JP6646539B2 - 流体分析装置、及び流体分析装置の製造方法 - Google Patents
流体分析装置、及び流体分析装置の製造方法 Download PDFInfo
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- JP6646539B2 JP6646539B2 JP2016133408A JP2016133408A JP6646539B2 JP 6646539 B2 JP6646539 B2 JP 6646539B2 JP 2016133408 A JP2016133408 A JP 2016133408A JP 2016133408 A JP2016133408 A JP 2016133408A JP 6646539 B2 JP6646539 B2 JP 6646539B2
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- Semiconductor Lasers (AREA)
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
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US15/294,882 US9909980B2 (en) | 2015-10-21 | 2016-10-17 | Fluid analyzer and method of manufacturing fluid analyzer |
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JP2015207249 | 2015-10-21 | ||
JP2015207249 | 2015-10-21 |
Publications (3)
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JP2017078706A JP2017078706A (ja) | 2017-04-27 |
JP2017078706A5 JP2017078706A5 (tr) | 2019-04-18 |
JP6646539B2 true JP6646539B2 (ja) | 2020-02-14 |
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JP2016133408A Active JP6646539B2 (ja) | 2015-10-21 | 2016-07-05 | 流体分析装置、及び流体分析装置の製造方法 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6818645B2 (ja) * | 2017-07-05 | 2021-01-20 | 浜松ホトニクス株式会社 | 流体分析装置 |
JP7109241B2 (ja) * | 2018-04-20 | 2022-07-29 | 浜松ホトニクス株式会社 | 光半導体素子、及び、光半導体素子の製造方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3633931A1 (de) * | 1986-10-04 | 1988-04-07 | Kernforschungsz Karlsruhe | Verfahren und einrichtung zur kontinuierlichen messung der konzentration eines gasbestandteiles |
JPH08247939A (ja) * | 1995-03-15 | 1996-09-27 | Anritsu Corp | ガス濃度測定装置 |
JP2003107001A (ja) * | 2001-09-28 | 2003-04-09 | Matsushita Electric Ind Co Ltd | 複合センサ |
JP2007158204A (ja) * | 2005-12-08 | 2007-06-21 | Nippon Telegr & Teleph Corp <Ntt> | 光集積デバイス |
FR2934712B1 (fr) * | 2008-08-01 | 2010-08-27 | Thales Sa | Procede de fabrication d'un dispositif optique d'analyse comportant un laser a cascades quantiques et un detecteur quantique. |
JP5855590B2 (ja) * | 2012-05-07 | 2016-02-09 | アオイ電子株式会社 | 光源一体型光センサ |
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