JP6565499B2 - シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 - Google Patents

シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 Download PDF

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Publication number
JP6565499B2
JP6565499B2 JP2015170850A JP2015170850A JP6565499B2 JP 6565499 B2 JP6565499 B2 JP 6565499B2 JP 2015170850 A JP2015170850 A JP 2015170850A JP 2015170850 A JP2015170850 A JP 2015170850A JP 6565499 B2 JP6565499 B2 JP 6565499B2
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seal
seal member
shaft
housing
seal structure
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Japanese (ja)
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JP2017048818A (ja
JP2017048818A5 (enExample
Inventor
中村　剛
中村　　剛
英也 樋口
英也 樋口
秀樹 金
秀樹 金
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NSK Ltd
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NSK Ltd
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sealing With Elastic Sealing Lips (AREA)
  • Sealing Devices (AREA)
JP2015170850A 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置 Active JP6565499B2 (ja)

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JP2015170850A JP6565499B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

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JP2015170850A JP6565499B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

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JP2017048818A JP2017048818A (ja) 2017-03-09
JP2017048818A5 JP2017048818A5 (enExample) 2018-10-18
JP6565499B2 true JP6565499B2 (ja) 2019-08-28

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JP2015170850A Active JP6565499B2 (ja) 2015-08-31 2015-08-31 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102411880B1 (ko) * 2020-10-13 2022-06-22 씰링크 주식회사 직선운동 밀폐장치 및 이를 이용하는 반도체 기판처리장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002228010A (ja) * 2000-10-25 2002-08-14 Teijin Seiki Co Ltd 真空シール機構および真空シール装置
JP2004052863A (ja) * 2002-07-18 2004-02-19 Shinagawa Kogyosho:Kk 撹拌装置の主軸のシール構造
JP4079157B2 (ja) * 2005-04-12 2008-04-23 東京エレクトロン株式会社 ゲートバルブ装置及び処理システム
JP4952284B2 (ja) * 2007-02-15 2012-06-13 日本精工株式会社 軸受用密封装置及び軸受ユニット
JP2014177986A (ja) * 2013-03-14 2014-09-25 Mitsubishi Heavy Ind Ltd 軸シール装置
JP6015715B2 (ja) * 2013-12-10 2016-10-26 日本精工株式会社 シール機構、シール機構の駆動装置、搬送装置及び製造装置
JP6772440B2 (ja) * 2015-08-31 2020-10-21 日本精工株式会社 シール構造、回転駆動装置、搬送装置、工作機械および半導体製造装置

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JP2017048818A (ja) 2017-03-09

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