JP6517754B2 - 配線基板接合体 - Google Patents
配線基板接合体 Download PDFInfo
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- JP6517754B2 JP6517754B2 JP2016137472A JP2016137472A JP6517754B2 JP 6517754 B2 JP6517754 B2 JP 6517754B2 JP 2016137472 A JP2016137472 A JP 2016137472A JP 2016137472 A JP2016137472 A JP 2016137472A JP 6517754 B2 JP6517754 B2 JP 6517754B2
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- 229910052751 metal Inorganic materials 0.000 claims description 16
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- 238000004519 manufacturing process Methods 0.000 description 7
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- 230000002093 peripheral effect Effects 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
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- 239000004925 Acrylic resin Substances 0.000 description 1
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/118—Printed elements for providing electric connections to or between printed circuits specially for flexible printed circuits, e.g. using folded portions
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/361—Assembling flexible printed circuits with other printed circuits
- H05K3/363—Assembling flexible printed circuits with other printed circuits by soldering
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
- H01L2021/60007—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
- H05K1/0209—External configuration of printed circuit board adapted for heat dissipation, e.g. lay-out of conductors, coatings
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0212—Printed circuits or mounted components having integral heating means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0215—Grounding of printed circuits by connection to external grounding means
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K1/02—Details
- H05K1/0277—Bendability or stretchability details
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/04—Assemblies of printed circuits
- H05K2201/041—Stacked PCBs, i.e. having neither an empty space nor mounted components in between
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09372—Pads and lands
- H05K2201/09381—Shape of non-curved single flat metallic pad, land or exposed part thereof; Shape of electrode of leadless component
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- Coupling Device And Connection With Printed Circuit (AREA)
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Description
外部に露出した複数の第1接点が所定方向に列をなすように並んでおり、前記複数の第1接点の一つは前記列に沿って延びる第1連結電極に連結され、前記第1連結電極は前記列の両端よりも外側にはみ出すように設けられている第1配線基板と、
外部に露出した複数の第2接点が前記所定方向に列をなすように並んでおり、前記複数の第2接点の一つは前記列に沿って延びる第2連結電極に連結され、前記第2連結電極は前記列の両端よりも外側にはみ出すように設けられている、前記第1配線基板と同種又は異種の第2配線基板と、
前記第1配線基板の前記複数の第1接点と前記第2配線基板の前記複数の第2接点とを対向させた状態でろう接すると共に、前記第1配線基板の前記第1連結電極と前記第2配線基板の前記第2連結電極とを対向させた状態でろう接した接合部材と、
を備えたものである。
Claims (8)
- 外部に露出した複数の第1接点が所定方向に列をなすように並んでおり、前記複数の第1接点の一つは前記列に沿って延びる第1連結電極に連結され、前記第1連結電極は前記列の両端よりも外側にはみ出すように設けられている第1配線基板と、
外部に露出した複数の第2接点が前記所定方向に列をなすように並んでおり、前記複数の第2接点の一つは前記列に沿って延びる第2連結電極に連結され、前記第2連結電極は前記列の両端よりも外側にはみ出すように設けられている、前記第1配線基板と同種又は異種の第2配線基板と、
前記第1配線基板の前記複数の第1接点と前記第2配線基板の前記複数の第2接点とを対向させた状態でろう接すると共に、前記第1配線基板の前記第1連結電極と前記第2配線基板の前記第2連結電極とを対向させた状態でろう接した接合部材と、
を備え、
前記第1配線基板は、複数の金属配線が樹脂で被覆されたフラットなフレキシブルプリント基板であり、前記第1接点は、前記金属配線の端部をなすものであり、前記第1連結電極は、前記複数の第1接点の前記金属配線側には設けられていない、
配線基板接合体。 - 前記第1連結電極は、前記列の両端に位置する2つの第1接点の外側を囲うように曲げられた第1折曲部を有し、
前記第2連結電極は、前記列の両端に位置する2つの第2接点の外側を囲うように曲げられた第2折曲部を有する、
請求項1に記載の配線基板接合体。 - 前記第1折曲部は、前記列の両端に位置する第1接点の端部まで延びており、
前記第2折曲部は、前記列の両端に位置する第2接点の端部まで延びている、
請求項2に記載の配線基板接合体。 - 前記第2折曲部は、前記列の両端に位置する第2接点の端部を超えている、
請求項3に記載の配線基板接合体。 - 前記第1折曲部の面積は、前記第1折曲部の隣に位置する第1接点より大きく、
前記第2折曲部の面積は、前記第2折曲部の隣に位置する第2接点より大きい、
請求項2〜4のいずれか1項に記載の配線基板接合体。 - 前記第1連結電極に接続された前記第1接点と、前記第2連結電極に接続された前記第2接点は、大電流が流れる回路の接点として用いられる、
請求項1〜5のいずれか1項に記載の配線基板接合体。 - 前記第1連結電極の外側の角部及び前記第2連結電極の外側の角部は、丸みを帯びている、
請求項1〜6のいずれか1項に記載の配線基板接合体。 - 前記第1配線基板は、フレキシブルプリント基板であり、
前記第2配線基板は、シートヒータであって静電チャックと金属製の支持台との間に配置されるものである、
請求項1〜7のいずれか1項に記載の配線基板接合体。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016137472A JP6517754B2 (ja) | 2016-07-12 | 2016-07-12 | 配線基板接合体 |
US15/642,768 US10609818B2 (en) | 2016-07-12 | 2017-07-06 | Integrated wiring board assembly |
KR1020170086274A KR102353072B1 (ko) | 2016-07-12 | 2017-07-07 | 배선 기판 접합체 |
TW106123016A TWI720224B (zh) | 2016-07-12 | 2017-07-10 | 配線基板接合體 |
CN201710565857.1A CN107611059B (zh) | 2016-07-12 | 2017-07-12 | 配线基板接合体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016137472A JP6517754B2 (ja) | 2016-07-12 | 2016-07-12 | 配線基板接合体 |
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Publication Number | Publication Date |
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JP2018010918A JP2018010918A (ja) | 2018-01-18 |
JP6517754B2 true JP6517754B2 (ja) | 2019-05-22 |
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JP2016137472A Active JP6517754B2 (ja) | 2016-07-12 | 2016-07-12 | 配線基板接合体 |
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US (1) | US10609818B2 (ja) |
JP (1) | JP6517754B2 (ja) |
KR (1) | KR102353072B1 (ja) |
CN (1) | CN107611059B (ja) |
TW (1) | TWI720224B (ja) |
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CN111868912B (zh) * | 2018-03-23 | 2023-11-03 | 日本碍子株式会社 | 半导体制造装置 |
KR102396865B1 (ko) * | 2021-12-08 | 2022-05-12 | 주식회사 미코세라믹스 | 정전척 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0590725A (ja) | 1991-09-27 | 1993-04-09 | Canon Inc | フレキシブル基板の接続構造 |
JP3187206B2 (ja) * | 1993-05-17 | 2001-07-11 | 株式会社リコー | 印刷配線板の端子構造および接続方法 |
JP2001267714A (ja) * | 2000-03-16 | 2001-09-28 | Sony Corp | 電子回路装置 |
JP2005262752A (ja) * | 2004-03-19 | 2005-09-29 | Konica Minolta Holdings Inc | インクジェットヘッド |
JP4187757B2 (ja) * | 2006-06-22 | 2008-11-26 | 日東電工株式会社 | 配線回路基板 |
JP2008140891A (ja) * | 2006-11-30 | 2008-06-19 | Nec Corp | 素子実装構造及び素子実装方法 |
KR102041501B1 (ko) * | 2013-09-13 | 2019-11-06 | 삼성전자 주식회사 | 연배열 인쇄회로기판, 그의 불량 단품 인쇄회로기판의 교체 방법 및 이를 이용한 전자 장치의 제조 방법 |
WO2016014138A1 (en) * | 2014-07-23 | 2016-01-28 | Applied Materials, Inc. | Tunable temperature controlled substrate support assembly |
CN106463200B (zh) * | 2014-09-18 | 2019-05-31 | 积水化学工业株式会社 | 导电糊剂、连接结构体及连接结构体的制造方法 |
JP6326439B2 (ja) | 2016-02-26 | 2018-05-16 | 本田技研工業株式会社 | 燃料電池システムの制御方法 |
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