JP6541448B2 - 振動型駆動装置 - Google Patents

振動型駆動装置 Download PDF

Info

Publication number
JP6541448B2
JP6541448B2 JP2015114696A JP2015114696A JP6541448B2 JP 6541448 B2 JP6541448 B2 JP 6541448B2 JP 2015114696 A JP2015114696 A JP 2015114696A JP 2015114696 A JP2015114696 A JP 2015114696A JP 6541448 B2 JP6541448 B2 JP 6541448B2
Authority
JP
Japan
Prior art keywords
electrode
electrodes
vibration type
piezoelectric
type drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015114696A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017005794A5 (enExample
JP2017005794A (ja
Inventor
安倫 有満
安倫 有満
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2015114696A priority Critical patent/JP6541448B2/ja
Priority to US15/168,602 priority patent/US10396270B2/en
Priority to CN201610373827.6A priority patent/CN106253740B/zh
Publication of JP2017005794A publication Critical patent/JP2017005794A/ja
Publication of JP2017005794A5 publication Critical patent/JP2017005794A5/ja
Application granted granted Critical
Publication of JP6541448B2 publication Critical patent/JP6541448B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2015114696A 2015-06-05 2015-06-05 振動型駆動装置 Active JP6541448B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015114696A JP6541448B2 (ja) 2015-06-05 2015-06-05 振動型駆動装置
US15/168,602 US10396270B2 (en) 2015-06-05 2016-05-31 Vibration actuator that is easy in conduction inspection
CN201610373827.6A CN106253740B (zh) 2015-06-05 2016-05-31 容易进行导电性检查的振动致动器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015114696A JP6541448B2 (ja) 2015-06-05 2015-06-05 振動型駆動装置

Publications (3)

Publication Number Publication Date
JP2017005794A JP2017005794A (ja) 2017-01-05
JP2017005794A5 JP2017005794A5 (enExample) 2018-07-12
JP6541448B2 true JP6541448B2 (ja) 2019-07-10

Family

ID=57451037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015114696A Active JP6541448B2 (ja) 2015-06-05 2015-06-05 振動型駆動装置

Country Status (3)

Country Link
US (1) US10396270B2 (enExample)
JP (1) JP6541448B2 (enExample)
CN (1) CN106253740B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6699584B2 (ja) * 2017-02-14 2020-05-27 トヨタ自動車株式会社 導電性ペースト層と給電部を備えた樹脂部材の製造方法、および導電性ペースト層と給電部を備えた樹脂部材と外部給電部材の接続方法
US11806191B2 (en) * 2018-05-21 2023-11-07 General Electric Company Phased array transducers and wafer scale manufacturing for making the same
JP2022069736A (ja) * 2020-10-26 2022-05-12 キヤノン株式会社 振動型駆動装置
EP4236058A4 (en) * 2020-10-22 2024-12-18 Canon Kabushiki Kaisha VIBRATION TYPE TRAINING APPARATUS AND METHOD FOR DRIVING VIBRATION TYPE TRAINING APPARATUS
JP2024062199A (ja) * 2022-10-24 2024-05-09 キヤノン株式会社 振動型アクチュエータ、光学機器および電子機器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0421371A (ja) 1990-05-15 1992-01-24 Canon Inc 振動波モータ
JPH09285151A (ja) * 1996-04-19 1997-10-31 Matsushita Electric Ind Co Ltd 超音波モータ
JPH11252956A (ja) * 1998-03-02 1999-09-17 Star Micronics Co Ltd 積層型圧電素子とこれを用いた超音波モータ
JP2005223968A (ja) * 2004-02-03 2005-08-18 Canon Inc 振動子および振動波駆動装置
CN1750379A (zh) 2004-09-17 2006-03-22 德昌电机股份有限公司 超声马达
JP2008519941A (ja) 2004-11-09 2008-06-12 ノースイースタン ユニバーシティ 電気粘性流体ブレーキ又はアクチュエータ装置及びそれを使用した矯正装置
CN101443572A (zh) * 2004-11-09 2009-05-27 东北大学 电流变流体制动及致动装置以及使用该装置的矫形器
JP2007159211A (ja) 2005-12-02 2007-06-21 Nikon Corp 駆動装置、振動アクチュエータ、及び、電子機器
JP2008130767A (ja) 2006-11-20 2008-06-05 Canon Inc 振動体の製造方法、振動体および振動型駆動装置
JP5669452B2 (ja) * 2009-07-28 2015-02-12 キヤノン株式会社 振動体の製造方法
JP5459271B2 (ja) 2011-06-22 2014-04-02 株式会社ニコン 振動アクチュエータ、レンズ鏡筒及びカメラ
JP6214232B2 (ja) * 2013-06-20 2017-10-18 キヤノン株式会社 振動型アクチュエータ、交換用レンズ、撮像装置、及び自動ステージ
US9289265B2 (en) * 2013-07-10 2016-03-22 The Johns Hopkins University MRI-compatible, integrated force and torque sensors and systems that incorporate the sensors
TWI550923B (zh) * 2014-05-30 2016-09-21 佳能股份有限公司 壓電材料、壓電元件、壓電元件的製造方法和電子器件
JP6541449B2 (ja) * 2015-06-05 2019-07-10 キヤノン株式会社 振動型駆動装置及び医用システム

Also Published As

Publication number Publication date
US20160359430A1 (en) 2016-12-08
CN106253740B (zh) 2019-10-18
CN106253740A (zh) 2016-12-21
JP2017005794A (ja) 2017-01-05
US10396270B2 (en) 2019-08-27

Similar Documents

Publication Publication Date Title
JP6541448B2 (ja) 振動型駆動装置
JP6541449B2 (ja) 振動型駆動装置及び医用システム
US7592738B2 (en) Ultrasonic motor
US20080030101A1 (en) Ultrasonic motor
CN105324928B (zh) 超声电机
KR100215988B1 (ko) 초음파모터
US9369067B2 (en) Vibrational wave driving apparatus
Lu et al. Principle and experimental verification of novel dual driving face rotary ultrasonic motor
JP4891053B2 (ja) 超音波モータ
JP7204455B2 (ja) 振動型アクチュエータ、雲台、および電子機器
JP2003009555A (ja) 積層電気−機械エネルギー変換素子および振動波駆動装置
JP4871593B2 (ja) 振動子及び振動波駆動装置
JP4095282B2 (ja) 振動波駆動装置
JP2671480B2 (ja) 超音波モータ
JP2002142473A (ja) 振動波駆動装置および振動波駆動装置を用いた装置
JPH0654557A (ja) 超音波モータ
Wu et al. A dual ring rotary traveling wave ultrasonic motor
JP3059043B2 (ja) 超音波振動子、超音波モータ及び超音波モータを備えた装置
JP2014054033A (ja) 振動波駆動装置
JP2004180416A (ja) 振動体及び振動波駆動装置
JP3181619B2 (ja) 振動型モータ用振動子、振動型モータおよび振動型モータを有する装置
JP2005223968A (ja) 振動子および振動波駆動装置
JPH08163879A (ja) 超音波振動子および超音波モータ
JP5006653B2 (ja) 振動子、振動波駆動装置、及び振動子の製造方法
CN114731120A (zh) 超声波马达

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180604

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180604

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190213

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190226

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190418

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190514

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190611

R151 Written notification of patent or utility model registration

Ref document number: 6541448

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151