JP6543889B2 - Electronic device, electronic device and mobile - Google Patents

Description

  The present invention relates to an electronic device, an electronic apparatus equipped with the electronic device, and a mobile body.

Electronic devices using a piezoelectric material such as quartz are used in many fields as electronic components such as oscillators, vibrators, resonators, and filters.
Among these, the oscillator is widely used in electronic devices as a time source, a timing source such as a control signal, a reference signal source, and the like. The oscillator is mounted in a container having a housing space, a vibrating reed having excitation electrodes provided on both main surfaces of a vibrating region of the vibrating reed, and an electronic component for exciting the vibrating reed to generate a stable reference frequency. And is hermetically sealed. The vibrating reed is mounted in a cantilever structure in which only one end side is fixed in order to avoid the influence of strain due to the difference in linear expansion coefficient with the constituent material of the container. Therefore, when an impact is applied to the oscillator due to a drop or the like, there is a problem that the free end of the vibrating reed is largely displaced and may be damaged by contacting a part of the container.

Patent Document 1 discloses, in a container in which a crystal piece which is a vibrating piece is disposed, a configuration of a pillow portion disposed on the free end side of the crystal piece which serves as a support when an impact is applied to the crystal piece. .
Further, in Patent Document 2, in a container in which a piezoelectric vibrator which is a vibrating piece is disposed, a direction connecting a free end portion and a fixed end portion of the piezoelectric vibrator serving as a support when an impact is applied to the piezoelectric vibration element The configuration is disclosed in which the pillow members (pillows) arranged in the intersecting direction are inclined surfaces that are inclined upward from the inside to the outside of the piezoelectric vibrator.

JP 2004-266595 A Unexamined-Japanese-Patent No. 11-112269 gazette

  However, in the configuration in Patent Document 1, the impact resistance of the vibrating reed can be improved by arranging the inner side of the pillow portion inside the outer periphery of the vibrating reed, but for example, the inner side of the pillow portion and the vibration Depending on the positional relationship between the one piece and the excitation electrode, the pillow portion may come in contact with the excitation electrode, which may deteriorate the characteristics of the vibrating reed. Further, in the configuration in Patent Document 2, the pillow portion is disposed at the long side middle portion of the vibrating reed, so for example, depending on the degree of impact applied to the vibrating reed, the free end of the vibrating reed contacts the container There is a possibility of damage to the vibrating reed or deterioration of the characteristics of the vibrating reed.

  The present invention has been made to solve at least a part of the above-described problems, and can be realized as the following modes or application examples.

  Application Example 1 In the electronic device according to this application example, there is provided a container including a bottom plate and a mounting portion and a protrusion disposed on the bottom plate, a first surface, a second surface, and the first surface. And a side surface connecting the second surface, the side surface being disposed opposite to the first side surface and the second side surface disposed opposite to each other and extending in a direction intersecting the first side surface and the second side surface It has a third side surface and a fourth side surface that are present, and is not mounted on the end portion on the third side surface side on the first surface and the mounting portion mounted on the mounting portion via the connection member A vibrating reed provided with an end on the fourth side on the first surface, the vibrating reed so that the protrusion and the first surface face each other with a gap; An end of the third side is connected to the mounting portion via the connection member, and the protrusion A first virtual surface obtained by overlapping the surface on which the connecting member of the mounting portion is disposed, and the portion is disposed so as to at least partially overlap the first surface on the fourth side in a plan view; And a second virtual surface obtained by extending the surface of the protrusion facing the vibrating reed is larger than 90 degrees and smaller than 180 degrees.

  According to this application example, the protrusion is disposed on the free end side of the vibrating reed so as to partially overlap the vibrating reed. Therefore, the free end of the vibrating reed displaces when an impact is applied to the vibrating reed. Can be supported at overlapping points. Therefore, it is possible to further reduce the breakage of the vibrating reed caused by the large displacement of the free end of the vibrating reed due to an impact. Further, in the protruding portion, the distance between the vibrating reed and the protruding portion is longer at the inner portion than at the outer edge portion of the vibrating reed. Therefore, there is a possibility that the vibrating reed is further bent after the free end of the vibrating reed comes into contact with the projection after the impact is applied to the vibrating reed, and the projection and the excitation electrode come in contact and damage the excitation electrode. It can be reduced. Therefore, it is possible to reduce the change of the reference frequency and the deterioration of the aging characteristics, and it is possible to obtain an electronic device which is excellent in impact resistance and has stable oscillation characteristics.

  Application Example 2 In the electronic device according to the application example described above, the distance between the bottom plate and the surface of the protrusion facing the vibrating reed is monotonously shortened from the outer edge to the inner side of the vibrating reed. It is characterized by

  According to this application example, the projection is formed with an inclined surface in which the distance between the bottom plate and the surface of the projection facing the vibrating reed is monotonously shortened from the outer edge to the inner side of the vibrating reed. Therefore, there is a possibility that the vibrating reed is further bent after the free end of the vibrating reed comes into contact with the projection after the impact is applied to the vibrating reed, and the projection and the excitation electrode come in contact and damage the excitation electrode. It is possible to reduce the change of the reference frequency and the deterioration of the aging characteristics.

  Application Example 3 In the electronic device according to the application example described above, two of the protrusions are provided, and in plan view, one protrusion is partially overlapped with the first surface on the first side surface side. And the other projecting portion is disposed so as to partially overlap with the first surface on the second side and, in a plan view, the end of the first side of the vibrating reed and The distance between the end of the second side and the end of the second side is L1, the end of the one protrusion facing the other protrusion and the end of the other protrusion facing the one protrusion And the distance between the end on the first side of the electrode film and the end on the second side is L3, and the relationship of L1> L2> L3 is satisfied. I assume.

  According to this application example, the first projection and the second projection can support the free end of the vibrating reed when an impact is applied to the vibrating reed by setting L1> L2. It is possible to reduce the breakage of the vibrating reed caused by the large displacement of the free end of the vibrating reed. Further, by establishing a relationship of L2> L3, when an impact is applied to the vibrating reed, the first and second protrusions and the electrode film constituting the excitation electrode may come in contact with each other and damage the excitation electrode. Therefore, it is possible to reduce the change of the reference frequency and the deterioration of the aging characteristics.

  Application Example 4 In the electronic device according to the application example described above, the container may have a first side wall portion disposed in a direction along the first side surface and a direction along the second side surface in a plan view. And a third side wall disposed in a direction along the fourth side surface, and the one protrusion includes the first side wall and the third side wall. And the other protruding portion protrudes from the region where the second side wall portion and the third side wall portion are connected. It is characterized by protruding into the

  According to this application example, since the first protrusion and the second protrusion are disposed from the third side wall of the container toward the third side surface direction of the vibrating reed, the portion overlapping the vibrating reed is It can be elongated along the direction connecting the free end and the fixed end. Therefore, when an impact is applied to the vibrating reed, the free end side of the vibrating reed having a large displacement can be supported in a longer range, so that the vibrating reed generated by a large displacement of the free end of the vibrating reed due to an impact The possibility of breakage can be further reduced.

  Application Example 5 In the electronic device according to the application example described above, the vibrating reed further includes a first region having a first thickness in a direction normal to the first surface on at least the first surface, and the first region. And a second region having a second thickness thinner than the first region in the normal direction of the first surface on the outer periphery of the region, and an end on the first side face side of the first region, and The distance between the second side end is L4, the distance between the end of the fourth side and the end of the first region on the fourth side is W1, the end of the fourth side and the end The longer one of the distance between the end of the first protrusion on the third side and the distance between the end of the fourth side and the end of the second side on the third side It is characterized in that the relationship of L2> L4 and W1> W2 is satisfied as W2.

  According to this application example, even in the case of the vibrating piece of the mesa structure having the thick first region at the central portion of the vibrating piece, the first protrusion and the first protrusion can be obtained by setting L2> L4 and W1> W2. The contact between the two projections and the first region of the vibrating reed can reduce the possibility of breakage of the first region of the vibrating reed.

  Application Example 6 In the electronic device described in the application example, an electronic component is disposed in the container.

  According to this application example, by mounting the electronic component together with the vibrating piece, it is possible to obtain an electronic device which is excellent in impact resistance characteristics and has stable oscillation characteristics.

  Application Example 7 An electronic apparatus according to this application example includes the electronic device according to any one of application examples 1 to 6.

  According to this application example, by providing the electronic device of the present invention, an electronic device having excellent impact resistance and high reliability can be obtained.

  Application Example 8 A mobile unit according to this application example is characterized by including the electronic device according to any one of Application Examples 1 to 6.

  According to this application example, by providing the electronic device of the present invention, a mobile body having excellent impact resistance and high reliability can be obtained.

FIG. 1 is a schematic plan view showing the structure of an oscillator according to a first embodiment of the present invention. Sectional drawing of the AA in FIG. FIG. 7 is a schematic plan view showing the structure of an oscillator according to a second embodiment of the present invention. Sectional drawing of the BB line in FIG. FIG. 7 is a schematic plan view showing the structure of an oscillator according to a third embodiment of the present invention. Sectional drawing of the CC line in FIG. The schematic plan view which shows the structure of the oscillator which concerns on the modification 1 of embodiment of this invention. Sectional drawing of the DD line in FIG. The schematic plan view which shows the structure of the oscillator which concerns on the modification 2 of embodiment of this invention. Sectional drawing of the EE line in FIG. The schematic plan view which shows the structure of the vibrator | oscillator which concerns on the modification 3 of embodiment of this invention. Sectional drawing of the FF line in FIG. FIG. 10 is a perspective view showing a configuration of a mobile (or notebook) personal computer to which an electronic device including the electronic device of the present invention is applied. FIG. 1 is a perspective view showing a configuration of a mobile phone (including PHS) to which an electronic device including the electronic device of the present invention is applied. FIG. 1 is a perspective view showing a configuration of a digital camera to which an electronic device provided with an electronic device of the present invention is applied. BRIEF DESCRIPTION OF THE DRAWINGS The perspective view which shows schematically the motor vehicle as an example of a mobile body provided with the electronic device of this invention.

  Hereinafter, embodiments of the present invention will be described in detail based on the drawings. In each of the drawings shown below, in order to make each component have a size that can be recognized in the drawings, the dimensions and ratios of each component may be appropriately different from the actual components and described. is there.

[Electronic device]
First Embodiment
First, as an example of the electronic device according to the first embodiment of the present invention, an oscillator 1 provided with a vibrating reed 30 will be described and described with reference to FIGS. 1 and 2.
FIG. 1 is a schematic plan view showing the structure of an oscillator according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line A-A in FIG. In addition, illustration of the cover member 16 is abbreviate | omitted for convenience of explanation in the following schematic plan views including FIG. Further, in the following drawings including FIG. 1, for convenience of explanation, the X axis, the Y axis, and the Z axis are illustrated as three axes orthogonal to each other, and the tip side of the illustrated arrow is , The proximal side is "-side". Also, in the following, a direction parallel to the X axis is referred to as “X axis direction”, a direction parallel to the Y axis is referred to as “Y axis direction”, and a direction parallel to the Z axis is referred to as “Z axis direction”. Furthermore, for convenience of explanation, when viewed in the Y-axis direction, it is referred to as "plan view", and in plan view, the surface in the Y-axis direction is the main surface, the surface in the + Y-axis direction is the upper surface, and the surface in the -Y-axis direction. It demonstrates as a lower surface.

(Oscillator)
As shown in FIGS. 1 and 2, the oscillator 1 is configured to include a container 10, a vibrating reed 30 accommodated in a cavity 50 of the container 10, and an IC chip 60 as an electronic component. The cavity 50 for accommodating the vibrating reed 30 and the IC chip 60 is hermetically sealed in an inert gas atmosphere such as nitrogen, argon gas or a substantially vacuum reduced pressure atmosphere.

(container)
The container 10 is formed by laminating a first substrate 20 serving as the bottom plate 12 and frame-shaped second and third substrates 22 and 24 from which the central portion serving as the side wall 14 is removed. A plurality of external terminals 28 are formed on the lower surface of the first substrate 20 (bottom plate 12), and a frame-shaped sealing member 26 is formed on the upper surface of the third substrate 24. Further, the bottom plate 12, the region surrounded by the side wall 14, and the lid member 16 joined by the sealing member 26 constitute a cavity 50 which is a housing space for housing the vibrating reed 30 and the IC chip 60.

  A plurality of connection terminals 54 for electrically connecting to the IC chip 60 are formed on the side of the cavity 50 which is the upper surface of the first substrate 20 (bottom plate 12), and the connection terminals 54 overlap the third substrate 24 of the second substrate 22. A plurality of connection terminals 52 for mounting the vibrating reed 30 and for electrical connection are formed on the upper surface of the mounting portion 17 in the non-region. Note that at least one of the connection terminals 52 and 54 and the external terminal 28 provided on the lower surface of the first substrate 20 (bottom plate 12) are electrically connected via a through electrode and an interlayer wiring (not shown).

  In the container 10, in a region surrounded by the side wall 14 on the upper surface of the first substrate 20 (bottom plate 12), a first protrusion 18a which is one protrusion, a second protrusion 18b which is the other protrusion, and A mounting unit 17 is provided. The first projecting portion 18a, the second projecting portion 18b, and the mounting portion 17 are integrally formed with the second substrate 22 constituting the side wall 14, and are disposed on the upper surface of the first substrate 20 (bottom plate 12). It is done.

(Vibrator)
The vibrating reed 30 is a plate having a rectangular shape in a plan view, and is disposed on a substrate 32 made of a piezoelectric material such as quartz, and a first surface 32 a and a second surface 32 b serving as the front and back of the main surface of the substrate 32. And an electrode film such as a lead electrode 42 for electrically connecting the excitation electrode 40 and the pad electrode 44. Two pad electrodes 44 are respectively formed on the first surface 32 a and the second surface 32 b of the substrate 32 at both ends of the end of the substrate 32 in the longitudinal direction (X-axis direction). It is arranged to overlap. The overlapping pad electrodes 44 are electrically connected by the electrode film via the side surface of the substrate 32. The vibrating reed 30 vibrates at a predetermined resonant frequency by applying a predetermined alternating voltage to the excitation electrode 40 through the connection terminal 52 provided in the container 10.

  In the present embodiment, the substrate 32 will be described by taking, as an example, a quartz crystal plate that mainly vibrates in thickness shear. The substrate 32 uses a quartz crystal plate cut out at a cut angle called AT cut. The AT cut is mainly obtained by rotating a plane (Y plane) including the X axis and the Z axis, which are crystal axes of quartz, around the X axis from the Z axis by about 35 degrees 15 minutes in the counterclockwise direction. It is said that it is cut out so as to have a surface (a main surface including an X axis and a Z 'axis). Further, the substrate 32 has its longitudinal direction aligned with the X-axis which is the crystal axis of quartz.

  The vibrating reed 30 is disposed as a side surface connecting the first surface 32 a and the second surface 32 b of the substrate 32, the first side surface 34 a and the second side surface 34 b disposed opposite to each other, and the first side surface 34 a and the second side surface 34 b. And a third side 34c and a fourth side 34d extending in the direction intersecting with The vibrating reed 30 is formed on the upper surface of the region not overlapping the third substrate 24 of the second substrate 22 of the container 10 and the pad electrode 44 provided at the end on the third side 34 c side on the first surface 32 a The connection terminals 52 are aligned with each other, mounted on the mounting portion 17 of the container 10 via the connection member 62 such as a conductive adhesive, and electrically connected. The end on the first surface 32 a on the fourth side 34 d side facing the third side 34 c is not placed on the mounting portion 17. Therefore, the vibrating reed 30 has a cantilever structure in which an end on the first surface 32a on the third side 34c side is a fixed end, and an end on the first surface 32a on the fourth side 34d is a free end. , And placed inside the container 10.

(IC chip)
The IC chip 60 as an electronic component has an oscillation circuit for vibrating the vibrating reed 30. Therefore, by controlling the vibration of the vibrating reed 30 by the IC chip 60, it is possible to extract a signal of a predetermined resonant frequency from the vibrating reed 30.
The IC chip 60 is placed on the upper surface of the first substrate 20 (bottom plate 12) in a region surrounded by the second substrate 22 constituting the side wall 14 via the connection member 64 such as an adhesive, and the first substrate The connection terminals 54 formed on the top surface of the bottom plate 12 (bottom plate 12) are electrically connected via bonding wires 66 and the like. The electrical connection between the IC chip and the connection terminal 54 may be made via a metal bump such as gold (Au) or solder other than the bonding wire 66, for example.

Next, the positional relationship between the first projecting portion 18 a and the second projecting portion 18 b arranged inside the container 10 and the vibrating reed 30 in plan view and the distance relationship in the normal direction of the first surface 32 a of the vibrating reed 30. Will be explained.
The first protrusion 18 a and the second protrusion 18 b protrude from the side wall 14 (third side wall portion 36 c) on the fourth side 34 d side of the vibrating reed 30 toward the region surrounded by the side wall 14, and It is disposed on the upper surface of the bottom plate 12). The first protrusion 18 a is disposed along the first side wall 36 a on the side of the first side 34 a of the vibrating bar 30 in plan view, and the second protrusion 18 b is a second side of the vibrating bar 30 in plan It is arrange | positioned along the 2nd side wall part 36b by 34b side. Further, the first protrusion 18 a and the second protrusion 18 b and the first surface 32 a of the vibrating reed 30 are disposed to face each other with a gap. Furthermore, the first projecting portion 18a and the second projecting portion 18b are disposed in a position where at least a part thereof overlaps with the first surface 32a on the fourth side 34d side of the vibrating bar 30 in a plan view.

  Further, the distance between the bottom plate 12 and the normal direction (Y-axis direction) between the surface of the first protrusion 18 a and the surface of the second protrusion 18 b facing the vibrating bar 30 is the outer edge of the vibrating bar 30 in plan view. It is configured to be shorter from the position overlapping with the four side surfaces 34 d to the position overlapping with the inner portion of the vibrating reed 30. In addition, the first virtual surface P1 is an extension of the surface on which the connection member 62 of the mounting portion 17 is disposed, and the second virtual surface P2 is an extension of a surface of the first protrusion 18a and the second protrusion 18b facing the vibrating bars 30. Is larger than 90 degrees and smaller than 180 degrees. That is, in the first projecting portion 18a and the second projecting portion 18b, the lengths of the first projecting portion 18a and the second projecting portion 18b in the plate thickness direction (Y-axis direction) are from the third side wall portion 36c to the vibrating reed 30 The inclined surface is provided to be gradually shortened in the direction of the third side surface 34c. Therefore, the distance between the vibrating reed 30 and the first protrusion 18a and the second protrusion 18b is from the outer edge (the fourth side 34d side) to the inner side (the excitation electrode 40 side or the third side 34c side) of the vibrating reed 30 It is monotonously longer toward the direction, that is, changes in one direction to become longer.

  With such a configuration, the first protrusion 18 a and the second protrusion 18 b are partially at the free end side which is the fourth side 34 d side of the vibrating reed 30 and at two places, the vibrating reed 30. Since they are disposed so as to overlap, it is possible to support the free end portion of the vibrating reed 30 which is displaced by applying an impact to the vibrating reed 30 at two overlapping points. Therefore, the possibility of breakage of the vibrating reed 30 caused by a large displacement of the free end of the vibrating reed 30 due to an impact can be further reduced.

  Further, in the first protrusion 18a and the second protrusion 18b, the distance between the vibrating reed 30 and the first protrusion 18a and the second protrusion 18b is from the outer edge (the fourth side surface 34d side) of the vibrating reed 30 to the inner portion. An inclined surface which is monotonously elongated toward (the excitation electrode 40 side or the third side surface 34c side) is formed. Therefore, even if the vibrating reed 30 is further bent after the free end of the vibrating reed 30 contacts at least one of the first projecting portion 18a and the second projecting portion 18b, the vibrating reed 30 is displaced by an impact being applied to the vibrating reed 30. It is possible to reduce the possibility of contact between the first protrusion 18 a and the second protrusion 18 b and the excitation electrode 40. Therefore, since the possibility of damaging the excitation electrode 40 can be reduced, the change of the reference frequency and the deterioration of the aging characteristics can be reduced, and the oscillator 1 having excellent shock resistance and stable oscillation characteristics is obtained. be able to.

  As described above, in the above description, an AT-cut quartz substrate is described as an example, but the cut angle is not particularly limited, and may be Z-cut, BT-cut, or the like. Further, the shape of the substrate 32 is not particularly limited, and if it has a fixed end and a free end and is mounted in a cantilever structure, a two-leg tuning fork, an H-shaped tuning fork, a tripod tuning fork, a comb tooth type The shape may be orthogonal, rectangular, or the like. In addition to the AT cut, the Z cut, and the BT cut, the vibrating reed 30 may be a quartz vibrating reed using quartz as a substrate material, for example, an SC cut quartz vibrating reed, or SAW (Surface Acoustic Wave) resonance. It may be a piece, a micro electro mechanical systems (MEMS) vibrating piece, or a vibrating piece using another substrate material. Moreover, as a substrate material of the vibrating reed 30, the SAW resonator piece, and the MEMS vibrating reed, in addition to quartz, piezoelectric single crystals such as lithium tantalate and lithium niobate, piezoelectric ceramics such as lead zirconate titanate, etc. The piezoelectric material or silicon semiconductor material may be used. As an excitation means of the vibrating reed 30, the SAW resonator piece, or the MEMS vibrating reed, a piezoelectric effect may be used, or electrostatic drive by Coulomb force may be used.

Next, the constituent material of each part which comprises the container 10 is demonstrated.
As a constituent material of the first substrate 20 to be the bottom plate 12 for forming the container 10 and the frame-like second substrate 22 and the third substrate 24 from which the central portion to be the side wall 14 is removed, insulating properties are possessed. It is not particularly limited as long as it is used, for example, various kinds of oxide ceramics such as alumina, silica, titania and zirconia, nitride ceramics such as silicon nitride, aluminum nitride and titanium nitride, and carbide ceramics such as silicon carbide Ceramics, glass, resin or the like can be used.

  The constituent material of the external terminal 28 and the connection terminals 52 and 54 is not particularly limited. For example, gold (Au), gold alloy, platinum (Pt), aluminum (Al), aluminum alloy, silver (Ag), silver alloy , Chromium (Cr), chromium alloy, nickel (Ni), copper (Cu), molybdenum (Mo), niobium (Nb), tungsten (W), iron (Fe), titanium (Ti), cobalt (Co), zinc Metallic materials such as (Zn), zirconium (Zr), and alloys combining them can be used.

  The lid member 16 is formed by processing glass, ceramics or a metal flat plate, and mainly has a flat plate shape. Further, the constituent material of the lid member 16 is not particularly limited, but it is preferable to use an inorganic material or a metal material whose linear expansion coefficient is similar to that of the container 10. Therefore, for example, when the container 10 is a ceramic substrate, an alloy such as an Fe-Ni-Co alloy such as Kovar or an Fe-Ni alloy such as 42 alloy may be used as a constituent material of the lid member 16 preferable.

Electrode films such as the excitation electrode 40, the lead electrode 42, and the pad electrode 44 formed on the substrate 32 of the vibrating reed 30 are composed of two layers of an underlayer and an upper layer.
The material of the underlayer includes a material having adhesiveness to the substrate 32, and specifically, chromium (Cr), nickel (Ni), titanium (Ti), tungsten (W), silver (Ag) ), Aluminum (Al), etc., and mixtures or alloys of one or more of these metal elements are used.
On the other hand, as the constituent material of the upper layer, a material having a particularly high electric conductivity may be mentioned. Specifically, noble metal elements such as gold (Au), platinum (Pt) and silver (Ag) and noble metal elements thereof A mixture or alloy containing one or more of the following is used.

  Next, with respect to the positional relationship between the vibrating reed 30 and the excitation electrode 40, the distance between the end of the first side 34a of the vibrating reed 30 and the end of the second side 34b in the Z-axis direction is L1, The distance between the end of the first projection 18a facing the second projection 18b and the end of the second projection 18b facing the first projection 18a in the Z-axis direction is L2, and the electrode film When the distance in the Z-axis direction between the end on the first side 34a side of the excitation electrode 40 formed on the first surface 32a of a certain vibrating reed 30 and the end on the second side 34b is L3, The relationship of L1> L2> L3 is satisfied.

  By setting L1> L2 in relation of each dimension, when an impact is applied to the vibrating reed 30, the first projecting portion 18a and the second projecting portion 18b can support the free end of the vibrating reed 30, It is possible to reduce the possibility of breakage of the vibrating reed 30 caused by a large displacement of the free end of the vibrating reed 30 due to an impact. Further, by setting L2> L3, when an impact is applied to the vibrating reed 30, the first projecting portion 18a and the second projecting portion 18b are in contact with the electrode film constituting the excitation electrode 40, and the excitation electrode 40 is Since the possibility of damage can be reduced, it is possible to reduce the change of the reference frequency and the deterioration of the aging characteristics. Further, as described above, since the vibrating reed 30, the excitation electrode 40, the first projecting portion 18a, and the second projecting portion 18b are disposed, for example, to reduce the series equivalent resistance of the vibrating reed 30, the excitation electrode 40 Can be extended in the direction of the fourth side surface 34d, the possibility of the excitation electrode 40 coming into contact with the first protrusion 18a and the second protrusion 18b can be reduced. Therefore, when an impact is applied to the vibrating reed 30, the possibility that the first projection 18a and the second projection 18b contact the electrode film constituting the excitation electrode 40 and damage the excitation electrode 40 can be reduced. It is possible to reduce the change of the reference frequency and the deterioration of the aging characteristics.

Next, the positions of the first protrusion 18 a and the second protrusion 18 b disposed in the area surrounded by the side wall 14 will be described in detail.
The first projecting portion 18a is disposed from the area where the first side wall portion 36a and the third side wall portion 36c of the side wall 14 are connected to the direction of the third side surface 34c of the vibrating reed 30, and the second projecting portion 18b is arranged from the region where the second side wall portion 36b and the third side wall portion 36c of the side wall 14 are connected in the direction of the third side surface 34c of the vibrating reed 30.

  With such an arrangement, since the first protrusion 18 a and the second protrusion 18 b are arranged from the third side wall 36 c of the container 10 toward the third side 34 c of the vibrating reed 30, vibration is caused. The portion overlapping the piece 30 can be elongated along the direction connecting the free end and the fixed end of the vibrating piece 30. Therefore, when an impact is applied to the vibrating reed 30, the free end side of the vibrating reed 30 with a large displacement can be supported in a longer range, so that the free end of the vibrating reed 30 is largely displaced by an impact. The possibility of breakage of the vibrating reed 30 can be further reduced. In addition, the first protrusion 18 a is disposed in a region where the first side wall 36 a and the third side wall 36 c of the side wall 14 are connected, and the second protrusion 18 b is a second side wall of the side wall 14. 36b and the third side wall 36c are connected, the connection between the first side wall 36a and the third side wall 36c and the second side wall 36b of the side wall 14 of the container 10 Since the distance from the outer periphery of the container 10 can be made large at the connecting portion with the third side wall portion 36 c, the effect of increasing the strength of the container 10 can also be obtained.

Second Embodiment
An oscillator 1a as an electronic device according to a second embodiment of the present invention will be described with reference to FIG. 3 and FIG.
FIG. 3 is a schematic plan view showing the structure of an oscillator according to a second embodiment of the present invention. FIG. 4 is a cross-sectional view taken along line B-B in FIG.

The oscillator 1a according to the second embodiment differs from the oscillator 1 described in the first embodiment in the direction in which the upper surfaces of the first protrusion 19a and the second protrusion 19b incline. The projecting portion 19 b is formed with an inclined surface in which the distance to the first surface 32 a of the vibrating reed 30 monotonously increases toward the side facing each other.
The other configurations and the like are substantially the same as those of the oscillator 1 described above in the first embodiment, and therefore the same symbols are attached to the similar configurations and the description thereof is partially omitted, and the oscillator 1a will be described.

  As shown in FIGS. 3 and 4, the oscillator 1a has a first protrusion 19a and a second protrusion 19b integrated with the second substrate 22a on the upper surface of the first substrate 20 (bottom plate 12) of the container 10a. It is arranged. In the first protrusion 19a, the upper surface of the first protrusion 19a is inclined from the side of the first side wall 36aa toward the side of the second protrusion 19b, and the distance between the first protrusion 19a and the first surface 32a of the vibrating reed 30 is An inclined surface which is monotonously long is formed. In the second protrusion 19 b, the upper surface of the second protrusion 19 b is inclined toward the first protrusion 19 a facing from the second side wall 36 ba side, and the distance between the second protrusion 19 b and the first surface 32 a of the vibrating reed 30 is An inclined surface which is monotonously long is formed.

  With such a configuration, when the free end of the vibrating reed 30 is largely displaced due to an impact, the side surfaces of the free end of the vibrating reed 30 are supported by the first projecting portion 19a and the second projecting portion 19b. Therefore, the possibility of breakage of the vibrating reed 30 due to impact can be further reduced. Further, since the slope is provided, the possibility of damaging the excitation electrode 40 can be reduced, and the change of the reference frequency and the deterioration of the aging characteristic can be reduced. Therefore, it is possible to obtain the oscillator 1a having excellent shock resistance and stable oscillation characteristics.

Third Embodiment
An oscillator 1 b as an electronic device according to a third embodiment of the present invention will be described with reference to FIGS. 5 and 6.
FIG. 5 is a schematic plan view showing the structure of an oscillator according to a third embodiment of the present invention. 6 is a cross-sectional view taken along the line C-C in FIG.

The oscillator 1b according to the third embodiment differs from the oscillator 1 described in the first embodiment in the shape of the vibrating reed 30b mounted on the container 10.
The other configuration is substantially the same as that of the oscillator 1 described above in the first embodiment, so the same reference numerals and symbols are given to the similar configurations, and a part of the description will be omitted, and the oscillator 1b will be described.

  As shown in FIGS. 5 and 6, the oscillator 1 b is different in the shape of the vibrating reed 30 b mounted on the container 10. The vibrating reed 30b has a first region 70 having a first thickness in the direction normal to the first surface 32ab at the first surface 32ab and the second surface 32bb, and a method of the first surface 32ab at the outer periphery of the first region 70. A second region 72 having a second thickness thinner than the first region 70 in the linear direction is provided. That is, the shape of the vibrating reed 30b is a shape generally referred to as a mesa structure having a first region 70 with a thick central portion. Since the vibrator element 30b of the mesa structure can confine vibration energy in the first region 70, it is possible to reduce vibration leakage in which vibration energy leaks to the container 10 through the fixed end of the vibrator element 30b. It can have a high Q value.

  The positional relationship between the vibrating reed 30b and the first protrusion 18a and the second protrusion 18b is the same as the end of the first protrusion 18a facing the second protrusion 18b and the first protrusion of the second protrusion 18b. The distance between the end on the side opposite to 18a and the end in the Z-axis direction is L2, and the end on the first side 34ab side of the first region 70 of the vibrating bar 30b and the end on the second side 34bb are The distance between the end of the fourth side 34db of the vibrating bar 30b and the end of the fourth area 34db of the first region 70 is W1, the end of the fourth side 34db of the vibrating bar 30b and the container 10 The distance between the end of the first protrusion 18a on the third side 34cb side in the X-axis direction and the end of the fourth side 34db of the vibrating bar 30b and the third side 34cb of the second protrusion 18b of the container 10 Of the distance in the X-axis direction from the end, the longer distance is W2, L2> L4, W > W2, it meets the relationship.

  The relationship between the dimensions of the resonator element 30b of the mesa structure having the first region 70 is such that the relationship of L2> L4 and W1> W2 holds for the first projection 18a and the second projection 18b and the resonator element 30b. The contact with the first region 70 can reduce the possibility of breakage of the first region 70 of the vibrating reed 30b. Therefore, it is possible to obtain an oscillator 1 b which is excellent in shock resistance, has a high Q value, and stably oscillates.

Next, modified examples of the electronic device according to the embodiment of the present invention will be described.
<Modification 1>
An oscillator 1 c as an electronic device according to a first modification of the embodiment of the present invention will be described with reference to FIGS. 7 and 8.
FIG. 7 is a schematic plan view showing the structure of the oscillator according to the first modification of the embodiment of the present invention. FIG. 8 is a cross-sectional view taken along the line D-D in FIG.

The oscillator 1c according to the modification 1 differs from the oscillator 1 described in the first embodiment in the configuration of the container 10c, and the fourth substrate 21 is provided between the first substrate 20c and the second substrate 22c. There is.
The other configurations and the like are substantially the same as the oscillator 1 described above in the first embodiment, and therefore the same symbols are attached to the similar configurations and the description thereof is partially omitted, and the oscillator 1c will be described.

  As shown in FIG. 7 and FIG. 8, the oscillator 1c is composed of two layers of the bottom plate 12c of the container 10c, the first substrate 20c, and the frame-like fourth substrate 21 from which the central portion is removed. The IC chip 60 is mounted on the upper surface of the first substrate 20 c in the area surrounded by the fourth substrate 21. The first protrusion 18 ac and the second protrusion 18 bc are integrated with the second substrate 22 c and disposed on the upper surface of the fourth substrate 21. By arranging the third substrate 24 on the upper surface of the second substrate 22c, the side wall 14c is formed, and a cavity 50c that accommodates the vibrating reed 30 is configured. The IC chip 60 is electrically connected to the connection terminal 54 c formed on the upper surface of the fourth substrate 21 via the bonding wire 66.

  With such a configuration, the gap between the IC chip 60 and the vibrating reed 30 can be widened, so that the contact between the bonding wire 66 connected to the IC chip 60 and the vibrating reed 30 can be reduced. Thus, it is possible to obtain an oscillator 1c having high impact resistance and high reliability.

<Modification 2>
An oscillator 1 d as an electronic device according to a second modification of the embodiment of the present invention will be described with reference to FIGS. 9 and 10.
FIG. 9 is a schematic plan view showing the structure of the oscillator according to the second modification of the embodiment of the present invention. FIG. 10 is a cross-sectional view taken along the line E-E in FIG.

The oscillator 1d according to the modification 2 differs from the oscillator 1 described in the first embodiment in the configuration of the container 10d, and the fourth substrate 21 is provided between the first substrate 20c and the second substrate 22d. There are many regions where the second substrate 22d and the third substrate 24 constituting the side wall 14d do not overlap in plan view.
The other configurations and the like are substantially the same as the oscillator 1 described above in the first embodiment, and therefore the same symbols are attached to the similar configurations and the description thereof is partially omitted, and the oscillator 1 d will be described.

  As shown in FIGS. 9 and 10, the oscillator 1d is composed of two layers of a bottom plate 12c of a container 10d, a first substrate 20c, and a frame-shaped fourth substrate 21 whose central portion is removed. The first protrusion 18 ad and the second protrusion 18 bd are integrated with the second substrate 22 d and disposed on the upper surface of the fourth substrate 21. The second substrate 22d has a width dimension (length in the Z-axis direction) of the frame in a direction (Z-axis direction) intersecting the longitudinal direction (X-axis direction) of the vibrating reed 30, the first protrusion 18ad and the second protrusion The width dimension (length in the Z-axis direction) of the frame on which the portion 18 bd is disposed is longer than that of the third substrate 24. Therefore, there are many areas where the second substrate 22d and the third substrate 24 do not overlap in a plan view.

  With such a configuration, the width dimension of the frame of the side wall 14d can be increased, so that the mechanical strength of the container 10d can be improved, and an oscillator having excellent impact resistance and higher reliability can be obtained. You can get 1d.

<Modification 3>
The vibrator 2 as an electronic device according to the third modification of the embodiment of the present invention will be described with reference to FIGS. 11 and 12.
FIG. 11 is a schematic plan view showing the structure of a vibrator according to a third modification of the embodiment of the present invention. 12 is a cross-sectional view taken along the line F-F in FIG.

The vibrator 2 according to the third modification differs from the oscillator 1 described in the first embodiment in the configuration of the container 10e, and no electronic component (IC chip) is mounted.
The other configurations and the like are substantially the same as the oscillator 1 described above in the first embodiment, and therefore the same symbols are attached to the same configurations and the description thereof is partially omitted, and the vibrator 2 will be described.

  As shown in FIGS. 11 and 12, the vibrator 2 is configured to include a container 10e and a vibrating piece 30 housed in a cavity 50e of the container 10e. The cavity 50e for housing the vibrating reed 30 is hermetically sealed in an inert gas atmosphere such as nitrogen or argon or a reduced pressure atmosphere of substantially vacuum. The container 10e is formed by laminating a first substrate 20e serving as the bottom plate 12e and a frame-shaped second substrate 22e and a third substrate 24 from which the central portion serving as the side wall 14e is removed. The first protrusion 18 ae and the second protrusion 18 be are integrally formed with the second substrate 22 e constituting the side wall 14 e, and are disposed on the top surface of the first substrate 20 e (bottom plate 12 e). Further, a cavity 50e which is a housing space for housing the vibrating reed 30 is constituted by the bottom plate 12e, the region surrounded by the side wall 14e, and the lid member 16 joined by the sealing member 26.

  With such a configuration, the thickness (length in the Y-axis direction) of the second substrate 22e can be reduced, so that the container 10e can be thinned, which is thin and excellent in shock resistance, and has high reliability. It is possible to obtain the vibrator 2 having the property.

[Electronics]
Next, an electronic device (electronic device of the present invention) including the electronic device of the present invention will be described in detail based on FIGS. 13 to 15.
FIG. 13 is a perspective view showing the configuration of a mobile type (or notebook type) personal computer to which an electronic device provided with the electronic device of the present invention is applied. In this figure, the personal computer 1100 comprises a main unit 1104 having a keyboard 1102 and a display unit 1106 having a display unit 100. The display unit 1106 is rotated relative to the main unit 1104 via a hinge structure. It is supported movably. In such a personal computer 1100, an oscillator 1 as an electronic device functioning as a reference clock or the like is incorporated.

  FIG. 14 is a perspective view showing the configuration of a mobile phone (including PHS) to which an electronic device including the electronic device of the present invention is applied. In this figure, the cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206. The display unit 100 is disposed between the operation button 1202 and the earpiece 1204. Such a portable telephone 1200 incorporates the oscillator 1 as an electronic device functioning as a reference signal source or the like.

  FIG. 15 is a perspective view showing the configuration of a digital camera to which an electronic device provided with the electronic device of the present invention is applied. Note that in this figure, the connection to an external device is also shown in a simplified manner. Here, a normal camera sensitizes a silver halide photographic film with a light image of an object, whereas the digital camera 1300 photoelectrically converts the light image of the object with an imaging device such as a CCD (Charge Coupled Device) to capture an image. Generate a signal (image signal).

  A display unit 100 is provided on the back of a case (body) 1302 in the digital camera 1300, and is configured to perform display based on an imaging signal by a CCD, and the display unit 100 is a finder for displaying an object as an electronic image. Act as. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the rear side in the drawing) of the case 1302.

  When the photographer confirms the subject image displayed on the display unit 100 and depresses the shutter button 1306, the image pickup signal of the CCD at that time is transferred and stored in the memory 1308. Further, in the digital camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side of the case 1302. As shown, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the data communication input / output terminal 1314 as necessary. Furthermore, the imaging signal stored in the memory 1308 is configured to be output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. Such a digital camera 1300 incorporates the oscillator 1 as an electronic device functioning as a time source or the like.

  The electronic device provided with the electronic device of the present invention is not limited to the personal computer (mobile type personal computer) 1100 of FIG. 13, the mobile phone 1200 of FIG. 14, the digital camera 1300 of FIG. (For example, inkjet printers), laptop personal computers, tablet personal computers, storage area network devices such as routers and switches, local area network devices, devices for mobile terminal base stations, televisions, video cameras, video tape recorders, car Navigation devices, real-time clock devices, pagers, electronic notebooks (including communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, Levi telephone, television monitor for crime prevention, electronic binoculars, POS terminal, medical equipment (such as electronic thermometer, sphygmomanometer, blood glucose meter, electrocardiogram measuring device, ultrasound diagnostic device, electronic endoscope), fish finder, various measuring devices, The present invention can be applied to instruments (for example, instruments of vehicles, aircraft, ships), flight simulators, head mounted displays, motion traces, motion tracking, motion controllers, PDR (pedestrian position and orientation measurement), and the like.

[Mobile body]
Next, a mobile unit (mobile unit of the present invention) including the electronic device of the present invention will be described.
FIG. 16 is a perspective view schematically showing an automobile as an example of the mobile unit of the present invention. The automobile 1500 is equipped with an oscillator 1 as an electronic device that functions as a reference clock, a reference signal source, and the like. Oscillator 1 includes keyless entry, immobilizer, car navigation system, car air conditioner, antilock brake system (ABS: Antilock Brake System), airbag, tire pressure monitoring system (TPMS: Tire Pressure Monitoring System), engine The present invention can be widely applied to electronic control units (ECUs) such as control, brake systems, battery monitors of hybrid vehicles and electric vehicles, and vehicle attitude control systems.

As mentioned above, although the present invention was explained based on a suitable embodiment, the present invention is not limited to this and the composition of each part can be replaced by the thing of arbitrary composition which has the same function. .
Further, in the present invention, an arbitrary component may be added to the above-described embodiment, and each embodiment may be appropriately combined.
Further, the electronic device of the present invention may be any electronic device other than the oscillators 1, 1a, 1b, 1c, 1d and the vibrator 2 described in the embodiment and the modification. Specifically, inertial sensors such as acceleration sensors and gyro sensors, force sensor elements such as tilt sensors, light emitting elements, light receiving elements, piezoelectric elements, MEMS elements, and the like can be given.

  1, 1a, 1b, 1c, 1d: oscillator, 2: vibrator, 10: container, 12: bottom plate, 14: side wall, 16: lid member, 17: mounting portion, 18a: first projection, 18b: second Projection part 19a: first projection part 19b: second projection part 20: first substrate, 21: fourth substrate, 22: second substrate, 24: third substrate, 26: sealing member, 28: outside Terminal 30 30 vibration piece 32 substrate 32a first surface 32b second surface 34a first side 34b second side 34c third side 34d fourth side 36a fourth 1 side wall portion 36b second side wall portion 36c third side wall portion 40 excitation electrode 42 lead electrode 44 pad electrode 50 cavity 52, 54 connection terminal 60 IC chip 62, 64 ... connection member, 66 ... bonding wire, 70 ... first area, 72 ... second Band, 1100 ... personal computer, 1200 ... mobile phone, 1300 ... digital camera, 1500 ... car, P1 ... first virtual plane, P2 ... second virtual plane.

Claims (7)

A bottom plate, a mounting portion disposed on the bottom plate, and a container comprising two protrusions;
A vibrating reed having a first surface, a second surface in a front-to-back relationship with the first surface, and a side surface connecting the first surface and the second surface;
Have
The side surface is a first side surface on one side of the first surface, a second side surface on the other side opposite to the one side, and one end of the first side surface in a plan view from the first surface side A third side connecting one end of the second side and a fourth side connecting the other end of the first side and the other end of the second side;
The container is
A first side wall portion disposed in a direction along the first side surface in a plan view;
A second side wall portion disposed in a direction along the second side surface in a plan view;
A third side wall disposed in a direction along the fourth side in a plan view;
Equipped with
One of the two protrusions protrudes in the direction of the third side surface from a region where the first side wall portion and the third side wall portion are connected,
The other of the two protrusions protrudes in the direction of the third side surface from the area where the second side wall portion and the third side wall portion are connected,
The vibrating piece, the first surface of the fourth side face side overlapping with the two projections in plan view, and arranged so as to face a wherein the two projecting portions and said first surface gap The third side end is attached to the mounting portion via a connecting member,
In the vibration reed, in plan view, the first surface on the side of the first side and the one projecting portion overlap, and the first surface on the side of the second side and the other projecting portion overlap Yes,
The distance in the normal direction of the bottom plate between the bottom plate and the surface on the first surface side of the two protrusions is the largest at the portion where the two protrusions are connected to the third side wall,
The surface on the first surface side of the two projecting portions extends from the portion connected to the third side wall portion to the end portion on the third side surface side, from the fourth side surface to the third side surface side The electronic device according to claim 1, wherein the electronic device is inclined in a direction away from the first surface. Normal direction of distances of the bottom plate and said bottom plate and said two of said first surface side surface of the protrusion from said portion where the in plan view two projections are connected to the third side wall portion The electronic device according to claim 1, wherein the electronic device is monotonously shortened toward the third side. The surface of the first face side of the front SL one protrusion, said with respect to the first surface, inclined from the first side surface in a direction away from said first surface toward the second side surface side Yes,
The surface on the first surface side of the other protrusion is inclined in a direction away from the first surface from the second side to the first side with respect to the first surface. The electronic device according to claim 1 or 2, characterized in that: The distance in the normal direction of the bottom plate between the bottom plate and the surface on one side of the vibration of the one protrusion is monotonously shortened from the first side to the second side in plan view Yes,
The distance in the normal direction of the bottom plate between the bottom plate and the surface on one side of the vibration of the other protrusion is monotonously shortened from the second side to the first side in plan view. The electronic device according to claim 3, characterized in that: The electronic device according to any one of claims 1 to 4 , wherein an electronic component is disposed in the container. An electronic device comprising the electronic device according to any one of claims 1 to 5 . A mobile comprising the electronic device according to any one of claims 1 to 5 .

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