JP2021090024A - Sheet pasting device and sheet pasting method - Google Patents

Abstract

To provide a sheet pasting device and a sheet pasting method that can form an integral piece without warping with a simple configuration.SOLUTION: A sheet pasting device includes supply means 10 that supplies an adhesive sheet AS, and pressing means 20 including a pressing member 23 that moves relative to an adherend WK, presses the adhesive sheet AS supplied by the supply means 10 against the adherend WK and attaches it, and forms an integrated object UP in which the adhesive sheet AS is attached to the adherend WK, and the pressing means 20 includes warp prevention means 22 that causes a speed difference between the sheet feeding speed V1 at which the adhesive sheet AS is transmitted to a pressing position PP of the pressing member 23 and the relative moving speed V2 of the adherend WK and the pressing member 23, and prevents the warp of the integrated object UP.SELECTED DRAWING: Figure 1

Description

The present invention relates to a sheet pasting device and a sheet pasting method.

A sheet affixing device for affixing an adhesive sheet to an adherend to form an integral body without warpage is known (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2010-98132

However, in the protective tape affixing device (sheet affixing device) described in Patent Document 1, the cooled protective tape T (adhesive sheet) is attached to the wafer W (adhesive body), and the adhesive sheet is attached to the adherend. In order to form the integrated product, large-scale equipment such as a cooling mechanism and a cold insulation mechanism is required, which causes an inconvenience of a complicated configuration.

An object of the present invention is to provide a sheet affixing device and a sheet affixing method capable of forming an integral body without warpage with a simple structure.

The present invention has adopted the configuration described in the claims.

According to the present invention, since the adhesive sheet is attached to the adherend by causing a speed difference between the sheet feed speed and the relative moving speed, a large-scale equipment is not required, and an integral body having a simple structure and no warp can be obtained. Can be formed.

(A) to (E) are explanatory views of the sheet sticking apparatus of this invention. (F) to (H) are explanatory views relating to the modification of the sheet sticking apparatus of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The X-axis, Y-axis, and Z-axis in the present embodiment are orthogonal to each other, the X-axis and the Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. To do. Further, in the present embodiment, with reference to the case of viewing from the front direction in FIG. 1 parallel to the Y axis, when the direction is shown without specifying the figure, "up" is "down" in the direction of the arrow on the Z axis. Is the opposite direction, "left" is the arrow direction of the X axis, "right" is the opposite direction, "front" is the middle front direction parallel to the Y axis, and "rear" is the opposite direction. Further, since FIGS. 1 (B) to 1 (H) are views viewed from the same direction as in FIG. 1 (A), arrows indicating the directions are omitted.

The sheet sticking device EA of the present invention moves relative to the supply means 10 for supplying the adhesive sheet AS and the adherend WK, and presses the adhesive sheet AS supplied by the supply means 10 against the adherend WK. The adherend has a pressing means 20 having a pressing roller 23 as a pressing member for forming an integral body UP (see FIG. 1 (D)) in which the adhesive sheet AS is attached to the adherend WK. The sheet cutting means 30 for cutting the adhesive sheet AS attached to the body WK into a predetermined shape and the adherend supporting means 40 for supporting the adherend WK are arranged in the vicinity of each other.

The supply means 10 includes a support roller 11 for supporting the raw fabric RS on which the strip-shaped adhesive sheet AS is temporarily attached to the release sheet RL, a guide means 12 for guiding the raw fabric RS unwound from the support roller 11, and a sheet attachment. While the automatic operation of the device EA is being performed, the release roller 13 as a collection means for collecting the release sheet RL by constantly applying a predetermined tension to the release sheet RL existing between the guide means 12 and the cover. An inclined posture maintaining means for maintaining an inclined posture in which the adhesive sheet AS before being attached to the body WK with respect to the landing surface WK1 of the adherend WK, and a linear motor 14 as a drive device and a linear motor A tension maintaining means for maintaining the tension of the adhesive sheet AS attached to the adherend WK at a predetermined value by supporting the guide means 12 by the slider 14A of the 14 sliders 14A and linear as a driving device. The motor 15 and the carry-out power giving means 16 for giving the carry-out power to the original fabric RS are provided.
The guide means 12 is supported by the output shaft 12B of the linear motor 12A as a drive device, and the pressing member 12D that sandwiches the original fabric RS with the guide roller 12C that guides the original fabric RS and the original fabric RS are rotated. The tension detection roller 12G rotatably supported by the detection shaft 12F of the load cell 12E as a tension detection means capable of detecting the tension of the adhesive sheet AS, and the release sheet RL are folded back at the release edge 12H, and the release sheet RL is folded back from the release sheet RL. A peeling plate 12J as a peeling means for peeling the adhesive sheet AS, a drive roller 12M supported by an output shaft (not shown) of a rotary motor 12K as a driving device, and sandwiching the peeling sheet RL with a pinch roller 12L, and each of the above. It includes a guide frame 12N that directly or indirectly supports the members 12A to 12M.
The feeding output imparting means 16 is supported by a feeding frame 16C supported by the first slider 16B of the linear motor 16A as a driving device, a linear motor 16D as a driving device supported by the feeding frame 16C, and a slider 16E thereof. The rotary motor 16F as a drive device, the drive roller 16H supported by the output shaft (not shown) and sandwiching the adhesive sheet AS with the pinch roller 16G, and the feeding frame 16C supported by the automatic operation of the sheet sticking device EA. During the process, a predetermined tension is always applied to the adhesive sheet AS existing between the pinch roller 16G and the adhesive sheet AS, and the adhesive sheet AS is provided with a recovery roller 16J as a recovery means for recovery.

The pressing means 20 is supported by the linear motor 16A shared with the supply means 10, the linear motor 21 as a driving device supported by the second slider 16K, and the slider 21A of the linear motor 21, and presses the pressing roller 23. A speed difference is generated between the sheet feed speed V1 for feeding the adhesive sheet AS to the position PP (see FIG. 1C) and the relative movement speed V2 of the adherend WK and the pressing roller 23 to prevent the integral UP from warping. An operation panel capable of inputting at least one of a rotary motor 22 as a warp prevention means, a pressing roller 23 supported by an output shaft (not shown) of the rotary motor 22, and a sheet feed speed V1 and a relative movement speed V2. It is provided with an input means 24 such as a personal computer. In the case of the present embodiment, the pressing roller 23 rolls on the adherend WK with the adhesive sheet AS sandwiched between them, and presses and attaches the adhesive sheet AS to the adherend WK. Reference numeral 22 denotes a configuration in which a rotational force is applied to the pressing roller 23. The sheet feed rate V1 is the speed at which the pressing surface of the pressing roller 23 (the outermost outer peripheral surface of the pressing roller 23) rotates.
The sheet cutting means 30 is composed of a plurality of arms, and is a so-called articulated robot as a drive device capable of displaces what is supported by the tip arm 31A, which is a working portion, at any position and any angle within the working range. It includes a robot 31 and a cutting blade 32 as a cutting member supported by the tip arm 31A via a bracket 32A.

The adherend support means 40 is arranged in an outer table 41 whose upper surface is an outer support surface 41A and a recess 41B formed in the outer table 41, and is a decompression means (holding means) (holding means) (not shown) such as a decompression pump or a vacuum ejector. ) Is provided with an inner table 42 having an inner support surface 42A capable of holding the suction.

The operation of the above sheet pasting device EA will be described. In the following, a case where the warpage of the integrated object UP is prevented by making the sheet feed speed V1 faster than the relative movement speed V2 will be described.
First, with respect to the sheet sticking device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1 (A), the user of the sheet sticking device EA (hereinafter, simply referred to as “user”) is as shown in the figure. After setting the original fabric RS in, a signal for starting operation is input via an operation means (not shown) such as an operation panel or a personal computer. Further, the user inputs the sheet feed speed V1 as 33 mm / s and the relative movement speed V2 as 30 mm / s via the input means 24, and then inputs the start signal. Then, the supply means 10 drives the linear motion motor 12A, sandwiches the original fabric RS between the pressing member 12D and the guide roller 12C, and then drives the rotary motor 16F to guide the rotary motor 12A. Tension is applied to the extent that the pre-attachment sheet AS1, which is a part of the adhesive sheet AS existing between the roller 12C and the drive roller 16H, does not loosen. Next, the supply means 10 stops driving the rotary motor 16F, locks the rotary motor 16F so that the drive roller 16H does not rotate, and then drives the linear motor 15 to drive the guide means 12 in the left-right direction. It is moved, and a predetermined tension is applied to the sheet AS1 before attachment based on the detection result of the load cell 12E. When the raw fabric RS is fed out in the guide means 12, the supply means 10 drives the rotary motor 12K to apply a predetermined tension to the release sheet RL peeled from the adhesive sheet AS by the release plate 12J. The release sheet RL is sent in the direction of the collection roller 13 (the same applies hereinafter).

After that, when the user or a transportation means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the inner support surface 42A as shown in FIG. 1 (A), the adherend support means 40 drives a decompression means (not shown) to start adsorbing and holding the adherend WK on the inner support surface 42A. At this time, the adherend surface WK1 of the adherend WK and the outer support surface 41A are located in the same plane. Next, the supply means 10 and the pressing means 20 drive the linear motors 16D and 21, and as shown in FIG. 1B, the driving roller 16H and the pressing roller 23 are lowered, and the driving roller 16H and the pressing roller 23 use the driving roller 16H and the pressing roller 23. The adhesive sheet AS is pressed against the outer support surface 41A with a predetermined pressing force. Then, the pressing means 20 drives the linear motor 16A and the rotating motor 22, and as shown in FIG. 1 (C), the pressing roller 23 feeds the adhesive sheet AS to the pressing position PP of the pressing roller 23 at 33 mm / s. To the right at 30 mm / s. As a result, the pressing roller 23 rotates so as to fast-forward and slide on the adhesive sheet AS, and feeds the adhesive sheet AS to the pressing position PP of the pressing roller 23. The adhesive sheet AS sent to the pressing position PP in this way is stretched by the pressing force of the pressing roller 23 and attached to the adherend WK even though it is shrunk and deformed. As a result, the restoring stress from the stretching of the adhesive sheet AS (the force toward the center in the left-right direction of the adhesive sheet AS) is offset by the restoring stress from the shrinkage deformation (the force toward the left and right in the left-right direction of the adhesive sheet AS). It is possible to prevent the one-piece UP from being warped (hereinafter, this pattern is referred to as a "first pattern").

While the adhesive sheet AS is being attached as described above, the supply means 10 drives the linear motor 14, and the moving distance of the pressing roller 23 and the moving distance of the guiding means 12 are in a proportional relationship. In addition to lowering the guide means 12, the linear motor 15 is driven, and the guide means 12 is moved in the left-right direction so that a predetermined tension is applied to the pre-attached sheet AS1 based on the detection result of the load cell 12E. .. Next, the adhesive sheet AS is attached to the adherend surface WK1 and the outer support surface 41A of the adherend WK with a predetermined pressing force, and as shown in FIG. 1 (B), the pressing roller 23 is designated to the right of the outer table 41. When the position is reached, the supply means 10 stops driving the linear motors 14 and 16A. After that, the sheet cutting means 30 drives the articulated robot 31, and as shown in FIG. 1 (D), the cutting blade 32 is pierced into the adhesive sheet AS, and then the cutting blade 32 is inserted along the outer edge of the adherend WK. The adhesive sheet AS is cut by moving the adhesive sheet AS, and the adhesive sheet AS is attached to the adherend WK to form an integral UP. Next, the sheet cutting means 30 drives the articulated robot 31 to return the cutting blade 32 to the initial position, and then the adherend supporting means 40 stops driving the decompression means (not shown) on the inner support surface 42A. Releases the adsorption and retention of the adherend WK. Then, the user or a transportation means (not shown) removes the integrated product UP from the inner table 42 and transports the integrated product UP to the next step.

Next, the supply means 10 drives the linear motor 16A and the rotary motor 16F, and as shown in FIG. 1 (E), the pinch roller 16G and the drive roller 16H are moved to the right while rolling the drive roller 16H. , The adhesive sheet AS after cutting is peeled off from the outer support surface 41A. After that, when the adhesive sheet AS after cutting is peeled off from the outer support surface 41A, the supply means 10 stops driving the linear motor 16A and the rotary motor 16F, and then the supply means 10 and the pressing means 20 use the linear motor 16D. 21 is driven to raise the driving roller 16H and the pressing roller 23. Next, the supply means 10 drives the linear motion motor 12A to release the sandwiching of the original fabric RS between the pressing member 12D and the guide roller 12C, and locks the rotary motor 16F so that the drive roller 16H does not rotate. And. Then, the supply means 10 and the pressing means 20 drive the linear motors 14, 15, 16A to return the guiding means 12 to the initial position, and the driving roller 16H and the pressing roller 23 are returned to the initial positions to support the support roller. A new raw fabric RS is delivered from No. 11, and the same operation as described above is repeated thereafter.

The adherend WK is formed on the surface opposite to the adherend surface WK1 at a stage before the adhesive sheet AS is attached, a stage after the adhesive sheet AS is attached and a predetermined treatment is applied, and the like. There is something that warps so that a certain unattached surface WK2 is on the inside. In such a case, for example, the user inputs the sheet feed rate V1 of the pressing roller 23 to 27 mm / s via the input means 24, and the relative moving speed V2 to the right of the pressing roller 23 is set to 30 mm / s. input. As a result, the pressing roller 23 rotates so as to slide on the adhesive sheet AS with a delay, and sends the adhesive sheet AS to the pressing position PP of the pressing roller 23. The adhesive sheet AS sent to the pressing position PP in this way is attached to the adherend WK with tension by the pressing roller 23 that slides with a delay. As a result, the force of the adherend WK that tries to warp so that the unattached surface WK2 is on the inside is offset by the restoring stress from the tension of the adhesive sheet AS (the force toward the center in the left-right direction of the adhesive sheet AS). It is possible to prevent the one-piece UP from being warped (hereinafter, this pattern is referred to as a "second pattern").

According to the above embodiment, since the adhesive sheet AS is attached to the adherend WK by causing a speed difference between the sheet feed speed V1 and the relative movement speed V2, it does not require a large-scale equipment and is simple. It is possible to form an integral UP without warpage in the configuration.

The means and processes in the present invention are not limited as long as they can perform the operations, functions or processes described for the means and processes, much less the components of the mere embodiment shown in the above-described embodiment. It is not limited to the process at all. For example, the supply means may be any means as long as it can supply the adhesive sheet, and is not limited as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (others). The means and process are the same).

The supply means 10 adopts a raw fabric in which a plurality of single-wafer adhesive sheets AS are temporarily attached to the release sheet RL, and supplies the adhesive sheet AS in accordance with the movement of the adherend WK (for example, Japanese Patent Application Laid-Open No. 2019). It may be the configuration exemplified in the embodiment of −117834), a strip-shaped or single-wafer adhesive sheet AS to which the release sheet RL is not temporarily attached may be adopted, and the support roller 11 and the guide roller 12C may be adopted. Instead of each roller such as, the original fabric RS may be supported or guided by a plate-shaped member, a shaft member, etc., or the original fabric RS may be supported by folding it in a fan fold, for example, without winding it. Alternatively, at least one of the inclined posture maintaining means, the tension maintaining means, and the tension detecting means may be omitted, and the release sheet RL may be collected by folding it in a fan fold or chopping it with a shredder or the like without winding it. Alternatively, the release sheet RL may be simply collected without being wound or folded in a fan fold, the release sheet RL may not be collected, and the pinch roller 16G and the drive roller may be collected. The support roller 11, the guide means 12, the recovery roller 13, and the like may be appropriately moved to supply the adhesive sheet AS without or while the 16H is being moved, or the adhesive sheet AS may be bonded by a holding means such as a chuck cylinder or a suction pad. The sheet AS may be held and fed out, or the adhesive sheet AS after cutting from the outer support surface 41A by moving the adherend support means 40 without moving or moving the pinch roller 16G and the drive roller 16H. The adhesive sheet AS may be peeled off, or the pinch roller 16G and the drive roller 16H may not be raised and lowered. For example, the adhesive sheet AS after cutting may be held by a holding means such as a chuck cylinder or a suction pad, and the holding means and the holding means may be used. The adhesive sheet AS after cutting may be peeled off from the outer support surface 41A by relatively moving the adherend supporting means 40, or the peeling sheet RL may be peeled off from the peeling plate 12J without adopting the carry-out power imparting means 16. The adhesive sheet AS may be peeled off from the peeling sheet RL and supplied by folding back at the peeling edge 12H of the above.

The pressing means 20 may move the pressing roller 23 in the left-right direction by a driving device other than the linear motor 16A, or moves the adherend WK and the adhesive sheet AS without or while moving the pressing roller 23. The adhesive sheet AS may be pressed and attached to the adherend WK, or the pressing roller 23 may not be raised or lowered. As shown in FIG. 1 (F), the adhesive sheet for the pressing roller 23 may be attached. A pinch roller 25 may be adopted as a contact area increasing means for increasing the contact area of the AS. The adhesive sheet AS may or may not be sandwiched between the pinch roller 25 and the pressing roller 23.
In the above embodiment, the rotary motor 22 is exemplified as the warp prevention means, but the linear motor 16A that drives the second slider 16K in place of the rotary motor 22 or in combination with the rotary motor 22 is used as the warp prevention means. May be good. In this case, in order to reproduce the first pattern, the pressing means 20 drives the linear motor 16A and the rotating motor 22, and while feeding the adhesive sheet AS to the pressing position PP of the pressing roller 23 at the sheet feeding speed V1, this sheet The pressing roller 23 may be moved to the right at a relative moving speed V2 slower than the feed speed V1, and in order to reproduce the second pattern, the pressing roller 23 may be moved at a relative moving speed V2 faster than the sheet feeding speed V1. Should be moved to the right.
As the warp prevention means, the sheet feed speed V1 may be set to a speed faster or slower than 33 mm / s, and the relative moving speed V2 may be set to a speed faster or slower than 30 mm / s or 27 mm / s. The adhesive sheet AS may be fed at any sheet feeding speed V1 as long as a speed difference is generated between the sheet feeding speed V1 and the relative moving speed V2 to prevent the integrated object UP from warping. Alternatively, the adherend WK and the pressing roller 23 may be relatively moved at any relative moving speed V2.
As the warp prevention means, the sheet feed speed V1 and the relative movement speed V2 may be set to different speeds for each part of one adherend WK, or the sheet feed speed V1 and the relative movement speed V2 may be set to different speeds for each adherend WK. As the input means, an imaging means such as a camera or a projector that detects the relative moving speed V2, various sensors such as an optical sensor or an ultrasonic sensor, etc. are adopted, and the relative moving speed detected by the input means is adopted. The adhesive sheet AS may be fed to the pressing position PP of the pressing roller 23 at a sheet feeding speed V1 faster than V2 or a sheet feeding speed V1 slower than V2, or as an input means, the adhesive sheet AS may be sent to the pressing position PP of the pressing roller 23. A relative moving speed slower than the sheet feeding speed V1 detected by the input means by adopting an imaging means such as a camera or a projector that detects the sheet feeding speed V1 and various sensors such as an optical sensor and an ultrasonic sensor. The adherend WK and the pressing roller 23 may be relatively moved at V2 or a high relative moving speed V2.
As the warp prevention means, an input means 24 capable of inputting only the sheet feed rate V1 may be adopted, an input means 24 capable of inputting only the relative movement speed V2 may be adopted, and the sheet feed rate V1 and the sheet feed rate V1 and The input means 24 capable of inputting both the relative moving speeds V2 may be adopted, or the input means 24 may not be adopted. For example, the adhesive sheet AS is pressed at the preset sheet feed rate V1 at the pressing position PP. Or the adherend WK and the pressing roller 23 may be relatively moved at a preset relative moving speed V2.
The warp prevention means may be located between the supply means 10 and the pressing roller 23, and may be configured to send the adhesive sheet AS supplied by the supply means 10 to the pressing position PP. As shown in FIG. 1 (G), such warpage preventing means include, for example, a support plate 26A supported by the slider 21A of the linear motor 21 and a rotary motor 26B as a drive device supported by the support plate 26A. A warp prevention means composed of a drive roller 26C supported by an output shaft (not shown) of the rotary motor 26B and a pinch roller 26D supported by the support plate 26A and sandwiching the adhesive sheet AS between the drive roller 26C. 26 may be adopted, and as shown in FIG. 1H, a support plate 27A supported by the slider 21A of the linear motor 21 and a rotary motor 27B as a drive device supported by the support plate 27A. , A drive pulley 27C supported by an output shaft (not shown) of the rotary motor 27B, a driven pulley 27D supported by a support plate 27A, an endless belt 27E hung on the drive pulley 27C and the driven pulley 27D, and an endless belt. A warp prevention means 27 composed of a guide plate 27F for guiding the 27E and a pinch roller 27G for sandwiching the adhesive sheet AS between the endless belt 27E may be adopted.
As the pressing member, as shown in FIGS. 1 (G) and 1 (H), a gas spraying member 28 that attaches the adhesive sheet AS to the adherend WK by spraying a gas such as air or gas may be adopted. As the pressing member, as shown by the alternate long and short dash line in FIGS. 1 (G) and 1 (H), the pressing roller 23 may be adopted instead of the gas spraying member 28 or in combination with the gas spraying member 28. ..

Any sheet cutting means 30 may be used as a cutting member as long as it can cut the adhesive sheet AS. For example, Z in the extending direction of the cutting blade 32 (Z in the state of FIG. 1A). A cutting blade 32 having a ridge parallel to the ridge and an inclined ridge may be adopted, or a cutting blade 32 having a ridge parallel to the extending direction of the cutting blade 32 and the ridge being inclined may be adopted. Alternatively, a cutting blade 32 in which both the cutting edge and the peak are inclined with respect to the extending direction of the cutting blade 32 may be adopted, or a cutting provided with a so-called double-edged blade having a blade on the side that originally becomes the peak. A blade 32 may be adopted, a cutting blade 32 having another shape such as a round blade or a saw blade may be adopted, a heating wire such as a nichrome wire or a metal wire, or a linear shape such as a wire or a belt. A blade or the like may be adopted, or it may not be supported by the bracket 32A, and the adherend supporting means 40 is moved to cut the adhesive sheet AS without or while moving the cutting blade 32. Alternatively, as shown in FIG. 1D, the cutting blade 32 may be tilted in a direction in which the cutting edge side of the cutting blade 32 is away from the adherend WK to cut the adhesive sheet AS. The cutting blade 32 may be tilted in a direction in which the cutting edge side approaches the adherend WK to cut the adhesive sheet AS, or in a direction in which the cutting edge side approaches the adherend WK. The adhesive sheet AS may be cut without tilting, the adhesive sheet AS may be cut so as to have the same shape as the outer edge of the adherend WK, or the adherend may be cut from the outer edge of the adherend WK. The adhesive sheet AS may be cut at a position away from the WK, the adhesive sheet AS may be cut regardless of the shape of the outer edge of the adherend WK, or only the adhesive sheet AS may be cut. However, both the adhesive sheet AS and the adherend WK may be cut, the cutting blade 32 may be detachable or non-detachable, and the cutting blade 32 may be automatically attached / detached or manually attached / detached. , It may be performed by another device, or it may or may not be provided in the sheet sticking device EA of the present invention.

The adherend support means 40 may have any shape such as a circular, polygonal or elliptical shape for the outer support surface 41A and the inner support surface 42A, and the inner support surface 42A has the same size or different as the outer edge of the adherend WK. The size may be used, at least one of the outer support surface 41A and the inner support surface 42A may be capable of suction holding, or both of them may not be suction-holding, or the adherend may be inside the inner support surface 42A. A drive device or a lift stand capable of lifting up the WK may be provided, and when the adherend WK is supported, the adherend surface WK1 and the outer support surface 41A of the adherend WK are located in the same plane. It may or may not be provided, the outer support surface 41A and the inner support surface 42A may not be spaced from each other, and the sheet sticking device EA of the present invention may or may not be provided.

The material, type, shape, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangular shape, or any other shape, or may have an adhesive shape such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive sheet AS is adopted, it may be adhered by an appropriate method such as providing an appropriate coil heater for heating the adhesive sheet AS or a heating means such as a heating side of a heat pipe. Further, such an adhesive sheet AS has three layers, for example, a single layer having only an adhesive layer, a material having an intermediate layer between the base material and the adhesive layer, and a cover layer on the upper surface of the base material. Further, it may be a so-called double-sided adhesive sheet capable of peeling the base material from the adhesive layer, and the double-sided adhesive sheet may have a single layer or a multi-layer intermediate layer. , It may be a single layer or a multi-layer without an intermediate layer. The adherend WK includes, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording boards such as optical disks, glass plates, steel plates, pottery, wood boards or resins. It may be a single product or a composite product formed of two or more of them, and any form of a member or an article can be targeted. The adhesive sheet AS can be read in a functional and versatile manner, for example, an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, or the like. Sheets, films, tapes, etc. may be used.

The drive device in the above embodiment is an electric device such as a rotary motor, a linear motor, a linear motor, a single-axis robot, an articulated robot having two or three or more axes of joints, an air cylinder, a hydraulic cylinder, and a rodless. In addition to being able to employ actuators such as cylinders and rotary cylinders, it is also possible to adopt a combination of these directly or indirectly.
In the above embodiment, when a rotating member such as a roller is adopted, a driving device for rotationally driving the rotating member may be provided, or the surface of the rotating member or the rotating member itself can be deformed by rubber, resin, or the like. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or another member such as a shaft or a blade that rotates or does not rotate may be adopted instead of the roller. Alternatively, when a pressing means such as a pressing roller or a pressing head or a pressing member that presses a pressed object is adopted, a roller, a round bar, or a blade may be used in place of or in combination with the above-exemplified one. A member such as a material, rubber, resin, or sponge may be adopted, or a structure that presses by blowing a gas such as air or gas may be adopted, or a deformable member such as rubber or resin may be used to press. It may be composed of, or it may be composed of a member that does not deform, and when a peeling means such as a peeling plate or a peeling roller or a peeling member for peeling an object to be peeled is adopted, it is illustrated above. A plate-shaped member, a round bar, a roller, or the like may be used in place of or in combination with the material, or the material to be peeled off may be made of a deformable member such as rubber or resin, or may be deformed. It may be composed of members that do not, or when a member that supports (holds) a supported member (held member) such as a supporting (holding) means or a supporting (holding) member is adopted, a mechanical chuck or a chuck cylinder. Such as gripping means, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli suction, suction suction, drive equipment, etc. to support (hold) the supported member. Is used, or when a member to be cut such as a cutting means or a cutting member is cut, or a member having a cut or a cutting line is formed in the member to be cut, instead of the one illustrated above. Alternatively, use a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying gas or liquid, etc. to cut, or use a combination of appropriate drive equipment to cut. You may move what you want to do and cut it.

EA sheet pasting device 10 Supply means 20 Pressing means 22 Rotating motor (warp prevention means)
23 Pressing roller (pressing member)
24 Input means AS Adhesive sheet PP Pressing position UP Integrated product V1 Sheet feed speed V2 Relative movement speed WK Adhesion

Claims (5)

Supply means for supplying the adhesive sheet and
Pressing to move relative to the adherend, press and attach the adhesive sheet supplied by the supply means to the adherend, and form an integral body to which the adhesive sheet is attached to the adherend. It has a pressing means having a member and
The pressing means causes a speed difference between the sheet feeding speed of feeding the adhesive sheet to the pressing position of the pressing member and the relative moving speed of the adherend and the pressing member, and prevents the one piece from warping. A sheet affixing device characterized by being provided with a warp prevention means. The pressing member is configured to roll on the adherend with the adhesive sheet sandwiched between them, and press and attach the adhesive sheet to the adherend.
The sheet sticking device according to claim 1, wherein the warp preventing means is configured to apply a rotational force to the pressing member. The first aspect of the present invention is characterized in that the warp prevention means is located between the supply means and the pressing member, and the adhesive sheet supplied by the supply means is sent to the pressing position. The described sheet pasting device. The sheet sticking device according to any one of claims 1 to 3, wherein the pressing means includes an input means capable of inputting at least one of the sheet feeding speed and the relative moving speed. The supply process for supplying the adhesive sheet and
The pressing member is relatively moved with respect to the adherend, the adhesive sheet supplied in the supply step is pressed against the adherend and attached, and the integral body to which the adhesive sheet is attached is attached to the adherend. Perform the pressing process to form
In the pressing step, a speed difference is generated between the sheet feeding speed of feeding the adhesive sheet to the pressing position of the pressing member and the relative moving speed of the adherend and the pressing member to prevent the one piece from warping. A sheet pasting method characterized by performing a warp prevention process.

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