JP2016191631A - Shape measuring machine, and method of controlling the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measuring machine capable of avoiding a collision between a stylus and a workpiece, and a method of controlling the shape measuring machine.SOLUTION: A shape measuring machine 10 includes: a drive mechanism 16 including a Z-axis drive mechanism 18, and an X-axis drive mechanism 20; a prove 22 having an arm 32 and a stylus 26; a displacement detector 28; a controller 40 that controls the displacement detector 28 and the drive mechanism 16; and a stylus position adjustment mechanism that moves a tip position of the stylus. The controller 40 includes a storage section 104 that stores measurement data of the probe 22, and a stylus movement control section 112 that controls the stylus position adjustment mechanism on the basis of the measurement data.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a shape measuring machine and a control method thereof, and more particularly to a shape measuring machine capable of avoiding a collision between an object to be measured and a stylus and a control method thereof.

  A measuring element having a stylus and a displacement detector are moved along the surface of the object to be measured (work), and the amount of displacement of the stylus up and down is converted into an electrical signal so that an arithmetic processing unit such as a computer (computer) ) Is used to measure a surface shape such as surface roughness and contour of a workpiece (Patent Document 1).

  In general, when measuring with a shape measuring machine, an operator visually aligns the stylus of the probe with the measurement position of the workpiece. Next, the surface of the work is measured by automatically moving the stylus relative to the shape of the work.

JP 2002-107144 A

  By the way, in recent years, the shape of the workpiece is complicated, and the workpiece often includes a step. When a workpiece including a step is measured a plurality of times by moving the stylus, there is a concern that the step of the workpiece and the stylus collide.

  In a shape measuring machine, an upper surface and a lower surface inside a cylindrical workpiece are also measured using a probe having an upward stylus and a downward stylus. For example, when the upper surface is measured using an upward stylus, the measuring element is moved in the horizontal direction when the measurement is completed. The probe is moved while maintaining the horizontal state, and the downward stylus is aligned with the measurement start position. At this time, since the measuring element is moved while maintaining the horizontal state, for example, there is a concern that the inner surface of the workpiece and the upward stylus or the downward stylus collide.

  This invention is made | formed in view of such a situation, and it aims at providing the shape measuring machine which can avoid the collision with a stylus and a to-be-measured object, and its control method.

  According to one aspect of the present invention, a shape measuring machine includes a base for placing an object to be measured, a support provided on the base, a Z-axis drive mechanism provided on the support and movable to a Z-axis, A measuring mechanism having a driving mechanism including an X-axis driving mechanism provided in the Z-axis driving mechanism, an arm and a stylus provided on the distal end side of the arm, and a displacement detection attached to the X-axis driving mechanism A displacement detector having a fulcrum that slidably supports the arm in the vertical direction and a displacement reading unit for measuring the displacement of the arm, and a control for controlling the displacement detector and the drive mechanism. And a stylus position adjustment mechanism for moving a tip position of the stylus, the control device storing a measurement data of the probe, and the storage The measurement data stored in the And a stylus movement control unit for controlling the stylus position adjusting mechanism Zui.

  Preferably, the stylus position adjustment mechanism is an arm position adjustment mechanism provided in the displacement detector.

  Preferably, the stylus position adjusting mechanism is a measuring force adjusting mechanism provided at a rear end portion of the arm.

  Preferably, the stylus position adjustment mechanism is the Z-axis drive mechanism.

  Preferably, the stylus position adjustment mechanism is provided in the displacement detector that adjusts the position of the arm, and the arm position adjustment mechanism, the Z-axis drive mechanism, and the arm that adjusts the measurement force of the stylus It includes at least two of the measuring force adjusting mechanisms provided at the ends.

  Preferably, the stylus includes an upward stylus and a downward stylus extending in a swinging direction of the arm.

  According to another aspect of the present invention, a method for controlling a shape measuring machine includes a measuring element having an arm and a stylus provided on a tip side of the arm, and a fulcrum that supports the arm in a vertically movable manner. A displacement detector having a displacement reading unit for measuring the displacement of the arm, and a method for controlling the shape measuring machine, wherein the stylus is aligned with a measurement start position of the object to be measured; Based on the measurement data, a step of moving the stylus in the horizontal direction along the object to be measured and acquiring and storing the displacement amount of the arm and the displacement amount of the displacement detector in the horizontal direction as measurement data. Calculating a movement path for moving the stylus to the next measurement start position, and moving the stylus of the probe to the next measurement start position based on the calculated movement path information. When, Including.

  According to the present invention, the collision between the stylus and the object to be measured can be avoided.

It is an external view of a shape measuring machine. It is a schematic block diagram of a measuring element, a displacement detector, and an X-axis drive mechanism. It is a block diagram which shows the structure of a shape measuring machine. It is a flowchart which shows the control method of a shape measuring machine. It is explanatory drawing explaining operation | movement of the measuring element in the case of measuring the workpiece | work which has a level | step difference. It is explanatory drawing explaining operation | movement of the measuring element in the case of measuring the workpiece | work which has a level | step difference based on this embodiment. It is explanatory drawing explaining operation | movement of the measuring element in the case of measuring a cylindrical workpiece. It is explanatory drawing explaining operation | movement of the measuring element in the case of measuring a cylindrical workpiece based on this embodiment.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. The present invention is illustrated by the following preferred embodiments. Changes can be made by many techniques without departing from the scope of the present invention, and other embodiments than the present embodiment can be utilized. Accordingly, all modifications within the scope of the present invention are included in the claims.

  FIG. 1 is an external view of a shape measuring machine to which the present invention is applied. The shape measuring machine 10 includes a base 12 on which an object to be measured ((work, (not shown)) is placed, a support 14 provided on the base 12, a measuring element 22, and a displacement for detecting the displacement of the measuring element 22. A detector 28 and a drive mechanism 16 that moves the measuring element 22 and the displacement detector 28 relative to the object to be measured are provided.

  As shown in FIG. 1, the drive mechanism 16 includes a Z-axis drive mechanism 18 provided with a support 14 and an X-axis drive mechanism 20 provided on the Z-axis drive mechanism 18. Here, the Z-axis means a vertical direction with respect to the horizontal plane of the base 12.

  The Z-axis drive mechanism 18 includes, for example, a rail that is provided on the support column 14 perpendicularly to the base 12, a slider that can slide on the rail, a ball screw that is provided along the rail, a motor that rotates the ball screw, And a Z-axis scale that detects the amount of movement of the slider. By rotating the motor, it is converted into a linear motion by a ball screw, and the X-axis drive mechanism 20 attached to the slider can be moved in the Z-axis direction. The amount of movement in the Z-axis direction (vertical direction) of the X-axis drive mechanism 20 and the displacement detector 28 described later can be measured on a Z-axis scale.

  The measuring element 22 includes a stylus arm 24 and a stylus 26 provided on the distal end side of the stylus arm 24. The stylus arm 24 of the probe 22 is detachably attached to an arm holder 30 protruding from the displacement detector 28. Therefore, it is possible to prepare a plurality of measuring elements 22 and replace the measuring elements 22 according to the object to be measured.

  The shape measuring machine 10 includes a control device 40, an input device 42 connected to the control device 40, and a display device 44 connected to the control device 40. The operator transmits input data such as commands and setting conditions from the input device 42 to the control device 40. Further, the control device 40 displays the measurement result of the object to be measured on the display device 44 as output data.

  The shape measuring machine 10 includes an operation unit 46 such as a joystick. When the operator operates the operation unit 46, the measuring element 22 and the displacement detector 28 can be manually moved.

  FIG. 2 is a schematic configuration diagram of the probe 22, the displacement detector 28, and the X-axis drive mechanism 20. The measuring element 22 includes a stylus arm 24 and a stylus 26 provided on the distal end side of the stylus arm 24 and processed for measuring the shape. The distal end side of the stylus arm 24 means a side opposite to the displacement detector 28 in the stylus arm 24 and means a portion including the distal end of the stylus arm 24.

  In the present embodiment, the stylus 26 is composed of a downward stylus extending in the direction in which the stylus arm 24 swings, but is not limited thereto. Therefore, the stylus 26 can be constituted by an upward stylus extending in the swing direction of the stylus arm 24, and an upward stylus and a downward stylus (T) extending in the swing direction of the stylus arm 24 (T It can also be composed of a letter-shaped stylus.

  The displacement detector 28 includes a drive unit connecting unit 50, a fulcrum 52 provided in the drive unit connecting unit 50, a rod-like swing arm 54 that is slidably supported by the fulcrum 52, and a displacement that reads the displacement of the swing arm 54. A reading unit 56.

  In the present embodiment, the stylus arm 24 and the swing arm 54 are detachably connected via the arm holder 30. Therefore, the peristaltic arm 54 and the stylus arm 24 function as a single arm 32.

  By connecting the stylus arm 24 and the swing arm 54, the fulcrum 52 can support the arm 32 so as to be swingable in the vertical direction, and the displacement reading unit 56 can measure the displacement of the arm 32.

  The displacement reading unit 56 is provided between the arm holder 30 and the fulcrum 52. As described above, since the stylus arm 24 and the peristaltic arm 54 are connected via the arm holder 30, the displacement reading unit 56 reads the displacement of the peristaltic arm 54 so that the displacement of the stylus arm 24 in the vertical direction is reduced. Can be measured.

  As the displacement reading unit 56, a linear scale, an arc scale, an LVDT (Linear variable differential transformer) or the like can be used.

  In the embodiment, the displacement reading unit 56 is provided between the arm holder 30 and the fulcrum 52, but the displacement reading unit 56 may be provided on the opposite side of the arm holder 30 with respect to the fulcrum 52.

  A measuring force adjusting mechanism 58 for adjusting the measuring force of the stylus 26 is provided at the rear end of the swing arm 54, that is, the rear end of the arm 32. As the measuring force adjusting mechanism 58, for example, a balance weight provided at the rear end portion of the arm 32 so as to be position-adjustable can be cited. By adjusting the position of the balance weight to the front end side or the rear end side with respect to the arm 32, the measurement force applied to the stylus 26 can be adjusted. Here, the measuring force means a pressing force with which the stylus 26 presses the workpiece during measurement.

  With this measuring force adjusting mechanism 58, the tip position of the stylus 26 can be adjusted. When the measuring force is reduced by the measuring force adjusting mechanism 58, the tip position of the stylus 26 can be moved upward. When the measuring force is increased by the measuring force adjusting mechanism 58, the tip position of the stylus 26 is moved downward. Can be moved. The measuring force adjusting mechanism 58 can automatically adjust the position.

  For example, when the measuring force adjusting mechanism 58 is a balance weight, the position of the balance weight can be automatically adjusted with the following configuration. For example, a rail is provided at a position parallel to the arm 32. A slider movable along the rail is provided, and the slider and the balance weight are connected. The balance weight can be automatically moved along the axial direction of the arm 32 by moving the slider along the rail.

  Generally, the measurement force adjusting mechanism 58 is used to adjust a minute measurement force of the stylus 26 and is not used for the purpose of adjusting the tip position of the stylus 26.

  The displacement detector 28 is provided with an arm position adjustment mechanism 60 for adjusting the position of the arm 32. The arm position adjusting mechanism 60 can move the arm 32 in the vertical direction, and as a result, the arm 32 swings in the vertical direction around the fulcrum 52.

  In general, the arm position adjusting mechanism 60 is moved to a predetermined position when the arm 32 is moved horizontally, when the arm 32 is moved upward, or when the arm 32 is moved downward. The arm 32 is moved.

  In the present embodiment, the arm position adjustment mechanism 60 is configured to be able to adjust the arm 32 to an arbitrary position, including the case where the arm 32 is moved to a predetermined position.

  Examples of the arm position adjusting mechanism 60 include a combination of a U-shaped plate and a motor in a side view. The arm 32 is passed through the U-shaped plate. By driving the motor in this state, the U-shaped plate is moved up and down. As the U-shaped plate moves up and down, the arm 32 can be swung up and down. By changing the magnitude of the current applied to the motor, the arm 32 can be swung (or moved) to an arbitrary position up and down.

  The displacement detector 28 includes a housing 62 that surrounds the drive unit connecting unit 50, the fulcrum 52, the displacement reading unit 56, the measuring force adjusting mechanism 58, and the arm position adjusting mechanism 60.

  The drive unit connection unit 50 is a member for connecting the displacement detector 28 and the X-axis drive mechanism 20, and the displacement detector 28 and the X-axis drive mechanism 20 are connected to each other via the drive unit connection unit 50. Is done.

  The X-axis drive mechanism 20 includes a rail 70 extending in the X-axis direction, a slider 72 that can slide on the rail 70, a ball screw 74 provided along the rail 70, a motor 76 that rotates the ball screw 74, and a slider 72. And an X-axis scale 78 that detects the amount of movement of. By rotating the motor 76, it is converted into a linear motion by the ball screw 74, and the displacement detector 28 attached to the slider 72 can be moved in the X-axis direction. The amount of movement of the displacement detector 28 in the X-axis direction (horizontal direction) can be measured with the X-axis scale 78.

  FIG. 3 is a block diagram showing the configuration of the shape measuring machine 10.

  The control device 40 includes a control unit 100, a processing unit 102, a storage unit 104, a measurement force adjustment unit 106, an arm position adjustment unit 108, a drive mechanism control unit 110, and a stylus movement control unit 112.

  The control unit 100 manages the entire operation of the shape measuring machine 10. An input device 42, a display device 44, and an operation unit 46 are connected to the control device 40. Input signals are transmitted from the input device 42 and the operation unit 46 to the control unit 100, and the control unit 100 executes various programs according to the input signals, and the control unit 100 inputs control signals, various data, and various programs. Run the output.

  A displacement detector 28, an X-axis scale 78, and a Z-axis scale 80 are connected to the control device 40. The processing unit 102 of the control device 40 receives measurement data from the displacement detector 28, the X-axis scale 78, and the Z-axis scale 80. The displacement amount of the arm 32 is measured from the displacement detector 28, the movement amount of the displacement detector 28 in the X-axis direction (horizontal direction) is measured from the X-axis scale 78, and the Z-axis of the displacement detector 28 is measured from the Z-axis scale 80. The amount of movement in the direction (vertical direction) is measured and output to the processing unit 102.

  The processing unit 102 calculates the trajectory information of the probe 22 from the measurement data according to the control signal of the control unit 100, and obtains the contour shape and roughness of the workpiece. The processing unit 102 outputs the calculation result to the control unit 100. The measurement result is output from the control unit 100 to the display device 44.

  The storage unit 104 of the control device 40 stores various programs, measurement data, trajectory information of the probe 22, workpiece contour shape and roughness. The control unit 100 executes data input / output with respect to the storage unit 104.

  A measuring force adjusting mechanism 58 and an arm position adjusting mechanism 60 are connected to the control device 40. The measurement force adjustment unit 106 of the control device 40 controls the measurement force adjustment mechanism 58 according to the control signal from the control unit 100 to adjust the measurement force of the stylus 26. Further, the arm position adjusting unit 108 of the control device 40 controls the arm position adjusting mechanism 60 in accordance with a control signal from the control unit 100 to move the position of the arm 32 to a predetermined position.

  A drive mechanism 16 including a Z-axis drive mechanism 18 and an X-axis drive mechanism 20 is connected to the control device 40. The drive mechanism control unit 110 of the control device 40 controls the drive mechanism 16 including the Z-axis drive mechanism 18 and the X-axis drive mechanism 20 according to the control signal from the control unit 100, and the measuring element 22 and the displacement detector 28. Control the position of the.

  The stylus movement control unit 112 calculates a movement path of the stylus 26 from the measurement end position to the next measurement start position based on the measurement data stored in the storage unit 104. When calculating the movement path, the stylus movement control unit 112 calculates a movement path that avoids a collision between the stylus 26 and the workpiece and shortens the movement distance. The stylus movement control unit 112 outputs movement path information to the control unit 100.

  In the present embodiment, measurement data from a probe when measuring a workpiece is stored in the storage unit 104. When the probe 22 that has finished the measurement is moved to the next measurement start position, the stylus movement control unit 112 calculates a movement path based on the measurement data. Since the probe 22 is automatically moved based on the movement path information, the probe 22 can be efficiently moved to the next measurement start position without colliding with the workpiece.

  The control unit 100 controls the stylus position adjustment mechanism based on the movement path information from the stylus movement control unit 112 and adjusts the tip position of the stylus 26. That is, the stylus position adjustment mechanism is controlled by the stylus movement control unit 112 via the control unit 100.

  In the present embodiment, the stylus position adjustment mechanism is configured by at least one of the Z-axis drive mechanism 18, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60. As the stylus position adjustment mechanism, the Z-axis drive mechanism 18, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60 that can be adjusted to an arbitrary position can be used in combination.

  FIG. 4 shows a flowchart of the control method of the shape measuring machine included in this embodiment. In the shape measuring machine control method, the workpiece is placed on the base of the shape measuring machine having the measuring element, the displacement detector, and the drive mechanism, and the measuring element is aligned with the measurement start position of the workpiece (step S10).

  Next, measurement data is acquired and stored (step S12). In step S12, the horizontal movement amount of the displacement detector and the vertical displacement amount of the stylus are acquired as measurement data while moving the probe along the surface of the workpiece in the horizontal direction, and the measurement data is obtained. Remember.

  Next, a movement route is calculated from the measurement data (step S14). In step S14, a movement path for moving the stylus to the next measurement start position is calculated based on the measurement data.

  Finally, the measuring element is moved based on the information of the movement path (step S16). In step S16, the probe is moved to the next measurement start position based on the calculated movement route information.

  In the control method of the shape measuring machine according to the present embodiment, the movement path of the probe is calculated based on the measurement data of the workpiece. Therefore, the collision between the stylus and the workpiece is started, and the probe is efficiently moved. Can be moved.

  Next, a case where a workpiece having a step is measured with a probe 22 having a downward stylus 26 will be described with reference to FIGS. 5 and 6.

  FIG. 5 shows the operation of the conventional probe 22 when the workpiece W having a step is repeatedly measured by the downward stylus 26. First, the operator visually aligns the tip position of the stylus 26 of the probe 22 with the measurement start position SP of the workpiece W. Thereafter, the stylus 26 of the probe 22 is automatically moved along the shape of the workpiece W to the measurement end position EP. While moving the probe 22 from the measurement start position SP to the measurement end position EP, measurement data regarding the surface shape of the workpiece W is acquired. In addition, the thick line on the surface of the workpiece | work W has shown the measurement place virtually.

  When the probe 22 reaches the measurement end position EP, the operator visually moves the probe 22 to the next measurement start position. At that time, the probe 22 is moved at a large distance from the workpiece W so that the stylus 26 does not collide with the workpiece W.

  In the method of FIG. 5, the safety distance L is increased in order to avoid a collision between the stylus 26 and the workpiece W.

  FIG. 6 shows the operation of the probe 22 according to the present embodiment when the workpiece W having a step is repeatedly measured by the downward stylus 26.

  FIG. 6A shows a state where the measurement of the workpiece W having a step is finished, that is, the measuring element 22 is located at the measurement end position EP. While moving the probe 22 from the measurement start position SP to the measurement end position EP, measurement data regarding the surface shape of the workpiece W is acquired.

  FIG. 6B shows one mode of the movement path of the stylus 26 for moving the probe 22 to the next measurement start position SP. In this aspect, the stylus 26 is automatically moved along a movement path that is separated from the measurement data of the workpiece W by a certain distance and does not collide with the workpiece W. The stylus 26 moves away from the upward surface of the workpiece by a distance L1 and away from the side surface of the workpiece W by a distance L2. Accordingly, the stylus 26 moves along the shape of the workpiece W. By this movement of the stylus, the collision between the stylus 26 and the workpiece W can be avoided.

  FIG. 6C shows another aspect of the movement path of the stylus 26 for moving the probe 22 to the next measurement start position SP. In this embodiment, the stylus 26 is moved vertically by a distance L4 to a position away from the highest point of the measurement data by a certain distance L3, and then automatically moved linearly in the horizontal direction. . By this movement of the stylus, the collision between the stylus 26 and the workpiece W can be avoided.

  In particular, since the measurement data is used, the distance L4 that the stylus 26 moves in the vertical direction can be shortened while avoiding the collision between the stylus 26 and the workpiece W.

  In FIG. 6, the probe 22 having the downward stylus 26 has been described. However, the probe can also be applied to a probe having the upward stylus. In the case of an upward stylus, with respect to the mode of FIG. 6C, after the measurement is completed, the stylus of the probe may be moved to a position away from the lowest point of the measurement data by a certain distance.

  Next, the case where the upper surface S1 and the lower surface S2 inside the bent cylindrical workpiece W are measured with the probe 22 having the upward stylus 26A and the downward stylus 26B is based on FIG. 7 and FIG. I will explain.

  As shown in FIG. 7A, first, the operator visually aligns the tip position of the upward stylus 26A of the probe 22 with the measurement start position SP1 of the upper surface S1 inside the workpiece W. Thereafter, the upward stylus 26A of the probe 22 is automatically moved to the measurement end position EP1 along the shape of the upper surface S1 of the workpiece W. While the probe 22 is moved from the measurement start position SP1 to the measurement end position EP1, measurement data regarding the surface shape of the upper surface S1 inside the workpiece W is acquired. A thick line on the upper surface S1 inside the work W virtually indicates a measurement location.

  When the measurement of the upper surface S1 inside the workpiece W is completed, the downward stylus 26B of the probe 22 is moved from the measurement end position EP1 of the upper surface S1 to the measurement start position SP2 of the lower surface S2.

  As shown in FIG. 7B, in the operation of the conventional probe 22, when the measurement of the upper surface S1 is finished, the arm 32 of the probe 22 is moved in the horizontal direction at the measurement end position EP1. When the arm 32 is in a horizontal state and the probe 22 is moved to the measurement start position SP2 on the lower surface S2, the lower surface S2 of the workpiece W collides with the downward stylus 26B of the probe 22 at the bent portion of the cylindrical workpiece W. There was a case.

  FIG. 8 shows the measuring element 22 according to the present embodiment when the upper surface S1 and the lower surface S2 inside the bent cylindrical workpiece W are measured by the measuring element 22 having the upward stylus 26A and the downward stylus 26B. The operation is shown.

  FIG. 8A shows a state in which the measurement of the upper surface S <b> 1 inside the cylindrical workpiece W is finished as in FIG. 7A.

  FIG. 8B shows one mode of the movement path of the upward stylus 26A and the downward stylus 26B for moving the probe 22 from the measurement end position EP1 to the next measurement start position SP2. . In this aspect, the upward stylus 26A and the downward stylus 26B are automatically moved from the measurement data of the workpiece W along a movement path that is a fixed distance L5 away from the upper surface S1. The upward stylus 26A and the downward stylus 26B move along the shape of the upper surface S1 of the workpiece W. By this movement, the collision between the upward stylus 26A and the downward stylus 26B and the upper surface S1 or the lower surface S2 inside the workpiece W can be avoided.

  Next, in this embodiment, the stylus position adjustment mechanism is configured by at least one of the Z-axis drive mechanism 18, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60. The stylus position adjustment mechanism can be configured to include at least two of the Z-axis drive mechanism 18, the measurement force adjustment mechanism 58, and the arm position adjustment mechanism 60. Each mechanism and its combination will be described with reference to FIG. 1, FIG. 2, and FIG.

  When the tip position of the stylus is adjusted using the Z-axis drive mechanism 18, the shape measuring machine 10 already includes the Z-axis drive mechanism 18, so there is no need to add a new mechanism.

  When the Z-axis drive mechanism 18 is used as the stylus position adjustment mechanism, the entire displacement detector 28 is moved up and down, so that the tip of the stylus 26 can be moved stably.

  Further, when the Z-axis drive mechanism 18 is used, the movement of the stylus 26 becomes only a movement in the vertical direction along the Z-axis direction, so that the control becomes easy.

  When the measurement force adjustment mechanism 58 is used as the stylus position adjustment mechanism, the tip of the stylus 26 can be moved quickly. Therefore, even when the displacement detector 28 is moved quickly by the drive mechanism 16, the position of the tip of the stylus 26 can be controlled by following the movement of the displacement detector 28.

  When the arm position adjusting mechanism 60 is used as the stylus position adjusting mechanism, the position of the arm 32 can be finely adjusted, so that the tip of the stylus 26 can be moved near the work.

  When the Z-axis drive mechanism 18 and the arm position adjusting mechanism 60 are used in combination as the stylus position adjusting mechanism, the arm 32 can be fixed by the arm position adjusting mechanism 60, so that the tip of the stylus 26 can be prevented from wobbling. Thus, the Z-axis drive mechanism 18 can be moved up and down at high speed. According to this combination, the effect when only the Z-axis drive mechanism 18 is used is not hindered.

  When the measurement force adjustment mechanism 58 and the arm position adjustment mechanism 60 are used in combination as the stylus position adjustment mechanism, the tip of the stylus 26 is moved at high speed by the measurement force adjustment mechanism 58 until the target position is reached. By controlling fine adjustment of the tip of the stylus 26 with the arm position adjusting mechanism 60 retract mechanism, the tip position of the stylus 26 can be controlled while moving the displacement detector 28 at high speed.

  DESCRIPTION OF SYMBOLS 10 ... Shape measuring machine, 12 ... Base, 14 ... Support | pillar, 16 ... Drive mechanism, 18 ... Z-axis drive mechanism, 20 ... X-axis drive mechanism, 22 ... Measuring element, 24 ... Stylus arm, 26 ... Stylus, 26A ... upward stylus, 26B ... downward stylus, 28 ... displacement detector, 30 ... arm holder, 32 ... arm, 40 ... control device, 42 ... input device, 44 ... display device, 46 ... operation unit, 50 ... drive unit Connecting part, 52 ... fulcrum, 54 ... peristaltic arm, 56 ... displacement reading part, 58 ... measuring force adjusting mechanism, 60 ... arm position adjusting mechanism, 62 ... housing, 70 ... rail, 72 ... slider, 74 ... ball screw, 76 ... Motor: 78 ... X-axis scale, 80 ... Z-axis scale, 100 ... control unit, 102 ... processing unit, 104 ... storage unit, 106 ... measuring force adjustment unit, 108 ... arm position adjustment unit, 110 ... drive mechanism control unit, 11 ... stylus movement control unit

Claims (7)

A base for placing an object to be measured;
A support provided on the base;
A drive mechanism including a Z-axis drive mechanism that is provided on the support column and is movable on the Z-axis; and an X-axis drive mechanism provided on the Z-axis drive mechanism;
A probe having an arm and a stylus provided on the tip side of the arm;
A displacement detector attached to the X-axis drive mechanism, the displacement detector having a fulcrum that supports the arm in a vertically movable manner, and a displacement reading unit that measures the displacement of the arm;
A controller for controlling the displacement detector and the drive mechanism;
A shape measuring machine comprising:
A stylus position adjustment mechanism for moving the tip position of the stylus,
The control device includes a storage unit that stores measurement data of the probe, a stylus movement control unit that controls the stylus position adjustment mechanism based on the measurement data stored in the storage unit,
A shape measuring machine.   The shape measuring machine according to claim 1, wherein the stylus position adjustment mechanism is an arm position adjustment mechanism provided in the displacement detector.   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is a measuring force adjusting mechanism provided at a rear end portion of the arm.   The shape measuring machine according to claim 1, wherein the stylus position adjusting mechanism is the Z-axis driving mechanism.   The stylus position adjustment mechanism is provided in the displacement detector that adjusts the position of the arm, and the arm position adjustment mechanism, the Z-axis drive mechanism, and the arm that adjusts the measurement force of the stylus are arranged at a rear end portion. The shape measuring machine according to claim 1, comprising at least two of the provided measuring force adjusting mechanisms.   The shape measuring machine according to any one of claims 1 to 5, wherein the stylus includes an upward stylus and a downward stylus extending in a swinging direction of the arm. Displacement detector having a measuring element having an arm and a stylus provided on the distal end side of the arm, a fulcrum for swinging the arm in the vertical direction, and a displacement reading unit for measuring the displacement of the arm A method for controlling a shape measuring machine comprising:
Aligning the stylus with the measurement start position of the object to be measured;
Moving the stylus in the horizontal direction along the object to be measured, obtaining the amount of displacement of the arm, and the amount of movement of the displacement detector in the horizontal direction as measurement data, and storing them;
Calculating a movement path for moving the stylus to the next measurement start position based on the measurement data;
Moving the stylus of the probe to the next measurement start position based on the calculated movement path information;
Method for controlling a shape measuring machine including

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