JP6644343B1 - Zero flux type magnetic sensor - Google Patents
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Abstract
【課題】 回路が簡素になり、小型化が容易であり、距離ｄｘ、ｄｙ、透磁率μの誤差を含みにくく、製造コストを低減しやすいゼロフラックス型磁気センサを提供すること。【解決手段】 ゼロフラックス型磁気センサは、絶縁基板と、磁気検出素子と、励磁素子とを備え、磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化し、励磁素子は磁気検出素子の近傍に配置され、巻回されない単線配線であり、被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。【選択図】 図５PROBLEM TO BE SOLVED: To provide a zero-flux type magnetic sensor whose circuit is simple, miniaturization is easy, errors of distances dx, dy and permeability μ are not included, and manufacturing cost is easily reduced. SOLUTION: The zero flux type magnetic sensor includes an insulating substrate, a magnetic detecting element, and an exciting element. The element is a single wire that is arranged near the magnetic detection element and is not wound, and generates a cancel magnetic flux that cancels a part or all of the measured magnetic flux. [Selection diagram] FIG.
Description
本発明は、ゼロフラックス型磁気センサに関する。 The present invention relates to a zero flux type magnetic sensor.
磁気センサは、磁束の密度・方向を計測することを目的としたセンサである。磁気センサの用途は、磁束の計測だけでなく、非接触電流センサ、磁気ヘッド、回転センサ等、多岐にわたる。磁束を検出する磁気検出素子は、原理に応じて電圧、電流等の特性の変化を出力する。磁気検出素子の種類としては、例えば、ＧＭＲ素子、ＴＭＲ素子、ＡＭＲ素子等の磁気抵抗効果素子、ホール素子、コイル等が挙げられる。なお、本明細書では、素子が形成される面（素子面）に水平方向の磁束に対して特性が変化し、素子面に水平方向の磁束を検出する素子を「水平磁束検出素子」といい、素子面に垂直方向の磁束に対して特性が変化し、素子面に垂直方向の磁束を検出する素子を「垂直磁束検出素子」という。例えば、水平磁束検出素子には磁気抵抗効果素子が含まれ、垂直磁束検出素子にはホール素子が含まれる。 The magnetic sensor is a sensor for measuring the density and direction of the magnetic flux. Applications of the magnetic sensor are not limited to measurement of magnetic flux, but also wide-ranging, such as a non-contact current sensor, a magnetic head, and a rotation sensor. A magnetic detection element that detects a magnetic flux outputs a change in characteristics such as voltage and current according to the principle. Examples of the type of the magnetic detection element include a magnetoresistance effect element such as a GMR element, a TMR element, and an AMR element, a Hall element, a coil, and the like. Note that in this specification, an element that changes its characteristics with respect to the magnetic flux in the horizontal direction on the surface on which the element is formed (element surface) and detects the magnetic flux in the horizontal direction on the element surface is referred to as a “horizontal magnetic flux detection element”. An element that changes its characteristics with respect to the magnetic flux in the direction perpendicular to the element surface and detects the magnetic flux in the direction perpendicular to the element surface is called a “vertical magnetic flux detection element”. For example, the horizontal magnetic flux detecting element includes a magnetoresistance effect element, and the vertical magnetic flux detecting element includes a Hall element.
＜磁気比例方式＞
図１に代表的な磁気検出素子１０の例を示す。代表的な磁気検出素子１０は４つのＧＭＲ素子（第１のＧＭＲ素子１１〜第４のＧＭＲ素子１４）を備え、４つのＧＭＲ素子は矩形のブリッジ構成を形成する。電源電圧Ｖｃｃ１５とＧＮＤ１６の間において第１のＧＭＲ素子１１と第３のＧＭＲ素子１３、第２のＧＭＲ素子１２と第４のＧＭＲ素子１４がそれぞれ直列に接続される。代表的な磁気検出素子１０の出力は、第１のＧＭＲ素子１１と第３のＧＭＲ素子１３の第１の中間電位Ｖｏｕｔ１７と、第２のＧＭＲ素子１２と第４のＧＭＲ素子１４の第２の中間電位Ｖｏｕｔ１８との差電圧（出力電圧）Ｖｏｕｔである。
<Magnetic proportional method>
FIG. 1 shows an example of a typical magnetic sensing element 10. The typical magnetic sensing element 10 includes four GMR elements (first GMR element 11 to fourth GMR element 14), and the four GMR elements form a rectangular bridge configuration. The first GMR element 11 and the third GMR element 13, and the second GMR element 12 and the fourth GMR element 14 are connected in series between the power supply voltage Vcc15 and the GND 16. A typical output of the magnetic sensing element 10 is a first intermediate potential Vout 17 of the first GMR element 11 and the third GMR element 13 and a second intermediate potential Vout 17 of the second GMR element 12 and the fourth GMR element 14. The difference voltage (output voltage) Vout from the intermediate potential Vout18.
代表的な磁気検出素子１０は、４つのＧＭＲ素子が形成する面方向の磁束を検出する。例えば、磁束の向きが第２のＧＭＲ素子１２及び第３のＧＭＲ素子１３の長手方向（Ｘ軸方向）の場合、第２のＧＭＲ素子１２、第３のＧＭＲ素子１３の初期抵抗ＲはΔＲ減少し、Ｒ−ΔＲとなる。このとき、他方の第１のＧＭＲ素子１１及び第４のＧＭＲ素子１４は長手方向がこの磁束の向きに直交するため、初期抵抗Ｒのままである。 A typical magnetic detecting element 10 detects a magnetic flux in a plane direction formed by four GMR elements. For example, when the direction of the magnetic flux is in the longitudinal direction (X-axis direction) of the second GMR element 12 and the third GMR element 13, the initial resistance R of the second GMR element 12 and the third GMR element 13 decreases by ΔR. And R−ΔR. At this time, the other first GMR element 11 and fourth GMR element 14 have the initial resistance R because their longitudinal directions are orthogonal to the direction of the magnetic flux.
第１のＧＭＲ素子１１と第３のＧＭＲ素子１３の間の第１の中間電位Ｖｏｕｔ１７は、ＧＮＤ１６側の第３のＧＭＲ素子１３の抵抗が減少した分低くなり、第２のＧＭＲ素子１２と第４のＧＭＲ素子１４の間の第２の中間電位Ｖｏｕｔ１８は、電源電圧Ｖｃｃ１５側の第２のＧＭＲ素子１２の抵抗が減少した分高くなる。第１の中間電位Ｖｏｕｔ１７と第２の中間電位Ｖｏｕｔ１８の差電圧（出力電圧）Ｖｏｕｔより磁束の変化を測定することができる。ただし、磁束の方向がＸ軸のプラス方向／マイナス方向のいずれであっても第２のＧＭＲ素子１２、第３のＧＭＲ素子１３の抵抗は同じように減少する（偶関数）ため、磁束の向きを判別することはできない。 The first intermediate potential Vout17 between the first GMR element 11 and the third GMR element 13 becomes lower by the decrease in the resistance of the third GMR element 13 on the GND 16 side. The second intermediate potential Vout18 between the four GMR elements 14 is increased by the decrease in the resistance of the second GMR element 12 on the power supply voltage Vcc15 side. The change in magnetic flux can be measured from the difference voltage (output voltage) Vout between the first intermediate potential Vout17 and the second intermediate potential Vout18. However, the resistance of the second GMR element 12 and the resistance of the third GMR element 13 decrease in the same manner regardless of whether the direction of the magnetic flux is in the plus direction or the minus direction of the X axis (even function). Cannot be determined.
磁気センサの用途として、電流Ｉｘの非接触電流センサを考える。電流Ｉｘと、電流Ｉｘが距離ｄｘに作る磁界強度Ｈｘとの関係を（式１）に示す。
Ｈｘ＝Ｉｘ／ｄｘ＋ｃ１ （式１）
As a use of the magnetic sensor, a non-contact current sensor of a current Ix is considered. The relationship between the current Ix and the magnetic field intensity Hx created by the current Ix at the distance dx is shown in (Equation 1).
Hx = Ix / dx + c1 (Equation 1)
磁界強度Ｈｘは電流Ｉｘに比例し、距離ｄｘに反比例する。地磁気等の誤差ｃ１がある場合、Ｉｘ＝０でもＨｘは０にならない。 The magnetic field strength Hx is proportional to the current Ix and inversely proportional to the distance dx. If there is an error c1 such as terrestrial magnetism, Hx does not become 0 even if Ix = 0.
磁束密度Ｂｘと磁界強度Ｈｘの関係を（式２）に示す。
Ｂｘ＝μ・Ｈｘ＋ｃ２ （式２）
The relationship between the magnetic flux density Bx and the magnetic field strength Hx is shown in (Equation 2).
Bx = μ · Hx + c2 (Equation 2)
磁束密度Ｂｘは磁界強度Ｈｘと透磁率μに比例する。残留磁束等の誤差ｃ２がある場合、Ｈｘ＝０でもＢｘは０にならない。 The magnetic flux density Bx is proportional to the magnetic field strength Hx and the magnetic permeability μ. If there is an error c2 such as a residual magnetic flux, Bx does not become 0 even when Hx = 0.
磁気検出素子の出力電圧Ｖｘと磁束密度Ｂｘと感度ａの関係を（式３）に示す。
Ｖｘ＝ａ・Ｂｘ＋ｃ３ （式３）
(Equation 3) shows the relationship between the output voltage Vx of the magnetic detection element, the magnetic flux density Bx, and the sensitivity a.
Vx = a · Bx + c3 (Equation 3)
磁気検出素子の出力電圧Ｖｘは磁束密度Ｂｘと感度ａに比例する。しかし、例えば、磁気検出素子が４つのＧＭＲ素子からなるブリッジ構成の場合、４つのＧＭＲ素子にアンバランスが生じ、即ち、Ｒ１〜Ｒ４が同じ抵抗値にはならず、オフセット電圧等の誤差ｃ３が残ることがある。このとき、Ｂｘ＝０でもＶｘは０にならない。 The output voltage Vx of the magnetic sensing element is proportional to the magnetic flux density Bx and the sensitivity a. However, for example, when the magnetic sensing element has a bridge configuration including four GMR elements, imbalance occurs in the four GMR elements, that is, R1 to R4 do not have the same resistance value, and an error c3 such as an offset voltage is generated. May remain. At this time, Vx does not become 0 even when Bx = 0.
（式１）〜（式３）より、電流Ｉｘと出力電圧Ｖｘの関係を（式４）に示す。
Ｉｘ＝ｄｘ／（ａ・μ）×（Ｖｘ−（ａ・μ・ｃ１＋ａ・ｃ２＋ｃ３）） （式４）
From (Equation 1) to (Equation 3), the relation between the current Ix and the output voltage Vx is shown in (Equation 4).
Ix = dx / (a · μ) × (Vx− (a · μ · c1 + a · c2 + c3)) (Equation 4)
電流Ｉｘは出力電圧Ｖｘと無関係な誤差成分ｄｘ／（ａ・μ）×（ａ・μ・ｃ１＋ａ・ｃ２＋ｃ３）を含む。一般的にはこの誤差成分は無視できると考え、（式５）で近似し、出力電圧Ｖｘと変換感度ｄｘ／（ａ・μ）から電流Ｉｘを求める。
Ｉｘ＝ｄｘ／（ａ・μ）×Ｖｘ （式５）
The current Ix includes an error component dx / (a · μ) × (a · μ · c1 + a · c2 + c3) irrelevant to the output voltage Vx. Generally, this error component is considered to be negligible, and is approximated by (Equation 5), and the current Ix is obtained from the output voltage Vx and the conversion sensitivity dx / (a · μ).
Ix = dx / (a · μ) × Vx (Equation 5)
このように出力電圧Ｖｘから直接電流Ｉｘを求めることを磁気比例方式という。磁気比例方式は、（式４）より、変換感度が変化すると距離ｄｘ、感度ａ、透磁率μによる誤差が生じる。また、出力電圧Ｖｘが小さくなると、誤差成分が無視できなくなり、誤差が相対的に大きくなる。さらに、磁気比例方式はＩｘが大きくなると磁気飽和の問題が生じるため、ダイナミックレンジは磁気飽和を生じさせない範囲に限られる。したがって、磁気比例方式は、高い精度が求められる磁気センサには用いられない。 Obtaining the current Ix directly from the output voltage Vx in this manner is called a magnetic proportional method. In the magnetic proportional method, according to (Equation 4), when the conversion sensitivity changes, an error occurs due to the distance dx, the sensitivity a, and the magnetic permeability μ. When the output voltage Vx decreases, the error component cannot be ignored, and the error relatively increases. Further, in the magnetic proportional method, since the problem of magnetic saturation occurs when Ix increases, the dynamic range is limited to a range where magnetic saturation does not occur. Therefore, the magnetic proportional method is not used for a magnetic sensor requiring high accuracy.
＜ゼロフラックス法（磁気平衡方式）＞
高い精度が求められる磁気センサには、ゼロフラックス法（磁気平衡方式）が高級な非接触電流計等によく用いられてきた。図２に、特許文献１に記載されている従来のゼロフラックス型磁気センサ２０を示す。従来のゼロフラックス型磁気センサ２０は、導体２１に通流される被測定電流からの誘導磁界により特性が変化する磁気検出素子２２と、磁気検出素子２２の近傍に配置され、誘導磁界を相殺するキャンセル磁界を発生するフィードバックコイル（励磁素子）２３とを備える。磁気検出素子２２の構造は、特許文献１には記載されていないが、図３に概要を示すように、機械的強度とフィードバックコイル２３との絶縁性を確保するため、絶縁基板２４と、その上に形成されたＧＭＲ素子やホール素子等の磁束検出素子２５を備え、絶縁基板２４はフィードバックコイル２３の上に配置されると考えられる。
<Zero flux method (magnetic balance method)>
For magnetic sensors that require high accuracy, the zero flux method (magnetic balance method) has been often used for high-grade non-contact ammeters and the like. FIG. 2 shows a conventional zero-flux type magnetic sensor 20 described in Patent Document 1. The conventional zero-flux type magnetic sensor 20 includes a magnetic detection element 22 whose characteristics change due to an induced magnetic field from a current to be measured flowing through a conductor 21, and a canceler arranged near the magnetic detection element 22 to cancel out the induced magnetic field. A feedback coil (exciting element) 23 for generating a magnetic field. Although the structure of the magnetic sensing element 22 is not described in Patent Document 1, as shown in FIG. 3, in order to ensure mechanical strength and insulation between the feedback coil 23 and an insulating substrate 24, It is considered that a magnetic flux detecting element 25 such as a GMR element or a Hall element is formed thereon, and the insulating substrate 24 is disposed on the feedback coil 23.
従来のゼロフラックス型磁気センサ２０は、フィードバックコイル２３にキャンセル電流−Ｉｙを流すことにより、磁束密度Ｂｘと大きさが同じで向きが逆のキャンセル磁束−Ｂｙを作り出す。キャンセル電流−Ｉｙは、Ｂｘと−Ｂｙによる合計出力電圧がゼロになるように制御される。 The conventional zero-flux type magnetic sensor 20 generates a cancel magnetic flux -By having the same magnitude as the magnetic flux density Bx and having the opposite direction by flowing a cancel current -Iy through the feedback coil 23. The cancel current -Iy is controlled so that the total output voltage of Bx and -By becomes zero.
ゼロフラックス型磁気センサ２０の制御方法を、図４を用いてさらに説明する。測定対象の電流Ｉｘが作る磁束密度Ｂｘは、Ｂ／Ｖ変換（磁気検出素子）２２においてキャンセル磁束−Ｂｙと加算され、出力電圧（差電圧）Ｖｏｕｔに変換される。出力電圧Ｖｏｕｔはノイズ除去等の処理をされ、差動アンプ２６で０Ｖと比較された後、増幅器２７でＡ倍に増幅され、Ｖ／Ｉ変換２８でキャンセル電流−Ｉｙに変換される。キャンセル電流−Ｉｙは、Ｂ／Ｖ変換（磁気検出素子）２２との距離ｄｙに設けられたフィードバックコイル（励磁素子）に負帰還される。キャンセル電流−Ｉｙは、差動アンプ２６の出力が０Ｖになるように制御される。したがって、Ｉｙにｄｘ／ｄｙとコイルのターン数ｎをかけることでＩｘを求めることができる。また、制御中はキャンセル電流−Ｉｙの向きにより、被測定磁束の向きを判別することができる。この関係を（式６）〜（式９）に示す。
−Ｈｙ＝−Ｉｙ／ｄｙ＋ｃ１’ （式６）
−Ｂｙ＝−μ・Ｈｙ＋ｃ２’ （式７）
−Ｖｙ＝−ａ・Ｂｙ＋ｃ３’ （式８）
Ｖｘ−Ｖｙ＝ａ（Ｂｘ−Ｂｙ）＋ｃ３＋ｃ３’ （式９）
The control method of the zero flux type magnetic sensor 20 will be further described with reference to FIG. The magnetic flux density Bx generated by the current Ix to be measured is added to the canceling magnetic flux -By in the B / V conversion (magnetic detection element) 22, and converted into an output voltage (difference voltage) Vout. The output voltage Vout is subjected to processing such as noise removal and the like, and is compared with 0 V by the differential amplifier 26, amplified by A times by the amplifier 27, and converted into the cancel current −Iy by the V / I converter 28. The cancel current -Iy is negatively fed back to a feedback coil (excitation element) provided at a distance dy from the B / V conversion (magnetic detection element) 22. The cancel current -Iy is controlled so that the output of the differential amplifier 26 becomes 0V. Therefore, Ix can be obtained by multiplying Iy by dx / dy and the number of turns n of the coil. During the control, the direction of the magnetic flux to be measured can be determined from the direction of the cancel current -Iy. This relationship is shown in (Equation 6) to (Equation 9).
-Hy = -Iy / dy + c1 '(Equation 6)
−By = −μ · Hy + c2 ′ (Equation 7)
−Vy = −a · By + c3 ′ (Equation 8)
Vx−Vy = a (Bx−By) + c3 + c3 ′ (Equation 9)
各変換時にそれぞれｃ１’〜ｃ３’の誤差が生じる。一般的にはｃ１≒ｃ１’、ｃ２≒ｃ２’、ｃ３≒ｃ３’が成り立つ。 At the time of each conversion, an error of c1 'to c3' occurs. Generally, c1 ≒ c1 ', c2 ≒ c2', and c3 ≒ c3 'hold.
ゼロフラックス法のデメリットは、（式９）のＶｘ−Ｖｙがゼロになるように制御するため、制御回路が複雑になることと、磁気検出素子と電流Ｉｙの位置精度が高い必要があることである。一方、誤差成分（ｃ１〜ｃ３、ｃ１’〜ｃ３’）を無視できる場合、Ｂｘ−Ｂｙ＝０であるから、出力電圧Ｖｘ−Ｖｙは感度ａのずれや非直線性に左右されない。つまり、ゼロフラックス法のメリットは、感度ａの誤差に伴うゲイン誤差がゼロになるため、測定の精度を非常に高くできることである。さらに、ゼロフラックス法はＢｘ−Ｂｙ＝０であるため、磁気飽和の問題が生じず、ダイナミックレンジを広くすることができる。 The disadvantages of the zero flux method are that the control circuit is complicated because Vx-Vy in (Equation 9) is controlled to be zero, and that the positional accuracy between the magnetic sensing element and the current Iy needs to be high. is there. On the other hand, when the error components (c1 to c3, c1 'to c3') can be neglected, Bx-By = 0, so that the output voltage Vx-Vy is not affected by the deviation of the sensitivity a or the nonlinearity. In other words, the merit of the zero flux method is that the gain error accompanying the error of the sensitivity a becomes zero, so that the measurement accuracy can be extremely increased. Furthermore, in the zero flux method, since Bx-By = 0, there is no problem of magnetic saturation, and the dynamic range can be widened.
従来のゼロフラックス型磁気センサはフィードバックコイルを備えるため、回路が複雑になるだけでなく、小型化が難しい。また、キャンセル磁界を発生するフィードバックコイルは基板の下に配置されるため、距離ｄｘ、ｄｙが長くなり、誤差を含みやすい。さらに、距離ｄｘ、ｄｙが長くなるため、透磁率μの誤差も含みやすい。これらの誤差を含まないようにするには、特性のよい材料や高い精度での製造が求められ、製造コストが増大しやすい。 The conventional zero-flux type magnetic sensor has a feedback coil, so that not only the circuit becomes complicated, but also miniaturization is difficult. In addition, since the feedback coil that generates the cancel magnetic field is disposed below the substrate, the distances dx and dy are long, and errors are likely to be included. Further, since the distances dx and dy are long, errors in the magnetic permeability μ are likely to be included. In order to eliminate these errors, a material with good characteristics and high-precision manufacturing are required, and the manufacturing cost tends to increase.
本発明の態様は、回路が簡素になり、小型化が容易であり、距離ｄｘ、ｄｙ、透磁率μの誤差を含みにくく、製造コストを低減しやすいゼロフラックス型磁気センサを提供することを目的とする。 An aspect of the present invention is to provide a zero-flux type magnetic sensor that has a simple circuit, can be easily miniaturized, does not include errors in distances dx, dy, and magnetic permeability μ, and can easily reduce manufacturing costs. And
（１）本発明の態様は、絶縁基板と、磁気検出素子と、励磁素子とを備え、磁気検出素子は絶縁基板上に形成され、被測定磁束に応じて特性が変化し、励磁素子は磁気検出素子の近傍に配置され、巻回されない単線配線であり、被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することを特徴とするゼロフラックス型磁気センサに関する。このゼロフラックス型磁気センサを用いると、励磁素子は巻回されない単線配線であり、回路を簡素にすることができる。したがって、製造コストを低減しやすい。 (1) An aspect of the present invention includes an insulating substrate, a magnetic detecting element, and an exciting element. The magnetic detecting element is formed on the insulating substrate, and changes in characteristics according to a measured magnetic flux. The present invention relates to a zero-flux type magnetic sensor which is arranged near a detection element, is a single wire that is not wound, and generates a cancel magnetic flux that cancels a part or all of a measured magnetic flux. When this zero-flux type magnetic sensor is used, the exciting element is a single-wire wiring that is not wound, and the circuit can be simplified. Therefore, the manufacturing cost is easily reduced.
（２）本発明の態様では、励磁素子は絶縁基板の下面よりも磁気検出素子の側に配置されていることが好ましい。励磁素子は磁気検出素子の近傍、かつ、絶縁基板の下面よりも磁気検出素子の側に配置されており、磁気検出素子との距離ｄｙを小さくすることができる。また、測定対象を絶縁基板の下面に接することができるため、磁気検出素子との距離ｄｘを小さくすることができる。したがって、ゼロフラックス型磁気センサの小型化が容易である。また、距離ｄｘ、ｄｙ及び透磁率μの誤差を含みにくい。さらに、（式１）より、より小さなＩｘを検出することができる。 (2) In the aspect of the present invention, it is preferable that the exciting element is disposed closer to the magnetic detecting element than the lower surface of the insulating substrate. The excitation element is arranged near the magnetic detection element and closer to the magnetic detection element than the lower surface of the insulating substrate, so that the distance dy from the magnetic detection element can be reduced. Further, since the measurement target can be in contact with the lower surface of the insulating substrate, the distance dx from the magnetic detection element can be reduced. Therefore, it is easy to reduce the size of the zero flux type magnetic sensor. Further, it is difficult to include errors in the distances dx and dy and the magnetic permeability μ. Further, a smaller Ix can be detected from (Equation 1).
（３）本発明の態様では、励磁素子は両端に外部端子を備えることが好ましい。励磁素子は両端に外部端子を備えることにより、励磁素子に発生させる被測定磁束のキャンセル磁束の大きさと向きを容易に制御することができる。 (3) In the aspect of the present invention, it is preferable that the exciting element has external terminals at both ends. By providing external terminals at both ends of the exciting element, the magnitude and direction of the canceling magnetic flux of the measured magnetic flux generated in the exciting element can be easily controlled.
（４）本発明の態様では、励磁素子は絶縁基板の内部に配置されていることが好ましい。励磁素子は絶縁基板の内部に配置され、励磁素子と磁気検出素子との距離ｄｙを小さくすることができるとともに、励磁素子の位置精度を高くすることができる。したがって、ゼロフラックス型磁気センサの小型化が容易である。さらに、ｄｙ及び透磁率μの誤差を含みにくく、製造コストを低減しやすい。 (4) In the aspect of the present invention, it is preferable that the excitation element is disposed inside the insulating substrate. The exciting element is disposed inside the insulating substrate, so that the distance dy between the exciting element and the magnetic detecting element can be reduced, and the positional accuracy of the exciting element can be increased. Therefore, it is easy to reduce the size of the zero flux type magnetic sensor. Further, errors in dy and the magnetic permeability μ are not easily included, and the manufacturing cost is easily reduced.
（５）本発明の態様では、磁気検出素子は４つの水平磁束検出素子を備え、４つの水平磁束検出素子はブリッジ構成を形成し、励磁素子は１本の直線であり、４つの水平磁束検出素子のうちの向かい合う１対の水平磁束検出素子の間において、他の向かい合う１対の水平磁束検出素子を結ぶ直線に対して平行に配置され、そして、他の向かい合う１対の水平磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することが好ましい。ＧＭＲ素子、ＡＭＲ素子、ＴＭＲ素子といった水平磁束検出素子を用いてゼロフラックス型磁気センサを製造することにより、小型化が容易で、誤差を含みにくく、製造コストを低減しやすい。 (5) According to the aspect of the present invention, the magnetic detecting element includes four horizontal magnetic flux detecting elements, the four horizontal magnetic flux detecting elements form a bridge configuration, the exciting element is a single straight line, and the four horizontal magnetic flux detecting elements. A pair of horizontal magnetic flux detecting elements facing each other is disposed in parallel with a straight line connecting the pair of horizontal magnetic flux detecting elements facing each other, and a pair of horizontal magnetic flux detecting elements opposite to each other. It is preferable to generate a cancel magnetic flux that cancels a part or all of the measured magnetic flux. By manufacturing a zero-flux type magnetic sensor using a horizontal magnetic flux detecting element such as a GMR element, an AMR element, or a TMR element, miniaturization is easy, error is not easily included, and manufacturing cost is easily reduced.
（６）本発明の態様では、他の向かい合う１対の水平磁束検出素子の間において、励磁素子に中間端子が設けられていることが好ましい。他の向かい合う１対の水平磁束検出素子の間に設けられている中間端子により、他の向かい合う１対の水平磁束検出素子に異なるキャンセル磁束を発生することができる。被測定磁束の向きによって他の向かい合う１対の水平磁束検出素子の応答が異なることから、被測定磁束の向きを判別することができる。 (6) In the aspect of the present invention, it is preferable that an intermediate terminal is provided on the exciting element between the other pair of horizontal magnetic flux detecting elements facing each other. An intermediate terminal provided between the other pair of horizontal magnetic flux detecting elements can generate different canceling magnetic fluxes in the other pair of horizontal magnetic flux detecting elements. Since the response of the other pair of horizontal magnetic flux detecting elements facing each other differs depending on the direction of the magnetic flux to be measured, the direction of the magnetic flux to be measured can be determined.
（７）本発明の態様では、磁気検出素子は４つの水平磁束検出素子を備え、４つの水平磁束検出素子はブリッジ構成を形成し、４つの水平磁束検出素子のうちの隣り合う２対の水平磁束検出素子はそれぞれ電源電圧ＶｃｃとＧＮＤの間を直列接続され、励磁素子は２本のＬ字形であり、Ｌ字形の励磁素子を構成する２本の直線部は、隣り合う１対の水平磁束検出素子に対してそれぞれ直角に配置され、励磁素子は４つの水平磁束検出素子のうちの向かい合う１対の水平磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することが好ましい。励磁素子がＬ字形であり、隣り合う１対の水平磁束検出素子に対してそれぞれ直角に配置されているため、被測定磁束の方向が４つの水平磁束検出素子のうちの、いずれの向かい合う１対の水平磁束検出素子に平行であっても、被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することができる。また、２本の励磁素子は、別々に制御することにより、直列接続される隣り合う２対の水平磁束検出素子において異なるキャンセル磁束を発生することができる。 (7) In the aspect of the present invention, the magnetic detecting element includes four horizontal magnetic flux detecting elements, the four horizontal magnetic flux detecting elements form a bridge configuration, and two pairs of adjacent horizontal magnetic flux detecting elements among the four horizontal magnetic flux detecting elements. The magnetic flux detecting elements are connected in series between the power supply voltage Vcc and GND, respectively, and the exciting elements are two L-shaped, and two linear portions constituting the L-shaped exciting element are formed by a pair of adjacent horizontal magnetic fluxes. Each of the exciting elements is arranged at a right angle to the detecting element, and the exciting element generates a canceling magnetic flux that cancels a part or all of a measured magnetic flux in a pair of horizontal magnetic flux detecting elements facing each other among the four horizontal magnetic flux detecting elements. preferable. Since the exciting element is L-shaped and arranged at right angles to a pair of adjacent horizontal magnetic flux detecting elements, the direction of the measured magnetic flux is any one of the four horizontal magnetic flux detecting elements. Even if the magnetic flux is parallel to the horizontal magnetic flux detecting element, a cancel magnetic flux that cancels a part or all of the measured magnetic flux can be generated. By controlling the two excitation elements separately, different cancellation magnetic fluxes can be generated in two pairs of adjacent horizontal magnetic flux detection elements connected in series.
（８）本発明の態様では、磁気検出素子は２つの水平磁束検出素子を備え、２つの水平磁束検出素子は電源電圧ＶｃｃとＧＮＤの間を直列接続され、励磁素子は１本の直線であり、２つの水平磁束検出素子を結ぶ直線に対して平行に配置され、２つの水平磁束検出素子の間において、励磁素子に中間端子が設けられ、そして、２つの水平磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することが好ましい。２つの水平磁束検出素子を備える、いわゆるハーブブリッジ構成を形成する水平磁束検出素子を備えるゼロフラックス型磁気センサを製造することにより、小型化が容易で、誤差を含みにくく、製造コストを低減しやすい。 (8) According to the aspect of the present invention, the magnetic detecting element includes two horizontal magnetic flux detecting elements, the two horizontal magnetic flux detecting elements are connected in series between the power supply voltage Vcc and GND, and the exciting element is a single straight line. An intermediate terminal is provided in the exciting element between the two horizontal magnetic flux detecting elements, and an intermediate terminal is provided between the two horizontal magnetic flux detecting elements. It is preferable to generate a cancel magnetic flux that cancels out part or all. By manufacturing a zero-flux type magnetic sensor having two horizontal magnetic flux detecting elements and a horizontal magnetic flux detecting element forming a so-called herb bridge configuration, it is easy to reduce the size, to include no error, and to reduce the manufacturing cost. .
（９）本発明の態様では、磁気検出素子は４つの垂直磁束検出素子を備え、４つの垂直磁束検出素子はブリッジ構成を形成し、励磁素子は２本の直線であり、励磁素子は、４つの垂直磁束検出素子のうちの向かい合う１対の垂直磁束検出素子にそれぞれ隣接し、向かい合う１対の垂直磁束検出素子を結ぶ直線に直角方向、かつ、絶縁基板上に配置され、そして、それぞれに隣接する垂直磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することが好ましい。ホール素子といった垂直磁束検出素子を備えるゼロフラックス型磁気センサを製造することにより、小型化が容易で、誤差を含みにくく、製造コストを低減しやすい。 (9) In the aspect of the present invention, the magnetic detection element includes four vertical magnetic flux detection elements, the four vertical magnetic flux detection elements form a bridge configuration, the excitation element is two straight lines, and the excitation element is 4 Adjacent to a pair of opposing vertical magnetic flux detecting elements of the two vertical magnetic flux detecting elements, are arranged in a direction perpendicular to a straight line connecting the pair of opposing vertical magnetic flux detecting elements, and on an insulating substrate, and are adjacent to each other. It is preferable to generate a cancel magnetic flux that cancels a part or all of the measured magnetic flux in the vertical magnetic flux detecting element. By manufacturing a zero-flux type magnetic sensor including a vertical magnetic flux detecting element such as a Hall element, miniaturization is easy, error is not easily included, and manufacturing cost is easily reduced.
（１０）本発明の態様では、磁気検出素子は４つの垂直磁束検出素子を備え、４つの垂直磁束検出素子はブリッジ構成を形成し、４つの垂直磁束検出素子のうちの隣り合う２対の垂直磁束検出素子はそれぞれ電源電圧ＶｃｃとＧＮＤの間を直列接続され、励磁素子は２本のＬ字形であり、Ｌ字形の励磁素子を構成する２本の直線部は、隣り合う１対の垂直磁束検出素子に対してそれぞれ隣接して平行に、かつ、絶縁基板上に配置され、そして、それぞれに隣接する垂直磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することが好ましい。励磁素子がＬ字形であるため、被測定磁束の方向が４つの水平磁束検出素子のうちの、いずれの向かい合う１対の水平磁束検出素子に平行であっても、被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することができる。また、２本の励磁素子を別々に制御することにより、異なるキャンセル磁束を発生することができる。 (10) In the aspect of the present invention, the magnetic sensing element includes four vertical magnetic flux detecting elements, the four vertical magnetic flux detecting elements form a bridge configuration, and two pairs of adjacent vertical magnetic flux detecting elements among the four vertical magnetic flux detecting elements. The magnetic flux detecting elements are connected in series between the power supply voltage Vcc and GND, respectively, and the exciting elements are two L-shaped, and two linear portions constituting the L-shaped exciting element are formed by a pair of adjacent perpendicular magnetic fluxes. It is arranged adjacent to and parallel to the detecting element and on the insulating substrate, and generates a cancel magnetic flux that cancels a part or all of the measured magnetic flux in the adjacent vertical magnetic flux detecting element. preferable. Since the excitation element is L-shaped, even if the direction of the measured magnetic flux is parallel to any of the pair of opposed horizontal magnetic flux detecting elements of the four horizontal magnetic flux detecting elements, a part or all of the measured magnetic flux is Canceling magnetic flux can be generated. In addition, different cancellation magnetic fluxes can be generated by separately controlling the two exciting elements.
以下、本発明の好適な実施形態について詳細に説明する。なお、以下に説明する本実施形態は、特許請求の範囲に記載された本発明の内容を不当に限定するものではなく、本実施形態で説明される構成のすべてが本発明の解決手段として必須であるとは限らない。 Hereinafter, preferred embodiments of the present invention will be described in detail. The present embodiment described below does not unduly limit the content of the present invention described in the claims, and all the configurations described in the present embodiment are indispensable as means for solving the present invention. Is not always the case.
＜ゼロフラックス型磁気センサ全般＞
本実施形態のゼロフラックス型磁気センサ３０を図５に示す。本実施形態のゼロフラックス型磁気センサ３０は、絶縁基板２４と、磁気検出素子２２と、励磁素子３３とを備え、磁気検出素子２２は絶縁基板２４上に形成され、被測定磁束に応じて特性が変化し、励磁素子３３は磁気検出素子２２の近傍に配置され、巻回されない単線配線であり、被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。このゼロフラックス型磁気センサ３０を用いると、励磁素子３３は巻回されない単線配線であり、回路を簡素にすることができる。したがって、製造コストを低減しやすい。
<General zero flux type magnetic sensors>
FIG. 5 shows the zero flux type magnetic sensor 30 of the present embodiment. The zero-flux type magnetic sensor 30 of the present embodiment includes an insulating substrate 24, a magnetic detecting element 22, and an exciting element 33. The magnetic detecting element 22 is formed on the insulating substrate 24, and has a characteristic according to a measured magnetic flux. The excitation element 33 is arranged near the magnetic detection element 22 and is a single wire that is not wound, and generates a cancel magnetic flux that cancels a part or all of the measured magnetic flux. When the zero-flux type magnetic sensor 30 is used, the exciting element 33 is a single wire that is not wound, and the circuit can be simplified. Therefore, the manufacturing cost is easily reduced.
本実施形態のゼロフラックス型磁気センサ３０では、さらに、励磁素子３３は絶縁基板２４の下面よりも磁気検出素子２２の側に配置されている。励磁素子３３は磁気検出素子２２の近傍、かつ、絶縁基板２４の下面よりも磁気検出素子２２の側に配置されており、磁気検出素子２２との距離ｄｙを小さくすることができる。また、測定対象を絶縁基板２４の下面に接することができるため、磁気検出素子２２との距離ｄｘを小さくすることができる。したがって、ゼロフラックス型磁気センサ３０の小型化が容易である。また、距離ｄｘ、ｄｙ及び透磁率μの誤差を含みにくい。さらに、（式１）より、より小さなＩｘを検出することができる。 In the zero-flux type magnetic sensor 30 of the present embodiment, the excitation element 33 is further disposed on the side of the magnetic detection element 22 than the lower surface of the insulating substrate 24. The excitation element 33 is arranged near the magnetic detection element 22 and closer to the magnetic detection element 22 than the lower surface of the insulating substrate 24, so that the distance dy from the magnetic detection element 22 can be reduced. Further, since the measurement target can be in contact with the lower surface of the insulating substrate 24, the distance dx from the magnetic detection element 22 can be reduced. Therefore, size reduction of the zero flux type magnetic sensor 30 is easy. Further, it is difficult to include errors in the distances dx and dy and the magnetic permeability μ. Further, a smaller Ix can be detected from (Equation 1).
本実施形態のゼロフラックス型磁気センサ３０では、さらに、励磁素子３３は両端に外部端子３４を備える。励磁素子３３は両端に外部端子３４を備えることにより、励磁素子３３に発生させる被測定磁束のキャンセル磁束の大きさと向きを容易に制御することができる。 In the zero-flux type magnetic sensor 30 of the present embodiment, the excitation element 33 further includes external terminals 34 at both ends. Since the exciting element 33 has the external terminals 34 at both ends, the magnitude and direction of the canceling magnetic flux of the measured magnetic flux generated in the exciting element 33 can be easily controlled.
本実施形態のゼロフラックス型磁気センサ３０では、さらに、励磁素子３３は絶縁基板２４の内部に配置されている。励磁素子３３は絶縁基板２４の内部に配置され、励磁素子３３と磁気検出素子２２との距離ｄｙを小さくすることができるとともに、励磁素子３３の位置精度を高くすることができる。したがって、ゼロフラックス型磁気センサ３０の小型化が容易である。さらに、ｄｙ及び透磁率μの誤差を含みにくく、製造コストを低減しやすい。 In the zero-flux type magnetic sensor 30 of the present embodiment, the exciting element 33 is further disposed inside the insulating substrate 24. The exciting element 33 is disposed inside the insulating substrate 24, so that the distance dy between the exciting element 33 and the magnetic detection element 22 can be reduced, and the positional accuracy of the exciting element 33 can be increased. Therefore, size reduction of the zero flux type magnetic sensor 30 is easy. Further, errors in dy and the magnetic permeability μ are not easily included, and the manufacturing cost is easily reduced.
＜水平磁束検出素子を備えるゼロフラックス型磁気センサ＞
本実施形態のゼロフラックス型磁気センサ３０では、さらに、磁気検出素子２２は４つの水平磁束検出素子（第１の水平磁束検出素子３５〜第４の水平磁束検出素子３８）を備え、４つの水平磁束検出素子はブリッジ構成を形成し、励磁素子３３は１本の直線であり、４つの水平磁束検出素子のうちの向かい合う１対の水平磁束検出素子（第１の水平磁束検出素子３５と第４の水平磁束検出素子３８）の間において、他の向かい合う１対の水平磁束検出素子（第２の水平磁束検出素子３６と第３の水平磁束検出素子３７）を結ぶ直線に対して平行に配置され、そして、他の向かい合う１対の水平磁束検出素子（第２の水平磁束検出素子３６と第３の水平磁束検出素子３７）における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。ＧＭＲ素子、ＡＭＲ素子、ＴＭＲ素子といった水平磁束検出素子を用いてゼロフラックス型磁気センサを製造することにより、小型化が容易で、誤差を含みにくく、製造コストを低減しやすい。
<Zero flux type magnetic sensor with horizontal magnetic flux detection element>
In the zero-flux type magnetic sensor 30 of the present embodiment, the magnetic detection element 22 further includes four horizontal magnetic flux detection elements (first horizontal magnetic flux detection element 35 to fourth horizontal magnetic flux detection element 38) and four horizontal magnetic flux detection elements. The magnetic flux detecting elements form a bridge configuration, the exciting element 33 is a single straight line, and a pair of horizontal magnetic flux detecting elements (a first horizontal magnetic flux detecting element 35 and a fourth Between the two horizontal magnetic flux detecting elements 38) and the other pair of horizontal magnetic flux detecting elements (the second horizontal magnetic flux detecting element 36 and the third horizontal magnetic flux detecting element 37). And a canceling magnetic flux for canceling a part or all of the measured magnetic flux in another pair of horizontal magnetic flux detecting elements (the second horizontal magnetic flux detecting element 36 and the third horizontal magnetic flux detecting element 37) facing each other. That. By manufacturing a zero-flux type magnetic sensor using a horizontal magnetic flux detecting element such as a GMR element, an AMR element, or a TMR element, miniaturization is easy, error is not easily included, and manufacturing cost is easily reduced.
本実施形態のゼロフラックス型磁気センサ３０では、さらに、他の向かい合う１対の水平磁束検出素子（第２の水平磁束検出素子３６と第３の水平磁束検出素子３７）の間において、励磁素子３３に中間端子３９が設けられている。他の向かい合う１対の水平磁束検出素子の間に設けられている中間端子３９により、他の向かい合う１対の水平磁束検出素子（第２の水平磁束検出素子３６と第３の水平磁束検出素子３７）に異なるキャンセル磁束を発生させることができる。被測定磁束の向きによって第２の水平磁束検出素子３６と第３の水平磁束検出素子３７の応答が異なることから、被測定磁束の向きを判別することができる。 In the zero-flux type magnetic sensor 30 according to the present embodiment, the exciting element 33 is further provided between another pair of horizontal magnetic flux detecting elements (the second horizontal magnetic flux detecting element 36 and the third horizontal magnetic flux detecting element 37) facing each other. Is provided with an intermediate terminal 39. An intermediate terminal 39 provided between another pair of the horizontal magnetic flux detecting elements facing each other causes the other pair of the horizontal magnetic flux detecting elements (the second horizontal magnetic flux detecting element 36 and the third horizontal magnetic flux detecting element 37) to face each other. ) Can generate different cancellation magnetic fluxes. Since the response of the second horizontal magnetic flux detecting element 36 and the response of the third horizontal magnetic flux detecting element 37 differ depending on the direction of the magnetic flux to be measured, the direction of the magnetic flux to be measured can be determined.
本実施形態の、水平磁束検出素子を備えるゼロフラックス型磁気センサの変形例を図６に示す。本実施形態のゼロフラックス型磁気センサ４０では、磁気検出素子２２は４つの水平磁束検出素子（第１の水平磁束検出素子３５〜第４の水平磁束検出素子３８）を備え、４つの水平磁束検出素子はブリッジ構成を形成し、４つの水平磁束検出素子のうちの隣り合う２対の水平磁束検出素子（第１の水平磁束検出素子３５と第３の水平磁束検出素子３７、第２の水平磁束検出素子３６と第４の水平磁束検出素子３８）はそれぞれ電源電圧Ｖｃｃ１５とＧＮＤ１６の間を直列接続され、励磁素子は２本のＬ字形（第１の励磁素子４１と第２の励磁素子４２）であり、Ｌ字形の励磁素子を構成する２本の直線部は、隣り合う１対の水平磁束検出素子（第１の水平磁束検出素子３５と第３の水平磁束検出素子３７、第２の水平磁束検出素子３６と第４の水平磁束検出素子３８）に対してそれぞれ直角に配置され、励磁素子は４つの水平磁束検出素子のうちの向かい合う１対の水平磁束検出素子（第１の水平磁束検出素子３５と第４の水平磁束検出素子３８、第２の水平磁束検出素子３６と第３の水平磁束検出素子３７のいずれか一方）における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。励磁素子はＬ字形（第１の励磁素子４１と第２の励磁素子４２）であり、隣り合う１対の水平磁束検出素子（第１の水平磁束検出素子３５と第３の水平磁束検出素子３７、第２の水平磁束検出素子３６と第４の水平磁束検出素子３８）に対してそれぞれ直角に配置されているため、被測定磁束の方向が４つの水平磁束検出素子のうちの、いずれの向かい合う１対の水平磁束検出素子に平行であっても、被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することができる。また、２本の励磁素子を別々に制御することにより、２本の励磁素子は、直列接続される隣り合う２対の水平磁束検出素子（第１の水平磁束検出素子３５と第３の水平磁束検出素子３７、第２の水平磁束検出素子３６と第４の水平磁束検出素子３８）において異なるキャンセル磁束を発生することができる。 FIG. 6 shows a modification of the zero-flux type magnetic sensor including the horizontal magnetic flux detecting element according to the present embodiment. In the zero-flux type magnetic sensor 40 of the present embodiment, the magnetic detection element 22 includes four horizontal magnetic flux detection elements (first horizontal magnetic flux detection element 35 to fourth horizontal magnetic flux detection element 38) and four horizontal magnetic flux detections. The elements form a bridge configuration, and two pairs of adjacent horizontal magnetic flux detecting elements (a first horizontal magnetic flux detecting element 35 and a third horizontal magnetic flux detecting element 37, a second horizontal magnetic flux detecting element) among the four horizontal magnetic flux detecting elements. The detection element 36 and the fourth horizontal magnetic flux detection element 38) are connected in series between the power supply voltage Vcc15 and the GND 16, respectively, and the excitation elements are two L-shaped (the first excitation element 41 and the second excitation element 42). The two linear portions constituting the L-shaped exciting element are formed by a pair of adjacent horizontal magnetic flux detecting elements (a first horizontal magnetic flux detecting element 35 and a third horizontal magnetic flux detecting element 37, and a second horizontal magnetic flux detecting element 37). The magnetic flux detecting element 36 and the Are arranged at right angles to the horizontal magnetic flux detecting element 38), and the exciting element is a pair of horizontal magnetic flux detecting elements (first horizontal magnetic flux detecting element 35 and fourth horizontal magnetic flux detecting element 35) facing each other among the four horizontal magnetic flux detecting elements. A canceling magnetic flux for canceling a part or all of the measured magnetic flux in the magnetic flux detecting element 38, any one of the second horizontal magnetic flux detecting element 36 and the third horizontal magnetic flux detecting element 37) is generated. The exciting elements are L-shaped (first exciting element 41 and second exciting element 42), and a pair of adjacent horizontal magnetic flux detecting elements (first horizontal magnetic flux detecting element 35 and third horizontal magnetic flux detecting element 37) are used. , The second horizontal magnetic flux detecting element 36 and the fourth horizontal magnetic flux detecting element 38) are arranged at right angles to each other, so that the direction of the magnetic flux to be measured is any one of the four horizontal magnetic flux detecting elements. Even if the magnetic flux is parallel to the pair of horizontal magnetic flux detecting elements, it is possible to generate a cancel magnetic flux that cancels a part or all of the measured magnetic flux. In addition, by separately controlling the two exciting elements, the two exciting elements can be connected to two pairs of adjacent horizontal magnetic flux detecting elements (the first horizontal magnetic flux detecting element 35 and the third horizontal magnetic flux detecting element) connected in series. The detection element 37, the second horizontal magnetic flux detection element 36, and the fourth horizontal magnetic flux detection element 38) can generate different cancellation magnetic fluxes.
本実施形態の、水平磁束検出素子を備えるゼロフラックス型磁気センサの変形例を図７に示す。本実施形態のゼロフラックス型磁気センサ４３では、磁気検出素子２２は２つの水平磁束検出素子（第２の水平磁束検出素子３６と第３の水平磁束検出素子３７）を備え、２つの水平磁束検出素子は電源電圧Ｖｃｃ１５とＧＮＤ１６の間を直列接続され、励磁素子３３は１本の直線であり、２つの水平磁束検出素子を結ぶ直線に対して平行に配置され、２つの水平磁束検出素子の間において、励磁素子３３に中間端子３９が設けられ、そして、２つの水平磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。２つの水平磁束検出素子を備える、いわゆるハーブブリッジ構成を形成する水平磁束検出素子を備えるゼロフラックス型磁気センサを製造することにより、小型化が容易で、誤差を含みにくく、製造コストを低減しやすい。また、中間端子３９により、励磁素子３３は第２の水平磁束検出素子３６と第３の水平磁束検出素子３７に逆向きのキャンセル磁束を発生することができる。なお、本実施形態のゼロフラックス型磁気センサ４３の出力は、２つの水平磁束検出素子の間の出力電圧Ｖｏｕｔ４４である。 FIG. 7 shows a modification of the zero-flux type magnetic sensor including the horizontal magnetic flux detecting element according to the present embodiment. In the zero-flux type magnetic sensor 43 of the present embodiment, the magnetic detection element 22 includes two horizontal magnetic flux detection elements (a second horizontal magnetic flux detection element 36 and a third horizontal magnetic flux detection element 37) and two horizontal magnetic flux detection elements. The elements are connected in series between the power supply voltage Vcc15 and GND16, and the exciting element 33 is a single straight line, which is arranged parallel to a straight line connecting the two horizontal magnetic flux detecting elements, and is connected between the two horizontal magnetic flux detecting elements. , The excitation element 33 is provided with an intermediate terminal 39, and generates a cancel magnetic flux that cancels a part or all of the measured magnetic flux in the two horizontal magnetic flux detecting elements. By manufacturing a zero-flux type magnetic sensor having two horizontal magnetic flux detecting elements and a horizontal magnetic flux detecting element forming a so-called herb bridge configuration, it is easy to reduce the size, to include no error, and to reduce the manufacturing cost. . The intermediate terminal 39 allows the exciting element 33 to generate a canceling magnetic flux in the second horizontal magnetic flux detecting element 36 and the third horizontal magnetic flux detecting element 37 in the opposite direction. The output of the zero-flux type magnetic sensor 43 of the present embodiment is an output voltage Vout44 between two horizontal magnetic flux detecting elements.
図８に、本実施形態のゼロフラックス型磁気センサ４３の励磁素子３３に、中間端子３９により逆向きのキャンセル磁束を発生させたときの、Ｘ軸方向の被測定磁束に対する水平磁束検出素子の相対抵抗値を示す。第２の水平磁束検出素子３６にプラス方向のキャンセル磁束（＋バイアス）を発生させ、第３の水平磁束検出素子３７にはマイナス方向のキャンセル磁束（−バイアス）を発生させる。すると、Ｘ軸方向の被測定磁束に対する水平磁束検出素子の相対抵抗値は、第２の水平磁束検出素子３６はキャンセル磁束がゼロ（０バイアス）のときよりもマイナス方向にオフセットし、第３の水平磁束検出素子３７はキャンセル磁束がゼロ（０バイアス）のときよりもプラス方向にオフセットする。 FIG. 8 shows the relative position of the horizontal magnetic flux detecting element with respect to the measured magnetic flux in the X-axis direction when the canceling magnetic flux in the opposite direction is generated by the intermediate terminal 39 in the exciting element 33 of the zero flux type magnetic sensor 43 of the present embodiment. Indicates the resistance value. The second horizontal magnetic flux detecting element 36 generates a canceling magnetic flux (+ bias) in the plus direction, and the third horizontal magnetic flux detecting element 37 generates a canceling magnetic flux (−bias) in the negative direction. Then, the relative resistance value of the horizontal magnetic flux detecting element with respect to the measured magnetic flux in the X-axis direction is more negatively offset by the second horizontal magnetic flux detecting element 36 than when the canceling magnetic flux is zero (0 bias). The horizontal magnetic flux detecting element 37 is more positively offset than when the cancel magnetic flux is zero (0 bias).
図９に、本実施形態のゼロフラックス型磁気センサ４３の出力電圧Ｖｏｕｔを示す。出力電圧Ｖｏｕｔは被測定磁束ゼロを中心に負の傾きを有する奇関数特性を有し、オフセット量と一致する被測定磁束が加わると出力電圧Ｖｏｕｔはピークを示し、いわゆるＳ字カーブの特性を示す。出力電圧Ｖｏｕｔが単調減少の領域を磁気センサとして用いることができ、キャンセル磁束の大きさ（バイアスの大きさ）でその範囲を調整することができる。 FIG. 9 shows an output voltage Vout of the zero flux type magnetic sensor 43 of the present embodiment. The output voltage Vout has an odd function characteristic having a negative slope around zero of the measured magnetic flux, and when a measured magnetic flux coincident with the offset amount is applied, the output voltage Vout shows a peak and shows a so-called S-shaped curve characteristic. . A region where the output voltage Vout monotonously decreases can be used as a magnetic sensor, and the range can be adjusted by the magnitude of the cancel magnetic flux (magnitude of the bias).
＜垂直磁束検出素子を備えるゼロフラックス型磁気センサ＞
本実施形態の、垂直磁束検出素子を備えるゼロフラックス型磁気センサ５０を図１０に示す。本実施形態のゼロフラックス型磁気センサ５０は４つの垂直磁束検出素子（第１の垂直磁束検出素子５１〜第４の垂直磁束検出素子５４）を備え、４つの垂直磁束検出素子はブリッジ構成を形成し、励磁素子は２本の直線（第１の励磁素子４１、第２の励磁素子４２）であり、励磁素子は、４つの垂直磁束検出素子のうちの向かい合う１対の垂直磁束検出素子（第１の垂直磁束検出素子５１と第４の垂直磁束検出素子５４）にそれぞれ隣接し、向かい合う１対の垂直磁束検出素子を結ぶ直線に直角方向、かつ、絶縁基板２４上に配置され、そして、それぞれに隣接する垂直磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。ホール素子といった垂直磁束検出素子を備えるゼロフラックス型磁気センサを製造することにより、小型化が容易で、誤差を含みにくく、製造コストを低減しやすい。また、２本の励磁素子を別々に制御することにより、２本の励磁素子は、隣接し、かつ、向かい合う１対の垂直磁束検出素子（第１の垂直磁束検出素子５１と第４の垂直磁束検出素子５４）において異なるキャンセル磁束を発生することができる。
<Zero flux type magnetic sensor with vertical magnetic flux detection element>
FIG. 10 shows a zero-flux type magnetic sensor 50 including a vertical magnetic flux detecting element according to the present embodiment. The zero flux type magnetic sensor 50 of the present embodiment includes four vertical magnetic flux detecting elements (first vertical magnetic flux detecting element 51 to fourth vertical magnetic flux detecting element 54), and the four vertical magnetic flux detecting elements form a bridge configuration. The exciting elements are two straight lines (the first exciting element 41 and the second exciting element 42), and the exciting element is a pair of facing perpendicular magnetic flux detecting elements (the fourth The first perpendicular magnetic flux detecting element 51 and the fourth perpendicular magnetic flux detecting element 54) are respectively disposed on the insulating substrate 24 in a direction perpendicular to a straight line connecting a pair of facing perpendicular magnetic flux detecting elements and on the insulating substrate 24. A cancel magnetic flux that cancels a part or all of the magnetic flux to be measured in the vertical magnetic flux detecting element adjacent to. By manufacturing a zero flux type magnetic sensor including a vertical magnetic flux detecting element such as a Hall element, miniaturization is easy, errors are not easily included, and manufacturing costs are easily reduced. In addition, by separately controlling the two exciting elements, the two exciting elements are adjacent to and opposed to each other by a pair of vertical magnetic flux detecting elements (a first vertical magnetic flux detecting element 51 and a fourth vertical magnetic flux detecting element). Different cancellation magnetic fluxes can be generated in the detection element 54).
本実施形態の、垂直磁束検出素子を備えるゼロフラックス型磁気センサの変形例を図１１に示す。本実施形態のゼロフラックス型磁気センサ６０は４つの垂直磁束検出素子（第１の垂直磁束検出素子５１〜第４の垂直磁束検出素子５４）を備え、４つの垂直磁束検出素子はブリッジ構成を形成し、４つの垂直磁束検出素子のうちの隣り合う２対の垂直磁束検出素子（第１の垂直磁束検出素子５１と第３の垂直磁束検出素子５３、第２の垂直磁束検出素子５２と第４の垂直磁束検出素子５４）はそれぞれ電源電圧Ｖｃｃ１５とＧＮＤ１６の間を直列接続され、励磁素子は２本のＬ字形（第１の励磁素子４１、第２の励磁素子４２）であり、Ｌ字形の励磁素子を構成する２本の直線部は、隣り合う１対の垂直磁束検出素子に対してそれぞれ隣接して平行に、かつ、絶縁基板上に配置され、そして、それぞれに隣接する垂直磁束検出素子における被測定磁束の一部又は全部を相殺するキャンセル磁束を発生する。また、２本の励磁素子を別々に制御することにより、２本の励磁素子は、隣り合う１対の垂直磁束検出素子に対してそれぞれ異なるキャンセル磁束を発生することができる。 FIG. 11 shows a modification of the zero-flux type magnetic sensor including the vertical magnetic flux detecting element of the present embodiment. The zero-flux type magnetic sensor 60 of the present embodiment includes four vertical magnetic flux detecting elements (first vertical magnetic flux detecting element 51 to fourth vertical magnetic flux detecting element 54), and the four vertical magnetic flux detecting elements form a bridge configuration. And two adjacent pairs of the vertical magnetic flux detecting elements (the first vertical magnetic flux detecting element 51 and the third vertical magnetic flux detecting element 53, the second vertical magnetic flux detecting element 52 and the fourth Are connected in series between the power supply voltage Vcc15 and the GND 16, respectively, and the excitation elements are two L-shaped (the first excitation element 41 and the second excitation element 42). The two linear portions constituting the exciting element are arranged adjacent to and in parallel with a pair of adjacent vertical magnetic flux detecting elements, respectively, on the insulating substrate, and each adjacent vertical magnetic flux detecting element. In To generate a cancellation magnetic flux to offset some or all of the measured magnetic flux. Further, by separately controlling the two exciting elements, the two exciting elements can generate different canceling magnetic fluxes for a pair of adjacent vertical magnetic flux detecting elements.
なお、上記のように本実施形態について詳細に説明したが、本発明の新規事項及び効果から実体的に逸脱しない多くの変形が可能であることは当業者には容易に理解できるであろう。したがって、このような変形例はすべて本発明の範囲に含まれる。例えば、明細書において、少なくとも一度、より広義又は同義の異なる用語とともに記載された用語は、明細書のいかなる箇所においても、その異なる用語に置き換えることができる。 Although the present embodiment has been described in detail as described above, those skilled in the art can easily understand that many modifications that do not substantially depart from the novel matter and effects of the present invention are possible. Therefore, all such modified examples are included in the scope of the present invention. For example, in the description, a term described at least once with a broader or synonymous different term can be replaced with the different term in any place in the specification.
１０ 代表的な磁気検出素子、１１ 第１のＧＭＲ素子、１２ 第２のＧＭＲ素子、１３ 第３のＧＭＲ素子、１４ 第４のＧＭＲ素子、１５ 電源電圧Ｖｃｃ、１６ ＧＮＤ、１７ 第１の中間電位Ｖｏｕｔ、１８ 第２の中間電位Ｖｏｕｔ、２０ 従来のゼロフラックス型磁気センサ、２１ 導体、２２ 磁気検出素子（Ｂ／Ｖ変換）、２３ フィードバックコイル（励磁素子）、２４ 絶縁基板、２５ 磁束検出素子、２６ 差動アンプ、２７ 増幅器、２８ Ｖ／Ｉ変換、３０、４０、４３、５０、６０ ゼロフラックス型磁気センサ、３３ 励磁素子、３４ 外部端子、３５ 第１の水平磁束検出素子、３６ 第２の水平磁束検出素子、３７ 第３の水平磁束検出素子、３８ 第４の水平磁束検出素子、３９ 中間端子、４１ 第１の励磁素子、４２ 第２の励磁素子、４４ 出力電圧Ｖｏｕｔ、５１ 第１の垂直磁束検出素子、５２ 第２の垂直磁束検出素子、５３ 第３の垂直磁束検出素子、５４ 第４の垂直磁束検出素子 DESCRIPTION OF SYMBOLS 10 Representative magnetic sensing element, 11 1st GMR element, 12 2nd GMR element, 13 3rd GMR element, 14 4th GMR element, 15 power supply voltage Vcc, 16 GND, 17 1st intermediate potential Vout, 18 Second intermediate potential Vout, 20 Conventional zero flux type magnetic sensor, 21 Conductor, 22 Magnetic detecting element (B / V conversion), 23 Feedback coil (Exciting element), 24 Insulating substrate, 25 Magnetic flux detecting element, 26 differential amplifier, 27 amplifier, 28 V / I conversion, 30, 40, 43, 50, 60 zero flux type magnetic sensor, 33 excitation element, 34 external terminal, 35 first horizontal magnetic flux detection element, 36 second Horizontal magnetic flux detecting element, 37 Third horizontal magnetic flux detecting element, 38 Fourth horizontal magnetic flux detecting element, 39 Intermediate terminal, 41 First exciting element, 42 Second excitation element, 44 output voltage Vout, 51 first vertical magnetic flux detection element, 52 second vertical magnetic flux detection element, 53 third vertical magnetic flux detection element, 54 fourth vertical magnetic flux detection element
Claims (10)
前記磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化して前記被測定磁束を検出することができ、
前記励磁素子は前記磁気検出素子の近傍に配置され、巻回されない単線配線であり、前記被測定磁束の一部又は全部を相殺するキャンセル磁束を発生し、
前記励磁素子は前記絶縁基板の内部に配置されていることを特徴とするゼロフラックス型磁気センサ。 Including an insulating substrate, a magnetic detection element, and an excitation element,
The magnetic detection element is formed on the insulating substrate, and can change the characteristic according to the measured magnetic flux to detect the measured magnetic flux,
The excitation element is arranged near the magnetic detection element, is a single wire that is not wound, and generates a cancel magnetic flux that cancels a part or all of the measured magnetic flux ,
The zero-flux type magnetic sensor, wherein the exciting element is disposed inside the insulating substrate .
前記磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化して前記被測定磁束を検出することができ、
前記励磁素子は前記磁気検出素子の近傍に配置され、巻回されない単線配線であり、
前記磁気検出素子は４つの水平磁束検出素子を備え、
前記４つの水平磁束検出素子はブリッジ構成を形成し、
前記励磁素子は１本の直線であり、前記４つの水平磁束検出素子のうちの向かい合う１対の水平磁束検出素子の間において、他の向かい合う１対の水平磁束検出素子を結ぶ直線に対して平行に配置され、そして、前記他の向かい合う１対の水平磁束検出素子における前記被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することを特徴とするゼロフラックス型磁気センサ。 Including an insulating substrate, a magnetic detection element, and an excitation element,
The magnetic detection element is formed on the insulating substrate, and can change the characteristic according to the measured magnetic flux to detect the measured magnetic flux,
The excitation element is a single wire that is arranged near the magnetic detection element and is not wound,
The magnetic detecting element includes four horizontal magnetic flux detecting elements,
The four horizontal magnetic flux detecting elements form a bridge configuration,
The exciting element is a single straight line, and between a pair of opposed horizontal magnetic flux detecting elements of the four horizontal magnetic flux detecting elements, is parallel to a straight line connecting another opposed horizontal magnetic flux detecting element. And a cancel flux which cancels out a part or all of the measured magnetic flux in the pair of horizontal magnetic flux detecting elements facing each other .
前記他の向かい合う１対の水平磁束検出素子の間において、前記励磁素子に中間端子が設けられていることを特徴とするゼロフラックス型磁気センサ。 It is a zero flux type magnetic sensor according to claim 2 ,
A zero-flux type magnetic sensor, wherein an intermediate terminal is provided on the exciting element between the pair of other facing horizontal magnetic flux detecting elements.
前記磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化して前記被測定磁束を検出することができ、
前記励磁素子は前記磁気検出素子の近傍に配置され、巻回されない単線配線であり、
前記磁気検出素子は４つの水平磁束検出素子を備え、
前記４つの水平磁束検出素子はブリッジ構成を形成し、
前記４つの水平磁束検出素子のうちの隣り合う２対の水平磁束検出素子はそれぞれ電源電圧ＶｃｃとＧＮＤの間を直列接続され、
前記励磁素子は２本のＬ字形であり、
Ｌ字形の前記励磁素子を構成する２本の直線部は、隣り合う１対の水平磁束検出素子に対してそれぞれ直角に配置され、
前記励磁素子は前記４つの水平磁束検出素子のうちの向かい合う１対の水平磁束検出素子における前記被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することを特徴とするゼロフラックス型磁気センサ。 Including an insulating substrate, a magnetic detection element, and an excitation element,
The magnetic detection element is formed on the insulating substrate, and can change the characteristic according to the measured magnetic flux to detect the measured magnetic flux,
The excitation element is a single wire that is arranged near the magnetic detection element and is not wound,
The magnetic detecting element includes four horizontal magnetic flux detecting elements,
The four horizontal magnetic flux detecting elements form a bridge configuration,
Two pairs of adjacent horizontal magnetic flux detection elements of the four horizontal magnetic flux detection elements are connected in series between a power supply voltage Vcc and GND, respectively.
The exciting element has two L shapes,
The two linear portions forming the L-shaped exciting element are arranged at right angles to a pair of adjacent horizontal magnetic flux detecting elements, respectively.
A zero-flux type magnetic sensor, wherein the exciting element generates a cancel magnetic flux that cancels a part or all of the measured magnetic flux in a pair of horizontal magnetic flux detecting elements facing each other among the four horizontal magnetic flux detecting elements. .
前記磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化して前記被測定磁束を検出することができ、
前記励磁素子は前記磁気検出素子の近傍に配置され、巻回されない単線配線であり、
前記磁気検出素子は２つの水平磁束検出素子を備え、
前記２つの水平磁束検出素子は電源電圧ＶｃｃとＧＮＤの間を直列接続され、
前記励磁素子は１本の直線であり、前記２つの水平磁束検出素子を結ぶ直線に対して平行に配置され、前記２つの水平磁束検出素子の間において、前記励磁素子に中間端子が設けられ、そして、前記２つの水平磁束検出素子における前記被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することを特徴とするゼロフラックス型磁気センサ。 Including an insulating substrate, a magnetic detection element, and an excitation element,
The magnetic detection element is formed on the insulating substrate, and can change the characteristic according to the measured magnetic flux to detect the measured magnetic flux,
The exciting element is a single wire that is arranged near the magnetic sensing element and is not wound,
The magnetic detecting element includes two horizontal magnetic flux detecting elements,
The two horizontal magnetic flux detecting elements are connected in series between a power supply voltage Vcc and GND,
The exciting element is one straight line, is arranged in parallel to a straight line connecting the two horizontal magnetic flux detecting elements, and between the two horizontal magnetic flux detecting elements, an intermediate terminal is provided on the exciting element, And a zero flux type magnetic sensor characterized by generating a cancel magnetic flux for canceling a part or all of the measured magnetic flux in the two horizontal magnetic flux detecting elements .
前記励磁素子は前記絶縁基板の内部に配置されていることを特徴とするゼロフラックス型磁気センサ。 It is a zero flux type magnetic sensor according to any one of claims 2 to 5 ,
The zero-flux type magnetic sensor, wherein the exciting element is disposed inside the insulating substrate.
前記磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化して前記被測定磁束を検出することができ、
前記励磁素子は前記磁気検出素子の近傍に配置され、巻回されない単線配線であり、
前記磁気検出素子は４つの垂直磁束検出素子を備え、
前記４つの垂直磁束検出素子はブリッジ構成を形成し、
前記励磁素子は２本の直線であり、
前記励磁素子は、前記４つの垂直磁束検出素子のうちの向かい合う１対の垂直磁束検出素子にそれぞれ隣接し、前記向かい合う１対の垂直磁束検出素子を結ぶ直線に直角方向、かつ、前記絶縁基板上に配置され、そして、それぞれに隣接する垂直磁束検出素子における前記被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することを特徴とするゼロフラックス型磁気センサ。 Including an insulating substrate, a magnetic detection element, and an excitation element,
The magnetic detection element is formed on the insulating substrate, and can change the characteristic according to the measured magnetic flux to detect the measured magnetic flux,
The excitation element is a single wire that is arranged near the magnetic detection element and is not wound,
The magnetic detecting element includes four perpendicular magnetic flux detecting elements,
The four perpendicular magnetic flux detecting elements form a bridge configuration,
The exciting element is two straight lines,
The exciting element is adjacent to a pair of opposed vertical magnetic flux detecting elements of the four perpendicular magnetic flux detecting elements, respectively, in a direction perpendicular to a straight line connecting the pair of opposed vertical magnetic flux detecting elements, and on the insulating substrate. And a canceling magnetic flux for canceling a part or all of the measured magnetic flux in the adjacent vertical magnetic flux detecting elements .
前記磁気検出素子は前記絶縁基板上に形成され、被測定磁束に応じて特性が変化して前記被測定磁束を検出することができ、
前記励磁素子は前記磁気検出素子の近傍に配置され、巻回されない単線配線であり、
前記磁気検出素子は４つの垂直磁束検出素子を備え、
前記４つの垂直磁束検出素子はブリッジ構成を形成し、
前記４つの垂直磁束検出素子のうちの隣り合う２対の垂直磁束検出素子はそれぞれ電源電圧ＶｃｃとＧＮＤの間を直列接続され、
前記励磁素子は２本のＬ字形であり、
Ｌ字形の前記励磁素子を構成する２本の直線部は、隣り合う１対の垂直磁束検出素子に対してそれぞれ隣接して平行に、かつ、前記絶縁基板上に配置され、そして、それぞれに隣接する垂直磁束検出素子における前記被測定磁束の一部又は全部を相殺するキャンセル磁束を発生することを特徴とするゼロフラックス型磁気センサ。 Including an insulating substrate, a magnetic detection element, and an excitation element,
The magnetic detection element is formed on the insulating substrate, and can change the characteristic according to the measured magnetic flux to detect the measured magnetic flux,
The excitation element is a single wire that is arranged near the magnetic detection element and is not wound,
The magnetic detecting element includes four perpendicular magnetic flux detecting elements,
The four perpendicular magnetic flux detecting elements form a bridge configuration,
Two pairs of adjacent vertical magnetic flux detecting elements of the four vertical magnetic flux detecting elements are connected in series between a power supply voltage Vcc and GND, respectively.
The exciting element has two L shapes,
The two linear portions forming the L-shaped exciting element are arranged adjacent to and in parallel with a pair of adjacent vertical magnetic flux detecting elements and on the insulating substrate, and are adjacent to each other. A zero-flux type magnetic sensor, which generates a cancel magnetic flux for canceling a part or all of the measured magnetic flux in the vertical magnetic flux detecting element .
前記被測定磁束を発生する測定対象は前記絶縁基板の下面よりも前記磁気検出素子の逆側に配置されることを特徴とするゼロフラックス型磁気センサ。 A zero-flux type magnetic sensor, wherein a measurement object that generates the magnetic flux to be measured is arranged on a side opposite to the magnetic detection element with respect to a lower surface of the insulating substrate.
前記励磁素子は両端に外部端子を備えることを特徴とするゼロフラックス型磁気センサ。
It is a zero flux type magnetic sensor according to any one of claims 1 to 9 ,
A zero-flux type magnetic sensor, wherein the exciting element has external terminals at both ends.
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