JP6571963B2 - Inner surface inspection device - Google Patents

Description

  The present invention relates to an inner surface inspection apparatus that inspects the state of an inner surface of a hole.

  Various devices such as electric devices and automobiles have a cylindrical member or a member having a cylindrical hole. The member having such a shape is a pipe that allows fluid to pass therethrough or a portion that fits with another member. For this reason, it is calculated | required that a cylindrical inner surface does not have defects, such as a crack and a bubble, and the error of a shaping | molding precision is small. For example, in a cylinder used for an automobile engine, a cylindrical inner surface needs to be finished with high accuracy.

Therefore, conventionally, an inner surface inspection apparatus has been used for inspecting the presence or absence of defects on the inner surface of a hole in a cylindrical member or a hole portion of the member. A conventional inner surface inspection apparatus is described in, for example, Japanese Patent Application Laid-Open No. 2009-69374.
JP 2009-69374 A

  A conventional inner surface inspection apparatus described in Japanese Patent Application Laid-Open No. 2009-69374 has a cylindrical body having a slope as a reflecting portion at the tip. By illuminating the illumination light from the base end side of the cylinder body and placing the tip of the cylinder body inside the hole, the inner surface shape of the hole is visualized as an image on the base end side of the cylinder body, and the inner surface of the hole is defective. Judge whether there is.

  In the inner surface inspection apparatus described in Japanese Patent Laid-Open No. 2009-69374, ring illumination in which ring-shaped light having a predetermined angle with respect to the axial direction is incident is used as illumination for illuminating the inner surface of the hole. In such ring illumination, since the incident angle to the cylindrical body has a certain width, when the unevenness of the defect is small, the luminance hardly changes around the unevenness. For this reason, it is difficult to detect defects with small irregularities in ring illumination.

  An object of the present invention is to provide a technique capable of improving the detection accuracy of various types of defects in an inner surface inspection apparatus.

  An exemplary first invention of the present application includes a rod lens extending in an axial direction from a proximal end to a distal end, and at least the distal end is disposed inside a hole of the inspection object, and the inner surface of the inspection object forming the hole An inner surface inspection apparatus for inspecting the state of the rod lens, the columnar rod lens extending in the axial direction having a reflecting portion on the distal end side, and disposed on the proximal end side of the rod lens, and predetermined with respect to the axial direction A ring illumination that enters the rod lens with a ring-shaped light having an angle of: a coaxial illumination that is disposed on the proximal end side of the rod lens and that is substantially parallel to the axial direction and incident on the rod lens; An imaging unit that is disposed on the proximal end side of the rod lens and that images light from the reflection unit, and an illumination control unit that controls the ring illumination and the coaxial illumination, and the reflection unit is Incident from outside in the radial direction And the light reflected to the proximal side, the illumination control unit in accordance with the light quantity set value is adjustable at least one of the light amount of the ring illumination and the coaxial illumination in a plurality of stages.

  An exemplary second invention of the present application has a reflecting portion that reflects light incident from the radially outer side toward the proximal end side, and an inner surface including a columnar rod lens extending in the axial direction from the proximal end to the distal end. An inner surface inspection method using an inspection device, wherein a) a step of arranging at least the tip of the inner surface inspection device inside a hole of an object to be inspected, and b) ring illumination on the proximal end side of the rod lens The ring-shaped light having a predetermined angle with respect to the axial direction is incident on the light source, and the light is acquired on the proximal end side of the rod lens while being incident from the coaxial illumination with light substantially parallel to the axial direction. A step of inspecting the state of the inner surface of the object to be inspected forming the hole based on an image on the radially outer side of the reflecting portion; c) at least before the step b) of the ring illumination at the time of inspection. Light intensity setting that represents the light intensity and the light intensity of the coaxial illumination Comprising the step of setting a.

  According to the first and second exemplary inventions of the present application, the detection accuracy of various types of defects can be improved.

FIG. 1 is a schematic view of an inner surface inspection apparatus according to the first embodiment. FIG. 2 is a cross-sectional view of the apparatus main body according to the first embodiment. FIG. 3 is a block diagram showing a control system of the inner surface inspection apparatus according to the first embodiment. FIG. 4 is a flowchart showing an inspection process in the inner surface inspection apparatus. FIG. 5 is a flowchart showing a setting process in the inner surface inspection apparatus.

  Hereinafter, exemplary embodiments of the present invention will be described with reference to the drawings. In the present application, the direction parallel to the central axis of the rod lens is referred to as “axial direction”, the direction orthogonal to the central axis is referred to as “radial direction”, and the direction along the arc centered on the central axis is referred to as “circumferential direction”. Called.

<1. First Embodiment>
<1-1. Configuration of inner surface inspection device>
FIG. 1 is a perspective view of an inner surface inspection apparatus 1 according to the first embodiment of the present invention. FIG. 2 is a cross-sectional view of the apparatus main body 20. As shown in FIG. 1, the inner surface inspection apparatus 1 includes an apparatus main body 20, an operation unit 30, a stage 40, and a control unit 50.

  The inner surface inspection apparatus 1 is an apparatus for inspecting the state of the inner surface 810 of the inspection object 8 forming the hole 81 by disposing at least the tip of a rod lens 21 described later inside the hole 81 of the inspection object 8. The inner surface inspection apparatus 1 inspects, for example, the inner surface of a cylindrical member and the inner surface of a hole included in the member, which constitute various devices such as electric devices and automobiles.

  As shown in FIGS. 1 and 2, the apparatus main body 20 includes a rod lens 21, a ring illumination 22, a coaxial illumination 23, an imaging unit 24, and a casing 25. The rod lens 21, the ring illumination 22, the coaxial illumination 23, and the imaging means 24 are each fixed to the casing 25.

  The rod lens 21 is a cylindrical lens that extends in the axial direction along the central axis 9. Hereinafter, of both ends of the rod lens 21, an end fixed to the casing 25 is referred to as a “base end”, and an end disposed inside the hole 81 is referred to as a “tip”. The rod lens 21 of the present embodiment is made of glass. The rod lens 21 may be formed of other materials such as a resin as long as it has a high light transmittance.

  The rod lens 21 has a recess 211 that is recessed from the distal end surface toward the proximal end. The concave portion 211 is formed in a conical shape whose diameter increases from the proximal end side toward the distal end side. The surface of the rod lens 21 that constitutes the concave portion 211 is polished, and the surface constitutes the reflection portion 212. The reflection unit 212 reflects light incident from the radially outer side to the proximal end side and reflects light incident from the proximal end side to the radially outer side.

  Note that the conical bus of the reflecting portion 212 is 45 degrees with respect to the central axis 9. As a result, the light incident from the radially outer side toward the central axis 9 is reflected from the distal end side to the proximal end side along the central axis 9 and reflected by the outer peripheral surface of the rod lens 21 at the reflecting portion 212. Without going to the proximal end of the rod lens 21.

  In the present embodiment, the surface of the rod lens 21 constituting the concave portion 211, that is, the reflecting portion 212 is mirror-finished. Thereby, the reflectance in the reflection part 212 can be improved. Further, the reflecting portion 212 is disposed on the most distal end side of the rod lens 21. Thereby, even if it is a case where the hole of a to-be-inspected object is long in an axial direction, it can inspect to the back.

  The end portion on the proximal end side of the rod lens 21 is a proximal end surface 213 polished in a flat shape. The proximal end surface 213 is disposed perpendicular to the central axis 9. An end portion on the proximal end side of the rod lens 21 including the proximal end surface 213 is disposed in the casing 25. Thereby, it is suppressed that the light from the outside enters into the rod lens 21 from the base end surface 213.

  The ring illumination 22 is an illumination device that makes ring-shaped light having a predetermined angle with respect to the axial direction incident on the rod lens 21. The ring illumination 22 is disposed on the proximal end side of the rod lens 21. The ring illumination 22 has an opening 221 penetrating in the axial direction at the center when viewed in the axial direction. The ring illumination 22 is arranged at a position where the center of the opening 221 and the central axis 9 substantially coincide. The ring illumination 22 irradiates the base end surface 213 with ring-shaped light having a predetermined angle with respect to the axial direction. Here, the “predetermined angle” indicates a certain range within a range of 5 degrees or more and less than 90 degrees.

  At least a part of the light emitted from the ring illumination 22 enters the rod lens 21 from the base end face 213 as reflected by the broken line in FIG. Reflected outward in the radial direction by the reflecting portion 212. Thereby, a part of the light emitted from the ring illumination 22 is directed radially outward of the reflecting portion 212 and irradiates the inner surface 810 of the hole 81 of the inspection object 8.

  The coaxial illumination 23 is an illumination device that makes light substantially parallel to the axial direction incident on the rod lens 21. The coaxial illumination 23 is disposed on the proximal end side of the rod lens 21. The coaxial illumination 23 includes a half mirror 231 and a light source 232. The half mirror 231 is a beam splitter disposed at a position overlapping the rod lens 21 in the axial direction. The reflection surface of the half mirror 231 is disposed at an angle of 45 degrees with respect to the axial direction. The light source 232 emits light from the radially outer side of the half mirror 231 toward the half mirror 231.

  With this configuration, the light emitted from the light source 232 is reflected by the reflecting surface of the half mirror 231 toward the front end side in the axial direction. Thereby, the light irradiated from the light source 232 becomes light substantially parallel to the axial direction and travels toward the base end face 213. Here, “substantially parallel to the axial direction” means that the angle formed with respect to the central axis 9 is less than 5 degrees.

  At least part of the light emitted from the coaxial illumination 23 enters the rod lens 21 from the base end surface 213 through the opening 221 of the ring illumination 22 as indicated by a two-dot chain line in FIG. The light travels inward toward the tip, and is reflected by the reflecting portion 212 in the radially outer direction and in a direction substantially perpendicular to the axial direction. Thereby, a part of the light emitted from the coaxial illumination 23 is directed radially outward of the reflecting portion 212 and irradiates the inner surface 810 of the hole 81 of the inspection object 8.

  The imaging unit 24 is a CCD camera having a lens 241. The imaging means 24 is disposed on the proximal end side of the rod lens 21 and images the axial light from the reflection unit 212. In the present embodiment, the lens 241 of the imaging unit 24 is disposed on the opposite side of the rod lens 21 with respect to the opening 221 of the ring illumination 22 and the half mirror 231 of the coaxial illumination 23. That is, the lens 241 faces the base end surface 213 of the rod lens 21 in the axial direction through the opening 221 and the half mirror 231. As a result, the imaging unit 24 can capture an image on the radially outer side of the reflecting portion 212 reflected on the reflecting portion 212 of the rod lens 21 via the base end face 213, the opening 221 and the half mirror 231.

  The operation unit 30 includes a monitor 31 and an input unit 32. The monitor 31 is a part for displaying various information related to each process of the inner surface inspection apparatus 1 (for example, position information of the mounting table 41, imaging data S24, light amount setting value S50, etc.). As the monitor 31, for example, a display device such as a liquid crystal display is used.

  The input unit 32 is a part for inputting various commands to the control unit 50. An operator of the inner surface inspection apparatus 1 can operate the input unit 32 while checking the monitor 31. For the input unit 32, for example, a keyboard or a mouse is used.

  Note that as the operation unit 30, a device in which the monitor 31 and the input unit 32 are integrated, such as a touch panel display, may be used.

  The stage 40 includes a mounting table 41 and a stage driving unit 42. The apparatus main body 20 is mounted on the mounting table 41. The stage drive unit 42 is, for example, a moving mechanism for the mounting table 41 having a motor inside. The stage drive unit 42 includes an x-axis direction (the axial direction of the apparatus main body 20 and a horizontal direction), a y-axis direction (a horizontal direction orthogonal to the x-axis direction), and a z-axis direction (the x-axis direction and The position in the vertical direction perpendicular to the y-axis direction) is moved.

  In the present embodiment, when the operator inputs a command to a position adjusting unit 51 (to be described later) of the control unit 50 via the input unit 32, the position adjusting command S51 is input from the position adjusting unit 51 to the stage driving unit 42. . Thereby, the stage drive part 42 adjusts the position of each direction of the mounting base 41 according to position adjustment instruction | command S51. The position adjustment unit 51 may calculate a target position in each direction of the mounting table 41 based on, for example, a signal from a position detection sensor (not shown), and output the position adjustment command S51.

  FIG. 3 is a block diagram showing a control system of the inner surface inspection apparatus 1. As shown in FIGS. 1 and 3, the control unit 50 is electrically connected to each part of the apparatus main body 20, the operation unit 30, and the stage 40. The control unit 50 of this embodiment is configured by a personal computer. As conceptually shown in FIG. 3, the control unit 50 includes a position adjustment unit 51, an illumination control unit 52, a defect detection unit 53, a defect storage unit 54, a sample storage unit 55, and a light amount setting value. A determination unit 56 and a set value storage unit 57 are included. The functions of these units 51 to 57 are realized by a computer as the control unit 50 operating according to a computer program.

  The position adjustment unit 51 outputs a position adjustment command S51 to the stage drive unit 42 in order to cause the stage drive unit 42 to place the position of the mounting table 41 at a desired position. When the movement command S32 is input from the input unit 32, the position adjustment unit 51 adjusts the position of the mounting table 41 according to the movement command S32. Further, the position adjusting unit 51 adjusts the position of the mounting table 41 so that the reflecting unit 212 is sequentially moved in the x-axis direction during the inspection process.

  The illumination control unit 52 controls the ring illumination 22 and the coaxial illumination 23. Specifically, the illumination control unit 52 controls on / off of the ring illumination 22 and the coaxial illumination 23 according to a light amount setting value S50 described later, and adjusts the light amount of the ring illumination 22 in a plurality of stages. In addition, although the illumination control part 52 of this embodiment can adjust the light quantity of the ring illumination 22 in several steps, the light quantity of the coaxial illumination 23 is only one step when it is on. However, in the present invention, the light amount of the ring illumination may be set to only one step, and the light amount of the coaxial illumination may be adjusted to a plurality of steps. Or you may enable it to adjust both the light quantity of ring illumination and the light quantity of coaxial illumination in several steps.

  The captured image data S <b> 24 is input from the imaging unit 24 to the defect detection unit 53. The defect detection unit 53 analyzes the imaging data S24 that is an image captured by the imaging unit 24, and detects defect position data S53 on the inner surface 810 of the inspection object 8.

  In the inspection process, the defect detection unit 53 outputs the imaging data S24 and the defect position data S53 to the monitor 31 of the operation unit 30. Thereby, the monitor 31 displays the imaging data S24 captured by the imaging unit 24 and the defect position data S53 detected by the defect detection unit 53.

  In the setting step described later, the defect detection unit 53 outputs defect position data S53 as a detection result to the defect storage unit 54. In the setting process, the defect detection unit 53 may output the imaging data S24 and the defect position data S53 to the monitor 31 of the operation unit 30.

  The defect storage unit 54 stores detection data S54 that is a set of the light amount setting value S50 and the defect position data S53 in the light amount setting value S50. The defect storage unit 54 of the present embodiment stores a plurality of sets of detection data S54.

  The sample storage unit 55 stores sample data S55 indicating a defect position of a sample inspection object prepared in advance.

  The light amount setting value determination unit 56 compares the detection data S54 stored in the defect storage unit 54 with the sample data S55 stored in the sample storage unit 55 to determine the light amount setting value S50. Then, the light amount setting value determination unit 56 outputs the determined light amount setting value S50 to the setting value storage unit 57.

  In the present embodiment, the light amount setting value S50 indicates the percentage of the maximum light amount for each of the illuminations 22 and 23 as a percentage. Therefore, for example, when the light amount of the ring illumination 22 is 50% of the maximum light amount and the light amount of the coaxial illumination 23 is 100% of the maximum light amount (that is, simply on), the light amount setting value S50 [50%, 100% ].

  The set value storage unit 57 stores a light amount set value S50. The light amount setting value S50 is rewritten when the light amount setting value S50 is input from the light amount setting value determining unit 56 or when the operator inputs the light amount setting value S50 to the input unit 32. In the inspection process, the illumination control unit 52 adjusts the light amount of the ring illumination 22 in accordance with the light amount set value S50 stored in the set value storage unit 57.

  As described above, the inner surface inspection apparatus 1 uses two types of illumination of the ring illumination 22 and the coaxial illumination 23 as illumination for illuminating the inner surface 810 of the object 8 to be inspected.

  The ring illumination 22 irradiates the base end surface 213 of the rod lens 21 in a direction from the radially outer side to the radially inner side. That is, when the ring illumination 22 is driven, ring-shaped light having a predetermined angle in the axial direction is incident on the rod lens 21. When only the ring illumination 22 is used as illumination for illuminating the inner surface 810 of the inspection object 8, the incident angle to the rod lens 21 has a certain width. In this case, since the inner surface 810 is illuminated with light including various angles, if the unevenness of the defect formed on the inner surface 810 is small, the luminance hardly changes around the defect. Therefore, it is difficult to detect defects with small irregularities only with the ring illumination 22.

  On the other hand, the coaxial illumination 23 irradiates the base end surface of the rod lens 21 with light substantially parallel to the central axis 9. That is, when the coaxial illumination 23 is driven, light substantially parallel to the axial direction is incident on the rod lens 21. Therefore, the inner surface 810 of the inspection object 8 is illuminated by light substantially perpendicular to the central axis 9. When only the coaxial illumination 23 is used as illumination for illuminating the inner surface 810 of the inspection object 8, the incident angle to the rod lens 21 has almost no width. In this case, since the inner surface 810 is illuminated only with light directed in a certain direction, even if the unevenness of the defect formed on the inner surface 810 is small, a change in luminance is likely to occur around the defect. Therefore, even with only the coaxial illumination 23, it is easy to detect defects with small irregularities.

  However, when only the coaxial illumination 23 is used, even when a cleaning mark having no unevenness is adhered to the inner surface 810, a change in luminance may occur around the cleaning mark. For this reason, when only the coaxial illumination 23 is used, there is a possibility that a dirt having unevenness such as a cleaning mark may be mistaken for a defect having unevenness.

  In this inner surface inspection apparatus 1, by using both the ring illumination 22 and the coaxial illumination 23 at the same time, it is possible to suppress the detection leakage and the erroneous detection as described above. In particular, the inner surface inspection apparatus 1 can adjust the light quantity of at least one of the ring illumination 22 and the coaxial illumination 23 in a plurality of stages. Thereby, the ratio of the light quantity of the ring illumination 22 and the coaxial illumination 23 can be adjusted. That is, the inner surface inspection apparatus 1 can perform inner surface inspection using illumination having appropriate directivity. Therefore, it is possible to detect a small unevenness and perform an inner surface inspection with less misrecognition. As a result, the detection accuracy of various types of defects can be improved.

<1-2. About inspection process>
Next, an inspection process using the inner surface inspection apparatus 1 will be described with reference to FIG. FIG. 4 is a flowchart showing the flow of the inspection process in the inner surface inspection apparatus 1.

  When inspecting the inner surface 810 of the inspection object 8, first, the inspection object 8 is set in the inner surface inspection apparatus 1 (step ST101). Next, the operator operates the input unit 32 to input a movement command S32 to the position adjustment unit 51 of the control unit 50. Thereby, the stage drive unit 42 adjusts the positions of the mounting table 41 in the x-axis direction, the y-axis direction, and the z-axis direction, and aligns the apparatus main body 20 and the hole 81 of the inspection object 8 (step ST102). . At this time, the central axis 9 of the apparatus main body 20 and the central axis 80 of the hole 81 are made to coincide. Further, the reflection portion 212 of the apparatus main body 20 is disposed near the entrance of the hole 81.

  Next, the control unit 50 drives the stage drive unit 42 by the position adjustment unit 51 to acquire the imaging data S24 by the imaging unit 24 while moving the apparatus main body 20 in the x-axis direction (step ST103). At this time, the ring illumination 22 and the coaxial illumination 23 are driven to irradiate the inner surface 810 of the hole 81 with light via the reflecting portion 212, and the imaging unit 24 images the image of the inner surface 810 via the reflecting portion 212. The image of the inner surface 810 of the hole 81 is imaged while moving the reflecting portion 212 provided at the tip of the apparatus main body 20 from the entrance of the hole 81 to the back or from the back to the entrance, so that the corresponding position for each position in the x-axis direction is obtained. An image of the inner surface 810 is input to the defect detection unit 53 as imaging data S24.

  In step ST103, the ring illumination 22 and the coaxial illumination 23 are controlled by the illumination control unit 52 of the control unit 50 according to the light amount setting value S50. That is, the illumination control unit 52 switches the ring illumination 22 and the coaxial illumination 23 from off to on and adjusts the light amount of the ring illumination 22 before the start of step ST103. The light quantity setting value S50 used in this inspection process is set in advance by a setting process described later or other methods.

  Subsequently, the defect detection unit 53 of the control unit 50 analyzes the input imaging data S24, detects the defect position on the inner surface 810 of the hole 81 of the inspection object 8, calculates the defect position data S53, and Whether or not there is is determined (step ST104). Then, the imaging data S24 acquired in step ST103, the defect position data S53, and the determination result of the presence / absence of a defect are displayed on the monitor 31.

  Note that the presence / absence of a defect may be determined by an operator without the defect detection unit 53. For example, the operator may determine the presence or absence of a defect by visually recognizing the imaging data S24 and the defect position data S53 displayed on the monitor 31. Further, the control unit 50 does not perform analysis such as specifying the defect position on the imaging data S24, and the operator visually recognizes only the imaging data S24 displayed on the monitor 31, whereby the operator determines whether there is a defect. May be performed.

  As described above, in steps ST103 to ST104, the radial direction of the reflecting portion 212 acquired on the base end side of the rod lens 21 while light is incident on the base end side of the rod lens 21 from the ring illumination 22 and the coaxial illumination 23. This is an inspection process for inspecting the state of the inner surface 810 of the inspection object 8 based on the outside image. It is necessary to set the light amount setting value S50 at the time of inspection in step ST103 at the latest before this inspection process, that is, before step ST103.

  After determining whether there is a defect, the inspection object 8 is removed from the inner surface inspection apparatus 1 (step ST105).

<1-3. About setting process>
Next, an example of a setting process of the light amount setting value S50 using the inner surface inspection apparatus 1 will be described with reference to FIG. FIG. 5 is a flowchart showing the flow of the setting process of the light amount setting value S50 in the inner surface inspection apparatus 1.

  First, a sample inspection object whose defect position is known is set in the inner surface inspection apparatus 1 (step ST201). Next, as in step ST101 of the inspection process, the alignment of the holes of the apparatus main body 20 and the sample inspection object is performed (step ST202). At this time, the center axis 9 of the apparatus main body 20 and the center axis of the hole of the sample inspection object are matched. Further, the reflection portion 212 of the apparatus main body is disposed near the entrance of the hole of the sample inspection object.

  Next, the illumination control unit 52 of the control unit 50 drives the ring illumination 22 so that the amount of light of the ring illumination 22 becomes 0% and the amount of light of the coaxial illumination 23 becomes 100%. Then, while maintaining this illumination state, the control unit 50 drives the stage driving unit 42 by the position adjusting unit 51 and moves the apparatus main body 20 in the x-axis direction, and acquires the imaging data S24 by the imaging unit 24. Is performed (step ST203).

  As described above, in step ST203, the image on the radially outer side of the reflecting portion 212 when the light amount setting value S50 is a predetermined [0%, 100%] in a state where the reflecting portion 212 is disposed inside the hole of the sample inspection object. Image data S24 is acquired.

  Subsequently, the illumination control unit 52 drives the ring illumination 22 so that the amount of light is 25% and the amount of light of the coaxial illumination 23 is 100%. Then, while maintaining this illumination state, the control unit 50 drives the stage driving unit 42 by the position adjusting unit 51 and moves the apparatus main body 20 in the x-axis direction, and acquires the imaging data S24 by the imaging unit 24. Is performed (step ST204).

  As described above, in step ST204, in a state where the reflecting portion 212 is disposed inside the hole of the sample inspection object, the light amount setting value S50 of the reflecting portion 212 at a predetermined [25%, 100%] different from that in step ST204. The imaging data S24 of the radially outer video is acquired.

  Subsequently, the illumination control unit 52 drives the ring illumination 22 so that the amount of light is 50% and the amount of light of the coaxial illumination 23 is 100%. Then, while maintaining this illumination state, the control unit 50 drives the stage driving unit 42 by the position adjusting unit 51 and moves the apparatus main body 20 in the x-axis direction, and acquires the imaging data S24 by the imaging unit 24. Is performed (step ST205).

  Further, the illumination control unit 52 drives the ring illumination 22 so that the amount of light is 75% and the amount of light of the coaxial illumination 23 is 100%. Then, while maintaining this illumination state, the control unit 50 drives the stage driving unit 42 by the position adjusting unit 51 and moves the apparatus main body 20 in the x-axis direction, and acquires the imaging data S24 by the imaging unit 24. Is performed (step ST206).

  Then, the illumination control unit 52 drives the ring illumination 22 so that the amount of light is 100% and the amount of light of the coaxial illumination 23 is 100%. Then, while maintaining this illumination state, the control unit 50 drives the stage driving unit 42 by the position adjusting unit 51 and moves the apparatus main body 20 in the x-axis direction, and acquires the imaging data S24 by the imaging unit 24. Is performed (step ST207).

  As described above, in step ST203 to step ST207, the light amount of the ring illumination 22 is changed stepwise while the reflecting portion 212 is disposed inside the hole of the sample inspection object, and on the proximal end side of the rod lens 21. The acquired image on the radially outer side of the reflection unit 212 is acquired as the imaging data S24.

  Thereafter, the defect detection unit 53 analyzes each imaging data S24 acquired in step ST203 to step ST207, and calculates defect position data S53 in which a defect position is detected for each imaging data S24 (step ST208). Then, the defect detection unit 53 outputs the light amount setting value S50 corresponding to each imaging data S24 and the defect position data S53 to the defect storage unit 54. Thereby, the defect memory | storage part 54 memorize | stores the detection data S54 which made the light quantity setting value S50 and defect position data S53 corresponding to each imaging data S24 a group.

  Then, the light amount setting value determination unit 56 compares the detection data S54 stored in the defect detection unit 53 with the sample data S55 stored in the sample storage unit 55 to determine an appropriate light amount setting value S50 ( Step ST209). Specifically, the light amount setting value determination unit 56 determines, for example, the light amount setting value S50 paired with the defect position data S53 that most closely matches the sample data S55 as the appropriate light amount setting value S50. The light amount set value determination unit 56 may calculate the light amount set value S50 based on some calculation with reference to the coincidence rate with each defect position data S53.

  The light amount setting value S50 determined by the light amount setting value determining unit 56 is stored in the setting value storage unit 57. Thereafter, the sample inspection object is removed from the inner surface inspection apparatus 1 (step ST210).

<2. Modification>
As mentioned above, although exemplary embodiment of this invention was described, this invention is not limited to said embodiment.

  In said embodiment, although the mirror surface process was given to the reflection part of the rod lens, this invention is not this limitation. If the reflecting portion reflects light incident from the outside in the radial direction with a certain reflectance (for example, 60%), the mirror finish may not be applied.

  In the above-described embodiment, the light amount setting value is determined based on an image captured while changing the light amount of the ring illumination while keeping the light amount of the coaxial illumination constant. However, in the present invention, the light amount setting value may be determined based on an image captured while the light amount of the ring illumination is constant and the light amount of the ring illumination is changed. In the present invention, the light amount setting value may be determined based on an image captured while changing both the light amount of the ring illumination and the light amount of the coaxial illumination.

  Moreover, in said embodiment, the light quantity setting value was determined based on the image | video imaged in the state which has arrange | positioned the reflection part inside the hole of a sample to-be-inspected object. However, in the present invention, the light amount setting is performed based on an image captured while changing the light amount of at least one of the ring illumination and the coaxial illumination in a state where the reflection portion is disposed inside the hole of the inspection object to be inspected. A value may be determined.

  Moreover, in said embodiment, the light quantity setting value determination part of the control part determined the light quantity setting value based on the image | photographed image | video. However, in the present invention, the operator may determine the light amount setting value based on the captured image. At that time, the operator may operate the input unit while confirming the imaging data displayed on the monitor and input the light amount setting value to the setting value storage unit in the control unit.

  In addition, about the detailed shape of an inner surface inspection apparatus, you may differ from each drawing of this application. Moreover, you may combine suitably each element which appeared in said embodiment and modification in the range which does not produce inconsistency.

  The present invention can be used for an inner surface inspection apparatus.

DESCRIPTION OF SYMBOLS 1 Inner surface inspection apparatus 8 Inspected object 20 Apparatus main body 21 Rod lens 22 Ring illumination 23 Coaxial illumination 24 Imaging means 31 Monitor 32 Input part 50 Control part 51 Position adjustment part 52 Illumination control part 53 Defect detection part 54 Defect storage part 55 Sample storage Unit 56 light quantity set value determination unit 57 set value storage unit 81 hole 212 reflecting unit 213 base end face 810 inner surface S24 imaging data S32 movement command S51 position adjustment command S50 light quantity set value S53 defect position data S54 detection data S55 sample data

Claims (1)

An inner surface inspection apparatus that includes a rod lens extending in an axial direction from a proximal end to a distal end, in which at least the distal end is disposed inside a hole of the inspection object, and inspects the state of the inner surface of the inspection object forming the hole. The rod lens is columnar, has a reflecting portion on the tip side, is disposed on the end side of the rod lens, and transmits ring-shaped light having a predetermined angle with respect to the axial direction to the rod. a ring illumination that enters the proximal side of the lens, disposed on the proximal end side of the rod lens, the base end of the street the rod lens substantially parallel light opening of the ring light with respect to the axial direction coaxial illumination incident toward the side, and the disposed on the base end side of the rod lens, the illumination control unit for controlling the ring illumination and the coaxial illumination and imaging means for imaging the light from the reflecting section, wherein Rod lens It fixes the end side, has a, a casing fixed to said ring illumination and the coaxial illumination, the reflecting portion reflects the light incident from the radially outer side to the proximal side, the illumination control unit Is an inner surface inspection apparatus capable of adjusting the light quantity of at least one of the ring illumination and the coaxial illumination in a plurality of stages according to a light quantity setting value.





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