JP6560653B2 - 細長いナノスケール構造の選択加熱方法 - Google Patents
細長いナノスケール構造の選択加熱方法 Download PDFInfo
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- 239000002086 nanomaterial Substances 0.000 title claims description 41
- 238000000034 method Methods 0.000 title claims description 36
- 238000010438 heat treatment Methods 0.000 title claims description 24
- 230000010287 polarization Effects 0.000 claims description 29
- 239000004065 semiconductor Substances 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 18
- 239000002019 doping agent Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 230000004913 activation Effects 0.000 claims description 5
- 238000001953 recrystallisation Methods 0.000 claims description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 3
- 230000031700 light absorption Effects 0.000 claims description 3
- 239000002121 nanofiber Substances 0.000 claims description 3
- 239000002071 nanotube Substances 0.000 claims description 3
- 239000002070 nanowire Substances 0.000 claims description 3
- 239000002159 nanocrystal Substances 0.000 claims 1
- 238000000137 annealing Methods 0.000 description 7
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
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Description
半導体基板を提供する工程と、
基板の上に、第1軸に沿って配置された少なくとも1つの第1の細長いナノ構造と、第2軸に沿って配置された少なくとも1つの第2の細長いナノ構造とを、2つの軸が互いに異なるように配置されるように、作製する工程と、
細長いナノ構造を加熱する工程と、を含み、
第1と第2のナノ構造で異なる光吸収が起きるように、所定の波長と所定の偏光を有する光を提供することで、構造が異なる温度に加熱される。
Claims (16)
- 半導体デバイスの製造方法であって、
半導体基板を提供する工程と、
基板の上に、第1軸に沿って配置された少なくとも1つの第1の細長いナノ構造と、第2軸に沿って配置された少なくとも1つの第2の細長いナノ構造とを形成する工程であって、2つの軸は互いに異なる方向に配置される工程と、
(i)第1および第2のナノ構造に、所定の波長と所定の偏光面を有する光を、第1の時間だけ供給し、第1および第2のナノ構造で、異なる光の吸収が生じ、これにより第1のナノ構造を第1の温度に加熱する工程、
(ii)偏光面に対して半導体基板を回転させ、または半導体基板に対して偏光面を回転させる工程、および
(iii)半導体基板または偏光面を回転させた後、第1のおよび第2のナノ構造に、第2の時間だけ光を供給し、第2のナノ構造を第2の温度に加熱する工程、により第1および第2のナノ構造を異なる温度に加熱する工程と、
を含む方法。 - 第1軸および第2軸は、互いに直交する請求項1に記載の方法。
- 偏光面は、第1軸または第2軸に平行である請求項1に記載の方法。
- 偏光面は、第1のナノ構造に対して第1の角度で配置され、第2のナノ構造に対して第2の角度で配置され、第1の角度と第2の角度とは異なる請求項1に記載の方法。
- 第1のナノ構造は、第2のナノ構造の材料とは異なる材料を含む請求項1に記載の方法。
- 第1および第2のナノ構造は、互いに異なる半導体材料を含む半導体フィンである請求項5に記載の方法。
- 半導体材料は、Si、Ge、SiGe、III−V材料からなるリストから選択される請求項6に記載の方法。
- 第1および第2のナノ構造は、ナノチューブ、ナノワイヤ、またはナノファイバである請求項1に記載の方法。
- 光の波長は、第1または第2の細長いナノ構造の幅の10〜30倍の範囲内である請求項1に記載の方法。
- 光の波長は、157nm〜1060nmの範囲内である請求項1に記載の方法。
- 加熱工程は、ナノ構造中に注入されたドーパント元素の活性化のために適用される請求項1に記載の方法。
- 加熱工程は、ナノ構造の再結晶のために適用される請求項1に記載の方法。
- 光の波長は、第1または第2のナノ構造の材料の誘電関数に基づいて選択される請求項1に記載の方法。
- 光の波長は、第1または第2のナノ構造の材料の誘電関数が最大になるように選択される請求項13に記載の方法。
- 第1および第2のナノ構造は、半導体基板の表面から外に延びない請求項1に記載の方法。
- 波長は第1の波長であり、
細長いナノ構造を異なる温度に加熱する工程は、更に、第1の波長を有する光を第1の時間だけ供給した後に、第2の波長を有する光を細長いナノ構造に第2の時間だけ供給する工程を含む、請求項1に記載の方法。
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EP3514821B1 (en) * | 2018-01-18 | 2020-05-27 | Laser Systems & Solutions of Europe | Method of laser irradiation of a patterned semiconductor device |
KR20200073701A (ko) | 2018-12-14 | 2020-06-24 | 삼성전자주식회사 | 발열 투명판 및 그 제조방법과 발열 투명판을 포함하는 발열장치와 이를 포함하는 물체 |
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US20090023262A1 (en) | 2004-08-04 | 2009-01-22 | Cheng-Guo Jin | Method for fabricating semiconductor device |
US7786024B2 (en) * | 2006-11-29 | 2010-08-31 | Nanosys, Inc. | Selective processing of semiconductor nanowires by polarized visible radiation |
US9362406B2 (en) | 2012-12-12 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company Limited | Faceted finFET |
US9153644B2 (en) | 2013-07-18 | 2015-10-06 | Freescale Semiconductor, Inc. | Backscattering for localized annealing |
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