JP6539812B1 - レンズの検査方法 - Google Patents
レンズの検査方法 Download PDFInfo
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- JP6539812B1 JP6539812B1 JP2018135101A JP2018135101A JP6539812B1 JP 6539812 B1 JP6539812 B1 JP 6539812B1 JP 2018135101 A JP2018135101 A JP 2018135101A JP 2018135101 A JP2018135101 A JP 2018135101A JP 6539812 B1 JP6539812 B1 JP 6539812B1
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- 238000007689 inspection Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 36
- 230000007547 defect Effects 0.000 claims abstract description 26
- 238000004458 analytical method Methods 0.000 claims abstract description 15
- 238000012937 correction Methods 0.000 claims description 46
- 238000013041 optical simulation Methods 0.000 claims description 4
- 230000002950 deficient Effects 0.000 abstract description 2
- 238000003384 imaging method Methods 0.000 description 16
- 230000003287 optical effect Effects 0.000 description 10
- 238000012545 processing Methods 0.000 description 5
- 206010040925 Skin striae Diseases 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000005329 float glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
- G01N2021/9583—Lenses
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- Physics & Mathematics (AREA)
- Geometry (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
Claims (5)
- 光学シミュレーションによって、検査対象レンズによる歪曲を補正する補正レンズを設計するステップと、
該光学シミュレーションによって、該検査対象レンズと該補正レンズとの組合せを通して得た補正用画像を求めるステップと、
該補正用画像を使用して歪曲の補正プログラムを調整するステップと、
該検査対象レンズと該補正レンズとの組合せを通して縞パターンの検査用画像を採取するステップと、
調整された該補正プログラムを使用して該検査用画像の歪曲を補正するステップと、
該縞パターンを空間的なキャリア信号として、フーリエ縞解析法によって位相変化の情報を取り出し、該位相変化の情報を使用して該検査対象レンズの欠陥箇所を検出するステップと、を含むレンズの検査方法。 - 該縞パターンの周期を、検出対象の想定される欠陥の最小の大きさよりも小さくなるように定めた請求項1に記載のレンズの検査法方法。
- 該縞パターンの周期が、該画像において少なくとも2以上の画素に対応するように定めた請求項1または2に記載のレンズの検査法方法。
- 該検査対象レンズが円筒状レンズであり、該円筒の部分の長手方向と該縞パターンの縞の長手方向とが垂直となるような状態で該縞パターンの画像を採取する請求項1から3のいずれかに記載のレンズの検査法方法。
- 該検査対象レンズがその表面上において線状に延びた部分であって、該線に垂直な断面の形状がほぼ一定であり、周囲の部分と比較して空間周波数の高い部分を備え、該線の長手方向と該縞パターンの縞の長手方向とが垂直となるような状態で該縞パターンの画像を採取する請求項1から3のいずれかに記載のレンズの検査法方法。
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JP2018135101A JP6539812B1 (ja) | 2018-07-18 | 2018-07-18 | レンズの検査方法 |
CN201910608712.4A CN110736756B (zh) | 2018-07-18 | 2019-07-08 | 透镜的检查方法 |
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JP2018135101A JP6539812B1 (ja) | 2018-07-18 | 2018-07-18 | レンズの検査方法 |
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JP6539812B1 true JP6539812B1 (ja) | 2019-07-10 |
JP2020012731A JP2020012731A (ja) | 2020-01-23 |
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Cited By (1)
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WO2022162953A1 (ja) * | 2021-02-01 | 2022-08-04 | リーダー電子株式会社 | 解像度測定方法、解像度測定システム、およびプログラム |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5139869B2 (ja) * | 1973-04-18 | 1976-10-30 | ||
US3981562A (en) * | 1974-09-09 | 1976-09-21 | Optical Coating Laboratory, Inc. | Spatial filtering for error detection |
JP3417738B2 (ja) * | 1995-09-06 | 2003-06-16 | ペンタックス株式会社 | 光学部材検査装置 |
JP3613906B2 (ja) * | 1996-09-20 | 2005-01-26 | 株式会社ニコン | 波面収差測定装置 |
US6201600B1 (en) * | 1997-12-19 | 2001-03-13 | Northrop Grumman Corporation | Method and apparatus for the automatic inspection of optically transmissive objects having a lens portion |
JP2002202112A (ja) * | 2000-11-06 | 2002-07-19 | Fujitsu Ltd | 形状計測装置 |
US6771362B2 (en) * | 2001-12-27 | 2004-08-03 | Rotlex Ltd. | Method and apparatus for testing and mapping phase objects |
FR2897426B1 (fr) * | 2006-02-16 | 2012-07-27 | Onera (Off Nat Aerospatiale) | Procede d'analyse de surface d'onde par interferometrie multilaterale a difference de frequences |
JP2008076223A (ja) * | 2006-09-21 | 2008-04-03 | Matsushita Electric Ind Co Ltd | 円筒状透明体の検査方法とそれに用いる検査装置 |
EP2063260A1 (en) * | 2007-11-19 | 2009-05-27 | Lambda-X | Fourier transform deflectometry system and method |
JP2008135745A (ja) * | 2007-11-22 | 2008-06-12 | Nikon Corp | 波面収差測定機及び投影露光装置 |
JP4685971B2 (ja) * | 2009-09-24 | 2011-05-18 | 株式会社ケー・デー・イー | 検査システム及び検査方法 |
JP6487617B2 (ja) * | 2013-09-12 | 2019-03-20 | 株式会社クラレ | マイクロレンズアレイの欠陥検査方法及び欠陥検査装置 |
CN106707448B (zh) * | 2016-11-28 | 2020-09-04 | 歌尔科技有限公司 | 一种透镜组装用的调整系统、调整方法和显示模组 |
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- 2018-07-18 JP JP2018135101A patent/JP6539812B1/ja active Active
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Cited By (3)
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WO2022162953A1 (ja) * | 2021-02-01 | 2022-08-04 | リーダー電子株式会社 | 解像度測定方法、解像度測定システム、およびプログラム |
JP2022117666A (ja) * | 2021-02-01 | 2022-08-12 | リーダー電子株式会社 | 解像度測定方法、解像度測定システム、およびプログラム |
JP7304641B2 (ja) | 2021-02-01 | 2023-07-07 | リーダー電子株式会社 | チャート生成方法、解像度測定方法、解像度測定システム、およびプログラム |
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CN110736756A (zh) | 2020-01-31 |
JP2020012731A (ja) | 2020-01-23 |
CN110736756B (zh) | 2023-10-03 |
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