JP6643856B2 - 分類方法、検査方法、検査装置、およびプログラム - Google Patents
分類方法、検査方法、検査装置、およびプログラム Download PDFInfo
- Publication number
- JP6643856B2 JP6643856B2 JP2015199722A JP2015199722A JP6643856B2 JP 6643856 B2 JP6643856 B2 JP 6643856B2 JP 2015199722 A JP2015199722 A JP 2015199722A JP 2015199722 A JP2015199722 A JP 2015199722A JP 6643856 B2 JP6643856 B2 JP 6643856B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- group
- evaluation value
- article
- evaluation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
- G06F18/20—Analysing
- G06F18/24—Classification techniques
- G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
- G06F18/2415—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on parametric or probabilistic models, e.g. based on likelihood ratio or false acceptance rate versus a false rejection rate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Data Mining & Analysis (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Engineering & Computer Science (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Bioinformatics & Computational Biology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Evolutionary Biology (AREA)
- Evolutionary Computation (AREA)
- Artificial Intelligence (AREA)
- General Physics & Mathematics (AREA)
- Probability & Statistics with Applications (AREA)
- Image Analysis (AREA)
- Image Processing (AREA)
- Information Retrieval, Db Structures And Fs Structures Therefor (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/943,512 US10248888B2 (en) | 2014-11-28 | 2015-11-17 | Classifying method, storage medium, inspection method, and inspection apparatus |
| CN201510847745.6A CN105654109B (zh) | 2014-11-28 | 2015-11-27 | 分类方法、检查方法和检查装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014242305 | 2014-11-28 | ||
| JP2014242305 | 2014-11-28 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016110625A JP2016110625A (ja) | 2016-06-20 |
| JP2016110625A5 JP2016110625A5 (enExample) | 2018-11-15 |
| JP6643856B2 true JP6643856B2 (ja) | 2020-02-12 |
Family
ID=56122196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015199722A Expired - Fee Related JP6643856B2 (ja) | 2014-11-28 | 2015-10-07 | 分類方法、検査方法、検査装置、およびプログラム |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6643856B2 (enExample) |
| CN (1) | CN105654109B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6381144B2 (ja) * | 2016-10-06 | 2018-08-29 | ソリッドビジョン株式会社 | 撮像処理装置 |
| JP6786035B2 (ja) * | 2017-03-27 | 2020-11-18 | 三菱重工業株式会社 | 航空機用部品の欠陥検出システム及び航空機用部品の欠陥検出方法 |
| JP7130984B2 (ja) * | 2018-03-01 | 2022-09-06 | 日本電気株式会社 | 画像判定システム、モデル更新方法およびモデル更新プログラム |
| WO2019194064A1 (ja) * | 2018-04-02 | 2019-10-10 | 日本電産株式会社 | 画像処理装置、画像処理方法、外観検査システムおよび外観検査方法 |
| JP2018164272A (ja) * | 2018-05-28 | 2018-10-18 | ソリッドビジョン株式会社 | 撮像処理装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001156135A (ja) * | 1999-11-29 | 2001-06-08 | Hitachi Ltd | 欠陥画像の分類方法及びその装置並びにそれを用いた半導体デバイスの製造方法 |
| JP4606779B2 (ja) * | 2004-06-07 | 2011-01-05 | グローリー株式会社 | 画像認識装置、画像認識方法およびその方法をコンピュータに実行させるプログラム |
| US20060193520A1 (en) * | 2005-02-28 | 2006-08-31 | Takeshi Mita | Object detection apparatus, learning apparatus, object detection system, object detection method and object detection program |
| JP2009080557A (ja) * | 2007-09-25 | 2009-04-16 | Seiko Epson Corp | 識別方法及びプログラム |
| JP4629118B2 (ja) * | 2008-03-03 | 2011-02-09 | 株式会社日立ハイテクノロジーズ | 欠陥検査装置およびこの欠陥検査装置に用いるパラメータ調整方法。 |
| JP2009282699A (ja) * | 2008-05-21 | 2009-12-03 | Seiko Epson Corp | 画像における顔の器官の画像に対応する器官領域の検出 |
| JP5414416B2 (ja) * | 2008-09-24 | 2014-02-12 | キヤノン株式会社 | 情報処理装置及び方法 |
| JP4670976B2 (ja) * | 2008-10-03 | 2011-04-13 | ソニー株式会社 | 学習装置および方法、認識装置および方法、プログラム、並びに記録媒体 |
| JP4710979B2 (ja) * | 2009-01-09 | 2011-06-29 | ソニー株式会社 | 対象物検出装置、学習装置、対象物検出方法およびプログラム |
| EP2678665A4 (en) * | 2011-02-24 | 2017-07-05 | 3M Innovative Properties Company | System for detection of non-uniformities in web-based materials |
| JP5214762B2 (ja) * | 2011-03-25 | 2013-06-19 | 株式会社東芝 | 認識装置、方法及びプログラム |
| JP2013117861A (ja) * | 2011-12-02 | 2013-06-13 | Canon Inc | 学習装置、学習方法およびプログラム |
-
2015
- 2015-10-07 JP JP2015199722A patent/JP6643856B2/ja not_active Expired - Fee Related
- 2015-11-27 CN CN201510847745.6A patent/CN105654109B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016110625A (ja) | 2016-06-20 |
| CN105654109A (zh) | 2016-06-08 |
| CN105654109B (zh) | 2019-03-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6632288B2 (ja) | 情報処理装置、情報処理方法、プログラム | |
| CN115038965B (zh) | 金相组织的相的分类方法、金相组织的相的分类装置、金相组织的相的学习方法、金相组织的相的学习装置、金属材料的材料特性预测方法和金属材料的材料特性预测装置 | |
| JP5414416B2 (ja) | 情報処理装置及び方法 | |
| CN113850749B (zh) | 训练缺陷侦测器的方法 | |
| JP6643856B2 (ja) | 分類方法、検査方法、検査装置、およびプログラム | |
| CN103221807B (zh) | 快速处理和检测幅材型材料中的不均匀因素 | |
| US20180204315A1 (en) | System, method for training and applying defect classifiers in wafers having deeply stacked layers | |
| JP2013257304A5 (enExample) | ||
| JP2016115331A (ja) | 識別器生成装置、識別器生成方法、良否判定装置、良否判定方法、プログラム | |
| CN111065915B (zh) | 优化对目标物体外部检查的设备及其方法 | |
| JP2015041164A (ja) | 画像処理装置、画像処理方法およびプログラム | |
| US20210334608A1 (en) | Abnormal Wafer Image Classification | |
| Cord et al. | Texture classification by statistical learning from morphological image processing: application to metallic surfaces | |
| US10248888B2 (en) | Classifying method, storage medium, inspection method, and inspection apparatus | |
| JP6616645B2 (ja) | 分類方法、検査方法、検査装置、およびプログラム | |
| JP2017102865A (ja) | 情報処理装置、情報処理方法及びプログラム | |
| US20200202252A1 (en) | Method of classifying defects in a specimen semiconductor examination and system thereof | |
| Zakaria et al. | Object shape recognition in image for machine vision application | |
| Davis et al. | Automated bone age assessment using feature extraction | |
| US9959482B2 (en) | Classifying method, storage medium, inspection method, and inspection apparatus | |
| JP2016110625A5 (enExample) | ||
| US20200167908A1 (en) | Determination device and determining method thereof | |
| JP2020071716A (ja) | 異常判定方法、特徴量算出方法、外観検査装置 | |
| JP2016110626A5 (enExample) | ||
| EP2977933B1 (en) | Image classification |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20181003 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20181003 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190805 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190930 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191125 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191209 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200107 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 6643856 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
| LAPS | Cancellation because of no payment of annual fees |