JP6576108B2 - 電力用半導体装置 - Google Patents
電力用半導体装置 Download PDFInfo
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- JP6576108B2 JP6576108B2 JP2015115402A JP2015115402A JP6576108B2 JP 6576108 B2 JP6576108 B2 JP 6576108B2 JP 2015115402 A JP2015115402 A JP 2015115402A JP 2015115402 A JP2015115402 A JP 2015115402A JP 6576108 B2 JP6576108 B2 JP 6576108B2
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Description
また、緩衝板接合層を、接合材料であるはんだに、はんだよりも熱伝導率が低い金属ボールまたは金属フィラーを含む層とした。
また、緩衝板接合層を、接合材料であるはんだに、樹脂を含む層とした。
図1は本発明の実施の形態1による電力用半導体装置の主要部の構成を示す部分上面図であり、図2は図1のA−Aにおける断面図である。セラミックからなる絶縁基板1の表面に形成されている第1の回路パターン2aに、接合後の厚みが50μmの焼結性のAg粒子を含む素子接合材3を介して、厚み150μmのSiC基材の電力用半導体素子4が固定されている。電力用半導体素子4上に形成された電極パッド5の表面側には接合後の厚みが100μmの鉛フリーはんだを基材とした緩衝板接合層7を介して緩衝板8が固定されており、緩衝板8と絶縁基板1の表面に形成されている第2の回路パターン2bとが、配線部材6としてのCuを主材料とする直径が500μmの複数本の金属ワイヤによって電気的に接続されている。以後、配線部材6として金属ワイヤを用いた例で説明するが、配線部材6は、所定の電流を流すことができる部材であればワイヤ形状でなくても板状など、形状は限定しない。第1の回路パターン2a、第2の回路パターン2b、電力用半導体素子4、緩衝板8、配線部材6(以後金属ワイヤ6として説明する)を含む配線を保護するために封止材が封入されているが、図1、図2では封止材を取り去った状態で図示している。絶縁基板1の裏面に形成されている裏面回路パターン22は、例えば図示しないヒートシンクなどに絶縁基板1を接合するために設けられている。
の樹脂や,はんだより熱伝導率の低い金属ボール,フィラーなどを含ませる方法などがある。このように、緩衝板接合層7の熱伝導率が、接合材料である緩衝板接合材70の熱伝導率よりも低い緩衝板接合層7とするため、基材の接合材料である緩衝板接合材70に空隙を含ませることにより、または空隙の代わりに予め緩衝板接合材70に緩衝板接合材70よりも熱伝導率が低い材料を含ませることにより緩衝板接合層7を形成すればよい。
図4は、本発明の実施の形態2に係る電力用半導体装置の構成を示す断面図である。図5は、緩衝板8を搭載する前の電力用半導体素子の上面図である。緩衝板8は、面方向の線膨張係数が電力用半導体素子4と金属ワイヤ6の間の値を有し、緩衝板接合層7を介して、電極パッド5と接合している。緩衝板接合層7を形成する緩衝板接合材70は、焼結性のAg粒子を焼結させた材料であり、図5に示すよう、焼結前、焼結性のAg粒子を電極パッド5上に網目状に配置して、焼結させることにより空隙を含んだ緩衝板接合層7を形成する。焼結性のAg粒子は必ずしも網目状に配置する必要は無く、分散して配置すればよい。電力用半導体素子4を第1の回路パターン2aに固定する方法と同様に、緩衝板8と電力用半導体素子4を加熱した状態で加圧することで接合することにより、分散して配置された焼結性のAg粒子が焼結し、焼結性のAg粒子が配置されなかった部分は空隙となり、緩衝板接合層7を、焼結性のAg粒子が焼結した緩衝板接合材70に空隙71を含む層とすることができる。緩衝板8は、Cu/Fe−Ni合金/Cuの3層構造で総厚0.2mmの板で、層厚比はCu:Fe−Ni合金:Cu=1:1:1、面方向の線膨張係数は約11ppm/Kと、電力用半導体素子4とCuを主材料とする金属ワイヤ6の間の線膨張係数となるよう調整されている。それ以外の構成は実施の形態1と同じである。
図6は、本発明の実施の形態3に係る電力用半導体装置の構成を示す部分上面図であり、図7は、図6のB−B位置での断面図である。絶縁基板1の表面に形成された第1の回路パターン2aに、網目状に形成された焼結性のAg粒子を含む素子接合材3を介して、SiC基材のスイッチング用半導体素子41と、還流用などの電力用ダイオード42が固定されている。スイッチング用半導体素子41の表面には、スイッチング用半導体素子41によってスイッチングする主電流を流す電極パッド51と、制御用の信号電流を流す第2の電極パッド52が領域を分けて形成されており、電極パッド51上には、実施の形態1または実施の形態2で説明した緩衝板接合層7を介して緩衝板8が固定されている。電力用ダイオード42の表面には電極パッド53が形成されている。スイッチング用半導体素子41の電極パッド51上に搭載された緩衝板8と絶縁基板1の表面に形成された第2の回路パターン2bは、直径が500μmのCuを主材料とする金属ワイヤ(配線部材)6によって電気的に接続されている。また、電力用ダイオード42の電極パッド53には同じく直径が500μmのCuを主材料とする第2の配線部材61が直接接合されており、第2の配線部材61が第2の回路パターン2bに電気的に接続されている。スイッチング用半導体素子41の第2の電極パッド52は、直径200μmのCuを主材料とする第3の配線部材62によって、絶縁基板1上に形成された第3の回路パターン2cと接続されている。電極パッド51、52、53は全て、電気めっきにより厚み10μmのCuが形成されている。それ以外の構成は実施の形態1または実施の形態2と同じである。
Cuめっきにより形成されているため、同一金属同士の接合により、未接合部の少ない、高い強度で接合が可能であり、接合部寿命を確保することができる。
Claims (11)
- 絶縁基板に形成された回路パターンに接合された電力用半導体素子と、この電力用半導体素子の前記回路パターンに接合された面とは反対側の面に形成された電極パッドに電気的に接続される配線部材を備えた電力用半導体装置において、
前記配線部材は前記電極パッドと緩衝板を介して接合されており、前記緩衝板が前記電極パッドと緩衝板接合層を介して接合され、この緩衝板接合層は、接合材料であるはんだに、空隙を含む層であることを特徴とする電力用半導体装置。 - 絶縁基板に形成された回路パターンに接合された電力用半導体素子と、この電力用半導体素子の前記回路パターンに接合された面とは反対側の面に形成された電極パッドに電気的に接続される配線部材を備えた電力用半導体装置において、
前記配線部材は前記電極パッドと緩衝板を介して接合されており、前記緩衝板が前記電極パッドと緩衝板接合層を介して接合され、この緩衝板接合層は、接合材料であるはんだに、前記はんだよりも熱伝導率が低い金属ボールまたは金属フィラーを含む層であることを特徴とする電力用半導体装置。 - 絶縁基板に形成された回路パターンに接合された電力用半導体素子と、この電力用半導体素子の前記回路パターンに接合された面とは反対側の面に形成された電極パッドに電気的に接続される配線部材を備えた電力用半導体装置において、
前記配線部材は前記電極パッドと緩衝板を介して接合されており、前記緩衝板が前記電極パッドと緩衝板接合層を介して接合され、この緩衝板接合層は、接合材料であるはんだに、樹脂を含む層であることを特徴とする電力用半導体装置。 - 前記樹脂は、耐熱温度が250℃以上の樹脂であることを特徴とする請求項3に記載の電力用半導体装置。
- 前記緩衝板の面方向の線膨張係数の値が前記配線部材の線膨張係数と前記電力用半導体素子の線膨張係数の間の値であって前記配線部材の線膨張係数よりも前記電力用半導体素子の線膨張係数に近い値であることを特徴とする請求項1から4のいずれか1項に記載の電力用半導体装置。
- 前記緩衝板は、前記配線部材が接合される面となる表面層、および前記緩衝板接合層が接合される裏面層がCuであり、前記表面層と前記裏面層に挟まれた中間層が、Cuよりも熱伝導率が低く、Cuよりも線膨張係数が小さい金属または金属合金であることを特徴とする請求項1から5のいずれか1項に記載の電力用半導体装置。
- 前記配線部材がCuを主材料とする材料で形成されていることを特徴とする請求項1から6のいずれか1項に記載の電力用半導体装置。
- 前記電力用半導体素子がスイッチング用半導体素子であり、前記スイッチング用半導体素子の前記回路パターンに接合された面とは反対側の面に、前記電極パッドとは別の第2の電極パッドが前記電極パッドと領域を分けて形成されており、前記第2の電極パッドには、信号電流を流すための第3の配線部材が直接接合されていることを特徴とする請求項1から7のいずれか1項に記載の電力用半導体装置。
- 前記回路パターンの前記スイッチング用半導体素子が接合されていない位置に電力用ダイオードが接合されており、前記電力用ダイオードの前記回路パターンに接合された面とは反対側の面に形成された電極パッドに前記配線部材とは別の第2の配線部材が、直接接合されていることを特徴とする請求項8に記載の電力用半導体装置。
- 前記電力用半導体素子はワイドバンドギャップ半導体により形成されていることを特徴とする請求項1から9のいずれか1項に記載の電力用半導体装置。
- 前記ワイドバンドギャップ半導体は、炭化珪素、窒化ガリウム系材料またはダイアモンドの半導体であることを特徴とする請求項10に記載の電力用半導体装置。
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