JP6588470B2 - メチルペルフルオロヘプテンエーテル、1,1,1,2,2,3,4,5,5,5−デカフルオロペンタン、及びtrans−1,2−ジクロロエチレンの組成物、並びにその使用 - Google Patents
メチルペルフルオロヘプテンエーテル、1,1,1,2,2,3,4,5,5,5−デカフルオロペンタン、及びtrans−1,2−ジクロロエチレンの組成物、並びにその使用 Download PDFInfo
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- JP6588470B2 JP6588470B2 JP2016567721A JP2016567721A JP6588470B2 JP 6588470 B2 JP6588470 B2 JP 6588470B2 JP 2016567721 A JP2016567721 A JP 2016567721A JP 2016567721 A JP2016567721 A JP 2016567721A JP 6588470 B2 JP6588470 B2 JP 6588470B2
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000005437 stratosphere Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5036—Azeotropic mixtures containing halogenated solvents
- C11D7/504—Azeotropic mixtures containing halogenated solvents all solvents being halogenated hydrocarbons
- C11D7/5063—Halogenated hydrocarbons containing heteroatoms, e.g. fluoro alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/24—Organic compounds containing halogen
- C11D3/245—Organic compounds containing halogen containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/28—Organic compounds containing halogen
- C11D7/30—Halogenated hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
- C23G5/028—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons
- C23G5/02806—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons containing only chlorine as halogen atom
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Detergent Compositions (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
a)基材を、90〜99重量パーセントのtrans−1,2−ジクロロエチレン、0.1〜8重量パーセントのメチルペルフルオロヘプテンエーテル、及び0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンを含み、更に界面活性剤を含む組成物と接触させて、基材を脱水する工程と、
b)組成物から、脱水された基材を回収する工程と、を含む、方法に関する。
a.表面を、90〜99重量パーセントのtrans−1,2−ジクロロエチレン、0.1〜8重量パーセントのメチルペルフルオロヘプテンエーテル、及び0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンを含む組成物と接触させる工程と、
b.組成物から表面を回収する工程と、を含む、方法に関する。
ASTM D56−05(2010)Standard Test Method for Flash Point by Tag Closed Cup Testerに従って、MPHE、HFC−4310mee、及びt−DCEの組成物の引火点を求めた。結果を表1に示す。
4.0% MPHE、0.6% HFC−4310mee、及び95.4% t−DCEの混合物のカウリブタノール価を、ASTM D1133−Standard Test Method for Kauri−Butanol Value of Hydrocarbon Solventsに従って求めた。KB価は100であると求められ、これは、混合物の高い溶解力を示す。
表2に示す三元混合物を調製し、混合物の沸点を沸点測定装置で測定した。表2から分かる通り、95重量% t−DCEと、それぞれ0〜1.8%及び5.0〜3.2%の範囲のHFC−4310mee及びMPHEを含有する混合物は、共沸様挙動を示す、すなわち、この組成範囲にわたって沸点は本質的に一定であり、組成範囲全体にわたって1℃しか異ならない(47.1℃から48.1℃)。
実施例2に示す通り、KB価は、ブレンドの溶解力の指標である。以下の表3では、蒸気脱脂機内の5重量% MPHE、94重量% trans−ジクロロエチレン、及び1重量% MFC−43−10meeの組成物の洗浄性能の例を、異なる産業で用いられる様々な汚れについて示す。
以下の表4は、95.16% t−DCE、3.98% MPHE、及び0.86% HFC−4310meeを含有する混合物の蒸留後、蒸留液の組成が元の混合物の組成と同一であることを示す。
(1) 90〜99重量パーセントのtrans−1,2−ジクロロエチレンと、0.1〜8重量パーセントのメチルペルフルオロヘプテンエーテルと、0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとを含む組成物であって、不燃性である、組成物。
(2) 93〜97重量パーセントのtrans−1,2−ジクロロエチレンと、3〜6重量パーセントのメチルペルフルオロヘプテンエーテルと、0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとを含む、(1)に記載の組成物。
(3) 95重量パーセントのtrans−1,2−ジクロロエチレンと、4.0〜4.4重量パーセントのメチルペルフルオロヘプテンエーテルと、0.6〜1.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとを含む、(1)に記載の組成物。
(4) 90〜99重量パーセントのtrans−1,2−ジクロロエチレンと、0.1〜8重量パーセントのメチルペルフルオロヘプテンエーテルと、0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとから本質的になる組成物であって、不燃性である、組成物。
(5) 93〜97重量パーセントのtrans−1,2−ジクロロエチレンと、3〜6重量パーセントのメチルペルフルオロヘプテンエーテルと、0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとから本質的になる、(4)に記載の組成物。
(6) 95重量パーセントのtrans−1,2−ジクロロエチレンと、4.0〜4.4重量パーセントのメチルペルフルオロヘプテンエーテルと、0.6〜1.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとから本質的になる、(4)に記載の組成物。
(7) 物品の表面から残渣を除去する方法であって、
a.前記表面を、90〜99重量パーセントのtrans−1,2−ジクロロエチレン、0.1〜8重量パーセントのメチルペルフルオロヘプテンエーテル、及び0.1〜2.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンを含む組成物と接触させる工程と、
b.前記組成物から前記表面を回収する工程と、を含む、方法。
(8) 前記組成物が、噴射剤を更に含む、(7)に記載の方法。
(9) 前記噴射剤が、空気、窒素、二酸化炭素、2,3,3,3−テトラフルオロプロペン、trans−1,3,3,3−テトラフルオロプロペン、1,2,3,3,3−ペンタフルオロプロペン、ジフルオロメタン、トリフルオロメタン、ジフルオロエタン、トリフルオロエタン、テトラフルオロエタン、ペンタフルオロエタン、炭化水素、若しくはジメチルエーテル、又はこれらの組み合わせで構成される、(8)に記載の方法。
(10) 前記組成物が、少なくとも1つの界面活性剤を更に含む、(7)に記載の方法。
(11) 前記接触させる工程が、蒸気脱脂によって行われる、(7)に記載の方法。
(12) 前記蒸気脱脂が、
a.前記組成物を沸騰させることと、
b.前記物品を前記組成物の蒸気に曝露することと、によって実施される、(11)に記載の方法。
(13) 前記接触させる工程が、前記組成物中に前記物品を浸漬する第1の工程によって行われ、前記組成物が、周囲温度又は室温よりも高い温度である、(7)に記載の方法。
(14) 前記組成物が、おおよそ前記組成物の沸点の温度である、(13)に記載の方法。
(15) 前記組成物中に前記物品を浸漬する第2の工程を更に含み、前記組成物が、前記第1の浸漬工程の温度よりも低い温度である、(13)に記載の方法。
(16) 前記第2の浸漬工程における前記組成物が、周囲温度又は室温である、(15)に記載の方法。
(17) 前記組成物を沸騰させる工程と、沸騰している前記組成物の蒸気に前記物品を曝露する工程とを更に含む、(15)に記載の方法。
(18)
前記組成物が、周囲温度又は室温である、(7)に記載の方法。
(19) 前記接触させる工程が、前記組成物で飽和した物体で前記表面を拭くことによって行われる、(7)に記載の方法。
Claims (4)
- 95重量パーセントのtrans−1,2−ジクロロエチレンと、4.0〜4.4重量パーセントのメチルペルフルオロヘプテンエーテルと、0.6〜1.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとを含む組成物であって、不燃性である、組成物。
- 95重量パーセントのtrans−1,2−ジクロロエチレンと、4.0〜4.4重量パーセントのメチルペルフルオロヘプテンエーテルと、0.6〜1.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンとから本質的になる組成物であって、不燃性である、組成物。
- 物品の表面から残渣を除去する方法であって、
a.前記表面を、95重量パーセントのtrans−1,2−ジクロロエチレン、4.0〜4.4重量パーセントのメチルペルフルオロヘプテンエーテル、及び0.6〜1.0重量パーセントの1,1,1,2,2,3,4,5,5,5−デカフルオロペンタンを含む組成物と接触させる工程と、
b.前記組成物から前記表面を回収する工程と、を含む、方法。 - 前記接触させる工程が、蒸気脱脂によって行われる、請求項3に記載の方法。
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US201461992267P | 2014-05-13 | 2014-05-13 | |
PCT/US2015/029824 WO2015175330A1 (en) | 2014-05-13 | 2015-05-08 | Compositions of methyl perfluoroheptene ethers, 1,1,1,2,2,3,4,5,5,5-decafluoropentane and trans-1,2-dichloroethylene and uses thereof |
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JP2017533281A JP2017533281A (ja) | 2017-11-09 |
JP2017533281A5 JP2017533281A5 (ja) | 2018-05-17 |
JP6588470B2 true JP6588470B2 (ja) | 2019-10-09 |
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US (1) | US9428717B2 (ja) |
EP (1) | EP3143118B1 (ja) |
JP (1) | JP6588470B2 (ja) |
KR (1) | KR102320527B1 (ja) |
CN (1) | CN106574215B (ja) |
ES (1) | ES2704481T3 (ja) |
MX (1) | MX2016014676A (ja) |
SG (1) | SG11201609312PA (ja) |
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JP6674186B2 (ja) * | 2014-06-11 | 2020-04-01 | 三井・ケマーズ フロロプロダクツ株式会社 | 半導体パターン乾燥用置換液および半導体パターン乾燥方法 |
US9840685B2 (en) * | 2015-05-08 | 2017-12-12 | The Chemours Company Fc, Llc | Ternary compositions of methyl perfluoroheptene ethers and trans-1,2-dichloroethylene, and uses thereof |
ES2830200T3 (es) | 2015-05-29 | 2021-06-03 | Zynon Tech Llc | Composiciones de disolvente de limpieza y su uso |
WO2018101324A1 (ja) * | 2016-11-30 | 2018-06-07 | 旭硝子株式会社 | 溶剤組成物およびポリウレタン樹脂の除去方法 |
US10787632B2 (en) | 2016-11-30 | 2020-09-29 | Zynon Technologies, Llc | Cleaning solvent compositions exhibiting azeotrope-like behavior and their use |
CN107022431B (zh) * | 2017-05-03 | 2020-04-21 | 广东莱雅新化工科技有限公司 | 工业清洗剂及其制备方法 |
US10920181B2 (en) * | 2017-05-03 | 2021-02-16 | Illinois Tool Works Inc. | Aerosol cleaning composition |
US11124744B2 (en) | 2017-10-20 | 2021-09-21 | Shellef Holdings Inc. | Compositions containing trans-1,2-dichloroethylene and a hydrofluoroether, and methods of using the same |
JP7098170B2 (ja) * | 2017-11-07 | 2022-07-11 | 神戸合成株式会社 | 洗浄剤組成物及びそのエアゾール組成物 |
WO2019093396A1 (ja) * | 2017-11-07 | 2019-05-16 | 神戸合成株式会社 | 洗浄剤組成物及びそのエアゾール組成物 |
EP3746537A1 (en) * | 2018-02-02 | 2020-12-09 | Dov Shellef | Compositions comprising trans-1,2-dichloroethylene and an organic compound, and methods of using the same |
CN112074592B (zh) * | 2018-05-03 | 2022-04-05 | 科慕埃弗西有限公司 | 包含全氟庚烯的二元共沸物组合物和类共沸物组合物 |
JP7292307B2 (ja) * | 2018-05-03 | 2023-06-16 | ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー | ペルフルオロヘプテンを含む三成分及び四成分共沸混合物及び共沸様組成物 |
JP2022516286A (ja) * | 2019-01-04 | 2022-02-25 | ザ ケマーズ カンパニー エフシー リミテッド ライアビリティ カンパニー | 溶媒及び洗浄用途のための四級共沸及び共沸様組成物 |
CN112300692A (zh) * | 2019-07-29 | 2021-02-02 | 广东三和化工科技有限公司 | 一种书写板气雾剂及制备方法 |
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WO2021086804A1 (en) * | 2019-10-28 | 2021-05-06 | The Chemours Company Fc, Llc | Heat transfer fluids for use in low temperature chiller applications |
US11713434B2 (en) | 2020-08-18 | 2023-08-01 | Zynon Technologies, Llc | Cleaning solvent compositions exhibiting azeotrope-like behavior and their use |
WO2024049866A2 (en) | 2022-08-31 | 2024-03-07 | The Chemours Company Fc, Llc | Liquid reclamation and solid foam recycling/reclamation: compositions and methods |
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US5064560A (en) * | 1990-10-11 | 1991-11-12 | E. I. Du Pont De Nemours And Company | Ternary azeotropic compositions of 43-10mee (CF3 CHFCHFCH2 CF.sub. |
US5196137A (en) | 1991-10-01 | 1993-03-23 | E. I. Du Pont De Nemours And Company | Azeotropic composition of 1,1,1,2,3,4,4,5,5,5-decafluoropentane and trans-1,2-dichloroethylene, cis-1,2-dichloroethylene or 1,1-dichlorethane |
US5759986A (en) * | 1997-03-03 | 1998-06-02 | Merchant; Abid Nazarali | Decafluoropentane compositions |
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US7540973B2 (en) * | 2006-12-12 | 2009-06-02 | E. I. Du Pont De Nemours And Company | Azeotrope-like mixtures comprising heptafluorocyclopentane |
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US9428717B2 (en) | 2016-08-30 |
TWI702287B (zh) | 2020-08-21 |
TW201602340A (zh) | 2016-01-16 |
SG11201609312PA (en) | 2016-12-29 |
EP3143118B1 (en) | 2018-10-10 |
WO2015175330A1 (en) | 2015-11-19 |
MX2016014676A (es) | 2017-02-13 |
ES2704481T3 (es) | 2019-03-18 |
CN106574215B (zh) | 2018-05-25 |
KR102320527B1 (ko) | 2021-11-02 |
EP3143118A1 (en) | 2017-03-22 |
US20150329806A1 (en) | 2015-11-19 |
JP2017533281A (ja) | 2017-11-09 |
CN106574215A (zh) | 2017-04-19 |
KR20170010788A (ko) | 2017-02-01 |
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