JP6623349B1 - 電子部品の製造方法 - Google Patents
電子部品の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 40
- 238000005530 etching Methods 0.000 claims abstract description 107
- 239000000463 material Substances 0.000 claims abstract description 62
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 28
- 230000005684 electric field Effects 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims description 38
- 239000007795 chemical reaction product Substances 0.000 claims description 22
- 239000007921 spray Substances 0.000 claims description 16
- 238000005507 spraying Methods 0.000 claims description 12
- 238000001039 wet etching Methods 0.000 abstract description 11
- 230000000873 masking effect Effects 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 13
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 238000004140 cleaning Methods 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 4
- 239000003112 inhibitor Substances 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- 229910021592 Copper(II) chloride Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- -1 cyclohexane Chemical class 0.000 description 2
- DIOQZVSQGTUSAI-NJFSPNSNSA-N decane Chemical compound CCCCCCCCC[14CH3] DIOQZVSQGTUSAI-NJFSPNSNSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- CNDHHGUSRIZDSL-UHFFFAOYSA-N 1-chlorooctane Chemical compound CCCCCCCCCl CNDHHGUSRIZDSL-UHFFFAOYSA-N 0.000 description 1
- OFERIJCSHDJMSA-UHFFFAOYSA-N 1-fluorohexane Chemical compound CCCCCCF OFERIJCSHDJMSA-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 description 1
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- KCXMKQUNVWSEMD-UHFFFAOYSA-N benzyl chloride Chemical compound ClCC1=CC=CC=C1 KCXMKQUNVWSEMD-UHFFFAOYSA-N 0.000 description 1
- 229940073608 benzyl chloride Drugs 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 150000001924 cycloalkanes Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 239000010804 inert waste Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- SKTCDJAMAYNROS-UHFFFAOYSA-N methoxycyclopentane Chemical compound COC1CCCC1 SKTCDJAMAYNROS-UHFFFAOYSA-N 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3063—Electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
Abstract
Description
図1を用いて、気中におけるエレクトロスプレーによるエッチング装置について説明する。本発明は、電子部品の製造方法において、電子部品の基板に積層された材料に対してレジストでマスクを施して当該マスクで被覆されていない間隙をエッチングする方法であり、エレクトロスプレーを用いて材料をエッチングする。
(式1) 2FeCl3+Cu→2FeCl2+CuCl2
図2、3を用いて、液体媒体(低誘電率液体)中におけるエレクトロスプレーによるエッチング装置について説明する。図2に示すように、本発明において使用するエッチング装置100aでは、基板200とノズル310は、液体媒体400中に存在させる。エッチング装置100aは、エレクトロスプレーを液体媒体400で行う以外は、エッチング装置100と同様であっても良い。
(1)n−ヘキサン・ペンタン・デカン等のアルカン、
(2)シクロヘキサン等のシクロアルカン、
(3)ベンゼン・トルエン・キシレン等の環式の不飽和炭化水素、
(4)シクロペンチルメチルエーテル(比誘電率4.76)・ジイソプロピルエーテル(比誘電率3.81)・メチル−t−ブチルエーテル(比誘電率2.6)等のエーテル、
(5)塩化ベンジル(比誘電率7.0)・クロロホルム(比誘電率6.15)・1−クロロオクタン(比誘電率5.05)・四塩化炭素(比誘電率2.238)・パーフルオロヘキサン等のハロゲン化炭化水素、
(6)エタノール(比誘電率24.55)・1−ブタノール(比誘電率17.51)・1−ペンタノール(比誘電率13.9)・1−オクタノール(比誘電率10.3)等のアルコール、
等が挙げられる。これらの液体媒体400は、1種類を単独で用いても良いし、2種類以上を混合して用いても良い。
図4を用いて、液体媒体中において複数のノズルを設置したマルチノズルスプレーについて説明する。図4に示すように、エレクトロスプレーは、ノズル310を複数配置して噴霧する範囲を拡げたマルチスプレーノズルにしても良い。
[第4の実施形態]
図6を用いて、洗浄工程を設ける場合について説明する。図6のエッチング装置100bに示すように、エレクトロスプレーを噴霧して材料220をエッチングする区間(工程)と、洗浄手段500により反応生成物250を除去する区間(工程)とを、交互に繰り返し設けて基板200aを通過させても良い。洗浄手段500では、例えば、液体媒体400中で液体媒体400をスプレーする等して、反応生成物250を洗い流せば良い。
図7を用いて、両面エッチングについて説明する。図7のエッチング装置100cに示すように、材料220の表面をレジスト230でマスクし、材料220の裏面をレジスト230aでマスクし、材料220の表側にエレクトロスプレーのノズル310を配置し、材料220の裏側にノズル310aを配置する。
100a:エッチング装置(液中スプレー)
100b:エッチング装置(洗浄工程)
100c:エッチング装置(両面スプレー)
200:基板
200a:基板
210:基材
220:材料
230:レジスト
230a:レジスト
240:間隙
250:反応生成物
300:送液ポンプ
310:ノズル
310a:ノズル
320:エッチング液
320a:液滴
320b:電気力線
400:液体媒体
500:洗浄手段
510:移送手段
Claims (5)
- 電子部品の基板に積層された材料に対してレジストでマスクを施して前記レジストで被覆されていない間隙をエッチングする方法であって、
前記基板と、前記材料をエッチングするためのエッチング液を噴霧するエレクトロスプレーのノズルとを、低誘電率の液体媒体に浸漬させ、
前記エレクトロスプレーのノズルと前記材料との間に電位差を設けることにより、
前記エッチング液の液滴を微細化させて前記材料に噴霧し、
前記ノズルと、前記レジストで被覆されていない間隙との間に形成された電場に沿って前記エッチング液の液滴を移動させる、
ことを特徴とする電子部品の製造方法。 - 前記エレクトロスプレーは、ノズルを複数配置して噴霧する範囲を拡げたマルチスプレーノズルである、
ことを特徴とする請求項1に記載の電子部品の製造方法。 - 前記エレクトロスプレーは、噴霧を間欠的にし、前記材料をエッチングする時間と、当該エッチングによる反応生成物を除去する時間とが、交互に繰り返される、
ことを特徴とする請求項1又は2に記載の電子部品の製造方法。 - 前記エレクトロスプレーを噴霧して前記材料をエッチングする工程と、当該エッチングによる反応生成物を除去する工程とを、交互に繰り返し設ける、
ことを特徴とする請求項1乃至3の何れか一に記載の電子部品の製造方法。 - 両面がレジストでマスクされた材料の両側にそれぞれエレクトロスプレーのノズルを配置し、当該材料の両面にエッチング液を噴霧する、
ことを特徴とする請求項1乃至4の何れか一に記載の電子部品の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019065268A JP6623349B1 (ja) | 2019-03-29 | 2019-03-29 | 電子部品の製造方法 |
TW109109739A TW202037240A (zh) | 2019-03-29 | 2020-03-24 | 電子零件製造方法 |
PCT/JP2020/013218 WO2020203521A1 (ja) | 2019-03-29 | 2020-03-25 | 電子部品の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2019065268A JP6623349B1 (ja) | 2019-03-29 | 2019-03-29 | 電子部品の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP6623349B1 true JP6623349B1 (ja) | 2019-12-25 |
JP2020167247A JP2020167247A (ja) | 2020-10-08 |
Family
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JP2019065268A Active JP6623349B1 (ja) | 2019-03-29 | 2019-03-29 | 電子部品の製造方法 |
Country Status (3)
Country | Link |
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JP (1) | JP6623349B1 (ja) |
TW (1) | TW202037240A (ja) |
WO (1) | WO2020203521A1 (ja) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200425327A (en) * | 2003-02-21 | 2004-11-16 | Matsushita Electric Ind Co Ltd | Method and apparatus for liquid etching |
-
2019
- 2019-03-29 JP JP2019065268A patent/JP6623349B1/ja active Active
-
2020
- 2020-03-24 TW TW109109739A patent/TW202037240A/zh unknown
- 2020-03-25 WO PCT/JP2020/013218 patent/WO2020203521A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
TW202037240A (zh) | 2020-10-01 |
JP2020167247A (ja) | 2020-10-08 |
WO2020203521A1 (ja) | 2020-10-08 |
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