JP6679215B2 - Shape measuring machine and its control method - Google Patents

Description

  The present invention relates to a shape measuring machine and a control method thereof, and more particularly to a shape measuring machine capable of avoiding a collision between an object to be measured and a stylus, and a control method thereof.

  By moving the stylus having a stylus and the displacement detector along the surface of the object to be measured (workpiece), the vertical displacement of the stylus is converted into an electric signal, and an arithmetic processing unit (computer) ) Is used to measure the surface roughness of the workpiece, the surface shape such as the contour, and the like (Patent Document 1).

  Generally, when performing measurement with a shape measuring machine, an operator visually aligns the stylus of a probe with a measurement position of a work. Next, the stylus is automatically moved relative to the shape of the work to measure the surface of the work.

JP, 2002-107144, A

  By the way, in recent years, the shape of a work has become complicated, and a step is often included in the work. When a stylus is moved to measure a workpiece including a step a plurality of times, there is a concern that the step of the workpiece collides with the stylus.

  In a shape measuring machine, it is also practiced to measure the upper surface and the lower surface inside a cylindrical work by using a probe having an upward stylus and a downward stylus. For example, when the upper surface is measured using the upward stylus, the probe is moved in the horizontal direction when the measurement is completed. The probe is moved while maintaining the horizontal state, and the downward stylus is aligned with the measurement start position. At this time, since the tracing stylus is moved while maintaining the horizontal state, for example, there is a concern that the inner surface of the work collides with the upward stylus or the downward stylus.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a shape measuring machine and a control method thereof capable of avoiding a collision between a stylus and an object to be measured.

  According to an aspect of the present invention, a shape measuring machine includes a base on which an object to be measured is placed, a support provided on the base, a Z-axis drive mechanism provided on the support and movable in a Z-axis, A drive mechanism including an X-axis drive mechanism provided in the Z-axis drive mechanism, a probe having an arm and a stylus provided on the tip side of the arm, and displacement detection attached to the X-axis drive mechanism. A displacement detector having a fulcrum that supports the arm in a vertically swingable manner and a displacement reading unit that measures the displacement of the arm, and a control that controls the displacement detector and the drive mechanism. A shape measuring machine comprising: a device; a stylus position adjusting mechanism for moving a tip position of the stylus; and the control device, a storage unit for storing measurement data of the probe, and the storage device. To the measurement data stored in the section And a stylus movement control unit for controlling the stylus position adjusting mechanism Zui.

  Preferably, the stylus position adjusting mechanism is an arm position adjusting mechanism provided in the displacement detector.

  Preferably, the stylus position adjusting mechanism is a measuring force adjusting mechanism provided at the rear end of the arm.

  Preferably, the stylus position adjusting mechanism is the Z-axis drive mechanism.

  Preferably, the stylus position adjusting mechanism is provided on the displacement detector that adjusts the position of the arm, and is attached to the arm position adjusting mechanism, the Z-axis drive mechanism, and the arm that adjusts the measuring force of the stylus. At least two measuring force adjusting mechanisms provided at the ends are included.

  Preferably, the stylus includes an upward stylus and a downward stylus extending in a swinging direction of the arm.

  According to another aspect of the present invention, there is provided a method for controlling a shape measuring machine, comprising a probe having an arm and a stylus provided on a tip side of the arm, and a fulcrum that supports the arm in a vertically swingable manner. A displacement detector having a displacement reading unit that measures the displacement of the arm, and a step of aligning the stylus with a measurement start position of an object to be measured, A step of moving the stylus horizontally along the object to be measured, obtaining the displacement amount of the arm and the displacement amount of the displacement detector in the horizontal direction as measurement data, and storing the measured data; A step of calculating a movement path for moving the stylus to the next measurement start position, and a step of moving the stylus of the tracing stylus to the next measurement start position based on information of the calculated movement path. When, Including.

  According to the present invention, it is possible to avoid a collision between the stylus and the object to be measured.

It is an external view of a shape measuring machine. It is a schematic block diagram of a measuring element, a displacement detector, and an X-axis drive mechanism. It is a block diagram which shows the structure of a shape measuring machine. It is a flowchart which shows the control method of a shape measuring machine. It is explanatory drawing explaining operation | movement of a tracing stylus at the time of measuring the workpiece | work which has a level | step difference. It is explanatory drawing explaining operation | movement of a tracing stylus at the time of measuring the workpiece | work which has a level | step difference based on this embodiment. It is explanatory drawing explaining operation | movement of the tracing stylus at the time of measuring a cylindrical work. It is explanatory drawing explaining operation | movement of the tracing stylus at the time of measuring a cylindrical work based on this embodiment.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The present invention will be described by the following preferred embodiments. Modifications can be made in many ways without departing from the scope of the invention, and other embodiments other than this embodiment can be used. Therefore, all modifications within the scope of the present invention are included in the claims.

  FIG. 1 is an external view of a shape measuring machine to which the present invention is applied. The shape measuring machine 10 includes a base 12 on which an object to be measured ((workpiece, (not shown)) is placed, a support 14 provided on the base 12, a probe 22, and displacement for detecting displacement of the probe 22. The detector 28 and the drive mechanism 16 for moving the probe 22 and the displacement detector 28 relative to the object to be measured are provided.

  As shown in FIG. 1, the drive mechanism 16 includes a Z-axis drive mechanism 18 provided with the support column 14 and an X-axis drive mechanism 20 provided with the Z-axis drive mechanism 18. Here, the Z axis means a direction perpendicular to the horizontal plane of the base 12.

  The Z-axis drive mechanism 18 includes, for example, a rail provided on the column 14 perpendicularly to the base 12, a slider slidable on the rail, a ball screw provided along the rail, and a motor for rotating the ball screw. And a Z-axis scale that detects the amount of movement of the slider. By rotating the motor, it is converted into linear motion by the ball screw, and the X-axis drive mechanism 20 attached to the slider can be moved in the Z-axis direction. The amount of movement of the X-axis drive mechanism 20 and the displacement detector 28 described later in the Z-axis direction (vertical direction) can be measured with the Z-axis scale.

  The tracing stylus 22 includes a stylus arm 24 and a stylus 26 provided on the tip side of the stylus arm 24. The stylus arm 24 of the tracing stylus 22 is detachably attached to an arm holder 30 protruding from the displacement detector 28. Therefore, it is possible to prepare a plurality of tracing stylus 22 and replace the tracing stylus 22 according to the object to be measured.

  The shape measuring machine 10 includes a control device 40, an input device 42 connected to the control device 40, and a display device 44 connected to the control device 40. The operator transmits input data such as commands and setting conditions from the input device 42 to the control device 40. Further, the control device 40 displays the measurement result and the like of the DUT on the display device 44 as output data.

  The shape measuring machine 10 includes an operation unit 46 such as a joystick. The operator can operate the operation unit 46 to manually move the probe 22 and the displacement detector 28.

  FIG. 2 is a schematic configuration diagram of the probe 22, the displacement detector 28, and the X-axis drive mechanism 20. The tracing stylus 22 has a stylus arm 24 and a stylus 26 provided on the tip end side of the stylus arm 24 and processed for shape measurement. The tip side of the stylus arm 24 means the side of the stylus arm 24 opposite to the displacement detector 28, and means the portion including the tip of the stylus arm 24.

  In the present embodiment, the stylus 26 is composed of a downward stylus extending in the swinging direction of the stylus arm 24, but the present invention is not limited to this. Therefore, the stylus 26 may be configured by an upward stylus extending in the swinging direction of the stylus arm 24, and the upward stylus and the downward stylus (T (Also referred to as a V-shaped stylus).

  The displacement detector 28 includes a drive unit connecting portion 50, a fulcrum 52 provided on the drive unit connecting portion 50, a rod-shaped swing arm 54 movably supported by the fulcrum 52, and a displacement for reading the displacement of the swing arm 54. And a reading unit 56.

  In the present embodiment, the stylus arm 24 and the swing arm 54 are detachably connected via the arm holder 30. Therefore, the swing arm 54 and the stylus arm 24 function as one arm 32.

  By connecting the stylus arm 24 and the swing arm 54, the fulcrum 52 can swingably support the arm 32 in the vertical direction, and the displacement reading unit 56 can measure the displacement of the arm 32.

  The displacement reading unit 56 is provided between the arm holder 30 and the fulcrum 52. As described above, since the stylus arm 24 and the swing arm 54 are connected to each other via the arm holder 30, the displacement reading unit 56 reads the displacement of the swing arm 54 to detect the vertical displacement of the stylus arm 24. Can be measured.

  As the displacement reading unit 56, a linear scale, an arc scale, a LVDT (Linear variable differential transformer), or the like can be used.

  In the embodiment, the displacement reading unit 56 is provided between the arm holder 30 and the fulcrum 52, but the displacement reading unit 56 may be provided on the opposite side of the fulcrum 52 from the arm holder 30.

  At the rear end of the swing arm 54, that is, at the rear end of the arm 32, a measuring force adjusting mechanism 58 for adjusting the measuring force of the stylus 26 is provided. As the measuring force adjusting mechanism 58, for example, a balance weight provided at the rear end portion of the arm 32 so that the position can be adjusted can be cited. By adjusting the position of the balance weight to the front end side or the rear end side with respect to the arm 32, the measuring force applied to the stylus 26 can be adjusted. Here, the measuring force means the pressing force with which the stylus 26 presses the work during measurement.

  With this measuring force adjusting mechanism 58, the tip position of the stylus 26 can be adjusted. When the measuring force is reduced by the measuring force adjusting mechanism 58, the tip position of the stylus 26 can be moved upward. When the measuring force is increased by the measuring force adjusting mechanism 58, the tip position of the stylus 26 is moved downward. It can be moved. The measuring force adjusting mechanism 58 can automatically adjust the position.

  For example, when the measuring force adjustment mechanism 58 is a balance weight, the position of the balance weight can be automatically adjusted with the following configuration. For example, a rail is provided at a position parallel to the arm 32. A slider movable along the rail is provided to connect the slider and the balance weight. By moving the slider along the rail, the balance weight can be automatically moved along the axial direction of the arm 32.

  Generally, the measuring force adjusting mechanism 58 is used for adjusting the minute measuring force of the stylus 26, and is not used for the purpose of adjusting the tip position of the stylus 26.

  The displacement detector 28 is provided with an arm position adjusting mechanism 60 for adjusting the position of the arm 32. The arm position adjusting mechanism 60 can move the arm 32 in the vertical direction, and as a result, the arm 32 swings in the vertical direction about the fulcrum 52.

  The arm position adjusting mechanism 60 generally moves the arm 32 to a predetermined position such as when moving the arm 32 horizontally, when moving the arm 32 upward, and when moving the arm 32 downward. The arm 32 is moved.

  In the present embodiment, the arm position adjusting mechanism 60 is configured to be able to adjust the arm 32 to any position, including the case of moving the arm 32 to a predetermined position.

  As the arm position adjusting mechanism 60, a combination of a U-shaped plate in side view and a motor can be mentioned. The arm 32 is passed through a U-shaped plate. By driving the motor in this state, the U-shaped plate is moved up and down. The arm 32 can be swung up and down as the U-shaped plate moves up and down. By changing the magnitude of the electric current applied to the motor, the arm 32 can be vertically swung (or moved) to an arbitrary position.

  The displacement detector 28 includes a housing 62 that surrounds the drive unit connecting unit 50, the fulcrum 52, the displacement reading unit 56, the measuring force adjusting mechanism 58, and the arm position adjusting mechanism 60.

  The drive unit connecting section 50 is a member for connecting the displacement detector 28 and the X-axis drive mechanism 20, and the displacement detector 28 and the X-axis drive mechanism 20 are connected to each other via the drive unit connecting section 50. To be done.

  The X-axis drive mechanism 20 includes a rail 70 extending in the X-axis direction, a slider 72 slidable on the rail 70, a ball screw 74 provided along the rail 70, a motor 76 for rotating the ball screw 74, and a slider 72. And an X-axis scale 78 that detects the amount of movement of the. By rotating the motor 76, it is converted into a linear motion by the ball screw 74, so that the displacement detector 28 attached to the slider 72 can be moved in the X-axis direction. The amount of movement of the displacement detector 28 in the X-axis direction (horizontal direction) can be measured by the X-axis scale 78.

  FIG. 3 is a block diagram showing the configuration of the shape measuring machine 10.

  The control device 40 includes a control unit 100, a processing unit 102, a storage unit 104, a measuring force adjustment unit 106, an arm position adjustment unit 108, a drive mechanism control unit 110, and a stylus movement control unit 112.

  The control unit 100 manages the entire operation of the shape measuring machine 10. An input device 42, a display device 44, and an operation unit 46 are connected to the control device 40. Input signals are transmitted from the input device 42 and the operation unit 46 to the control unit 100, the control unit 100 executes various programs according to the input signals, and the control unit 100 inputs the control signals, various data, and various programs. Execute the output.

  The displacement detector 28, the X-axis scale 78, and the Z-axis scale 80 are connected to the control device 40. The processing unit 102 of the control device 40 receives the measurement data from the displacement detector 28, the X-axis scale 78, and the Z-axis scale 80. The displacement detector 28 measures the displacement amount of the arm 32, the X-axis scale 78 measures the displacement amount of the displacement detector 28 in the X-axis direction (horizontal direction), and the Z-axis scale 80 measures the Z-axis of the displacement detector 28. The amount of movement in the direction (vertical direction) is measured and output to the processing unit 102.

  The processing unit 102 calculates the trajectory information of the tracing stylus 22 from the measurement data according to the control signal of the control unit 100, and obtains the contour shape and roughness of the work. The processing unit 102 outputs the calculation result to the control unit 100. The measurement result is output from the control unit 100 to the display device 44.

  The storage unit 104 of the control device 40 stores various programs, measurement data, trajectory information of the tracing stylus 22, the contour shape and roughness of the work. The control unit 100 inputs / outputs data to / from the storage unit 104.

  A measuring force adjusting mechanism 58 and an arm position adjusting mechanism 60 are connected to the control device 40. The measuring force adjusting unit 106 of the control device 40 controls the measuring force adjusting mechanism 58 according to the control signal from the control unit 100 to adjust the measuring force of the stylus 26. Further, the arm position adjusting unit 108 of the control device 40 controls the arm position adjusting mechanism 60 according to the control signal from the control unit 100 to move the position of the arm 32 to a predetermined position.

  A drive mechanism 16 including a Z-axis drive mechanism 18 and an X-axis drive mechanism 20 is connected to the control device 40. The drive mechanism control unit 110 of the control device 40 controls the drive mechanism 16 including the Z-axis drive mechanism 18 and the X-axis drive mechanism 20 in accordance with the control signal from the control unit 100, and the tracing stylus 22 and the displacement detector 28. Control the position of.

  The stylus movement control unit 112 calculates the movement path of the stylus 26 from the measurement end position to the next measurement start position based on the measurement data stored in the storage unit 104. When calculating the movement path, the stylus movement control unit 112 calculates a movement path that avoids the collision between the stylus 26 and the workpiece and that reduces the movement distance. The stylus movement control unit 112 outputs the movement route information to the control unit 100.

  In the present embodiment, the measurement data from the probe when the work is measured is stored in the storage unit 104. When moving the tracing stylus 22 that has completed the measurement to the next measurement start position, the stylus movement control unit 112 calculates the movement path based on the measurement data. Since the tracing stylus 22 is automatically moved based on the movement path information, the tracing stylus 22 can be efficiently moved to the next measurement start position without colliding with the work.

  The control unit 100 controls the stylus position adjustment mechanism based on the movement path information from the stylus movement control unit 112 to adjust the tip position of the stylus 26. That is, the stylus position adjustment mechanism is controlled by the stylus movement control unit 112 via the control unit 100.

  In the present embodiment, at least one of the Z-axis drive mechanism 18, the measuring force adjusting mechanism 58, and the arm position adjusting mechanism 60 constitutes a stylus position adjusting mechanism. As the stylus position adjusting mechanism, the Z-axis drive mechanism 18, the measuring force adjusting mechanism 58, and the arm position adjusting mechanism 60 capable of adjusting the position to an arbitrary position can be used in combination.

  FIG. 4 shows a flowchart of the control method of the shape measuring machine included in the present embodiment. In the control method of the shape measuring machine, a work is placed on the base of the shape measuring machine having a measuring element, a displacement detector, and a drive mechanism, and the measuring element is aligned with the measurement start position of the work (step S10).

  Next, the measurement data is acquired and stored (step S12). In step S12, the horizontal movement amount of the displacement detector and the vertical displacement amount of the stylus are acquired as measurement data while moving the tracing stylus along the surface of the work in the horizontal direction, and the measurement data is obtained. Remember.

  Next, the travel route is calculated from the measurement data (step S14). In step S14, the movement path for moving the stylus to the next measurement start position is calculated based on the measurement data.

  Finally, the tracing stylus is moved based on the information of the movement route (step S16). In step S16, the tracing stylus is moved to the next measurement start position based on the calculated movement path information.

  In the control method of the shape measuring machine of the present embodiment, since the moving path of the probe is calculated based on the measurement data of the workpiece, the collision of the stylus and the workpiece is started, and the probe is efficiently used. It can be moved.

  Next, a case of measuring a work having a step with the probe 22 having the downward stylus 26 will be described with reference to FIGS. 5 and 6.

  FIG. 5 shows the operation of the conventional probe 22 when the workpiece W having a step is repeatedly measured by the downward stylus 26. First, the operator visually aligns the tip position of the stylus 26 of the probe 22 with the measurement start position SP of the work W. After that, the stylus 26 of the tracing stylus 22 is automatically moved along the shape of the work W to the measurement end position EP. While moving the tracing stylus 22 from the measurement start position SP to the measurement end position EP, measurement data regarding the surface shape of the work W is acquired. The thick line on the surface of the work W virtually indicates the measurement location.

  When the probe 22 reaches the measurement end position EP, the operator visually moves the probe 22 to the next measurement start position. At that time, in order to prevent the stylus 26 from colliding with the work W, the tracing stylus 22 was moved at a large distance from the work W.

  In the method of FIG. 5, the safety distance L is increased in order to avoid the collision between the stylus 26 and the work W.

  FIG. 6 shows an operation of the tracing stylus 22 according to the present embodiment when the workpiece W having a step is repeatedly measured by the downward stylus 26.

  FIG. 6A shows a state in which the measurement of the work W having a step is finished, that is, the tracing stylus 22 is located at the measurement end position EP. While moving the tracing stylus 22 from the measurement start position SP to the measurement end position EP, measurement data regarding the surface shape of the work W is acquired.

  FIG. 6B shows one mode of the movement path of the stylus 26 for moving the tracing stylus 22 to the next measurement start position SP. In this mode, the stylus 26 is automatically moved along a movement path that is separated from the measurement data of the work W by a certain distance and does not collide with the work W. The stylus 26 moves a distance L1 from the upward surface of the work and a distance L2 from the side surface of the work W. Therefore, the stylus 26 moves along the shape of the work W. By the movement of the stylus, the collision between the stylus 26 and the work W can be avoided.

  FIG. 6C shows another mode of the movement path of the stylus 26 for moving the tracing stylus 22 to the next measurement start position SP. In this mode, the stylus 26 is moved vertically by a distance L4 to a position apart from the highest point of the measurement data by a constant distance L3, and then automatically moved linearly in the horizontal direction. . By the movement of the stylus, the collision between the stylus 26 and the work W can be avoided.

  In particular, since the measurement data is used, it is possible to shorten the distance L4 that the stylus 26 moves in the vertical direction while avoiding the collision between the stylus 26 and the work W.

  In FIG. 6, the tracing stylus 22 having the downward stylus 26 has been described, but the present invention can also be applied to the tracing stylus having the upward stylus. In the case of the upward pointing stylus, with respect to the aspect of FIG. 6C, after the measurement is completed, the stylus of the probe may be moved to a position separated from the lowest point of the measurement data by a certain distance.

  Next, referring to FIG. 7 and FIG. 8, when measuring the upper surface S1 and the lower surface S2 inside the bent cylindrical work W with the probe 22 having the upward pointing stylus 26A and the downward pointing stylus 26B. Explain.

  As shown in FIG. 7 (A), first, the operator visually aligns the tip position of the upward stylus 26A of the probe 22 with the measurement start position SP1 of the upper surface S1 inside the workpiece W. After that, the upward stylus 26A of the tracing stylus 22 is automatically moved to the measurement end position EP1 along the shape of the upper surface S1 of the work W. While moving the tracing stylus 22 from the measurement start position SP1 to the measurement end position EP1, measurement data regarding the surface shape of the upper surface S1 inside the work W is acquired. The thick line on the upper surface S1 inside the work W virtually indicates the measurement location.

  When the measurement of the upper surface S1 inside the workpiece W is completed, the downward stylus 26B of the probe 22 is moved from the measurement end position EP1 of the upper surface S1 to the measurement start position SP2 of the lower surface S2.

  As shown in FIG. 7B, in the operation of the conventional probe 22, when the measurement of the upper surface S1 is finished, the arm 32 of the probe 22 is moved in the horizontal direction at the measurement end position EP1. When the arm 32 is horizontal and the probe 22 is moved to the measurement start position SP2 on the lower surface S2, the lower surface S2 of the work W and the downward stylus 26B of the probe 22 collide at the bending portion of the cylindrical work W. There was a case to do.

  FIG. 8 shows the contact point 22 according to the present embodiment when the upper surface S1 and the lower surface S2 inside the bent cylindrical work W are measured by the contact point 22 having the upward contact probe 26A and the downward contact probe 26B. It shows the operation.

  Similar to FIG. 7A, FIG. 8A shows a state in which the measurement of the upper surface S1 inside the cylindrical work W has been completed.

  FIG. 8B shows one mode of the movement path of the upward stylus 26A and the downward stylus 26B for moving the tracing stylus 22 from the measurement end position EP1 to the next measurement start position SP2. . In this mode, the upward stylus 26A and the downward stylus 26B are automatically moved along a movement path that is away from the upper surface S1 by a certain distance L5 from the measurement data of the work W. The upward stylus 26A and the downward stylus 26B move along the shape of the upper surface S1 of the work W. By this movement, it is possible to avoid collision between the upward pointing stylus 26A and the downward pointing stylus 26B and the upper surface S1 or the lower surface S2 inside the work W.

  Next, in the present embodiment, at least one of the Z-axis drive mechanism 18, the measuring force adjusting mechanism 58, and the arm position adjusting mechanism 60 constitutes a stylus position adjusting mechanism. The stylus position adjusting mechanism can be configured to include at least two of the Z-axis drive mechanism 18, the measuring force adjusting mechanism 58, and the arm position adjusting mechanism 60. Each mechanism and its combination will be described with reference to FIGS. 1, 2, and 3.

  When the tip position of the stylus is adjusted by using the Z-axis drive mechanism 18, the shape measuring machine 10 already includes the Z-axis drive mechanism 18, so that it is not necessary to add a new mechanism.

  When the Z-axis drive mechanism 18 is used as the stylus position adjusting mechanism, the entire displacement detector 28 is moved up and down, so that the tip of the stylus 26 can be stably moved.

  Further, when the Z-axis drive mechanism 18 is used, the movement of the stylus 26 only moves in the vertical direction along the Z-axis direction, which facilitates control.

  When the measuring force adjusting mechanism 58 is used as the stylus position adjusting mechanism, the tip of the stylus 26 can be moved quickly. Therefore, even when the displacement detector 28 is moved quickly by the drive mechanism 16, the position of the tip of the stylus 26 can be controlled by following the movement of the displacement detector 28.

  When the arm position adjusting mechanism 60 is used as the stylus position adjusting mechanism, since the position of the arm 32 can be finely adjusted, the tip of the stylus 26 can be moved near the work.

  When the Z-axis drive mechanism 18 and the arm position adjusting mechanism 60 are used in combination as the stylus position adjusting mechanism, the arm 32 can be fixed by the arm position adjusting mechanism 60, so that the tip of the stylus 26 is prevented from wobbling. The Z-axis drive mechanism 18 can be moved vertically at high speed. According to this combination, the effect of using only the Z-axis drive mechanism 18 is not impaired.

  When the measuring force adjusting mechanism 58 and the arm position adjusting mechanism 60 are used in combination as the stylus position adjusting mechanism, the tip of the stylus 26 is moved at high speed by the measuring force adjusting mechanism 58 until the target position is reached. By controlling the fine adjustment of the tip of the stylus 26 by the arm position adjusting mechanism 60 retract mechanism, the tip position of the stylus 26 can be controlled while moving the displacement detector 28 at high speed.

  10 ... Shape measuring machine, 12 ... Base, 14 ... Strut, 16 ... Drive mechanism, 18 ... Z-axis drive mechanism, 20 ... X-axis drive mechanism, 22 ... Measuring element, 24 ... Stylus arm, 26 ... Stylus, 26A ... upward stylus, 26B ... downward stylus, 28 ... displacement detector, 30 ... arm holder, 32 ... arm, 40 ... control device, 42 ... input device, 44 ... display device, 46 ... operation unit, 50 ... drive unit Connection part, 52 ... Support point, 54 ... Swing arm, 56 ... Displacement reading part, 58 ... Measuring force adjusting mechanism, 60 ... Arm position adjusting mechanism, 62 ... Housing, 70 ... Rail, 72 ... Slider, 74 ... Ball screw, 76 ... Motor, 78 ... X-axis scale, 80 ... Z-axis scale, 100 ... Control unit, 102 ... Processing unit, 104 ... Storage unit, 106 ... Measuring force adjusting unit, 108 ... Arm position adjusting unit, 110 ... Driving mechanism control unit, 11 ... stylus movement control unit

Claims (7)

A base on which the object to be measured is placed,
A pillar provided on the base,
A drive mechanism including a Z-axis drive mechanism provided on the column and movable in the Z-axis; and an X-axis drive mechanism provided on the Z-axis drive mechanism,
A probe having an arm and a stylus provided on the tip side of the arm,
A displacement detector attached to the X-axis drive mechanism, comprising a fulcrum that supports the arm in a vertically swingable manner, and a displacement reading unit that measures the displacement of the arm.
A control device for controlling the displacement detector and the drive mechanism;
A shape measuring machine comprising:
A stylus position adjusting mechanism for moving the tip position of the stylus,
The control device stores the measurement data that is the measurement data of the contact point and that is related to the surface shape of the object to be measured, based on the measurement data stored in the storage unit , The movement path to be moved to the next measurement start position is calculated, and based on the information of the calculated movement path, the stylus position adjustment mechanism is moved so as to move the stylus of the probe to the next measurement start position. A stylus movement control unit to control,
Shape measuring machine equipped with.   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is an arm position adjusting mechanism provided in the displacement detector.   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is a measuring force adjusting mechanism provided at a rear end portion of the arm.   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is the Z-axis drive mechanism.   The stylus position adjusting mechanism is provided on the displacement detector for adjusting the position of the arm, and has an arm position adjusting mechanism, the Z-axis drive mechanism, and a rear end portion of the arm for adjusting the measuring force of the stylus. The shape measuring machine according to claim 1, further comprising at least two measuring force adjusting mechanisms provided.   The shape measuring machine according to any one of claims 1 to 5, wherein the stylus comprises an upward stylus and a downward stylus extending in a swinging direction of the arm. Displacement detector having a probe having an arm and a stylus provided on the tip side of the arm, a fulcrum that supports the arm in a vertically swingable manner, and a displacement reading unit that measures the displacement of the arm. A method of controlling a shape measuring machine, comprising:
Aligning the stylus with the measurement start position of the object to be measured,
Moving the stylus in the horizontal direction along the object to be measured, acquiring the displacement amount of the arm and the displacement amount of the displacement detector in the horizontal direction as measurement data, and storing the data.
Calculating a movement path for moving the stylus to the next measurement start position based on the measurement data relating to the surface shape of the object to be measured,
Moving the stylus of the tracing stylus to the next measurement start position based on the calculated movement path information;
A method of controlling a shape measuring machine including:

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