JP6646539B2 - 流体分析装置、及び流体分析装置の製造方法 - Google Patents

流体分析装置、及び流体分析装置の製造方法 Download PDF

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JP6646539B2
JP6646539B2 JP2016133408A JP2016133408A JP6646539B2 JP 6646539 B2 JP6646539 B2 JP 6646539B2 JP 2016133408 A JP2016133408 A JP 2016133408A JP 2016133408 A JP2016133408 A JP 2016133408A JP 6646539 B2 JP6646539 B2 JP 6646539B2
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light
quantum cascade
qcd
fluid analyzer
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JP2017078706A (ja
JP2017078706A5 (tr
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昭生 伊藤
昭生 伊藤
龍男 道垣内
龍男 道垣内
忠孝 枝村
忠孝 枝村
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Hamamatsu Photonics KK
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  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
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JP2016133408A 2015-10-21 2016-07-05 流体分析装置、及び流体分析装置の製造方法 Active JP6646539B2 (ja)

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US15/294,882 US9909980B2 (en) 2015-10-21 2016-10-17 Fluid analyzer and method of manufacturing fluid analyzer

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JP2015207249 2015-10-21
JP2015207249 2015-10-21

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JP2017078706A JP2017078706A (ja) 2017-04-27
JP2017078706A5 JP2017078706A5 (tr) 2019-04-18
JP6646539B2 true JP6646539B2 (ja) 2020-02-14

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Publication number Priority date Publication date Assignee Title
JP6818645B2 (ja) * 2017-07-05 2021-01-20 浜松ホトニクス株式会社 流体分析装置
JP7109241B2 (ja) * 2018-04-20 2022-07-29 浜松ホトニクス株式会社 光半導体素子、及び、光半導体素子の製造方法

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DE3633931A1 (de) * 1986-10-04 1988-04-07 Kernforschungsz Karlsruhe Verfahren und einrichtung zur kontinuierlichen messung der konzentration eines gasbestandteiles
JPH08247939A (ja) * 1995-03-15 1996-09-27 Anritsu Corp ガス濃度測定装置
JP2003107001A (ja) * 2001-09-28 2003-04-09 Matsushita Electric Ind Co Ltd 複合センサ
JP2007158204A (ja) * 2005-12-08 2007-06-21 Nippon Telegr & Teleph Corp <Ntt> 光集積デバイス
FR2934712B1 (fr) * 2008-08-01 2010-08-27 Thales Sa Procede de fabrication d'un dispositif optique d'analyse comportant un laser a cascades quantiques et un detecteur quantique.
JP5855590B2 (ja) * 2012-05-07 2016-02-09 アオイ電子株式会社 光源一体型光センサ

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