JP6606631B2 - 光変調器 - Google Patents
光変調器 Download PDFInfo
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- JP6606631B2 JP6606631B2 JP2015004259A JP2015004259A JP6606631B2 JP 6606631 B2 JP6606631 B2 JP 6606631B2 JP 2015004259 A JP2015004259 A JP 2015004259A JP 2015004259 A JP2015004259 A JP 2015004259A JP 6606631 B2 JP6606631 B2 JP 6606631B2
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- layer
- polymer layer
- optical modulator
- slot
- electro
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- 239000010410 layer Substances 0.000 claims description 133
- 229920000642 polymer Polymers 0.000 claims description 63
- 230000003287 optical effect Effects 0.000 claims description 57
- 229920001940 conductive polymer Polymers 0.000 claims description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 23
- 239000012792 core layer Substances 0.000 claims description 19
- 230000000694 effects Effects 0.000 claims description 18
- 238000005253 cladding Methods 0.000 claims description 16
- 239000000377 silicon dioxide Substances 0.000 claims description 16
- 229920000144 PEDOT:PSS Polymers 0.000 claims description 15
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- 230000001747 exhibiting effect Effects 0.000 claims description 6
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 description 27
- 230000008569 process Effects 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 13
- 230000005684 electric field Effects 0.000 description 11
- 229910010413 TiO 2 Inorganic materials 0.000 description 10
- 239000010408 film Substances 0.000 description 10
- 239000010931 gold Substances 0.000 description 9
- 239000000243 solution Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 230000015556 catabolic process Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 3
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 3
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 230000005697 Pockels effect Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- GKWLILHTTGWKLQ-UHFFFAOYSA-N 2,3-dihydrothieno[3,4-b][1,4]dioxine Chemical compound O1CCOC2=CSC=C21 GKWLILHTTGWKLQ-UHFFFAOYSA-N 0.000 description 1
- MAGFQRLKWCCTQJ-UHFFFAOYSA-M 4-ethenylbenzenesulfonate Chemical compound [O-]S(=O)(=O)C1=CC=C(C=C)C=C1 MAGFQRLKWCCTQJ-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- DKNPRRRKHAEUMW-UHFFFAOYSA-N Iodine aqueous Chemical compound [K+].I[I-]I DKNPRRRKHAEUMW-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Description
まず、光変調器の構造について説明する。図1は、本発明の一実施形態に係る光変調器の構造を示す。図1(a)は平面図であり、図1(b)は図1(a)中のI−I’断面図であり、図1(c)は図1(a)中のII−II’断面図である。なお、各図は本実施形態に係る光変調器の構造が理解できるように模式的に描いたものであり、各構成部材の縮尺は正確ではない。
次に、本実施形態に係る光変調器の製造方法について説明する。図2は、本実施形態に係る光変調器の製造工程を示す。なお、各図は本実施形態に係る光変調器の製造工程が理解できるように図1(a)中のI−I’断面を模式的に描いたものであり、各構成部材の縮尺は正確ではない。
PEDOT:PSSは、他の導電性ポリマーと比較して導電率および透明性が非常に高いという特徴を有する。また、PEDOT:PSSは、ITO薄膜上に塗布することで表面平坦で均質な層を形成することができる。このような特徴を有するPEDOT:PSSからなる導電性ポリマー層30を、ITOからなる下部電極20とゾルゲルシリカからなるクラッド層40との間に形成することで、ポーリング処理時にポリマー層56の表面の電界分布を一様にすることができる。これにより、一様な電界で効率よくポリマー層56のポーリング処理を行うことができ、ポリマー層56の誘電破壊も起きにくくなる。
20 下部電極
30 導電性ポリマー層
40 クラッド層
50 スロット導波路
56 ポリマー層
58 スロットコア層
60 バッファ層
70 上部電極
Claims (4)
- 基板と、
前記基板の上面に形成された下部電極と、
前記下部電極の上面に形成された導電性ポリマー層と、
前記導電性ポリマー層の上面に形成された、ゾルゲルシリカからなるクラッド層と、
電気光学効果を呈する低屈折率のポリマー層を前記基板の垂直上下方向から二つの高屈折率のスロットコア層で挟んだスロット構造を有し、前記クラッド層中に形成されたスロット導波路と、
前記スロット導波路の上面に形成されたバッファ層と、
前記バッファ層の上面に形成された上部電極とを備え、
前記上部電極、スロット導波路、および下部電極が平面視で互いに重なるように配置されている
ことを特徴とする光変調器。 - 前記導電性ポリマー層がPEDOT:PSSからなる請求項1に記載の光変調器。
- 前記下部電極がITOからなる請求項1または請求項2に記載の光変調器。
- 前記スロットコア層が酸化チタンからなる請求項1ないし請求項3のいずれかに記載の光変調器。
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JP2015004259A JP6606631B6 (ja) | 2015-01-13 | 2015-01-13 | 光変調器 |
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JP2015004259A JP6606631B6 (ja) | 2015-01-13 | 2015-01-13 | 光変調器 |
Publications (3)
Publication Number | Publication Date |
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JP2016130768A JP2016130768A (ja) | 2016-07-21 |
JP6606631B2 true JP6606631B2 (ja) | 2019-11-20 |
JP6606631B6 JP6606631B6 (ja) | 2020-01-15 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP3674792A4 (en) | 2017-08-24 | 2021-04-14 | National Institute of Information and Communications Technology | LAMINATE FOR A NONLINEAR OPTICS WITH AN ELECTRO-OPTIC POLYMER LAYER AND A PROCESS FOR THE PRODUCTION OF IT |
CN111458909B (zh) * | 2020-04-22 | 2023-12-26 | 中国计量大学 | 一种基于等离子体结构与有机材料的硅基复合波导的电光调制器 |
JP2024031081A (ja) * | 2022-08-25 | 2024-03-07 | 国立大学法人徳島大学 | 無線受信装置 |
JP2024031069A (ja) * | 2022-08-25 | 2024-03-07 | 国立大学法人徳島大学 | 無線受信装置 |
CN117850075A (zh) * | 2022-09-30 | 2024-04-09 | 华为技术有限公司 | 电光聚合物器件、光器件以及光集成电路 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100472056B1 (ko) * | 2002-10-31 | 2005-03-11 | 한국전자통신연구원 | 편광 무관형 폴리머 광세기 변조기 |
JP2004184728A (ja) * | 2002-12-04 | 2004-07-02 | Fuji Xerox Co Ltd | 非線形光学材料及びその製造方法、並びに非線形光学素子 |
JP2007121405A (ja) * | 2005-10-25 | 2007-05-17 | Fuji Xerox Co Ltd | 非線形光学材料、及びその製造方法、並びに非線形光学素子 |
JP2009058906A (ja) * | 2007-09-03 | 2009-03-19 | Fuji Xerox Co Ltd | 導波路デバイス |
US20120248419A1 (en) * | 2011-02-09 | 2012-10-04 | Mark Thompson | Organic photosensitive devices comprising aryl squaraines and methods of making the same |
JP6086581B2 (ja) * | 2012-09-24 | 2017-03-01 | 高知県公立大学法人 | 光変調器 |
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