JP6485890B2 - ガスセンサ - Google Patents
ガスセンサ Download PDFInfo
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- JP6485890B2 JP6485890B2 JP2017566507A JP2017566507A JP6485890B2 JP 6485890 B2 JP6485890 B2 JP 6485890B2 JP 2017566507 A JP2017566507 A JP 2017566507A JP 2017566507 A JP2017566507 A JP 2017566507A JP 6485890 B2 JP6485890 B2 JP 6485890B2
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- mesoporous silica
- gas
- gas sensor
- filter
- plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Description
図1は、実施例のメソポーラスシリカの調製条件を示す。図中、P123は界面活性剤のPluonic P123 Surfantantを、TEOSはTetra Ethoxy Ortho Silicateを、MpTMSは3-メルカプト-プロピル-トリメトキシ-シランを表す。SBA-15は調製したメソポーラスシリカの種類を、ZrはZr元素を含有することを、SAはスルホン基を含有することを表し、SBA-15-pのpは、SBA-15の粒子径状がプレート状であることを表す。
図6に、ガスセンサ2の構造を示す。ガスセンサ2のガス感知部4は、mems構造でSnO2をガス検出材料とする。Si基板の空洞部上の52酸化タンタルの薄膜上に、Ptヒータを形成し、層間絶縁膜を積層し、その上部に1対の電極とSnO2の厚膜とを積層し、ガス感知部4とした。ガス感知部4をメタル缶6に収容し、メタル缶6の頂部の開口8から、メソポーラスシリカフィルタ10を介して、被検出雰囲気をガス感知部4側へ供給する。12はリード、14はピン、16はベースである。なおガスセンサの構造材料はメソポーラスシリカフィルタを用いることを除き任意で、ガス感知部はSnO2以外の金属酸化物半導体を用いるものでも、Pt触媒のビードを用いる接触燃焼式のものでも、あるいは固体高分子電解質膜等を用いる電気化学式のものでも良い。メソポーラスシリカフィルタの構造は任意で、ゼオライト、シリカ、アンバーリスト等の他のフィルタを前段に特開2013-88267等のフィルタを配置しても良い。またメソポーラスシリカを、ゼオライト、シリカ、アンバーリスト等の他のフィルタ材料と混合して用いても良い。なおアンバーリストは図4に示した吸着剤で、強酸型のイオン交換樹脂である。
10SA-Zr-SBA-15-p> 10SA-SBA-15-p> Zr-SBA-15-p> SBA-15-p> SBA-15
となった。そして、S元素含有量と共にメソポーラスシリカのH+酸量が増し(図4)、メソポーラスシリカ粒子中でのS元素とSi元素との比は例えば1:100〜1:4とし、好ましくは1:20〜1:4とする。耐被毒性の順序は、スルホン基を含有するとシロキサンの開環重合等が生じること(図5)と対応し、Zr元素を導入するとメソポーラスシリカのH+酸量が増加すること(図4)と対応する。さらにプレート状のメソポーラスシリカは、ロッド状のメソポーラスシリカよりもガスセンサの耐被毒性能を向上させる。
4 ガス感知部
10 メソポーラスシリカフィルタ
Claims (1)
- ガス検知部と、ガス検知部よりも被検出雰囲気側に配置されているフィルタとを有するガスセンサにおいて、
前記フィルタが、スルホン基を含有し、かつプレート状のメソポーラスシリカ粒子を含有することを特徴とする、ガスセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016024410 | 2016-02-12 | ||
JP2016024410 | 2016-02-12 | ||
PCT/JP2016/081416 WO2017138190A1 (ja) | 2016-02-12 | 2016-10-24 | ガスセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017138190A1 JPWO2017138190A1 (ja) | 2018-12-06 |
JP6485890B2 true JP6485890B2 (ja) | 2019-03-20 |
Family
ID=59563863
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017566507A Active JP6485890B2 (ja) | 2016-02-12 | 2016-10-24 | ガスセンサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6485890B2 (ja) |
WO (1) | WO2017138190A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109313152A (zh) * | 2016-06-23 | 2019-02-05 | 费加罗技研株式会社 | 气体传感器 |
WO2018159348A1 (ja) * | 2017-03-02 | 2018-09-07 | フィガロ技研株式会社 | ガスセンサ及びその製造方法 |
CN108508065A (zh) * | 2018-04-03 | 2018-09-07 | 宁夏大学 | 一种超细骨架有序介孔铁酸镍甲苯气敏材料及其制备方法 |
KR20210039471A (ko) | 2018-08-10 | 2021-04-09 | 피가로 기켄 가부시키가이샤 | 가스 검출기 |
JP7021756B2 (ja) * | 2018-08-10 | 2022-02-17 | フィガロ技研株式会社 | ガス検出器 |
WO2020235335A1 (ja) * | 2019-05-17 | 2020-11-26 | フィガロ技研株式会社 | ガス検出装置及びガス検出方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4925086B2 (ja) * | 2005-10-21 | 2012-04-25 | 独立行政法人産業技術総合研究所 | 薄板状もしくは繊維状の有機無機多孔質シリカ粒子とその製造方法 |
WO2012096171A1 (ja) * | 2011-01-11 | 2012-07-19 | 日本板硝子株式会社 | フレーク状のメソポーラス粒体とその製造方法 |
JP6218262B2 (ja) * | 2012-05-22 | 2017-10-25 | フィガロ技研株式会社 | ガスセンサ |
JP6552783B2 (ja) * | 2013-08-29 | 2019-07-31 | 東洋紡株式会社 | シロキサン除去剤およびそれを用いたシロキサン除去フィルタ |
-
2016
- 2016-10-24 WO PCT/JP2016/081416 patent/WO2017138190A1/ja active Application Filing
- 2016-10-24 JP JP2017566507A patent/JP6485890B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
WO2017138190A1 (ja) | 2017-08-17 |
JPWO2017138190A1 (ja) | 2018-12-06 |
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