JP6587462B2 - Sheet sticking device and sheet sticking method - Google Patents

Sheet sticking device and sheet sticking method Download PDF

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JP6587462B2
JP6587462B2 JP2015174399A JP2015174399A JP6587462B2 JP 6587462 B2 JP6587462 B2 JP 6587462B2 JP 2015174399 A JP2015174399 A JP 2015174399A JP 2015174399 A JP2015174399 A JP 2015174399A JP 6587462 B2 JP6587462 B2 JP 6587462B2
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holding
adherend
sheet
pressing
wafer
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JP2017050481A (en
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厚史 上道
厚史 上道
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リンテック株式会社
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Description

  The present invention relates to a sheet sticking apparatus and a sheet sticking method.

  Conventionally, an annular intermediate member has been provided between a first holding means for holding a first adherend and a second holding means for holding a second adherend, and the first adherend and the second adherend. There is known a sheet sticking device that can prevent the pressing means from falling between the two (see, for example, Patent Document 1).

JP 2011-199159 A

  However, in the adhesive tape attaching part 2 (sheet attaching apparatus) described in Patent Document 1, a regulating member 79 (in accordance with the thickness of a semiconductor wafer (hereinafter sometimes referred to as “wafer”) W (second adherend) is used. Although the position of the intermediate member can be adjusted, the frame holding base 72 (first holding means) and the wafer support base 71 (second holding) that match the thicknesses of both the wafer W and the ring frame f (first adherend). Means) and the position of the regulating member 79 cannot be adjusted.

  The object of the present invention is to adjust the positions of the first holding means, the second holding means and the intermediate member in accordance with the thicknesses of both the first adherend and the second adherend, and to adjust the first adherend and the second adherend. An object of the present invention is to provide a sheet sticking device and a sheet sticking method capable of suppressing the pressing means from falling between the adherend and the adherend.

In order to solve the above-mentioned problems, the present invention is a sheet sticking device that attaches an adhesive sheet to a first adherend of a ring member and a plate-like second adherend to integrate them. A feeding means for feeding out the adhesive sheet; a holding means for holding the first adherend and the second adherend; and pressing and adhering the adhesive sheet to the first adherend and the second adherend. Pressing means, and the holding means includes a first holding means for holding the first adherend, a second holding means for holding the second adherend, the first holding means, and a second An intermediate member provided in a gap between the holding means, and a driving device capable of independently moving the first holding means, the second holding means, and the intermediate member in the thickness direction of the second adherend. Provided so that the pressing means can be prevented from falling between the first adherend and the second adherend. It is a sheet sticking apparatus according to claim is.

The first a sheet sticking apparatus for sticking the adhesive sheet to the second adherend disposed in the opening of the adherend and the first adherend, the intermediate member undergoes the pressing means Having an intermediate holding surface, the outer edge of the intermediate holding surface being accessible to the inner edge of the first adherend, and the inner edge of the intermediate holding surface being closer to the outer edge of the second adherend It may be characterized by tilting as possible.

  The intermediate member has an intermediate holding surface that receives the pressing means, and the first and second adherends are disposed at corners of an outer edge and an inner edge of the intermediate holding surface. It may be characterized by having a guide part for guiding to the holding means.

Another aspect of the present invention is a sheet affixing method in which an adhesive sheet is affixed to a first adherend of a ring member and a plate-shaped second adherend, and the first holding is performed. A holding step for holding the first adherend and the second adherend, respectively, and the first holding means, the second holding means, the first holding means, and the second holding means, respectively. A moving step of independently moving an intermediate member provided in a gap therebetween in the thickness direction of the second adherend, and a means for pressing the adhesive sheet to the first adherend and the second adherend The first holding means and the first holding means so as to prevent the pressing means from falling between the first adherend and the second adherend in the moving step. 2 It is a sheet sticking method characterized by moving a holding means and an intermediate member

  As described above, according to the present invention, the first holding means, the second holding means, and the intermediate member are provided with the driving device that can move independently in the thickness direction of the second adherend. The position of the first holding means, the second holding means and the intermediate member is adjusted according to the thicknesses of both the first adherend and the second adherend, and between the first adherend and the second adherend. It can suppress that a press means falls.

The side view which shows the sheet sticking apparatus which concerns on one Embodiment of this invention. Explanatory drawing of a modification.

Hereinafter, a sheet sticking device according to an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes within a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. To do. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the front direction orthogonal to the page, and “Rear” is the opposite direction of the Y axis arrow direction.

  In FIG. 1, a sheet sticking device 10 is a first adherend, a ring frame RF as an annular member, and a second adherend disposed within an opening of the ring frame RF, and serves as a plate-like member. A sheet sticking device that attaches an adhesive sheet AS to a wafer WF so as to integrate them, a feeding means 20 for feeding the adhesive sheet AS, a holding means 30 for holding the ring frame RF and the wafer WF, and a ring frame The pressing roller 40 as pressing means for pressing and sticking the adhesive sheet AS to the RF and wafer WF, the moving means 50 for moving the holding means 30 and the pressing roller 40 relative to each other, the thickness of the ring frame RF and the wafer WF, etc. Input means 60 for inputting the above information.

  The feeding means 20 folds back the release sheet RL by folding the release sheet RL, the support roller 21 that supports the original fabric RS on which the adhesive sheet AS is temporarily attached onto the strip-shaped release sheet RL, and the guide roller 22 that guides the original fabric RS. A peeling plate 23 as a peeling means for peeling the adhesive sheet AS from the sheet RL, a driving roller 24 that is driven to rotate by a rotation motor 24A as a driving device, and a pinch roller that sandwiches the peeling sheet RL between the driving roller 24 25 and a collection roller 26 that is driven by a driving device (not shown) and collects the release sheet RL.

The holding means 30 is provided between the outer table 31D as the first holding means for holding the ring frame RF, the inner table 32D as the second holding means for holding the wafer WF, and the outer table 31D and the inner table 32D. A plurality of linear motors 31A, 32A, 33A as drive devices capable of independently moving the outer and inner tables 31D, 32D and the intermediate member 33D in the thickness direction of the wafer WF. Are provided so that the pressing roller 40 can be prevented from falling between the ring frame RF and the wafer WF.
The outer table 31D is supported by the output shaft 31B of the direct acting motor 31A, and includes a first holding surface 31C that sucks and holds the ring frame RF by a decompression unit (not shown) such as a decompression pump or a vacuum ejector.
The inner table 32D is supported by the output shaft 32B of the direct acting motor 32A, and includes a second holding surface 32C that sucks and holds the wafer WF by a decompression unit (not shown).
The intermediate member 33D is supported by the output shaft 33B of the linear motor 33A and includes an intermediate holding surface 33C that receives the pressing roller 40.

  The moving means 50 includes a support table 52 that is supported by a slider 51 </ b> A of a linear motor 51 as a driving device and supports the holding means 30.

  The input unit 60 includes an operation panel, a personal computer, and the like, and is electrically connected to the linear motors 31A, 32A, and 33A via wiring provided on the support table 52. Further, it is also electrically connected to the rotating motor 24A, the linear motor 51, and the like.

Next, operation | movement of the sheet sticking apparatus 10 in this embodiment is demonstrated.
First, with respect to the sheet sticking apparatus 10 indicated by the solid line in FIG. 1 in which each member stands by at the initial position, the operator sets the original fabric RS as shown in the figure, and then the thickness of the ring frame RF and the wafer WF, etc. When the information is input to the input unit 60, the input unit 60 uses the input information to place the ring frame RF and the attachment surface (upper surface) of the wafer WF and the intermediate holding surface 33C of the intermediate member 33D in the same plane. 1. The positions of the second holding surfaces 31C and 32C and the intermediate holding surface 33C are calculated. Then, based on the calculation result of the input means 60, the holding means 30 drives the linear motors 31A, 32A, 33A, and the outside so as to suppress the pressing roller 40 from falling between the ring frame RF and the wafer WF, The inner tables 31D and 32D and the intermediate member 33D are independently moved in the thickness direction of the wafer WF to adjust the positions of the first and second holding surfaces 31C and 32C and the intermediate holding surface 33C. The holding means 30 is adjusted when the ring frame RF and the wafer WF are placed on the outer table 31D and the inner table 32D, and the attachment surface of the adhesive sheet AS on the ring frame RF and the wafer WF and the intermediate member 33D. The intermediate holding surface 33C is adjusted so as to be positioned in the same plane.

  Next, when the operator inputs a signal for starting automatic operation via the input means 60, the feeding means 20 drives the rotation motor 24A and feeds the original fabric RS. When it is detected by a detecting means (not shown) such as an optical sensor or an imaging means that the leading end of the leading adhesive sheet AS has reached a predetermined position, the feeding means 20 stops driving the rotation motor 24A and enters standby. It becomes a state. Next, a transfer means (not shown) such as a manual or multi-joint robot or a belt conveyor places the ring frame RF on the first holding surface 31C, and then places the wafer WF on the second holding surface 32C. Thereafter, the holding unit 30 drives a decompression unit (not shown), and the ring frame RF and the wafer WF are sucked and held by the first and second holding surfaces 31C and 32C, respectively.

  Next, when the moving unit 50 drives the linear motor 51 and moves the holding unit 30 to the left and the ring frame RF is detected by a detecting unit (not shown) at a predetermined position, the feeding unit 20 drives the rotating motor 24A. The leading adhesive sheet AS is peeled off from the peeling sheet RL by feeding out the raw fabric RS in accordance with the moving speed of the holding means 30, and is pressed by the pressing roller 40 to be attached to the ring frame RF and the wafer WF. WK1 is formed. When the leading edge of the next adhesive sheet AS is detected by the detecting means after the leading adhesive sheet AS is attached to the ring frame RF and the wafer WF, the feeding means 20 stops driving the rotation motor 24A. The standby state is entered again.

  When the integrated object WK1 is formed, after the moving unit 50 stops driving the linear motor 51, the holding unit 30 stops driving the decompression unit (not shown). Next, a conveying means (not shown) conveys the integrated object WK1 to the next process. Then, after the moving unit 50 drives the linear motor 51 and returns the holding unit 30 to the initial position, the same operation as described above is repeated.

  According to the present embodiment as described above, the linear motors 31A, 32A, and 33A that can move the outer and inner tables 31D and 32D and the intermediate member 33D independently in the thickness direction of the wafer WF are provided. Further, the outer tables 31D and 32D and the intermediate member 33D are adjusted in position according to the thicknesses of both the wafer WF and the ring frame RF, and the pressure roller 40 can be prevented from falling between the ring frame RF and the wafer WF.

  The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, the feeding means may be anything as long as it can feed out the adhesive sheet, and is not limited insofar as it is within the scope in light of the technical common sense at the beginning of the application (other means and processes). Will be omitted).

The raw fabric RS may be one in which a strip-shaped adhesive sheet is temporarily attached to one surface of the release sheet RL. In this case, the adhesive sheet is attached after the strip-shaped adhesive sheet is attached to the ring frame RF and the wafer WF. A cutting means for forming the adhesive sheet AS by cutting into a predetermined shape may be provided, or a closed loop shape reaching the release sheet RL to the strip-like adhesive sheet upstream of the release plate 23 in the feed direction of the original fabric RS. You may provide the cutting | disconnection means which provides an incision and forms the adhesive sheet AS inside the incision.
The cutting means may employ a cutting member such as a cutter blade, a cutter roller, a laser cutter, a heating wire, or a spray of gas or liquid.
The feeding means may be configured to feed and supply the adhesive sheet AS that is not temporarily attached onto the release sheet RL.
As the peeling means, a peeling member such as a roller may be used.

  The intermediate member may adopt a configuration in which the outer edge of the intermediate holding surface 33C is accessible to the inner edge of the ring frame RF and the inner edge of the intermediate holding surface 33C is inclined to be accessible to the outer edge of the wafer WF. Good. In this case, as shown in FIG. 2A, a plurality of linear motion motors 33A are arranged side by side in the outer peripheral direction of the wafer WF, and the plurality of linear motion motors 33A are driven to adjust the heights of the plurality of output shafts 33B. By doing so, the intermediate member 33D may be inclined. Further, as shown in FIG. 2B, a rotation motor 35A having an output shaft 35B and a connecting member 35C such as a bracket or a joint are provided between the direct acting motor 33A and the intermediate member 33D, and the direct acting motor 33A is provided. While driving to raise or lower the output shaft 33B, the rotation member 35D may be driven to rotate the output shaft 35B to incline the intermediate member 33D. Thereby, even if it is a case where the position of the attachment surface of ring frame RF and the wafer WF differs, it can suppress that the press roller 40 falls between inner side tables 31D and 32D. Note that the deposition surface of the mounted ring frame RF may be positioned above or below the deposition surface of the mounted wafer WF.

  As shown in FIG. 2C, the intermediate member has an inclined surface 36E as a guide for guiding the ring frame RF and the wafer WF to the outer table 31D and the inner table 32D at the corners of the outer edge and the inner edge of the intermediate holding surface 36C. An intermediate member 36D having the above may be employed. In this case, when the ring frame RF and the wafer WF are placed on the holding means 30, the ring frame RF and the wafer WF can be guided to the normal positions of the first and second holding surfaces 31C and 32C by the inclined surface 36E, respectively. In addition, when the adhesive sheet AS is attached to the ring frame RF and the wafer WF, the pressing roller 40 can be prevented from falling between the outer and inner tables 31D and 32D. The inclined surface 36E may be a flat inclined surface, or may be a curved inclined surface curved in a concave shape or a convex shape.

The first and second holding surfaces 31C and 32C and the intermediate holding surface 33C may be provided with elastic members, or the first and second holding surfaces 31C and 32C and the intermediate holding surface 33C themselves are formed of elastic members. It may be.
The first holding surface 31C may be provided with a recess, and the ring frame RF may be fitted into the recess so that positioning is performed.
The intermediate holding surface 33C may be laminated with a coating layer containing fluorine, silicon, or the like, or the intermediate holding surface 33C itself may be formed of fluorine resin, silicon resin, or the like, and fine irregularities may be formed. Also good. Thereby, it is possible to prevent the adhesive sheet AS from sticking to the intermediate holding surface 33C.
The outer and inner tables 31D and 32D may be configured to hold the ring frame RF and the wafer WF by chuck means such as a mechanical chuck and a chuck cylinder, coulomb force, adhesive, adhesive, magnetic force, Bernoulli adsorption, and the like.
The outer table 31D and the intermediate member 33D may have a continuous shape such as an annular shape, an elliptical shape, a polygonal shape such as a quadrangle, an annular shape such as an indeterminate shape, or a frame shape in which straight lines and curves are combined. It may be a discontinuous shape such as a non-circular shape in which the continuous shape is intermittent.
The inner table 32D may be a plate-like member or block having the second holding surface 32C having a circular shape, an oval shape, a polygon such as a triangle or a quadrangle, an indeterminate shape, or other shapes.
The outer table 31D, the inner table 32D, and the intermediate member 33D may be configured by a single member or may be configured by a plurality of members.

As the pressing means, a pressing member made of a blade material, rubber, resin, sponge, or the like may be employed, or a structure of pressing by blowing air such as air or gas may be employed.
The pressing means is supported by an output shaft of a linear motor as a driving device, and adsorbs and holds the adhesive sheet AS fed by the feeding means 20 by a suction means such as a decompression pump or a vacuum ejector. The thing of the structure which presses and sticks may be sufficient.

The moving means 50 may move the pressing member toward the holding means 30 without moving the holding means 30, or may move both the pressing member and the holding means 30 to each other.
When the holding unit 30 is moved by another device, the moving unit 50 may or may not be provided in the sheet sticking device 10.

The sheet sticking apparatus 10 detects the position (height) of the ring frame RF and the attachment surface of the wafer WF that are sucked and held by the first and second holding surfaces 31C and 32C and the intermediate holding surface 33C of the intermediate member 33D. And holding means 30 drive the linear motion motors 31A, 32A, 33A based on the detection results of the detection means, and the outer and inner tables 31D, 32D and the intermediate member 33D are independent of each other. The wafer WF may be moved in the thickness direction to adjust the position so that the ring frame RF and the wafer WF deposition surface and the intermediate holding surface 33C of the intermediate member are positioned in the same plane. In this case, the input unit 60 may or may not be employed as necessary.
The sheet sticking device 10 may be configured so as to stick the adhesive sheet AS to the ring frame RF and the wafer WF by placing it upside down or placing it horizontally.

  The material, type, shape, etc. of the ring frame RF, wafer WF, adhesive sheet AS, etc. in the present invention are not particularly limited. For example, the ring frame RF may have any shape as long as the wafer WF can be arranged inside the inner edge. For example, the ring frame RF may be an annular shape, an elliptical shape, a polygonal shape such as a quadrangle, an annular shape such as an irregular shape, A frame shape in which straight lines and curved lines are combined may be used. The wafer WF may have any shape as long as the ring frame RF can be disposed outside the outer edge, and may be a circle, an ellipse, a polygon such as a triangle or a rectangle, an indeterminate shape, or other shapes. . The adhesive sheet AS may be a circle, an ellipse, a polygon such as a triangle or a rectangle, an indeterminate shape, or other shapes. Further, the adhesive sheet AS is not limited to an adhesive form such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is employed, a heating means such as an appropriate coil heater for heating the adhesive sheet AS or a heating side of a heat pipe may be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, a base sheet and an adhesive layer, an intermediate layer between them, and an upper surface of the base sheet. Three or more layers having a cover layer, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. It may be a layer having an intermediate layer or a single layer or a multilayer having no intermediate layer. As the wafer WF, any form of members or articles such as food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards, electrode substrates, and optical disks, or earthenware are also targeted. be able to. In addition, the adhesive sheet can be replaced with a functional or intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. A sheet, a film, a tape, etc. may be sufficient.

  The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 10 ... Sheet sticking apparatus 20 ... Maneuvering means 30 ... Holding means 31A, 32A, 33A ... Linear motion motor (drive device)
31D ... Outer table (first holding means)
32D ... Inner table (second holding means)
33C: Intermediate holding surface (holding surface)
33D: Intermediate member 36E: Inclined surface (guide section)
40 ... Pressing roller (pressing means)
AS ... Adhesive sheet RF ... Ring frame (first adherend)
WF: Wafer (second adherend)

Claims (4)

  1. A sheet sticking device that unifies them by sticking an adhesive sheet to a first adherend of an annular member and a plate-like second adherend,
    A feeding means for feeding out the adhesive sheet;
    Holding means for holding the first adherend and the second adherend;
    Pressing means for pressing and adhering an adhesive sheet to the first adherend and the second adherend,
    The holding means includes a first holding means for holding the first adherend, a second holding means for holding the second adherend, and a gap between the first holding means and the second holding means. An intermediate member provided on the first adherence member, and a drive device capable of independently moving the first retainer, the second retainer, and the intermediate member in the thickness direction of the second adherend. A sheet affixing device, wherein the pressing means is provided so as to be able to prevent the pressing means from falling between the adherend and the second adherend.
  2. The first a sheet sticking apparatus for sticking the adhesive sheet to the second adherend disposed in the opening of the adherend and the first adherend, the intermediate member undergoes the pressing means Having an intermediate holding surface, the outer edge of the intermediate holding surface being accessible to the inner edge of the first adherend, and the inner edge of the intermediate holding surface being closer to the outer edge of the second adherend The sheet sticking device according to claim 1, wherein the sheet sticking device is inclined to be possible.
  3.   The intermediate member has an intermediate holding surface that receives the pressing means, and the first and second adherends are disposed at corners of an outer edge and an inner edge of the intermediate holding surface. The sheet sticking apparatus according to claim 1, further comprising a guide portion that guides the holding means.
  4. It is a sheet sticking method for integrating them by sticking an adhesive sheet to a first adherend of an annular member and a plate-like second adherend,
    A holding step of holding the first adherend and the second adherend by the first holding means and the second holding means, respectively;
    A movement for independently moving the first holding means, the second holding means, and the intermediate member provided in the gap between the first holding means and the second holding means in the thickness direction of the second adherend. Process,
    A pressing step of pressing and bonding the adhesive sheet to the first adherend and the second adherend by pressing means,
    In the moving step, moving the first holding means, the second holding means, and the intermediate member so as to prevent the pressing means from falling between the first adherend and the second adherend. Characteristic sheet sticking method.
JP2015174399A 2015-09-04 2015-09-04 Sheet sticking device and sheet sticking method Active JP6587462B2 (en)

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Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004047976A (en) * 2002-05-21 2004-02-12 Nitto Denko Corp Method and device for bonding protective tape
JP2007043057A (en) * 2005-07-07 2007-02-15 Lintec Corp Table for adhering sheet
JP4836557B2 (en) * 2005-11-25 2011-12-14 株式会社東京精密 Dicing tape sticking device and dicing tape sticking method
JP2008066684A (en) * 2006-09-08 2008-03-21 Takatori Corp Device for mounting substrate to dicing frame
JP5112682B2 (en) * 2006-12-18 2013-01-09 リンテック株式会社 Sheet sticking device and sticking method
JP5607965B2 (en) * 2010-03-23 2014-10-15 日東電工株式会社 Semiconductor wafer mounting method and semiconductor wafer mounting apparatus
JP5829505B2 (en) * 2011-12-09 2015-12-09 リンテック株式会社 Sheet sticking device and sticking method
JP5996347B2 (en) * 2012-09-24 2016-09-21 リンテック株式会社 Sheet peeling apparatus and peeling method, and sheet pasting apparatus and pasting method

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