JP6563282B2 - Measuring device and inspection device - Google Patents

Description

  The present invention is directed to a pair of probe units disposed on and away from the circuit board on one surface side and the other surface side of the circuit board, and facing the circuit board in the pair of probe units. Current to be measured on a circuit board in contact with the pair of probes via a pair of probes selected from a plurality of probes provided on the opposite surface And a measuring apparatus and an inspection apparatus for measuring a voltage generated between the pair of probes.

  As this type of measuring apparatus, the applicant has already proposed a resistance measuring apparatus disclosed in Patent Document 1 below. This resistance measuring device accommodates a measurement board provided with two resistance measurement units (a measurement unit configured with a DC constant current source and a voltmeter) and a scanner board connected to the measurement board. The resistance value of a measurement target on a circuit board (for example, a measured object such as a through hole drilled in the circuit board or a resistance element mounted on the circuit board) Measure.

  Specifically, in this resistance measurement apparatus, an upper scanner rack is disposed above the mounting portion of the circuit board, and a lower scanner rack is disposed below the mounting portion. The scanner board housed in the upper scanner rack is provided with a plurality of probes that come into contact with one terminal side of the plurality of measurement objects, and the scanner board housed in the lower scanner rack includes A plurality of probes in contact with the other terminal portion side of the plurality of measurement objects are provided. As a result, the scanner board housed in the upper scanner rack and the scanner board housed in the lower scanner rack are paired, and two measurement objects selected from a plurality of measurement objects on the circuit board ( Measure resistance values of measurement objects adjacent to each other.

  In the resistance measurement device, when measuring the resistance value, one of the two measurement objects adjacent to each other is measured from one resistance measurement unit of the two resistance measurement units in the measurement board, For example, a constant DC current (measurement current) is passed in the direction from the scanner board side in the lower scanner rack to the scanner board side in the upper scanner rack, and for the other measurement object of the two measurement objects, A constant DC current (from above) from the other resistance measurement unit of the two resistance measurement units in the measurement board, for example, from the scanner board side in the upper scanner rack to the scanner board side in the lower scanner rack. Other measurement currents having the same current value as the current value of the measurement current. That is, this resistance measuring apparatus has two systems for supplying measurement current, and flows through one of the measurement objects and the wiring connected to the measurement object (that is, a current loop for one measurement object). The current flow direction and the flow direction of the current flowing through the other measurement object and the wiring connected to the measurement object (that is, the current loop for the other measurement object) are opposite to each other, and Measurement currents are supplied from the two supply systems to the two measurement objects so that the current values are the same.

  As a result, in this resistance measurement apparatus, the induced electromotive force generated in the current loop through which the measurement current flows due to the measurement current flowing to one measurement object is passed by the measurement current flowing to the other measurement object. Since it is possible to cancel (cancel) with other induced electromotive force generated in other current loops, the resistance value of each measurement target is measured quickly and more accurately without being affected by this induced electromotive force, And based on this resistance value, two measuring objects can be inspected quickly and more accurately.

JP 2013-257259 A (page 6-10, FIG. 1-2)

  By the way, in the resistance measuring device disclosed in the above-mentioned Patent Document 1, as described above, two measurement current supply systems are provided, and two measurement objects on the circuit board have the same current value. The induced electromotive force generated by the energization of each measurement current is canceled by flowing the measurement currents in the opposite direction at the same time, but this resistance measurement device has two supply systems for the measurement currents, and the voltage of the measurement currents is adjusted accordingly. Since there are two detection systems, there is a problem that the apparatus cost increases. For this reason, the applicant of the present application aims to reduce the device cost, and the measuring device 51 having the configuration shown in FIG. 4, that is, the two current supply paths and the two voltages included in the resistance measuring device described above. The measuring device 51 having a configuration corresponding to one system (one current supply path and one voltage detection path each) is developed.

  As shown in the figure, the measuring device 51 includes one resistance measuring unit 52, upper and lower probe units (a plurality of scanner boards 13, 23 and scanner racks 61, 71 for storing the scanner boards 13, 23). And a moving mechanism (not shown) for moving the probe units 53 and 54 toward and away from the circuit board 5 arranged at a measurement position defined between the probe units 53 and 54. It is configured as a resistance measurement device that measures the resistance value of a measurement object 81 (a through hole 81a drilled in the circuit board 5 or a resistance element 81b mounted on the circuit board 5) existing on the circuit board 5 by a four-terminal method. ing.

  Specifically, the resistance measuring unit 52 includes, as an example, a DC constant current source 52a, a voltmeter 52b, and a processing unit (not shown), and the processing unit is supplied from the DC constant current source 52a to the measurement target. The resistance value of the measurement target can be measured based on the current value of the current (measurement current) and the voltage across the measurement target when the constant current measured by the voltmeter 52b is supplied. The DC constant current source 52a outputs the generated measurement current between the first current supply line L1 connected to the high potential electrode Hc and the second current supply line L2 connected to the low potential electrode Lc. The voltmeter 52b measures a voltage generated between the first voltage detection line L3 connected to the high potential electrode Hp and the second voltage detection line L4 connected to the low potential electrode Lp.

  In addition, since the measuring apparatus 51 includes two probe units 53 and 54, the current supply lines L1 and L2 are branched into current branch lines L1a and L1b and current branch lines L2a and L2b, respectively. A set of the branch line L1a and the current branch line L2a is connected to the probe unit 53, and a set of the current branch line L1b and the current branch line L2b is connected to the probe unit 54. Similarly, the voltage detection lines L3 and L4 are also branched into voltage branch lines L3a and L3b and voltage branch lines L4a and L4b, respectively, and a set of the voltage branch line L3a and the voltage branch line L4a is connected to the probe unit 53. A set of the voltage branch line L3b and the voltage branch line L4b is connected to the probe unit 54.

  The upper probe unit 53 has a plurality of probes 12a, 12b, 12c, 12d,... (Hereinafter also referred to as probes 12 when not particularly distinguished) on the opposite surface (the lower surface in the figure) facing the circuit board 5. A plurality of scanner boards 13 (only one scanner board 13 is shown in the figure) are accommodated in a scanner rack 61 in which is erected. Each scanner board 13 is electrically connected to a corresponding plurality of probes (the same number of probes) among the plurality of probes 12a, 12b, 12c, 12d,. In this example, probes 12a, 12b, 12c, and 12d in the figure are included in a plurality of probes corresponding to the scanner board 13 shown in the figure.

The scanner board 13 has the same number of selector switches 14a, 14b, 14c, 14d,... As the corresponding probes 12a, 12b, 12c, 12d,. Further, each switch 14a, 14b, 14c, 14d,... Has four switch circuits 14a ₁ , 14a whose connection / disconnection states (connection state and disconnection state) are individually controlled by the processing unit of the resistance measurement unit 52. _{2, 14a} 3, _{14a 4,} the switch circuits _{14b 1, 14b 2, 14b 3} , 14b 4, the switch circuits _{14c 1, 14c 2, 14c 3} , 14c 4, the switch circuit _{14d 1, 14d 2, 14d 3} , 14d 4, ... each.

Further, each switch circuit 14a ₁ , 14b ₁ , 14c ₁ , 14d ₁ is connected to the corresponding probe 12a, 12b, 12c, 12d and the corresponding internal wiring L11 (current branching via the connector CN provided in the scanner rack 61). And the switching circuits 14a ₂ , 14b ₂ , 14c ₂ , 14d ₂ are connected to the corresponding probes 12a, 12b, 12c, 12d. Each switch circuit 14a ₃ , 14b ₃ , 14c ₃ , 14d ₃ has a function of connecting and disconnecting the corresponding internal wiring L12 (wiring connected to the current branch line L2a via the connector CN). 12a, 12b, 12c, 12d and corresponding internal wiring L13 (connected to the voltage branch line L3a via the connector CN) Has a function of connecting and disconnecting the wiring), the switch circuits _{14a 4, 14b 4, 14c 4} , 14d 4 is a corresponding probe 12a, 12b, 12c, via the internal wiring L14 (connector CN and the corresponding 12d The voltage branch line L4a is connected to and disconnected from the voltage branch line L4a. With the above configuration, the scanner board 13 can connect an arbitrary probe among the corresponding probes 12a, 12b, 12c, 12d,... To the pair of output terminals (high potential pole Hc, low potential) of the resistance measuring unit 52. It has a function of connecting to any one of the pole Lc) and the pair of detection terminals (high potential pole Hp, low potential pole Lp).

  The lower probe unit 54 has a plurality of probes 22a, 22b, 22c, 22d,... (Hereinafter also referred to as probes 22 when not particularly distinguished) on the surface facing the circuit board 5 (upper surface in the figure). A plurality of scanner boards 23 (only one scanner board 23 is shown in the figure) are accommodated in an upright scanner rack 71. Each scanner board 23 is electrically connected to a corresponding plurality of probes (the same number of probes) among the plurality of probes 22a, 22b, 22c, 22d,. In this example, the probes 22a, 22b, 22c, and 22d in the figure are included in a plurality of probes corresponding to the scanner board 23 shown in the drawing.

The scanner board 23 has the same number of selector switches 24a, 24b, 24c, 24d,... As the corresponding probes 22a, 22b, 22c, 22d,. In addition, each change-over switch 24a, 24b, 24c, 24d,... Has four switch circuits 24a ₁ , 24a ₂ , 24a ₃ , 24a ₄ whose connection / disconnection state is individually controlled by the processing unit of the resistance measurement unit 52. , Switch circuits 24b ₁ , 24b ₂ , 24b ₃ , 24b ₄ , switch circuits 24c ₁ , 24c ₂ , 24c ₃ , 24c ₄ , switch circuits 24d ₁ , 24d ₂ , 24d ₃ , 24d ₄ ,. ing.

Also, each switch circuit 24a ₁ , 24b ₁ , 24c ₁ , 24d ₁ is connected to the corresponding probe 22a, 22b, 22c, 22d and the corresponding internal wiring L21 (current branching via the connector CN provided in the scanner rack 71). The switch circuits 24a ₂ , 24b ₂ , 24c ₂ , and 24d ₂ have a function of connecting and disconnecting the wirings connected to the line L1b, and the internal wiring L22 corresponding to the corresponding probes 22a, 22b, 22c, and 22d. The switch circuits 24a ₃ , 24b ₃ , 24c ₃ , and 24d ₃ have the function of connecting / disconnecting (wiring connected to the current branch line L2b via the connector CN), and the corresponding probes 22a, 22b, and 22c. , 22d and the corresponding internal wiring L23 (wiring connected to the voltage branch line L3b via the connector CN) A function, the switch circuits _{24a 4, 24b 4, 24c 4} , 24d 4 is connected to a corresponding probe 22a, 22b, 22c, 22d and through the corresponding internal wiring L24 (connector CN to a voltage branch line L4b A function of connecting and disconnecting the wiring). With the above-described configuration, the scanner board 23 is connected to any one of the corresponding probes 22a, 22b, 22c, 22d,... As a pair of output terminals (high potential pole Hc, low potential). It has a function of connecting to any one of the pole Lc) and the pair of detection terminals (high potential pole Hp, low potential pole Lp).

  In this measuring device 51, when measuring the resistance value of the measuring object 81 existing on the circuit board 5, the probe units 53 and 54 are moved (approached) to the circuit board 5 side by a moving mechanism (not shown). Each of the probes 12 and 22 shifts to a state (probing state) in contact with the corresponding test point TP.

  In this case, the through hole 81a has one end connected to a land (test point TP1) formed on the surface of the circuit board 5 facing the probe unit 53, and the other end connected to the probe unit 54 on the circuit board 5. Are connected to a land (test point TP2) formed on the opposite surface. Therefore, two probes 12 of the plurality of probes 12 on the probe unit 53 side are in contact with the test point TP1, and two probes 22 of the plurality of probes 22 on the probe unit 54 side are in contact with the test point TP2. Touch. As an example, in this example, as shown in FIG. 5, it is assumed that two probes 12a and 12b are in contact with the test point TP1, and two probes 22a and 22b are in contact with the test point TP2.

In addition, the changeover switches 14a and 14b provided for the probes 12a and 12b that are in contact with the test point TP1 are controlled by the processing unit, so that, for example, the switch of each switch circuit of the changeover switch 14a. connected to a current branch line L1a by connecting the probe 12a to the internal wiring L11 to shift to the connected state only circuit 14a ₁ from disconnected state (disconnected state), the switch circuit of the switch circuits of the selector switch 14b only 14b ₃ is shifted from the disengaged state to the state connected to a voltage branch line L3a by connecting the probe 12b inside the wiring L13. The probe 22a in contact with the test point TP2, disposed a changeover switch 24a with respect to 22b, by 24b is controlled by the processing unit, the switching circuit 24a ₂ of the switch circuits of the changeover switch 24a connecting only the probes 22a shifts from the disconnected state to the connected state and connected to the current branch line L2b by connecting to the internal wiring L22, only the switch circuit 24b ₄ of the switch circuits of the changeover switch 24b from the disconnected state By shifting to the state and connecting the probe 22b to the internal wiring L24, the probe 22b is connected to the voltage branch line L4b.

Thereby, the measurement current output between the high potential electrode Hc and the low potential electrode Lc from the DC constant current source 52a is supplied from the high potential electrode Hc to the first current supply line L1, the current branch line L1a, and the probe unit 53. Internal wiring L11, switch circuit 14a ₁ of changeover switch 14a, probe 12a, test point TP1, through hole 81a, test point TP2, probe 22a on the probe unit 54 side, switch circuit 24a ₂ of changeover switch 24a in probe unit 54, The current flows through the internal wiring L22, the current branch line L2b, and the second current supply line L2 to the low-potential electrode Lc (current path CC having a large loop area indicated by a broken line in FIGS. 4 and 5).

In addition, the voltmeter 52b generates a voltage (a voltage between both ends) generated between the both ends of the through hole 81a (between the test points TP1 and TP2) by the measurement current flowing from the high potential electrode Hp to the first voltage detection line. L3, the voltage branch line L3a, internal wiring L13 in the probe unit 53, and the high potential side of the voltage detection path via the switching circuit 14a ₃ of the changeover switch 14a leading to the probe 12b (approximately half of the current path CC a voltage detection path) which is arranged along the path, from the low potential electrode Lp, a second voltage detection line L4, the voltage branch line L4b, internal wiring L24 in the probe unit 54, and the switching circuit 24b ₄ of the selector switch 24b A voltage detection path on the low potential side that reaches the probe 22b via (to the other half of the remaining current path CC) Measured via the voltage detection path) arranged me. Further, the processing unit determines the resistance value between the test points TP1 and TP2 based on the current value of the measurement current output from the DC constant current source 52a and the voltage value of the voltage across the terminals measured by the voltmeter 52b. (In this example, the resistance value for the through hole 81a) is calculated (measured).

  However, in this measuring apparatus 51, the land (test point TP1) formed on the surface of the circuit board 5 facing the probe unit 53 and the surface of the circuit board 5 facing the probe unit 54 are formed. When calculating the resistance value of the measurement object 81 (in this example, the through hole 81a) positioned between the land (the test point TP2), the current path CC having a large area as described above (in each of the probe units 53 and 54). A measurement current flows through two current branch lines L1a and L2b to be connected, and a voltage detection path (two connected to the probe units 53 and 54) along the current path CC. A configuration in which a voltage detection path including the voltage branch lines L3a and L4b is arranged (the area of the voltage detection path is wide). Is that configuration). For this reason, in this measuring apparatus 51, the magnetic induction generated when the supply of the measurement current is started or stopped affects the voltage detection path side, and an error occurs in the measurement of the voltmeter 52b, and hence in the resistance measurement. Challenges to arise arise. In addition, since the measuring device 51 is easily affected by inductive noise from the outside due to the configuration in which the area of the voltage detection path is large as described above, the measuring device 51 is used for the measurement of the voltmeter 52b, and hence the resistance measurement. There is a problem to be improved that an error occurs.

  In this measuring apparatus 51, a measuring object 81 (for example, as shown in FIG. 4 with the probe unit 54 mounted on one of the facing surfaces of the circuit board 5 facing the probe units 53, 54). When measuring the resistance element 81b), which is mounted on the opposite surface and connected to the test points TP3, TP4 whose both ends are formed on the opposite surface, as shown in FIG. Of the plurality of probes provided on the 54 side, four probes (probes 22a, 22b, 22c, 22d as an example in the figure) are brought into contact with the corresponding test points TP3, TP4. A plurality of probes provided on the probe unit 53 side are also brought into contact with corresponding test points (not shown).

  In this case, although not shown, the current path through which the measurement current flows is a current branch line (in this example, a current branch line) connected to one of the probe units 53 and 54 (in this example, the probe unit 54). L1b, L2b) and the voltage detection path is configured only by voltage branch lines (in this example, voltage branch lines L3b, L4b) connected to the one probe unit (probe unit 54). Therefore, the area of the loop of the current path is smaller than that when the through hole 81a is the measurement object 81, and the area of the loop of the voltage detection path is also narrowed. Voltage measurement, and in turn resistance measurement of the resistance element 81b, the influence of the magnetic induction and inductive noise is reduced. In has become a possible execution.

  The measuring device 51 includes a loading mechanism (not shown) that loads an unmeasured circuit board 5 to a measurement position defined between the probe units 53 and 54, and a measured circuit board 5 that is positioned at the measurement position. And an unillustrated unloading mechanism for unloading from the measurement position. The loading mechanism and unloading mechanism are disposed in the vicinity of the measurement position, but the resistance measuring unit 52 is on one side of the probe units 53 and 54. When the measuring device 51 is arranged on the probe unit 53 side (in FIG. 4), the measuring device 51 has two sets of branch lines connecting the resistance measuring unit 52 and the probe units 53 and 54 (the first set is , Current branch lines L1a and L2a and voltage branch lines L3a and L4a, and the second set is one of current branch lines L1b and L2b and voltage branch lines L3b and L4b). Configuration (In Figure 4 the second set) is stretched between the probe unit 53 is essential. For this reason, in this measuring apparatus 51, one set of branch lines (that is, a wiring cable) is an obstacle to installation of at least one of the carry-in mechanism and the carry-out mechanism (that is, conveyance of the circuit board 5). There are other issues that need to be improved. This problem can be solved by adopting a method of bypassing one set (wiring cable) of this branch line so as to avoid interference with this one mechanism. By detouring, the areas of the current path CC and the voltage detection path are further increased and are more susceptible to the effects of magnetic induction and external inductive noise. Therefore, it is difficult to employ this method.

  The present invention has been made in view of such a problem. Even in a configuration having only one system for supplying a measurement current, the measurement current is not required to be passed between the probe units. The main object of the present invention is to provide a measuring device and an inspection device that can always reduce the influence of induced electromotive force and inductive noise caused by energization.

In order to achieve the above object, the measuring apparatus according to claim 1 includes a resistance measuring unit including a current output unit that outputs a measurement current from a pair of output terminals, and a voltage measurement unit that measures a voltage between the pair of detection terminals; A plurality of test points arranged on the one surface so as to face one surface of the circuit board disposed at a position and to be movable toward and away from the circuit board. A probe is provided on a first facing surface facing the one surface, and an arbitrary probe of the plurality of probes is connected to an arbitrary one of the pair of output terminals and the pair of detection terminals. A first probe unit having a first scanner unit for the first probe unit, the second probe unit disposed opposite to the other surface of the circuit board disposed at the measurement position, and arranged to be movable toward and away from the circuit board, A plurality of probes that can be probed to a plurality of test points formed on one surface are provided on a second facing surface that faces the other surface, and any one of the plurality of probes is connected to the pair of output terminals And a second probe unit having a second scanner unit for connecting to any one of the pair of detection terminals, the resistance measuring unit and the first probe unit Are directly connected via a plurality of wiring cables for electrically connecting the pair of output terminals and the pair of detection terminals to the first scanner unit, and the second facing on the first facing surface. A pair of output terminals disposed via the internal wiring and the wiring cable in the first probe unit. A plurality of first contacts connected in a one-to-one relationship with the pair of detection terminals, and a portion of the second facing surface that is directly opposed to the first facing surface, facing the first contact; A plurality of second contacts connected to the second scanner unit via internal wiring in the two probe units, and the probes of the first probe unit and the second probe unit are probed to the test point In the probing state, the first contact and the second contact are in electrical contact with each other, and the resistance measurement unit measures the current value of the measurement current and the voltage measurement unit. On the basis of the voltage value of the measured voltage, the resistance value of the measurement object that exists on the circuit board and is connected between the pair of detection terminals is determined. When measured by a four-terminal method and the probing state is released, the first contacts and the second contacts are separated from each other and shift to a non-contact state.

The inspection device according to claim 2 is provided with a measuring apparatus according to claim 1, is disposed in said resistance measuring unit, the resistance value the measurement with measuring said resistance value of said measurement object A processing unit for inspecting the measurement object is provided.

  According to the measuring device according to claim 1 and the inspection device according to claim 2, a path (current) from the resistance measuring unit to each probe of each probe unit while eliminating the need to route a wiring cable between the probe units. The area of the loop for the current path and the area of the loop for the voltage detection path in the plurality of wiring cables connecting the first probe unit and the resistance measurement unit occupying the main part of the path and the path for the voltage detection path) Therefore, even in the configuration having only one system for supplying the measurement current (that is, the configuration having only one current output unit), the measurement current can be supplied (energized). As a result, the influence of the induced electromotive force generated in the current path on the voltage detection path and the influence of inductive noise on the voltage detection path are reliably reduced, and are generated in the measurement target. The voltage value and the resistance value of the measured voltage can be measured with high accuracy that. Moreover, according to this inspection apparatus, a measuring object can be inspected with high accuracy based on the resistance value measured with high accuracy.

1 is a configuration diagram of a measuring device 1. FIG. FIG. 3 is a configuration diagram (a configuration diagram in which some components are omitted) of the measurement apparatus 1 in a state in which a resistance value of a through hole 81a formed in a circuit board 5 is measured. It is a block diagram of the measuring apparatus 1 in the state which measures the resistance value of the resistive element 81b mounted in the circuit board 5 (the block diagram which abbreviate | omitted one part component). 2 is a configuration diagram of a measuring device 51. FIG. It is a block diagram of the measuring apparatus 51 in the state which measures the resistance value of the through hole 81a formed in the circuit board 5 (it is a block diagram which abbreviate | omitted some components). It is a block diagram of the measuring apparatus 51 in the state which measures the resistance value of the resistive element 81b mounted in the circuit board 5 (the block diagram which abbreviate | omitted one part component).

  Hereinafter, embodiments of a measuring apparatus and an inspection apparatus will be described with reference to the accompanying drawings.

  First, the configuration of the measuring apparatus 1 will be described. As shown in FIG. 1, the measuring apparatus 1 includes, as an example, one resistance measuring unit 2, two probe units 3 and 4, and a circuit disposed at a measurement position defined between the probe units 3 and 4. A moving mechanism (not shown) for moving the probe units 3 and 4 to and away from the board 5 is provided, and a measurement object 81 (through hole 81a drilled in the circuit board 5 or the circuit board 5 is provided). It is configured as a resistance measuring device that measures the resistance value of the resistive element 81b) mounted on the four-terminal method.

  Specifically, as shown in FIG. 1, the resistance measuring unit 2 includes a current source 2a, a voltmeter 2b, and a processing unit 2c as an example. The current source (current output unit) 2a is constituted by a constant current source (DC constant current source or AC constant current source. In this example, a DC constant current source) as an example, and a DC constant current (current value is known). Is generated from a pair of output terminals (high potential electrode Hc and low potential electrode Lc). In this case, since the first current supply line L1 as a wiring cable is connected to the high potential electrode Hc, and the second current supply line L2 as a wiring cable is connected to the low potential electrode Lc, the measurement current is Are output between the current supply lines L1 and L2. The resistance measurement unit 2 is directly connected to one of the probe units 3 and 4 via a wiring cable. In this example, as an example, the resistance measurement unit 2 includes the current supply lines L1, L2, and It is directly connected to a probe unit 3 as a first probe unit via voltage detection lines L3 and L4 described later.

  The voltmeter (voltage measuring unit) 2b measures the voltage generated between the pair of detection terminals (the high potential electrode Hp and the low potential electrode Lp). In this case, since the first voltage detection line L3 as a wiring cable is connected to the high potential electrode Hp, and the second voltage detection line L4 as a wiring cable is connected to the low potential electrode Lp, the voltmeter 2b. Measures the voltage generated between both voltage detection lines L3, L4.

  The processing unit 2c is configured by a computer, for example, and measures the resistance value of the measurement target 81 based on the current value of the measurement current output from the current source 2a and the voltage value of the voltage measured by the voltmeter 2b. Perform resistance measurement processing. The processing unit 2c is connected to the probe units 3 and 4 via a control cable (not shown), and executes a control process for a later-described scanner board disposed in the probe units 3 and 4, respectively. .

  As shown in FIG. 1, the probe unit 3 is disposed on one surface side of the circuit board 5 arranged at the measurement position, facing the one surface, and orthogonal to the circuit board 5 by a moving mechanism. It is arrange | positioned so that it can move along the direction (that is, it can contact / separate with respect to the circuit board 5). The probe unit 3 has a plurality of probes 12a, 12b, 12c, 12d,... On a surface (a lower surface in the figure, hereinafter also referred to as a first facing surface) 11a facing one surface of the circuit board 5. Are arranged in the scanner rack 11, internal wirings L 11, L 12, L 13, L 14 provided in the scanner rack 11, connectors CN 1, CN 2, CN 3, CN 4 provided in the scanner rack 11, and the scanner rack 11. The contacts (contact terminals) CNT11, CNT12, CNT13, CNT14 as the first contacts provided, and a plurality of scanner boards 13 housed in the scanner rack 11 (each scanner board 13 has the same configuration, In FIG. 1, only one of the scanner boards 13 is shown).

  In the probe unit 3, the internal wiring L11 is directly connected to the first current supply line L1 via the connector CN1 as the first internal current supply line, and the internal wiring L12 is connected via the connector CN2 as the second internal current supply line. Directly connected to the second current supply line L2, the internal wiring L13 is directly connected to the first voltage detection line L3 via the connector CN3 as the first internal voltage detection line, and the internal wiring L14 is used as the second internal voltage detection line. It is directly connected to the second voltage detection line L4 via the connector CN4.

  As shown in FIG. 1, each contact CNT11, CNT12, CNT13, CNT14 is disposed at a portion of the first facing surface 11a that directly faces a later-described second facing surface 21a of the probe unit 4. The contact CNT11 is connected to the connector CN1 via the internal wiring L11, the contact CNT12 is connected to the connector CN2 via the internal wiring L12, the contact CNT13 is connected to the connector CN3 via the internal wiring L13, and the contact CNT14 is It is connected to the connector CN4 via the internal wiring L14. With this configuration, each CNT11, CNT12, CNT13, CNT14 is connected to a pair of output terminals (high) via the internal wirings L11, L12, L13, L14 in the first probe unit 3 and the lines L1, L2, L3, L4. The potential electrode Hc, the low potential electrode Lc) and the pair of detection terminals (the high potential electrode Hp and the low potential electrode Lp) are connected on a one-to-one basis.

  Each scanner board 13 in the probe unit 3 is electrically connected to a corresponding plurality of probes (the same number of probes) among the plurality of probes 12a, 12b, 12c, 12d,. In this example, probes 12a, 12b, 12c, and 12d in the figure are included in a plurality of probes corresponding to the scanner board 13 shown in the figure. Hereinafter, the configuration of each scanner board 13 in the probe unit 3 will be described by taking the illustrated scanner board 13 as an example.

The scanner board 13 has the same number of changeover switches 14 as the corresponding probes. Specifically, as illustrated in FIG. 1, the scanner board 13 includes a changeover switch 14a corresponding to the probe 12a, a changeover switch 14b corresponding to the probe 12b, a changeover switch 14c corresponding to the probe 12c, and a changeover corresponding to the probe 12d. The switch 14d has a switch 14d (also referred to as a changeover switch 14 unless otherwise specified). Further, each of the changeover switches 14a, 14b, 14c, 14d,... Has four switch circuits 14a ₁ , 14a ₂ , 14a ₃ , 14a whose connection / disconnection state is individually controlled by the processing unit 2c of the resistance measuring unit 2. ₄ has switching circuits _{14b 1, 14b 2, 14b 3} , 14b 4, the switch circuits _{14c 1, 14c 2, 14c 3} , 14c 4, the switch circuit _{14d 1, 14d 2, 14d 3} , 14d 4 , respectively.

Further, in this example, as shown in FIG. 1, each switch circuit 14a ₁ , 14b ₁ , 14c ₁ , 14d ₁ has an internal wiring L11 corresponding to the corresponding probe 12a, 12b, 12c, 12d (that is, the first circuit The switch circuits 14a ₂ , 14b ₂ , 14c ₂ , and 14d ₂ have a function of disconnecting the current supply line L1), and the internal wiring L12 corresponding to the corresponding probes 12a, 12b, 12c, and 12d (that is, The switch circuit 14a ₃ , 14b ₃ , 14c ₃ , 14d ₃ has a function of disconnecting from the second current supply line L2), and each of the switch circuits 14a ₃ , 14b ₃ , 14c ₃ , 14d ₃ has an internal wiring L13 ( In other words, each switch circuit 14a ₄ , 14b ₄ , 14c ₄ , 14d ₄ has a function of disconnecting from the first voltage detection line L3). The corresponding probes 12a, 12b, 12c, and 12d have a function of connecting and disconnecting the corresponding internal wiring L14 (that is, the second voltage detection line L4). With the configuration described above, the scanner board 13 allows any one of the corresponding probes 12a, 12b, 12c, 12d,... To be paired with a pair of output terminals (high potential pole Hc, low potential pole Lc) and a pair. It functions as a first scanner unit connected to any one of the detection terminals (high potential pole Hp, low potential pole Lp).

  As shown in FIG. 1, the probe unit 4 (second probe unit) is disposed on the other surface side of the circuit board 5 arranged at the measurement position, facing the other surface, and by a moving mechanism. The circuit board 5 is disposed so as to be movable along a direction orthogonal to the circuit board 5 (that is, it can move toward and away from the circuit board 5). The probe unit 4 has a plurality of probes 22a, 22b, 22c, 22d,... On a surface 21a facing the other surface of the circuit board 5 (upper surface in FIG. , The internal wiring L21, L22, L23, L24 provided in the scanner rack 21, contacts CNT21, CNT22, CNT23, CNT24 as second contacts provided in the scanner rack 21, And a plurality of scanner boards 23 housed in the scanner rack 21 (each scanner board 23 has the same configuration, and one scanner board 23 is shown in FIG. 1). Yes.

  In the probe unit 4, the internal wiring L21 is connected to the contact CNT21, the internal wiring L22 is connected to the contact CNT22, the internal wiring L23 is connected to the contact CNT23, and the internal wiring L24 is connected to the contact CNT24.

  As shown in FIG. 1, each contact CNT21, CNT22, CNT23, CNT24 is located on the second facing surface 21a at a portion directly facing the first facing surface 11a of the probe unit 3, and among the contacts CNT11, CNT12, CNT13, CNT14. Are arranged opposite to the corresponding contacts. Specifically, the contact CNT21 is disposed opposite to the corresponding contact CNT11, the contact CNT22 is disposed corresponding to the contact CNT12, the contact CNT23 is disposed corresponding to the contact CNT13, and the contact CNT24 is disposed opposite to the corresponding contact CNT14. .

  With this configuration, as will be described later, the probe units 3 and 4 are moved closer to the circuit board 5 by the moving mechanism, and the probes of the probe unit 3 (probes 12a, 12b, 12c, 12d,...). When the probe (probes 22a, 22b, 22c, 22d,...) Of the probe unit 4 is brought into contact with the corresponding test point TP of the circuit board 5 (probing state), each contact CNT21, CNT22, CNT23, and CNT24 also make electrical contact with the corresponding contacts CNT11, CNT12, CNT13, and CNT14 from a non-contact state that is not in electrical contact with the corresponding contacts CNT11, CNT12, CNT13, and CNT14. Transition to contact state.

  Thereby, the internal wiring L21 in the probe unit 4 is connected to the high potential electrode Hc via the contact CNT21, the contact CNT11, the internal wiring L11 in the probe unit 3, and the first current supply line L1. The internal wiring L22 is connected to the low potential electrode Lc via the contact CNT22, the contact CNT12, the internal wiring L12 in the probe unit 3, and the second current supply line L2. The internal wiring L23 is connected to the high potential electrode Hp via the contact CNT23, the contact CNT13, the internal wiring L13 in the probe unit 3, and the first voltage detection line L3. The internal wiring L24 is connected to the low potential electrode Lp via the contact CNT24, the contact CNT14, the internal wiring L14 in the probe unit 3, and the second voltage detection line L4. That is, the probe unit 4 is connected to the high potential electrode Hc, the low potential electrode Lc, the high potential electrode Hp, and the low potential electrode Lp of the resistance measurement unit 2 via the probe unit 3.

  When the probe units 3 and 4 are separated from the circuit board 5 and the probing state is released, the contacts CNT21, CNT22, CNT23, and CNT24 are also separated from the corresponding contacts CNT11, CNT12, CNT13, and CNT14. Transition to a non-contact state.

  Each scanner board 23 in the probe unit 4 is electrically connected to a corresponding plurality of probes (the same number of probes) among the plurality of probes 22a, 22b, 22c, 22d,. In this example, the probes 22a, 22b, 22c, and 22d in the figure are included in a plurality of probes corresponding to the scanner board 23 shown in the drawing. Hereinafter, the configuration of each scanner board 23 in the probe unit 4 will be described using the illustrated scanner board 23 as an example.

The scanner board 23 has the same number of selector switches 24 as the corresponding probes. Specifically, as shown in FIG. 1, the scanner board 23 includes a changeover switch 24a corresponding to the probe 22a, a changeover switch 24b corresponding to the probe 22b, a changeover switch 24c corresponding to the probe 22c, and a changeover corresponding to the probe 22d. A switch 24d (... Is also referred to as a changeover switch 24 when not particularly distinguished) is provided. Further, each of the changeover switches 24a, 24b, 24c, 24d,... Has four switch circuits 24a ₁ , 24a ₂ , 24a ₃ , 24a whose connection / disconnection state is individually controlled by the processing unit 2c of the resistance measuring unit 2. ₄ , switch circuits 24 _{b 1} , 24 _{b 2} , 24 _{b 3} , 24 _{b 4} , switch circuits 24 c ₁ , 24 c ₂ , 24 c ₃ , 24 c ₄ , switch circuits 24 d ₁ , 24 d ₂ , 24 d ₃ , 24 d ₄ are included.

Further, in this example, as shown in FIG. 1, each switch circuit 24a ₁ , 24b ₁ , 24c ₁ , 24d ₁ has an internal wiring L21 corresponding to the corresponding probe 22a, 22b, 22c, 22d (that is, the first circuit The switch circuits 24a ₂ , 24b ₂ , 24c ₂ , 24d ₂ are connected to the corresponding probes 22a, 22b, 22c, 22d and correspond to the internal wiring L22 (ie, the current supply line L1). The switch circuit 24a ₃ , 24b ₃ , 24c ₃ , 24d ₃ has a function of disconnecting from the second current supply line L2), and each of the switch circuits 24a ₃ , 24b ₃ , 24c ₃ , 24d ₃ has an internal wiring L23 ( In other words, each switch circuit 24a ₄ , 24b ₄ , 24c ₄ , 24d ₄ has a function of disconnecting from the first voltage detection line L3). The corresponding probes 22a, 22b, 22c, and 22d have a function of connecting and disconnecting the corresponding internal wiring L24 (that is, the second voltage detection line L4). With the above configuration, the scanner board 23 has a plurality of corresponding probes 22a when the contacts CNT21, CNT22, CNT23, CNT24 are in electrical contact with the corresponding contacts CNT11, CNT12, CNT13, CNT14. , 22b, 22c, 22d,... Of a pair of output terminals (high potential electrode Hc, low potential electrode Lc) and a pair of detection terminals (high potential electrode Hp, low potential electrode Lp). It functions as a second scanner unit connected to one arbitrary terminal.

  Next, operation | movement of this measuring apparatus 1 is demonstrated. First, the operation of measuring the resistance value of the through hole 81a as the measurement object 81 existing on the circuit board 5 will be described.

  In the measuring apparatus 1, first, the probe units 3 and 4 are moved (approached) to the circuit board 5 side by a moving mechanism (not shown), whereby a plurality of probes 12 and 4 provided in the probe units 3 and 4 are provided. 22 shifts to a state (probing state) in contact with the corresponding test point TP.

  In this case, the through hole 81a has one end connected to a land (test point TP1) formed on the surface of the circuit board 5 facing the probe unit 3, and the other end connected to the probe unit 4 on the circuit board 5. Are connected to a land (test point TP2) formed on the opposite surface. Accordingly, as shown in FIG. 2, two of the probes 12 on the probe unit 3 side are in contact with the test point TP1, and a plurality of probes 22 on the probe unit 4 side are in contact with the test point TP2. Two of the probes 22 come into contact with each other. As an example, in this example, as shown in the figure, it is assumed that two probes 12a and 12b are in contact with the test point TP1, and two probes 22a and 22b are in contact with the test point TP2.

  Each contact CNT21, CNT22, CNT23, CNT24 shifts from a non-contact state to a contact state in which the contacts CNT11, CNT12, CNT13, CNT14 are in one-to-one electrical contact.

In addition, the processing unit 2c of the resistance measuring unit 2 executes a control process for the scanner boards 13 and 23 in the probe units 3 and 4, and for the scanner board 13, as an example, of all the changeover switches 14 only the switch circuit 14a ₁ with respect to the changeover switch 14a corresponding to the probe 12a becomes the connected state, only the switch circuit 14b ₃ with respect to the changeover switch 14b corresponding to the probe 12b becomes the connected state, the changeover switch 14a, except 14b changeover switch 14 (including the changeover switch 14 of the scanner board 13 (not shown) other than the scanner board 13 shown in the figure) is shifted to a state in which all switch circuits are in a disconnected state. Accordingly, the probe 12a is connected to the high potential electrode Hc of the current source 2a via the internal wiring L11 and the first current supply line L1 in the probe unit 3, and the probe 12b is connected to the internal wiring L13 in the probe unit 3 and The first voltage detection line L3 is connected to the high potential electrode Hp of the voltmeter 2b.

The processing unit 2c is, this control process, the scanner board 23, as an example, only the switch circuit 24a ₂ becomes the connected state with respect to the changeover switch 24a corresponding to the probe 22a of all of the changeover switches 24, probe only the switch circuit 24b ₄ with respect to the changeover switch 24b corresponding to 22b becomes the connected state, the changeover switch of the changeover switch 24a, the changeover switch 24 other than 24b (not shown other than the scanner board 23 which is the illustrated scanner board 23 24), all the switch circuits are shifted to a disconnected state. Thereby, the probe 22a is connected to the low potential electrode Lc of the current source 2a via the internal wiring L22 in the probe unit 4, the contact CNT22, the contact CNT12, the internal wiring L12 in the probe unit 3, and the second current supply line L2. The probe 22b is connected to the low potential electrode Lp of the voltmeter 2b via the internal wiring L24 in the probe unit 4, the contact CNT24, the contact CNT14, the internal wiring L14 in the probe unit 3, and the second voltage detection line L4. Connected.

In this state, in the resistance measuring unit 2 of the measuring apparatus 1, the current source 2a is between the first current supply line L1 connected to the high potential electrode Hc and the second current supply line L2 connected to the low potential electrode Lc. Output the measurement current to. This measurement current is obtained from the high potential electrode Hc, the first current supply line L1, the internal wiring L11 in the probe unit 3, the switch circuit 14a ₁ of the changeover switch 14a disposed on the scanner board 13 in the probe unit 3, the probe A probe 12a on the unit 3 side, a test point TP1, a through hole 81a, a test point TP2, a probe 22a on the probe unit 4 side, a switch circuit 24a ₂ of a changeover switch 24a disposed on the scanner board 23 in the probe unit 4, and a probe A current path CC1 (shown by a broken line in FIG. 2) reaching the low potential electrode Lc via the internal wiring L22 in the unit 4, the contact CNT22, the contact CNT12, the internal wiring L12 in the probe unit 3, and the second current supply line L2. Route).

Further, in the resistance measuring unit 2, the voltmeter 2b is configured to convert the voltage between both ends (between the test points TP1 and TP2 in this example) caused by the measurement current flowing through the through hole 81a to the high potential electrode Hp. from the first voltage detection line L3 connected, the internal wiring L13, and test points via the switch circuit 14b ₃ of disposed a changeover switch 14b to the scanner board 13 in the probe unit 3 TP1 in the probe unit 3 The internal wiring L14, the contact CNT14, the contact in the probe unit 3 from the voltage detection path on the high potential side reaching the probe 12b on the probe unit 3 side in contact with the second voltage detection line L4 connected to the low potential electrode Lp. The CNT 24, the internal wiring L24 in the probe unit 4, and the scan in the probe unit 4 Is detected by the low potential side of the voltage detection path leading to the probe 22b of the probe unit 4 side in contact with the test point TP2 via the switch circuit 24b ₄ of disposed Yanabodo 23 has been changeover switch 24b, between the two ends Measure the voltage value of the voltage. Moreover, the voltmeter 2b outputs the measured voltage value of the voltage between both ends to the processing unit 2c.

  In the resistance measurement unit 2, the processing unit 2c performs a resistance measurement process based on the current value of the measurement current supplied from the current source 2a and the voltage value of the voltage between both ends measured by the voltmeter 2b. Then, the resistance value of the through hole 81a is calculated (measured). Thereby, the measurement of the resistance value of the through hole 81a is completed.

  In this case, in the current path CC1 of the measuring apparatus 1, as shown in FIG. 2, the switch 14a, the probe 12a, the through hole 81a, the probe 22a, and the changeover switch 24a are connected between the probe units 3 and 4 from the internal wiring L11. A loop-shaped current path that reaches the internal wiring L12 via the internal wiring L22, the contact CNT22, and the contact CNT12 is formed. However, the path length constituting the loop current path is generally compared with the path lengths of the current supply lines L1 and L2 and the voltage detection lines L3 and L4 that connect the resistance measurement unit 2 and the probe unit 3. Is extremely short. For this reason, the area of the loop of this current path is small. The current supply lines L1 and L2 and the voltage detection lines L3 and L4 connecting the resistance measurement unit 2 and the probe unit 3 are connected to the probes 12 and 4 of the probe units 3 and 4 from the resistance measurement unit 2 as described above. In addition to occupying the main portion of the route to 22 and generally wired in a bundled state, the area of the loop of the current route formed by the current supply lines L1 and L2 is also small. Yes. Therefore, the current path CC1 of the measuring apparatus 1 has a small loop area as a whole.

  In the measuring apparatus 1, the voltage detection path for the voltmeter 2b formed by the above-described voltage detection path on the high potential side and the voltage detection path on the low potential side is also the same as the above-described current path CC1. The area of the loop is small as a whole.

  Therefore, in the measurement apparatus 1 as described above, even in a configuration having only one system for supplying a measurement current (that is, a configuration having only one current source 2a), measurement current supply (energization) ), The voltage value of the voltage across the through hole 81a and the influence of the induced electromotive force generated in the current path CC1 on the voltage detection path and the influence of the inductive noise on the voltage detection path are reliably reduced. The resistance value of the through hole 81a can be measured with high accuracy.

  Next, an operation of measuring the resistance value of the resistance element 81b as the measurement target 81 existing on the circuit board 5 will be described. As an example of this, it is assumed that the resistance element 81b is mounted on the other surface of the circuit board 5, as shown in FIGS.

  In the measuring apparatus 1, first, each probe unit 3, 4 is moved (approached) to the circuit board 5 side by a moving mechanism (not shown), so that it is provided in each probe unit 3, 4 as shown in FIG. The plurality of probes 12 and 22 shift to a state (probing state) in contact with the corresponding test point TP. In FIG. 3, only the contact state between the plurality of probes 22 provided in the probe unit 4 and the corresponding test points TP is illustrated for easy understanding of the operation. In addition, each contact CNT21, CNT22, CNT23, CNT24 shifts to a state of one-to-one electrical contact with the corresponding contact CNT11, CNT12, CNT13, CNT14.

  In this case, one end side of the resistance element 81b is connected to a land (test point TP3) formed on the surface (the other surface) of the circuit board 5 facing the probe unit 4, and the other end side is also connected to the circuit board 5. Is connected to a land (test point TP4) formed on the surface facing the probe unit 4 (the other surface). Therefore, as shown in FIG. 3, the test point TP3 is in contact with two probes 12 of the plurality of probes 22 on the probe unit 4 side, and the test point TP4 is a plurality of probes 22 on the probe unit 4 side. The other two probes 22 are in contact. As an example, in this example, as shown in the figure, it is assumed that two probes 22a and 22b are in contact with the test point TP3, and two probes 22c and 22d are in contact with the test point TP4.

  In addition, the processing unit 2c of the resistance measuring unit 2 executes control processing for the scanner boards 13 and 23 in the probe units 3 and 4, and the switch circuit of the scanner board 13 is related to all the changeover switches 14. Transition to a disconnected state.

The processing unit 2c is, this control process, the scanner board 23, as an example, only the switch circuit 24a ₁ becomes the connected state with respect to the changeover switch 24a corresponding to the probe 22a of all of the changeover switches 24, probe only the switch circuit 24b ₃ with respect to the changeover switch 24b corresponding to 22b becomes the connected state, only the switch circuit 24c ₄ becomes the connected state with respect to the changeover switch 24c corresponding to the probe 22c, the switch with respect to the changeover switch 24d corresponding to probe 22d only circuit 24d ₂ becomes the connected state, and the changeover switch 24a, 24b, 24c, relates changeover switch 24 other than 24d (selector switch 24 of the scanner board 23 (not shown) other than the scanner board 23 that is the shown including) In this case, all the switch circuits are shifted to a disconnected state.

  Thereby, the probe 22a is connected to the high potential electrode Hc of the current source 2a via the internal wiring L21 in the probe unit 4, the contact CNT21, the contact CNT11, the internal wiring L11 in the probe unit 3 and the first current supply line L1. The probe 22b is connected to the high potential electrode Hp of the voltmeter 2b via the internal wiring L23 in the probe unit 4, the contact CNT23, the contact CNT13, the internal wiring L13 in the probe unit 3 and the first voltage detection line L3. The probe 22c is connected to the low potential electrode Lp of the voltmeter 2b via the internal wiring L24 in the probe unit 4, the contact CNT24, the contact CNT14, the internal wiring L14 in the probe unit 3 and the second voltage detection line L4. The probe 22d is connected to the probe uni Internal wiring L22 in Preparative 4, contacts CNTs 22 contact CNT 12, are connected via the internal wiring L12 and the second current supply line L2 of the probe unit 3 to the low potential electrode Lc of the current source 2a.

In this state, in the resistance measuring unit 2 of the measuring apparatus 1, the current source 2a is between the first current supply line L1 connected to the high potential electrode Hc and the second current supply line L2 connected to the low potential electrode Lc. Output the measurement current to. This measurement current is obtained from the high potential electrode Hc, the first current supply line L1, the internal wiring L11 in the probe unit 3, the contact CNT11, the contact CNT21, the internal wiring L21 in the probe unit 4, and the scanner board 23 in the probe unit 4. The switch circuit 24a ₁ of the changeover switch 24a, the probe 22a, the test point TP3, the resistance element 81b, the test point TP4, the probe 22d, the switch circuit 24d ₂ of the changeover switch 24d provided on the scanner board 23, and the probe A current path CC2 (shown by a broken line in FIG. 3) reaching the low potential electrode Lc via the internal wiring L22 in the unit 4, the contact CNT22, the contact CNT12, the internal wiring L12 in the probe unit 3, and the second current supply line L2. Route) .

Further, in the resistance measuring unit 2, the voltmeter 2b is configured to change the voltage between both ends (between the test points TP3 and TP4 in this example) caused by the measurement current flowing through the resistance element 81b to the high potential electrode Hp. From the first voltage detection line L3 connected to the internal wiring L13 in the probe unit 3, the contact CNT13, the contact CNT23, the internal wiring L23 in the probe unit 4, and the switching disposed on the scanner board 23 in the probe unit 4. a voltage detection path for the high-potential-side leading to the probe 22b of the probe unit 4 side in contact via the switching circuit 24b ₃ of the switch 24b and the test point TP3, the second voltage detection line L4 connected to the low potential electrode Lp , Internal wiring L14 in the probe unit 3, contact CNT14, contact CNT24 , Internal wiring L24 of the probe unit 4, and the probe unit 4 side of the probe 22c in contact with the test point TP4 via the switch circuit 24c ₄ of disposed scanner board 23 has been changeover switch 24c of the probe unit 4 And the voltage value of the voltage between both ends is measured. Moreover, the voltmeter 2b outputs the measured voltage value of the voltage between both ends to the processing unit 2c.

  In the resistance measurement unit 2, the processing unit 2c performs a resistance measurement process based on the current value of the measurement current supplied from the current source 2a and the voltage value of the voltage between both ends measured by the voltmeter 2b. The resistance value of the resistance element 81b is calculated (measured). Thereby, the measurement of the resistance value of the resistance element 81b is completed.

  In this case, in the current path CC2 of the measuring apparatus 1, there is no loop-shaped current path formed between the probe units 3 and 4, as shown in FIG. Similarly to the measurement of the resistance value of the through hole 81a, the loop area of the current path formed by the current supply lines L1 and L2 is small. Therefore, the current path CC2 of the measuring apparatus 1 has a very small loop area as a whole.

  Further, in the measuring device 1, the voltage detection path for the voltmeter 2b formed by the above-described voltage detection path on the high potential side and the voltage detection path on the low potential side is also the same as the above-described current path CC2. The area of the loop is small as a whole.

  Therefore, in the measurement apparatus 1 as described above, even in a configuration having only one system for supplying a measurement current (that is, a configuration having only one current source 2a), measurement current supply (energization) ) Due to the induced electromotive force generated in the current path CC1 and the influence of the inductive noise on the voltage detection path while reliably reducing the voltage value of the voltage across the resistance element 81b and The resistance value of the resistance element 81b can be measured with high accuracy.

  Although detailed description is omitted, in this measuring apparatus 1, even when the resistance element 81 b is mounted on one surface of the circuit board 5, the resistance element 81 b is formed on one surface of the circuit board 5 and has a resistance. The first probe 12 on the probe unit 3 side to be brought into contact with the test point to which one terminal of the element 81b is connected, and the probe unit 3 side to be brought into contact with the test point to which the other terminal of the resistance element 81b is connected The measurement current is supplied through a current path including the second probe 12. Further, a voltage detection path on the high potential side from the high potential electrode Hp of the voltmeter 2b to the third probe 12 on the probe unit 3 side that is brought into contact with the test point to which one terminal of the resistance element 81b is connected; A low-potential-side voltage detection path from the low-potential electrode Lp of the voltmeter 2b to the fourth probe 12 on the probe unit 3 side that is brought into contact with the test point to which the other terminal of the resistance element 81b is connected. The voltage value of the voltage across the element 81b is measured. Accordingly, even in this case, the measurement apparatus 1 can perform measurement even in the configuration having only one system for supplying the measurement current as described above (that is, the configuration having only one current source 2a). The voltage between both ends of the resistance element 81b is surely reduced while reducing the influence of the induced electromotive force generated in the current path due to the current supply (energization) on the voltage detection path and the influence of the inductive noise on the voltage detection path. And the resistance value of the resistance element 81b can be measured with high accuracy.

  Thus, in this measuring apparatus 1, the resistance measuring unit 2 and the probe unit 3 are directly connected via the current supply lines L1 and L2 and the voltage detection lines L3 and L4 (a plurality of wiring cables), and the probe unit. Contacts CNT11 to CNT14 are disposed on the facing surface 11a on the 3 side, contacts CNT21 to CNT24 are disposed on the facing surface 21a on the probe unit 4 side, and the probe units 3 and 4 approach the circuit board 5 and both. Of the probes 12 and 22 are shifted to a probing state in which they are probed by test points TP formed on one surface and the other surface of the circuit board 5, and the contacts CNT11 to CNT14 on the probe unit 3 side and the probe unit 4 side Non-contact state in which the contacts CNT21 to CNT24 are separated from each other Then, the contact state is brought into electrical contact with each other, and the internal wirings L21, L22, L23, and L24 on the probe unit 4 side are connected to the internal wirings L11, L12, L13, and L14 on the probe unit 3 side (each current supply line). L1, L2 and internal wiring connected to each voltage detection line L3, L4 on a one-to-one basis.

  Therefore, according to this measuring apparatus 1, each current supply occupying the main part of the path (the current path and the voltage detection path) from the resistance measurement unit 2 to each probe 12 and 22 of the probe units 3 and 4. Since the loop area for the current path and the loop area for the voltage detection path in the lines L1 and L2 and the voltage detection lines L3 and L4 can be made small, there is only one system for supplying the measurement current. Even in a configuration that is not implemented (that is, a configuration that has only one current source 2a), the influence of the induced electromotive force generated in the current paths CC1 and CC2 on the voltage detection path due to the supply (energization) of the measurement current In addition, the voltage value of the voltage across the measurement object 81 and the resistance value of the measurement object 81 can be measured with high accuracy while reliably reducing the influence of inductive noise on the voltage detection path. It can be. Further, according to this measuring apparatus 1, the probe unit 4 includes contacts CNT21 to CNT24 on the probe unit 4 side, contacts CNT11 to CNT14 on the probe unit 3 side, internal wirings L11, L12, L13, L14 on the probe unit 3 side, Unlike the above-described measuring device 51, the wiring cable that directly connects the resistance measuring unit 2 and the probe unit 4 because of the configuration connected to the resistance measuring unit 2 via the lines L1, L2, L3, and L4. As a result of eliminating the need for a wiring cable that spans between the probe units 3 and 4, the circuit board 5 is brought into and out of the measurement position between the probe units 3 and 4. However, it is possible to avoid the occurrence of a situation in which the wiring cable becomes an obstacle.

  In addition to the configuration of the measurement apparatus 1 described above, the processing unit 2c of the resistance measurement unit 2 inspects the measurement object 81 that is also the inspection object based on the resistance value of the measurement object 81 measured by the resistance measurement process. It can also be configured to execute processing. In this configuration, the measuring apparatus 1 functions as an inspection apparatus that is a circuit board inspection apparatus that inspects the measurement object 81 arranged on the circuit board 5 (that is, inspects the circuit board 5). In this case, in the inspection process, the processing unit 2c, for example, determines a resistance value of the measurement object 81 measured in the resistance measurement process and a predetermined determination range (for example, the measurement object 81 is the resistance value of the measurement object 81). By comparing with the range of resistance values that can be taken when normal, and determining that the measured resistance value is included in the determination range is a non-defective product, and when not included, The measurement object 81 is inspected.

  Further, in the measurement apparatus 1 described above, the current source 2a is configured with a constant current source, but may be configured with a non-constant current source. In this case, the current source 2a is configured so that the current value of the measurement current being output can be output to the processing unit 2c in response to a request from the processing unit 2c or periodically. Also in this configuration, the processing unit 2c measures the resistance value of the measurement object 81 by acquiring the current value of the measurement current from the current source 2a in accordance with the timing of acquiring the voltage value measured by the voltmeter 2b. It becomes possible to do.

1 Measuring device
2 Resistance measurement unit 2a Current source 2b Voltmeter
3,4 probe unit
5 Circuit board 11a Opposing surface 12, 12a, 12b, 12c, 12d Probe 13, 23 Scanner board 21a Opposing surface 22, 22a, 22b, 22c, 22d Probe CNT11 to CNT14, CNT21 to CNT24 Contact Hc, Hp High potential electrode L1, L2 Current supply line L3, L4 Voltage detection line Lc, Lp Low potential electrode TP, TP1, TP2, TP3, TP4 Test point

Claims (2)

A resistance measurement unit having a current output unit for outputting a measurement current from a pair of output terminals and a voltage measurement unit for measuring a voltage between the pair of detection terminals;
A plurality of probing points that are opposed to one surface of the circuit board arranged at the measurement position and that can be moved toward and away from the circuit board and that can be probed to a plurality of test points formed on the one surface. The probe is provided on a first facing surface that faces the one surface, and any one of the plurality of probes is connected to any one of the pair of output terminals and the pair of detection terminals. A first probe unit having a first scanner unit for
Opposing to the other surface of the circuit board arranged at the measurement position and arranged to be movable toward and away from the circuit board, it is possible to probe a plurality of test points formed on the other surface. A plurality of probes are provided on a second facing surface facing the other surface, and any one of the plurality of probes is connected to any one of the pair of output terminals and the pair of detection terminals. A measuring device comprising a second probe unit having a second scanner unit for connection,
The resistance measurement unit and the first probe unit are directly connected via a plurality of wiring cables for electrically connecting the pair of output terminals and the pair of detection terminals and the first scanner unit,
A pair of the first facing surface and the pair of detection terminals are disposed at a portion of the first facing surface that is directly opposite to the second facing surface and via the internal wiring and the wiring cable in the first probe unit. A plurality of first contacts connected together,
A portion of the second facing surface that is directly opposite to the first facing surface is disposed to face the first contact, and is connected to the second scanner unit via an internal wiring in the second probe unit. A plurality of second contacts;
When the probes of the first probe unit and the second probe unit are in a probing state in which the probe is probed to the test point, the first contact unit and the second contact are in contact with each other. And measuring the resistance measurement unit on the circuit board and connected between the pair of detection terminals based on the current value of the measurement current and the voltage value of the voltage measured by the voltage measurement unit. A measuring device that measures a resistance value of a target by a four-terminal method, and when the probing state is released, the first contact and the second contact are separated from each other and shift to a non-contact state. Provided with a measuring apparatus according to claim 1, is disposed in said resistance measuring unit, the processing unit for checking the measurement object based on the resistance value the measurement with measuring said resistance value of said measurement object Inspection equipment provided.

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