JP6489125B2 - 赤外線ガス分析装置、及びその使用方法 - Google Patents
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- JP6489125B2 JP6489125B2 JP2016531471A JP2016531471A JP6489125B2 JP 6489125 B2 JP6489125 B2 JP 6489125B2 JP 2016531471 A JP2016531471 A JP 2016531471A JP 2016531471 A JP2016531471 A JP 2016531471A JP 6489125 B2 JP6489125 B2 JP 6489125B2
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- 238000000034 method Methods 0.000 title claims description 20
- 238000005259 measurement Methods 0.000 claims description 147
- 238000001514 detection method Methods 0.000 claims description 101
- 238000010521 absorption reaction Methods 0.000 claims description 61
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 46
- IOVCWXUNBOPUCH-UHFFFAOYSA-M nitrite group Chemical group N(=O)[O-] IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 claims description 27
- 229910021529 ammonia Inorganic materials 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 23
- 238000012545 processing Methods 0.000 claims description 20
- 239000010409 thin film Substances 0.000 claims description 13
- 238000004880 explosion Methods 0.000 claims description 9
- 238000004458 analytical method Methods 0.000 claims description 6
- 239000010408 film Substances 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000004364 calculation method Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229920006254 polymer film Polymers 0.000 claims description 3
- 230000004044 response Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 174
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 26
- 239000007788 liquid Substances 0.000 description 18
- BLLFVUPNHCTMSV-UHFFFAOYSA-N methyl nitrite Chemical compound CON=O BLLFVUPNHCTMSV-UHFFFAOYSA-N 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 12
- 229910002091 carbon monoxide Inorganic materials 0.000 description 12
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 11
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 9
- 238000000862 absorption spectrum Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 9
- 229910017604 nitric acid Inorganic materials 0.000 description 9
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 8
- -1 alkyl nitrites Chemical class 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 239000002360 explosive Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 5
- 229910001882 dioxygen Inorganic materials 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 150000002826 nitrites Chemical class 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000012937 correction Methods 0.000 description 4
- 238000004821 distillation Methods 0.000 description 4
- 238000004445 quantitative analysis Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910016036 BaF 2 Inorganic materials 0.000 description 2
- 229910004261 CaF 2 Inorganic materials 0.000 description 2
- QQZWEECEMNQSTG-UHFFFAOYSA-N Ethyl nitrite Chemical compound CCON=O QQZWEECEMNQSTG-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 150000001336 alkenes Chemical class 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000006315 carbonylation Effects 0.000 description 2
- 238000005810 carbonylation reaction Methods 0.000 description 2
- 239000012295 chemical reaction liquid Substances 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000004868 gas analysis Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 231100000419 toxicity Toxicity 0.000 description 2
- 230000001988 toxicity Effects 0.000 description 2
- PKJBRKTYYNRVSN-UHFFFAOYSA-N 10-(aminomethyl)-9,10-dihydroanthracene-1,2-diol Chemical compound OC1=CC=C2C(CN)C3=CC=CC=C3CC2=C1O PKJBRKTYYNRVSN-UHFFFAOYSA-N 0.000 description 1
- HEWZVZIVELJPQZ-UHFFFAOYSA-N 2,2-dimethoxypropane Chemical compound COC(C)(C)OC HEWZVZIVELJPQZ-UHFFFAOYSA-N 0.000 description 1
- JQJPBYFTQAANLE-UHFFFAOYSA-N Butyl nitrite Chemical compound CCCCON=O JQJPBYFTQAANLE-UHFFFAOYSA-N 0.000 description 1
- OIFBSDVPJOWBCH-UHFFFAOYSA-N Diethyl carbonate Chemical compound CCOC(=O)OCC OIFBSDVPJOWBCH-UHFFFAOYSA-N 0.000 description 1
- MUXOBHXGJLMRAB-UHFFFAOYSA-N Dimethyl succinate Chemical compound COC(=O)CCC(=O)OC MUXOBHXGJLMRAB-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000006359 acetalization reaction Methods 0.000 description 1
- 125000003158 alcohol group Chemical group 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 150000004651 carbonic acid esters Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- QLVWOKQMDLQXNN-UHFFFAOYSA-N dibutyl carbonate Chemical compound CCCCOC(=O)OCCCC QLVWOKQMDLQXNN-UHFFFAOYSA-N 0.000 description 1
- ZYKOICDLSSOLAN-UHFFFAOYSA-N diheptyl carbonate Chemical compound CCCCCCCOC(=O)OCCCCCCC ZYKOICDLSSOLAN-UHFFFAOYSA-N 0.000 description 1
- OKQDSOXFNBWWJL-UHFFFAOYSA-N dihexyl carbonate Chemical compound CCCCCCOC(=O)OCCCCCC OKQDSOXFNBWWJL-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- IEJIGPNLZYLLBP-UHFFFAOYSA-N dimethyl carbonate Chemical compound COC(=O)OC IEJIGPNLZYLLBP-UHFFFAOYSA-N 0.000 description 1
- BEPAFCGSDWSTEL-UHFFFAOYSA-N dimethyl malonate Chemical compound COC(=O)CC(=O)OC BEPAFCGSDWSTEL-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- FHWFURWDUGYUMA-UHFFFAOYSA-N dinonyl carbonate Chemical compound CCCCCCCCCOC(=O)OCCCCCCCCC FHWFURWDUGYUMA-UHFFFAOYSA-N 0.000 description 1
- PKPOVTYZGGYDIJ-UHFFFAOYSA-N dioctyl carbonate Chemical compound CCCCCCCCOC(=O)OCCCCCCCC PKPOVTYZGGYDIJ-UHFFFAOYSA-N 0.000 description 1
- HSNQKJVQUFYBBY-UHFFFAOYSA-N dipentyl carbonate Chemical compound CCCCCOC(=O)OCCCCC HSNQKJVQUFYBBY-UHFFFAOYSA-N 0.000 description 1
- JMPVESVJOFYWTB-UHFFFAOYSA-N dipropan-2-yl carbonate Chemical compound CC(C)OC(=O)OC(C)C JMPVESVJOFYWTB-UHFFFAOYSA-N 0.000 description 1
- VUPKGFBOKBGHFZ-UHFFFAOYSA-N dipropyl carbonate Chemical compound CCCOC(=O)OCCC VUPKGFBOKBGHFZ-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- CCGKOQOJPYTBIH-UHFFFAOYSA-N ethenone Chemical compound C=C=O CCGKOQOJPYTBIH-UHFFFAOYSA-N 0.000 description 1
- JBTWLSYIZRCDFO-UHFFFAOYSA-N ethyl methyl carbonate Chemical compound CCOC(=O)OC JBTWLSYIZRCDFO-UHFFFAOYSA-N 0.000 description 1
- CYEDOLFRAIXARV-UHFFFAOYSA-N ethyl propyl carbonate Chemical compound CCCOC(=O)OCC CYEDOLFRAIXARV-UHFFFAOYSA-N 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- IAHLQSRLEFUEMK-UHFFFAOYSA-N heptyl nitrite Chemical compound CCCCCCCON=O IAHLQSRLEFUEMK-UHFFFAOYSA-N 0.000 description 1
- SGRWGISGVDVSJV-UHFFFAOYSA-N hexyl nitrite Chemical compound CCCCCCON=O SGRWGISGVDVSJV-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- SKRDXYBATCVEMS-UHFFFAOYSA-N isopropyl nitrite Chemical compound CC(C)ON=O SKRDXYBATCVEMS-UHFFFAOYSA-N 0.000 description 1
- CSDTZUBPSYWZDX-UHFFFAOYSA-N n-pentyl nitrite Chemical compound CCCCCON=O CSDTZUBPSYWZDX-UHFFFAOYSA-N 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- RGLUKHFGBSKWIL-UHFFFAOYSA-N nonyl nitrite Chemical compound CCCCCCCCCON=O RGLUKHFGBSKWIL-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- KAOQVXHBVNKNHA-UHFFFAOYSA-N propyl nitrite Chemical compound CCCON=O KAOQVXHBVNKNHA-UHFFFAOYSA-N 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
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- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
CO+2RONO → ROC(=O)OR+2NO (1)
Claims (8)
- 測定対象成分を含有するサンプルガスが流通する測定セルと、
参照ガスを有する比較セルと、
前記測定セル及び前記比較セルの一端側に設けられ、前記測定セル及び前記比較セルに赤外線をそれぞれ照射する一対の光源と、
前記測定セル及び前記比較セルの他端側に設けられ、前記測定セル及び前記比較セルから出射する赤外線を用いて前記測定対象成分を検出する検出部と、を備えており、
前記検出部には、前記測定対象成分とは異なる成分からなり、前記測定対象成分の赤外吸収帯の少なくとも一部の波数において赤外吸収帯を有する検出用ガスが封入され、
前記検出部は、前記測定セル側の第1室と、前記比較セル側の第2室と、前記第1室と前記第2室とを隔てる薄膜とを有し、
前記薄膜は、前記第1室と前記第2室との間の温度差に応じて動くように構成されており、
前記検出用ガスの爆発限界の下限は、前記測定対象成分の爆発限界の下限よりも高い赤外線ガス分析装置。 - 前記検出用ガスが封入される前記検出部の内部空間は、前記第1室と、前記第2室と、に隔てられており、
前記検出部は、前記第1室と前記第2室との温度差に基づいて前記測定対象成分を検出する、請求項1に記載の赤外線ガス分析装置。 - 前記測定対象成分が亜硝酸エステルであり、
前記検出用ガスはアンモニアを含有する、請求項1又は2に記載の赤外線ガス分析装置。 - 亜硝酸エステルの製造装置のオンライン分析用である、請求項3に記載の赤外線ガス分析装置。
- 前記検出部は、信号処理部と計算部とを有し、
前記信号処理部は、前記第1室と前記第2室との温度差に基づいて前記検出用ガスの濃度を計算し、
前記計算部は、前記測定対象成分の濃度を、前記検出用ガスの濃度を補正することにより計算する、請求項1〜4のいずれか一項記載に記載の赤外線ガス分析装置。 - 前記薄膜は、絶縁性高分子膜の上に金属製の導電膜が形成されたものである、請求項1〜5のいずれか一項に記載の赤外線ガス分析装置。
- 測定対象成分を含有するサンプルガスが流通する測定セルと、
参照ガスを有する比較セルと、
前記測定セル及び前記比較セルの一端側に設けられ、前記測定セル及び前記比較セルに赤外線をそれぞれ照射する一対の光源と、
前記測定セル及び前記比較セルの他端側に設けられる検出部と、を備える赤外線ガス分析装置の使用方法であって、
前記測定セルに前記サンプルガスを流通させるとともに、前記光源から前記測定セル及び前記比較セルに赤外線を照射する工程と、
前記測定セル及び前記比較セルから前記検出部に入射する赤外線によって生じる、前記検出部に封入された前記測定対象成分とは異なる成分からなる検出用ガスの温度変化に基づいて前記測定対象成分を検出する工程と、を有し、
前記検出用ガスは前記測定対象成分の赤外吸収帯の少なくとも一部の波数において赤外吸収帯を有し、
前記検出部は、前記測定セル側の第1室と、前記比較セル側の第2室と、前記第1室と前記第2室とを隔てる薄膜とを有し、
前記薄膜は、前記第1室と前記第2室との間の温度差に応じて動くように構成されており、
前記検出用ガスの爆発限界の下限は、前記測定対象成分の爆発限界の下限よりも高い、赤外線ガス分析装置の使用方法。 - 前記薄膜は、絶縁性高分子膜の上に金属製の導電膜が形成されたものである、請求項7に記載の赤外線ガス分析装置の使用方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2014138882 | 2014-07-04 | ||
JP2014138882 | 2014-07-04 | ||
PCT/JP2015/069263 WO2016002928A1 (ja) | 2014-07-04 | 2015-07-03 | 赤外線ガス分析装置、及びその使用方法 |
Publications (2)
Publication Number | Publication Date |
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JPWO2016002928A1 JPWO2016002928A1 (ja) | 2017-04-27 |
JP6489125B2 true JP6489125B2 (ja) | 2019-03-27 |
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JP2016531471A Expired - Fee Related JP6489125B2 (ja) | 2014-07-04 | 2015-07-03 | 赤外線ガス分析装置、及びその使用方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9835551B2 (ja) |
JP (1) | JP6489125B2 (ja) |
CN (1) | CN107027320A (ja) |
WO (1) | WO2016002928A1 (ja) |
Cited By (1)
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KR102334769B1 (ko) * | 2021-01-25 | 2021-12-03 | 주식회사 이엘티센서 | 외부 환경의 영향을 최소화할 수 있는 가스센서용 광 공동 및 이 광 공동을 갖는 가스센서 |
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WO2021124937A1 (ja) * | 2019-12-17 | 2021-06-24 | 株式会社堀場製作所 | 分析装置、及び、分析システム |
Family Cites Families (7)
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JPH0827234B2 (ja) | 1987-06-10 | 1996-03-21 | 株式会社堀場製作所 | 赤外線ガス分析計 |
JPH0686063U (ja) | 1993-05-22 | 1994-12-13 | 株式会社堀場製作所 | ゼロドリフト補償付偏位法ndir形分析計 |
JP3024904B2 (ja) | 1994-05-17 | 2000-03-27 | 株式会社堀場製作所 | 光学式ガス分析計 |
JP5411833B2 (ja) | 2004-09-02 | 2014-02-12 | 大阪瓦斯株式会社 | シロキサンの分析方法 |
CN101563595B (zh) * | 2006-12-12 | 2011-05-18 | 皇家飞利浦电子股份有限公司 | 具有温度补偿的样品浓度检测器 |
JP2012068164A (ja) | 2010-09-24 | 2012-04-05 | Horiba Ltd | 赤外線ガス分析計 |
US8953165B2 (en) * | 2010-10-21 | 2015-02-10 | Spectrasensors, Inc. | Validation and correction of spectrometer performance using a validation cell |
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2015
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