JP6517734B2 - 散乱光検出ヘッド - Google Patents
散乱光検出ヘッド Download PDFInfo
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- JP6517734B2 JP6517734B2 JP2016115553A JP2016115553A JP6517734B2 JP 6517734 B2 JP6517734 B2 JP 6517734B2 JP 2016115553 A JP2016115553 A JP 2016115553A JP 2016115553 A JP2016115553 A JP 2016115553A JP 6517734 B2 JP6517734 B2 JP 6517734B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016115553A JP6517734B2 (ja) | 2016-06-09 | 2016-06-09 | 散乱光検出ヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016115553A JP6517734B2 (ja) | 2016-06-09 | 2016-06-09 | 散乱光検出ヘッド |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015225061A Division JP5961909B1 (ja) | 2015-11-17 | 2015-11-17 | 欠陥検査装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019043594A Division JP2019082496A (ja) | 2019-03-11 | 2019-03-11 | 欠陥検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017096912A JP2017096912A (ja) | 2017-06-01 |
| JP2017096912A5 JP2017096912A5 (enrdf_load_stackoverflow) | 2018-05-17 |
| JP6517734B2 true JP6517734B2 (ja) | 2019-05-22 |
Family
ID=58818184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016115553A Expired - Fee Related JP6517734B2 (ja) | 2016-06-09 | 2016-06-09 | 散乱光検出ヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6517734B2 (enrdf_load_stackoverflow) |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53107865A (en) * | 1977-03-02 | 1978-09-20 | Hitachi Ltd | Detector of minute undulations |
| US4601576A (en) * | 1983-12-09 | 1986-07-22 | Tencor Instruments | Light collector for optical contaminant and flaw detector |
| JPS6117050A (ja) * | 1984-05-14 | 1986-01-25 | テンコ−ル・インスツルメンツ | 欠陥検知装置 |
| DE3540916A1 (de) * | 1985-11-19 | 1987-05-21 | Zeiss Carl Fa | Verfahren und vorrichtung zur raster-lichtmikroskopischen darstellung von objekten im dunkelfeld |
| JP2002188999A (ja) * | 2000-12-21 | 2002-07-05 | Hitachi Ltd | 異物・欠陥検出装置及び検出方法 |
| JP2006313107A (ja) * | 2005-05-09 | 2006-11-16 | Lasertec Corp | 検査装置及び検査方法並びにそれを用いたパターン基板の製造方法 |
| JP4822548B2 (ja) * | 2007-04-23 | 2011-11-24 | レーザーテック株式会社 | 欠陥検査装置 |
| JP4876019B2 (ja) * | 2007-04-25 | 2012-02-15 | 株式会社日立ハイテクノロジーズ | 欠陥検査装置およびその方法 |
| JP5268061B2 (ja) * | 2008-11-05 | 2013-08-21 | レーザーテック株式会社 | 基板検査装置 |
| JP5686394B1 (ja) * | 2014-04-11 | 2015-03-18 | レーザーテック株式会社 | ペリクル検査装置 |
| JP2015203658A (ja) * | 2014-04-16 | 2015-11-16 | 株式会社日立ハイテクノロジーズ | 検査装置 |
-
2016
- 2016-06-09 JP JP2016115553A patent/JP6517734B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017096912A (ja) | 2017-06-01 |
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