JP6454954B2 - 組成物、これを用いた反射防止層およびその形成方法、ならびにそれを有するガラスおよび太陽電池モジュール - Google Patents
組成物、これを用いた反射防止層およびその形成方法、ならびにそれを有するガラスおよび太陽電池モジュール Download PDFInfo
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- JP6454954B2 JP6454954B2 JP2013148612A JP2013148612A JP6454954B2 JP 6454954 B2 JP6454954 B2 JP 6454954B2 JP 2013148612 A JP2013148612 A JP 2013148612A JP 2013148612 A JP2013148612 A JP 2013148612A JP 6454954 B2 JP6454954 B2 JP 6454954B2
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- 239000000203 mixture Substances 0.000 title claims description 76
- 239000011521 glass Substances 0.000 title claims description 53
- 238000000034 method Methods 0.000 title claims description 37
- -1 silane compound Chemical class 0.000 claims description 65
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 42
- 229910052782 aluminium Inorganic materials 0.000 claims description 33
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 33
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000002904 solvent Substances 0.000 claims description 22
- 229910000077 silane Inorganic materials 0.000 claims description 21
- 239000013522 chelant Substances 0.000 claims description 20
- 238000006460 hydrolysis reaction Methods 0.000 claims description 17
- 239000007787 solid Substances 0.000 claims description 17
- 239000011164 primary particle Substances 0.000 claims description 16
- 125000004432 carbon atom Chemical group C* 0.000 claims description 15
- 125000000217 alkyl group Chemical group 0.000 claims description 13
- 125000003118 aryl group Chemical group 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000002245 particle Substances 0.000 claims description 10
- 230000007062 hydrolysis Effects 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
- 239000006059 cover glass Substances 0.000 claims description 8
- 238000005496 tempering Methods 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 125000003545 alkoxy group Chemical group 0.000 claims description 7
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- 125000002252 acyl group Chemical group 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims 1
- 238000000576 coating method Methods 0.000 description 28
- 239000000758 substrate Substances 0.000 description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 24
- 239000011248 coating agent Substances 0.000 description 22
- 229910052751 metal Inorganic materials 0.000 description 22
- 239000002184 metal Substances 0.000 description 22
- 238000002834 transmittance Methods 0.000 description 22
- 125000005595 acetylacetonate group Chemical group 0.000 description 20
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 16
- 239000010410 layer Substances 0.000 description 16
- 238000001723 curing Methods 0.000 description 15
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 14
- 239000000243 solution Substances 0.000 description 14
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 13
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 12
- 239000002253 acid Substances 0.000 description 12
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 12
- 238000005259 measurement Methods 0.000 description 12
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 10
- 239000007983 Tris buffer Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- 238000011156 evaluation Methods 0.000 description 10
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 10
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 9
- 239000006087 Silane Coupling Agent Substances 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 9
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 9
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 9
- 239000005341 toughened glass Substances 0.000 description 9
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 8
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical class OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 8
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 239000004094 surface-active agent Substances 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- 150000008065 acid anhydrides Chemical group 0.000 description 7
- 239000003377 acid catalyst Substances 0.000 description 7
- 239000008199 coating composition Substances 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 7
- 239000011259 mixed solution Substances 0.000 description 7
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 7
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 150000004756 silanes Chemical class 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 230000006872 improvement Effects 0.000 description 6
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 6
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 6
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 6
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 6
- 125000000962 organic group Chemical group 0.000 description 6
- 229920001296 polysiloxane Polymers 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- ZADOWCXTUZWAKL-UHFFFAOYSA-N 3-(3-trimethoxysilylpropyl)oxolane-2,5-dione Chemical compound CO[Si](OC)(OC)CCCC1CC(=O)OC1=O ZADOWCXTUZWAKL-UHFFFAOYSA-N 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 5
- MQPPCKJJFDNPHJ-UHFFFAOYSA-K aluminum;3-oxohexanoate Chemical compound [Al+3].CCCC(=O)CC([O-])=O.CCCC(=O)CC([O-])=O.CCCC(=O)CC([O-])=O MQPPCKJJFDNPHJ-UHFFFAOYSA-K 0.000 description 5
- 238000009835 boiling Methods 0.000 description 5
- XYIBRDXRRQCHLP-UHFFFAOYSA-N ethyl acetoacetate Chemical compound CCOC(=O)CC(C)=O XYIBRDXRRQCHLP-UHFFFAOYSA-N 0.000 description 5
- 229940093858 ethyl acetoacetate Drugs 0.000 description 5
- 230000035699 permeability Effects 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 5
- GQCZPFJGIXHZMB-UHFFFAOYSA-N 1-tert-Butoxy-2-propanol Chemical compound CC(O)COC(C)(C)C GQCZPFJGIXHZMB-UHFFFAOYSA-N 0.000 description 4
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 4
- PTTPXKJBFFKCEK-UHFFFAOYSA-N 2-Methyl-4-heptanone Chemical compound CC(C)CC(=O)CC(C)C PTTPXKJBFFKCEK-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 4
- WFDIJRYMOXRFFG-UHFFFAOYSA-N Acetic anhydride Chemical compound CC(=O)OC(C)=O WFDIJRYMOXRFFG-UHFFFAOYSA-N 0.000 description 4
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 4
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 4
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 4
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 description 4
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 4
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical class OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 4
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- 239000002585 base Substances 0.000 description 4
- 239000011247 coating layer Substances 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 4
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N ethyl benzoate Chemical compound CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 4
- MNWFXJYAOYHMED-UHFFFAOYSA-N hexane carboxylic acid Natural products CCCCCCC(O)=O MNWFXJYAOYHMED-UHFFFAOYSA-N 0.000 description 4
- 150000002430 hydrocarbons Chemical group 0.000 description 4
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 4
- JMMWKPVZQRWMSS-UHFFFAOYSA-N isopropanol acetate Natural products CC(C)OC(C)=O JMMWKPVZQRWMSS-UHFFFAOYSA-N 0.000 description 4
- 229940011051 isopropyl acetate Drugs 0.000 description 4
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- GWYFCOCPABKNJV-UHFFFAOYSA-N isovaleric acid Chemical compound CC(C)CC(O)=O GWYFCOCPABKNJV-UHFFFAOYSA-N 0.000 description 4
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 4
- 150000007522 mineralic acids Chemical class 0.000 description 4
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 description 4
- 239000003566 sealing material Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 4
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 4
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 3
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 3
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 3
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 3
- WWZKQHOCKIZLMA-UHFFFAOYSA-N Caprylic acid Natural products CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 3
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 3
- 235000011054 acetic acid Nutrition 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 125000003342 alkenyl group Chemical group 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 3
- 150000001735 carboxylic acids Chemical class 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 235000015165 citric acid Nutrition 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000006482 condensation reaction Methods 0.000 description 3
- 238000004132 cross linking Methods 0.000 description 3
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 235000019253 formic acid Nutrition 0.000 description 3
- VANNPISTIUFMLH-UHFFFAOYSA-N glutaric anhydride Chemical compound O=C1CCCC(=O)O1 VANNPISTIUFMLH-UHFFFAOYSA-N 0.000 description 3
- 239000005346 heat strengthened glass Substances 0.000 description 3
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 3
- 230000003301 hydrolyzing effect Effects 0.000 description 3
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 3
- 239000003446 ligand Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 3
- 125000003506 n-propoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 235000006408 oxalic acid Nutrition 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229940014800 succinic anhydride Drugs 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 2
- ZGKWWOVOEOZQPP-UHFFFAOYSA-N (3-ethyloxetan-3-yl)methoxymethoxy-dimethoxy-propylsilane Chemical compound C(C)C1(COC1)COCO[Si](OC)(OC)CCC ZGKWWOVOEOZQPP-UHFFFAOYSA-N 0.000 description 2
- RYNQKSJRFHJZTK-UHFFFAOYSA-N (3-methoxy-3-methylbutyl) acetate Chemical compound COC(C)(C)CCOC(C)=O RYNQKSJRFHJZTK-UHFFFAOYSA-N 0.000 description 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 2
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- GDXHBFHOEYVPED-UHFFFAOYSA-N 1-(2-butoxyethoxy)butane Chemical compound CCCCOCCOCCCC GDXHBFHOEYVPED-UHFFFAOYSA-N 0.000 description 2
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 2
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 2
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- 235000021313 oleic acid Nutrition 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 125000001820 oxy group Chemical group [*:1]O[*:2] 0.000 description 1
- 125000005429 oxyalkyl group Chemical group 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 125000004115 pentoxy group Chemical group [*]OC([H])([H])C([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- QMYDVDBERNLWKB-UHFFFAOYSA-N propane-1,2-diol;hydrate Chemical compound O.CC(O)CO QMYDVDBERNLWKB-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229940107700 pyruvic acid Drugs 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 150000003254 radicals Chemical class 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000005920 sec-butoxy group Chemical group 0.000 description 1
- 125000005372 silanol group Chemical group 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- PNGLEYLFMHGIQO-UHFFFAOYSA-M sodium;3-(n-ethyl-3-methoxyanilino)-2-hydroxypropane-1-sulfonate;dihydrate Chemical class O.O.[Na+].[O-]S(=O)(=O)CC(O)CN(CC)C1=CC=CC(OC)=C1 PNGLEYLFMHGIQO-UHFFFAOYSA-M 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 229960004274 stearic acid Drugs 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000001384 succinic acid Substances 0.000 description 1
- 235000011044 succinic acid Nutrition 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 125000006318 tert-butyl amino group Chemical group [H]N(*)C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ADLSSRLDGACTEX-UHFFFAOYSA-N tetraphenyl silicate Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 ADLSSRLDGACTEX-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- YZVRVDPMGYFCGL-UHFFFAOYSA-N triacetyloxysilyl acetate Chemical compound CC(=O)O[Si](OC(C)=O)(OC(C)=O)OC(C)=O YZVRVDPMGYFCGL-UHFFFAOYSA-N 0.000 description 1
- GIHPVQDFBJMUAO-UHFFFAOYSA-N tributoxy(ethyl)silane Chemical compound CCCCO[Si](CC)(OCCCC)OCCCC GIHPVQDFBJMUAO-UHFFFAOYSA-N 0.000 description 1
- GYZQBXUDWTVJDF-UHFFFAOYSA-N tributoxy(methyl)silane Chemical compound CCCCO[Si](C)(OCCCC)OCCCC GYZQBXUDWTVJDF-UHFFFAOYSA-N 0.000 description 1
- ZQJYXISBATZORI-UHFFFAOYSA-N tributyl(ethoxy)silane Chemical compound CCCC[Si](CCCC)(CCCC)OCC ZQJYXISBATZORI-UHFFFAOYSA-N 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- WUMSTCDLAYQDNO-UHFFFAOYSA-N triethoxy(hexyl)silane Chemical compound CCCCCC[Si](OCC)(OCC)OCC WUMSTCDLAYQDNO-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- JCVQKRGIASEUKR-UHFFFAOYSA-N triethoxy(phenyl)silane Chemical compound CCO[Si](OCC)(OCC)C1=CC=CC=C1 JCVQKRGIASEUKR-UHFFFAOYSA-N 0.000 description 1
- NBXZNTLFQLUFES-UHFFFAOYSA-N triethoxy(propyl)silane Chemical compound CCC[Si](OCC)(OCC)OCC NBXZNTLFQLUFES-UHFFFAOYSA-N 0.000 description 1
- BOVWGKNFLVZRDU-UHFFFAOYSA-N triethoxy(trifluoromethyl)silane Chemical compound CCO[Si](OCC)(OCC)C(F)(F)F BOVWGKNFLVZRDU-UHFFFAOYSA-N 0.000 description 1
- UDUKMRHNZZLJRB-UHFFFAOYSA-N triethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OCC)(OCC)OCC)CCC2OC21 UDUKMRHNZZLJRB-UHFFFAOYSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- JLGNHOJUQFHYEZ-UHFFFAOYSA-N trimethoxy(3,3,3-trifluoropropyl)silane Chemical compound CO[Si](OC)(OC)CCC(F)(F)F JLGNHOJUQFHYEZ-UHFFFAOYSA-N 0.000 description 1
- HQYALQRYBUJWDH-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical compound CCC[Si](OC)(OC)OC HQYALQRYBUJWDH-UHFFFAOYSA-N 0.000 description 1
- QLNOVKKVHFRGMA-UHFFFAOYSA-N trimethoxy(propyl)silane Chemical group [CH2]CC[Si](OC)(OC)OC QLNOVKKVHFRGMA-UHFFFAOYSA-N 0.000 description 1
- ORVBHOQTQDOUIW-UHFFFAOYSA-N trimethoxy(trifluoromethyl)silane Chemical compound CO[Si](OC)(OC)C(F)(F)F ORVBHOQTQDOUIW-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 239000003981 vehicle Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Paints Or Removers (AREA)
- Photovoltaic Devices (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
Description
(a)平均一次粒子径が5〜40nmの鎖状シリカ粒子と、
(b)一般式(1)で表されるアルコキシシランの加水分解縮合物と、
Si(OR2)4 (1)
(式中R2は同じでも異なってもよく、置換もしくは無置換のアルキル基、置換もしくは無置換のアシル基、または置換もしくは無置換のアリール基を表す。)
(c)一般式(2)もしくは(3)で表されるシラン化合物と、
(d)溶媒と、
アルミキレート化合物またはチタンキレート化合物と、
を含有し、(a)平均一次粒子径が5〜40nmの鎖状シリカ粒子を全固形分中50wt%以上含有することを特徴とする組成物である。
(a)平均一次粒子径が5〜40nmの鎖状シリカ粒子と、
(b)一般式(1)で表されるオルガノアルコキシシランの加水分解縮合物と、
(R1)mSi(OR2)4−m (1)
(式中R1は水素、アルキル基、アルケニル基、アリール基またはそれらの置換体を表す。R2は同じでも異なってもよく、アルキル基、アシル基、アリール基またはそれらの置換体を表す。mは0〜3の整数を表す。)
(c)一般式(2)もしくは(3)で表されるシラン化合物と、
(d)溶媒と、
を含有し、(a)平均一次粒子径が5〜40nmの鎖状シリカ粒子を全固形分中50wt%以上含有する。以下、各成分について説明する。
本発明の鎖状シリカ粒子は、複数の一次粒子が他の材質からなる接合部を介することなくシロキサン結合などの化学結合により直接結合し、連続して鎖状になったものをいい、直線状に伸びた形状であっても、2次元的、もしくは3次元的に湾曲した形状であっても構わない。
(b)の成分はコーティング層形成時に粒子間をつなぐマトリックスとしてはたらく。組成物中の(b)成分の含有量としては特に制限はないが、シロキサン比率が高まると耐湿熱性など耐久性は向上するので、全固形分中において50wt%以下の範囲内でできるだけ多めに含まれることが好ましい。全固形分中の含有量としては5wt%以上50wt%以下が好ましく、7wt%以上40wt%以下がさらに好ましい。該範囲であることにより、低屈折率と耐久性を両立することができる。
本発明の組成物が、一般式(2)もしくは(3)で表されるシラン化合物を含有することにより、その組成物から耐湿熱性に優れた反射防止膜を得ることができる。
溶媒としては、特に限定されず、コーティング組成物の安定性、塗れ性、揮発性などを考慮して適宜選択できる。また、溶媒を2種以上組み合わせてもよい。溶媒の具体例としては、メタノール、エタノール、プロパノール、イソプロパノール、ブタノール、イソブタノール、t−ブタノール、1−メトキシ−2−プロパノール、ペンタノール、4−メチル−2−ペンタノール、3−メチル−2−ブタノール、3−メチル−3−メトキシ−1−ブタノール、1−t−ブトキシ−2−プロパノール、ジアセトンアルコールなどのアルコール類;エチレングリコール、プロピレングリコールなどのグリコール類;エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、プロピレングリコールモノメチルエーテル、プロピレングリコールモノエチルエーテル、プロピレングリコールモノプロピルエーテル、プロピレングリコールt−ブチルエーテル、プロピレングリコールn−ブチルエーテルエチレングリコールジメチルエーテル、エチレングリコールジエチルエーテル、エチレングリコールジブチルエーテル、ジエチルエーテル、ジエチレングリコールメチルエチルエーテル、ジプロピレングリコール−n−ブチルエーテル、ジプロピレングリコールモノメチルエーテル、ジイソプロピルエーテル、ジn−ブチルエーテル、ジフェニルエーテル、ジエチレングリコールエチルメチルエーテル、ジエチレングリコールジメチルエーテル、エチレングリコールモノブチルエーテルなどのエーテル類;メチルエチルケトン、アセチルアセトン、メチルプロピルケトン、メチルブチルケトン、メチルイソブチルケトン、ジイソブチルケトン、シクロペンタノン、2−ヘプタノン、ジイソブチルケトン、シクロヘキサノン、シクロヘプタノンなどのケトン類;ジメチルホルムアミド、ジメチルアセトアミドなどのアミド類;酢酸イソプロピル、、エチルアセテート、プロピルアセテート、ブチルアセテート、n−プロピルアセテート、イソプロピルアセテート、n−ブチルアセテート、イソブチルアセテート、アセト酢酸エチル、エチレングリコールモノメチルエーテルアセテート、エチレングリコールモノエチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、3−メトキシブチルアセテート、3−メチル−3−メトキシブチルアセテート、ブチルジグリコールアセテート、1,3−ブチレングリコールジアセテート、エチルジグリコールアセテート、ジプロピレングリコールメチルエーテルアセテート、乳酸メチル、乳酸エチル、乳酸ブチル、トリアセチルグリセリンなどのアセテート類;トルエン、キシレン、ヘキサン、シクロヘキサン、安息香酸エチル、ナフタレン、1,2,3,4−テトラヒドロナフタレンなどの芳香族あるいは脂肪族炭化水素、γ−ブチロラクトン、N−メチル−2−ピロリドン、N、N−ジメチルイミダゾリジノン、ジメチルスルホキシド、炭酸プロピレンなどを挙げることができる。
本発明の組成物は、金属キレート化合物を含有していてもよい。金属キレート化合物としては、金属及び多座配位子を有しているものであれば特に限定されず、更に金属が有機基を有していてもよい。
IPA:イソプロピルアルコール(bp 82℃)
PGME:1−メトキシ−2−プロパノール(bp 118℃)
PGMEA:プロピレングリコール−1−モノメチルエーテル−2−アセテート(bp 146℃)
M−51:メチルシリケート51(メチルシリケートオリゴマー、平均4量体)
MeTMS:メチルトリメトキシシラン
PhTMS:フェニルトリメトキシシラン
SuccTMS:3−(トリメトキシシリルプロピル)コハク酸無水物
AcrylTMS:3−アクリロキシプロピルトリメトキシシラン
AL−A:アルミニウムトリスアセチルアセトネート
Ti−A:チタンテトラアセチルアセトネート
Zc−Aジルコニウムトリス(アセチルアセトネート)エチルアセトアセテート
OX−SC:オキセタニルシリケート。
シリカ粒子の平均一次粒子径(D)は、シリカ粒子の分散液をシリコン基板上にスピンコートし、電子顕微鏡で観察し、任意の一次粒子30個について長径と短径を測定し、それらの平均値をそれぞれDとした。結果を表1にまとめた。
アルミカップに測定したい溶液を1g秤取し、ホットプレートを用いて250℃で30分間加熱して液分を蒸発させた。加熱後のアルミカップに残った固形分を秤量して、溶液の固形分濃度を求めた。
日立ハイテクノロジーズ(株)の積分球式分光光度系U−4100を用いて測定を行った。なお、波長400〜700nmにおける透過率Tの平均値として算出した。
組成物をシリコンウェハー上に厚さが1.5〜4μmとなるように、スピンコーターを用いて塗布し、ついで150℃のオーブンで10分間、加熱、乾燥させ、700℃にて1h焼成しコーティング膜を得た。プリズムカプラー(METRICON社製:MODEL2010)でコーティング膜の波長633nmでの屈折率を測定した。
カールフィッシャー水分量滴定装置により溶液中の水分量を定量し、予め添加した水分量との差から加水分解による水の消費量を求め、加水分解比率を計算した。
350mm×350mm、3.2mm厚の平板白板ガラス上にドライ膜厚130nmとなるように組成物を片面にスリット塗布した。これを150℃で5分間プリベークを実施し、680℃で熱強化を実施した。本ガラスについて透過率(T塗布品)を測定し、組成物を塗布する前の透過率(T未塗布品)の値と比較して平板透過率向上値(T塗布品−T未塗布品)として算出した。また、鉛筆硬度を測定した。鉛筆硬度は手動式鉛筆引っかき硬度試験器(コーティングテスター株式会社製 No.850−56)を用いJIS K−5600−5−4(1999)に則り測定した。
100mm×50mm、膜厚0.8mmの青板ガラスの片面にドライ膜厚130nmとなるように組成物をスリット塗布し、150℃で5分間プリベークした。その後反対面にも同じドライ膜厚となるように組成物をスリット塗布し、150℃で5分間プリベークした。本ガラスについて600℃で1時間加熱処理を行い、両面に反射防止膜を形成したガラスを作成した。本ガラスを121℃、2.1気圧、100%RHの処理条件で240時間静置した。触針式膜厚計により処理前後の反射防止膜の膜厚をそれぞれ測定し、膜厚保持率を算出した。また、処理前後のガラスの透過率をそれぞれ測定し、処理前後の透過率変化を算出した。ここで、処理前後の膜厚変化、透過率変化が小さいものが耐湿熱性が良好である。
PGMEA200gに3−トリメトキシシリルプロピルコハク酸無水物41.97g(160mmol)とt−ブチルアミン11.70g(160mmol)を加えてしばらく室温にて撹拌した後、40℃にて2時間撹拌した。その後、80℃まで昇温し、6時間反応させた。得られた溶液を固形分濃度が20%になるようにPGMEAで希釈し、3−(tert−ブチルカルバモイル)−6−(トリメトキシシリル)へキサン酸、2−(2−(tert−ブチルアミノ)―2−オキソエチル)−5−(トリメトキシシリル)ペンタン酸の混合溶液(A−1、一般式(3)に該当)を得た。
PGME400gに3−トリメトキシシリルプロピルコハク酸無水物41.97g(160mmol)とt−ブチルアミン11.70g(160mmol)を加えて室温にて30分撹拌した後、60℃にて2時間撹拌した。その後、140℃まで昇温し、PGMEと水を共沸させながら、6時間反応させた。得られた溶液を固形分濃度が20重量%になるようにPGMEで希釈して、イミドシラン化合物である1−(tert−ブチル)−3−(3−(トリメトキシシリル)プロピル)ピロリジン−2,5−ジオンの溶液(A−2、一般式(2)に該当)を得た。
PGMEA200gに3−トリメトキシシリルプロピルコハク酸無水物41.97g(160mmol)とt−ペンチルアミン13.95g(160mmol)を加えてしばらく室温にて撹拌した後、40℃にて2時間撹拌した。その後、80℃まで昇温し、6時間反応させた。得られた溶液を固形分濃度が20%になるようにPGMEAで希釈し、2−(2−(t−ペンチルアミノ)−2−オキソエチル)−5−(トリメトキシシリル)ペンタン酸、3−(tert−ペンチルカルバモイル)−6−(トリメトキシシリル)へキサン酸の混合溶液(B−1、一般式(3)に該当)を得た。
PGMEA200gに3−トリメトキシシリルプロピルコハク酸無水物41.97g(160mmol)とイソプロピルアミン9.45g(160mmol)を加えてしばらく室温にて撹拌した後、40℃にて2時間撹拌した。その後、80℃まで昇温し、6時間反応させた。得られた溶液を固形分濃度が20%になるようにPGMEAで希釈し、2−(2−(イソプロピルアミノ)―2−オキソエチル)−5−(トリメトキシシリル)ペンタン酸、3−(イソプロピルカルバモイル)−6−(トリメトキシシリル)へキサン酸の混合溶液(C−1、一般式(3)に該当)を得た。
500mLの三口フラスコにKBM−13(信越化学工業製メチルトリメトキシシラン)を55.07g、KBM−103(信越化学工業製フェニルトリメトキシシラン)を45.82g、X−12−967C(信越化学工業製トリメトキシシリルプロピルコハク酸無水物)を30.30g,KBM5103(信越化学工業製3−アクリロキシプロピルトリメトキシシラン)94.77g、DAA(ダイアセトンアルコール)を338.94g仕込み、窒素雰囲気下40℃で攪拌しながら水64.46gにリン酸0.45g溶かしたリン酸水溶液を30分かけて添加した。滴下終了後、40℃で1時間攪拌した後、70℃に昇温し30分攪拌した。その後、オイルバスを115℃まで昇温した。昇温開始後に溶液の内温が100℃に到達し、そこから1時間加熱した。(内温は100〜110℃)得られた溶液を氷浴にて冷却し、ポリシロキサン溶液S−1を得た。ポリシロキサン溶液の固形分濃度は35%であった。
M−51(メチルシリケートオリゴマー、平均重合度4)に水を添加し、70℃で1時間加熱し、加水分解液S−2を得た。氷浴で冷却後水分消費量を計算した結果加水分解比率は85%であった。
表2〜3記載の組成で各組成物を調合し上記の方法により屈折率測定、初期特性評価および耐湿熱性評価を行った。表4に示すとおり、透過率向上値は良好で、耐湿熱試験における膜厚保持率は高く、透過率の変化も小さく、良好な耐湿熱性を示した。また、組成物中にアルミキレートまたはチタンキレートが含まれる場合においては、耐湿熱性が相乗的に向上した。また、メチルシリケートの加水分解品も特に耐湿熱性が高かった。
表2〜3記載の組成で組成物を調合し上記の方法により屈折率測定、初期特性評価および耐湿熱性評価を行った。鎖状シリカ粒子の含有量が全固形分中50wt%未満と少なかったため、表4に示すとおり、屈折率が高く、透過率向上効果は小さかった。
表2〜3記載の組成で組成物を調合し上記の方法により屈折率測定、初期特性評価および耐湿熱性評価を行った。一般式(2)もしくは(3)で表されるシラン化合物を用いず、他のシラン化合物を用いるか、または何も用いなかったところ、表4に示すとおり、耐湿熱性は大幅に低下した。
表2〜3記載の組成で組成物を調合し上記の方法により屈折率測定、初期特性評価および耐湿熱性評価を行った。添加粒子を鎖状シリカ粒子以外の球状粒子に変更したところ、表4に示すとおり、屈折率を低く制御することができず透過率向上効果は小さかった。
H エンボス高さ
W エンボス周期幅
1 塗布膜
2 反射防止膜
3 白板強化ガラス
4 太陽電池セル
5 封止材
6 バックシート
10 太陽電池モジュール
Claims (6)
- (a)平均一次粒子径が5〜40nmの鎖状シリカ粒子と、
(b)一般式(1)で表されるアルコキシシランの加水分解縮合物と、
Si(OR2)4 (1)
(式中R2は同じでも異なってもよく、置換もしくは無置換のアルキル基、置換もしくは無置換のアシル基、または置換もしくは無置換のアリール基を表す。)
(c)一般式(2)もしくは(3)で表されるシラン化合物と、
(d)溶媒と、
アルミキレート化合物またはチタンキレート化合物と、
を含有し、(a)平均一次粒子径が5〜40nmの鎖状シリカ粒子を全固形分中50wt%以上含有することを特徴とする組成物。 - さらに有機カルボン酸を含有する請求項1記載の組成物。
- 請求項1または2記載の組成物をガラス表面に塗布し、その後加熱によりガラスを熱強化するとともに組成物を硬化する工程を含む反射防止層の形成方法。
- 請求項1または2記載の組成物を硬化してなる反射防止層。
- 請求項4記載の反射防止層を有するガラス。
- 請求項5記載のガラスが太陽電池用カバーガラスであり、該カバーガラスを含む太陽電池モジュール。
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