JP6666791B2 - Coating agent remaining amount check device, coating device, coating agent remaining amount checking method - Google Patents

Coating agent remaining amount check device, coating device, coating agent remaining amount checking method Download PDF

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JP6666791B2
JP6666791B2 JP2016100069A JP2016100069A JP6666791B2 JP 6666791 B2 JP6666791 B2 JP 6666791B2 JP 2016100069 A JP2016100069 A JP 2016100069A JP 2016100069 A JP2016100069 A JP 2016100069A JP 6666791 B2 JP6666791 B2 JP 6666791B2
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remaining amount
coating agent
storage container
vibration
coating
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JP2017205710A (en
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佐藤 英俊
英俊 佐藤
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Yamaha Motor Co Ltd
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この発明は、基板等の塗布対象物に塗布される塗布剤の残量不足を検知する技術に関する。   The present invention relates to a technique for detecting a shortage of the remaining amount of a coating agent applied to an application target such as a substrate.

従来、半田ペーストや接着剤等といった液体材料である塗布剤をシリンジ等の貯留容器に貯留し、貯留容器の先端の吐出口から吐出した塗布剤を塗布対象物に塗布する塗布装置が知られている。また、特許文献1、2等では、このような貯留容器内の塗布材料の残量不足を検知する技術が種々提案されている。   2. Description of the Related Art Conventionally, there has been known a coating apparatus that stores a coating material, which is a liquid material such as a solder paste or an adhesive, in a storage container such as a syringe and applies the coating material discharged from a discharge port at the tip of the storage container to a coating target. I have. Patent Documents 1 and 2 and the like propose various techniques for detecting such a shortage of the remaining amount of the coating material in the storage container.

特許文献1では、シリンジ内に対向して発光部および受光部が配置されている。そして、シリンジ内に塗布剤が無い場合には発光部から射出された光がシリンジ内を通過して受光部に到達する一方、シリンジ内に塗布剤が有る場合には発光部から射出された光はシリンジ内の塗布剤により屈折されて受光部に到達しない。したがって、受光部による受光を確認することで、シリンジ内での塗布剤の残量不足を検知することができる。   In Patent Literature 1, a light emitting unit and a light receiving unit are arranged to face each other in a syringe. When there is no coating agent in the syringe, the light emitted from the light emitting unit passes through the syringe and reaches the light receiving unit, while when the coating agent is present in the syringe, the light emitted from the light emitting unit Is refracted by the coating agent in the syringe and does not reach the light receiving portion. Therefore, by confirming the light reception by the light receiving unit, it is possible to detect a shortage of the remaining amount of the coating agent in the syringe.

また、特許文献2では、シリンジ内の塗布剤に浮かぶマグネットと、シリンジの下部に取り付けられた近接センサーとが設けられ、シリンジ内での塗布剤の減少に伴ってマグネットが近接センサーへ向けて下降する。したがって、近接センサーがマグネットの近接を検知したこと確認することで、シリンジ内での塗布剤の残量不足を検知することができる。   In Patent Document 2, a magnet floating on the coating material in the syringe and a proximity sensor attached to the lower part of the syringe are provided, and the magnet descends toward the proximity sensor as the coating material in the syringe decreases. I do. Therefore, by confirming that the proximity sensor has detected the proximity of the magnet, it is possible to detect a shortage of the remaining amount of the coating material in the syringe.

特開2011−147838号公報JP 2011-147838 A 実全昭63−115469号公報Japanese Utility Model Publication No. 63-115469

ところで、塗布剤の消費に伴って塗布剤が排出された貯留容器の内壁には、薄く広がった塗布剤の膜が付着して残る場合がある。そして、貯留容器の内壁に薄く広がった塗布剤の膜が、貯留容器内の塗布剤の残量不足の検知精度を低下させる要因となっていた。例えば特許文献1では、発光部から射出された光が貯留容器の内壁に付着した塗布剤の膜により屈折されたために、塗布剤の残量不足を的確に検知できない場合があった。また、特許文献2では、塗布剤が導電性を有していると、シリンジの内壁に付着した塗布剤の膜の影響を近接センサーが受けて、塗布剤の残量不足を的確に検知できない場合があった。   By the way, there is a case where a thin film of the coating agent adheres and remains on the inner wall of the storage container from which the coating agent is discharged with the consumption of the coating agent. And, the film of the coating agent spread thinly on the inner wall of the storage container has been a factor of reducing the detection accuracy of the insufficient remaining amount of the coating agent in the storage container. For example, in Patent Literature 1, the light emitted from the light emitting unit is refracted by the coating material film adhered to the inner wall of the storage container, and thus the remaining amount of the coating material may not be accurately detected. Further, in Patent Document 2, when the coating material has conductivity, the proximity sensor receives the influence of the film of the coating material attached to the inner wall of the syringe, and cannot detect the insufficient remaining amount of the coating material accurately. was there.

この発明は、上記課題に鑑みなされたものであり、貯留容器の内壁に薄く広がって残る塗布剤の膜の影響を抑えつつ、貯留容器内の塗布剤の残量不足を的確に検知することを可能とする技術の提供を目的とする。   The present invention has been made in view of the above problems, and suppresses the influence of a film of a coating agent that is thinly spread on an inner wall of a storage container, and accurately detects a shortage of the remaining amount of the coating agent in the storage container. The purpose is to provide technologies that can be used.

本発明に係る塗布剤残量確認装置は、その内部の貯留室に塗布剤を貯留可能な貯留容器に振動を加える加振部と、加振部により振動が加えられることによって貯留容器に生じる振動に基づき貯留容器内の塗布剤の残量不足を検知する検知部とを備える。   The applicator remaining amount checking device according to the present invention includes a vibrating unit that applies vibration to a storage container capable of storing the coating material in a storage chamber therein, and a vibration generated in the storage container when the vibration is applied by the vibrating unit. And a detection unit for detecting a shortage of the remaining amount of the coating agent in the storage container based on the information.

本発明に係る塗布装置は、その内部の貯留室に塗布剤を貯留可能な貯留容器から排出した塗布剤を基板に塗布する塗布手段と、上記の塗布剤残量確認装置とを備える。   A coating apparatus according to the present invention includes a coating unit configured to coat a substrate with a coating agent discharged from a storage container capable of storing the coating agent in a storage chamber therein, and the coating agent remaining amount checking device.

本発明に係る塗布剤残量確認方法は、その内部の貯留室に塗布剤を貯留可能な貯留容器に振動を加える工程と、振動が加えられることによって貯留容器に生じる振動に基づき貯留容器内の塗布剤の残量不足を検知する工程とを備える。   The method for checking the remaining amount of the coating agent according to the present invention includes a step of applying vibration to a storage container capable of storing the coating agent in the storage chamber therein, and a step in the storage container based on the vibration generated in the storage container by the vibration being applied. Detecting a shortage of the remaining amount of the coating agent.

このように構成された本発明(塗布剤残量確認装置、塗布装置、塗布剤残量確認方法)では、加振に応じて貯留容器に生じる振動に基づき貯留容器内の塗布剤の残量不足が検知される。したがって、貯留容器の内壁に薄く広がって残る塗布剤の膜の影響を抑えつつ、貯留容器内の塗布剤の残量不足を的確に検知することが可能となっている。   In the present invention configured as described above (the remaining amount of the coating material, the coating device, and the method of checking the remaining amount of the coating material), the remaining amount of the coating material in the storage container is insufficient based on the vibration generated in the storage container in response to the vibration. Is detected. Therefore, it is possible to accurately detect the shortage of the remaining amount of the coating agent in the storage container while suppressing the influence of the film of the coating agent remaining thinly spread on the inner wall of the storage container.

また、加振部は、貯留容器を打撃することで貯留容器に振動を加えるように、塗布剤残量確認装置を構成しても良い。これによって、打撃といった簡単な手法で貯留容器に振動を加えることができる。   Further, the vibrating unit may be configured with a coating agent remaining amount checking device so as to apply vibration to the storage container by hitting the storage container. Thereby, vibration can be applied to the storage container by a simple method such as hitting.

また、加振部は、貯留室を囲む貯留容器の側壁の所定の打撃箇所を打撃し、検知部は、貯留室のうち打撃箇所の内側部分に生じる振動に基づき貯留容器内の塗布剤の残量不足を検知するように、塗布剤残量確認装置を構成しても良い。かかる構成では、打撃箇所の内側部分に生じる振動が塗布剤の消費に伴って変化するのに基づいて、貯留容器内の塗布剤の残量不足を的確に検知することができる。   Further, the vibrating section hits a predetermined hitting point on the side wall of the storage container surrounding the storage chamber, and the detecting section detects the residual coating agent in the storage container based on vibration generated inside the hitting point in the storage chamber. The application agent remaining amount checking device may be configured to detect the amount shortage. With such a configuration, it is possible to accurately detect the shortage of the remaining amount of the coating material in the storage container based on the fact that the vibration generated in the inner portion of the hitting portion changes with the consumption of the coating material.

また、貯留室では、空洞部が塗布剤の消費に伴って増大し、検知部は、打撃箇所の内側部分の空洞部に生じる固有振動の変化に基づき貯留容器内の塗布剤の残量不足を検知するように、塗布剤残量確認装置を構成しても良い。かかる構成では、塗布剤の消費に伴って打撃箇所の内側部分の空洞部が広がり、この空洞部に生じる固有振動が変化するのに基づいて、貯留容器内の塗布剤の残量不足を的確に検知することができる。   In addition, in the storage room, the cavity increases with the consumption of the coating material, and the detection unit determines that the remaining amount of the coating material in the storage container is insufficient based on a change in the natural vibration generated in the cavity inside the impact point. An application agent remaining amount confirmation device may be configured to perform detection. In such a configuration, the cavity inside the impact portion expands with the consumption of the coating agent, and based on the change in the natural vibration generated in the cavity, the shortage of the remaining amount of the coating agent in the storage container is accurately determined. Can be detected.

この際、検知部は、空洞部に生じる固有振動の周波数が所定値未満となると、貯留容器内の塗布剤の残量が不足したと判断するように、塗布剤残量確認装置を構成しても良い。かかる構成では、空洞部に生じる固有振動の周波数が所定値未満になったことをもって、貯留容器内の塗布剤の残量不足を簡便に検知することができる。   At this time, the detection unit is configured with a coating agent remaining amount confirmation device so as to determine that the remaining amount of the coating agent in the storage container is insufficient when the frequency of the natural vibration generated in the cavity becomes less than a predetermined value. Is also good. With such a configuration, when the frequency of the natural vibration generated in the cavity becomes less than the predetermined value, it is possible to easily detect the shortage of the remaining amount of the coating agent in the storage container.

また、検知部は、打撃箇所の内側部分に残存する塗布剤の減少に伴って打撃箇所の内側部分での振動に生じる変化に基づき貯留容器内の塗布剤の残量不足を検知するように、塗布剤残量確認装置を構成しても良い。かかる構成では、塗布剤の消費に伴って打撃箇所の内側部分に残存する塗布剤が減少するのに基づいて、貯留容器内の塗布剤の残量不足を的確に検知することができる。   In addition, the detection unit detects a shortage of the remaining amount of the coating agent in the storage container based on a change occurring in the vibration in the inner portion of the hitting portion with a decrease in the coating agent remaining in the inner portion of the hitting portion, A coating agent remaining amount checking device may be configured. With such a configuration, it is possible to accurately detect a shortage of the remaining amount of the coating agent in the storage container based on the fact that the amount of the coating agent remaining in the inner portion of the impact location decreases with the consumption of the coating agent.

この際、検知部は、打撃箇所の内側部分が塗布剤により満たされた状態で打撃箇所を打撃した場合に打撃箇所の内側部分に生じる振動と比較して、打撃箇所の内側部分に生じる振動の振幅あるいは周波数が所定以上変化すると、貯留容器内の塗布剤の残量が不足したと判断するように、塗布剤残量確認装置を構成しても良い。かかる構成では、打撃箇所の内側部分に生じる振動の振幅あるいは周波数が所定以上変化したことをもって、貯留容器内の塗布剤の残量不足を簡便に検知することができる。   At this time, the detection unit compares the vibration generated at the inner part of the impact point with the vibration at the inner part of the impact point when the impact point is hit while the inner part of the impact point is filled with the coating agent. The application agent remaining amount confirmation device may be configured to determine that the remaining amount of the application agent in the storage container is insufficient when the amplitude or the frequency changes by a predetermined amount or more. With such a configuration, it is possible to easily detect a shortage of the remaining amount of the coating agent in the storage container when the amplitude or the frequency of the vibration generated in the inner portion of the impact location has changed by a predetermined amount or more.

なお、貯留容器に生じる振動を計測する具体的構成は種々考えられる。つまり、検知部は、貯留室内に設けられた振動測定器を有し、振動測定器が測定した振動に基づき貯留容器内の塗布剤の残量不足を検知するように、塗布剤残量確認装置を構成しても良い。あるいは、検知部は、貯留容器の外部に設けられた振動測定器を有し、振動測定器が測定した振動に基づき貯留容器内の塗布剤の残量不足を検知するように、塗布剤残量確認装置を構成しても良い。   In addition, various specific configurations for measuring the vibration generated in the storage container are conceivable. That is, the detection unit has a vibration measuring device provided in the storage chamber, and detects the remaining amount of the coating material in the storage container based on the vibration measured by the vibration measuring device. May be configured. Alternatively, the detecting unit has a vibration measuring device provided outside the storage container, and detects the remaining amount of the coating agent in the storage container based on the vibration measured by the vibration measuring device. A confirmation device may be configured.

また、検知部が貯留容器内の塗布剤の残量不足を検知すると、塗布剤の残量不足をユーザーに報知する報知部をさらに備えるように、塗布剤残量確認装置を構成しても良い。これによって、ユーザーが塗布剤の残量不足に適切に対処することが可能となる。   Further, the application agent remaining amount confirmation device may be configured to further include a notification unit that notifies the user of the insufficient remaining amount of the application agent when the detection unit detects the insufficient amount of the application agent in the storage container. . Thereby, the user can appropriately cope with a shortage of the remaining amount of the coating agent.

また、塗布剤残量確認装置が貯留容器内の塗布剤の残量が不足していると判断した時点において、1枚の基板に対して消費される量の塗布剤が少なくとも貯留容器に残存しているように、塗布装置を構成しても良い。これによって、基板に塗布剤を塗布している途中に塗布剤が無くなるのを抑制できる。   When the remaining amount of the coating material in the storage container is determined to be insufficient by the coating material remaining amount checking device, at least the amount of the coating material consumed for one substrate remains in the storage container. As described above, the coating apparatus may be configured. This can prevent the coating agent from running out during application of the coating agent to the substrate.

また、塗布剤残量確認装置は、貯留容器内の塗布剤の残量不足を判断するための基準を、1枚の基板に対する塗布剤の消費量に応じて変更するように、塗布装置を構成しても良い。これによって、基板に塗布剤を塗布している途中に塗布剤が無くなるのをより確実に抑制できる。   Further, the coating material remaining amount checking device is configured such that a criterion for determining whether the remaining amount of the coating material in the storage container is insufficient is changed according to the consumption amount of the coating material for one substrate. You may. This makes it possible to more reliably prevent the application agent from running out during application of the application agent to the substrate.

以上のように、本発明によれば、貯留容器の内壁に薄く広がって残る塗布剤の膜の影響を抑えつつ、貯留容器内の塗布剤の残量不足を的確に検知することが可能となる。   As described above, according to the present invention, it is possible to accurately detect a shortage of the remaining amount of the coating agent in the storage container while suppressing the influence of the film of the coating agent remaining thinly spread on the inner wall of the storage container. .

本発明を適用したディスペンサを模式的に示す部分平面図である。1 is a partial plan view schematically illustrating a dispenser to which the present invention is applied. 第1実施形態におけるディスペンスヘッドおよびその周辺の構成を模式的に示す部分断面図である。FIG. 2 is a partial cross-sectional view schematically illustrating a configuration of a dispense head and a periphery thereof according to the first embodiment. 図1のディスペンサが備える電気的構成を部分的に示すブロック図である。FIG. 2 is a block diagram partially showing an electrical configuration of the dispenser of FIG. 1. ディスペンスヘッド内の塗布剤の残量不足を確認する手順を示すフローチャートである。9 is a flowchart illustrating a procedure for checking whether the remaining amount of the coating agent in the dispense head is insufficient. 第2実施形態におけるディスペンスヘッドおよびその周辺の構成を模式的に示す部分断面図である。It is a fragmentary sectional view showing typically composition of a dispense head and its circumference in a 2nd embodiment. 第2実施形態におけるディスペンスヘッドおよびその周辺の構成を模式的に示す部分断面図である。It is a fragmentary sectional view showing typically composition of a dispense head and its circumference in a 2nd embodiment. 本発明を適用した印刷装置を示す斜視図である。FIG. 1 is a perspective view illustrating a printing apparatus to which the present invention is applied. 半田供給ユニットを示す断面図である。It is sectional drawing which shows a solder supply unit.

図1は本発明を適用したディスペンサを模式的に示す部分平面図である。同図では、鉛直方向に平行なZ方向、それぞれ水平方向に平行なX方向およびY方向からなるXYZ直交座標を示す。このディスペンサ1は、基台11の上に設けられて基板Bを搬入・搬出する一対のコンベア12、12と、接着剤あるいはクリーム半田といった液状の塗布剤を基板Bに塗布するヘッドユニット3とを備える。そして、X方向(基板搬送方向)の上流側から作業位置(図1の基板Bの位置)にコンベア12が搬入した基板Bにヘッドユニット3が塗布剤を塗布する。続いて、ヘッドユニット3が塗布剤の塗布を完了した基板Bをコンベア12が作業位置からX方向の下流側へ搬出する。   FIG. 1 is a partial plan view schematically showing a dispenser to which the present invention is applied. The figure shows XYZ orthogonal coordinates consisting of a Z direction parallel to the vertical direction, an X direction and a Y direction parallel to the horizontal direction, respectively. The dispenser 1 includes a pair of conveyors 12, 12 provided on a base 11 for loading and unloading a substrate B, and a head unit 3 for applying a liquid coating agent such as an adhesive or cream solder to the substrate B. Prepare. Then, the head unit 3 applies the coating material to the substrate B that the conveyor 12 has carried in from the upstream side in the X direction (substrate transport direction) to the working position (the position of the substrate B in FIG. 1). Subsequently, the conveyor 12 unloads the substrate B on which the coating agent has been applied by the head unit 3 from the work position to the downstream side in the X direction.

また、ディスペンサ1は、コンベア12、12の上方でヘッドユニット3をX方向およびY方向へ移動させる機構を備える。つまり、ディスペンサ1では、Y方向に延びる一対のY軸レール21、21と、Y方向に延びるY軸ボールネジ22と、Y軸ボールネジ22を回転駆動するY軸モータMyとが設けられ、ヘッド支持部材23が一対のY軸レール21、21によりY方向に移動可能に支持された状態でY軸ボールネジ22のナットに固定されている。ヘッド支持部材23には、X方向に延びるX軸ボールネジ24と、X軸ボールネジ24を回転駆動するX軸モータMxとが取り付けられており、ヘッドユニット3がヘッド支持部材23によりX方向に移動可能に支持された状態でX軸ボールネジ24のナットに固定されている。したがって、Y軸モータMyによりY軸ボールネジ22を回転させてヘッドユニット3をY方向に移動させ、あるいはX軸モータMxによりX軸ボールネジ24を回転させてヘッドユニット3をX方向に移動させることができる。   Further, the dispenser 1 includes a mechanism for moving the head unit 3 in the X direction and the Y direction above the conveyors 12 and 12. That is, the dispenser 1 is provided with a pair of Y-axis rails 21 extending in the Y direction, a Y-axis ball screw 22 extending in the Y direction, and a Y-axis motor My for driving the Y-axis ball screw 22 to rotate. 23 is fixed to a nut of a Y-axis ball screw 22 in a state supported by a pair of Y-axis rails 21 and 21 so as to be movable in the Y direction. An X-axis ball screw 24 extending in the X direction and an X-axis motor Mx for rotating the X-axis ball screw 24 are attached to the head support member 23, and the head unit 3 can be moved in the X direction by the head support member 23. And is fixed to a nut of the X-axis ball screw 24 while being supported by the. Therefore, the head unit 3 can be moved in the Y direction by rotating the Y-axis ball screw 22 by the Y-axis motor My, or the head unit 3 can be moved in the X direction by rotating the X-axis ball screw 24 by the X-axis motor Mx. it can.

このヘッドユニット3は、2本のディスペンスヘッド4(塗布手段)を有する。これらディスペンスヘッド4はX方向に並んで配置され、各ディスペンスヘッド4が基板Bの対象箇所の上方に位置しつつ塗布剤を吐出することで、当該対象箇所に塗布剤を塗布する。なお、2本のディスペンスヘッド4は同一構成を具備するため、以下では基本的に1本のディスペンスヘッド4のみを示して説明を行う。   The head unit 3 has two dispense heads 4 (coating means). The dispensing heads 4 are arranged in the X direction, and each dispensing head 4 applies the coating material to the target location by discharging the coating material while being positioned above the target location on the substrate B. Since the two dispense heads 4 have the same configuration, only one dispense head 4 will be described below.

図2は第1実施形態におけるディスペンスヘッドおよびその周辺の構成を模式的に示す部分断面図である。ディスペンスヘッド4は、上端が開いた中空のシリンジ41と、シリンジ41の下端に設けられたノズル42とを有する。シリンジ41は、Z方向に延びる円筒部411と、円筒部411の下端からノズル42へ向けてZ方向に先細りになった円錐台部412とを有し、シリンジ41内部の貯留室410(中空部分)に塗布剤Eを貯留する。円筒部411内において貯留室410はノズル42の内径より大きい径の円筒形状を有し、円錐台部412内において貯留室410は下方へ向けて径が小さくなる円錐台形状を有する。そして、円錐台部412の下端において貯留室410の径とノズル42の内径とが一致する。また、ノズル42の下端の吐出口420と貯留室410とは互いに連通しており、貯留室410に貯留された塗布剤Eをノズル42の吐出口420から下方へ吐出可能となっている。   FIG. 2 is a partial cross-sectional view schematically showing the configuration of the dispense head and its periphery in the first embodiment. The dispense head 4 has a hollow syringe 41 having an open upper end, and a nozzle 42 provided at a lower end of the syringe 41. The syringe 41 has a cylindrical portion 411 extending in the Z direction, and a truncated conical portion 412 tapered in the Z direction from the lower end of the cylindrical portion 411 toward the nozzle 42, and has a storage chamber 410 (hollow portion) inside the syringe 41. ) Is stored with the coating agent E. In the cylindrical portion 411, the storage chamber 410 has a cylindrical shape with a diameter larger than the inner diameter of the nozzle 42, and in the frustoconical portion 412, the storage chamber 410 has a truncated conical shape in which the diameter decreases downward. At the lower end of the truncated cone 412, the diameter of the storage chamber 410 and the inner diameter of the nozzle 42 match. The discharge port 420 at the lower end of the nozzle 42 and the storage chamber 410 are in communication with each other, and the coating agent E stored in the storage chamber 410 can be discharged downward from the discharge port 420 of the nozzle 42.

そして、シリンジ41の円筒部411がヘッドユニット3のシリンジホルダ31によって下方から着脱自在に支持されるとともに、シリンジ41の上端が蓋部材32により閉じられている。したがって、シリンジ41内の塗布剤Eの残量が不足した場合には、この使用済みのシリンジ41から蓋部材32を外しつつ、シリンジホルダ31に支持されるシリンジ41を交換することで、新たなシリンジ41をシリンジホルダ31に装着できる。ちなみに、シリンジ41がシリンジホルダ31に支持された状態において、ノズル42の下端はシリンジホルダ31より下方へ突出する。   The cylindrical portion 411 of the syringe 41 is detachably supported from below by the syringe holder 31 of the head unit 3, and the upper end of the syringe 41 is closed by the lid member 32. Therefore, when the remaining amount of the coating agent E in the syringe 41 is insufficient, a new syringe 41 supported by the syringe holder 31 is replaced while removing the lid member 32 from the used syringe 41 to obtain a new one. The syringe 41 can be mounted on the syringe holder 31. Incidentally, in a state where the syringe 41 is supported by the syringe holder 31, the lower end of the nozzle 42 projects downward from the syringe holder 31.

さらに、ディスペンスヘッド4は、貯留室410内に配置されたプランジャ43を有する。プランジャ43は、円筒部411における貯留室410の径より僅かに小さい径の円盤形状を有しており、貯留室410に貯留された塗布剤Eの上面に接する。つまり、貯留室410のうち、プランジャ43より下方が塗布剤Eで満たされた充填部410Aとなり、プランジャ43より上方が空洞部410Bとなる。また、蓋部材32にはガス孔321が設けられており、ガス(空気)がガス孔321から貯留室410の空洞部410Bに導入されると、ガス圧を受けたプランジャ43が吐出口420へ向けて移動し、貯留室410内の塗布剤Eを押し出す。こうしてディスペンスヘッド4の吐出口420から塗布剤Eが吐出(排出)される。かかるディスペンスヘッド4の貯留室410では、塗布剤Eの消費に伴って、充填部410Aの体積が減少する一方、空洞部410Bの体積が増大する。   Further, the dispense head 4 has a plunger 43 arranged in the storage chamber 410. The plunger 43 has a disk shape having a diameter slightly smaller than the diameter of the storage chamber 410 in the cylindrical portion 411, and is in contact with the upper surface of the coating agent E stored in the storage chamber 410. That is, in the storage chamber 410, a portion below the plunger 43 is the filling portion 410A filled with the coating agent E, and a portion above the plunger 43 is the hollow portion 410B. Further, a gas hole 321 is provided in the lid member 32, and when gas (air) is introduced from the gas hole 321 into the cavity 410 </ b> B of the storage chamber 410, the plunger 43 that has received the gas pressure moves to the discharge port 420. And pushes the coating agent E in the storage chamber 410. Thus, the coating material E is discharged (discharged) from the discharge port 420 of the dispense head 4. In the storage chamber 410 of the dispense head 4, the volume of the filling portion 410A decreases while the volume of the hollow portion 410B increases as the application agent E is consumed.

ちなみに、上述のとおりプランジャ43の径は貯留室410の内径よりも若干小さい。これによって、プランジャ43の外縁と貯留室410の内壁との間に生じる摩擦力を小さく抑えて、プランジャ43をスムーズに移動させて、ディスペンスヘッド4からの塗布剤Eの吐出量を安定させることができる。一方、プランジャ43の外縁と貯留室410の内壁との間の隙間をすり抜けた塗布剤Eが、空洞部410Bの壁面に膜状に薄く広がって付着する場合がある。ただし、後述するように、本実施形態では、かかる塗布剤Eの膜の影響を抑えつつ、貯留室410内の塗布剤Eの残量を的確に検知することが可能となっている。   Incidentally, as described above, the diameter of the plunger 43 is slightly smaller than the inner diameter of the storage chamber 410. Thereby, the frictional force generated between the outer edge of the plunger 43 and the inner wall of the storage chamber 410 is suppressed, and the plunger 43 is moved smoothly, so that the discharge amount of the coating agent E from the dispense head 4 is stabilized. it can. On the other hand, the coating material E that has passed through the gap between the outer edge of the plunger 43 and the inner wall of the storage chamber 410 may spread and adhere to the wall surface of the cavity 410B in a thin film shape. However, as described later, in the present embodiment, it is possible to accurately detect the remaining amount of the coating agent E in the storage chamber 410 while suppressing the influence of the film of the coating agent E.

ディスペンスヘッド4に対しては、加振部51と検知部56とが設けられている。これら加振部51および検知部56は、塗布剤Eが未使用の状態(図2の状態)からその内側が空洞部410Bとなるシリンジ41の上端部分413に対して設けられている。つまり、加振部51は、シリンジ41の上端部分413の側壁41A(外壁)に設定された打撃箇所Pに対向する球状のハンマ52と、ハンマ52を駆動する直動ソレノイド53と、ハンマ52および直動ソレノイド53をシリンジ41に対して着脱自在に支持するハンマサポート54とを有する。そして、直動ソレノイド53がハンマ52を打撃箇所Pへ向けて駆動すると、ハンマ52がシリンジ41の側壁41Aの打撃箇所Pを打撃する。一方、検知部56は、シリンジ41の上端部分413の内部(貯留室410)に配置された振動計測器57を有し、ハンマ52が打撃箇所Pを打撃したことによって空洞部410Bに生じる振動を振動計測器57により計測する。なお、振動計測器57としては例えば小型のマイクロフォン等を用いることができる。   For the dispense head 4, a vibration unit 51 and a detection unit 56 are provided. The vibrating section 51 and the detecting section 56 are provided for the upper end portion 413 of the syringe 41 in which the interior of the syringe 41 becomes a hollow section 410B from the state where the coating agent E is not used (the state of FIG. 2). That is, the vibrating unit 51 includes a spherical hammer 52 facing the hitting point P set on the side wall 41A (outer wall) of the upper end portion 413 of the syringe 41, a linear motion solenoid 53 that drives the hammer 52, a hammer 52, And a hammer support 54 that detachably supports the linear solenoid 53 with respect to the syringe 41. When the direct-acting solenoid 53 drives the hammer 52 toward the striking point P, the hammer 52 strikes the striking point P on the side wall 41A of the syringe 41. On the other hand, the detecting unit 56 has a vibration measuring device 57 disposed inside the upper end portion 413 of the syringe 41 (reservoir 410), and detects the vibration generated in the hollow portion 410B by the hammer 52 hitting the hitting point P. It is measured by the vibration measuring device 57. In addition, as the vibration measuring device 57, for example, a small microphone or the like can be used.

図3は図1のディスペンサが備える電気的構成を部分的に示すブロック図である。ディスペンサ1は、CPU(Central Processing Unit)やRAM(Random Access Memory)等で構成されたコンピューターである主制御部100を備える。そして、主制御部100がディスペンサ1の各部を統括的に制御する。   FIG. 3 is a block diagram partially showing an electrical configuration of the dispenser of FIG. The dispenser 1 includes a main control unit 100 which is a computer including a CPU (Central Processing Unit) and a RAM (Random Access Memory). Then, the main control unit 100 controls each unit of the dispenser 1 in a centralized manner.

例えば、主制御部100は、ディスペンスヘッド4とガス供給源71とを接続する切換バルブ72を開閉することで、ディスペンスヘッド4による塗布液の吐出を制御する。つまり、切換バルブ72が開くと、ガス供給源71が供給するガスがディスペンスヘッド4の貯留室410に導入され、吐出口420から塗布液が吐出される。一方、切換バルブ72が閉じると、ガス供給源71からディスペンスヘッド4の貯留室410のガスの導入が停止して、吐出口420からの塗布液の吐出が停止する。また、主制御部100は、加振部51および検知部56を有する塗布剤残量確認装置5によりディスペンスヘッド4の塗布剤の残量不足を確認した結果に基づき、報知部73によりエラーを報知する。なお、報知部73は、例えば塗布剤の残量が不足した旨の表示をディスプレイに表示することで、ユーザーにエラーを報知する。   For example, the main control unit 100 controls the discharge of the application liquid by the dispense head 4 by opening and closing a switching valve 72 that connects the dispense head 4 and the gas supply source 71. That is, when the switching valve 72 is opened, the gas supplied from the gas supply source 71 is introduced into the storage chamber 410 of the dispense head 4, and the coating liquid is discharged from the discharge port 420. On the other hand, when the switching valve 72 is closed, the introduction of gas from the gas supply source 71 into the storage chamber 410 of the dispense head 4 stops, and the discharge of the coating liquid from the discharge port 420 stops. Further, the main control unit 100 notifies the error by the notifying unit 73 based on the result of checking that the remaining amount of the coating agent in the dispense head 4 is insufficient by the coating agent remaining amount checking device 5 having the vibration unit 51 and the detecting unit 56. I do. The notification unit 73 notifies the user of the error by displaying, for example, a display on the display that the remaining amount of the coating agent is insufficient.

図4はディスペンスヘッド内の塗布剤の残量不足を確認する手順を示すフローチャートである。このフローチャートは、主制御部100の制御により実行される。ディスペンスヘッド4が1枚の基板Bの全対象箇所に塗布剤の塗布を行うと(ステップS101)、加振部51のハンマ52がディスペンスヘッド4のシリンジ41に設けられた打撃箇所Pを打撃することで、ディスペンスヘッド4のシリンジ41に振動を加える(ステップS102)。   FIG. 4 is a flowchart showing a procedure for confirming the remaining amount of the coating agent in the dispense head. This flowchart is executed under the control of the main control unit 100. When the dispense head 4 applies the coating agent to all target locations on one substrate B (step S101), the hammer 52 of the vibrating unit 51 hits the impact location P provided on the syringe 41 of the dispense head 4. Thus, vibration is applied to the syringe 41 of the dispense head 4 (step S102).

続いて、検知部56がシリンジ41の空洞部410Bに生じた振動を振動計測器57により測定し(ステップS103)、その測定結果の周波数を解析する演算を行う(ステップS104)。このステップS104での周波数解析によって、シリンジ41の空洞部410Bに生じた固有振動の周波数(固有周波数)が求められる。なお、ヘルムホルツ共鳴に従うと近似すると、空洞部410Bの固有周波数は空洞部410Bの体積の平方根に反比例する。つまり、貯留室410内の塗布剤Eの消費に伴って空洞部410Bの体積が増えると、ステップS104で求められる空洞部410Bの固有周波数が低下する。そこで、検知部56は、この空洞部410Bの体積と固有周波数との関係を利用して、貯留室410内の塗布剤Eの残量不足を検知する。   Subsequently, the detecting unit 56 measures the vibration generated in the cavity 410B of the syringe 41 by the vibration measuring device 57 (Step S103), and performs an operation for analyzing the frequency of the measurement result (Step S104). The frequency of the natural vibration (natural frequency) generated in the cavity 410B of the syringe 41 is obtained by the frequency analysis in step S104. When approximation is made to follow Helmholtz resonance, the natural frequency of the cavity 410B is inversely proportional to the square root of the volume of the cavity 410B. That is, when the volume of the cavity 410B increases with the consumption of the coating agent E in the storage chamber 410, the natural frequency of the cavity 410B obtained in step S104 decreases. Therefore, the detecting unit 56 detects the shortage of the remaining amount of the coating agent E in the storage chamber 410 by using the relationship between the volume of the hollow portion 410B and the natural frequency.

つまり、貯留室410内の塗布剤Eの残量が所定残量まで減少した状態でシリンジ41に加振を行った際に空洞部410Bに生じる固有周波数が演算あるいは実験により予め求められ、閾値(閾周波数)として検知部56に格納されている。そして、検知部56は、ステップS104で求めた固有周波数がこの閾値未満であるか否かを判断することで、貯留室410内の塗布剤Eの残量不足を検知する(ステップS105)。つまり、固有周波数が閾値未満である場合には、塗布剤Eの残量が不足していると判断され(ステップS105で「YES」)、報知部73がエラー報知を行う(ステップS106)。一方、固有周波数が閾値以上である場合には、塗布剤Eの残量は十分であると判断され(ステップS105で「NO」)、ステップS107に進む。そして、ステップS107では、塗布剤Eが塗布された基板Bの生産を終了するかが判断され、生産を継続する場合(ステップS106で「NO」の場合)にはステップS101に戻る一方、生産を終了する場合(ステップS106で「YES」の場合)には図4のフローチャートを終了する。   That is, when the syringe 41 is vibrated in a state where the remaining amount of the coating agent E in the storage chamber 410 has decreased to the predetermined remaining amount, the natural frequency generated in the cavity 410B is obtained in advance by calculation or experiment, and the threshold value ( (Threshold frequency) is stored in the detection unit 56. Then, the detection unit 56 detects whether the remaining amount of the coating agent E in the storage chamber 410 is insufficient by determining whether the natural frequency obtained in step S104 is less than the threshold (step S105). That is, when the natural frequency is less than the threshold, it is determined that the remaining amount of the coating material E is insufficient ("YES" in step S105), and the notification unit 73 performs error notification (step S106). On the other hand, when the natural frequency is equal to or higher than the threshold, it is determined that the remaining amount of the coating material E is sufficient (“NO” in step S105), and the process proceeds to step S107. Then, in step S107, it is determined whether or not the production of the substrate B to which the coating agent E has been applied is to be terminated. If production is to be continued (in the case of “NO” in step S106), the process returns to step S101, while If the processing is to be ended (“YES” in step S106), the flowchart in FIG. 4 ends.

以上に説明したように第1実施形態では、加振に応じてシリンジ41に生じる振動に基づきシリンジ41内の塗布剤Eの残量不足が検知される。したがって、シリンジ41の内壁に薄く広がって残る塗布剤Eの膜の影響を抑えつつ、シリンジ41内の塗布剤Eの残量不足を的確に検知することが可能となっている。   As described above, in the first embodiment, the shortage of the remaining amount of the coating material E in the syringe 41 is detected based on the vibration generated in the syringe 41 in response to the vibration. Therefore, it is possible to accurately detect the shortage of the remaining amount of the coating agent E in the syringe 41 while suppressing the influence of the film of the coating agent E which is thinly spread on the inner wall of the syringe 41.

また、加振部51は、シリンジ41を打撃することでシリンジ41に振動を加える。こうして、打撃といった簡単な手法でシリンジ41に振動を加えることが可能となっている。   The vibration unit 51 applies vibration to the syringe 41 by hitting the syringe 41. Thus, it is possible to apply vibration to the syringe 41 by a simple method such as hitting.

また、加振部51は、貯留室410を囲むシリンジ41の側壁41Aの所定の打撃箇所Pを打撃する。そして、検知部56は、貯留室410のうち打撃箇所Pの内側部分Ipに生じる振動に基づきシリンジ41内の塗布剤Eの残量不足を検知する。かかる構成では、打撃箇所Pの内側部分Ipに生じる振動が塗布剤Eの消費に伴って変化するのに基づいて、シリンジ41内の塗布剤Eの残量不足を的確に検知することができる。   Further, the vibration unit 51 hits a predetermined hitting point P on the side wall 41A of the syringe 41 surrounding the storage chamber 410. Then, the detection unit 56 detects a shortage of the remaining amount of the coating agent E in the syringe 41 based on the vibration generated in the inner portion Ip of the striking point P in the storage chamber 410. With such a configuration, it is possible to accurately detect the shortage of the remaining amount of the coating material E in the syringe 41 based on the fact that the vibration generated in the inner portion Ip of the impact location P changes with the consumption of the coating material E.

ちなみに、上記のシリンジ41の貯留室410では、空洞部410Bが塗布剤Eの消費に伴って増大する。そこで、検知部56は、打撃箇所Pの内側部分Ipに重なる空洞部410Bに生じる固有振動の変化に基づきシリンジ41内の塗布剤Eの残量不足を検知する。かかる構成では、塗布剤Eの消費に伴って打撃箇所Pの内側部分Ipに重なる空洞部410Bの体積が増大し、この空洞部410Bに生じる固有振動が変化するのに基づいて、シリンジ41内の塗布剤Eの残量不足を的確に検知することができる。   Incidentally, in the storage chamber 410 of the syringe 41, the cavity 410B increases with the consumption of the coating agent E. Therefore, the detecting unit 56 detects a shortage of the remaining amount of the coating agent E in the syringe 41 based on a change in the natural vibration generated in the hollow portion 410B overlapping the inner portion Ip of the hit location P. In such a configuration, the volume of the cavity 410B overlapping the inner portion Ip of the impact location P increases with the consumption of the coating agent E, and the natural vibration generated in the cavity 410B changes. Insufficient remaining amount of the coating agent E can be accurately detected.

具体的には、検知部56は、空洞部410Bに生じる固有振動の周波数が所定の閾値未満となると、シリンジ41内の塗布剤Eの残量が不足したと判断する。かかる構成では、空洞部410Bに生じる固有振動の周波数が所定値未満になったことをもって、シリンジ41内の塗布剤Eの残量不足を簡便に検知することができる。   Specifically, when the frequency of the natural vibration generated in the cavity 410B becomes lower than the predetermined threshold, the detecting unit 56 determines that the remaining amount of the coating agent E in the syringe 41 is insufficient. In such a configuration, the shortage of the remaining amount of the coating agent E in the syringe 41 can be easily detected when the frequency of the natural vibration generated in the hollow portion 410B becomes lower than the predetermined value.

また、検知部56がシリンジ41内の塗布剤Eの残量不足を検知すると、報知部73が塗布剤Eの残量不足をユーザーに報知する。これによって、ユーザーが塗布剤Eの残量不足に適切に対処することが可能となっている。   When the detecting unit 56 detects a shortage of the remaining amount of the coating agent E in the syringe 41, the notification unit 73 notifies the user of the shortage of the remaining amount of the coating agent E. This enables the user to appropriately cope with a shortage of the remaining amount of the coating agent E.

図5および図6は第2実施形態におけるディスペンスヘッドおよびその周辺の構成を模式的に示す部分断面図であり、特に図5は塗布剤Eが未使用の状態を示し、図6は塗布剤Eの残量が不足した状態を示す。なお、以下では上記実施形態と異なる構成を中心に説明することとし、共通する構成については適宜説明を省略する。ただし、上記実施形態と共通する構成を備えることで同様の効果が奏されることは言うまでもない。   5 and 6 are partial cross-sectional views schematically showing the configuration of the dispense head and its periphery in the second embodiment. In particular, FIG. 5 shows a state where the coating agent E is not used, and FIG. Indicates a state where the remaining amount is insufficient. In the following, a description will be given mainly of a configuration different from the above embodiment, and a description of a common configuration will be appropriately omitted. However, needless to say, the same effect can be obtained by providing a configuration common to the above embodiment.

図5および図6に示すように、振動計測器57は上記と同様にシリンジ41の上端部分413の内側(貯留室410の空洞部410B)に配置されている。一方、加振部51は、シリンジ41の円筒部411の下端部分414に対して設けられている。つまり、加振部51のハンマ52の打撃箇所Pは、シリンジ41の下端部分414の側壁41B(外壁)に設定されている。塗布剤Eが未使用の状態では、シリンジ41の下端部分414の内側は充填部410Aとなる一方、塗布剤Eが残量不足となった状態で、シリンジ41の下端部分414の内側が空洞部410Bとなる。したがって、塗布剤Eが残量不足となる直前までは、打撃箇所Pの内側部分Ipが塗布剤Eにより満たされているため、ハンマ52の打撃により加えられた振動は塗布剤Eに吸収されて減衰し、振動計測器57により計測される振動の振幅は極めて微弱である。これに対して、塗布剤Eの消費に伴って打撃箇所Pの内側部分Ipから塗布剤Eが排出され始め、打撃箇所Pの内側部分Ipに空洞部410Bが重なり始めると、ハンマ52の打撃による加振に応じて固有振動が空洞部410Bに生じ、振動計測器57により計測される振動(固有振動)の振幅が急激に増大する。   As shown in FIGS. 5 and 6, the vibration measuring device 57 is disposed inside the upper end portion 413 of the syringe 41 (the cavity 410B of the storage chamber 410) in the same manner as described above. On the other hand, the vibration section 51 is provided for a lower end portion 414 of the cylindrical section 411 of the syringe 41. That is, the striking position P of the hammer 52 of the vibration unit 51 is set on the side wall 41B (outer wall) of the lower end portion 414 of the syringe 41. In the state where the coating material E is not used, the inside of the lower end portion 414 of the syringe 41 becomes a filling portion 410A, while in the state where the remaining amount of the coating material E is insufficient, the inside of the lower end portion 414 of the syringe 41 becomes a hollow portion. 410B. Therefore, immediately before the remaining amount of the coating material E becomes insufficient, the inner portion Ip of the hitting point P is filled with the coating material E, and the vibration applied by the impact of the hammer 52 is absorbed by the coating material E. The amplitude of the vibration that attenuates and is measured by the vibration measuring device 57 is extremely weak. On the other hand, when the application agent E starts to be discharged from the inner portion Ip of the impact location P with the consumption of the application agent E, and the hollow portion 410B starts to overlap the inner portion Ip of the impact location P, the impact of the hammer 52 causes In response to the excitation, a natural vibration occurs in the cavity 410B, and the amplitude of the vibration (natural vibration) measured by the vibration measuring device 57 sharply increases.

このような第2実施形態においても、基本的には図4を用いて上述した手順によって、ディスペンスヘッド4内の塗布剤Eの残量不足を確認できる。ただし、ステップS105における具体的な判断方法は上述と異なる。つまり、打撃箇所Pの内側部分Ipが塗布剤Eで満たされている状態でシリンジ41に加振を行った際に振動計測器57が計測する振動の振幅(充足時振幅)が演算あるいは実験により予め求められる。また、打撃箇所Pの内側部分Ipに空洞部410Bが重なった状態でシリンジ41に加振を行った際に振動計測器57が計測する振動の振幅(不足時振幅)が演算あるいは実験により予め求められる。そして、充足時振幅と不足時振幅との間の値(例えば平均値)が閾値(閾振幅)として検知部56に格納されている。したがって、ステップS105では、ステップS103で計測された振動の振幅がこの閾値以上である場合には、塗布剤Eの残量が不足していると判断され(YES)、ステップS103で計測された振動の振幅がこの閾値未満である場合には、塗布剤Eの残量は十分であると判断される(NO)。なお、空洞部410Bに生じる振動の振幅に基づき塗布剤Eの残量不足を検知する第2実施形態においては、ステップS104の周波数解析は省略することができる。   In the second embodiment as described above, basically, the procedure described above with reference to FIG. 4 can confirm that the remaining amount of the coating agent E in the dispense head 4 is insufficient. However, the specific determination method in step S105 is different from the above. That is, when the syringe 41 is vibrated in a state where the inner portion Ip of the impact point P is filled with the coating agent E, the amplitude of the vibration (amplitude at the time of satisfaction) measured by the vibration measuring device 57 is calculated or experimented. Required in advance. In addition, when vibration is applied to the syringe 41 in a state where the hollow portion 410B is overlapped with the inner portion Ip of the impact point P, the amplitude of vibration (insufficient amplitude) measured by the vibration measuring device 57 is obtained in advance by calculation or experiment. Can be Then, a value (for example, an average value) between the sufficient amplitude and the insufficient amplitude is stored in the detection unit 56 as a threshold (threshold amplitude). Therefore, in step S105, when the amplitude of the vibration measured in step S103 is equal to or larger than this threshold, it is determined that the remaining amount of the coating agent E is insufficient (YES), and the vibration measured in step S103 is determined. Is smaller than this threshold, it is determined that the remaining amount of the coating agent E is sufficient (NO). Note that in the second embodiment in which the remaining amount of the coating agent E is detected based on the amplitude of the vibration generated in the cavity 410B, the frequency analysis in step S104 can be omitted.

以上に説明したように第2実施形態においても、加振に応じてシリンジ41に生じる振動に基づきシリンジ41内の塗布剤Eの残量不足が検知される。したがって、シリンジ41の内壁に薄く広がって残る塗布剤Eの膜の影響を抑えつつ、シリンジ41内の塗布剤Eの残量不足を的確に検知することが可能となっている。   As described above, also in the second embodiment, the shortage of the remaining amount of the coating agent E in the syringe 41 is detected based on the vibration generated in the syringe 41 in response to the vibration. Therefore, it is possible to accurately detect the shortage of the remaining amount of the coating agent E in the syringe 41 while suppressing the influence of the film of the coating agent E which is thinly spread on the inner wall of the syringe 41.

また、第2実施形態では、検知部56は、打撃箇所Pの内側部分Ipに残存する塗布剤Eの減少に伴って打撃箇所Pの内側部分Ipでの振動に生じる変化、すなわち振動振幅の急激な増大に基づきシリンジ41内の塗布剤Eの残量不足を検知する。かかる構成では、塗布剤Eの消費に伴って打撃箇所Pの内側部分Ipに残存する塗布剤Eが減少するのに基づいて、シリンジ41内の塗布剤Eの残量不足を的確に検知することができる。   In addition, in the second embodiment, the detection unit 56 determines that the change in the vibration occurring in the inner portion Ip of the impact location P with the decrease of the coating material E remaining in the inner portion Ip of the impact location P, that is, the sudden increase in the vibration amplitude. The shortage of the remaining amount of the coating agent E in the syringe 41 is detected based on the increase. In such a configuration, it is possible to accurately detect the shortage of the remaining amount of the coating material E in the syringe 41 based on the decrease of the coating material E remaining in the inner portion Ip of the hitting point P with the consumption of the coating material E. Can be.

この際、打撃箇所Pの内側部分Ipが塗布剤Eにより満たされた状態で打撃箇所Pを打撃した場合に打撃箇所Pの内側部分Ipに生じる振動の振幅(充足時振幅)に基づき予め決定された閾値が検知部56に格納されている。そして、打撃箇所Pの内側部分Ipに生じる振動の振幅が充足時振幅と比較してこの閾値以上変化すると、シリンジ41内の塗布剤Eの残量が不足したと判断する。かかる構成では、打撃箇所Pの内側部分Ipに生じる振動の振幅が所定以上変化した、すなわち閾値以上となったことをもって、シリンジ41内の塗布剤Eの残量不足を簡便に検知することができる。   At this time, when the impact portion P is hit while the inner portion Ip of the impact portion P is filled with the coating agent E, the predetermined value is determined in advance based on the amplitude (amplitude amplitude) of the vibration generated in the inner portion Ip of the impact portion P. The detected threshold value is stored in the detection unit 56. Then, when the amplitude of the vibration generated in the inner portion Ip of the impact location P changes by more than this threshold value compared to the amplitude at the time of satisfaction, it is determined that the remaining amount of the coating agent E in the syringe 41 is insufficient. In such a configuration, when the amplitude of the vibration generated in the inner portion Ip of the impact location P has changed by a predetermined amount or more, that is, when the amplitude has exceeded the threshold value, it is possible to easily detect the insufficient remaining amount of the coating agent E in the syringe 41. .

上述のように上記実施形態では、ディスペンサ1が本発明の「塗布装置」の一例に相当し、ディスペンスヘッド4が本発明の「塗布手段」の一例に相当し、塗布剤残量確認装置5が本発明の「塗布剤残量確認装置」の一例に相当し、加振部51が本発明の「加振部」の一例に相当し、検知部56が本発明の「検知部」の一例に相当し、シリンジ41が本発明の「貯留容器」の一例に相当し、貯留室410が本発明の「貯留室」の一例に相当し、塗布剤Eが本発明の「塗布剤」の一例に相当し、打撃箇所Pが本発明の「打撃箇所」の一例に相当し、側壁41Aあるいは側壁41Bが本発明の「側壁」の一例に相当し、内側部分Ipが本発明の「内側部分」の一例に相当し、空洞部410Bが本発明の「空洞部」の一例に相当し、振動計測器57が本発明の「振動測定器」の一例に相当し、報知部73が本発明の「報知部」の一例に相当する。   As described above, in the above embodiment, the dispenser 1 corresponds to an example of the “applying device” of the present invention, the dispense head 4 corresponds to an example of the “applying device” of the present invention, and the applicator remaining amount checking device 5 corresponds to The vibrating unit 51 corresponds to an example of the “vibrating unit” of the present invention, and the detecting unit 56 corresponds to an example of the “detecting unit” of the present invention. Correspondingly, the syringe 41 corresponds to an example of the “storage container” of the present invention, the storage room 410 corresponds to an example of the “storage room” of the present invention, and the coating agent E corresponds to an example of the “coating agent” of the present invention. Correspondingly, the hitting point P corresponds to an example of the “hitting point” of the present invention, the side wall 41A or the side wall 41B corresponds to an example of the “sidewall” of the present invention, and the inner portion Ip corresponds to the “inner portion” of the present invention. The cavity 410 </ b> B corresponds to an example of the “cavity” of the present invention. Corresponds to an example of the "vibration measuring instrument" of the present invention, the notification unit 73 corresponds to an example of the "notification portion" in the present invention.

なお、本発明は上記実施形態に限定されるものではなく、その趣旨を逸脱しない限りにおいて上述したものに対して種々の変更を加えることが可能である。例えば上記第1実施形態では、塗布剤Eの残量不足を検知するための閾値として、貯留室410内の塗布剤Eの残量が「所定残量」まで減少した状態でシリンジ41に加振を行った際に空洞部410Bに生じる固有周波数が用いられていた。この際、「所定残量」は種々の量に設定することができる。   The present invention is not limited to the above embodiment, and various changes can be made to the above described one without departing from the gist of the invention. For example, in the first embodiment, as a threshold value for detecting a shortage of the remaining amount of the coating agent E, the syringe 41 is vibrated in a state where the remaining amount of the coating agent E in the storage chamber 410 is reduced to a “predetermined remaining amount”. Is performed, the natural frequency generated in the cavity 410B is used. At this time, the “predetermined remaining amount” can be set to various amounts.

一例を挙げると、1枚の基板Bの全対象箇所に対して塗布剤Eを塗布剤するために消費される量以上に「所定残量」を設定することができる。かかる構成では、シリンジ41内の塗布剤Eの残量が不足していると判断した時点において、1枚の基板Bに対して消費される量が少なくともシリンジ41に残存する。したがって、基板Bに塗布剤Eを塗布している途中に塗布剤Eが無くなって、基板Bへの塗布剤Eの塗布が中断するのを抑制できる。   As an example, the “predetermined remaining amount” can be set to be equal to or more than the amount consumed for applying the coating agent E to all target portions of one substrate B. With such a configuration, at the time when it is determined that the remaining amount of the coating agent E in the syringe 41 is insufficient, at least the amount consumed for one substrate B remains in the syringe 41. Therefore, it is possible to prevent the application agent E from being lost while the application agent E is being applied to the substrate B, and the application of the application agent E to the substrate B from being interrupted.

この際、主制御部100が生産対象である基板Bを1枚生産するために消費する塗布剤Eの消費量を算出し、シリンジ41内の塗布剤Eの残量不足を判断するための基準、すなわち閾値を、この算出結果に応じて変更するように構成しても良い。これによって、基板Bに塗布剤Eを塗布している途中に塗布剤Eが無くなるのをより確実に抑制できる。   At this time, the main control unit 100 calculates the consumption amount of the coating agent E consumed for producing one substrate B to be produced, and determines whether or not the remaining amount of the coating agent E in the syringe 41 is insufficient. That is, the threshold may be changed according to the calculation result. This makes it possible to more reliably prevent the application agent E from being lost during the application of the application agent E to the substrate B.

また、同様にして第2実施形態においても、シリンジ41内の塗布剤Eの残量が不足していると判断した時点において、1枚の基板Bに対して消費される量が少なくともシリンジ41に残存するように構成しても良い。これによって、基板Bに塗布剤Eを塗布している途中に塗布剤Eが無くなって、基板Bへの塗布剤Eの塗布が中断するのを抑制できる。   Similarly, in the second embodiment as well, when it is determined that the remaining amount of the coating agent E in the syringe 41 is insufficient, at least the amount consumed for one substrate B is You may comprise so that it may remain. Accordingly, it is possible to prevent the application agent E from being lost during the application of the application agent E to the substrate B, and to prevent the application of the application agent E to the substrate B from being interrupted.

また、第2実施形態では、振動計測器57が計測する振動の振幅に基づき、塗布剤Eの残量不足が検知されていた。しかしながら、振動計測器57が計測する振動の周波数に基づいて塗布剤Eの残量不足を検知するように、第2実施形態を変形することもできる。つまり、塗布剤Eの消費に伴って打撃箇所Pの内側部分Ipから塗布剤Eが排出され始め、塗布剤Eによる振動の減衰が無くなると、ハンマ52の打撃による加振に応じて生じる振動の周波数が高くなることが、この変形例では利用される。   In the second embodiment, the insufficient remaining amount of the coating agent E is detected based on the amplitude of the vibration measured by the vibration measuring device 57. However, the second embodiment can be modified such that the remaining amount of the coating agent E is detected based on the frequency of the vibration measured by the vibration measuring device 57. That is, with the consumption of the coating material E, the coating material E starts to be discharged from the inner portion Ip of the striking point P, and when the vibration of the coating material E is no longer attenuated, the vibration generated in response to the vibration of the hammer 52 due to the hitting is performed. The higher frequency is used in this variant.

具体的には、打撃箇所Pの内側部分Ipが塗布剤Eで満たされている状態でシリンジ41に加振を行った際に振動計測器57が計測する振動の周波数(充足時周波数)が演算あるいは実験により予め求められる。また、打撃箇所Pの内側部分Ipに空洞部410Bが重なった状態でシリンジ41に加振を行った際に振動計測器57が計測する振動の周波数(不足時周波数)が演算あるいは実験により予め求められる。そして、充足時周波数と不足時周波数との間の値(例えば平均値)が閾値(閾周波数)として検知部56に格納されている。したがって、ステップS105では、ステップS104で求められた振動の周波数がこの閾値以上である場合には、塗布剤Eの残量が不足していると判断され(YES)、ステップS104で求められた振動の周波数がこの閾値未満である場合には、塗布剤Eの残量は十分であると判断される(NO)。   More specifically, the vibration frequency (satisfactory frequency) measured by the vibration measuring device 57 when the syringe 41 is vibrated while the inner portion Ip of the impact location P is filled with the coating material E is calculated. Alternatively, it is obtained in advance by an experiment. In addition, when a vibration is applied to the syringe 41 in a state in which the hollow portion 410B overlaps the inner portion Ip of the impact point P, the vibration frequency (frequency at the time of insufficiency) measured by the vibration measuring device 57 is obtained in advance by calculation or experiment. Can be Then, a value (for example, an average value) between the satisfying frequency and the insufficient frequency is stored in the detection unit 56 as a threshold (threshold frequency). Therefore, in step S105, when the frequency of the vibration obtained in step S104 is equal to or higher than this threshold value, it is determined that the remaining amount of the coating agent E is insufficient (YES), and the vibration obtained in step S104 is determined. Is less than the threshold, it is determined that the remaining amount of the coating agent E is sufficient (NO).

また、振動計測器57を配置する場所も上述の貯留室410内に限られない。したがって、シリンジ41の外側のシリンジ41から離れた位置に振動計測器57を配置し、シリンジ41から発せられて空気を伝達してくる振動を振動計測器57で計測しても良い。   Further, the place where the vibration measuring device 57 is arranged is not limited to the above-described storage room 410. Therefore, the vibration measuring device 57 may be disposed at a position outside the syringe 41 and away from the syringe 41, and the vibration transmitted from the syringe 41 and transmitting the air may be measured by the vibration measuring device 57.

また、ハンマ52を駆動する駆動機構は、上述の直動ソレノイド53に限られない。したがって、エアシリンダによってハンマ52を駆動しても良いし、モータの回転軸に対して偏心して取り付けたハンマ52をモータの回転により駆動しても良い。   Further, the drive mechanism for driving the hammer 52 is not limited to the above-described direct acting solenoid 53. Therefore, the hammer 52 may be driven by an air cylinder, or the hammer 52 mounted eccentrically with respect to the rotation axis of the motor may be driven by the rotation of the motor.

また、シリンジ41に振動を加える具体的手段は打撃に限られない。したがって、例えばピエゾアクチュエータにより振動を加えたり、外部からの音波によって振動を加えたりしても良い。   In addition, a specific means for applying vibration to the syringe 41 is not limited to hitting. Therefore, for example, vibration may be applied by a piezo actuator, or vibration may be applied by an external sound wave.

また、報知部73によるエラーの報知方法も適宜変更できる。したがって、ブザー音等の音声や警告灯等の光によってエラーを報知することもできる。   In addition, the error notification method by the notification unit 73 can be changed as appropriate. Therefore, the error can be notified by sound such as a buzzer sound or light such as a warning light.

塗布剤Eを塗布するディスペンスヘッド4の具体的な種類は上述の空圧式に限られない。したがって、空圧以外の種々の手段により塗布剤Eを塗布するディスペンスヘッド4における塗布剤Eの残量不足の検知に上記の内容を適宜適用できる。   The specific type of the dispense head 4 for applying the coating agent E is not limited to the above-described pneumatic type. Therefore, the above contents can be appropriately applied to the detection of the insufficient remaining amount of the coating material E in the dispense head 4 for applying the coating material E by various means other than the pneumatic pressure.

また、スクリーン印刷により基板に塗布剤(半田)を塗布する印刷装置(塗布装置)に本発明を適用することも可能である。図7は本発明を適用した印刷装置を示す斜視図である。この印刷装置8は、基台80の上に設けられて基板を搬入・搬出する基板搬送機構81と、液状の半田(塗布剤)を基板に印刷(塗布)する印刷実行部82(塗布手段)とを備える。そして、X方向(基板搬送方向)の上流側から作業位置(図7におけるマスク83の下方)に基板搬送機構81が搬入した基板に印刷実行部82が半田を印刷する。続いて、印刷実行部82が半田の印刷を完了した基板を基板搬送機構81が作業位置からX方向の下流側へ搬出する。印刷実行部82は、マスク83の上方に設けられた半田供給ユニット9と、スキージユニット85とを有し、半田供給ユニット9がマスク83の上に供給した半田をスキージユニット85が広げることで、マスク83の下に位置する基板に半田が印刷される。   In addition, the present invention can be applied to a printing device (coating device) that applies a coating material (solder) to a substrate by screen printing. FIG. 7 is a perspective view showing a printing apparatus to which the present invention is applied. The printing device 8 includes a substrate transport mechanism 81 provided on a base 80 for loading and unloading a substrate, and a print execution unit 82 (coating means) for printing (coating) liquid solder (coating agent) on the substrate. And Then, the print execution unit 82 prints solder on the substrate carried by the substrate transport mechanism 81 from the upstream side in the X direction (substrate transport direction) to the work position (below the mask 83 in FIG. 7). Subsequently, the board carrying mechanism 81 carries out the board on which the printing of the solder is completed by the print execution unit 82 from the work position to the downstream side in the X direction. The print execution unit 82 has a solder supply unit 9 provided above the mask 83 and a squeegee unit 85, and the squeegee unit 85 spreads the solder supplied by the solder supply unit 9 onto the mask 83. Solder is printed on a substrate located under the mask 83.

図8は半田供給ユニットを示す断面図である。半田供給ユニット9のユニット本体901は、スキージユニット85に対してX方向に移動自在に取り付けられており、ユニット本体901がモータからの駆動を受けてX方向に移動する。このユニット本体901の正面側(図8の右側)には、容器支持部材902が配置されており、半田収納容器903に吐出アダプタ904の先端部905を嵌入して一体化したアダプタ付容器906を容器支持部材902に印刷装置8の正面側(図8の左手側)から着脱自在となっている。つまり、半田収納容器903は一方端に開口が形成された円筒状の貯留容器であり、その内部では略円形断面を有する凹部状の貯留室907が形成されている。そして、この貯留室907に半田が収容されている。一方、吐出アダプタ904の先端部905は半田収納容器903の内径より狭いフランジ形状に仕上げられ、半田収納容器903内に嵌入可能となっている。   FIG. 8 is a sectional view showing the solder supply unit. The unit main body 901 of the solder supply unit 9 is attached to the squeegee unit 85 so as to be movable in the X direction, and the unit main body 901 is driven by the motor and moves in the X direction. A container support member 902 is disposed on the front side (the right side in FIG. 8) of the unit main body 901, and a container 906 with an adapter in which the distal end portion 905 of the discharge adapter 904 is fitted into the solder container 903 and integrated therewith. The container supporting member 902 is detachable from the front side (the left hand side in FIG. 8) of the printing apparatus 8. That is, the solder storage container 903 is a cylindrical storage container having an opening formed at one end, and has a concave storage chamber 907 having a substantially circular cross section formed therein. The storage chamber 907 contains solder. On the other hand, the distal end portion 905 of the discharge adapter 904 is finished in a flange shape smaller than the inner diameter of the solder storage container 903, and can be fitted into the solder storage container 903.

そして、半田収納容器903に嵌入した吐出アダプタ904を半田収納容器903の内壁面に沿って上方へ相対移動させることが可能となっている。つまり、半田供給ユニット9は、半田収納容器903の上部の内面と吐出アダプタ904の上面との距離を縮めることで、吐出アダプタ904の吐出孔908を介して貯留室907から半田を下方へ押し出す。この吐出孔908の出口には、ガイド流路909が形成されたガイドブロック部材910が取り付けられており、吐出孔908から吐出される半田をガイド流路909を介してガイドブロック部材910の吐出口911からマスク83へ吐出(排出)することができる。   Then, the discharge adapter 904 fitted in the solder storage container 903 can be relatively moved upward along the inner wall surface of the solder storage container 903. That is, the solder supply unit 9 pushes the solder downward from the storage chamber 907 through the discharge hole 908 of the discharge adapter 904 by reducing the distance between the upper inner surface of the solder storage container 903 and the upper surface of the discharge adapter 904. A guide block member 910 in which a guide channel 909 is formed is attached to the outlet of the discharge hole 908, and the solder discharged from the discharge hole 908 is supplied to the discharge port of the guide block member 910 through the guide channel 909. 911 can be discharged (discharged) to the mask 83.

このような半田供給ユニット9では、半田収納容器903の貯留室907から半田が排出されるのに伴って、貯留室907の下方部分907Bから半田が排出され、当該下方部分907Bに空洞部が広がることとなる。したがって、上述のような加振部51や検知部56を半田収納容器903に対して設けることで、加振部51によって半田収納容器903に振動を加えつつ、検知部56が貯留室907の下方部分907B(空洞部)に生じる振動に基づき貯留室907での半田の残量不足を検知できる。具体的には図8に示すように、加振部51により貯留室907に振動を加える打撃箇所Pは、半田が残量不足となった際にその内側が空洞部となる範囲、すなわち貯留室907の下方部分907Bを囲む半田収納容器903の側壁(外壁)に設定されている。また、検知部56の振動計測器57は、半田収納容器903から離れた位置に配置されている。   In such a solder supply unit 9, as the solder is discharged from the storage chamber 907 of the solder storage container 903, the solder is discharged from the lower portion 907 </ b> B of the storage chamber 907, and the hollow portion extends to the lower portion 907 </ b> B. It will be. Therefore, by providing the vibration unit 51 and the detection unit 56 to the solder storage container 903 as described above, the vibration unit 51 applies vibration to the solder storage container 903, and the detection unit 56 moves below the storage chamber 907. Insufficient remaining amount of solder in the storage chamber 907 can be detected based on the vibration generated in the portion 907B (hollow portion). Specifically, as shown in FIG. 8, the striking point P where the vibration is applied to the storage chamber 907 by the vibrating section 51 is in a range where the inside becomes a hollow when the remaining amount of solder is insufficient, that is, the storage chamber. It is set on the side wall (outer wall) of the solder container 903 surrounding the lower part 907B of the solder container 907. Further, the vibration measuring device 57 of the detecting unit 56 is arranged at a position away from the solder storage container 903.

なお、印刷装置8に対しても、上述のディスペンサ1の例と同様に各種変更を加えることができる。したがって、打撃によらない方法で貯留室907に振動を与えても良いし、半田が残量不足となった際にその内側が空洞部となる半田収納容器903の外壁に検知部56の振動計測器57を取り付けても良い。   Note that various changes can be made to the printing device 8 as in the example of the dispenser 1 described above. Therefore, vibration may be applied to the storage chamber 907 by a method not depending on the impact, or when the remaining amount of solder becomes insufficient, the vibration measurement of the detection unit 56 may be performed on the outer wall of the solder storage container 903 having a hollow inside. The container 57 may be attached.

1…ディスペンサ(塗布装置)、
4…ディスペンスヘッド(塗布手段)、
5…塗布剤残量確認装置、
51…加振部、
56…検知部、
57…振動計測器、
41…シリンジ(貯留容器)、
41A,41B…側壁、
410…貯留室、
410A…充填部、
410B…空洞部、
420…吐出口、
73…報知部、
B…基板、
E…塗布剤、
P…打撃箇所、
Ip…内側部分、
8…印刷装置(塗布装置)、
82…印刷実行部(塗布手段)、
85…スキージユニット、
9…半田供給ユニット
903…半田収納容器(貯留容器)、
907…貯留室、
907B…下端部分
1. Dispenser (coating device)
4. Dispensing head (coating means)
5 ... Applicant remaining amount confirmation device
51: Exciter,
56 Detector,
57 ... vibration measuring instrument,
41 ... syringe (storage container),
41A, 41B ... side walls,
410 ... storage room,
410A: filling section,
410B ... hollow part,
420 ... discharge port,
73… Notification unit,
B ... substrate,
E: coating agent,
P ... hit location,
Ip ... inner part,
8. Printing device (coating device)
82 print execution unit (coating means)
85 ... Squeegee unit,
9: solder supply unit 903: solder storage container (storage container),
907 ... storage room,
907B ... lower end part

Claims (14)

その内部の貯留室に塗布剤を貯留可能な貯留容器に振動を加える加振部と、
前記加振部により振動が加えられることによって前記貯留容器に生じる振動に基づき前記貯留容器内の前記塗布剤の残量不足を検知する検知部と
を備え
前記貯留室には、前記貯留室の内径よりも小さい径のプランジャが配置され、前記プランジャが前記貯留室から前記塗布剤を押し出す塗布剤残量確認装置。
A vibrating section for applying vibration to a storage container capable of storing the coating agent in a storage chamber therein;
A detection unit that detects a shortage of the remaining amount of the coating agent in the storage container based on vibration generated in the storage container when vibration is applied by the vibration unit ,
A plunger having a diameter smaller than the inner diameter of the storage chamber is disposed in the storage chamber, and the plunger pushes the coating material from the storage chamber to check the remaining amount of the coating material.
前記加振部は、前記貯留容器を打撃することで前記貯留容器に振動を加える請求項1に記載の塗布剤残量確認装置。   The applicator remaining amount confirmation device according to claim 1, wherein the vibration unit applies vibration to the storage container by hitting the storage container. 前記加振部は、前記貯留室を囲む前記貯留容器の側壁の所定の打撃箇所を打撃し、
前記検知部は、前記貯留室のうち前記打撃箇所の内側部分に生じる振動に基づき前記貯留容器内の前記塗布剤の残量不足を検知する請求項2に記載の塗布剤残量確認装置。
The vibrating unit hits a predetermined hitting point on a side wall of the storage container surrounding the storage chamber,
The coating agent remaining amount confirmation device according to claim 2, wherein the detection unit detects a shortage of the remaining amount of the coating agent in the storage container based on a vibration generated in an inner portion of the storage chamber within the impact location.
前記貯留室では、空洞部が前記塗布剤の消費に伴って増大し、
前記検知部は、前記打撃箇所の前記内側部分の前記空洞部に生じる固有振動の変化に基づき前記貯留容器内の前記塗布剤の残量不足を検知する請求項3に記載の塗布剤残量確認装置。
In the storage chamber, the cavity increases with the consumption of the coating agent,
4. The remaining amount of the coating agent according to claim 3, wherein the detection unit detects a shortage of the remaining amount of the coating agent in the storage container based on a change in natural vibration generated in the hollow portion of the inner portion of the impact location. 5. apparatus.
前記検知部は、前記空洞部に生じる固有振動の周波数が所定値未満となると、前記貯留容器内の前記塗布剤の残量が不足したと判断する請求項4に記載の塗布剤残量確認装置。   The application agent remaining amount checking device according to claim 4, wherein the detection unit determines that the remaining amount of the application agent in the storage container is insufficient when the frequency of the natural vibration generated in the hollow portion is less than a predetermined value. . 前記検知部は、前記打撃箇所の前記内側部分に残存する前記塗布剤の減少に伴って前記打撃箇所の前記内側部分での振動に生じる変化に基づき前記貯留容器内の前記塗布剤の残量不足を検知する請求項3ないし5のいずれか一項に記載の塗布剤残量確認装置。   The detection unit is configured to determine that the remaining amount of the application agent in the storage container is insufficient based on a change that occurs in the vibration of the inside portion of the impact site with a decrease in the application agent remaining in the inside portion of the impact site. The applicator remaining amount checking device according to any one of claims 3 to 5, wherein the device detects a remaining amount of the coating agent. 前記検知部は、前記打撃箇所の前記内側部分が前記塗布剤により満たされた状態で前記打撃箇所を打撃した場合に前記打撃箇所の前記内側部分に生じる振動と比較して、前記打撃箇所の前記内側部分に生じる振動の振幅あるいは周波数が所定以上変化すると、前記貯留容器内の前記塗布剤の残量が不足したと判断する請求項6に記載の塗布剤残量確認装置。   The detection unit, compared with the vibration generated in the inner portion of the hitting point when hitting the hitting point in a state where the inner portion of the hitting point is filled with the coating agent, the 7. The remaining amount of the coating agent according to claim 6, wherein when the amplitude or frequency of the vibration generated in the inner portion changes by a predetermined amount or more, it is determined that the remaining amount of the coating agent in the storage container is insufficient. 前記検知部は、前記貯留室内に設けられた振動測定器を有し、前記振動測定器が測定した振動に基づき前記貯留容器内の前記塗布剤の残量不足を検知する請求項1ないし7のいずれか一項に記載の塗布剤残量確認装置。   The said detection part has a vibration measuring device provided in the said storage room, and detects the insufficient remaining amount of the said coating agent in the said storage container based on the vibration which the said vibration measuring device measured. The applicator remaining amount checking device according to any one of the preceding claims. 前記検知部は、前記貯留容器の外部に設けられた振動測定器を有し、前記振動測定器が測定した振動に基づき前記貯留容器内の前記塗布剤の残量不足を検知する請求項1ないし7のいずれか一項に記載の塗布剤残量確認装置。   The said detection part has a vibration measuring device provided outside the said storage container, and detects the insufficient remaining amount of the said coating agent in the said storage container based on the vibration measured by the said vibration measuring device. The coating agent remaining amount checking device according to any one of claims 7 to 10. 前記検知部が前記貯留容器内の前記塗布剤の残量不足を検知すると、前記塗布剤の残量不足をユーザーに報知する報知部をさらに備える請求項1ないし9のいずれか一項に記載の塗布剤残量確認装置。   The notification unit according to any one of claims 1 to 9, further comprising: a notification unit configured to notify the user of the insufficient remaining amount of the coating agent when the detecting unit detects the insufficient remaining amount of the coating agent in the storage container. Apparatus remaining amount check device. その内部の貯留室に塗布剤を貯留可能な貯留容器から排出した前記塗布剤を基板に塗布する塗布手段と、
請求項1ないし10のいずれか一項に記載の塗布剤残量確認装置と
を備える塗布装置。
Coating means for coating the substrate with the coating agent discharged from a storage container capable of storing the coating agent in a storage chamber therein,
An application device comprising the application agent remaining amount confirmation device according to any one of claims 1 to 10.
前記塗布剤残量確認装置が前記貯留容器内の前記塗布剤の残量が不足していると判断した時点において、1枚の前記基板に対して消費される量の前記塗布剤が少なくとも前記貯留容器に残存している請求項11に記載の塗布装置。   At the time when the remaining amount of the coating agent in the storage container is determined to be insufficient, the amount of the coating agent consumed for one substrate is at least the storage amount. The coating device according to claim 11, which remains in the container. 前記塗布剤残量確認装置は、前記貯留容器内の前記塗布剤の残量不足を判断するための基準を、1枚の前記基板に対する前記塗布剤の消費量に応じて変更する請求項12に記載の塗布装置。   13. The apparatus according to claim 12, wherein the application agent remaining amount checking device changes a reference for determining whether the remaining amount of the application agent in the storage container is insufficient, according to a consumption amount of the application agent for one substrate. The coating device according to the above. その内部の貯留室に塗布剤を貯留可能な貯留容器に振動を加える工程と、
振動が加えられることによって前記貯留容器に生じる振動に基づき前記貯留容器内の前記塗布剤の残量不足を検知する工程と
を備え
前記貯留室には、前記貯留室の内径よりも小さい径のプランジャが配置され、前記プランジャが前記貯留室から前記塗布剤を押し出す塗布剤残量確認方法。
Applying vibration to a storage container capable of storing the coating agent in a storage chamber therein;
Detecting a shortage of the remaining amount of the coating agent in the storage container based on the vibration generated in the storage container by applying vibration ,
A plunger having a diameter smaller than the inner diameter of the storage chamber is disposed in the storage chamber, and the plunger pushes the coating material from the storage chamber to check the remaining amount of the coating material.
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