JP6602725B2 - ワークの板厚計測用窓構造 - Google Patents
ワークの板厚計測用窓構造 Download PDFInfo
- Publication number
- JP6602725B2 JP6602725B2 JP2016103410A JP2016103410A JP6602725B2 JP 6602725 B2 JP6602725 B2 JP 6602725B2 JP 2016103410 A JP2016103410 A JP 2016103410A JP 2016103410 A JP2016103410 A JP 2016103410A JP 6602725 B2 JP6602725 B2 JP 6602725B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- workpiece
- window
- cylindrical portion
- window structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016103410A JP6602725B2 (ja) | 2016-05-24 | 2016-05-24 | ワークの板厚計測用窓構造 |
KR1020170060433A KR102318327B1 (ko) | 2016-05-24 | 2017-05-16 | 워크의 판 두께 계측용 창 구조 |
CN201710352370.5A CN107414666B (zh) | 2016-05-24 | 2017-05-18 | 工件的板厚计测用窗结构 |
TW106117069A TWI707742B (zh) | 2016-05-24 | 2017-05-23 | 工件之板厚測量用窗結構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016103410A JP6602725B2 (ja) | 2016-05-24 | 2016-05-24 | ワークの板厚計測用窓構造 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017209744A JP2017209744A (ja) | 2017-11-30 |
JP2017209744A5 JP2017209744A5 (ko) | 2019-01-10 |
JP6602725B2 true JP6602725B2 (ja) | 2019-11-06 |
Family
ID=60425135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016103410A Active JP6602725B2 (ja) | 2016-05-24 | 2016-05-24 | ワークの板厚計測用窓構造 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6602725B2 (ko) |
KR (1) | KR102318327B1 (ko) |
CN (1) | CN107414666B (ko) |
TW (1) | TWI707742B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7034785B2 (ja) * | 2018-03-20 | 2022-03-14 | 株式会社東京精密 | 研磨装置 |
JP7435113B2 (ja) * | 2020-03-23 | 2024-02-21 | 株式会社Sumco | ワークの両面研磨装置 |
JP7466964B1 (ja) | 2023-07-03 | 2024-04-15 | 株式会社多聞 | 基板厚測定装置及び基板厚測定方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10160420A (ja) * | 1996-12-03 | 1998-06-19 | Tokyo Seimitsu Co Ltd | ウェーハの厚さ及び厚さ変化量測定装置 |
JPH10199951A (ja) * | 1997-01-14 | 1998-07-31 | Tokyo Seimitsu Co Ltd | ウェーハの研磨面位置測定装置 |
TW372483U (en) * | 1998-04-13 | 1999-10-21 | Taiwan Semiconductor Mfg | Light penetrative grinding system |
EP1176630B1 (en) * | 1999-03-31 | 2007-06-27 | Nikon Corporation | Polishing body, polisher, method for adjusting polisher, method for measuring thickness of polished film or end point of polishing, method for producing semiconductor device |
JP2002170800A (ja) * | 2000-12-01 | 2002-06-14 | Nikon Corp | 研磨装置、これを用いた半導体デバイス製造方法およびこの方法により製造される半導体デバイス |
US20030114076A1 (en) * | 2001-12-14 | 2003-06-19 | Hui-Chun Chang | Apparatus for chemical mechanical polishing |
US6991514B1 (en) * | 2003-02-21 | 2006-01-31 | Verity Instruments, Inc. | Optical closed-loop control system for a CMP apparatus and method of manufacture thereof |
JP4202841B2 (ja) * | 2003-06-30 | 2008-12-24 | 株式会社Sumco | 表面研磨装置 |
KR100716935B1 (ko) * | 2005-11-25 | 2007-05-14 | 두산디앤디 주식회사 | 반도체 웨이퍼의 화학기계적 연마장치용 로딩디바이스 |
KR100889084B1 (ko) * | 2007-07-06 | 2009-03-17 | 두산메카텍 주식회사 | 반도체 웨이퍼 표면연마공정을 위한 연마 종말점 검출 장치 |
KR101587226B1 (ko) * | 2008-07-31 | 2016-01-20 | 신에쯔 한도타이 가부시키가이샤 | 웨이퍼의 연마 방법 및 양면 연마 장치 |
JP5917994B2 (ja) * | 2012-04-23 | 2016-05-18 | スピードファム株式会社 | 研磨装置の計測用窓構造 |
JP6255991B2 (ja) * | 2013-12-26 | 2018-01-10 | 株式会社Sumco | ワークの両面研磨装置 |
TWI583495B (zh) * | 2014-01-10 | 2017-05-21 | Sumco股份有限公司 | 工件厚度的測定裝置、測定方法及工件的硏磨裝置 |
JP6230921B2 (ja) * | 2014-01-16 | 2017-11-15 | 株式会社ディスコ | 研磨装置 |
-
2016
- 2016-05-24 JP JP2016103410A patent/JP6602725B2/ja active Active
-
2017
- 2017-05-16 KR KR1020170060433A patent/KR102318327B1/ko active IP Right Grant
- 2017-05-18 CN CN201710352370.5A patent/CN107414666B/zh active Active
- 2017-05-23 TW TW106117069A patent/TWI707742B/zh active
Also Published As
Publication number | Publication date |
---|---|
CN107414666A (zh) | 2017-12-01 |
KR102318327B1 (ko) | 2021-10-28 |
CN107414666B (zh) | 2020-12-08 |
TWI707742B (zh) | 2020-10-21 |
KR20170132667A (ko) | 2017-12-04 |
JP2017209744A (ja) | 2017-11-30 |
TW201741072A (zh) | 2017-12-01 |
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