JP6574674B2 - 塗装の検査装置及び検査方法 - Google Patents
塗装の検査装置及び検査方法 Download PDFInfo
- Publication number
- JP6574674B2 JP6574674B2 JP2015203312A JP2015203312A JP6574674B2 JP 6574674 B2 JP6574674 B2 JP 6574674B2 JP 2015203312 A JP2015203312 A JP 2015203312A JP 2015203312 A JP2015203312 A JP 2015203312A JP 6574674 B2 JP6574674 B2 JP 6574674B2
- Authority
- JP
- Japan
- Prior art keywords
- coating
- laser beam
- inspection
- image
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015203312A JP6574674B2 (ja) | 2015-10-15 | 2015-10-15 | 塗装の検査装置及び検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015203312A JP6574674B2 (ja) | 2015-10-15 | 2015-10-15 | 塗装の検査装置及び検査方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017075848A JP2017075848A (ja) | 2017-04-20 |
| JP2017075848A5 JP2017075848A5 (enExample) | 2018-09-27 |
| JP6574674B2 true JP6574674B2 (ja) | 2019-09-11 |
Family
ID=58551065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015203312A Active JP6574674B2 (ja) | 2015-10-15 | 2015-10-15 | 塗装の検査装置及び検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6574674B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102056759B1 (ko) * | 2018-09-03 | 2019-12-17 | 재단법인 오송첨단의료산업진흥재단 | 영상처리 기반의 수분 및 광 투과도 측정 시스템 및 이를 이용한 수분 및 광 투과도 측정 방법 |
| KR102528963B1 (ko) * | 2021-01-29 | 2023-05-08 | 케이앤피로지스 주식회사 | Pdi 검사 장치 |
| KR102528958B1 (ko) * | 2021-01-29 | 2023-05-08 | 케이앤피로지스 주식회사 | Pdi 검사 장치 |
| JP7718132B2 (ja) * | 2021-07-16 | 2025-08-05 | 日産自動車株式会社 | 自動車製造ラインの塗装欠陥表示方法及びシステム |
| JP7767754B2 (ja) * | 2021-07-16 | 2025-11-12 | 日産自動車株式会社 | 自動車製造ラインの塗装欠陥表示方法及びシステム |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5248876A (en) * | 1992-04-21 | 1993-09-28 | International Business Machines Corporation | Tandem linear scanning confocal imaging system with focal volumes at different heights |
| US6853926B2 (en) * | 2002-06-05 | 2005-02-08 | Research Foundation Of Cuny | Systems and methods for non-destructively detecting material abnormalities beneath a coated surface |
| JP4387165B2 (ja) * | 2003-11-17 | 2009-12-16 | 旭化成ケミカルズ株式会社 | 塗膜中顔料の配向性評価方法 |
| US9696264B2 (en) * | 2013-04-03 | 2017-07-04 | Kla-Tencor Corporation | Apparatus and methods for determining defect depths in vertical stack memory |
| JP6435106B2 (ja) * | 2014-03-19 | 2018-12-05 | 株式会社ティーワイテクノ | 塗装膜解析方法 |
-
2015
- 2015-10-15 JP JP2015203312A patent/JP6574674B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017075848A (ja) | 2017-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7706600B2 (ja) | 欠陥良否判定方法及び装置 | |
| JP6574674B2 (ja) | 塗装の検査装置及び検査方法 | |
| US20050280807A1 (en) | Method and system for inspecting a wafer | |
| US8614415B2 (en) | Defect inspection method of fine structure object and defect inspection apparatus | |
| JP6750793B2 (ja) | 膜厚測定装置及び膜厚測定方法 | |
| JP2008268387A (ja) | 共焦点顕微鏡 | |
| JP2012518798A (ja) | 半導体ウエハ検査装置および方法 | |
| KR102008890B1 (ko) | 3차원 프로파일 측정 방법 | |
| US12259232B2 (en) | Method and inspection device for optically inspecting a surface | |
| JP2012174896A (ja) | 検査装置及び欠陥検査方法 | |
| JP2004012301A (ja) | パターン欠陥検出方法およびその装置 | |
| US20110255097A1 (en) | Method and system for evaluating a height of structures | |
| JP2013235202A (ja) | ハイブリッドレーザ走査装置 | |
| JP2005189069A (ja) | 表面形状測定方法及び表面形状測定装置 | |
| JP2006329751A (ja) | 表面形状測定方法及び表面形状測定装置 | |
| CN113966527B (zh) | 激光修复方法、激光修复装置 | |
| CN114096368B (zh) | 激光修复方法、激光修复装置 | |
| JP5114808B2 (ja) | 検査装置及び欠陥検査方法 | |
| JP2009293925A (ja) | 光学検査装置の誤差補正装置 | |
| JP5281815B2 (ja) | 光学デバイス欠陥検査方法及び光学デバイス欠陥検査装置 | |
| JP2016102713A (ja) | 形状等測定装置 | |
| JP5325481B2 (ja) | 光学素子の測定方法及び光学素子の製造方法 | |
| KR102737491B1 (ko) | 검사장비의 광학계 | |
| KR20070091236A (ko) | 결함 입자 측정 장치 및 결함 입자 측정 방법 | |
| JP2022047966A (ja) | フォトマスクブランクス、フォトマスクブランクスの製造方法、学習方法およびフォトマスクブランクスの検査方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180820 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180820 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190521 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190522 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190709 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190806 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190819 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6574674 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |