JP6420572B2 - 計測装置およびその方法 - Google Patents

計測装置およびその方法 Download PDF

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Publication number
JP6420572B2
JP6420572B2 JP2014122744A JP2014122744A JP6420572B2 JP 6420572 B2 JP6420572 B2 JP 6420572B2 JP 2014122744 A JP2014122744 A JP 2014122744A JP 2014122744 A JP2014122744 A JP 2014122744A JP 6420572 B2 JP6420572 B2 JP 6420572B2
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JP
Japan
Prior art keywords
pattern
mask
patterns
projected
pattern group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2014122744A
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English (en)
Japanese (ja)
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JP2016003889A (ja
JP2016003889A5 (enExample
Inventor
智昭 肥後
智昭 肥後
小林　俊広
俊広 小林
将由 山▲崎▼
将由 山▲崎▼
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Canon Inc
Original Assignee
Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2014122744A priority Critical patent/JP6420572B2/ja
Priority to US14/734,559 priority patent/US9714826B2/en
Publication of JP2016003889A publication Critical patent/JP2016003889A/ja
Publication of JP2016003889A5 publication Critical patent/JP2016003889A5/ja
Application granted granted Critical
Publication of JP6420572B2 publication Critical patent/JP6420572B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/55—Depth or shape recovery from multiple images
    • G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP2014122744A 2014-06-13 2014-06-13 計測装置およびその方法 Expired - Fee Related JP6420572B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2014122744A JP6420572B2 (ja) 2014-06-13 2014-06-13 計測装置およびその方法
US14/734,559 US9714826B2 (en) 2014-06-13 2015-06-09 Measurement apparatus and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014122744A JP6420572B2 (ja) 2014-06-13 2014-06-13 計測装置およびその方法

Publications (3)

Publication Number Publication Date
JP2016003889A JP2016003889A (ja) 2016-01-12
JP2016003889A5 JP2016003889A5 (enExample) 2017-07-13
JP6420572B2 true JP6420572B2 (ja) 2018-11-07

Family

ID=54835890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014122744A Expired - Fee Related JP6420572B2 (ja) 2014-06-13 2014-06-13 計測装置およびその方法

Country Status (2)

Country Link
US (1) US9714826B2 (enExample)
JP (1) JP6420572B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6418884B2 (ja) * 2014-10-10 2018-11-07 キヤノン株式会社 三次元計測装置、三次元計測方法及びプログラム
US10032279B2 (en) * 2015-02-23 2018-07-24 Canon Kabushiki Kaisha Information processing apparatus, information processing method, and storage medium
KR101586765B1 (ko) * 2015-02-27 2016-01-25 주식회사 다우인큐브 반도체 공정 기반 3차원 가상 형상 모델링 방법
US10171730B2 (en) 2016-02-15 2019-01-01 Canon Kabushiki Kaisha Information processing apparatus, method of controlling information processing apparatus, and storage medium
US10685490B2 (en) 2016-03-10 2020-06-16 Canon Kabushiki Kaisha Information processing apparatus, information processing method, and storage medium
JP6791645B2 (ja) * 2016-03-29 2020-11-25 本田技研工業株式会社 光通信装置、光通信システム、および光通信方法
JP6735615B2 (ja) * 2016-06-29 2020-08-05 キヤノン株式会社 情報処理装置、情報処理装置の制御方法およびプログラム
JP6673266B2 (ja) * 2017-03-08 2020-03-25 オムロン株式会社 相互反射検出装置、相互反射検出方法、およびプログラム
MX386786B (es) 2018-04-30 2025-03-19 Path Robotics Inc Escaner láser que rechaza la reflexión.
JP7178803B2 (ja) 2018-06-04 2022-11-28 キヤノン株式会社 情報処理装置、情報処理装置の制御方法およびプログラム
JP6975106B2 (ja) * 2018-07-31 2021-12-01 株式会社デンソーアイティーラボラトリ ３次元形状計測システム、３次元形状計測方法、及び３次元形状計測プログラム
CN113439195A (zh) * 2019-02-22 2021-09-24 普罗费塞公司 使用动态视觉传感器和图案投影的三维成像和感测
JP7202966B2 (ja) * 2019-04-26 2023-01-12 株式会社キーエンス 三次元測定装置及び三次元測定方法
EP4170322B1 (en) * 2021-10-21 2023-11-15 Tata Consultancy Services Limited Portable speckle imaging system and method for automated speckle activity map based dynamic speckle analysis
CN116320191A (zh) * 2023-02-16 2023-06-23 苏州佳世达光电有限公司 投影图样的形成方法及扫描器
CN118999346A (zh) * 2023-05-17 2024-11-22 华为技术有限公司 物体三维信息测量方法、控制器及系统

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000292135A (ja) * 1999-04-07 2000-10-20 Minolta Co Ltd ３次元情報入力カメラ
JP2001349713A (ja) * 2000-06-06 2001-12-21 Asahi Hightech Kk 三次元形状測定装置
JP3871963B2 (ja) * 2002-05-16 2007-01-24 住友化学株式会社 表面検査装置及び表面検査方法
JP2006098252A (ja) * 2004-09-30 2006-04-13 Brother Ind Ltd ３次元情報取得方法
JP4611782B2 (ja) 2005-03-28 2011-01-12 シチズンホールディングス株式会社 ３次元形状測定方法及び測定装置
JP2008281399A (ja) 2007-05-09 2008-11-20 Konica Minolta Sensing Inc 三次元測定装置及び携帯型計測器
JP4931728B2 (ja) * 2007-08-08 2012-05-16 シーケーディ株式会社 三次元計測装置及び基板検査機
US8964189B2 (en) * 2010-08-19 2015-02-24 Canon Kabushiki Kaisha Three-dimensional measurement apparatus, method for three-dimensional measurement, and computer program
JP5517829B2 (ja) * 2010-08-19 2014-06-11 キヤノン株式会社 三次元計測装置及び三次元計測方法
KR101289595B1 (ko) * 2011-02-28 2013-07-24 이경자 격자패턴투영장치

Also Published As

Publication number Publication date
JP2016003889A (ja) 2016-01-12
US20150362312A1 (en) 2015-12-17
US9714826B2 (en) 2017-07-25

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