part. With this configuration, the residual air in the pressure vessel can be easily removed, and the pressure of the pressurized liquid can be easily increased.

  In the liquid pressure processing apparatus according to the present invention, the apparatus main body is mounted by penetrating the inner upper surface or the inner side surface of the pressure container to reduce the volume of the inner space and apply the pressure in the inner space. A pressurizing mechanism for pressurizing the pressurized liquid may be provided.

  In the liquid pressure processing apparatus according to the present invention, at least one of the first on-off valve and the second on-off valve reduces the volume of the internal space and pressurizes the pressurized liquid in the internal space. It may be an open / close valve additional pressure mechanism configured as possible. According to this configuration, the device can be integrated, the safety can be improved, the risk of leakage of the pressurized liquid can be reduced, and further downsizing can be realized.

  In the liquid pressure processing apparatus according to the present invention, it is preferable that the upper surface of the placement base be inclined with respect to the vertical direction with the side near the opening of the second flow path as the lowermost part. According to this configuration, since the drainage capacity is improved, the risk of pressurized fluid leakage is reduced.

  The liquid pressure processing apparatus according to the present invention has a film that covers the workpiece and separates the workpiece and the pressurized liquid, and the membrane is a flexible member fixed to the lower end of the pressure vessel. A film or a flexible film installed on an upper surface portion of the mounting base, wherein the mounting base opens on the upper surface of the mounting base and passes through the inside of the mounting base, A means for communicating with the outside and exhausting air between the mounting base and the flexible film may be provided. According to this configuration, the film can reduce the risk of exposing the workpiece to the pressurized liquid.

  A liquid pressure processing method according to the present invention, a mounting base on which a workpiece is mounted, and a pressure container arranged to face the mounting base are fitted to form an internal space, A first liquid formed in the pressure vessel by injecting a pressurized liquid into the internal space from a second flow path formed in the pressure vessel or the placement base in a state where the work piece is covered with a flexible film. The residual air in the internal space is discharged from the flow path of, and the internal space is filled with the pressurized liquid by closing the on-off valve attached to the pressure container or the mounting base to seal the internal space. As a closed space, pressurizing the pressurized liquid in the closed space by the pressure mechanism provided in the pressure container or the placement base to pressurize the workpiece, and after the pressurization, It is characterized in that the pressurized liquid in the internal space is discharged.

  According to the present invention, it is possible to reduce the size and prevent leakage of the pressurized liquid by limiting the region of high pressure during pressurization to the pressure processing unit as much as possible.

It is a figure which shows schematic structure of the liquid pressure processing apparatus which concerns on 1st Embodiment. It is a figure explaining the liquid pressure processing method using the liquid pressure processing apparatus which concerns on 1st Embodiment. It is a figure explaining the liquid pressure processing method which concerns on 1st Embodiment. It is a figure explaining the liquid pressure processing method which concerns on 1st Embodiment. It is a figure explaining the liquid pressure processing method which concerns on 1st Embodiment. It is a figure explaining the liquid pressure processing method which concerns on 1st Embodiment. It is a figure which shows schematic structure of the liquid pressure processing apparatus modification which concerns on 1st Embodiment. It is a figure which shows the liquid pressure processing apparatus schematic structure which concerns on 2nd Embodiment. It is a figure which shows the liquid pressure processing apparatus schematic structure which concerns on 3rd Embodiment. It is a figure explaining the liquid pressure processing method using the liquid pressure processing apparatus which concerns on 3rd Embodiment. It is a figure explaining the liquid pressure processing method using the liquid pressure processing apparatus which concerns on 3rd Embodiment. It is a figure explaining the liquid pressure processing method using the liquid pressure processing apparatus which concerns on 3rd Embodiment.

  Hereinafter, preferred embodiments for carrying out the present invention will be described with reference to the drawings. It should be noted that the following embodiments do not limit the invention according to each claim, and all combinations of the features described in the embodiments are not necessarily essential to the solution means of the invention. .

[First Embodiment]
FIG. 1 is an explanatory diagram of the overall configuration of a liquid pressure processing apparatus according to the first embodiment of the present invention. Although no reference numeral is given, a portion indicated by a black circle in the drawing represents a sealing member such as an O-ring.

[Schematic Configuration of First Embodiment]
The liquid pressure processing apparatus according to the first embodiment of the present invention roughly includes an apparatus main body having a mounting base 03 and a pressure container 02, a base 01 supporting the mounting base 03, and a mounting base. 03 and the pressure vessel 02 are moved relatively to the other in a direction of approaching or separating from each other, a pressurized liquid control circuit (not shown) for injecting or discharging pressurized liquid into or from the apparatus main body, A film 61 that covers the workpiece 80 and separates the workpiece 80 and the pressurized liquid is provided.

  The mounting base 03 is arranged between the base 01 and the pressure vessel 02, and is configured to mount the workpiece 80. The pressure vessel 02 is disposed so as to face the mounting base 03, and an internal space can be formed between the pressure container 02 and the mounting base 03 when the pressure container 02 is fitted to the mounting base 03.

  The apparatus main body is formed with a first flow passage 07 capable of discharging gas in the internal space and a second flow passage 06 capable of supplying pressurized liquid to the internal space. A first opening / closing valve 30 for opening / closing the passage 07 and a second opening / closing valve 20 for opening / closing the second passage 06 are provided. The opening facing the internal space of the first flow passage 07 is formed vertically above the opening facing the internal space of the second flow passage 06.

  More specifically, the pressure vessel 02 is disposed vertically above the mounting base 03, is formed in a cylindrical shape with a lid having an inner upper surface and an inner side surface, and is formed in the inner space of the first flow passage 07. The opening that faces the inner surface of the pressure vessel 02 or the upper portion of the inner side surface of the pressure vessel 02, and the opening that faces the inner space of the second flow path 06 is the lower portion of the inner side surface of the pressure vessel 02 or the mounting base 03. Is formed in. Further, the inner upper surface of the pressure vessel 02 is inclined with respect to the vertical direction so that the opening of the first flow passage 07 is located at the uppermost part.

  Further, the device body is configured to be able to pressurize the pressurized liquid filled in the internal space. More specifically, the apparatus main body has a pressurizing mechanism 10 that penetrates the inner upper surface of the pressure vessel 02 and reduces the volume of the internal space to pressurize the pressurized liquid in the internal space.

  The moving mechanism 50 relatively moves at least one of the mounting base 03 and the pressure container 02 (the pressure container 02 in the present embodiment) toward or away from the other (the mounting base 03 in the present embodiment). Thus, the internal space formed between the mounting base 03 and the pressure vessel 02 is opened and closed. More specifically, the moving mechanism 50 includes a linear motion rod 51 having a pressure vessel 02 fixed at its upper end and penetrating the base 01, and a rod clamp fixed to the lower surface of the base 01 for holding the linear motion rod 51 at an arbitrary position. 52, and is configured to be separated or fitted by moving the pressure container 02 up and down with respect to the mounting base 03.

[Specific Configuration of First Embodiment]
Hereinafter, the configuration of the liquid pressure processing apparatus according to the first embodiment will be described more specifically. In the following description, the “closed space” means that the pressure vessel 02 and the mounting base 03 are fitted to each other to form an internal space, and then the on-off valves 20 and 30 are closed to seal the internal space. A space (closed space) formed by the above.

  The liquid pressure processing apparatus according to the first embodiment includes (1) a base 01, (2) a mounting base 03 that is fixed to the upper surface of the base 01 and mounts a workpiece 80, and (3) mounting. It is provided above the mounting base 03 and has a first flow path 07 having an opening at the uppermost part of the inner side surface and a second flow path 06 having an opening at the lowermost part of the inner side surface. The pressure vessel 02 having a cylindrical shape with a lid, which is inclined with respect to the vertical direction with the opening side of the first flow channel 07 as the uppermost portion, and (4) is attached and fixed to the outer side surface of the pressure vessel 02, and the second flow channel The on-off valve 20 connected to the No. 06 and the on-off valve 30 connected to the first flow path 07, and (5) the pressure container 02 is mounted by penetrating the inner upper surface, and the pressure container 02 and the mounting base 03 are connected to each other. Closing by reducing the volume of the closed space formed when the on-off valves 20 and 30 are fitted and closed Pressurizing mechanism 10 for pressurizing the inside, (6) Linear motion rod 51 having a pressure vessel 02 fixed to the upper end and penetrating base 01, and linear motion rod 51 fixed to the lower surface of base 01 and held at an arbitrary position And a rod clamp 52 for moving the pressure vessel 02 to or from the mounting base 03 by moving the pressure vessel 02 upward or downward with respect to the mounting base 03, and (7) applying pressure to the pressure vessel 02 via the on-off valves 20 and 30. It has a pressurized liquid control circuit (not shown) for injecting or discharging a pressurized liquid, and (8) a flexible film 61 which is a film for covering the workpiece 80.

  In the present embodiment, there are two flow paths through which the pressurized liquid flows: the second flow path 06 and the first flow path 07, but three or more flow paths may be used. In the present embodiment, the base 01, the mounting base 03, and the pressure vessel 02 are all circular, and the mounting base 03 is fixed to the center of the upper surface of the base 01. However, the base 01, the mounting base 03, and the pressure vessel 02 may be rectangular and is not limited to a circle. The moving mechanism 50 is a direct-acting elevating means (direct-acting mechanism) for raising and lowering the pressure vessel 02 to be fitted or separated from the mounting base 03, and the direct-acting rod 51 has a columnar shape.

  In the present embodiment, the film covering the work piece 80 is the flexible film 61, which causes a pressure difference between the work piece side (vacuum) and the pressure vessel side (pressurization), and also the work piece 80. The work piece 80 is covered so that the work piece 80 does not get wet with the pressurized liquid, and the work piece 80 is separated from the closed space. By pressing the work piece 80 through the flexible film 61, it is possible to perform bubble-free bonding and fine transfer. The flexible film 61 is excellent in flexibility and flexibility, and when the periphery of the work piece covered with the flexible film is in a depressurized state, the degree of vacuum is increased to follow fine irregularities between the work pieces and closely contact each other. To do. Moreover, since it is not necessary to compress the remaining air, the pressurizing mechanism can be downsized. The flexible film may be, for example, a soft rubber such as chloroprene rubber, silicon rubber, or fluorine rubber, or a film such as fluorine, nylon, olefin, or PET, but is not limited thereto.

  In the prior art described in Patent Document 1, the extensible film member is premised on being repeatedly used, and a member having a relatively large film thickness must be used in order to cope with film breakage during processing. Therefore, if the surface irregularities of the workpiece become finer, it becomes difficult to follow the surface shape, and uniform pressurization is hindered. On the other hand, when the film thickness is reduced, the risk of film breakage increases, and when it breaks, the work piece is exposed to the pressurized liquid. Even in the case of the configuration of the conventional technique described in Patent Document 2, the strength of the thin film becomes a problem, and when the thin film breaks, the work piece becomes a pressurized liquid as in the case of the conventional technique described in Patent Document 1 described above. There was an inherent risk of exposure. However, according to the present embodiment, due to the synergistic effect with the above-described configuration, the exposure risk is reduced even if the film thickness is small. Depending on the combination of the pressurized liquid and the workpiece, it may not be desirable for the pressurized liquid to directly contact the workpiece. According to this embodiment, the risk of exposing the workpiece to the pressurized liquid in such a case is low.

  The moving mechanism 50 is fixed to the lower surface of the base 01 via a rod clamp 52, and has a direct acting rod 51 penetrating the base. The pressure vessel 02 is fixed to the upper end of the linear motion rod 51 and has a structure that can be fitted or separated from the mounting base 03 according to the operation of the moving mechanism 50. The on-off valves 20 and 30 are fixed to the outer wall surface of the flow path formed by penetrating the wall surface of the pressure vessel 02. The pressurizing mechanism 10 is fixed to the outer wall surface of the flow path formed by penetrating the wall surface of the pressure container 02, and reduces the volume of the closed space formed when the pressure container 02 and the mounting base 03 are fitted. This has the function of increasing the pressure of the liquid in the closed space.

  The linear motion rod 51 is supported by the linear motion bearing 53 fitted to the base 01, and the pressure vessel 02 can be easily fitted to the mounting base 03. Although the present embodiment has the pressure container elevating means below the pressure container, a new base connected to the base 01 is provided above the pressure container, and this new base has the pressure container elevating means. May be.

  The rod clamp 52 is attached to the linear motion rod 51, is fixed to the lower surface of the base 01, and holds the linear motion rod 51 at an arbitrary position.

  A second flow passage 06 having an opening is formed at the bottom of the inner side surface of the pressure vessel 02, and the opening / closing valve 20 is connected to the second flow passage 06. Further, a first flow path 07 having an opening is formed at the uppermost part of the facing inner side surfaces of the pressure vessel 02, and the opening / closing valve 30 is connected to the first flow path 07. The term "opposed" as used herein means that the second flow passage 06 and the first flow passage 07 are arranged in the pressure vessel 02 at positions symmetrical to each other with respect to the central axis of the pressure vessel 02. Means that. When the second flow passage 06 is located so as to face the first flow passage 07, the injection and discharge of the pressurized liquid and air into the pressure vessel 02 become smooth. In the present embodiment, the opening of the first flow passage 07 and the opening of the second flow passage 06 face each other, that is, have a positional relationship of 180 ° with respect to the central axis, but the present invention is not limited to this. . It is preferable that the opening of the first flow path 07 is provided at the uppermost portion of the upper surface of the inside of the pressure vessel 02. When the mounting base 03 is inclined, it is preferable that the opening of the second flow path 06 is provided at a position in contact with the lowermost portion of the mounting base 03.

  In this embodiment, the on-off valve 20 and the on-off valve 30 are provided as the on-off valves. An on-off valve is provided in each flow path of the pressure container 02. In the present embodiment, the second flow path 06 is provided in the lowermost part inside the pressure vessel 02, and the first flow path 07 is provided in the uppermost part inside the pressure vessel 02. It is possible to circulate in 02 without stagnation, and it is possible to remove the pressurized liquid from the second flow path 06. In the present embodiment, in the pressure vessel 02 with the inner upper surface inclined, the second flow passage 06 is provided in the vicinity of the lowest inner upper surface, and the first flow passage 07 has the highest inner upper surface. Since it is provided in the vicinity of the pressure vessel 02, when the pressure vessel 02 is filled with the pressurized fluid, it is easy to collect bubbles in the direction of the first flow path 07 and exhaust the air, and when the pressurized fluid is discharged from the pressure vessel 02. By injecting air from the first flow passage 07, the pressurized liquid is easily collected in the direction of the second flow passage 06 and discharged.

  In the present embodiment, the entrance, that is, the passage of the opening when the pressurized liquid in the pressure container 02 passes through the second flow path 06 and is discharged to the outside is horizontal and narrow (for example, the second passage). (A fan-shaped opening with a height of about 2 mm that spreads toward the center of the pressure vessel around the flow path 06). After that, the passage rises vertically and becomes horizontal again in the on-off valve 20, and then the passage rises vertically again and is discharged from the supply / discharge port 24 to the outside. According to this embodiment, since the opening of the second flow path 06 is provided so as to face the mounting base 03, the pressurized liquid is unlikely to remain when the pressurized liquid is discharged.

  The on-off valves 20 and 30 are attached to the outer side surface of the pressure vessel 02, are connected to the second flow passage 06 and the first flow passage 07 formed in the wall of the pressure vessel 02, and are arranged at the vertical center of the pressure vessel 02. It is fixed at a position opposite to.

  In the present embodiment, the pressure mechanism 10 is installed so as to penetrate the upper wall surface of the pressure vessel 02. The pressurizing mechanism 10 has a cylindrical shape having an upper lid and a hollow pressurizing chamber, has a solid pressurizing piston 11 slidably in contact with an inner wall surface, and has an internal portion at an upper portion of a side surface. A pressurizing port 12 which is a through hole to the pressurizing chamber is provided, and a depressurizing port 13 which is a through hole to the internal pressurizing chamber is provided at a lower portion of a side surface which is a lower end portion of the pressurizing chamber. The pressurizing piston 11 reduces the volume of the space in the pressure container 02 most when the pressure is lowered to the lowest, that is, when the lower end of the upper part of the piston is lowered to the lower end of the pressure chamber of the pressure mechanism 10. In the present embodiment, the pressurizing mechanism 10 is provided at the center of the pressure vessel 02, but the position is not limited to this.

  In the present embodiment, the on-off valve 20 is provided so as to project from the side surface of the pressure vessel 02, and the inside thereof is provided with a solid spool 21 that is slidable in sliding contact with the inner wall surface in a hollow opening / closing adjustment chamber. A closing operation port 22 is provided on the outside, an opening operation port 23 is provided next, and a supply / discharge port 24 is provided on the innermost side, that is, on the pressure vessel side. Each port is a through hole from the outside of the opening / closing valve 20 to the inside opening / closing adjustment chamber, and the supply / discharge port 24 is directly connected to and connected to the second flow passage 06 of the pressure vessel 02. The opening / closing valve 30 is provided at a position diagonal to the opening / closing valve 20 so as to project from the side surface of the pressure vessel 02. The opening / closing valve 30 is a hollow opening / closing adjusting chamber having a spool 31 inside and a closing operation port 32 at the outermost side. The opening operation port 33 and the supply / discharge port 34 are provided on the innermost side, that is, on the pressure vessel side. Each port is a through hole from the outside of the opening / closing valve 30 to the inside opening / closing adjustment chamber, and the supply / discharge port 34 is directly connected to and connected to the first flow path 07 of the pressure vessel 02.

  The on-off valves 20 and 30 are provided on the outer side surface of the pressure vessel 02. Specifically, the end of the on-off valve 20 including the flow path side tip of the supply / discharge port 24 is fitted into the outer side surface of the pressure vessel 02. The end of the on-off valve 30 including the flow path side tip of the supply / discharge port 34 is fitted into the outer side surface of the pressure vessel 02. In both on-off valves, the spool is a solid piston-like part. When the base end of the spool is at the position of the closing operation port, the supply / discharge port is connected to the flow path, and when the base end of the spool is at the position of the opening operation port, the flow path is blocked. Becomes The on-off valves 20 and 30 are installed between an external pressurized liquid control system that supplies pressurized liquid and the pressure vessel 02.

  The pressure vessel 02 has a circular shape in a top view, and is fixed in a state where the pressurizing mechanism 10 is inserted and attached to the center of the upper surface, and the opening / closing valves 20 and 30 are inserted and attached to the side surfaces at diagonal positions. In this state, a circular flexible film 61 is stretched on the lower part and fixed by a flexible film clamp 60. Four linear motion rods 51 are provided on the outer side of the flexible film clamp 60 at positions diagonal to each other. It is connected. In the present embodiment, the upper heater 70 is provided on the upper portion of the pressure vessel 02 and the lower heater 71 is provided on the mounting base 03, but it may not be provided depending on the type of processing on the workpiece 80.

  In the present embodiment, since the on-off valve and the pressurizing mechanism for increasing the pressure of the pressurized liquid are directly connected to the pressure vessel and integrally provided, an external pipe that generates high pressure is not required, and therefore the device In addition to downsizing, it is possible to limit the area of high pressure during pressurization to the pressure vessel that is the pressurization processing unit, and there is no concern that the pipe will burst even if the pressurization processing pressure increases, and it is safe. It is highly likely.

  In addition, as shown in FIG. 1, the inner upper wall surface of the pressure vessel 02 is formed with an appropriate vertical inclination from the lowermost opening portion toward the uppermost opening portion. When the pressurized liquid is injected into the pressure vessel 02 from the port 24, the structure is such that air does not remain on the upper wall surface inside the pressure vessel 02. In the present embodiment, the shape is such that air is unlikely to remain by utilizing gravity. Therefore, it is possible to prevent the apparent volumetric modulus of the pressurized liquid from decreasing, and it is possible to realize the downsizing of the pressure mechanism required for pressurization.

  The angle of inclining the inner upper wall surface of the pressure vessel 02 is 10 degrees in the present embodiment, and is preferably, for example, 5 degrees to 20 degrees, but is not limited to this. The angle of inclination is determined by the wettability of the inner wall surface of the pressure vessel 02 with respect to the pressurized liquid used, and the inclination angle may be small if the wettability is high. The pressurized liquid may be, for example, water or a liquid such as fats and oils.

  According to the present embodiment, it is possible to prevent air from remaining, and there is no need for a pipe to which high pressure is applied to the outside. Therefore, a decrease in volume elastic modulus due to bubbles and a decrease in volume elastic modulus due to pressure escaping to the pipe and bulging of the pipe Since this can be prevented, the apparent bulk modulus of the pressurized liquid to be pressurized can be improved. Therefore, even if the pressure of the pressurizing process is increased, the safety can be improved without requiring the pipe having high pressure resistance.

  Although not shown in FIG. 1, a pressurized liquid control circuit for injecting or discharging the pressurized liquid into the pressure container 02 via the opening / closing valves 20 and 30 is installed outside the pressure container 02. To fill the closed space with the pressurized liquid by injecting the pressurized liquid into the closed space formed by the mounting base 03 via the open / close valve 20 and to the extent that the closed space is overflowed from the open / close valve 30. You can After that, the supply / discharge ports 24 and 34 of the two opening / closing valves are closed and the pressurizing mechanism 10 is operated to increase the pressure of the pressurized liquid in the closed space.

  The pressurizing mechanism 10 is configured so that its operating pressure can be controlled, and with this configuration, the pressure in the closed space can be varied stably and easily. More preferably, a pressure sensor (not shown) capable of monitoring the pressure in the closed space is installed inside the pressure vessel 02, and the pressure port 12 is connected to the pressure port 12 based on the measured value. The supplied working air pressure is feedback-controlled. With this configuration, it is possible to more accurately control the operating pressure of the pressurizing mechanism 10, and thus the pressure in the closed space.

  Further, for the purpose of separating the pressurized liquid and the workpiece 80, that is, the closed space formed when the pressure vessel 02 and the mounting base 03 are fitted and the on-off valves 20 and 30 are closed, and the workpiece. As a film for separating the object 80, in the present embodiment, as shown in FIG. 1, the flexible film 61 fixed to the lower end portion of the pressure vessel 02 is provided, but the liquid pressure processing according to the second embodiment described later. It may have a flexible film 61 which is installed on the upper surface of the mounting base 03 so as to cover the workpiece 80 like a processing apparatus. In either case, the mounting base 03 is opened on the upper surface of the mounting base 03, communicates with the outside of the mounting base 03 through the inside of the mounting base 03, and connects the mounting base 03 and the flexible film 61. It has means for exhausting (preferably vacuum exhausting) the air between them. In detail, with the flexible film clamp 60 that fixes the end of the flexible film 61 in close contact with the end of the upper surface of the mounting base 03, the air between the mounting base 03 and the flexible film 61 is reduced. Is evacuated from the exhaust port 04 via the third flow passage 08 communicating with the outside of the mounting base 03 from the opening on the upper surface of the mounting base 03, thereby enabling vacuum exhaust. A vacuum pump is connected to the exhaust port 04.

  In the present embodiment using the flexible film 61 as the pressurizing film, the residual air between the flexible film 61, the mounting base 03 on which the workpiece 80 is mounted, and the workpiece 80 are configured as described above. Can be eliminated.

  Although the number of work steps is increased, instead of fixing the flexible film with a flexible film clamp, the work piece 80 is enclosed in a bag-shaped flexible film, the inside of the bag is evacuated, and the bag is sealed. It may be mounted on the mounting base 03 without the flexible membrane clamp. Furthermore, in the case of a treatment such as liquid impregnation of the work piece, the work piece 80 and the impregnated liquid may be vacuum-sealed in a bag-shaped member, and the treatment may be performed by pressurizing with a pressurizing liquid. It is possible.

  In the present embodiment, as described above, the mechanism of the pressure treatment device that can be miniaturized, the drainage mechanism that can reduce the risk of leakage, the mechanism of removing residual air for efficiently increasing the pressure, and the mechanism when the membrane is used. It has a mechanism for eliminating residual air.

  In this embodiment, an on-off valve installed between an external pressurized liquid control system for supplying pressurized liquid and the pressure vessel is directly installed in the pressure vessel, and a pressurizing mechanism for increasing the pressure of the pressurized liquid is also provided. Since it is installed directly in the pressure vessel, the piping system that causes high pressure can be eliminated. Further, since the internal structure of the pressure vessel, the pressurizing mechanism, and the on-off valve, which are integrally configured, has a shape in which air is unlikely to remain by utilizing gravity, the device can be integrated. Miniaturization can be realized, and miniaturization and safety improvement of the device can be realized.

  Further, since the upper surface of the inside of the pressure vessel is inclined, air is less likely to remain when the pressurized liquid is injected into the pressure vessel, and the workpiece can be efficiently pressurized synergistically. The size and safety can be further improved.

  Further, in the present embodiment, since the pressurized liquid can be circulated and the pressurized liquid is removed from the lowermost part of the pressure container, the pressurized liquid is not present around the workpiece when the workpiece is taken out. It can be suppressed from remaining. That is, in this embodiment, since the flow path having the opening is provided at the lowermost portion of the inner side surface, the pressurized liquid can be easily discharged, and the pressurized liquid can be discharged around the workpiece when the workpiece is taken out. It is possible to suppress the residue, reduce the risk of leaking the pressurized liquid, and reduce the risk of exposing the workpiece to the pressurized liquid. Further, the pressure vessel and the mounting base can be safely separated from each other while the residual amount of the pressurized liquid is suppressed.

[Processing method]
The liquid pressure processing process according to the first embodiment will be described with reference to FIGS. 1 to 7. The liquid pressure processing apparatus according to the first embodiment uses the liquid pressure processing apparatus according to the first embodiment described above.

  The liquid pressure processing process according to the first embodiment roughly fits a mounting base 03 on which a workpiece 80 is mounted and a pressure container 02 that is arranged so as to face the mounting base 03. To form an internal space, and the pressurizing liquid is supplied from the second channel 06 formed in the pressure vessel 02 (or the mounting base 03) in a state where the workpiece 80 is covered with the flexible film 61 to the internal space. The residual air in the internal space is discharged from the first channel 07 formed in the pressure vessel 02, and the on-off valves 20 and 30 mounted on the pressure vessel 02 (or the mounting base 03) are closed to close the inside. By sealing the space, the internal space is made a closed space filled with the pressurized liquid, and the pressurized mechanism in the pressure vessel 02 (or the mounting base 03) adds the pressurized liquid in the closed space. And pressurize the workpiece 80, and after pressurizing, pressurizing liquid in the internal space It is intended to be discharged.

According to such a liquid pressure processing process, the device is integrated, the device is thereby downsized, and safety is improved, while air is prevented from remaining at the time of pressurization while being applied after the pressure process. It is possible to reduce the residual amount of the pressure liquid, and thus it is possible to efficiently pressurize the workpiece, reduce the risk of leakage of the pressure liquid, and reduce the risk of exposing the workpiece to the pressure liquid.
Hereinafter, the liquid pressure processing process according to the first embodiment will be described more specifically.

(Step 1)
In the state where the pressure vessel 02 is separated from the mounting base 03 as shown in FIG. 1, the workpiece 80 is mounted on the upper surface of the mounting base 03. The pressure container 02 and the flexible film 61 form a space in which the parts other than the on-off valve are closed. At this time, the space is at normal pressure.

(Step 2)
FIG. 2 is an explanatory diagram A of the liquid pressure processing method according to the first embodiment of the present invention. In step 2, the pressure vessel 02 having a cylindrical shape with a lid and the placement base 03 on which the workpiece 80 is placed and placed on the bottom side of the pressure vessel 02 are fitted together. From the state of step 1, when the pressure vessel 02 is lowered by the moving mechanism 50, the pressure vessel 02 is fitted to the mounting base 03 as shown in FIG. The movement of 51 is restricted in the axial direction, and the fitted state of the pressure vessel 02 and the mounting base 03 is maintained. Further, the work piece 80 is not sealed in the space described above but is sealed between the mounting base 03 and the flexible film 61 and is separated from the space described above, and the inside of the pressure container 02 is the flexible film 61. It is separated into two spaces outside the flexible film 61. In this step, the work piece 80 is provided with the second flow passage 06 having the opening provided at the lowermost portion of the inner wall and the first flow passage 07 having the opening provided at the uppermost portion of the inner wall, and the inner upper surface is inclined. The pressure vessel 02 and the flexible membrane 61 are placed on the placement base 03.

(Step 3)
FIG. 3 is an explanatory diagram B of the liquid pressure processing method according to the first embodiment of the present invention. From the state of step 2, the air remaining between the flexible film 61 and the mounting base 03 is sucked from the exhaust port 04 via the third flow passage 08 provided in the mounting base 03. As a result, the periphery of the workpiece 80 is in a reduced pressure state, and the flexible film 61 is in close contact with the workpiece 80 along the surface shape of the workpiece 80, as shown in FIG. By placing the workpiece 80 in a depressurized environment, fine bubbles remaining at the adhesive interface and the like are eliminated.

(Step 4)
In Step 4 subsequent to Step 3, in a state where the work piece 80 is covered with the flexible film 61, the pressurized liquid is supplied from the second flow path 06 having an opening at the bottom of the inner side surface of the pressure container 02. Inject into 02. Specifically, in the state of FIG. 3, the pressurized liquid is injected from the supply / discharge port 24 of the opening / closing valve 20 toward the inside of the pressure container 02. The pressurized liquid passes through the second channel 06, which is the wall channel of the pressure vessel 02, and fills the inside of the pressure vessel 02 from the opening of the second channel 06 near the flexible membrane 61. . When the pressurized liquid reaches the upper surface of the wall surface of the pressure container 02, the air remaining inside the pressure container 02 moves along the inclination of the upper wall surface of the inside of the pressure container 02, and the first flow path which is the connection flow path of the opening / closing valve 30 is removed. The air is discharged from the flow path 07 to an external pressurized liquid control circuit (not shown) connected to the supply / discharge port 34. When the injection of the pressurized liquid is further continued, the inside of the pressure vessel 02 is completely filled with the pressurized liquid at normal pressure.

(Step 5)
In the next step 5, residual air in the pressure vessel 02 is discharged from the first flow path 07 having an opening at the uppermost portion of the inner side surface of the pressure vessel 02. FIG. 4 is an explanatory diagram C of the liquid pressure processing method according to the first embodiment of the present invention. In this step, while the residual air is removed in step 4 and the injection from the supply / discharge port 24 is continued, the working air is supplied to the decompression port 13 of the pressurization mechanism 10 to move the pressurization piston 11 to the uppermost position. To do. The space below the pressurizing piston 11 is filled with the normal pressure liquid.

(Step 6)
After step 5, in step 6, the on-off valves 20 and 30 mounted on the outer side surface of the pressure vessel 02 are closed to seal the inside of the pressure vessel 02, thereby forming a closed space filled with the pressurized liquid. Specifically, by supplying operating air to the closing operation port 22 of the opening / closing valve 20 and the closing operation port 32 of the opening / closing valve 30, each spool moves to the pressure container side, whereby the flow path of the pressurized liquid is obtained. The space defined by the pressure vessel 02 and the flexible film 61 is filled with a pressurized liquid, and the on-off valves 20 and 30 are closed to form a closed state. FIG. 5 is an explanatory diagram D of the liquid pressure processing method according to the first embodiment of the present invention. FIG. 5 shows a state in which the spools 21 and 31 block the connection between the second flow passage 06, the first flow passage 07 and the supply / discharge ports 24 and 34.

(Step 7)
In this step, the pressurized liquid in the closed space is pressurized by the pressure mechanism 10 provided penetrating the inner upper surface of the pressure vessel 02, and the workpiece covered with the flexible film 61 is pressure-treated. . Specifically, first, in the state shown in FIG. 5, working air is supplied to the pressure port 12 of the pressure mechanism 10. As a result, the pressure of the working air acts on the upper end surface of the pressurizing piston 11, and the pressurizing piston 11 descends, so that the space inside the pressure vessel 02 is pressurized, and therefore the pressurizing filling the space. The liquid is compressed and pressurized. The area surrounded by the pressure vessel 02 and the flexible film 61 is closed by the closed on-off valves 20 and 30 and the pressurization mechanism 10, and at this time, the closed space, that is, the closed space is in a pressurized state. FIG. 6 is an explanatory diagram E of the liquid pressure processing method according to the first embodiment of the present invention. FIG. 6 shows a state in which the pressurizing piston 11 is gradually pushed downward. The space inside the pressure container 02 is pressurized by the volume of the pressurizing piston 11 moving downward, and therefore the pressure applied to the pressurized liquid filling the space increases. Although not shown, if a pressure sensor is installed inside the pressure vessel 02 and the operating air pressure supplied to the pressurizing port 12 is controlled based on the measured value, the pressurized liquid can be brought to a desired pressure. It is possible to control. This state is maintained for a predetermined time, and the pressure processing is completed. The workpiece 80 is separated from the space containing the pressurized liquid by the flexible film 61 during the pressure processing. A uniform pressing force is applied to the workpiece 80, the adhesion of the adhesive layer and the like is improved, and thus the processing quality is improved.

(Step 8)
After the pressure processing is completed, the pressurized liquid is discharged from the second flow path 06 having the opening at the bottom of the inner side surface of the pressure vessel 02. From the state shown in FIG. 6, the open / close valves 20 and 30 are opened, low-pressure air is supplied from the supply / discharge port 34 of the open / close valve 30, and pressurized liquid is supplied from the supply / discharge port 24 of the open / close valve 20. Drain. The supply / discharge port 24 is a port for injecting the pressurized liquid into the pressure container 02 and a port for discharging the pressurized liquid from the inside of the pressure container 02. Since the flow path of the pressure vessel 02 connected to the opening / closing valve 20 has the opening at the lowermost portion in contact with the flexible membrane 61, it is possible to sufficiently remove the pressurized liquid. At the same time, the pressurizing piston 11 of the pressurizing mechanism 10 descends to the lowermost portion and returns to the state shown in FIG.

(Step 9)
From the state shown in FIG. 2, the pressure vessel 02 is raised to the state shown in FIG. 1, and the workpiece 80 is taken out.

  According to this embodiment, it is possible to efficiently pressurize the work piece, reduce the risk of leakage of the pressurized liquid when the work piece is taken out, and allow the pressurized liquid to remain around the work piece. Can be suppressed and the risk that the work piece is exposed to the pressurized liquid can be reduced. Since the pressurized liquid does not easily remain on the flexible film 61, even if the flexible film 61 is damaged when the workpiece is taken out, there is a risk of the pressurized liquid leaking and the workpiece is pressed. The risk of exposure to liquid is reduced. Therefore, even a work piece having a high risk of breaking the flexible film (for example, a printed circuit board having many irregularities) can use a thin flexible film that follows the complicated surface shape of a fine work piece.

  In the above description, an example in which pneumatic pressure is used to operate the pressurizing mechanism 10 has been shown, but a hydraulic or electric system may be used. Further, although the opening / closing valves 20 and 30 have been described with respect to the valve structure assuming pneumatic driving, hydraulic driving or various means such as a general electromagnetic valve, a ball screw mechanism, a rack and pinion mechanism is used. It is also possible.

  As the moving mechanism 50 for moving the pressure vessel 02 up and down, a pneumatic cylinder mechanism or an electric linear drive mechanism can be used. However, it is assumed that these linear motion mechanisms are provided with position detection sensors. The rod clamp 52 of the moving mechanism 50 may be of pneumatically operated type. Alternatively, a dedicated clamp mechanism can be provided between the pressure container 02 and the mounting base 03. Further, for the working air control system and the pressurized liquid control system, a general fluid control circuit can be used, and detailed description thereof will be omitted.

[effect]
According to this embodiment, the chamber for pressurizing the workpiece by fitting the mounting base and the pressure container (formed when the pressure container and the mounting base are fitted and the on-off valve is closed). Since a closed space) is formed and a pressurizing mechanism is directly attached to the chamber, unnecessary pipes, pressure pumps, etc. can be eliminated and the size can be reduced. According to this embodiment, the placement base and the pressure vessel are separated from each other, so that the workpiece can be easily taken out.

  According to the present embodiment, after the pressurization process, the pressured liquid can be prevented from leaking when the mounting base and the pressure container are separated by draining the inside of the chamber. According to the present embodiment, the second flow path is provided at the bottom of the chamber and the first flow path is provided at the top of the chamber as a structure that facilitates drainage, so that the pressurized liquid filled in the chamber is supplied with air. When air is introduced from the exhaust port, it is discharged from the liquid supply / drain port by utilizing air pressure and gravity. If no pressurized liquid remains in the chamber, the risk of pressurized liquid leakage is low.

  In order to miniaturize the pressurizing mechanism, it is important to eliminate residual air in the chamber when injecting the pressurized liquid. According to the present embodiment, the upper surface of the chamber is provided with the air supply / exhaust port at the top. The air in the chamber can be eliminated by setting the inclination toward the (first flow path). According to the present embodiment, it is possible to efficiently pressurize by applying pressure by the pressurizing mechanism in a state where air is removed, and it is possible to downsize the pressurizing mechanism.

  According to this embodiment, it is possible to perform bonding and transfer by separating the workpiece and the processing liquid. By setting a flexible film (flexible film) as a pressurizing film immediately below the liquid supply / drainage port (second flow path) in the chamber, the workpiece and the pressurizing liquid can be separated. Further, by reducing the pressure of the separated space on the side of the work piece, the flexible film is brought into close contact with the work piece, and residual gas between the flexible film and the work piece can be eliminated. Further, the air between the workpiece and the adherend is removed, and the preparation is made to enable bubble-free bonding and transfer of a fine pattern. By pressurizing the pressurizing liquid in the chamber thereto by the pressurizing mechanism, the purpose thereof, that is, bonding and transfer is achieved. In addition, even if the flexible film should break, draining the liquid as described above reduces the risk of exposing the workpiece to the processing liquid.

  According to the present embodiment, the pressure vessel and the mounting base can be safely separated while suppressing the residual pressurized liquid.

  According to this embodiment, since the pressure vessel, the on-off valve, and the pressurizing mechanism are integrated, the inner upper surface of the pressure vessel is inclined, and the flow path is provided at the lowermost part of the inner wall, firstly, high pressure is applied during pressurization. The area to be processed is limited to the pressure processing section as much as possible to realize the integration of the device, which enables downsizing of the device and improvement of safety. Secondly, when the workpiece is taken out, It is possible to suppress the pressurized liquid from remaining around the workpiece, and reduce the risk of leakage of the pressurized liquid and the risk of exposing the workpiece to the pressurized liquid.

  Conventionally, external piping equipment was required, but in the present embodiment, the piping exposed to high pressure is integrated with the pressure vessel, the size including the piping is downsized, and there is also a risk of leakage or breakage that increases when the piping becomes high pressure. Will be reduced. In the present embodiment, miniaturization is realized by integration, and high pressure can be achieved while being small, and it is safe.

  If there is residual air between the flexible membrane and the work piece, the pressurization efficiency will deteriorate. Further, when there is residual air between the workpieces, it remains as voids between the workpieces. Therefore, it is necessary to eliminate residual air. In this embodiment, by vacuuming the third flow path of the mounting base to eliminate residual air between the flexible membrane and the mounting base, it is possible to improve the pressurization efficiency. It is possible to reduce the size of the pressing mechanism and eliminate voids between the workpieces.

  Although the present embodiment has a flexible film, it is a pressurized liquid that causes no problem even if it comes into contact with the workpiece, or when the workpiece is impregnated with a pressurized liquid that pressurizes the pressure vessel. Etc., no membrane is needed.

[Modification]
In addition, in the first embodiment, the base 01 and the mounting base 03 are horizontal, and the inner upper surface of the pressure vessel 02 is inclined in the vertical direction. However, as a modification of the liquid pressure processing apparatus according to the first embodiment. As shown in FIG. 7, it is also possible to eliminate residual air when injecting the pressurized liquid, by inclining the entire flow path system including the pressure vessel 02 at an appropriate angle. In the modification of the liquid pressure processing apparatus according to the first embodiment, the upper surface of the mounting base 03 is inclined with respect to the vertical direction with the side near the opening of the second channel 06 being the lowermost part. When the mounting base 03 is fitted to the pressure vessel 02, the portion directly below the opening of the second flow path 06 is low, and therefore the liquid in the pressure device is in the second flow path 06. It collects near the opening and drains easily. In the modified example of the liquid pressure processing apparatus according to the first embodiment, the drainage capacity is high, the risk of leakage of the pressurized liquid is reduced, and the risk of exposing the workpiece to the pressurized liquid is reduced.

  FIG. 7 is an explanatory diagram of the overall configuration of a modified example of the liquid pressure processing apparatus according to the first embodiment of the present invention. In this modification, the pressure vessel 02 is entirely inclined, and the mounting base 03 is inclined in the same direction as the inclination direction of the pressure vessel 02. Specifically, with respect to the installation floor surface, the entire flow path system, that is, the base 01, the mounting base 03, the pressure vessel 02, the opening / closing valves 20, 30, the moving mechanism 50, and the like are tilted by 10 degrees in the same direction. There is. The inclination angle is preferably 5 to 20 degrees, but is not limited to this. Even if the base 01 and the mounting base 03 are inclined about 5 to 20 degrees, the work piece 80 sucks the air on the back side of the work piece 80 through the exhaust port 04 to bring the work piece 80 into close contact with the mounting base 03. There is no problem such as misalignment or the like by providing the holder or surrounding the holder. In this modification, the pressurizing mechanism 10 is also tilted in the same direction as the tilting direction of the pressure vessel 02. According to this modification, since the drainage force increases due to the inclination of the pressure vessel 02, the drainage capacity is further improved in addition to the effect of the liquid pressure processing apparatus according to the first embodiment described above.

[Second Embodiment]
FIG. 8 is an explanatory diagram of the overall configuration of a liquid pressure processing apparatus according to the second embodiment of the present invention. In this embodiment, the flexible film 61 is provided on the upper surface of the mounting base 03 so as to cover the workpiece 80. The lower end of the pressure vessel 02 is in an open state, and there is no flexible film 61. Other configurations are similar to those of the first embodiment. Even when the pressure vessel 02 and the mounting base 03 are separated from each other, the work piece is still covered with the flexible film.

  The liquid pressure processing process according to the second embodiment will be described below. The liquid pressure processing apparatus according to the second embodiment uses the liquid pressure processing apparatus according to the second embodiment described above.

  The operation procedure in this embodiment is the same as steps 1 to 9 of the pressure processing process according to the first embodiment described above, except that the state shown in FIG. 8 is changed to the state shown in FIG.

  Also in this embodiment, the same operational effects as those of the above-described first embodiment are obtained.

[Third Embodiment]
FIG. 9 is an explanatory diagram of the overall configuration of a liquid pressure processing apparatus according to the third embodiment of the present invention. In this embodiment, of the configurations shown in the first embodiment, the functions of the pressurizing mechanism and one opening / closing valve are combined to realize further miniaturization. That is, the liquid pressure processing apparatus according to the third embodiment differs from the liquid pressure processing apparatus according to the first embodiment in that instead of the pressure mechanism 10, the first opening / closing valve 30 and the second opening / closing valve 30 are provided. At least one of the on-off valve 20 (the first on-off valve 30 in the third embodiment) is configured to reduce the volume of the internal space and pressurize the pressurized liquid in the internal space. This is the point where 40 is adopted.

  Specifically, the liquid pressure processing apparatus of the present embodiment includes (1) a base 01, and (2) a mounting base 03 that is fixed to the upper surface of the base 01 and on which a workpiece 80 is mounted. 3) The upper part of the mounting base 03 is provided with a first channel 07 having an opening at the uppermost portion of the inner side surface and a second channel 06 having an opening at the lowermost portion of the inner side surface. The pressure vessel 02 having a cylindrical shape with a lid whose upper surface is inclined with respect to the vertical direction with the opening side of the first flow channel 07 as the uppermost part, and (4) is attached to the outer side surface of the pressure vessel 02, and the second flow channel is provided. The on-off valve 20 connected to 06 and (5) the on-off valve mounted on the outer side surface of the pressure vessel 02 and connected to the first flow path 07, and the pressure vessel 02 and the mounting base 03 are Pressurizes the closed space by reducing the volume of the closed space formed when the valve is fitted and the on-off valve is closed. An on-off valve adding pressure mechanism 40 which is also a pressurizing mechanism, (6) a linear motion rod 51 having a pressure vessel 02 fixed to the upper end and penetrating the base 01, and a linear motion rod 51 fixed to the lower surface of the base 01 at an arbitrary position. And a rod clamp 52 that holds the pressure container 02 by moving the pressure container 02 up and down with respect to the mounting base 03 so that the pressure container 02 is separated or fitted. It has a pressurized liquid control circuit (not shown) for injecting or discharging a liquid, and (8) a flexible film 61 which is a film for covering the workpiece 80.

  The on-off valve adding pressure mechanism 40 that also serves as a pressurizing mechanism is installed at the position of the on-off valve 30 shown in FIG. In the third embodiment, the on-off valve adding pressure mechanism 40 is provided instead of the first on-off valve 30 in the first embodiment, but the present invention is not limited to this, and the second on-off valve in the first embodiment is used. The on-off valve additional pressure mechanism 40 may be provided instead of the on-off valve 20, or the on-off valve additional pressure mechanism 40 may be provided in addition to the first on-off valve 30 and the second on-off valve 20 in the first embodiment. Also good.

  In the present embodiment, the on-off valve adding pressure mechanism 40 is mounted on the outer wall surface of the first flow path 07 formed by penetrating the wall surface of the pressure vessel 02, and is arranged in the vertical center of the pressure vessel 02 with the on-off valve 20. A hollow opening / closing adjustment chamber / pressurizing chamber is provided at a position facing each other so as to project from the side surface of the pressure container 02, and is provided with a pressurizing spool 41 which is slidable in contact with the inner wall surface and is slidable on the outermost side. The closing operation port 42, then the opening operation port 43, and the supply / discharge port 44 are provided on the innermost side, that is, on the pressure vessel side. Each port is a through hole from the outside of the opening / closing valve additional pressure mechanism 40 to the inside opening / closing adjustment chamber / pressurization chamber, and the supply / discharge port 44 is directly connected to the first flow path 07 of the pressure vessel 02 and connected. There is. The end of the on-off valve adding pressure mechanism 40 including the flow path side tip of the supply / discharge port 44 is fitted in the wall surface of the pressure container 02. The opening / closing adjusting chamber of the opening / closing valve additional pressure mechanism 40 has a larger diameter than the opening / closing adjusting chamber of the opening / closing valve 20. The pressure spool 41 is a solid piston-shaped component having a larger diameter than the spool 21. When the base end of the pressurizing spool is at the position of the closing operation port, the supply / discharge port is connected to the flow passage, and when the base end of the pressurizing spool is at the position of the opening operation port, the flow passage is closed. It will be in a loose state.

  The on-off valve additional pressure mechanism 40 is configured to be able to control the operating pressure thereof, and with this configuration, the pressure in the closed space can be varied stably and easily. More preferably, a pressure sensor (not shown) capable of monitoring the pressure in the closed space is installed inside the pressure vessel 02, and the closing operation port 42 is connected to the pressure sensor based on the measured value. The supplied working air pressure is feedback-controlled. With this configuration, it is possible to more accurately control the operating pressure of the on-off valve adding pressure mechanism 40, and thus the pressure in the closed space.

  The pressure vessel 02 does not require the pressurizing mechanism 10, and thus can have a structure in which the upper end surface of the wall surface is closed. The upper heater 70 can be attached to the entire upper surface of the pressure vessel 02. The pressurizing mechanism required for pressurization can be further miniaturized, the volume of the pressurized liquid to be pressurized can be minimized, and as a result, the structure will not be affected by the expansion of the piping system due to the pressure of the pressurized liquid, and the entire Furthermore, it is more compact and simple, and the manufacturing cost and maintenance cost can be reduced.

  Other configurations are similar to those of the first embodiment.

  The liquid pressure processing process according to the third embodiment will be described below. The liquid pressure processing apparatus according to the third embodiment uses the liquid pressure processing apparatus according to the third embodiment described above.

(Step 1)
As shown in FIG. 9, the workpiece 80 is set on the mounting base 03.

(Step 2)
FIG. 10 is an explanatory diagram A of the liquid pressure processing method according to the third embodiment of the present invention. Step 2 of this embodiment is the same as step 2 of the first embodiment. The state shown in FIG. 9 changes to the state shown in FIG.

(Step 3)
Step 3 of the present embodiment is the same as step 3 of the first embodiment, and the flexible film 61 is in close contact with the surface of the workpiece 80.

(Step 4)
In step 4 of the present embodiment following step 3, the pressurized liquid is supplied from the second flow path 06 having an opening at the bottom of the inner side surface of the pressure vessel 02 in a state where the work piece is covered with a flexible film. Inject into the pressure vessel 02. Specifically, as in step 4 of the first embodiment, the pressurized liquid is introduced into the pressure container 02 from the supply / discharge port 24 of the opening / closing valve 20 to fill the inside.

(Step 5)
In the next step 5, residual air in the pressure vessel 02 is discharged from the first flow path 07 having an opening at the uppermost portion of the inner side surface of the pressure vessel 02. In step 5 of the present embodiment, the residual air in the pressure vessel 02 and the surplus pressurized liquid are discharged from the supply / discharge port 44 of the opening / closing valve additional pressure mechanism 40.

(Step 6)
After step 5, in step 6, the on-off valve 20 and the on-off valve adding pressure mechanism 40 mounted on the outer side surface of the pressure vessel 02 are closed to seal the inside of the pressure vessel 02, thereby closing space filled with the pressurized liquid. To form. In step 6 of the present embodiment, the working air is supplied to the closing operation port 22 of the opening / closing valve 20, and the spool 21 moves to the pressure container side, so that the second flow passage 06 and the supply / discharge port of the pressurized liquid are supplied. 24 is closed, and the on-off valve 20 is closed. In the present embodiment, the working air is sent to the closing operation port 42 of the on-off valve adding pressure mechanism 40 which is both the pressurizing mechanism and the on-off valve, and the pressurizing spool 41 moves to the pressure container 02 side, thereby adding the on-off valve. The supply / discharge port 44 of the pressure mechanism 40 is closed. FIG. 11 is an explanatory diagram B of the liquid pressure processing method according to the third embodiment of the present invention. FIG. 11 shows a state in which the periphery of the workpiece 80 is in a reduced pressure state, and the supply / discharge port 24 of the opening / closing valve 20 and the supply / discharge port 44 of the opening / closing valve additional pressure mechanism 40 are closed.

(Step 7)
FIG. 12 is an explanatory diagram C of the liquid pressure processing method according to the third embodiment of the present invention. In step 7 of the present embodiment, the pressurizing liquid in the closed space is pressurized by the on-off valve adding pressure mechanism 40, which is the pressurizing mechanism and the on-off valve provided on the outer side surface of the pressure vessel 02, and the flexible film 61 is used. The covered workpiece 80 is pressure-treated. Specifically, unlike step 7 of the first embodiment, operating air is further supplied to the closing operation port 42, and as shown in FIG. 12, the pressurizing spool 41 is further moved to the pressure container 02 side and pressure is increased. The pressurized liquid in the container is compressed and pressurized. When the pressure of the working air is increased, pressure is applied to the left end portion (base end side) of the pressure spool 41, and the pressure spool 41 moves to the right end surface (tip) side, that is, the pressure container side. The space inside the pressure vessel 02 is pressurized by the volume of the pressure spool 41 moved, and therefore the pressure applied to the pressurized liquid filling the space increases accordingly. Although not shown, if a pressure sensor is installed inside the pressure vessel 02 and the operating air pressure supplied to the closing operation port 42 is controlled based on the measured value, the pressurized liquid can be brought to a desired pressure. It is possible to control. This state is maintained for a predetermined time, and the pressure processing is completed.

(Step 8)
After the pressure processing is completed, the pressurized liquid is discharged from the second channel 06 having the opening at the bottom of the inner side surface of the pressure vessel 02, as in step 8 of the first embodiment. In the present embodiment, the open / close valve 20 and the open / close valve additional pressure mechanism 40 are opened from the state shown in FIG. 12, and low-pressure air is supplied from the supply / discharge port 44 of the open / close valve additional pressure mechanism 40. The pressurized liquid is discharged from the supply / discharge port 24 of the opening / closing valve 20, and the state shown in FIG. 10 is restored. The second channel 06 of the pressure vessel 02 connected to the on-off valve 20 has an opening at the lowermost portion in contact with the flexible membrane 61, so that the pressurized liquid can be sufficiently removed. is there.

(Step 9)
The pressure vessel 02 is raised from the state shown in FIG. 10 to the state shown in FIG. 9, and the workpiece 80 is taken out.

[effect]
According to the present embodiment, as in the first embodiment, it is possible to realize integration by limiting the region of high pressure during pressurization to the pressure processing unit as much as possible. As a result, it is possible to reduce the size of the device and improve the safety, and secondly, to prevent the pressurized liquid from remaining around the workpiece when the workpiece is taken out, and to prevent the leakage of the pressurized liquid. The risk of exposing the work piece to the pressurized liquid can be reduced.

  In this embodiment, since the on-off valve and the pressurizing mechanism are directly connected to and integrated with the pressure vessel, external piping is not required, and further, the pressurizing mechanism is included in the on-off valve. In addition to achieving downsizing, the area where high pressure is applied during pressurization can be limited to the pressure vessel, which is the pressurization processing unit, and there is no concern that the pipe will burst even if the pressurization processing pressure increases, and safety is high. Is high.

  The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the invention. Further, the constituent elements of each of the above embodiments can be arbitrarily combined without departing from the spirit of the invention.

  For example, in the liquid pressure processing process according to the above-described embodiment, the process of increasing the pressure of the pressurized liquid and performing pressure processing has been described. However, when it is necessary to heat the workpiece 80, the pressure container 02 The upper heater 70 and the lower heater 71 can be arranged on the upper surface and the lower surface of the mounting base 03 to set the workpiece 80 at a desired temperature. If the pressurized liquid heating unit and the cooling unit are provided in the pressurized liquid control circuit, the temperature of the workpiece 80 can be changed more rapidly.

  In the above-described embodiment, the vertical liquid pressure processing apparatus in which the pressure container 02 is provided above the mounting base 03 has been described as an example, but the present invention is not limited to this.

  In the embodiment described above, the opening facing the internal space of the first flow passage 07 is described as being provided at the uppermost part of the internal side surface of the pressure vessel 02, but the present invention is not limited to this, and the gas in the internal space is not limited to this. The position of the opening can be arbitrarily changed within a range that does not hinder the function of discharging the pressure. For example, the opening may be formed on the upper surface inside the pressure vessel 02.

  In the embodiment described above, the opening facing the internal space of the second flow path 06 is described as being provided at the bottom of the inner side surface of the pressure vessel 02, but the present invention is not limited to this, and the internal space is The position of the opening can be arbitrarily changed as long as the function of supplying the pressurized liquid is not hindered. For example, the opening may be formed on the mounting base 03.

  In the above-described embodiment, the internal upper surface of the pressure vessel 02 is described as being inclined with respect to the vertical direction with the opening side of the first flow path 07 as the uppermost portion, but the present invention is not limited to this, and the pressure vessel 02 of the pressure vessel 02 is not limited thereto. Various configurations such as a configuration in which only a part of the inner upper surface is inclined with respect to the vertical direction and a configuration in which the inner upper surface of the pressure vessel 02 is flat without being inclined with respect to the vertical direction can be adopted.

  In the above-described embodiment, the on-off valves 20 and 30 are described as being mounted on the outer side surface of the pressure container 02, but the present invention is not limited to this, and is provided integrally with the apparatus main body (pressure container 02 or mounting base 03). With such a configuration, the installation positions of the on-off valves 20 and 30 can be arbitrarily changed, and may be embedded in the side wall of the pressure vessel 02.

  In the above-described embodiment, the pressure vessel 02 is described as being provided with the pressurizing mechanism 10 or the opening / closing valve adding pressure mechanism 40, but the present invention is not limited to this, and the apparatus main body (the pressure vessel 02 or the mounting base 03) is internally provided. Any structure may be used as long as it can pressurize the pressurized liquid filled in the space. For example, after forming the closed space, the pressure container 02 is brought close to the mounting base 03 (or the mounting base 03 is placed in the pressure container 02. May be configured to pressurize the pressurized liquid in the closed space. Further, the installation positions of the pressurization mechanism 10 and the on-off valve addition pressure mechanism 40 can be arbitrarily changed within a range that does not impede the function of pressurizing the pressurized liquid in the closed space, for example, the inner side surface of the pressure container 02. It may be installed on the mounting base 03 or the like.

  In the embodiment described above, the moving mechanism 50 has been described as including the linearly moving rod 51 and the rod clamp 52, but the present invention is not limited to this, and at least one of the mounting base 03 and the pressure vessel 02 is brought closer to the other. Alternatively, various structures such as a pneumatic or hydraulic cylinder mechanism, a ball screw mechanism, a rack and pinion mechanism, and a toggle mechanism can be adopted as long as they can be relatively moved in the separating direction. . The moving mechanism 50 is configured to be capable of holding (locking) the mounting base 03 and the pressure container 02 in such a manner that the mounting base 03 and the pressure container 02 cannot move relative to each other, for example, the mounting base 03 and the pressure in the closed space (internal pressure) or higher. It is preferable to further include a configuration for restricting relative movement of the mounting base 03 and the pressure container 02 by pressing at least one of the pressure containers 02, and a configuration such as a physical lock mechanism.

  In the above-described embodiment, the upper surface of the mounting base 03 is described as being inclined with respect to the vertical direction with the side near the opening of the second flow path 06 as the lowermost portion, but the present invention is not limited to this. Various configurations such as a configuration in which only a part of the upper surface of the mounting base 03 is inclined with respect to the vertical direction or a configuration in which the upper surface of the mounting base 03 is flat without being inclined with respect to the vertical direction can be adopted. .

  The pressure processing is used in many fields including electronic parts, and the application of the present invention is wide. Further, when the pressurized liquid can directly contact the workpiece, the flexible film can be eliminated and the pressure processing can be performed with a simpler device configuration.

01 Base 02 Pressure Vessel 03 Placement Base 04 Exhaust Port 06 Second Flow Path 07 First Flow Path 08 Third Flow Path 10 Pressurizing Mechanism 11 Pressurizing Piston 12 Pressurizing Port 13 Depressurizing Port 20, 30 Open / Close Valve 21, 31 Spool 22, 32 Closed operation port 23, 33 Opened operation port 24 Supply / discharge port 34 Supply / discharge port 40 Open / close valve additional pressure mechanism 41 Pressurization spool 42 Closed operation port 43 Open operation port 44 Supply / discharge port 50 Direct drive mechanism 51 Linear Motion Rod 52 Rod Clamp 53 Linear Motion Bearing 60 Flexible Film Clamp 61 Flexible Film 70 Upper Heater 71 Lower Heater 80 Workpiece

Claims (9)

A mounting base on which a workpiece can be mounted, and a pressure which is arranged so as to face the mounting base and can form an internal space between the mounting base and the mounting base. A device body having a container,
A moving mechanism that relatively moves at least one of the placement base and the pressure vessel in a direction toward or away from the other;
The apparatus main body, the front Symbol a first flow path gases that the possible discharge of the internal space, and a pressurized liquid can be supplied the second flow path is formed against said inner space, said first a first switching valve for opening and closing the flow path, and a second on-off valve is provided, et al is for opening and closing said second flow path, constitute a pressurized liquid filled before Symbol in the internal space pressurizable Has been done,
The liquid pressure processing apparatus, wherein the first on-off valve and the second on-off valve are provided integrally with the placement base or the pressure vessel . The opening of the first channel facing the internal space is formed vertically above the opening of the second channel facing the internal space. Liquid pressure processing equipment. The pressure vessel is arranged vertically above the placement base, and is formed in a shape having an inner upper surface and an inner side surface,
The opening facing the internal space of the first flow path is formed on the internal top surface or the internal side surface of the pressure vessel,
The opening facing the internal space of the second flow path is formed in a lower portion of the internal side surface of the pressure container or in the mounting base described above. Pressure processing equipment. A mounting base on which a workpiece can be mounted, and a pressure which is arranged so as to face the mounting base and can form an internal space between the mounting base and the mounting base. A device body having a container,
A moving mechanism for relatively moving at least one of the placement base and the pressure vessel in a direction approaching or separating from the other;
Equipped with
The device body is
A first flow path capable of discharging gas in the internal space and a second flow path capable of supplying a pressurized liquid to the internal space are formed,
A first opening / closing valve for opening / closing the first flow path and a second opening / closing valve for opening / closing the second flow path are provided,
It is configured to pressurize the pressurized liquid filled in the internal space,
The pressure vessel is arranged vertically above the placement base, and is formed in a shape having an inner upper surface and an inner side surface,
The opening facing the internal space of the first flow path is formed on the internal top surface or the internal side surface of the pressure vessel,
The opening facing the internal space of the second flow path is formed in the lower part of the internal side surface of the pressure container or the mounting base,
Wherein the inner top surface of the pressure vessel, said first flow channel of the opening be inclined liquids pressurizing processing apparatus you characterized with respect to the vertical direction so that the uppermost. A mounting base on which a workpiece can be mounted, and a pressure which is arranged so as to face the mounting base and can form an internal space between the mounting base and the mounting base. A device body having a container,
A moving mechanism for relatively moving at least one of the placement base and the pressure vessel in a direction approaching or separating from the other;
Equipped with
The device body is
A first flow path capable of discharging gas in the internal space and a second flow path capable of supplying a pressurized liquid to the internal space are formed,
A first opening / closing valve for opening / closing the first flow path and a second opening / closing valve for opening / closing the second flow path are provided,
It is configured to pressurize the pressurized liquid filled in the internal space,
The pressure vessel is arranged vertically above the placement base, and is formed in a shape having an inner upper surface and an inner side surface,
The opening facing the internal space of the first flow path is formed on the internal top surface or the internal side surface of the pressure vessel,
The opening facing the internal space of the second flow path is formed in the lower part of the internal side surface of the pressure container or the mounting base,
The apparatus main body has a pressurizing mechanism that is mounted so as to penetrate the inner upper surface or the inner side surface of the pressure vessel and reduces the volume of the inner space to pressurize the pressurized liquid in the inner space. liquids pressurizing processing apparatus shall be the features. A mounting base on which a workpiece can be mounted, and a pressure which is arranged so as to face the mounting base and can form an internal space between the mounting base and the mounting base. A device body having a container,
A moving mechanism for relatively moving at least one of the placement base and the pressure vessel in a direction approaching or separating from the other;
Equipped with
The device body is
A first flow path capable of discharging gas in the internal space and a second flow path capable of supplying a pressurized liquid to the internal space are formed,
A first opening / closing valve for opening / closing the first flow path and a second opening / closing valve for opening / closing the second flow path are provided,
It is configured to pressurize the pressurized liquid filled in the internal space,
At least one of the first on-off valve and the second on-off valve is an on-off valve addition pressure mechanism configured to reduce the volume of the internal space and pressurize the pressurized liquid in the internal space. liquids pressurizing processing apparatus you wherein a. A mounting base on which a workpiece can be mounted, and a pressure which is arranged so as to face the mounting base and can form an internal space between the mounting base and the mounting base. A device body having a container,
A moving mechanism for relatively moving at least one of the placement base and the pressure vessel in a direction approaching or separating from the other;
Equipped with
The device body is
A first flow path capable of discharging gas in the internal space and a second flow path capable of supplying a pressurized liquid to the internal space are formed,
A first opening / closing valve for opening / closing the first flow path and a second opening / closing valve for opening / closing the second flow path are provided,
It is configured to pressurize the pressurized liquid filled in the internal space,
The placement based upper surface, said second flow path liquids pressurizing processing apparatus shall be the being inclined with respect to the vertical direction as the bottom of the open mouth portion near the side of the. A film that covers the workpiece and separates the workpiece and the pressurized liquid;
The membrane is a flexible membrane fixed to the lower end of the pressure vessel, or a flexible membrane installed on the upper surface of the placement base,
The placement base opens to the upper surface of the placement base, passes through the inside of the placement base, communicates with the outside of the placement base, and allows air between the placement base and the flexible film to flow. The liquid pressure processing apparatus according to any one of claims 1 to 7, further comprising exhaust means. A mounting base on which the workpiece is mounted and a pressure container arranged to face the mounting base are fitted to form an internal space,
Injecting a pressurized liquid into the internal space from the pressure vessel or the second channel formed in the placement base in a state in which the work piece is covered with a flexible film,
The residual air in the internal space is discharged from the first flow path formed in the pressure vessel,
By closing an on- off valve integrally provided on the pressure container or the placement base to seal the internal space, the internal space is a closed space filled with a pressurized liquid,
By pressurizing the pressurizing liquid in the closed space by the pressurizing mechanism provided in the pressure container or the placement base, the workpiece is pressure-treated,
After the pressure treatment, the pressurized liquid in the internal space is discharged, and the liquid pressure processing method is characterized.