JP6616457B2 - Chip joining method and chip joining apparatus - Google Patents

Description

Embodiment relates to bonding apparatus for bonding method and the chip of the chip.

  In order to obtain a semiconductor device, a semiconductor chip may be mounted and bonded on a substrate. At this time, it is desired to mount the semiconductor chip on the substrate while suppressing thermal deformation of the semiconductor chip or suppressing displacement of bonding due to a difference in coefficient of thermal expansion between the semiconductor chip and the substrate.

Special table 2008-535275 gazette JP 2014-103291 A

In one embodiment, the chip can be mounted on the substrate while suppressing thermal deformation of the chip or suppressing / reducing bonding misalignment or residual stress after bonding due to the difference in thermal expansion coefficient between the chip and the substrate. An object of the present invention is to provide a chip bonding method and a chip bonding apparatus.

According to one embodiment, a method for joining chips is provided. In the chip bonding method, the activated surface of the chip and the activated surface of the substrate are arranged to face each other with the back surface of the chip attached to the first region of the sheet. In the chip bonding method, the second region is held by the holding mechanism. The holding mechanism can change its position relative to the sheet in a direction that is not perpendicular to the surface of the substrate. The second area is an area around the first area in the sheet. The chip bonding method, in a state where the second region of the sheet is held by the holding mechanism, the chip is activated by applying pressing a first region by a pressing mechanism provided independently of the holding mechanism The exposed surface is brought into close contact with the activated surface of the substrate. The chip bonding method, the activated surface of the chip releases the pressing of the back surface of the chip through the first region of the sheet while maintaining the state of being in close contact with the activated surface of the substrate, the sheet Peel from the back of the chip . In the chip bonding method, the chip is heated after peeling.

Sectional drawing which shows the joining method of the semiconductor chip concerning embodiment. Sectional drawing which shows the structure of the joining apparatus of the semiconductor chip concerning embodiment. Sectional drawing which shows the joining method of the semiconductor chip concerning embodiment. Sectional drawing which shows the joining method of the semiconductor chip concerning embodiment. Sectional drawing which shows the joining method of the semiconductor chip concerning embodiment. Explanatory drawing which shows the mechanism of the plasma activation joining in embodiment. Sectional drawing which shows the joining method of the semiconductor chip concerning the modification of embodiment.

  Hereinafter, a semiconductor chip bonding method according to an embodiment will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by this embodiment.

(Embodiment)
A semiconductor chip bonding method according to the embodiment will be described. The semiconductor chip bonding method is a method for mounting a semiconductor chip on a substrate.

  For example, in order to obtain a stacked device, it is necessary to stack a plurality of chips in a device packaging process. At this time, when chips having different chip sizes are mixed in a plurality of chips to be stacked, it is difficult to obtain a stacked type device by bonding two substrates together and then separating them into pieces. For this reason, it is necessary to divide one of the two substrates (semiconductor substrate) into a plurality of semiconductor chips and then mount the semiconductor chip on the other substrate.

  Or in order to obtain an optical device, it is necessary to laminate | stack an optical element on a template board | substrate. At this time, when the substrate sizes of the optical element substrate to be separated into a plurality of optical elements and the template substrate substrate to be separated into a plurality of template substrates are different, the two substrates are bonded to each other. As a result, useless areas that do not contribute to obtaining an optical device are generated. For this reason, it is necessary to divide a substrate for one optical element (semiconductor substrate) of two substrates into a plurality of semiconductor chips and then mount the chip on the other substrate.

  At this time, let us consider a case where a solder bump is interposed between the pad electrode of the semiconductor chip and the pad electrode of the substrate to establish conduction.

  In this case, in order to solder-bond solder bumps to the pad electrode of the semiconductor chip and the pad electrode of the substrate, it is necessary to heat the semiconductor chip and the substrate to a high temperature (for example, 350 to 400 ° C.). There is a possibility that the substrate is thermally deformed. When the semiconductor chip and the substrate are formed of materials having different coefficients of thermal expansion, if the semiconductor chip and the substrate are thermally deformed, the alignment accuracy of the bonding between the pad electrode of the semiconductor chip and the pad electrode of the substrate is likely to decrease. There is a possibility that continuity is lost.

  In the present embodiment, as shown in FIGS. 1 to 5, the semiconductor chip is mounted on the substrate at room temperature by plasma activated bonding to the substrate of the semiconductor chip. That is, the surface of the semiconductor chip and the surface of the substrate are each activated by plasma to bring the semiconductor chip into close contact with the substrate, thereby temporarily bonding the semiconductor chip onto the substrate at room temperature. Thereafter, the semiconductor chip is heated and pressed to be finally bonded to the substrate. Since the bonding position of the semiconductor chip on the substrate can be substantially fixed by temporary bonding, the alignment accuracy of bonding of the semiconductor chip can be easily improved in the main bonding.

  In addition, when electrical communication is required between the semiconductor chip and the substrate, such as the bonding between the semiconductor chip and the substrate using the solder bap described above, a part of the surface of the semiconductor chip and the substrate to be activated is used. Conductor electrodes may be provided, and the conductors may be electrically connected separately from the joining by plasma activation. For example, a solder electrode surrounded by an insulating film (silicon oxide film) is prepared on the surface of each of the semiconductor chip and the substrate. The solder electrodes may be bonded to each other by heating after melting the insulating films on the semiconductor chip and the substrate to melt the solder electrodes.

  1A to 1G, FIGS. 3A to 3C, and FIGS. 4A to 4C are process cross-sectional views illustrating a semiconductor chip bonding method. FIG. 2A is a cross-sectional view showing a configuration of a semiconductor chip bonding apparatus. FIG. 2B is a bottom view of the pressing head in the bonding apparatus.

  The activation in the plasma activated bonding means that the surface of the semiconductor chip and the surface of the substrate are respectively terminated with hydroxyl groups so that water molecules are easily bonded. In addition, the plasma activated bonding may be called oxide film bonding (Oxide Bonding), fusion bonding (Fusion Bonding), or spontaneous bonding.

  In the semiconductor chip bonding method, the steps shown in FIGS. 1A to 1D and the steps shown in FIGS. 1E to 1G are performed in parallel as preprocessing for temporary bonding in plasma activated bonding. Is called.

  In the process shown in FIG. 1A, a semiconductor substrate 10 to be separated into a plurality of semiconductor chips 11-1 to 11-6 (see FIG. 1B) is prepared. A portion of the semiconductor substrate 10 in the vicinity of the surface 10a (excluding the pad electrode) is formed of a material mainly composed of any one of silicon, silicon oxide, III-V semiconductor, and III-V semiconductor oxide. ing. When the portion in the vicinity of the surface 10a in the semiconductor substrate 10 is formed of a material mainly containing silicon oxide, the region deeper than the portion in the vicinity of the surface 10a in the semiconductor substrate 10 is a material mainly containing silicon, or III It may be formed of a material mainly containing a -V group semiconductor. When the portion near the surface 10a in the semiconductor substrate 10 is formed of a material mainly composed of an oxide of a group III-V semiconductor, the region deeper than the portion near the surface 10a in the semiconductor substrate 10 is a group III-V semiconductor. It may be formed of a material containing as a main component. The III-V semiconductor includes, for example, InP, GaAs, and GaN.

  The surface 10a of the semiconductor substrate 10 can have a flatness of 1 nm or less, more preferably 0.3 nm or less. If the flatness of the surface 10a becomes 0.3 nm or less, the flatness of the surface 11a of each individual semiconductor chip 11 also becomes 0.3 nm or less. When the flatness of the surface 11a of each semiconductor chip 11 is 0.3 nm or less, a void is formed at the bonding interface when the semiconductor chip 11 is temporarily bonded to the substrate 20 in the main bonding step (step shown in FIG. 5D). (Air gap) is formed, and it can be suppressed that the bonding strength of the main bonding does not satisfy the required strength.

  For example, by polishing the surface 10a of the semiconductor substrate 10 by CMP or the like, the flatness of the surface 10a can be 1 nm or less, or 0.3 nm or less.

  Next, the rear surface 10 b of the prepared semiconductor substrate 10 is attached to the front surface 1 a of the adhesive sheet (dicing tape) 1. That is, the semiconductor substrate 10 is attached to the adhesive sheet 1 with the surface 10a exposed (face-up state). The adhesive sheet 1 has an adhesive formed on its surface 1a. As the adhesive, for example, an adhesive having UV curability can be used. The adhesive sheet 1 is stretched within the frame of the annular flat ring 2 and fixed to the flat ring 2. The adhesive sheet 1 is made of, for example, a transparent resin having light transmittance.

  In the step shown in FIG. 1B, the semiconductor substrate 10 is divided and separated into a plurality of semiconductor chips 11-1 to 11-6. For example, the semiconductor substrate 10 is diced along a dicing line. The dicing process may be performed by cutting with a dicing blade along the dicing line. At this time, you may cut with a dicing blade, introducing the water jet formed by spraying water thinly into a cutting location. Thereby, it is possible to prevent cutting waste (particles) from adhering to the surface 11 a of the semiconductor chip 11. Or you may perform a dicing process by irradiating a laser along a dicing line and carrying out laser processing.

  Thereafter, the adhesive sheet 1 is irradiated with UV from the back surface 1b side to cure the adhesive formed on the front surface 1a of the adhesive sheet 1 and reduce its adhesive strength.

  In addition, with the semiconductor chips 11 attached to the adhesive sheet 1, cleaning (for example, ultrasonic cleaning) and drying processing are sequentially performed on the surface 11 a of each semiconductor chip 11. Thereby, when the particles are adhered to the surface 11a of each semiconductor chip 11, the adhered particles can be removed.

  In the step shown in FIG. 1C, the interval between the plurality of semiconductor chips 11-1 to 11-6 on the adhesive sheet 1 is increased.

  For example, after the adhesive sheet 1 is once removed from the flat ring 2, the adhesive sheet 1 is pulled so as to spread toward the periphery while the plurality of semiconductor chips 11-1 to 11-6 are attached. Thereby, the space | interval of the adjacent semiconductor chips 11-1 to 11-6 can be expanded.

  At this time, as shown in FIG. 1C, the interval between the adjacent semiconductor chips 11-1 to 11-6 can be made larger than the thickness of each semiconductor chip 11. If the interval between adjacent semiconductor chips 11-1 to 11-6 is equal to or less than the thickness of each semiconductor chip 11, in the step of pressing the semiconductor chip 11 through the adhesive sheet 1 (step shown in FIG. 5A). There is a possibility that the side surface 11c of the semiconductor chip 11 to be pressed comes into contact with the side surface 11c of the adjacent semiconductor chip 11 to generate particles. When the generated particles adhere to the surface to be temporarily bonded, when the semiconductor chip 11 is temporarily bonded to the substrate 20, voids (air gaps) starting from the particles are formed at the bonding interface, and the bonding strength of the temporary bonding is required. May be less than the desired strength. For example, when particles having a diameter of 1 μm are present on the bonding surface, a void having a width of about 1000 μm in the direction along the bonding interface may be formed.

  In the step shown in FIG. 1D, the surfaces 11a of the plurality of semiconductor chips 11-1 to 11-6 are activated collectively. For example, the flat ring 2 to which the plurality of semiconductor chips 11-1 to 11-6 are attached and to fix the adhesive sheet 1 is placed on a stage in a processing chamber of a plasma processing apparatus (not shown). At this time, the surface 11a of each semiconductor chip 11 is on the upper side. Then, when the surface PL of the plurality of semiconductor chips 11-1 to 11-6 is irradiated with the plasma PL1 under reduced pressure, the surface 11a of each of the semiconductor chips 11-1 to 11-6 is activated. Then, the flat ring 2 which affixes the some semiconductor chips 11-1 to 11-6 and fixes the adhesive sheet 1 is carried out of a processing chamber.

  Thereby, contaminants, such as an organic substance adhering to the surface 11a of each semiconductor chip 11, can be removed, and the surface 11a can be terminated with a hydroxyl group. For example, the portion (excluding the pad electrode) in the vicinity of the surface 11a of each semiconductor chip 11 is a material whose main component is one of silicon, silicon oxide, III-V semiconductor, and III-V semiconductor oxide. It is formed with. In any case, the surface 11a can be activated and terminated with a hydroxyl group by the process shown in FIG.

  The surface 11a of each semiconductor chip 11 is activated by irradiating the surface 11a of each semiconductor chip 11 with plasma instead of irradiating the surface 11a of each semiconductor chip 11 with an energy beam (bombardment) of atoms or ions such as Ar. May be performed by irradiating.

  On the other hand, in the step shown in FIG. 1E, a substrate 20 on which the semiconductor chip 11 is to be mounted is prepared. The substrate 20 includes, for example, a semiconductor substrate or a glass substrate. When the substrate 20 is a semiconductor substrate, the portion of the substrate 20 in the vicinity of the surface 20a (excluding the pad electrode) is any one of silicon, silicon oxide, III-V semiconductor, and III-V semiconductor oxide. It is made of a material that contains the main component. When the portion in the vicinity of the surface 20a in the substrate 20 is formed of a material mainly composed of silicon oxide, the region deeper than the portion in the vicinity of the surface 20a in the substrate 20 is a material mainly composed of silicon, or III-V. You may form with the material which has a group semiconductor as a main component. When the portion near the surface 10a in the semiconductor substrate 10 is formed of a material mainly composed of an oxide of a group III-V semiconductor, the region deeper than the portion near the surface 10a in the semiconductor substrate 10 is a group III-V semiconductor. It may be formed of a material containing as a main component. The III-V semiconductor includes, for example, InP, GaAs, and GaN. When the substrate 20 is a glass substrate, a portion of the substrate 20 in the vicinity of the surface 20a (excluding the pad electrode) is formed of a material mainly composed of silicon oxide or sapphire, for example.

  The surface 20a of the substrate 20 can have a flatness of 1 nm or less, more preferably 0.3 nm or less. If the flatness of the surface 20a is 0.3 n or less, a void (air gap) is formed at the bonding interface when the semiconductor chip 11 is temporarily bonded to the substrate 20 in the main bonding step (step shown in FIG. 5D). ) Is formed, and it can be suppressed that the bonding strength of the main bonding does not satisfy the required strength.

  For example, by polishing the surface 20a of the substrate 20 by CMP or the like, the flatness of the surface 20a can be 1 nm or less, or 0.3 nm or less.

  Cleaning (for example, ultrasonic cleaning) and drying processing are sequentially performed on the surface 20a of the prepared substrate 20. Thereby, when the particles adhere to the surface 20a of the substrate 20, the adhered particles can be removed.

  In the step shown in FIG. 1F, the surface 20a of the substrate 20 is activated. For example, the substrate 20 is placed on a stage in a processing chamber of a plasma processing apparatus (not shown) so that the surface 20a is on the upper side. When the surface PL of the substrate 20 is irradiated with plasma PL2 under reduced pressure, the surface 20a of the substrate 20 is activated. Thereafter, the substrate 20 is carried out of the processing chamber.

  Thereby, contaminants such as organic substances adhering to the surface 20a of the substrate 20 can be removed, and the surface 20a can be terminated with a hydroxyl group. A portion (excluding the pad electrode) in the vicinity of the surface 20a of the substrate 20 is formed of a material mainly containing any one of silicon, silicon oxide, III-V semiconductor, and III-V semiconductor oxide. Yes. In any case, the surface 20a can be activated and terminated with a hydroxyl group by the step shown in FIG.

  In the step shown in FIG. 1G, cleaning (for example, ultrasonic cleaning) and drying treatment are sequentially performed on the surface 20a of the substrate 20. Thereby, when the particles adhere to the surface 20a of the substrate 20, the adhered particles can be removed.

  Next, in the semiconductor chip bonding method, temporary bonding in plasma activated bonding is performed.

  When the semiconductor chip 11 is temporarily bonded to the substrate 20, it is assumed that each semiconductor chip 11 is picked up and removed from the adhesive sheet 1 and mounted on the substrate 20. In this case, when the front surface 11 a or the side surface 11 c of the semiconductor chip 11 is touched, a part of the semiconductor chip 11 is chipped to generate particles, and the generated particles may adhere to the surface 11 a of the semiconductor chip 11. When the generated particles adhere to the surface 11a, voids (air gaps) starting from the particles are formed at the bonding interface when the semiconductor chip 11 is temporarily bonded to the substrate 20, and the bonding strength of the temporary bonding is required. May not be met. For example, when particles having a diameter of 1 μm are present at the bonding interface, a void having a width of about 1000 μm in the direction along the bonding interface may be formed.

  Therefore, in the present embodiment, when the semiconductor chip 11 is temporarily bonded to the substrate 20, a device for handling the semiconductor chip 11 without touching the activated surface 11a of the semiconductor chip 11 is performed. That is, the activated surface 11 a of the semiconductor chip 11 attached to the adhesive sheet 1 and the activated surface 20 a of the substrate 20 are arranged to face each other, and the back surface 11 b of the semiconductor chip 11 is pressed through the adhesive sheet 1. Then, the semiconductor chip 11 is temporarily bonded to the substrate 20 to perform temporary bonding while suppressing generation of particles.

  Specifically, the temporary bonding of the plasma activated bonding is performed using a bonding apparatus 100 shown in FIGS.

  As illustrated in FIG. 2A, the bonding apparatus 100 includes an arrangement mechanism 110, an alignment mechanism 120, a pressing mechanism 130, a holding mechanism 140, a recognition mechanism 150, a decompression mechanism 160, and a controller 170. 2A and 2B, a direction perpendicular to the upper surface 112a of the substrate stage 112 is defined as a Z direction, and two directions orthogonal to each other in a plane parallel to the upper surface 112a are defined as an X direction and a Y direction.

  The controller 170 controls each part of the joining apparatus 100 as a whole.

  The arrangement mechanism 110 has the activated surface 11a of each semiconductor chip 11 and the activated surface 20a of the substrate 20 in a state where the back surface 11b of each semiconductor chip 11 is attached to the surface 1a of the adhesive sheet 1. Place them facing each other. For example, the arrangement mechanism 110 includes a sheet stage 111 and a substrate stage 112.

  The sheet stage 111 corresponds to the flat ring 2 and has a substantially ring shape when viewed from the Z direction. The flat ring 2 is placed on the upper surface 111a of the sheet stage 111 so that the surface 11a of each semiconductor chip 11 faces downward. The sheet stage 111 may suck and hold the flat ring 2 by vacuum suction or electrostatic suction.

  The substrate stage 112 has a planar shape corresponding to the substrate 20 and includes the substrate 20 inside when viewed from the Z direction. The substrate 20 is placed on the upper surface 112a of the substrate stage 112 with the surface 20a facing upward. The substrate stage 112 may suck and hold the substrate 20 by vacuum suction or electrostatic suction.

  The alignment mechanism 120 aligns the relative positions of the semiconductor chip 11 and the substrate 20 under the control of the controller 170. For example, the alignment mechanism 120 includes drive mechanisms 121 and 122. The drive mechanism 121 drives the sheet stage 111 in the X direction, the Y direction, and the θ direction in accordance with the drive amount command received from the controller 170. The θ direction is a rotation direction around the Z axis. The drive mechanism 122 drives the substrate stage 112 in the X direction, the Y direction, and the θ direction in accordance with the drive amount command received from the controller 170.

  Note that the alignment mechanism 120 may have a configuration in which one of the drive mechanism 121 and the drive mechanism 122 is omitted as long as the relative positions of the semiconductor chip 11 and the substrate 20 can be aligned.

  The decompression mechanism 160 includes a vacuum pump 161 and vacuum exhaust paths 162, 163-1 and 163-2.

  The pressing mechanism 130 presses the back surface 11b of the semiconductor chip 11 through the adhesive sheet 1 under the control of the controller 170, thereby changing the activated surface 11a of the semiconductor chip 11 to the activated surface 20a of the substrate 20. Close contact (see FIG. 5A). Thereby, the semiconductor chip 11 is temporarily bonded to the substrate 20. Further, the pressing mechanism 130 peels the adhesive sheet 1 from the back surface 11b of the semiconductor chip 11 while maintaining the state where the activated surface 11a of the semiconductor chip 11 is in close contact with the activated surface 20a of the substrate 20 ( (Refer FIG.5 (b), (c)). For example, the pressing mechanism 130 includes a pressing head 131, a head driving unit 132, a pin 135, and a pin driving unit 136.

  The pressing head 131 has a pressing surface 131 f corresponding to the back surface 11 b of the semiconductor chip 11. The pressing surface 131f has a planar shape that includes the back surface 11b of the semiconductor chip 11 to be pressed and does not interfere with the adjacent semiconductor chip 11 when viewed from the Z direction. For example, the pressing surface 131f may have an even planar shape on the back surface 11b of the semiconductor chip 11. The head driving unit 132 drives the pressing head 131 in the Z direction under the control of the controller 170. Thereby, the pressing head 131 can press the back surface 11 b of the semiconductor chip 11 through the adhesive sheet 1.

  The pressing head 131 has a buffer member 131a on the pressing surface 131f. The buffer member 131a buffers the force applied to the back surface 11b of the semiconductor chip 11 when the pressing head 131 presses the back surface 11b of the semiconductor chip 11 through the adhesive sheet 1, and at the same time, the degree of parallelism between the chip surface and the substrate surface. By absorbing the displacement, it is possible to apply pressure uniformly to the activated surface. The buffer member 131a can be formed of an elastic body such as rubber, for example.

  The pressing head 131 has an adsorbing structure 131 b for adsorbing the adhesive sheet 1 when the pressing head 131 presses the back surface 11 b of the semiconductor chip 11 through the adhesive sheet 1. As illustrated in FIG. 2B, the adsorption structure 131 b is formed by a gap between the hole 134 and the pin 135 and a communication path 137. The gap between the hole 134 and the pin 135 communicates with the vacuum exhaust path 162 via the communication path 137, and can be evacuated by the vacuum pump 161 via the vacuum exhaust path 162. Thereby, the adsorption | suction structure 131b can adsorb | suck the adhesive sheet 1 by vacuum. The suction structure 131b may have another form as long as the adhesive sheet 1 can be vacuum-sucked to the pressing surface 131f of the pressing head 131. For example, the suction structure 131b may be formed by a hole that communicates from the pressing surface 131f to the communication path 137 and the communication path 137 separately from the hole through which the pin 135 is inserted.

  The pin 135 can be changed between a state where the pin 135 is retracted from the pressing surface 131f toward the pressing head 131 and a state where the pin 135 protrudes from the pressing surface 131f. The pin 135 can move in the Z direction in the hole 134. The hole 134 extends in the Z direction within the pressing head 131. The pin driving unit 136 moves the pin 135 in the Z direction along the hole 134 under the control of the controller 170. As a result, the pin 135 is retracted from the pressing surface 131f toward the pressing head 131 or protrudes from the pressing surface 131f.

  The holding mechanism 140 is disposed around the pressing mechanism 130. The holding mechanism 140 holds an area around the area to be pressed by the pressing mechanism 130 in the adhesive sheet 1. The holding mechanism 140 vacuum-sucks the area around the area to be pressed by the pressing mechanism 130 in the adhesive sheet 1. For example, the holding mechanism 140 has a plurality of sets for holding. The plurality of sets are arranged at positions that are rotationally symmetric with respect to the pressing mechanism 130 when viewed from the Z direction. Each of the plurality of sets includes holding heads 141-1 and 141-2 and head driving units 142-1 and 142-2.

  The head drive units 142-1 and 142-2 drive the holding heads 141-1 and 141-2 in the Z direction under the control of the controller 170. Thereby, the holding heads 141-1 and 141-2 can vacuum-suck the adhesive sheet 1.

  Each holding head 141-1, 141-2 has buffer members 141 a-1, 141 a-2 on a surface 141 f that contacts the adhesive sheet 1. The buffer members 141 a-1 and 141 a-2 buffer the force applied to the back surface 11 b of the semiconductor chip 11 when the holding heads 141-1 and 141-2 vacuum-suck the adhesive sheet 1. The buffer members 141a-1 and 141a-2 can be formed of an elastic body such as rubber, for example.

  Each holding head 141-1 and 141-2 has suction structures 141 b-1 and 141 b-2 for sucking the adhesive sheet 1. The adsorption structures 141b-1 and 141b-2 are formed by holes 144-1 and 144-2 and communication paths 147-1 and 147-2. The holes 144-1 and 144-2 are communicated with the vacuum exhaust passages 163-1 and 163-2 via the communication passages 147-1 and 147-2, and via the vacuum exhaust passages 163-1 and 163-2. Then, it can be evacuated by the vacuum pump 161. Thereby, adsorption structure 141b-1 and 141b-2 can adsorb | suck the adhesive sheet 1 by vacuum.

  The recognition mechanism 150 recognizes the semiconductor chip 11 and the substrate 20 respectively. For example, the recognition mechanism 150 recognizes the position of the semiconductor chip 11 and the position on the substrate 20 where the semiconductor chip 11 is to be mounted. The recognition mechanism 150 includes, for example, a lens barrel 151, a camera 152, and a ring illumination 153. The recognition mechanism 150 illuminates the subject (for example, the semiconductor chip 11 and the substrate 20) with the ring illumination 153, and receives the reflected light by the camera 152 via the lens barrel 151. Thereby, the recognition mechanism 150 can capture an image of the semiconductor chip 11 and the substrate 20 and supply an image obtained by the imaging to the controller 170.

  For example, the recognition mechanism 150 can recognize the respective positions of the semiconductor chip 11 and the substrate 20 by recognizing the respective outlines of the semiconductor chip 11 and the substrate 20. Alternatively, for example, when alignment marks are formed on each of the semiconductor chip 11 and the substrate 20, the recognition mechanism 150 recognizes the alignment marks on the semiconductor chip 11 and the substrate 20, so Each position can be recognized.

  Note that the recognition mechanism 150 may have coaxial illumination instead of the ring illumination 153. The coaxial illumination is provided in, for example, the lens barrel 151, and its optical axis is coaxial with the optical axis of the camera 152. Alternatively, the recognition mechanism 150 may have illumination provided below (for example, the upper surface 112a of the substrate stage 112) instead of the ring illumination 153. For example, when the substrate 20 is a glass substrate, the illumination may be provided in a region on the upper surface 112a of the substrate stage 112 where the substrate 20 is placed. For example, when the substrate 20 is a semiconductor substrate, the illumination may be provided around a region on the upper surface 112a of the substrate stage 112 where the substrate 20 is placed.

  Alternatively, the recognition mechanism 150 may have an IR illumination 154 indicated by a one-dot chain line in FIG. 2A instead of the ring illumination 153. In this case, the camera 152 may be an IR camera. Thereby, the recognition mechanism 150 illuminates the subject (for example, the semiconductor chip 11 and the substrate 20) with the IR light (infrared light) emitted from the IR illumination 154, and transmits the transmitted light (IR light) via the lens barrel 151. And can be received by the camera 152.

  Alternatively, although not shown, the recognition mechanism 150 may include a vertical recognition camera instead of the camera 152. The simultaneous upper and lower recognition camera is inserted in a space between the plurality of semiconductor chips 11-1 to 11-6 and the substrate 20, and can image the semiconductor chip 11 and the substrate 20 at the same time. Thereby, the recognition mechanism 150 can simultaneously recognize the positions of the semiconductor chip 11 and the substrate 20.

  In the semiconductor chip bonding method, the steps shown in FIGS. 3A to 3C, FIGS. 4A to 4C, and FIGS. 5A to 5C are used as temporary bonding in plasma activated bonding. Is done.

  In the process shown in FIG. 3A, the arrangement mechanism 110 arranges the activated surface 11a of the plurality of semiconductor chips 11-1 to 11-6 and the activated surface 20a of the substrate 20 to face each other. . The back surfaces 11 b of the plurality of semiconductor chips 11-1 to 11-6 are in a state of being attached to the front surface 1 a of the adhesive sheet 1.

  At this time, the activated surface 11a of the semiconductor chip 11 and the activated surface 20a of the substrate 20 are each terminated with a hydroxyl group. However, as shown in FIG. In many cases, water molecules (H—O—H) are bonded to H) by hydrogen bonds. 6A to 6D are diagrams showing the mechanism of plasma activated bonding. 6A to 6D, in the semiconductor chip 11, the vicinity of the surface 11a is the silicon oxide film 11i, and the silicon region 11j is disposed deeper than the silicon oxide film 11i. In the substrate 20, the vicinity of the surface 20a is silicon. The case where the silicon region 22 is arranged at a position deeper than the silicon oxide film 21 which is the oxide film 21 is illustrated.

  As shown in FIG. 3A, the recognition mechanism 150 recognizes a position on the substrate 20 where the semiconductor chip 11 is to be mounted. For example, the recognition mechanism 150 illuminates the substrate 20 with the ring illumination 153 and receives the reflected light by the camera 152 via the lens barrel 151. Thereby, the recognition mechanism 150 can image the board | substrate 20, and can recognize the position shown with a broken line in Fig.3 (a) as a position where the semiconductor chip 11-4 in the board | substrate 20 should be mounted. The recognition mechanism 150 supplies the recognition result to the controller 170.

  In the step shown in FIG. 3B, the holding mechanism 140 holds the area around the area to be pressed by the pressing mechanism 130 in the adhesive sheet 1. For example, the controller 170 makes the suction structures 141b-1 and 141b-2 vacuum-suckable, and controls the head driving units 142-1 and 142-2 to move the holding heads 141-1 and 141-2 to- Move in the Z direction (see FIG. 2A). Thereby, when the semiconductor chip 11-4 is selected as the semiconductor chip to be pressed among the plurality of semiconductor chips 11-1 to 11-6, the area around the region corresponding to the semiconductor chip 11-4 in the adhesive sheet 1 is selected. The region is vacuum-sucked by the holding mechanism 140. In FIG. 3B, the holding heads 141-1 and 141-2 indicate the areas corresponding to the semiconductor chips 11-2, 11-3, 11-5, and 11-6 in the adhesive sheet 1. -2 is exemplified by vacuum suction, but if it is around the region corresponding to the semiconductor chip 11-4, the region corresponding to the semiconductor chip 11-2, 11-3, 11-5, 11-6 It is not limited to. Thereby, the bending of the area | region which should be pressed by the press mechanism 130 in the adhesive sheet 1 is controllable.

  In the step shown in FIG. 3C, the recognition mechanism 150 recognizes the position to be pressed by the pressing mechanism 130 in the adhesive sheet 1. For example, the recognition mechanism 150 illuminates the adhesive sheet 1 and the semiconductor chip 11-4 with the ring illumination 153 and receives the reflected light with the camera 152 via the lens barrel 151. Thereby, the recognition mechanism 150 images the adhesive sheet 1 and the semiconductor chip 11-4, and can recognize the position indicated by the broken line in FIG. 3C as the position to be pressed by the pressing mechanism 130 in the adhesive sheet 1. The recognition mechanism 150 supplies the recognition result to the controller 170.

  In addition, when the holding mechanism 140 vacuum-adsorbs the adhesive sheet 1 in the process shown in FIG. 3B, the positions of the adhesive sheet 1 and the semiconductor chip 11-4 (absolute position or relative position with respect to the substrate 20) may be shifted. However, in the step shown in FIG. 3C, since the position after the shift can be recognized, the recognized position is hardly affected by the shift.

  In the step shown in FIG. 4A, the pressing mechanism 130 vacuum-adsorbs the adhesive sheet 1. For example, the controller 170 obtains the driving amount of the sheet stage 111 for positioning the position to be pressed by the pressing mechanism 130 in the adhesive sheet 1 under the pressing mechanism 130 according to the recognition result by the recognition mechanism 150 and performs alignment. This is supplied to the drive mechanism 121 of the mechanism 120. The drive mechanism 121 drives the sheet stage 111 in accordance with a drive amount command. Thereby, the position to be pressed by the pressing mechanism 130 in the adhesive sheet 1 is positioned below the pressing mechanism 130. Then, the controller 170 allows the suction structure 131b to be vacuum-sucked and controls the head driving unit 132 to move the pressing head 131 in the −Z direction (see FIG. 2A). Thereby, the adhesive sheet 1 is vacuum-sucked to the pressing surface 131f of the pressing head 131. At this time, the pin 135 is maintained in a state of being retracted from the pressing surface 131f to the pressing head 131 side.

  In the step shown in FIG. 4B, the recognition mechanism 150 recognizes the position of the semiconductor chip 11 (absolute position or relative position with respect to the substrate 20). For example, the recognition mechanism 150 illuminates the semiconductor chip 11-4 with the ring illumination 153 and receives the reflected light by the camera 152 via the lens barrel 151. Thereby, the recognition mechanism 150 can image the semiconductor chip 11-4 and recognize the position of the semiconductor chip 11. The recognition mechanism 150 supplies the recognition result to the controller 170.

  In addition, when the pressing mechanism 130 vacuum-adsorbs the adhesive sheet 1 in the step shown in FIG. 4A, the positions of the adhesive sheet 1 and the semiconductor chip 11-4 (absolute position or relative position with respect to the substrate 20) may be shifted. However, in the process shown in FIG. 4B, since the position after the shift can be recognized, the recognized position is hardly affected by the shift.

  In the step shown in FIG. 4C, the alignment mechanism 120 aligns the relative positions of the semiconductor chip 11 and the substrate 20. For example, the controller 170 calculates the drive amount for alignment based on the recognition result received in the step shown in FIG. 3A and the recognition result received in the step shown in FIG. For example, the controller 170 sets the difference ΔL (see FIG. 4B) between the position on the substrate 20 where the semiconductor chip 11-4 is to be mounted and the position of the semiconductor chip 11-4 in the X direction, Y direction, and θ direction. Ask for each. The controller 170 obtains driving amounts in the X direction, Y direction, and θ direction that cancel the difference ΔL, and supplies the driving amounts to the driving mechanism 122 of the alignment mechanism 120. The drive mechanism 122 drives the substrate stage 112 in accordance with a drive amount command. Thereby, the position of the semiconductor chip 11-4 and the position where the semiconductor chip 11-4 is to be mounted on the substrate 20 are relatively aligned.

  In the process shown in FIG. 5A, the pressing mechanism 130 presses the back surface 11 b of the semiconductor chip 11 through the adhesive sheet 1. For example, the controller 170 controls the head driving unit 132 to further move the pressing head 131 in the −Z direction (see FIG. 2A). Thereby, the pressing head 131 presses the back surface 11b of the semiconductor chip 11-4 through the adhesive sheet 1, and the activated surface 11a of the semiconductor chip 11-4 is brought into close contact with the activated surface 20a of the substrate 20. Let As a result, the semiconductor chip 11-4 is temporarily bonded to the substrate 20. The adhesive sheet 1 is elastically deformed, and tension is generated between the area pressed by the pressing mechanism 130 and the area held by the holding mechanism 140 (holding heads 141-1 and 141-2).

  At this time, the activated surface 11a of the semiconductor chip 11 and the activated surface 20a of the substrate 20 are water molecules (H—O—H) bonded to a hydroxyl group, as shown in FIG. They are temporarily joined together by being bonded to each other by hydrogen bonds.

  In the step shown in FIG. 5B, the pressing mechanism 130 moves the adhesive sheet 1 to the semiconductor chip while maintaining the activated surface 11a of the semiconductor chip 11 in close contact with the activated surface 20a of the substrate 20. 11 is peeled off from the back surface 11b. For example, the controller 170 controls the pin driving unit 136 so that the pin 135 presses the back surface 11 b of the semiconductor chip 11 through the adhesive sheet 1. The controller 170 controls the decompression mechanism 160 to release the vacuum suction of the suction structure 131b. The controller 170 controls the head driving unit 132 to control the pressing head 131 in the + Z direction while controlling the pin driving unit 136 and maintaining the state where the pin 135 presses the back surface 11 b of the semiconductor chip 11 via the adhesive sheet 1. (Refer to FIG. 2A). In other words, as the pressing head 131 moves away from the back surface 11b of the semiconductor chip 11 in the + Z direction, the pin 135 keeps pressing the back surface 11b of the semiconductor chip 11 over the adhesive sheet 1 while maintaining the state of pressing from the pressing surface 131f. Protruding state.

  At this time, the adhesive force of the adhesive formed on the surface 1a of the adhesive sheet 1 is reduced in the step shown in FIG. For this reason, from the periphery of the area pressed by the pin 135 on the back surface 11b of the semiconductor chip 11-4 due to the tension between the area pressed by the pressing mechanism 130 in the adhesive sheet 1 and the area held by the holding mechanism 140. The adhesive sheet 1 is easily peeled off.

  In the step shown in FIG. 5C, the pressing mechanism 130 completes the peeling of the adhesive sheet 1 from the back surface 11b of the semiconductor chip 11. For example, the controller 170 controls the pin driving unit 136 to move the pin 135 in the + Z direction and release the state in which the back surface 11 b of the semiconductor chip 11 is pressed via the adhesive sheet 1. The controller 170 may control the pin driving unit 136 so that the pin 135 is retracted from the pressing surface 131f to the pressing head 131 side.

  Here, suppose that the pin 135 does not press the back surface 11 b of the semiconductor chip 11 through the adhesive sheet 1, but the pressing by the pressing head 131 is released and the pressing of the semiconductor chip 11 on the back surface 11 b is released at once. Think about the case. In this case, substantially the entire back surface 11b of the semiconductor chip 11-4 is bonded to the adhesive sheet 1, and the area of the region bonded to the adhesive sheet 1 on the back surface 11b of the semiconductor chip 11-4 is large. Therefore, the force that pulls the semiconductor chip 11-4 upward by the tension and the adhesive force of the adhesive sheet 1 is greater than the force that pulls the semiconductor chip 11-4 downward by the temporary bonding force of the semiconductor chip 11-4 to the substrate 20. It can grow. As a result, the semiconductor chip 11-4 may be peeled from the substrate 20 without maintaining the state in which the semiconductor chip 11-4 is temporarily bonded to the substrate 20.

  On the other hand, in this embodiment, in the process shown in FIG. 5C, the area of the region bonded to the adhesive sheet 1 on the back surface 11b of the semiconductor chip 11-4 is small. For this reason, the force that pulls the semiconductor chip 11-4 downward by the temporary bonding force of the semiconductor chip 11-4 to the substrate 20 is easily the force that pulls the semiconductor chip 11-4 upward by the tension and adhesive force of the adhesive sheet 1. Can be overcome. Thereby, peeling of the adhesive sheet 1 from the back surface 11b of the semiconductor chip 11 can be completed while maintaining the state in which the semiconductor chip 11-4 is temporarily bonded to the substrate 20.

  Similarly, other semiconductor chips 11-1 to 11-3, 11-5, and 11-6 attached to the adhesive sheet 1 are also illustrated in FIGS. 3A to 3C and FIGS. c) By performing the steps of FIGS. 5A to 5C, the substrate 20 can be temporarily bonded.

  Next, in the semiconductor chip bonding method, the step shown in FIG. 5D is performed as the main bonding in the plasma activated bonding.

  In the step shown in FIG. 5D, the semiconductor chip 11 is heated while the back surface 11b of the semiconductor chip 11 is physically pressurized. For example, the back surface 11b of the semiconductor chip 11 is brought into thermal contact with a hot plate via a buffer sheet (formed of a heat-resistant material) and heated at, for example, 250 ° C. or less. Further, the substrate 20 may be brought into contact with another hot plate from the back surface 20b side and heated at 250 ° C. or lower. It is desirable to set the heating temperature appropriately (for example, optimally) depending on the material and structure of the semiconductor chip and the substrate. For example, in the case of materials having the same thermal expansion coefficient, it can be set to 1000 ° C. or higher. The bonding process time can be shortened and productivity can be improved. On the other hand, in the case of bonding with different thermal expansion coefficients such as silicon and III-V semiconductors, the temperature is as low as possible, preferably 150 ° C. or less, in order to reduce the residual thermal stress due to the temperature drop after the bonding process is completed. It is recommended.

  In the above pressurization / heating process, water molecules (H—O—H) are released from the bonding interface at the bonding interface between the semiconductor chip 11 and the substrate 20 as shown in FIG. A hydrogen bond between (H—O—H) is changed to a hydrogen bond between hydroxyl groups (—O—H) or a covalent bond via an oxygen atom (—O—). Thereby, the bonding interface width between the surface 11a of the semiconductor chip 11 and the surface 20a of the substrate 20 is narrowed from G1 to G2 (<G1). As the bonding process further proceeds, at the bonding interface between the semiconductor chip 11 and the substrate 20, as shown in FIG. 6D, water molecules (H—O—H) are formed from hydrogen bonds between hydroxyl groups (—O—H). ) Is removed and the bond is changed to a covalent bond via an oxygen atom (—O—). Thereby, the surface 11a of the semiconductor chip 11 and the surface 20a of the substrate 20 are narrowed from G2 to G3 (<< G2), and the oxide films 11i and 21 on the surface are almost integrated with each other. Be joined.

  As described above, in the embodiment, in the semiconductor chip bonding method, the surface 11 a of the semiconductor chip 11 and the surface 20 a of the substrate 20 are activated by plasma, and the semiconductor chip 11 is adhered to the substrate 20. Thereby, since the semiconductor chip 11 can be temporarily bonded to the substrate 20 at normal temperature without interposing solder bumps, the semiconductor chip 11 can be mounted on the substrate 20 while suppressing thermal deformation of the semiconductor chip 11. As a result, it is possible to easily improve the alignment accuracy of semiconductor chip bonding during temporary bonding. After that, the semiconductor chip 11 is heated and pressed to be finally bonded to the substrate 20. However, the bonding position of the semiconductor chip 11 on the substrate 20 can be substantially fixed by temporary bonding. Can be improved easily.

  In the embodiment, in the semiconductor chip bonding method, the semiconductor chip 11 can be bonded onto the substrate 20 without interposing a solder bump. Therefore, it is easy to improve the arrangement density of pad electrodes in the semiconductor chip 11. is there. For example, the arrangement pitch of the pad electrodes in the semiconductor chip can be set to about several μm. Thereby, the mounting density of the semiconductor chip 11 can be improved easily.

  In the embodiment, in the semiconductor chip bonding method, the activated surface 11a of the semiconductor chip 11 attached to the adhesive sheet 1 and the activated surface 20a of the substrate 20 are arranged to face each other, and the adhesive sheet 1 The semiconductor chip 11 is temporarily joined to the substrate 20 by pressing the back surface 11 b of the semiconductor chip 11. Then, the adhesive sheet 1 is peeled from the back surface 11 b of the semiconductor chip 11 while maintaining the activated surface 11 a of the semiconductor chip 11 in close contact with the activated surface 20 a of the substrate 20. Thereby, when the semiconductor chip 11 is temporarily bonded to the substrate 20, the semiconductor chip 11 can be handled without touching the activated surface 11a of the semiconductor chip 11, and the temporary bonding is completed while suppressing generation of particles. Can be made.

  In the embodiment, in the semiconductor chip bonding method, the activated surfaces 11 a of the plurality of semiconductor chips 11 and the activation of the substrate 20 are performed with the back surfaces 11 b of the plurality of semiconductor chips 11 attached to the adhesive sheet 1. The arranged surface 20a is arranged to face. Then, the activated surface 11a of the semiconductor chip 11 is brought into close contact with the activated surface 20a of the substrate 20 by pressing the back surface 11b of the semiconductor chip 11 selected from the plurality of semiconductor chips 11. The process of peeling the adhesive sheet 1 from the back surface 11b of the semiconductor chip 11 is sequentially performed for each semiconductor chip 11 while maintaining the above. Thereby, temporary joining to the board | substrate 20 of the several semiconductor chip 11 can be performed efficiently, suppressing generation | occurrence | production of a particle.

  In the embodiment, in the bonding method of the semiconductor chips, before the activated surface 11a of the plurality of semiconductor chips 11 and the activated surface 20a of the substrate 20 are arranged to face each other, a plurality of the adhesive sheets 1 on the adhesive sheet 1 are arranged. The interval between the semiconductor chips 11 is increased. For example, the interval between the plurality of semiconductor chips 11 on the adhesive sheet 1 is made larger than the thickness of the semiconductor chip 11. Thereby, in the process of pressing the semiconductor chip 11 through the adhesive sheet 1, the side surface 11c of the semiconductor chip 11 to be pressed becomes difficult to contact the side surface 11c of the adjacent semiconductor chip 11, and the generation of particles can be suppressed.

  In the embodiment, in the semiconductor chip bonding method, in the step of pressing the back surface 11 b of the semiconductor chip 11 through the adhesive sheet 1, the area around the area to be pressed in the adhesive sheet 1 is held by the holding mechanism 140. Done in state. Thereby, since the back surface 11b of the semiconductor chip 11 can be pressed through the adhesive sheet 1 in a state in which the bending of the adhesive sheet 1 is appropriately controlled, the peeling of the adhesive sheet 1 from the back surface 11b of the semiconductor chip 11 is appropriately performed thereafter. Can be done.

  In the embodiment, in the semiconductor chip bonding apparatus, the pressing mechanism 130 presses the back surface 11 b of the semiconductor chip 11 via the adhesive sheet 1 to activate the activated surface 11 a of the semiconductor chip 11 on the substrate 20. It adheres to the surface 20a. Further, the pressing mechanism 130 peels the adhesive sheet 1 from the back surface 11 b of the semiconductor chip 11 while maintaining the activated surface 11 a of the semiconductor chip 11 in close contact with the activated surface 20 a of the substrate 20. Accordingly, when the semiconductor chip 11 is temporarily bonded to the substrate 20, the semiconductor chip 11 can be handled without touching the activated surface 11a of the semiconductor chip 11, and temporary bonding is performed while suppressing generation of particles. be able to.

  In the embodiment, in the pressing mechanism 130 of the semiconductor chip bonding apparatus, the pressing head 131 has the pressing surface 131 f corresponding to the back surface 11 b of the semiconductor chip 11. Thereby, the back surface 11b of the semiconductor chip 11 can be pressed in a plane with a substantially uniform force.

  In the embodiment, in the pressing mechanism 130 of the semiconductor chip bonding apparatus, the pin 135 can be changed between a state where the pin 135 is retracted from the pressing surface 131f toward the pressing head 131 and a state where the pin 135 protrudes from the pressing surface 131f. As a result, when the pressing head 131 presses the back surface 11b of the semiconductor chip 11 through the adhesive sheet 1, the pin 135 is retracted from the pressing surface 131f toward the pressing head 131, whereby the pin 135 is pressed by the pressing head 131. It is possible not to disturb the operation. Further, by keeping the pin 135 protruding from the pressing surface 131f when the pressing by the pressing head 131 is released, the adhesive sheet is maintained while the semiconductor chip 11-4 is temporarily bonded to the substrate 20. The peeling from the back surface 11b of one semiconductor chip 11 can be easily completed.

  Further, in the embodiment, in the semiconductor chip bonding apparatus, the pressing mechanism 130 is arranged via the adhesive sheet 1 in a state where the area around the area to be pressed by the pressing mechanism 130 in the adhesive sheet 1 is held by the holding mechanism 140. Then, the back surface 11b of the semiconductor chip 11 is pressed toward the substrate 20 side. Thereby, since the back surface 11b of the semiconductor chip 11 can be pressed through the adhesive sheet 1 in a state in which the bending of the adhesive sheet 1 is appropriately controlled, the peeling of the adhesive sheet 1 from the back surface 11b of the semiconductor chip 11 is appropriately performed thereafter. Can be done.

  In the embodiment, in the semiconductor chip bonding apparatus, the alignment mechanism 120 positions an area to be pressed by the pressing mechanism 130 in the adhesive sheet 1 based on the recognition result of the recognition mechanism 150. The alignment mechanism 120 aligns the relative positions of the semiconductor chip 11 and the substrate 20 based on the recognition result of the recognition mechanism 150. The pressing mechanism 130 presses the back surface 11b of the semiconductor chip 11 through the adhesive sheet 1 in a state where the relative positions of the semiconductor chip 11 and the substrate 20 are aligned. Thereby, the pressing mechanism 130 can press with high precision, and each of the plurality of semiconductor chips 11 attached to the adhesive sheet 1 can be mounted at an appropriate position on the substrate 20.

  In the step shown in FIG. 1C, for example, the interval between the adjacent semiconductor chips 11-1 to 11-6 can be increased by thinning out the plurality of semiconductor chips 11-1 to 11-6. For example, by thinning out the semiconductor chips 11-2, 11-4, and 11-6 from the plurality of semiconductor chips 11-1 to 11-6, the interval between the adjacent semiconductor chips 11-1 to 11-6 is equivalent to one chip width. Can be spread. However, particles may be generated when the semiconductor chips 11-2, 11-4, and 11-6 are thinned out. For this reason, after thinning out, cleaning (for example, ultrasonic cleaning) and drying processing are sequentially performed on the surface 11 a of each semiconductor chip 11 while the semiconductor chips 11 are adhered to the adhesive sheet 1. To do. Thereby, the particles adhering to the surface 11a of each semiconductor chip 11 can be removed.

  Further, the timing of performing the step of widening the interval between the plurality of semiconductor chips 11-1 to 11-6 (step shown in FIG. 1D) is the step of placing the semiconductor chip 11 and the substrate 20 facing each other (FIG. It may be before the step shown in a), and is not limited after the step shown in FIG. For example, the timing for performing the step of increasing the interval between the plurality of semiconductor chips 11-1 to 11-6 (step shown in FIG. 1D) is shown in FIG. 3A after the step shown in FIG. It may be before the process.

  In the semiconductor chip bonding method, the steps shown in FIGS. 7A to 7D may be performed instead of the steps shown in FIGS.

  In the step shown in FIG. 7A, a semiconductor substrate 10 similar to that prepared in the step shown in FIG. The prepared surface 10 a of the semiconductor substrate 10 is attached to the surface 3 a of the adhesive sheet (dicing tape) 3. That is, the semiconductor substrate 10 is attached to the adhesive sheet 3 with the back surface 10b exposed (face-down state). The adhesive sheet 3 has an adhesive formed on its surface 3a. As the adhesive, for example, an adhesive having UV curability can be used. The adhesive sheet 3 is stretched within the frame of the annular flat ring 4 and fixed to the flat ring 4. The adhesive sheet 3 is made of, for example, a transparent resin having light transmittance.

  In the step shown in FIG. 7B, the semiconductor substrate 10 is divided and divided into a plurality of semiconductor chips 11-1 to 11-6. For example, the semiconductor substrate 10 is diced along a dicing line. The dicing process may be performed by cutting with a dicing blade along the dicing line. Or you may perform a dicing process by irradiating a laser along a dicing line and carrying out laser processing.

  At this time, since the semiconductor substrate 10 is affixed to the adhesive sheet 3 with the back surface 10b exposed (face-down state), particles can be prevented from adhering to the front surface 11a of the semiconductor chip 11.

  Thereafter, the adhesive sheet 3 is irradiated with UV from the back surface 3b side to cure the adhesive formed on the front surface 3a of the adhesive sheet 3 and reduce its adhesive strength.

  Moreover, you may perform washing | cleaning (for example, ultrasonic cleaning) and a drying process sequentially with respect to the back surface 11b of each semiconductor chip 11, with each semiconductor chip 11 affixed on the adhesive sheet 3. FIG. Thereby, when the particles adhere to the back surface 11b of each semiconductor chip 11, the adhered particles can be removed.

  In the step shown in FIG. 7C, the front surface 1a of the adhesive sheet 1 is attached to the back surfaces 11b of the plurality of separated semiconductor chips 11-1 to 11-6. At this time, the adhesive force of the adhesive formed on the surface 3a of the adhesive sheet 3 is reduced in the step shown in FIG. Thereby, the plurality of semiconductor chips 11-1 to 11-6 are easily transferred from the adhesive sheet 3 to the adhesive sheet 1. That is, the semiconductor substrate 10 is attached to the adhesive sheet 1 with the surface 10a exposed (face-up state).

  In the step shown in FIG. 7D, the adhesive sheet 1 onto which the plurality of semiconductor chips 11-1 to 11-6 is transferred is stretched within the frame of the annular flat ring 2 and fixed with the flat ring 2.

  Thereafter, the steps shown in FIG. 1C are performed.

  As described above, since the semiconductor substrate 10 is diced while the semiconductor substrate 10 is face-down, it is possible to further reduce adhesion of particles generated during the dicing process to the surface 11a of each semiconductor chip 11 to be separated. In addition, it is possible to effectively suppress the presence of particles at the bonding interface during temporary bonding of the semiconductor chip 11 to the substrate 20.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

(Appendix 1)
Placing the activated surface of the semiconductor chip and the activated surface of the substrate opposite to each other with the back surface of the semiconductor chip attached to the sheet;
Pressing the back surface of the semiconductor chip through the sheet to bring the activated surface of the semiconductor chip into close contact with the activated surface of the substrate;
Peeling the sheet from the back surface of the semiconductor chip while maintaining the activated surface of the semiconductor chip in close contact with the activated surface of the substrate;
Semiconductor chip bonding method comprising:
(Appendix 2)
The semiconductor chip bonding according to claim 1, further comprising activating the surface of the semiconductor chip by irradiating the surface of the semiconductor chip with a plasma or an energy beam in a state where the back surface of the semiconductor chip is attached to a sheet before the arrangement. Method.
(Appendix 3)
The semiconductor chip bonding method according to appendix 1, further comprising heating the semiconductor chip in a state where the back surface of the semiconductor chip is pressurized after the peeling.
(Appendix 4)
The semiconductor chip according to appendix 1, wherein the vicinity of the surface of the semiconductor chip is formed of a material mainly composed of any one of silicon, silicon oxide, a group III-V semiconductor, and a group III-V semiconductor oxide. Joining method.
(Appendix 5)
The semiconductor chip bonding method according to appendix 1, wherein the substrate includes a semiconductor substrate or a glass substrate.
(Appendix 6)
The semiconductor chip bonding method according to appendix 5, wherein the vicinity of the surface of the semiconductor substrate is formed of a material mainly composed of silicon or silicon oxide.
(Appendix 7)
The semiconductor chip bonding method according to appendix 1, wherein the surface of the semiconductor chip has a flatness of 1 nm or less.
(Appendix 8)
The semiconductor chip bonding method according to appendix 1, wherein the surface of the substrate has a flatness of 1 nm or less.
(Appendix 9)
The arrangement is
Including disposing an activated surface of the plurality of semiconductor chips and an activated surface of the substrate facing each other in a state where the back surfaces of the plurality of semiconductor chips are attached to a sheet,
The adhesion is
Pressing the back surface of the semiconductor chip selected from the plurality of semiconductor chips through the sheet to bring the activated surface of the selected semiconductor chip into close contact with the activated surface of the substrate; ,
The peeling is
The semiconductor chip bonding method according to appendix 1, comprising peeling the sheet from the back surface of the selected semiconductor chip.
(Appendix 10)
The semiconductor chip bonding method according to appendix 9, further comprising widening the interval between the plurality of semiconductor chips before the placement.
(Appendix 11)
11. The semiconductor chip bonding method according to appendix 10, wherein the expanding includes expanding an interval between the plurality of semiconductor chips to be larger than a thickness of the semiconductor chip.
(Appendix 12)
The bonding of the semiconductor chip according to appendix 9, wherein the contact includes pressing a back surface of the selected semiconductor chip through the sheet while holding a region around the selected semiconductor chip in the sheet. Method.
(Appendix 13)
13. The semiconductor chip bonding method according to appendix 12, wherein the holding includes sucking and holding a region around the selected semiconductor chip in the sheet.
(Appendix 14)
Affixing the surface of the second semiconductor substrate to the second sheet;
Dividing the second semiconductor substrate into pieces into the plurality of semiconductor chips;
Affixing back surfaces of the plurality of separated semiconductor chips to the sheet, and transferring the plurality of semiconductor chips from the second sheet to the sheet;
The semiconductor chip bonding method according to appendix 9, further comprising:
(Appendix 15)
An arrangement mechanism for arranging the activated surface of the semiconductor chip and the activated surface of the substrate to face each other with the back surface of the semiconductor chip attached to the sheet;
The back surface of the semiconductor chip is pressed through the sheet to bring the activated surface of the semiconductor chip into close contact with the activated surface of the substrate, and the activated surface of the semiconductor chip is activated by the substrate. A pressing mechanism for peeling the sheet from the back surface of the semiconductor chip while maintaining a state of being in close contact with the formed surface;
Semiconductor chip bonding apparatus comprising:
(Appendix 16)
The pressing mechanism is
A pressing head having a pressing surface corresponding to the back surface of the semiconductor chip;
A pin that can be changed between a state retracted from the pressing surface toward the pressing head and a state protruding from the pressing surface;
15. The semiconductor chip bonding apparatus according to appendix 15, wherein
(Appendix 17)
The semiconductor chip bonding apparatus according to appendix 16, wherein the pressing head has a buffer member on the pressing surface.
(Appendix 18)
The semiconductor chip bonding apparatus according to appendix 16, wherein the pressing head has a suction structure for sucking the sheet.
(Appendix 19)
A holding mechanism disposed around the pressing mechanism;
The pressing mechanism presses the back surface of the semiconductor chip to the substrate side through the sheet in a state where the area around the area to be pressed by the pressing mechanism in the sheet is held by the holding mechanism. 2. A semiconductor chip bonding apparatus according to 1.
(Appendix 20)
A recognition mechanism for recognizing each of the substrate and the semiconductor chip;
An alignment mechanism that aligns the relative positions of the semiconductor chip and the substrate based on the recognition result of the recognition mechanism;
Further comprising
16. The semiconductor chip bonding apparatus according to appendix 15, wherein the pressing mechanism presses the back surface of the semiconductor chip through the sheet in a state where the relative positions of the semiconductor chip and the substrate are aligned.

  DESCRIPTION OF SYMBOLS 1,3 Adhesive sheet, 11, 11-1 to 11-6 Semiconductor chip, 20 board | substrate, 100 joining apparatus, 110 arrangement | positioning mechanism, 120 alignment mechanism, 130 pressing mechanism, 140 holding | maintenance mechanism, 150 recognition mechanism.

Claims (37)

Placing the activated surface of the chip and the activated surface of the substrate facing each other with the back surface of the chip attached to the first region of the sheet;
In a direction that is not perpendicular to the surface of the substrate, and the relative position with respect to the sheet by the holding mechanism can be changed to hold a second region surrounding the first region of the sheet,
In a state where the second region of the sheet is held by the holding mechanism, the activated surface of the chip by applying pressing said first region by a pressing mechanism provided independently of the holding mechanism Adhering to the activated surface of the substrate;
Releasing the pressing of the back surface of the chip through the first region of the sheet while maintaining the state in which the activated surface of the chip is adhered to the activated surface of said substrate, said sheet Peeling from the back of the chip;
Heating the chip after the peeling;
A chip joining method comprising:   The pressing mechanism and the holding mechanism can be driven and controlled independently of each other.
The chip bonding method according to claim 1.   The holding is
  Controlling the height of the holding mechanism with respect to the surface of the substrate to be lower than the height of the pressing mechanism with respect to the surface of the substrate, and holding the second region of the sheet by the holding mechanism.
The chip joining method according to claim 2.   The adhesion is
  After the holding, the pressing mechanism is controlled so as to contact the sheet and press the first region, thereby bringing the activated surface of the chip into close contact with the activated surface of the substrate. including
The chip joining method according to claim 2.   The pressing mechanism and the holding mechanism can be spaced apart from each other.
The chip bonding method according to claim 1.   The adhesion is
  The pressing mechanism includes pressing the first region including a point position corresponding to the center of the pressing portion to bring the activated surface of the chip into close contact with the activated surface of the substrate.
The chip bonding method according to claim 1.   Before the holding, further comprising changing the position of the holding mechanism relative to the sheet in the non-vertical direction to position the second region in the sheet;
The chip bonding method according to claim 1.   The pressing of the back surface of the chip through the first region is performed by a pressing mechanism whose position relative to the sheet can be changed,
  The joining method is:
  After the positioning, the position of the pressing mechanism is changed relative to the sheet in the non-perpendicular direction to further position the first region in the sheet.
The chip bonding method according to claim 7. The placing includes retaining an outer peripheral area of the sheet;
The chip according to any one of claims 1 to 8, wherein the second region is provided around the first region at a distance from the first region inside the outer peripheral region in the sheet. Joining method. The chip bonding method according to any one of claims 1 to 9 , wherein the heating includes heating the chip in a state where a back surface of the chip is pressed. The arrangement is
Including disposing the activated surface of the plurality of chips and the activated surface of the substrate facing each other in a state where the back surfaces of the plurality of chips are attached to a sheet,
The adhesion is
Pressing the back surface of the chip selected from the plurality of chips through the first region to bring the activated surface of the selected chip into close contact with the activated surface of the substrate; ,
The peeling is
Chip bonding method according to any one of claims 1 to 10, which comprises peeling the sheet from the back surface of the selected chip. Affixing the back surface of the semiconductor substrate to the sheet;
Dividing the semiconductor substrate into a plurality of chips,
Further chip bonding method according to any one of claims 1 to 11 with a. Affixing the surface of the semiconductor substrate to the second sheet;
Dividing the semiconductor substrate into a plurality of chips,
Affixing back surfaces of the singulated chips to the sheet, and transferring the chips from the second sheet to the sheet;
Further chip bonding method according to any one of claims 1 to 11 with a. Further chip bonding method of claim 12 or 13 with a planarizing the surface of the semiconductor substrate prior to the singulation. The chip bonding method according to claim 14 , wherein the planarization includes planarizing a surface of the semiconductor substrate to a flatness of 1 nm or less. The chip bonding method according to claim 15 , wherein the planarization includes planarizing a surface of the semiconductor substrate to a flatness of 0.3 nm or less. Bonding method of the chip according to the number and washed with respect to the semiconductor substrate after the pieces drying and claim 12 or 13 further comprising to perform sequentially a. Bonding method of the chip according to claim 12 or 13 further comprising widening the intervals of a plurality of the chips after the singulation. The chip joining method according to claim 18 , wherein the widening includes widening an interval between the plurality of chips larger than a thickness of the chips. An arrangement mechanism having a sheet stage capable of fixing a sheet on which chips can be arranged and a substrate stage provided on the first side of the sheet and capable of providing a substrate;
A pressing mechanism that can be provided on the second side opposite the first side with respect to the sheet, the first region corresponding to the chip to press in the direction of the first side,
Provided on the second side with respect to the seat, when the first region is pressed by the pressing mechanism, it is possible to hold the second region surrounding the first region of the sheet A holding mechanism provided independently of the pressing mechanism ;
With
A chip joining apparatus, wherein the relative positions of the pressing mechanism and the holding mechanism with respect to the sheet stage can be changed before or after the pressing mechanism presses the sheet. A controller for controlling the driving of the pressing mechanism and the holding mechanism independently of each other;
The chip bonding apparatus according to claim 20.   The controller can control the height of the holding mechanism with respect to the substrate stage to be lower than the height of the pressing mechanism with respect to the substrate stage.
The chip bonding apparatus according to claim 21.   The controller can control the pressing mechanism so that the first region is pressed by the pressing mechanism after the sheet is held by the holding mechanism.
The chip bonding apparatus according to claim 21.   The pressing mechanism and the holding mechanism can be spaced apart from each other.
The chip bonding apparatus according to claim 20.   The pressing mechanism presses the first region including a point position corresponding to the center of the pressing portion.
The chip bonding apparatus according to claim 20. The arrangement mechanism is arranged with the front surface of the chip and the surface of the substrate facing each other with the back surface of the chip attached to a sheet,
Before SL pressing mechanism, the chip bonding apparatus of claim 20 presses the back surface of the chip through the first region is brought into close contact with the surface of the chip on the surface of the substrate. 27. The chip bonding apparatus according to claim 26 , wherein the pressing mechanism releases the pressing of the back surface of the chip through the first region of the sheet to peel the sheet from the back surface of the chip. The pressing mechanism is
A pressing head having a pressing surface corresponding to the back surface of the chip;
A pin that can be changed between a state retracted from the pressing surface toward the pressing head and a state protruding from the pressing surface;
21. The chip bonding apparatus according to claim 20 , further comprising: A recognition mechanism for recognizing each of the substrate and the chip;
An alignment mechanism for aligning relative positions of the chip and the substrate based on a recognition result of the recognition mechanism;
Further comprising
21. The chip bonding apparatus according to claim 20 , wherein the pressing mechanism presses the back surface of the chip through the sheet in a state where the relative positions of the chip and the substrate are aligned. 21. The chip bonding apparatus according to claim 20 , wherein the holding mechanism has a suction structure that sucks the second region of the sheet. 21. The chip bonding apparatus according to claim 20 , wherein the sheet stage and the sheet stage are driven independently of each other. 21. The chip bonding apparatus according to claim 20 , wherein the sheet stage is capable of holding a flat ring that can fix the sheet to which the chip is attached. 21. The chip bonding apparatus according to claim 20 , wherein the chip is arranged face-down above the substrate by the arrangement mechanism. 30. The chip bonding apparatus according to claim 29 , wherein the recognition mechanism includes illumination and a camera. The pressing mechanism is arranged on the first side with respect to the arrangement mechanism,
35. The chip bonding apparatus according to claim 34 , wherein the illumination is arranged on a second side opposite to the first side with respect to the arrangement mechanism. 36. The chip bonding apparatus according to claim 35 , wherein the illumination is IR illumination. The arrangement mechanism holds an outer peripheral area of the sheet during the arrangement,
21. The chip bonding apparatus according to claim 20 , wherein the second region is provided around the first region and spaced apart from the first region inside the outer peripheral region in the sheet.

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