JP6470082B2 - Gas leak inspection device - Google Patents

Gas leak inspection device Download PDF

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JP6470082B2
JP6470082B2 JP2015058095A JP2015058095A JP6470082B2 JP 6470082 B2 JP6470082 B2 JP 6470082B2 JP 2015058095 A JP2015058095 A JP 2015058095A JP 2015058095 A JP2015058095 A JP 2015058095A JP 6470082 B2 JP6470082 B2 JP 6470082B2
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gas
passage
reference body
inspection
differential pressure
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JP2016176850A (en
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憲三 福吉
憲三 福吉
順裕 土屋
順裕 土屋
レイレイ・ウー
雅彦 右田
雅彦 右田
優 佐々木
優 佐々木
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AIM TECH CO.,LTD.
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本発明は、例えば熱交換器や貯湯タンク等の、中空部を有する被検査体の気体漏れ検査を行う気体漏れ検査装置に関するものである。   The present invention relates to a gas leak inspection apparatus that performs a gas leak inspection of a test object having a hollow portion, such as a heat exchanger or a hot water storage tank.

例えば給湯器等の熱源装置には、通水される水を加熱するための熱交換器が設けられており、また、熱願装置には、発電装置の廃熱や集熱機によって集熱した太陽光の熱等を貯湯する貯湯槽(貯湯タンク)が設けられたものもある。このような熱源装置の熱交換器や貯湯タンクには水を通したり収容したりする中空部が形成されている。その中空部の周壁等に外部に通じる貫通孔が形成されていると、その貫通孔を通して水漏れが生じ、熱源装置の故障等の問題が生じるため、熱源装置の出荷前には、前記熱交換器や貯湯タンク等に前記のような貫通孔が有るか無いかを検査して貫通孔が形成されていないことを確認する必要がある。   For example, a heat source device such as a water heater is provided with a heat exchanger for heating water to be passed, and a heat application device includes solar heat collected by waste heat from a power generator or a heat collector. Some have hot water storage tanks (hot water storage tanks) for storing the heat of light and the like. The heat exchanger and hot water storage tank of such a heat source device are formed with a hollow portion through which water is passed and stored. If a through-hole leading to the outside is formed in the peripheral wall or the like of the hollow portion, water leakage occurs through the through-hole, causing problems such as failure of the heat source device. It is necessary to check whether or not the through-hole is formed by inspecting whether or not the above-described through-hole is present in the vessel or hot water storage tank.

そこで、熱交換器や貯湯タンクに実際に水を通し、水漏れが生じるような貫通孔があるかどうかを実際に検査することも考えられるが、水の導入と排出には時間がかかるために不適であり、また、水道水等の水にはカルシウム等が含まれており、その不純物に起因して正確な検査が行えないといった問題も生じる。そこで、熱交換器等の中空部を有する被検査体に加圧気体を導入し、その加圧気体が漏れるかどうかの判断に基づいて貫通孔の有無を検出する気体漏れ検査が行われている(例えば特許文献1、参照)。   Therefore, it is conceivable to actually inspect the heat exchanger and hot water tank for water and to check whether there is a through-hole that causes water leakage, but it takes time to introduce and discharge water. In addition, there is a problem that water such as tap water contains calcium and the like, and accurate inspection cannot be performed due to impurities. Therefore, a gas leak inspection is performed in which a pressurized gas is introduced into an object to be inspected having a hollow portion such as a heat exchanger, and the presence or absence of a through hole is detected based on whether the pressurized gas leaks. (For example, refer to Patent Document 1).

以下に、このような気体漏れ検査を行うための気体漏れ検査装置と、その気体漏れ検査装置を用いた気体漏れ検査方法の一例を述べる。図9に示されるように、この気体漏れ検査装置1は、加圧気体の導入口2と、該加圧気体の導入口2から導入される加圧気体の導入用通路3とを有しており、該加圧気体の導入用通路3は、加圧気体を分岐する分岐部4と、該分岐部4により分岐された加圧気体を被検査体5側に導く被検査体側導入通路6と、分岐部3により分岐された加圧気体を基準体7側に導く基準体側導入通路8とを有している。   Below, an example of the gas leak test | inspection apparatus for performing such a gas leak test | inspection and the gas leak test | inspection method using the gas leak test | inspection apparatus is described. As shown in FIG. 9, the gas leakage inspection apparatus 1 includes a pressurized gas introduction port 2 and a pressurized gas introduction passage 3 introduced from the pressurized gas introduction port 2. The pressurized gas introduction passage 3 includes a branching portion 4 for branching the pressurized gas, and an inspection subject side introduction passage 6 for guiding the pressurized gas branched by the branching portion 4 to the inspection subject 5 side. And a reference body side introduction passage 8 for guiding the pressurized gas branched by the branch portion 3 to the reference body 7 side.

被検査体5は中空部を有する気体漏れ検査用の被検査体(ワーク)であり、例えば熱交換器や貯湯タンク等の様々なものがあるが、通常は、その検査毎に交換されるものである。基準体7は被検査体5の気体漏れ検査の基準となる基準体(マスタ)であり、取り付けた状態とされることもあるし、条件に応じて交換されることもあるが、一般には、基準体7の交換回数は被検査体5の交換回数よりも少ない。例えば、同種類の(形状や大きさ、素材等が同じ)被検査体5を数多く検査する場合には、基準体7は交換せずに同一のものが用いられることが多い。   The inspected object 5 is an inspected object (work) for inspecting a gas leak having a hollow portion. For example, there are various objects such as a heat exchanger and a hot water storage tank, which are normally replaced for each inspection. It is. The reference body 7 is a reference body (master) that serves as a reference for the gas leakage inspection of the object 5 to be inspected, and may be in an attached state or may be replaced depending on conditions. The number of replacements of the reference body 7 is smaller than the number of replacements of the inspection object 5. For example, when many inspection objects 5 of the same type (the same shape, size, material, etc.) are inspected, the same reference body 7 is often used without being replaced.

なお、気体漏れ検査装置1の構成要素に基準体7や被検査体5は含まれないが、図9を含め、気体漏れ検査装置1の構成説明図においては、説明を分かりやすくするために基準体7と被検査体5を取り付けた状態の図が模式的に示されている。また、この気体漏れ検査装置1を用いた気体漏れ検査は基準体7と被検査体5との差圧に基づいて行われるものであり、ハーゲン-ポアズイユの法則による換算を用いた水漏れと気体漏れとの相関関係を考慮し、例えば300kPaの加圧気体を通したときの基準体7側と被検査体5側との差圧が12Pa未満であれば、被検査体5に水漏れに対応する気体漏れは生じていない(水漏れの心配がない)と判断することが行われている。なお、この気体漏れ判断に用いられる差圧値は、被検査体5の容積や漏れ基準によっても異なる値とされる。   In addition, although the reference | standard body 7 and the to-be-inspected object 5 are not contained in the component of the gas leak test | inspection apparatus 1, in the structure explanatory drawing of the gas leak test | inspection apparatus 1 including FIG. The figure of the state which attached the body 7 and the to-be-inspected body 5 is typically shown. In addition, the gas leak inspection using the gas leak inspection apparatus 1 is performed based on the differential pressure between the reference body 7 and the object 5 to be inspected. Water leakage and gas using conversion according to Hagen-Poiseuille's law Considering the correlation with leakage, for example, if the differential pressure between the reference body 7 side and the inspected object 5 side when passing a pressurized gas of 300 kPa is less than 12 Pa, the inspected object 5 corresponds to water leakage It is determined that there is no gas leakage (no worry of water leakage). In addition, the differential pressure value used for this gas leak judgment is a value that varies depending on the volume of the object to be inspected 5 and the leak standard.

図9において、加圧気体の導入用通路3における分岐部4よりも手前側(加圧気体流通の上流側)の通路と、基準体側導入通路8と被検査体側導入通路6にはそれぞれ、気体導入制御弁9,10,11が設けられ、気体導入制御弁10,11よりも気体通過の下流側位置において基準体側導入通路8と被検査体側導入通路6とをバイパスするバイパス通路17が設けられている。バイパス通路17には被検査体5内の気体の圧力と基準体7内の気体の圧力との差圧を検出する差圧検出部12が設けられている。差圧検出部12は、例えばダイヤフラム等を介して感圧素子で計測し、電気信号に変換する圧力計を有して形成されており、図9ではダイヤフラム20を有する差圧検出部12が模式的に示されている。   In FIG. 9, a gas is introduced into the passage on the near side (upstream side of the pressurized gas flow) of the branch portion 4 in the pressurized gas introduction passage 3, the reference body side introduction passage 8, and the inspection object side introduction passage 6. Introduction control valves 9, 10, and 11 are provided, and a bypass passage 17 that bypasses the reference body side introduction passage 8 and the inspection object side introduction passage 6 at a position downstream of the gas introduction control valves 10 and 11 is provided. ing. The bypass passage 17 is provided with a differential pressure detection unit 12 that detects a differential pressure between the gas pressure in the device under test 5 and the gas pressure in the reference body 7. The differential pressure detection unit 12 is formed with a pressure gauge that is measured by a pressure sensitive element via a diaphragm or the like and converted into an electric signal, for example. In FIG. 9, the differential pressure detection unit 12 having the diaphragm 20 is schematically illustrated. Has been shown.

また、基準体7側と被検査体5側から加圧気体を排出する気体排出通路18が設けられており、気体排出通路18には気体排出制御弁19が設けられている。なお、気体排出制御弁19や前記気体導入制御弁9,10,11の構成は特に限定されるものではないが、例えば弁の開閉を空気圧により行うエアオペレートバルブを適用することができる。   Further, a gas discharge passage 18 for discharging pressurized gas from the reference body 7 side and the inspected object 5 side is provided, and a gas discharge control valve 19 is provided in the gas discharge passage 18. The configurations of the gas discharge control valve 19 and the gas introduction control valves 9, 10, and 11 are not particularly limited. For example, an air operated valve that opens and closes the valve by air pressure can be applied.

このような気体漏れ検査装置を用いて被検査体5の気体漏れ検査を行う場合は、まず、例えば図9(a)に示されるように、気体排出制御弁19を閉じ、気体導入制御弁9,10,11を開いて加圧気体の導入口2から被検査体5と基準体7の両方に加圧気体を導入する加圧気体導入工程(加圧工程)の動作が行われる。この加圧気体導入工程後に、図9(b)に示されるように、気体導入制御弁9,10,11を閉じ、被検査体5と基準体7を加圧気体の導入側と遮断して被検査体5内の気体の圧力と基準体7内の気体の圧力とを平衡させる平衡工程の動作が行われる。   When performing a gas leak inspection of the object 5 to be inspected using such a gas leak inspection apparatus, first, as shown in FIG. 9A, for example, the gas discharge control valve 19 is closed and the gas introduction control valve 9 is closed. , 10 and 11 are opened, and the operation of the pressurized gas introduction process (pressurization process) is performed in which the pressurized gas is introduced from the pressurized gas introduction port 2 into both the inspection object 5 and the reference body 7. After this pressurized gas introduction process, as shown in FIG. 9 (b), the gas introduction control valves 9, 10, 11 are closed, and the device under test 5 and the reference body 7 are shut off from the pressurized gas introduction side. The operation | movement of the equilibrium process which balances the pressure of the gas in to-be-inspected body 5 and the pressure of the gas in the reference | standard body 7 is performed.

そして、この平衡工程後に、図9(c)に示されるように、被検査体5内の気体の圧力と基準体7内の気体の圧力との差圧を差圧検出部12によって検出する差圧検出工程(検出工程)の動作が行われる。図9(c)には、ダイヤフラム20を有する差圧検出部12を適用したときの、被検査体5側から気体が漏れた場合の様子が模式的に示されており、例えばこの図に示されるように、例えば被検査体5側から気体が漏れると差圧検出部12によって被検査体5内の気体の圧力と基準体7内の気体の圧力との差圧が検出され、この検出値に基づき、図示されていない気体漏れ検出部によって被検査体5側の気体漏れが検出される。   Then, after this equilibration step, as shown in FIG. 9C, the differential pressure detection unit 12 detects the differential pressure between the gas pressure in the object 5 and the gas pressure in the reference body 7. The operation of the pressure detection process (detection process) is performed. FIG. 9C schematically shows a state in which gas leaks from the inspected object 5 side when the differential pressure detection unit 12 having the diaphragm 20 is applied. For example, FIG. For example, when gas leaks from the inspected object 5 side, the differential pressure detector 12 detects the differential pressure between the gas pressure in the inspected object 5 and the gas pressure in the reference body 7, and this detected value Based on the above, a gas leak on the inspected object 5 side is detected by a gas leak detector not shown.

なお、差圧検出部12による検出値(検出差圧)に基づく気体漏れの検出(判断)も様々な方法が適用されるが、例えば検出差圧が予め与えられている閾値(例えば気体の圧力300kPaのときに12Pa)以上の場合に気体漏れが生じていると判断することができる。差圧検出部12による差圧検出工程の動作後には、図9(d)に示されるように、気体導入制御弁10,11と気体排出制御弁19が開かれ、気体排出通路18を通して被検査体5内と基準体7内から気体を排出する気体排出工程(排出工程)の動作が行われる。   Various methods are also applied to the detection (judgment) of gas leakage based on the detection value (detection differential pressure) by the differential pressure detection unit 12, but for example, a threshold (for example, gas pressure) to which the detection differential pressure is given in advance. In the case of 12 Pa) or more at 300 kPa, it can be determined that gas leakage has occurred. After the operation of the differential pressure detection process by the differential pressure detector 12, the gas introduction control valves 10 and 11 and the gas discharge control valve 19 are opened and inspected through the gas discharge passage 18 as shown in FIG. An operation of a gas discharge process (discharge process) for discharging gas from the body 5 and the reference body 7 is performed.

特開2004−61201号公報JP 2004-6201 A

ところで、周知の如く、気体に圧力を加えて圧縮すると気体の温度は上昇するものであり、図9に示したような気体漏れ検出装置においては、例えば図10のHで示す斜線部分の領域(被検査体5と基準体7の端部、差圧検出部12のダイヤフラム20付近、気体排出通路18の出力側の気体排出制御弁19付近)には熱が溜まりやすい。   By the way, as is well known, when the pressure is applied to the gas and the gas is compressed, the temperature of the gas rises. In the gas leak detection apparatus as shown in FIG. Heat tends to accumulate at the ends of the object to be inspected 5 and the reference body 7, near the diaphragm 20 of the differential pressure detector 12, and near the gas discharge control valve 19 on the output side of the gas discharge passage 18.

なお、気体漏れ検査において、前記の如く、被検査体5は検査毎に交換が行われるが、基準体7は被検査体5のように頻繁には交換が行われないため、気体漏れ検査を繰り返し行うと、基準体7内には特に熱が溜まりやすい。そこで、この問題を解決するために、基準体7を被検査体5側に比べて非常に小さく形成して(例えば非常に小さい容器として)気体漏れ検査を行う方法(マスターレス計測)が提案されている。   In the gas leak inspection, as described above, the inspection object 5 is replaced every inspection, but the reference body 7 is not frequently replaced like the inspection object 5, so the gas leakage inspection is performed. When it is repeated, heat tends to accumulate particularly in the reference body 7. Therefore, in order to solve this problem, a method (masterless measurement) is proposed in which the reference body 7 is formed to be very small compared to the inspected object 5 side (for example, as a very small container) to perform a gas leak inspection. ing.

しかしながら、図9に示したような気体漏れ検査装置1を用いて気体漏れ検査を行う場合、図9(b)に示した平衡工程において気体導入制御弁10,11を閉じる際に、気体導入制御弁10,11の閉止タイミングの微妙なずれや閉止時の圧力変動によって、平衡工程時に基準体7側と被検査体5側とに差圧が発生してしまい、そのことに起因して、平衡工程後の差圧検出工程における差圧検出に影響が及んでしまうが、基準体7側の容積が非常に小さいマスターレス計測は、その影響を特に受けやすく、それゆえに以下のような問題が生じた。   However, when the gas leakage inspection apparatus 1 as shown in FIG. 9 is used to perform the gas leakage inspection, the gas introduction control is performed when the gas introduction control valves 10 and 11 are closed in the equilibrium step shown in FIG. Due to subtle shifts in the closing timing of the valves 10 and 11 and pressure fluctuations at the time of closing, a differential pressure is generated between the reference body 7 side and the inspected object 5 side during the equilibration process. Although the differential pressure detection in the differential pressure detection process after the process is affected, the masterless measurement with a very small volume on the reference body 7 side is particularly susceptible to the influence, and thus the following problems occur. It was.

つまり、差圧検出部12を形成する差圧センサは、一般に差圧ゼロ付近での計測精度が最もよく、基準体7側と被検査体5側との差圧が大きいと計測精度の悪化や差圧センサのオーバーレンジによって差圧検出ができないといった問題が生じるため、基準体7側と被検査体5側とに差圧が発生する影響が大きいマスターレス計測においては、このような問題によって、精度が高い気体漏れ検査を再現性よく良好に行うことができないといった問題が生じることになる。   In other words, the differential pressure sensor forming the differential pressure detector 12 generally has the best measurement accuracy near the zero differential pressure. If the differential pressure between the reference body 7 side and the inspected object 5 side is large, Due to the problem that the differential pressure cannot be detected due to the overrange of the differential pressure sensor, in the masterless measurement where the influence of the differential pressure is large between the reference body 7 side and the inspected object 5 side, There arises a problem that a highly accurate gas leak test cannot be performed with good reproducibility.

本発明は、上記課題を解決するためになされたものであり、その目的は、気体圧縮等に伴う熱の影響を受け難く、被検査体の気体漏れ検査を正確に行うことができる気体漏れ検査装置を提供することにある。   The present invention has been made in order to solve the above-mentioned problems, and its object is to prevent the influence of heat associated with gas compression and the like, and to perform a gas leak inspection of an object to be inspected accurately. To provide an apparatus.

本発明は上記目的を達成するために、次の構成をもって課題を解決する手段としている。すなわち、第1の発明は、中空部を有する被検査体の気体漏れ検査を行う気体漏れ検査装置であって、加圧気体の導入口と、該加圧気体の導入口から導入される加圧気体を分岐する分岐部と、該分岐部により分岐された加圧気体を検査用に配設される被検査体側に導く被検査体側導入通路と、前記分岐部により分岐された加圧気体を前記被検査体の気体漏れ検査の基準となる基準体側に導く基準体側導入通路とを有し、該基準体側導入通路と前記被検査体側導入通路にはそれぞれ気体導入制御弁が設けられ、該それぞれの気体導入制御弁よりも気体通過の下流側位置において前記基準体側導入通路と前記被検査体側導入通路とをバイパスするバイパス通路が設けられて、該バイパス通路には前記被検査体内の気体の圧力と前記基準体内の気体の圧力との差圧を検出する差圧検出部が設けられ、前記基準体側から加圧気体を排出する基準体側排出通路の加圧気体の出口側が通路連通制御弁を介し前記被検査体側導入通路の位置であって該被検査体側導入通路側の気体導入制御弁よりも気体通過の下流側位置に接続され、前記バイパス通路接続位置よりも気体通過の下流側位置に接続され、前記被検査体側には加圧気体を該被検査体側から外部へ排出するための被検査体側排出通路が接続されていて該被検査体側排出通路を通して加圧気体を外部へ排出する手段が設けられ、前記被検査体と前記基準体の両方に加圧気体を導入した後に前記基準体側導入通路と前記被検査体側導入通路の各気体導入制御弁と前記通路連通制御弁を閉じて前記差圧検出部により前記差圧を検出し、該検出差圧に基づいて前記被検査体からの気体漏れを検出する気体漏れ検出部を有する構成をもって課題を解決する手段としている。 In order to achieve the above object, the present invention has the following configuration as means for solving the problems. That is, the first invention is a gas leakage inspection apparatus for performing a gas leakage inspection of an object to be inspected having a hollow portion, and a pressurized gas introduced from the pressurized gas inlet and the pressurized gas inlet. A branch part for branching the gas, a test object side introduction passage for guiding the pressurized gas branched by the branch part to the test object side arranged for inspection, and the pressurized gas branched by the branch part A reference body side introduction passage that leads to a reference body side that serves as a reference for gas leakage inspection of the object to be inspected, and a gas introduction control valve is provided in each of the reference body side introduction passage and the inspection object side introduction passage. A bypass passage that bypasses the reference body side introduction passage and the inspection object side introduction passage at a position downstream of the gas introduction control valve from the gas introduction control valve is provided, and the bypass passage includes a gas pressure in the body to be inspected. Gas in the reference body Differential pressure detecting unit is provided for detecting the differential pressure between the pressure outlet of the pressurized gas of the reference-side discharge passage for discharging the pressurized gas from the reference side of the inspection side introduction passage via a passage communicating the control valve Is connected to a position downstream of the gas passage from the gas introduction control valve on the inspection object side introduction passage side , connected to a downstream position of the gas passage from the bypass passage connection position, and is connected to the inspection object side . Is connected to an inspection object side discharge passage for discharging the pressurized gas from the inspection object side to the outside, and is provided with means for discharging the pressurized gas to the outside through the inspection object side discharge passage. After the pressurized gas is introduced into both the reference body and the reference body side introduction passage, the gas introduction control valve and the passage communication control valve of the inspection body side introduction passage are closed, and the differential pressure is detected by the differential pressure detection unit. Detect the difference On the basis of the with a structure having a gas leak detector for detecting a gas leakage from the test subject is a means for solving the problems.

また、第2の発明は、前記第1の発明の構成に加え、前記通路連通制御弁を差圧検出部による差圧検出時には閉じて該差圧検出時以外には開いた状態とする弁制御手段を有することを特徴とする。   In addition to the configuration of the first invention, the second invention is a valve control in which the passage communication control valve is closed when a differential pressure is detected by a differential pressure detection unit and is opened except when the differential pressure is detected. It has the means.

さらに、第3の発明は、前記第1または第2の発明の構成に加え、前記通路連通制御弁は開閉動作が緩慢で該開閉動作時に圧力変動が生じない又は殆ど生じない弁により形成されていることを特徴とする。なお、このような開閉動作が緩慢で該開閉動作時に圧力変動が生じない又は殆ど生じない弁として、例えばボールバルブ、モータスライドバルブ等が適用される。   Further, in the third invention, in addition to the configuration of the first or second invention, the passage communication control valve is formed by a valve which has a slow opening / closing operation and hardly or hardly causes a pressure fluctuation during the opening / closing operation. It is characterized by being. Note that, for example, a ball valve, a motor slide valve, or the like is applied as a valve in which such an opening / closing operation is slow and pressure fluctuation does not occur or hardly occurs during the opening / closing operation.

さらに、第4の発明は、前記第1または第2または第3の発明の構成に加え、前記基準体の容積は被検査体の容積よりも小さく形成され、気体漏れ検出部は前記基準体の容積と前記被検査体の容積との差に応じて生じる該被検査体内の気体の圧力と前記基準体内の気体の圧力との差圧分を差圧検出部による検出差圧値から差し引いた値に基づいて前記被検査体からの気体漏れを検出することを特徴とする。   Furthermore, in the fourth invention, in addition to the configuration of the first, second, or third invention, the volume of the reference body is formed smaller than the volume of the object to be inspected, and the gas leak detection unit is formed of the reference body. A value obtained by subtracting the differential pressure between the pressure of the gas in the subject to be inspected and the pressure of the gas in the reference body, which is generated according to the difference between the volume and the volume of the subject, from the differential pressure value detected by the differential pressure detection unit Based on the above, gas leakage from the object to be inspected is detected.

さらに、第5の発明は、前記第1乃至第4のいずれか一つの発明の構成に加え、前記基準体側導入通路のバイパス通路接続位置より下流側から通路連通制御弁に至る通路又はその一部が基準体として機能するものとしたことを特徴とする。   Furthermore, the fifth aspect of the invention includes, in addition to the configuration of any one of the first to fourth aspects, a passage from the downstream side of the bypass passage connection position of the reference body side introduction passage to the passage communication control valve or a part thereof. Is characterized by functioning as a reference body.

本発明によれば、加圧気体の導入口から導入される加圧気体は分岐部で分岐され、検査用に配設される被検査体側と該被検査体の気体漏れ検査の基準となる基準体側とに導かれるが、該基準体側から加圧気体を排出する基準体側排出通路の加圧気体の出口側が、通路連通制御弁を介し、被検査体側への加圧気体の導入通路に接続されている。そのため、通路連通制御弁を開いておくことにより、基準体に加圧気体が導入されても、その熱が基準体の出口側に熱が溜まることなく、熱を被検査体側に排出(逃がすことが)でき、基準体側の熱歪みを解消できるので、基準体側と被検査体側の温度を互いに等しいまたはほぼ等しい温度に安定化できる。   According to the present invention, the pressurized gas introduced from the inlet of the pressurized gas is branched at the branching portion, and the reference that serves as a reference for the gas leakage inspection of the inspection object side disposed for inspection and the inspection object The outlet side of the pressurized gas in the reference body side discharge passage that discharges the pressurized gas from the reference body side is connected to the pressurized gas introduction passage to the object to be inspected via the passage communication control valve. ing. Therefore, by opening the passage communication control valve, even if pressurized gas is introduced into the reference body, the heat does not accumulate on the outlet side of the reference body, and the heat is discharged (released) to the inspection object side. Since the thermal distortion on the reference body side can be eliminated, the temperature on the reference body side and the inspected object side can be stabilized at the same or substantially the same temperature.

なお、基準体側に導入された加圧気体は、被検査体側を通って排出されるが、被検査体は例えば検査の都度、交換されるので、被検査体側に熱が多くこもることはない。   Note that the pressurized gas introduced to the reference body side is discharged through the inspected object side. However, since the inspected object is replaced, for example, at each inspection, a large amount of heat does not accumulate on the inspected object side.

また、気体漏れ検査においては、通常、被検査体と基準体の両方に加圧気体を導入した後、被検査体と基準体を加圧気体の導入側と遮断して被検査体内の気体の圧力と基準体内の気体の圧力とを平衡させる平衡工程後に、基準体と被検査体との差圧を検出することが行われるが、被検査体と基準体を加圧気体の導入側と遮断する際には、被検査体と加圧気体の導入側との間に設けられている弁および基準体と加圧気体の導入側との間に設けられている弁を閉じることが行われ、その各弁(気体導入制御弁)を閉じるタイミングのずれや弁を閉じる際に生じる圧力変動を全くゼロ(0)にすることはできないものである。   Further, in the gas leak inspection, normally, after introducing pressurized gas into both the object to be inspected and the reference body, the object to be inspected and the reference body are shut off from the introduction side of the pressurized gas, After the equilibrium process of balancing the pressure and the pressure of the gas in the reference body, the differential pressure between the reference body and the test object is detected, but the test object and the reference body are blocked from the pressurized gas introduction side. In doing so, the valve provided between the object to be inspected and the pressurized gas introduction side and the valve provided between the reference body and the pressurized gas introduction side are closed, It is impossible to make zero (0) any deviation in timing for closing each valve (gas introduction control valve) or pressure fluctuation generated when the valve is closed.

それに対し、本発明においては、基準体側と被検査体側に加圧気体を導入する導入通路同士をバイパスするバイパス通路に、被検査体内の気体の圧力と基準体内の気体の圧力との差圧を検出する差圧検出部を設け、被検査体側導入通路の気体導入制御弁よりも気体通過の下流側位置において、基準体側排出通路の加圧気体の出口側を通路連通制御弁を介して被検査体側への加圧気体の導入通路に接続しており、被検査体と加圧気体の導入側との間に設けられている弁および基準体と加圧気体の導入側との間に設けられている弁を閉じるタイミングのずれや圧力変動が生じても、前記通路連通制御弁を開いておけば、その後の平衡工程において基準体側と被検査体側の差圧をゼロにする又はゼロに近づけることができる。 In contrast, in the present invention, the differential pressure between the pressure of the gas in the body to be inspected and the pressure of the gas in the body of the reference body is provided in a bypass passage that bypasses the introduction passages for introducing the pressurized gas to the reference body side and the inspected body side. A differential pressure detection unit is provided for detecting the outlet side of the pressurized gas in the reference body side discharge passage through the passage communication control valve at a position downstream of the gas introduction control valve in the inspection subject side introduction passage. Connected to the pressurized gas introduction passage to the body side, provided between the valve to be inspected and the pressurized gas introduction side, and between the reference body and the pressurized gas introduction side If the passage communication control valve is opened even if the timing of closing the valve is closed or the pressure fluctuates, the differential pressure between the reference body side and the object to be inspected is made zero or close to zero in the subsequent equilibrium process. Can do.

そこで、差圧検出時までは通路連通制御弁を開いておくことによって差圧検出部の両端を同一圧力にすることができ、差圧を0(又はほぼ0)とすることができるので、その状態で、通路連通制御弁を閉じることにより基準体側と被検査体側と非接続状態として(切り離した状態として)、基準体と被検査体との差圧計測(差圧検出)を行うことで、基準体側と被検査体側の差圧を正確に検出することができる。そして、この差圧検出に基づいて被検査体の気体漏れ検査を行うことにより、気体漏れ検査を正確に行うことができる。   Therefore, by opening the passage communication control valve until the differential pressure is detected, both ends of the differential pressure detector can be made the same pressure, and the differential pressure can be set to 0 (or almost 0). In the state, by closing the passage communication control valve, the reference body side and the inspected object side are disconnected (as disconnected), and by performing the differential pressure measurement (differential pressure detection) between the reference body and the inspected object, The differential pressure between the reference body side and the inspection object side can be accurately detected. And a gas leak test | inspection can be accurately performed by performing the gas leak test | inspection of a to-be-inspected object based on this differential pressure detection.

つまり、本発明は、差圧検出前に基準体と被検査体との差圧を0又はほぼ0としてから差圧検出を行うことと、基準体側に熱を溜めておかないようにできることから、基準体側と被検査体側の差圧を正確に検出することができて気体漏れ検査を正確に行うことができる。なお、通路連通制御弁の開閉制御は、例えば弁制御手段を設ける等して行うことができ、この弁制御手段によって、差圧検出部による基準体側と被検査体側の差圧検出時には通路連通制御弁を閉じ、差圧検出時以外には開いた状態とすることにより前記のような効果を奏することができる。   That is, the present invention can detect the differential pressure after setting the differential pressure between the reference body and the object to be inspected to 0 or almost 0 before detecting the differential pressure, and can prevent heat from being accumulated on the reference body side. The differential pressure between the reference body side and the inspected object side can be accurately detected, and the gas leak inspection can be accurately performed. The opening / closing control of the passage communication control valve can be performed, for example, by providing a valve control means. By this valve control means, the passage communication control is performed when the differential pressure detection unit detects the differential pressure between the reference body side and the inspection object side. By closing the valve and opening it except when a differential pressure is detected, the above-described effects can be obtained.

また、本発明において、通路連通制御弁を開閉動作が緩慢で該開閉動作時に圧力変動が生じない又は殆ど生じない弁により形成することによって、通路連通制御弁を閉じて基準体側と被検査体側を切り離す動作を緩やかに行うことができ、通路連通制御弁を閉じるときや開くときの圧力変動の影響を小さくできるので、差圧検出時に通路連通制御弁を閉じて基準体側と被検査体側とを切り離すときの圧力変動を殆ど生じないようにできることから、この切り離し動作時の圧力変動の影響も殆ど0にでき(圧力変動が生じた場合に懸念される悪影響を回避でき)、非常に正確に差圧計測を行うことができる。   Further, in the present invention, the passage communication control valve is formed by a valve that has a slow opening / closing operation, and pressure fluctuation does not occur or hardly occurs during the opening / closing operation, thereby closing the passage communication control valve so that the reference body side and the inspected object side are The operation of disconnecting can be performed gently, and the effect of pressure fluctuation when closing or opening the passage communication control valve can be reduced. Therefore, when the differential pressure is detected, the passage communication control valve is closed to separate the reference body side and the inspected object side. The pressure fluctuation during the separation operation can be reduced to almost zero (adverse effects that are a concern when pressure fluctuations occur) can be avoided, and the differential pressure can be very accurately determined. Measurement can be performed.

また、基準体の容積を被検査体の容積よりも小さく形成することにより、基準体に導入された加圧気体を被検査体側を通して排出する際にも短時間で気体排出を行うことができ、気体の導入や排出による熱影響も小さくできる。そして、気体漏れ検出部が基準体の容積と被検査体の容積との差に応じて生じる被検査体内の気体の圧力と基準体内の気体の圧力との差圧分を差圧検出部による検出差圧値から差し引いた値に基づいて、被検査体からの気体漏れを検出することにより、的確な差圧検出が行え、被検査体の気体漏れ検査を正確に行うことができる。   Further, by forming the volume of the reference body smaller than the volume of the object to be inspected, gas can be discharged in a short time even when the pressurized gas introduced into the reference body is discharged through the object to be inspected. The thermal effect due to the introduction and discharge of gas can be reduced. The gas leak detection unit detects a differential pressure difference between the gas pressure in the test object and the gas pressure in the reference object generated according to the difference between the reference body volume and the test object volume by the differential pressure detection unit. By detecting a gas leak from the object to be inspected based on a value subtracted from the differential pressure value, an accurate differential pressure can be detected, and a gas leak inspection of the object to be inspected can be performed accurately.

さらに、基準体を設ける代わりに、基準体側導入通路と基準体側排出通路とが連通されて該連通通路が基準体として機能するようにした場合も、前記のような効果を奏することができ、基準体として容器等を設けなくてすむ分、構成を簡略化できる。   Furthermore, instead of providing a reference body, the reference body side introduction passage and the reference body side discharge passage are communicated so that the communication passage functions as a reference body. Since it is not necessary to provide a container or the like as a body, the configuration can be simplified.

本発明に係る気体漏れ検査装置の一実施例の要部構成を示す模式的な説明図である。It is typical explanatory drawing which shows the principal part structure of one Example of the gas leak test | inspection apparatus which concerns on this invention. 実施例の気体漏れ検査装置の要部制御構成を示すブロック図である。It is a block diagram which shows the principal part control structure of the gas leak test | inspection apparatus of an Example. 実施例の気体漏れ検査装置の動作例を示すフローチャートである。It is a flowchart which shows the operation example of the gas leak test | inspection apparatus of an Example. 実施例の気体漏れ検査装置のウォーミングアップ運転動作例を示すフローチャートである。It is a flowchart which shows the warming-up operation example of the gas leak test | inspection apparatus of an Example. 実施例の気体漏れ検査装置の差圧検出動作前後の電動ボールバルブ開閉動作例を示すフローチャートである。It is a flowchart which shows the electric ball valve opening / closing operation example before and behind the differential pressure detection operation of the gas leak test | inspection apparatus of an Example. 実施例の気体漏れ検査装置の動作に伴う弁開閉動作を説明するためのタイムチャートである。It is a time chart for demonstrating the valve opening / closing operation | movement accompanying operation | movement of the gas leak test | inspection apparatus of an Example. 実施例の気体漏れ検査装置の差圧検出動作時とその前後の差圧変動例を説明するためのグラフである。It is a graph for demonstrating the example of a differential pressure fluctuation at the time of the differential pressure detection operation | movement of the gas leak test | inspection apparatus of an Example, and its back and front. 実施例の変形例の要部構成を示す模式的な説明図である。It is typical explanatory drawing which shows the principal part structure of the modification of an Example. 気体漏れ検査動作の各工程例を模式的に示す説明図である。It is explanatory drawing which shows typically each process example of gas leak test | inspection operation | movement. 従来の気体漏れ検査装置における問題点を説明するための、気体加圧時の状態例を示す模式図である。It is a schematic diagram which shows the example of a state at the time of gas pressurization for demonstrating the problem in the conventional gas leak test | inspection apparatus.

以下、本発明の実施の形態を図面に基づき実施例によって説明する。なお、本実施例の説明において、これまでの説明の例と同一名称部分には同一符号を付し、その重複説明は省略または簡略化する。   Embodiments of the present invention will be described below with reference to the drawings. Note that, in the description of the present embodiment, the same reference numerals are given to the same name portions as those in the examples described so far, and the duplicate description is omitted or simplified.

図1には、本発明に係る気体漏れ検査装置の一実施例の要部構成が模式的に示されており、図2には、その要部制御構成がブロック図により示されている。本実施例の気体漏れ検査装置は、従来例と同様に、中空部を有する被検査体の気体漏れ検査を行う気体漏れ検査装置であり、その基本構成は図9に示した従来例と同様の構成要素を多く有している。本実施例の説明において、図9に示した構成要素についての説明は省略または簡略化する。   FIG. 1 schematically shows a main part configuration of an embodiment of the gas leakage inspection apparatus according to the present invention, and FIG. 2 shows a main part control configuration in a block diagram. The gas leakage inspection apparatus of the present embodiment is a gas leakage inspection apparatus that performs a gas leakage inspection of an object to be inspected having a hollow portion, as in the conventional example, and its basic configuration is the same as that of the conventional example shown in FIG. It has many components. In the description of this embodiment, the description of the components shown in FIG. 9 is omitted or simplified.

図1に示されるように、本実施例の気体漏れ検査装置1には、空気導入通路3における空気導入部2と空気導入制御弁9との間に、気体の圧力を可変可能な試験圧設定手段13と、導入経路切替弁14(PPV)とが設けられている。試験圧設定手段13は、気体漏れ検査時に基準体7側と被検査体5側に導入される気体の圧力を予め定められる試験圧となるように設定(可変設定)する手段である。また、導入経路切替弁14を迂回する迂回通路33が形成されており、迂回通路33には低圧ガバナ(調圧器)35(PPR;プリプロセス動作用レギュレータ)と逆止弁30が設けられている。   As shown in FIG. 1, in the gas leakage inspection apparatus 1 of the present embodiment, a test pressure setting capable of varying the gas pressure between the air introduction section 2 and the air introduction control valve 9 in the air introduction passage 3. Means 13 and an introduction path switching valve 14 (PPV) are provided. The test pressure setting means 13 is a means for setting (variably setting) the pressure of the gas introduced into the reference body 7 side and the inspected object 5 side at the time of gas leakage inspection to be a predetermined test pressure. Further, a bypass passage 33 that bypasses the introduction path switching valve 14 is formed, and the bypass passage 33 is provided with a low pressure governor (pressure regulator) 35 (PPR; preprocess operation regulator) and a check valve 30. .

空気導入通路3の分岐部4の手前側には分岐通路15が接続され、分岐通路15には気体排出制御弁16(AV2)が設けられている。また、分岐部4よりも下流側の被検査体側導入通路6と基準体側導入通路8には、それぞれ、気体導入制御弁10,11の下流側の位置において被検査体側導入通路6と基準体側導入通路8とをバイパスするバイパス通路17が設けられ、被検査体側導入通路6と基準体側導入通路8にはそれぞれ、バイパス通路17との接続部よりも下流側に手動開閉弁36,37が設けられている。これらの手動開閉弁36,37は、検査時は解放となっている。 A branch passage 15 is connected to the front side of the branch portion 4 of the air introduction passage 3, and a gas discharge control valve 16 (AV 2) is provided in the branch passage 15. In addition, the inspection object side introduction passage 6 and the reference body side introduction passage 8 and the reference body side introduction passage 8 downstream of the branching portion 4 are respectively introduced into the inspection object side introduction passage 6 and the reference body side introduction passage at positions downstream of the gas introduction control valves 10 and 11. the bypass passage 17 is provided to bypass the passage 8, each of the inspection side inlet passage 6 and the reference side introducing passage 8, manual on-off valves 36 and 37 on the downstream side of the connecting portion between the bypass passage 17 is provided It has been. These manual on-off valves 36 and 37 are open at the time of inspection.

また、本実施例において、配置される基準体7については特に限定されるものではないが、基準体7の容積が被検査体5の容積に比べて格段に小さい小容器が適用されるようにすることが好ましい。基準体7には、該基準体7側から加圧気体を排出する基準体側排出通路18aが接続され、基準体側排出通路18aにおける加圧気体の出口34側が、通路連通制御弁32を介し、被検査体側導入通路6の気体導入制御弁11よりも気体通過の下流側位置に接続されるが、ここでは(本実施例では)バイパス通路17への接続位置よりも気体通過の下流側位置に接続されている。 In the present embodiment, the reference body 7 to be arranged is not particularly limited, but a small container in which the volume of the reference body 7 is much smaller than the volume of the object to be inspected 5 is applied. It is preferable to do. A reference body side discharge passage 18a for discharging pressurized gas from the reference body 7 side is connected to the reference body 7, and the outlet 34 side of the pressurized gas in the reference body side discharge passage 18a is covered via a passage communication control valve 32. Although connected to the downstream side position of the gas passage from the gas introduction control valve 11 of the inspection object side introduction passage 6 , here it is connected to the downstream side position of the gas passage rather than the connection position to the bypass passage 17 (in this embodiment). Has been.

通路連通制御弁32は電動ボールバルブ(BV)により形成されており、該電動ボールバルブは、開閉動作が緩慢で該開閉動作時に圧力変動が生じない又は殆ど生じない弁である。通路連通制御弁32は、通路連通制御弁32を制御する弁制御手段(図2の符号29、参照)によって、差圧検出部12による差圧検出時には閉じて該差圧検出時以外には開いた状態される。   The passage communication control valve 32 is formed by an electric ball valve (BV), and the electric ball valve is a valve that slowly opens and closes and hardly or hardly undergoes pressure fluctuations during the opening and closing operation. The passage communication control valve 32 is closed when a differential pressure is detected by the differential pressure detector 12 and is opened when the differential pressure is not detected by a valve control means (see reference numeral 29 in FIG. 2) for controlling the passage communication control valve 32. It is in the state.

被検査体5には該被検査体5側から加圧気体を排出する被検査体側排出通路18bが接続され、この被検査体側排出通路18bに気体排出制御弁(EXHV)19が設けられている。   An inspection object side discharge passage 18b for discharging pressurized gas from the inspection object 5 side is connected to the inspection object 5 and a gas discharge control valve (EXHV) 19 is provided in the inspection object side discharge passage 18b. .

本実施例において、基準体7側から加圧気体を排出する際には、加圧気体が基準体7の出口側(図の下部側)から基準体側排出通路18aを通して被検査体5に導入され、被検査体5と被検査体側排出通路18bを通って排出される。基準体7を小容器により形成すると、基準体7からの気体排出を被検査体5側を通して行っても短時間で行える。なお、被検査体5の交換作業時に、被検査体5への気体導入側が大気解放となる際に、そこから加圧気体を排出することもできる。   In this embodiment, when the pressurized gas is discharged from the reference body 7 side, the pressurized gas is introduced from the outlet side (lower side in the figure) of the reference body 7 into the inspection object 5 through the reference body side discharge passage 18a. Then, it is discharged through the inspection object 5 and the inspection object side discharge passage 18b. When the reference body 7 is formed of a small container, the gas can be discharged from the reference body 7 through the inspected object 5 side in a short time. It should be noted that when the inspection object 5 is replaced, when the gas introduction side to the inspection object 5 is released to the atmosphere, the pressurized gas can be discharged therefrom.

本実施例において、気体導入制御弁9(AV1),10(AV3),11(AV4)、導入経路切替弁14、気体排出制御弁16,19は全て、スプリングバック式のエアオペレートバルブにより形成されている。なお、各弁はスプリングバック式ではないエアオペレートバルブにより形成することもできるし、エアオペレートバルブ以外の弁により形成することもできるが、電磁弁とすると開閉時に熱が発生するため、エアオペレートバルブにより形成ことが好ましい。   In this embodiment, the gas introduction control valves 9 (AV1), 10 (AV3), 11 (AV4), the introduction path switching valve 14, and the gas discharge control valves 16, 19 are all formed by springback type air operated valves. ing. Each valve can be formed by an air operated valve that is not a springback type, or it can be formed by a valve other than an air operated valve. However, if an electromagnetic valve is used, heat is generated during opening and closing. Is preferably formed.

また、空気導入制御弁9は常時閉、その他の弁10,11,14,16,19は常時開の弁であり、空気導入制御弁10,11以外の弁体作動方向は、気体の流れとは逆方向に形成されている。そして、基準体7と被検査体5はそれぞれ、弁体が基準体7側と被検査体5側に向けた方向に作動するエアオペレートバルブにより挟まれており、各弁を閉じた状態で閉じ込められた気体側から各弁に圧力がかかっても気体の漏れが微少も生じないように形成されている。   The air introduction control valve 9 is normally closed, and the other valves 10, 11, 14, 16, 19 are normally open valves. The valve body operating directions other than the air introduction control valves 10, 11 are the same as the flow of gas. Are formed in the opposite direction. The reference body 7 and the inspected object 5 are sandwiched between air operated valves whose valve bodies are operated in directions directed toward the reference body 7 side and the inspected object 5 side. Even if pressure is applied to each valve from the gas side, the gas is not leaked.

図2に示されるように、本実施例の気体漏れ検査装置1は、制御装置21を備えた制御構成を有して、スタートAスイッチ22、スタートBスイッチ23に信号接続されている。制御装置21は、ウォーミングアップ運転実行手段24、気体漏れ検査実行手段25、気体漏れ検出部26,圧力調整手段27、プリプロセス動作実行手段28、弁制御手段29を有しており、前記差圧検出部12と試験圧設定手段13と導入経路切替弁14、通路連通制御弁32、弁9,10,11,16,19にも信号接続されている。   As shown in FIG. 2, the gas leakage inspection apparatus 1 of the present embodiment has a control configuration including a control device 21 and is signal-connected to a start A switch 22 and a start B switch 23. The control device 21 includes a warm-up operation execution means 24, a gas leak inspection execution means 25, a gas leak detection unit 26, a pressure adjustment means 27, a preprocess operation execution means 28, and a valve control means 29, and the differential pressure detection. The unit 12, the test pressure setting means 13, the introduction path switching valve 14, the passage communication control valve 32, and the valves 9, 10, 11, 16, 19 are also signal-connected.

なお、図2に示されている弁9,10,11,16,19は、前記気体導入制御弁9,10,11と気体排出制御弁16,19を示すが、図2では、図を分かりやすくするためにこれらの各弁をまとめて表示している。   The valves 9, 10, 11, 16, and 19 shown in FIG. 2 indicate the gas introduction control valves 9, 10, 11 and the gas discharge control valves 16, 19, respectively. In FIG. These valves are shown together for the sake of simplicity.

また、図1に示す構成を有する本実施例と図9に示した従来例とはシステム構成は異なる部分はあるが、本実施例においても、気体漏れ検査動作は、図9(a)、(b)、(c)、(d)に示したような順で、図9の各工程とほぼ同様の動作が行われ、被検査体5に導入された加圧気体の圧力と基準体7に導入された加圧気体の圧力との差圧に基づいて被検査体5の気体漏れ検査が行われるものであり、この動作は気体漏れ検査実行手段25によって実行される。   1 and the conventional example shown in FIG. 9 are different from each other in the system configuration. In this example, the gas leakage inspection operation is performed as shown in FIGS. b), (c), and (d) in the order shown in FIG. 9, almost the same operation as in each step of FIG. 9 is performed. A gas leakage inspection of the object to be inspected 5 is performed based on a pressure difference from the pressure of the introduced pressurized gas, and this operation is executed by the gas leakage inspection execution means 25.

つまり、気体漏れ検査実行手段25は、各弁9,10,11,16,19の開閉動作を行い、また、圧力調整手段27に指令を加えて導入気体の圧力を調整させ、被検査体5と基準体7の両方に加圧気体を導入する加圧気体導入工程(図9(a)参照)を実行する。また、該加圧器体導入工程後に被検査体5内の気体の圧力と基準体7内の気体の圧力とを平衡させる平衡工程(図9(b)参照)、該平衡工程後に被検査体5内の気体の圧力と基準体7内の気体の圧力との差圧を検出する差圧検出工程(図9(c)参照)、該差圧検出工程後に被検査体5内と基準体7内から気体を排出する気体排出工程(図9(d)参照)を実行する。   In other words, the gas leak test execution means 25 opens and closes the valves 9, 10, 11, 16, and 19, and also gives a command to the pressure adjustment means 27 to adjust the pressure of the introduced gas, thereby inspecting the object 5 to be inspected. And a pressurized gas introduction step (see FIG. 9A) for introducing a pressurized gas into both the reference body 7 and the reference body 7. Further, after the pressurizer body introduction step, an equilibrium step (see FIG. 9B) for balancing the pressure of the gas in the inspection object 5 and the pressure of the gas in the reference body 7; A differential pressure detecting step (see FIG. 9C) for detecting a differential pressure between the pressure of the gas in the gas and the pressure of the gas in the reference body 7, and in the inspection object 5 and the reference body 7 after the differential pressure detecting step A gas discharge step (see FIG. 9D) for discharging the gas from is performed.

なお、このような動作に加えて行われる本実施例の特徴的な構成の詳細については後述するが、本実施例では、弁制御手段29が通路連通制御弁32の開閉制御を行い、この制御は、差圧検出部12による差圧検出時には閉じて該差圧検出時以外には開いた状態とするものである。つまり、弁制御手段29は、気体漏れ検査実行手段25からの制御開始信号を受けて、前記平衡工程後に差圧検出工程の動作が行われるときに、通路連通制御弁32(BV)を閉じる方向に動作させ、差圧検出工程後には、通路連通制御弁32(BV)を開く方向に動作させる。   Although the details of the characteristic configuration of the present embodiment performed in addition to such an operation will be described later, in this embodiment, the valve control means 29 performs opening / closing control of the passage communication control valve 32, and this control is performed. Is closed when the differential pressure is detected by the differential pressure detector 12 and is open except when the differential pressure is detected. That is, the valve control means 29 receives the control start signal from the gas leak test execution means 25 and closes the passage communication control valve 32 (BV) when the differential pressure detection process is performed after the equilibrium process. After the differential pressure detection step, the passage communication control valve 32 (BV) is operated to open.

なお、例えば加圧気体導入工程(CHG)は30秒程度、平衡工程(BAL)は60秒程度、差圧検出工程(DET)は60秒程度、気体排出工程(EXH)は10秒程度行われるといったように、これらの各工程は、予め定められる設定時間で行われるものであるが、通路連通制御弁32が電動ボールバルブにより形成されていることから、差圧検出工程前後における通路連通制御弁32の開閉動作はゆっくりと行われる。   For example, the pressurized gas introduction step (CHG) is performed for about 30 seconds, the equilibrium step (BAL) is performed for about 60 seconds, the differential pressure detection step (DET) is performed for about 60 seconds, and the gas discharge step (EXH) is performed for about 10 seconds. As described above, each of these steps is performed at a predetermined set time. However, since the passage communication control valve 32 is formed of an electric ball valve, the passage communication control valve before and after the differential pressure detection step. The opening / closing operation 32 is performed slowly.

また、差圧検出工程において差圧検出部12によって検出される基準体7と被検査体5との圧力差は、気体漏れ検出部26に加えられ、気体漏れ検出部26によって被検査体5に気体漏れがあるかどうかが検出される。   Further, the pressure difference between the reference body 7 and the inspection object 5 detected by the differential pressure detection unit 12 in the differential pressure detection step is applied to the gas leakage detection unit 26, and the gas leakage detection unit 26 applies the pressure difference to the inspection object 5. Whether there is a gas leak is detected.

圧力調整手段27は、試験圧設定手段13を制御することによって気体漏れ検査動作時に導入する気体の圧力を調整すると共に、導入経路切替弁14の開閉制御を行い、加圧気体の導入口2から導入される加圧気体を、導入経路切替弁14を通して基準体7や被検査体5側に導くか、あるいは、低圧ガバナ35を通して基準体7や被検査体5側に導くかを選択制御することにより、基準体7や被検査体5側に導かれる加圧気体の圧力を調整する。   The pressure adjusting means 27 controls the test pressure setting means 13 to adjust the pressure of the gas introduced during the gas leak inspection operation, and also controls the opening and closing of the introduction path switching valve 14 so as to control the pressure from the pressurized gas inlet 2. Selectively controlling whether the pressurized gas to be introduced is guided to the reference body 7 and the inspected object 5 side through the introduction path switching valve 14 or to the reference body 7 and the inspected object 5 side through the low pressure governor 35. Thus, the pressure of the pressurized gas guided to the reference body 7 or the inspected object 5 side is adjusted.

圧力調整手段27は、気体漏れ検査実行手段25から気体漏れ検査実行時の圧力調整指令が加えられると、試験圧設定手段13を制御することによって気体漏れ検査動作時に導入する気体の圧力を予め定められる設定試験圧(例えば300〜500kPa)とし、導入経路切替弁14を開いて導入経路切替弁14を通して試験圧の加圧気体を基準体7側と被検査体5側とに導入できるようにする。この圧力調整手段27による導入気体圧力の調整と気体漏れ検査実行手段25による弁9,10,11,16,19の開閉制御によって、従来例とほぼ同様の気体漏れ検査動作が行われることになる。   When the pressure adjustment command at the time of executing the gas leak test is applied from the gas leak test executing unit 25, the pressure adjusting unit 27 controls the test pressure setting unit 13 to determine the gas pressure to be introduced during the gas leak test operation in advance. The set test pressure (for example, 300 to 500 kPa) is set, and the introduction path switching valve 14 is opened so that the pressurized gas of the test pressure can be introduced to the reference body 7 side and the inspection object 5 side through the introduction path switching valve 14. . By adjusting the introduced gas pressure by the pressure adjusting means 27 and opening / closing control of the valves 9, 10, 11, 16, and 19 by the gas leakage inspection executing means 25, a gas leakage inspection operation substantially similar to the conventional example is performed. .

スタートAスイッチ22は、気体漏れ検査装置1による気体漏れ検査動作の準備動作開始のための操作手段であり、気体漏れ検査実行手段25による気体漏れ検査動作の開始前に必要に応じて行われるウォーミングアップ運転や第1のプリプロセス動作を開始させるための操作手段である。スタートAスイッチ22が操作される(例えば押される)と、準備動作スタート信号がウォーミングアップ運転実行手段24とプリプロセス動作実行手段28とに加えられる。   The start A switch 22 is an operation means for starting a preparatory operation for a gas leak inspection operation by the gas leak inspection apparatus 1 and is warmed up as necessary before the gas leak inspection operation by the gas leak inspection execution means 25 is started. This is an operation means for starting the operation and the first preprocess operation. When the start A switch 22 is operated (for example, pressed), a preparation operation start signal is applied to the warm-up operation execution means 24 and the preprocess operation execution means 28.

ウォーミングアップ運転実行手段24は、気体漏れ検査実行手段25による気体漏れ検査動作の開始時に、予め定められる設定条件が満たされたときには、気体漏れ検査動作の複数の前記動作工程(図9(a)〜(d)、参照)を、該気体漏れ検査の動作時に行われる各工程の所要時間よりも短い予め定められている設定短縮時間で予め定められている設定回数だけ行ってから前記気体漏れ検査の動作を開始させるものである。   The warming-up operation execution means 24 is configured to perform the plurality of operation steps (FIG. 9A to FIG. 9A) of the gas leakage inspection operation when a predetermined set condition is satisfied at the start of the gas leakage inspection operation by the gas leakage inspection execution means 25. (D), see) is performed for a predetermined number of times with a predetermined set shortening time shorter than the time required for each step performed during the operation of the gas leak test, and then the gas leak test is performed. The operation is started.

このウォーミングアップ運転実行手段24によるウォーミングアップ運転実行の基準となる設定条件とは、例えば気体漏れ検査装置1の電源をオンしてからの初期運転時や、前回の計測(気体漏れ検査)終了後、予め定められる設定時間(S分以上であり、Sは例えば30〜60。例えばS分=60分=1時間)経過したときとすることができ、ウォーミングアップ運転実行手段24は、気体漏れ検査装置1の電源をオンしてからの初期運転時かどうかの判断手段と、前回計測終了時を把握する手段と時計機構(図示せず)とを有し、前記のような設定条件が満たされたときにはウォーミングアップ運転を実行する。   The setting conditions that serve as a reference for executing the warming-up operation by the warming-up operation executing means 24 are, for example, in the initial operation after turning on the power of the gas leakage inspection device 1 or after the previous measurement (gas leakage inspection) is completed. The predetermined set time (S minutes or more, S is 30 to 60, for example, S minutes = 60 minutes = 1 hour) may have passed, and the warm-up operation execution means 24 is It has a means for determining whether or not it is an initial operation after turning on the power, a means for grasping the end of the previous measurement, and a clock mechanism (not shown), and warming up when the above set conditions are satisfied Run the operation.

つまり、気体漏れ検査装置1の電源をオンしてからの初期運転時や、前回計測終了後に長時間(一定時間以上)経過した後に、直ぐに気体漏れ検査動作を行うと、気体漏れ検査装置1が安定せずに測定が正確に行われないことが多いので、気体漏れ検査装置1の電源をオンしてからの初期運転時と予め定められる設定時間以上経過したときにウォーミングアップ運転を実行することにより、気体漏れ検査装置の安定化を的確に行え、正確な気体漏れ検査動作を行うことができるようにする。   In other words, when the gas leak inspection operation is performed immediately after the initial operation after turning on the power of the gas leak inspection apparatus 1 or after a long time (a certain time or more) has elapsed after the end of the previous measurement, the gas leak inspection apparatus 1 In many cases, measurement is not performed accurately without being stabilized, so that the warm-up operation is executed when a predetermined set time elapses after the initial operation after the gas leakage inspection apparatus 1 is turned on. The gas leakage inspection apparatus can be accurately stabilized and an accurate gas leakage inspection operation can be performed.

なお、ウォーミングアップ運転に必要であると判断する前記設定時間は、この時間経過後に直ぐに気体漏れ検査動作を行うと気体漏れ検査装置が安定せずに正確な測定が行われないと推定される時間であり、例えば実験等により予め求めて定められる時間である。   The set time for determining that it is necessary for the warm-up operation is a time when it is estimated that if the gas leak test operation is performed immediately after the elapse of time, the gas leak test apparatus is not stabilized and accurate measurement is not performed. Yes, for example, a time determined in advance by experiments or the like.

また、前記の如く、本実施例においても、気体漏れ検査動作自体は従来例とほぼ同様に行われるものであり、気体漏れ検査動作時には、加圧気体導入工程(CHG)、平衡工程(BAL)、差圧検出工程(DET)、気体排出工程(EXH)の全工程を合わせて例えば160秒程度行われるが、ウォーミングアップ運転は、例えば全工程の時間を合わせて20秒程度、またはそれ以下に短縮し、1回以上の予め定められる設定回数(例えば2〜3回)繰り返し行われる。   In addition, as described above, in this embodiment, the gas leakage inspection operation itself is performed in substantially the same manner as the conventional example. During the gas leakage inspection operation, the pressurized gas introduction process (CHG) and the equilibrium process (BAL) The total of the differential pressure detection process (DET) and the gas discharge process (EXH) is performed for about 160 seconds, for example, but the warm-up operation is shortened to, for example, about 20 seconds or less. Then, it is repeated one or more predetermined times (for example, 2 to 3 times).

なお、ウォーミングアップ運転中の各工程の時間は、例えば時間設定パタンを複数設けて選択できるようにしてもよいし、典型パタンを予め設定しておいて必要に応じて可変できるようにしてもよい。また、ウォーミングアップ運転の設定回数も可変できるようにしてもよい。   Note that the time for each process during the warm-up operation may be selected by providing a plurality of time setting patterns, for example, or may be variable as needed by setting a typical pattern in advance. Further, the set number of warm-up operations may be variable.

例えば、冬等の気温が低いときにはウォーミングアップ運転の各工程の時間や設定回数を多めにし、その逆に夏等の気温が高い時には各工程の時間や設定回数を少なめにする等、外気温に応じてウォーミングアップ運転の設定を自動的に変更してもよいし、利用者が気温に対応させて設定を変更できるようにしてもよい。また、ウォーミングアップ運転実行手段24にカレンダー機能を持たせて、そのカレンダーに応じて自動的に設定を変更してもよい。   For example, when the temperature is low in winter, etc., the time and number of times for each process of warm-up operation are increased. On the other hand, when the temperature is high in summer, etc., the time and the number of times for each process are reduced. Then, the setting of the warm-up operation may be automatically changed, or the user may be able to change the setting corresponding to the temperature. Further, the warming-up operation execution means 24 may have a calendar function, and the setting may be automatically changed according to the calendar.

さらに、気体漏れ検査装置1の停止時間に応じて、停止時間が長くなるほど各工程の時間や設定回数を多めにする等、ウォーミングアップ運転の設定を自動的に、または手動により変更してもよいし、測定する被検査体5の容積を考慮して、被検査体5の大きさが大きいほど、各工程の時間や設定回数を多めにする等、ウォーミングアップ運転の設定を自動的に、または手動により変更してもよい。   Furthermore, depending on the stop time of the gas leak inspection apparatus 1, the warm-up operation setting may be changed automatically or manually, such as increasing the time of each process or setting the number of times as the stop time becomes longer. In consideration of the volume of the object 5 to be measured, the warm-up operation is set automatically or manually, such as the larger the size of the object 5 to be measured, the more the time and the number of times of each process are set. It may be changed.

ウォーミングアップ運転実行手段24は、ウォーミングアップ運転の実行に際し、各弁9,10,11,16,19の開閉を適宜行うと共に、圧力調整手段27にウォーミングアップ運転実行信号を加え、加圧気体の導入口2から導入される加圧気体を、導入経路切替弁14を通して基準体7や被検査体5側に導くようにしてウォーミングアップ運転を実行する。   The warming-up operation execution means 24 appropriately opens and closes the valves 9, 10, 11, 16, 19 when executing the warming-up operation, and adds a warm-up operation execution signal to the pressure adjustment means 27 to introduce the pressurized gas inlet 2 The warming-up operation is executed so that the pressurized gas introduced from the gas is guided to the reference body 7 and the inspected object 5 through the introduction path switching valve 14.

圧力調整手段27は、ウォーミングアップ運転実行手段24からウォーミングアップ運転実行信号が加えられると、気体漏れ検査動作時と同様に、前記試験圧の加圧気体が基準体7や被検査体5側に導かれるように、試験圧設定手段13を制御し、かつ、導入経路切替弁14を開状態として、試験圧の加圧気体を基準体7や被検査体5側に導く。   When the warm-up operation execution signal is applied from the warm-up operation execution unit 24, the pressure adjusting unit 27 guides the pressurized gas of the test pressure to the reference body 7 or the inspected object 5 side as in the gas leak inspection operation. As described above, the test pressure setting means 13 is controlled, and the introduction path switching valve 14 is opened, and the pressurized gas at the test pressure is guided to the reference body 7 or the inspected object 5 side.

なお、ウォーミングアップ運転実行手段24によるウォーミングアップ運転中にも、検出工程においては、被検査体5側と基準体7側との差圧の検出が行われることになり、このときに検出される値は不適切な値となることが多い。つまり、ウォーミングアップ運転は、気体漏れ検査装置1を安定化するための運転であり、このウォーミングアップ運転が終了するまでの間は気体漏れ検査装置1の安定化が不十分である可能性があり、また、ウォーミングアップ運転は通常の気体漏れ検査動作に比べて各工程を非常に短い時間で行うものであるため、検出工程において被検査体5側と基準体7側との差圧の検出を正確に行うことはできない可能性がある。   Even during the warm-up operation by the warm-up operation execution means 24, the detection process detects the differential pressure between the inspected object 5 side and the reference body 7 side, and the value detected at this time is It is often an inappropriate value. That is, the warm-up operation is an operation for stabilizing the gas leak inspection apparatus 1, and there is a possibility that the gas leak inspection apparatus 1 is not sufficiently stabilized until the warm-up operation ends. In the warming-up operation, each process is performed in a very short time compared to a normal gas leakage inspection operation, and therefore, the differential pressure between the inspected object 5 side and the reference body 7 side is accurately detected in the detection process. It may not be possible.

そこで、本実施例では、ウォーミングアップ運転実行手段24によるウォーミングアップ運転中には、気体漏れ検出部26からエラー信号が出力される可能性があるが、ウォーミングアップ運転実行手段24は、ウォーミングアップ運転中に出力されるエラー信号は無視してウォーミングアップ運転を継続し、前記設定回数繰り返して行い、その後、ウォーミングアップ済み信号を出力してプリプロセス動作に移行する(プリプロセス動作が行われない場合には気体漏れ検査動作に移行する)ようにしている。   Therefore, in this embodiment, there is a possibility that an error signal may be output from the gas leak detection unit 26 during the warm-up operation by the warm-up operation execution means 24, but the warm-up operation execution means 24 is output during the warm-up operation. The warm-up operation is continued by ignoring the error signal, and the warm-up operation is repeated for the set number of times. After that, the warm-up signal is output and the process proceeds to the pre-process operation. ).

以上のようなウォーミングアップ運転を実行し、ごく短い時間であっても気体漏れ検査装置1に加圧気体を通し、弁9,10,11,14,16,19を開閉制御することによって、例えば夕方から次の日の朝までの間や昼休みの時間をおいた後に測定を行う時等、気体漏れ検査装置1、接続配管、基準体7(マスタ)および外部弁等の起動後の過渡的な特性変化を解消することができ、気体漏れ検査装置1を安定化することができるので、休憩等を挟んだ断続的な検査でも精度の高い気体漏れ検査動作を行うことができる。   The warm-up operation as described above is performed, and even in a very short time, the pressurized gas is passed through the gas leakage inspection apparatus 1 and the valves 9, 10, 11, 14, 16, 19 are controlled to open and close, for example, in the evening Transient characteristics after startup of the gas leak tester 1, connecting pipe, reference body 7 (master), external valve, etc., for example, when measuring from the morning until the next day or after taking a lunch break Since the change can be eliminated and the gas leakage inspection apparatus 1 can be stabilized, a highly accurate gas leakage inspection operation can be performed even in intermittent inspections with a break or the like interposed therebetween.

ウォーミングアップ運転実行手段24は、以上のようなウォーミングアップ運転を実行した時の終了時とウォーミングアップ運転を実行しない時(する必要がないとき)とには、ウォーミングアップ済み信号をプリプロセス動作実行手段28に加える。   The warm-up operation execution means 24 applies a warm-up completed signal to the pre-process operation execution means 28 when the warm-up operation is completed and when the warm-up operation is not executed (when it is not necessary). .

プリプロセス動作実行手段28は、気体漏れ検査実行手段25による気体漏れ検査の開始前に、基準体7側にのみ加圧気体を通す第1のプリプロセス動作と、基準体7と被検査体5の両方に加圧気体を通す第2のプリプロセス動作との少なくとも一方の動作を行う手段である。プリプロセス動作実行手段28は、ウォーミングアップ運転実行手段24からウォーミングアップ済み信号が加えられると、例えば以下のタイミングで第1のプリプロセス動作を行う。   The pre-process operation executing means 28 is a first pre-process operation in which a pressurized gas is passed only to the reference body 7 side before the gas leak inspection is started by the gas leak inspection executing means 25, and the reference body 7 and the object 5 to be inspected. Means for performing at least one of a second pre-process operation in which a pressurized gas is passed through both of them. When the warm-up completion signal is added from the warm-up operation execution unit 24, the pre-process operation execution unit 28 performs the first pre-process operation at the following timing, for example.

つまり、プリプロセス動作実行手段28は、スタートAスイッチ22の操作が行われる度に(スタートAスイッチ22が押されてからウォーミングアップ済み信号が加えられる度に)第1のプリプロセス動作を行ってもよいし、例えばスタートAスイッチ22が予め定められる設定回数操作される毎に(スタートAスイッチ22が設定回数押されてウォーミングアップ済み信号がプリプロセス動作実行手段28に設定回数加えられる度に)第1のプリプロセス動作を行ってもよい。   That is, the preprocess operation executing means 28 may perform the first preprocess operation every time the start A switch 22 is operated (every time a warm-up signal is applied after the start A switch 22 is pressed). For example, every time the start A switch 22 is operated a predetermined number of times (every time the start A switch 22 is pressed a predetermined number of times and a warm-up signal is added to the preprocess operation executing means 28), the first time The pre-processing operation may be performed.

また、スタートAスイッチ22が押された後に初めてウォーミングアップ運転実行手段24からウォーミングアップ済み信号が加えられたときと、その後、気体漏れ検査実行手段25による気体漏れ検査実行終了後(気体漏れ検査実行手段25から気体漏れ検査終了信号が加えられたとき)には自動的に毎回第1のプリプロセス動作を行う、あるいは、気体漏れ検査実行終了回数が設定回数となった毎に第1のプリプロセス動作を行う等、様々な制御パタンを設定することができる。また、以上のような固定の制御パタンを予め設定しておいてもよいし、必要に応じて制御パタンを可変できるようにしてもよい。   Further, when a warm-up signal is applied from the warm-up operation executing means 24 for the first time after the start A switch 22 is pressed, and after the gas leak inspection execution by the gas leak inspection executing means 25 is finished (the gas leak inspection executing means 25). The first preprocess operation is automatically performed every time when the gas leak inspection end signal is added), or the first preprocess operation is performed every time the gas leak inspection execution end count reaches the set number of times. Various control patterns can be set. Also, the fixed control pattern as described above may be set in advance, or the control pattern may be variable as necessary.

本実施例では、一例として、スタートAスイッチ22が操作された後に、押されてから初めてウォーミングアップ運転実行手段24からウォーミングアップ済み信号が加えられたときと、その後、気体漏れ検査実行手段25による気体漏れ検査実行終了後(気体漏れ検査実行手段25から気体漏れ検査終了信号が加えられたとき)に毎回、自動的に第1のプリプロセス動作を行うように設定されている。   In the present embodiment, as an example, when the warm-up operation executing means 24 applies the warm-up operation execution means 24 for the first time after the start A switch 22 is operated, and after that, the gas leak inspection execution means 25 performs gas leakage. It is set so that the first preprocess operation is automatically performed every time after completion of the inspection (when a gas leakage inspection end signal is added from the gas leakage inspection execution means 25).

プリプロセス動作実行手段28による第1のプリプロセス動作は、弁9,10,11,16,19の開閉制御と、導入経路切替弁14の閉制御とによって、加圧気体を基準体7に通す動作であり、具体的には、プリプロセス動作実行手段28は、第1のプリプロセス動作を行う際に、気体導入制御弁9,10と気体排出制御弁19を開き、気体導入制御弁11と気体排出制御弁16を閉じる。なお、前記の如く、通路連通制御弁32は開かれている。   The first pre-process operation by the pre-process operation executing means 28 allows the pressurized gas to pass through the reference body 7 by opening / closing control of the valves 9, 10, 11, 16, 19 and closing control of the introduction path switching valve 14. Specifically, the preprocess operation executing means 28 opens the gas introduction control valves 9 and 10 and the gas discharge control valve 19 when performing the first preprocess operation, The gas discharge control valve 16 is closed. As described above, the passage communication control valve 32 is opened.

また、プリプロセス動作時に導入する加圧気体の圧力は試験圧よりも小さく設定されるものであり、プリプロセス動作実行手段28は、第1のプリプロセス動作を行う際に、圧力調整手段27にプリプロセス動作実行信号を加え、導入経路切替弁14を閉状態とし、低圧ガバナ35を通して加圧気体を基準体7側に導くことにより、試験圧より小さい圧力(例えば10kPaを超える圧力で、かつ、100kPa未満の圧力)の加圧気体を基準体7側に導き、加圧気体を基準体7に通し、基準体側排出通路18aを通して前記のようにして排出する。   The pressure of the pressurized gas introduced during the preprocess operation is set to be smaller than the test pressure, and the preprocess operation execution means 28 uses the pressure adjustment means 27 when performing the first preprocess operation. A preprocess operation execution signal is added, the introduction path switching valve 14 is closed, and the pressurized gas is guided to the reference body 7 side through the low pressure governor 35, whereby a pressure lower than the test pressure (for example, a pressure exceeding 10 kPa, and The pressurized gas (pressure less than 100 kPa) is guided to the reference body 7 side, the pressurized gas is passed through the reference body 7 and discharged through the reference body side discharge passage 18a as described above.

なお、第1のプリプロセス動作および後述する第2のプリプロセス動作時に導入する加圧気体の圧力は特に限定されるものではないが、気体の流速が音速を超えると、衝撃波が生じ、振動等により損傷が生じたり発熱が生じたりするといった支障が生じるため、気体の流速が音速以下になるように調整されるものであり、そのために、本実施例では、例えば導入する加圧気体の圧力が100kPaを超えないように低圧ガバナ35を設けて調整している。   The pressure of the pressurized gas introduced during the first preprocess operation and the second preprocess operation described later is not particularly limited. However, if the gas flow velocity exceeds the speed of sound, a shock wave is generated, vibration, etc. In this embodiment, for example, the pressure of the pressurized gas to be introduced is adjusted so that the flow velocity of the gas is adjusted to be lower than the sound velocity. The low pressure governor 35 is provided and adjusted so as not to exceed 100 kPa.

つまり、プリプロセス動作は、基準体7内や被検査体5内の気体の温度が高くならないように調整するために行われるものであるから、圧力の高い気体を導入する必要はなく、気体圧縮による温度上昇抑制や排気等による減圧時に発生する温度低下等の観点から、むしろ、気体の圧力は小さい方が望ましいので、前記のように、導入する気体の圧力を大気圧よりは高めであっても試験圧よりは小さくすることにより適切にプリプロセス動作を行うことができる。なお、低圧ガバナ35を設ける代わりに、圧力を定圧から高圧までの広い範囲で可変可能な電空レギュレータを設けて、導入する加圧気体の圧力を調整してもよい。   That is, the pre-process operation is performed in order to adjust the temperature of the gas in the reference body 7 and the inspected object 5 so that the gas does not need to be introduced. From the standpoints of temperature rise suppression due to pressure reduction and temperature drop that occurs during decompression due to exhaust, etc., rather, it is desirable that the gas pressure be smaller, so as described above, the pressure of the introduced gas should be higher than atmospheric pressure. Also, the preprocess operation can be appropriately performed by making the pressure smaller than the test pressure. Instead of providing the low pressure governor 35, an electropneumatic regulator capable of changing the pressure in a wide range from a constant pressure to a high pressure may be provided to adjust the pressure of the pressurized gas to be introduced.

また、プリプロセス動作実行手段28は、第1のプリプロセス動作時に、必要に応じ、ファン等を用いて基準体7内を冷却する等して温度安定化を図ってもよい。放熱性の高い基準体7を用いる場合等には、特に、ファンによる温度安定化が有効になる。   Further, the preprocess operation executing means 28 may stabilize the temperature by cooling the inside of the reference body 7 using a fan or the like as necessary during the first preprocess operation. When using the reference body 7 having high heat dissipation, temperature stabilization by a fan is particularly effective.

プリプロセス動作実行手段28は、第1のプリプロセス動作を実行した後、直ちに、あるいは予め定められる設定待機時間経過後に第1のプリプロセス動作終了信号を発信し、表示部31に加える。表示部31には、第1のプリプロセス動作終了表示が行われる。なお、表示の仕方は特に限定されるものでなく適宜設定されるものである。また、表示部31を設けて表示を行う代わりに、あるいは表示に加え、メッセージ発生やブザーやチャイム等の音の発生等、適宜の音声による報知を行うようにしてもよい。   The pre-process operation execution means 28 transmits a first pre-process operation end signal immediately after the first pre-process operation is executed or after a predetermined set waiting time has elapsed, and adds it to the display unit 31. The display unit 31 displays the first preprocess operation end display. Note that the display method is not particularly limited, and is appropriately set. Further, instead of providing the display unit 31 for display, or in addition to the display, notification by appropriate sound such as generation of a message or generation of sound such as a buzzer or chime may be performed.

スタートBスイッチ23は、気体漏れ検査装置1による気体漏れ検査動作の準備動作から気体漏れ検査動作に移行させるための操作手段である。例えば、スタートAスイッチ22が操作されてから、ウォーミングアップ運転や第1のプリプロセス動作が適宜行われ、表示部31に第1のプリプロセス動作終了表示等の報知が行われたときに、利用者がスタートBスイッチ23を操作する(例えば利用者によって押される)と、検査移行スタート信号がプリプロセス動作実行手段28と気体漏れ検査実行手段25とに加えられる。   The start B switch 23 is an operation means for shifting from a gas leak test operation preparation operation to a gas leak test operation by the gas leak test apparatus 1. For example, when the warm-up operation or the first preprocess operation is appropriately performed after the start A switch 22 is operated and the display unit 31 is notified of the first preprocess operation end display or the like, the user When the start B switch 23 is operated (for example, pressed by the user), an inspection transition start signal is applied to the preprocess operation execution means 28 and the gas leak inspection execution means 25.

スタートBスイッチ23の操作によって検査移行スタート信号が加えられると、例えばその都度、プリプロセス動作実行手段28が第2のプリプロセス動作を行うようにすることができる。つまり、スタートBスイッチ23は、プリプロセス動作実行手段28による第2のプリプロセス動作を開始させるための第2のプリプロセス開始操作手段としても機能するものであり、また、前記の如く、スタートAスイッチ22がプリプロセス動作実行手段28による第1のプリプロセス動作を開始させるための第1のプリプロセス開始操作手段としても機能することから、本実施例では、プリプロセス動作実行手段28による第1と第2の少なくともプリプロセス動作を開始させるためのプリプロセス開始操作手段として、第1のプリプロセス開始操作手段と第2のプリプロセス開始操作手段を個別に備える態様と成している。   When an inspection transition start signal is applied by operating the start B switch 23, for example, the preprocess operation executing means 28 can perform the second preprocess operation each time. That is, the start B switch 23 also functions as a second preprocess start operation means for starting the second preprocess operation by the preprocess operation execution means 28, and, as described above, the start A switch A Since the switch 22 also functions as a first preprocess start operation means for starting the first preprocess operation by the preprocess operation execution means 28, in the present embodiment, the first process by the preprocess operation execution means 28 is performed. As a preprocess start operation means for starting at least a second preprocess operation, a first preprocess start operation means and a second preprocess start operation means are separately provided.

なお、スタートBスイッチ23の操作の度に第2のプリプロセス動作を行う代わりに、例えばスタートBスイッチ23が連続して2回押されるといった、特有の操作毎に、プリプロセス動作実行手段28に検査移行スタート信号が加えられるようにして、この場合にのみ、第2のプリプロセス動作が行われるようにしてもよい。また、スタートBスイッチ23が第2のプリプロセス動作の開始用の操作手段と気体漏れ検査の開始用の操作手段を兼ねる構成とせずに、気体漏れ検査動作開始用の操作手段と第2のプリプロセス動作開始操作専用の操作手段を個別に設けてもよい。   Instead of performing the second preprocess operation every time the start B switch 23 is operated, the preprocess operation executing means 28 is instructed for each specific operation such as the start B switch 23 being pressed twice continuously. The inspection pre-start signal may be added, and the second pre-process operation may be performed only in this case. In addition, the start B switch 23 is not configured to serve as both the operation means for starting the second pre-process operation and the operation means for starting the gas leak test, and the operation means for starting the gas leak test operation and the second pre-process operation. Operation means dedicated to the process operation start operation may be provided individually.

プリプロセス動作実行手段28は、スタートBスイッチ23の操作に伴う検査移行スタート信号が加えられると、気体導入制御弁9,10,11と気体排出制御弁19を開く。なお、気体排出制御弁16は閉じたままとする。また、プリプロセス動作実行手段28は、第2のプリプロセス動作を行う際にも、圧力調整手段27にプリプロセス動作実行信号を加え、導入経路切替弁14を閉状態とし、低圧ガバナ35を通して加圧気体を基準体7側と被検査体5側とに導くことにより、試験圧より小さい圧力の加圧気体を基準体7側と被検査体5側とに導く。そして、基準体7に通した加圧気体は基準体側排出通路18aを通し、被検査体側導入通路6側から被検査体5に通した加圧気体と共に気体排出制御弁19側から排出するようにする。   The pre-process operation executing means 28 opens the gas introduction control valves 9, 10, 11 and the gas discharge control valve 19 when an inspection transition start signal accompanying the operation of the start B switch 23 is applied. The gas discharge control valve 16 remains closed. The preprocess operation executing means 28 also applies a preprocess operation execution signal to the pressure adjusting means 27 when the second preprocess operation is performed, closes the introduction path switching valve 14, and applies it through the low pressure governor 35. By introducing the pressurized gas to the reference body 7 side and the inspection object 5 side, the pressurized gas having a pressure smaller than the test pressure is guided to the reference body 7 side and the inspection object 5 side. The pressurized gas that has passed through the reference body 7 passes through the reference body-side discharge passage 18a, and is discharged from the gas discharge control valve 19 side together with the pressurized gas that has passed through the body to be inspected 5 from the inspection-object-side introduction passage 6 side. To do.

プリプロセス動作実行手段28は、第2のプリプロセス動作終了後、あるいは、第2のプリプロセス動作の必要がない場合には、プリプロセス動作済み信号を気体漏れ検査実行手段25に加える。   The preprocess operation execution means 28 applies a preprocess operation complete signal to the gas leak inspection execution means 25 after the end of the second preprocess operation or when the second preprocess operation is not necessary.

気体漏れ検査実行手段25は、プリプロセス動作実行手段28からプリプロセス動作済み信号が加えられると、図9(a)、(b)、(c)、(d)に示したような順で、図9の各工程とほぼ同様の動作を実行するが、本実施例では、弁制御手段29に指令を加え、差圧検出部12による差圧検出の前までは通路連通制御弁32(BV)を開いておき、差圧検出時には通路連通制御弁32(BV)を閉じるようにする、本実施例の特徴的な通路連通制御弁32(BV)の開閉動作を行うようにして、気体漏れ検査動作を実行する。   When the pre-process operation completion signal is added from the pre-process operation execution unit 28, the gas leak inspection execution unit 25, in the order shown in FIGS. 9A, 9B, 9C, and 9D, Although substantially the same operation as in each step of FIG. 9 is executed, in this embodiment, a command is given to the valve control means 29 and the passage communication control valve 32 (BV) until the differential pressure is detected by the differential pressure detector 12. Is opened, and when the differential pressure is detected, the passage communication control valve 32 (BV) is closed. The characteristic passage communication control valve 32 (BV) of this embodiment is opened and closed, and the gas leakage inspection is performed. Perform the action.

本実施例は以上のように構成されており、以下、本実施例の気体漏れ検査装置を用いた動作について説明する。図3に示されるように、ステップS1で電源がON(オン)されるとステップS2で初期画面が表示され、ステップS3で計測設定画面が表示される。ここで、利用者により、計測設定操作が行われてスタートAスイッチ22が操作されると、ステップS4で、気体漏れ検査動作の準備動作が開始される。つまり、ステップS5で計測画面が表示され、ステップS6で、ウォーミングアップ運転実行手段24によるウォーミングアップ運転(暖機運転)が、ウォーミングアップ運転を実行するために定められた前記設定条件を満たす場合には、適宜行われる。   The present embodiment is configured as described above, and the operation using the gas leakage inspection apparatus of the present embodiment will be described below. As shown in FIG. 3, when the power is turned on in step S1, an initial screen is displayed in step S2, and a measurement setting screen is displayed in step S3. Here, when the measurement setting operation is performed by the user and the start A switch 22 is operated, a preparation operation for the gas leakage inspection operation is started in step S4. That is, a measurement screen is displayed in step S5, and if the warming-up operation (warm-up operation) by the warm-up operation execution means 24 satisfies the set conditions defined for executing the warm-up operation in step S6, Done.

このウォーミングアップ運転は、例えば図4に示されるように行われるものであり、ステップDS1で気体漏れ検査動作の準備動作がスタートすると、ステップDS2で、電源がオンされてから最初の運転(初期運転)かどうかが判断され、初期運転の場合にはステップDS4に進み、初期運転でない場合にはステップDS3で、前回計測終了後からS分(Sは例えば30〜60であり、ここではS分=60分=1時間)経過したかどうかが判断され、経過した場合にはステップDS4に進む。ステップS3で、前回計測終了後からS分経過していないと判断された場合にはステップDS9に進み、ウォーミングアップ済み信号が出力されて、図3のステップS7に進む。   This warm-up operation is performed, for example, as shown in FIG. 4. When the preparation operation for the gas leak inspection operation is started in step DS1, the first operation (initial operation) after the power is turned on in step DS2. In the case of initial operation, the process proceeds to step DS4, and in the case of non-initial operation, in step DS3, S minutes (S is 30 to 60, for example, S minutes = 60 from the end of the previous measurement). It is determined whether or not (minute = 1 hour) has elapsed, and if it has elapsed, the process proceeds to step DS4. If it is determined in step S3 that S minutes have not elapsed since the end of the previous measurement, the process proceeds to step DS9, a warm-up completed signal is output, and the process proceeds to step S7 in FIG.

一方、図4のステップDS4に進んだ場合には、ウォーミングアップ運転実行手段24によるウォーミングアップ運転が順次行われる。つまり、ステップDS4で、加圧気体導入工程(CHG)の動作が例えば約5秒行われ、ステップDS5で、平衡工程(BAL)の動作が例えば約1秒行われ、ステップDS6で、差圧検出工程(DET)の動作が例えば約1秒行われ、ステップDS7で、気体排出工程(EXH)の動作が例えば約1秒行われる。そして、ステップDS8で、これらの全工程が前記設定回数(ここでは3回)終了したかどうかの判断が行われ、3回終了したらステップDS9に進んでから図3のステップS7に進む。   On the other hand, when the process proceeds to step DS4 in FIG. 4, the warm-up operation by the warm-up operation execution means 24 is sequentially performed. That is, in step DS4, the operation of the pressurized gas introduction process (CHG) is performed for about 5 seconds, for example, in step DS5, the operation of the equilibrium process (BAL) is performed for about 1 second, for example, and the differential pressure detection is performed in step DS6. The operation of the process (DET) is performed for about 1 second, for example, and in step DS7, the operation of the gas discharge process (EXH) is performed for about 1 second, for example. Then, in step DS8, it is determined whether or not all of these steps have been completed for the set number of times (here, 3 times), and if completed 3 times, the process proceeds to step DS9 and then proceeds to step S7 in FIG.

図3のステップS7では、必要に応じて、第1のプリプロセス動作(PP1)が行われる。つまり、本実施例では、電源がオンされてから初回の運転時と気体漏れ検査動作終了後に、ウォーミングアップ運転実行手段24からプリプロセス動作実行手段28にウォーミングアップ済み信号が加えられて第1のプリプロセス動作開始信号(PP1信号)が出力されるので、その場合は、前記の如く第1のプリプロセス動作が開始される。   In step S7 of FIG. 3, a first preprocess operation (PP1) is performed as necessary. That is, in this embodiment, the warm-up operation execution means 24 adds a warm-up completed signal to the pre-process operation execution means 28 at the first operation after the power is turned on and after the gas leakage inspection operation is completed, and the first pre-process is performed. Since the operation start signal (PP1 signal) is output, in this case, the first preprocess operation is started as described above.

なお、図6には、第1のプリプロセス動作と第2のプリプロセス動作とを経て気体漏れ検査動作を行う際の一連の動作における各工程別の弁開閉状態が示されている。同図に示されるように、第1のプリプロセス動作時には、導入経路切替弁14と気体導入制御弁11、気体排出制御弁16は閉じられ、気体導入制御弁9,10と気体排出制御弁19は開かれる。   FIG. 6 shows the valve open / closed state for each process in a series of operations when performing the gas leakage inspection operation through the first preprocess operation and the second preprocess operation. As shown in the figure, during the first pre-process operation, the introduction path switching valve 14, the gas introduction control valve 11, and the gas discharge control valve 16 are closed, and the gas introduction control valves 9, 10 and the gas discharge control valve 19 are closed. Will be opened.

そして、第1のプリプロセス動作が終了すると、第1のプリプロセス動作終了が表示部31に表示されるので、図3のステップS8で、利用者によるスタートBスイッチ23の操作が行われてステップS9に進み、ステップS9で、前記の如く第2のプリプロセス動作(PP2)が行われる。なお、ステップS9での第2のプリプロセス動作以降の弁開閉動作もそれぞれ、図6のタイムチャートに示されている。   When the first preprocess operation is completed, the first preprocess operation completion is displayed on the display unit 31, so that the user operates the start B switch 23 in step S8 of FIG. Proceeding to S9, in step S9, the second pre-process operation (PP2) is performed as described above. Note that the valve opening / closing operations after the second preprocess operation in step S9 are also shown in the time chart of FIG.

第2のプリプロセス動作後には、気体漏れ検査実行手段25によって、図3のステップS10〜ステップS16までの各動作が行われる。つまり、ステップS10で、気体漏れ検査装置を安定化するために例えば予め定められる設定待機時間(例えば30秒)経過するまで待ち(DLY)、ステップS11で、被検査体5と基準体7の両方に加圧気体を導入する加圧気体導入工程(CHG)の動作を行い、ステップS12で、被検査体5内の気体の圧力と基準体7内の気体の圧力とを平衡させる平衡工程(BAL)の動作を行う。   After the second preprocess operation, the gas leak test execution means 25 performs each operation from step S10 to step S16 in FIG. That is, in step S10, for example, waiting for a preset waiting time (for example, 30 seconds) to elapse in order to stabilize the gas leakage inspection apparatus (DLY), in step S11, both the inspected object 5 and the reference body 7 An operation of a pressurized gas introduction process (CHG) for introducing a pressurized gas into the gas is performed, and in step S12, an equilibrium process (BAL) for balancing the pressure of the gas in the inspection object 5 and the pressure of the gas in the reference body 7 is performed. ).

その後、ステップS13で、気体漏れ検査実行手段25が弁制御手段29に通路連通制御弁32の制御開始信号を加え、弁制御手段29は、この制御開始信号を受けて、通路連通制御弁32(BV)を閉じる方向に動作させる。そうすると、図6のタイムチャートのボールバルブ駆動の蘭に示されるように、電動ボールバルブにより形成された通路連通制御弁32は徐々に閉じていき、基準体7と被検査体5とが非連通状態となって(切り離した状態となって)密閉される状態となるので、例えば図5のステップBS1に示されるように、通路連通制御弁32が完全に閉じてから、予め定められる設定時間経過後(例えば図5のステップBS2で3秒経過したことが確認された後)に、気体漏れ検出部26に信号を加える。   Thereafter, in step S13, the gas leakage inspection execution means 25 adds a control start signal for the passage communication control valve 32 to the valve control means 29, and the valve control means 29 receives this control start signal and receives the passage communication control valve 32 ( BV) is operated in the closing direction. Then, as shown in the ball valve drive orchid in the time chart of FIG. 6, the passage communication control valve 32 formed by the electric ball valve gradually closes, and the reference body 7 and the object to be inspected 5 are not in communication. Since it becomes a state (becomes a separated state) and becomes a sealed state, for example, as shown in step BS1 of FIG. 5, a predetermined set time elapses after the passage communication control valve 32 is completely closed. After (for example, after confirming that 3 seconds have passed in step BS2 of FIG. 5), a signal is added to the gas leak detection unit 26.

気体漏れ検出部26は、差圧検出部12により検出される差圧に基づいて気体漏れの有無を検出し(図3のステップS14、図5のステップBS3、差圧検出工程(DET)の動作、参照)、検出結果を表示部31に表示したり、検出結果を気体漏れ検査装置1に信号接続されているパソコンのデータ格納部に格納してデータ処理等の適宜の操作に利用したり、記録用紙に記録したりするといった適宜の動作を行い、検出済み信号を、気体漏れ検査実行手段25を介して弁制御手段29に加える。   The gas leakage detection unit 26 detects the presence or absence of gas leakage based on the differential pressure detected by the differential pressure detection unit 12 (step S14 in FIG. 3, step BS3 in FIG. 5, operation of the differential pressure detection step (DET)). ), The detection result is displayed on the display unit 31, the detection result is stored in a data storage unit of a personal computer signal-connected to the gas leakage inspection apparatus 1, and used for appropriate operations such as data processing, An appropriate operation such as recording on a recording sheet is performed, and the detected signal is applied to the valve control unit 29 via the gas leakage inspection execution unit 25.

弁制御手段29は、この検出済み信号を受けて通路連通制御弁32を開く方向に動作させ、徐々に開かせる(図5のステップBS4、図6のタイムチャートのボールバルブ駆動の蘭、図3のステップS15を参照)。以上のように、通路連通制御弁32は、差圧検出部12による差圧検出時には閉じて該差圧検出時以外には開いた状態される。   Upon receipt of this detected signal, the valve control means 29 operates in a direction to open the passage communication control valve 32 and gradually opens it (step BS4 in FIG. 5 and ball valve drive in the time chart in FIG. 6, FIG. 3). (See step S15). As described above, the passage communication control valve 32 is closed when the differential pressure is detected by the differential pressure detector 12 and is opened when the differential pressure is not detected.

そして、通路連通制御弁32が開かれてから予め定められる設定時間経過後(例えば図5のステップBS5で3秒経過したことが確認された後)に、図3のステップS16で、気体漏れ検査実行手段25が気体排出工程(EXH)の動作を実行する。   Then, after a predetermined set time has elapsed since the passage communication control valve 32 was opened (for example, after confirming that 3 seconds have elapsed in step BS5 in FIG. 5), in step S16 in FIG. The execution means 25 executes the operation of the gas discharge process (EXH).

また、気体排出工程の動作後には、図3のステップS5に戻り、計測画面の表示が行われて、次回の気体漏れ検査動作が行われることになるが、気体漏れ検査動作がほぼ連続して行われる場合には、ステップS6のウォーミングアップ運転は行われずにステップS7に進むことになる。そこで、気体漏れ検査を2回目以降行うときには、前回の気体漏れ検査動作の気体排出動作終了時から利用者による被検査体5の付け替え作業時に第1のプリプロセス動作を行うようにすることで、気体漏れ検査の準備から実際の測定動作までの時間の流れを有効に利用することができ、全体の計測時間を短縮できるので好ましい。   In addition, after the operation of the gas discharge process, the process returns to step S5 in FIG. 3 to display the measurement screen and the next gas leak inspection operation is performed. If so, the warm-up operation in step S6 is not performed, and the process proceeds to step S7. Therefore, when performing the gas leak inspection for the second time and thereafter, by performing the first pre-process operation at the time of replacement work of the inspection object 5 by the user from the end of the gas discharge operation of the previous gas leak inspection operation, This is preferable because the flow of time from the preparation for the gas leak inspection to the actual measurement operation can be used effectively, and the overall measurement time can be shortened.

本実施例の気体漏れ検査装置1を用いて、熱交換器や貯湯タンクの気体漏れ検査を行ったところ、気体漏れ判定の結果がほぼ100%適切な値となることが確認されている。   When the gas leak test of the heat exchanger and the hot water storage tank is performed using the gas leak test apparatus 1 of the present embodiment, it is confirmed that the result of the gas leak determination is almost 100%.

なお、本実施例においては、配置される基準体7は、その容積が、配置される被検査体5の容積よりも小さいものとされるので、気体漏れ検出部26は、基準体7の容積と被検査体5の容積との差に応じて生じる被検査体5内の気体の圧力と基準体7内の気体の圧力との差圧分(ドリフト分)を、差圧検出部12による検出差圧値から差し引いた値に基づいて、被検査体5からの気体漏れを検出する。   In the present embodiment, since the volume of the reference body 7 to be arranged is smaller than the volume of the object 5 to be inspected, the gas leak detection unit 26 has a volume of the reference body 7. The differential pressure detector 12 detects a differential pressure (drift) between the pressure of the gas in the test object 5 and the pressure of the gas in the reference body 7 generated according to the difference between the volume of the test object 5 and the test object 5. Based on the value subtracted from the differential pressure value, gas leakage from the object 5 is detected.

つまり、本実施例の気体漏れ検査装置1を用いての気体漏れ検査は、配設される被検査体5に対し、配設される基準体7の容積が格段に小さくなるようにして被検査体5の気体漏れ検査動作が行われるようにすることを好ましい態様としており、このような場合には、基準体7の容積が小さいので、加圧気体の圧力が基準体7の気体導出側に強くかかっても、基準体7の容積が大きい場合に比べると、気体の温度は少しずつしか上昇しないといった利点があるが、その反面、配設される被検査体5と、配設される基準体7の容積とが異なると、その容積の違いにより、被検査体5側と基準体7側との差圧の検出に影響がある。   That is, the gas leak inspection using the gas leak inspection apparatus 1 of the present embodiment is performed by making the volume of the reference body 7 to be disposed significantly smaller than the object 5 to be inspected. It is preferable that the gas leakage inspection operation of the body 5 is performed. In such a case, since the volume of the reference body 7 is small, the pressure of the pressurized gas is on the gas outlet side of the reference body 7. Even if it is strongly applied, compared with the case where the volume of the reference body 7 is large, there is an advantage that the temperature of the gas only rises little by little. On the other hand, the inspection object 5 to be disposed and the reference to be disposed are provided. If the volume of the body 7 is different, the difference in volume affects the detection of the differential pressure between the inspected object 5 side and the reference body 7 side.

そこで、例えば、予め実験等によって、気体漏れがあることが始めから分かっている被検査体5を用いる等して、被検査体5に漏れが生じている場合には被検査体5と基準体7との差圧がどのように検出されるかといったデータを基準体7の容積と被検査体5の容積に対応させて様々に求め、それらの相関関係をとっておき、その相関関係データと被検査体5および基準体7の容積のデータとに基づいて差圧検出のプログラムを変える等して被検査体5側と基準体7側との差圧を検出し、気体漏れ検査動作を行うようにする。   Therefore, for example, when the inspected object 5 is leaked by using an inspected object 5 that has been known from the beginning by an experiment or the like, the inspected object 5 and the reference object are used. The data such as how the differential pressure with respect to 7 is detected is variously determined in correspondence with the volume of the reference body 7 and the volume of the object 5 to be inspected, the correlation between them is taken, the correlation data and the object to be inspected The differential pressure detection program is changed based on the volume data of the body 5 and the reference body 7 to detect the differential pressure between the inspected object 5 side and the reference body 7 side, and the gas leakage inspection operation is performed. To do.

例えば、気体漏れ検出部26は、例えば基準体7の容積と被検査体5の容積との差に応じて生じる被検査体5内の気体の圧力と基準体7内の気体の圧力との差圧分を差圧検出部による検出差圧値から差し引いた値に基づいて被検査体5からの気体漏れを検出することができる。   For example, the gas leak detection unit 26 may be configured such that, for example, the difference between the gas pressure in the inspection object 5 and the gas pressure in the reference body 7 generated according to the difference between the volume of the reference body 7 and the volume of the inspection object 5. Based on the value obtained by subtracting the pressure component from the differential pressure value detected by the differential pressure detector, it is possible to detect gas leakage from the object 5 to be inspected.

なお、図7には、実施例において検出される差圧検出時(DET)およびその前後の差圧値のイメージ図が示されており、同図に示されるように、差圧検出時までは差圧検出部(差圧検出計)12の両端を同一圧力にすることができて差圧を0とすることができる。そして、特性線aのような結果が得られた場合には、差圧が判定閾値を超えているので気体漏れがあると判断され、特性線bの場合には、差圧が判定閾値未満であるので気体漏れはないと判断される。差圧検出後に通路連通制御弁32が開かれると差圧検出部(差圧検出計)12の両端を同一圧力になり、差圧が0となる。   FIG. 7 shows an image diagram of the differential pressure detection (DET) detected in the embodiment and the differential pressure values before and after the differential pressure detection. As shown in FIG. Both ends of the pressure detector (differential pressure detector) 12 can be made the same pressure, and the differential pressure can be zero. When a result such as the characteristic line a is obtained, it is determined that there is a gas leak because the differential pressure exceeds the determination threshold. In the case of the characteristic line b, the differential pressure is less than the determination threshold. Because there is, it is judged that there is no gas leakage. When the passage communication control valve 32 is opened after the differential pressure is detected, both ends of the differential pressure detector (differential pressure detector) 12 become the same pressure, and the differential pressure becomes zero.

なお、本発明は、前記実施例に限定されるものでなく、本発明の技術的範囲を逸脱しない範囲において様々な態様を採り得る。例えば、図8に示されるように、前記実施例において小容器の基準体7を設ける代わりに、基準体側導入通路8に設けられた手動開閉弁37と通路連通制御弁32との間の通路(図の破線枠M内の通路部分)を基準体として機能するようにしてもよい。このようにする場合も、前記実施例と同様の効果を奏することができる。   In addition, this invention is not limited to the said Example, A various aspect can be taken in the range which does not deviate from the technical scope of this invention. For example, as shown in FIG. 8, instead of providing the small container reference body 7 in the above-described embodiment, a passage between the manual open / close valve 37 and the passage communication control valve 32 provided in the reference body side introduction passage 8 ( You may make it function the channel | path part in the broken-line frame M of a figure as a reference | standard body. In this case, the same effect as in the above embodiment can be obtained.

また、前記実施例では、通路連通制御弁32として電動ボールバルブを用いたが、通路連通制御弁32は電動ボールバルブに限定されるものではなく適宜設定されるものである。なお、通路連通制御弁32は、開閉動作が緩慢で該開閉動作時に圧力変動が生じない又は殆ど生じない弁であることが望ましく、このような弁として、電動ボールバルブの代わりにモータスライドバルブ等を適用することもできる。   Moreover, in the said Example, although the electric ball valve was used as the channel | path communication control valve 32, the channel | path communication control valve 32 is not limited to an electric ball valve, It sets suitably. The passage communication control valve 32 is desirably a valve that has a slow opening / closing operation and that causes little or no pressure fluctuation during the opening / closing operation. As such a valve, a motor slide valve or the like can be used instead of an electric ball valve. Can also be applied.

さらに、前記実施例では、プリプロセス開始操作手段は、第1のプリプロセス開始操作手段と第2のプリプロセス開始操作手段を個別に備える態様としたが、第1と第2のプリプロセス動作の開始のためのプリプロセス開始操作手段は一つの操作手段としてもよい。   Further, in the above-described embodiment, the preprocess start operation means is provided with the first preprocess start operation means and the second preprocess start operation means individually. The preprocess start operation means for starting may be a single operation means.

この場合、例えば図2の破線に示されるように、プリプロセス動作実行手段28によって第1のプリプロセス動作のみを行うか第2のプリプロセス動作のみを行うか第1と第2の両方のプリプロセス動作を行うかを選択するための動作選択操作部27を設け、動作選択操作部40により選択操作された動作を、プリプロセス開始操作手段の操作が行われたときにプリプロセス動作実行手段28により実行するようにしてもよい。また、この場合は、例えば前記実施例におけるスタートBスイッチ23は省略し、一つのスイッチが操作された後に、第1と第2のプリプロセス動作を自動的に適宜行うようにしてもよい。   In this case, for example, as indicated by a broken line in FIG. 2, whether the preprocess operation execution means 28 performs only the first preprocess operation or only the second preprocess operation, both the first and second preprocess operations are performed. An operation selection operation unit 27 for selecting whether or not to perform a process operation is provided, and the operation selected by the operation selection operation unit 40 is preprocess operation execution unit 28 when the preprocess start operation unit is operated. You may make it perform by. In this case, for example, the start B switch 23 in the above embodiment may be omitted, and the first and second preprocess operations may be automatically performed appropriately after one switch is operated.

また、図2の破線に示されるように、配設される基準体の容積と、配設される被検査体の容積を検出する容積検出手段41と、容積検出手段41が検出した結果に基づいてプリプロセス動作実行手段28によるプリプロセス動作を決定する実行動作判断手段42とを設けてもよい。なお、これらの容積検出手段41と実行動作判断手段42は制御装置21内に設けてもよいし、制御装置21とは別に設けて制御装置21と信号接続されるようにしてもよい。   Further, as shown by a broken line in FIG. 2, based on the volume of the reference body to be arranged, the volume detection means 41 for detecting the volume of the object to be inspected, and the result detected by the volume detection means 41. An execution operation determination unit 42 that determines the preprocess operation by the preprocess operation execution unit 28 may be provided. The volume detection means 41 and the execution operation determination means 42 may be provided in the control device 21 or may be provided separately from the control device 21 and connected to the control device 21 in a signal manner.

このようにする場合、容積検出手段41が検出した結果を実行動作判断手段42に加え、実行動作判断手段42が、容積検出手段41によって検出される前記基準体の容積と前記被検査体の容積と予め定められるプリプロセス動作実行基準情報とに基づき、プリプロセス動作実行手段28により行うプリプロセス動作を第1のプリプロセス動作のみとするか第2のプリプロセス動作のみとするか第1と第2の両方のプリプロセス動作とするかを判断するようにする。   In this case, the result detected by the volume detection unit 41 is added to the execution operation determination unit 42, and the execution operation determination unit 42 detects the volume of the reference body and the volume of the inspection object detected by the volume detection unit 41. Whether the preprocess operation performed by the preprocess operation execution means 28 is only the first preprocess operation or only the second preprocess operation based on the predetermined preprocess operation execution reference information. It is determined whether or not both of the two preprocessing operations are to be performed.

そして、実行動作判断手段42による判断結果をプリプロセス動作実行手段28に加え、例えば被検査体5の容積が大きいときには第1のプリプロセス動作と第2のプリプロセス動作の両方を行い、被検査体5の容積が小さいときには第1のプリプロセス動作のみを行うようにする等、プリプロセス動作実行手段28が行うプリプロセス動作を決定してプリプロセス動作実行手段28により実行する構成としてもよい。この場合も、例えば前記実施例におけるスタートBスイッチ23は省略し、一つのスイッチが操作された後に、第1と第2のプリプロセス動作を自動的に適宜行うようにしてもよい。   Then, the determination result by the execution operation determination unit 42 is added to the preprocess operation execution unit 28. For example, when the volume of the inspection object 5 is large, both the first preprocess operation and the second preprocess operation are performed. For example, when the volume of the body 5 is small, only the first preprocess operation may be performed, and the preprocess operation performed by the preprocess operation execution unit 28 may be determined and executed by the preprocess operation execution unit 28. Also in this case, for example, the start B switch 23 in the above embodiment may be omitted, and the first and second preprocessing operations may be automatically performed as appropriate after one switch is operated.

さらに、前記実施例で設けたウォーミングアップ運転実行手段24やプリプロセス実行手段28および、これらに関連する制御構成は省略することもできる。   Furthermore, the warming-up operation execution means 24 and the preprocess execution means 28 provided in the embodiment can be omitted, and the control configuration related thereto.

本発明は、気体圧縮に伴う熱の影響を受け難く、被検査体の気体漏れ検査を正確に行うことができる気体漏れ検査装置であるので、熱交換器や貯湯タンク等の気体漏れを検査する装置として利用できる。   Since the present invention is a gas leak inspection apparatus that is not easily affected by heat due to gas compression and can accurately perform a gas leak inspection of an object to be inspected, it inspects for gas leaks such as heat exchangers and hot water storage tanks. Can be used as a device.

1 気体漏れ検査装置
2 加圧気体の導入口
3 加圧気体の導入用通路
4 分岐部
5 被検査体
6 被検査体側導入通路
7 基準体
8 基準体側導入通路
9,10,11 気体導入制御弁
12 差圧検出部
13 試験圧設定手段
14 導入経路切替弁
17 バイパス通路
18,18a,18b 気体排出通路
19 19a,19b 気体排出制御弁
21 制御装置
22 スタートAスイッチ
23 スタートBスイッチ
24 ウォーミングアップ運転実行手段
25 気体漏れ検査実行手段
26 気体漏れ検出部
27 圧力調整手段
28 プリプロセス動作実行手段
29 弁制御手段
32 通路連通制御弁
34 出口
35 低圧ガバナ
DESCRIPTION OF SYMBOLS 1 Gas leak test | inspection apparatus 2 Introduction port of pressurized gas 3 Passage for introduction of pressurized gas 4 Branch part 5 Inspected object 6 Inspected object side introducing passage 7 Reference body 8 Reference object side introducing passage 9, 10, 11 Gas introduction control valve 12 differential pressure detector 13 test pressure setting means 14 introduction path switching valve 17 bypass path 18, 18a, 18b gas discharge path 19 19a, 19b gas discharge control valve 21 control device 22 start A switch 23 start B switch 24 warming-up operation execution means 25 Gas leak inspection execution means 26 Gas leak detection unit 27 Pressure adjustment means 28 Pre-process operation execution means 29 Valve control means 32 Passage communication control valve 34 Outlet 35 Low pressure governor

Claims (5)

中空部を有する被検査体の気体漏れ検査を行う気体漏れ検査装置であって、加圧気体の導入口と、該加圧気体の導入口から導入される加圧気体を分岐する分岐部と、該分岐部により分岐された加圧気体を検査用に配設される被検査体側に導く被検査体側導入通路と、前記分岐部により分岐された加圧気体を前記被検査体の気体漏れ検査の基準となる基準体側に導く基準体側導入通路とを有し、該基準体側導入通路と前記被検査体側導入通路にはそれぞれ気体導入制御弁が設けられ、該それぞれの気体導入制御弁よりも気体通過の下流側位置において前記基準体側導入通路と前記被検査体側導入通路とをバイパスするバイパス通路が設けられて、該バイパス通路には前記被検査体内の気体の圧力と前記基準体内の気体の圧力との差圧を検出する差圧検出部が設けられ、前記基準体側から加圧気体を排出する基準体側排出通路の加圧気体の出口側が通路連通制御弁を介し前記被検査体側導入通路の位置であって該被検査体側導入通路側の気体導入制御弁よりも気体通過の下流側位置に接続され、前記バイパス通路接続位置よりも気体通過の下流側位置に接続され、前記被検査体側には加圧気体を該被検査体側から外部へ排出するための被検査体側排出通路が接続されていて該被検査体側排出通路を通して加圧気体を外部へ排出する手段が設けられ、前記被検査体と前記基準体の両方に加圧気体を導入した後に前記基準体側導入通路と前記被検査体側導入通路の各気体導入制御弁と前記通路連通制御弁を閉じて前記差圧検出部により前記差圧を検出し、該検出差圧に基づいて前記被検査体からの気体漏れを検出する気体漏れ検出部を有することを特徴とする気体漏れ検出装置。 A gas leakage inspection apparatus for performing a gas leakage inspection of an object to be inspected having a hollow portion, an inlet for pressurized gas, a branching portion for branching the pressurized gas introduced from the inlet for the pressurized gas, An inspection object side introduction passage for guiding the pressurized gas branched by the branching section to the inspection object side disposed for inspection, and the pressurized gas branched by the branching section for gas leakage inspection of the inspection object A reference body side introduction passage that leads to a reference body side serving as a reference, and a gas introduction control valve is provided in each of the reference body side introduction passage and the inspected object side introduction passage. A bypass passage that bypasses the reference body side introduction passage and the inspected object side introduction passage at a downstream position of the gas, and the bypass passage includes a gas pressure in the inspected body and a gas pressure in the reference body. Detect differential pressure Provided pressure detection unit, the outlet side of the pressurized gas said through passage communicating the control valve at a position of the inspection side introduction passage obtaining step side introduction of the reference-side discharge passage for discharging the pressurized gas from the reference side Connected to the downstream side position of the gas passage than the gas introduction control valve on the passage side , connected to the downstream side position of the gas passage than the bypass passage connection position, and pressurized gas is supplied to the inspected object side An inspection object side discharge passage for discharging from the inspection object to the outside is connected, and means for discharging the pressurized gas to the outside through the inspection object side discharge passage is provided, and both the inspection object and the reference body are pressurized. After introducing the gas, the gas introduction control valve and the passage communication control valve of the reference body side introduction passage and the inspected body side introduction passage are closed, and the differential pressure is detected by the differential pressure detection unit. Based on the object to be inspected Gas leakage detection system characterized in that it comprises a gas leak detector for detecting a gas leakage al. 通路連通制御弁を差圧検出部による差圧検出時には閉じて該差圧検出時以外には開いた状態とする弁制御手段を有することを特徴とする請求項1記載の気体漏れ検出装置。   2. The gas leakage detection device according to claim 1, further comprising valve control means for closing the passage communication control valve when the differential pressure is detected by the differential pressure detection unit and opening the passage communication control valve except when the differential pressure is detected. 通路連通制御弁は開閉動作が緩慢で該開閉動作時に圧力変動が生じない又は殆ど生じない弁により形成されていることを特徴とする請求項1または請求項2記載の気体漏れ検出装置。   3. The gas leakage detection device according to claim 1, wherein the passage communication control valve is formed by a valve that slowly opens and closes and causes no or almost no pressure fluctuation during the opening and closing operation. 基準体の容積は被検査体の容積よりも小さく形成され、気体漏れ検出部は前記基準体の容積と前記被検査体の容積との差に応じて生じる該被検査体内の気体の圧力と前記基準体内の気体の圧力との差圧分を差圧検出部による検出差圧値から差し引いた値に基づいて前記被検査体からの気体漏れを検出することを特徴とする請求項1または請求項2または請求項3記載の気体漏れ検出装置。   The volume of the reference body is formed to be smaller than the volume of the object to be inspected, and the gas leak detector is configured to generate a gas pressure in the body to be inspected according to a difference between the volume of the reference body and the volume of the object to be inspected. The gas leakage from the object to be inspected is detected based on a value obtained by subtracting a differential pressure from the pressure of the gas in the reference body from a differential pressure value detected by the differential pressure detector. The gas leak detection device according to claim 2 or claim 3. 基準体側導入通路のバイパス通路接続位置より下流側から通路連通制御弁に至る通路又はその一部が基準体として機能するものとしたことを特徴とする請求項1乃至請求項4のいずれか一つに記載の気体漏れ検査装置。   5. The passage from the downstream side of the bypass passage connection position of the reference body side introduction passage to the passage communication control valve or a part thereof functions as a reference body. The gas leak test apparatus described in 1.
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