JP6403795B2 - とりわけ多結晶シリコンからなるロッド状の材料を断片化するための方法 - Google Patents
とりわけ多結晶シリコンからなるロッド状の材料を断片化するための方法 Download PDFInfo
- Publication number
- JP6403795B2 JP6403795B2 JP2016559172A JP2016559172A JP6403795B2 JP 6403795 B2 JP6403795 B2 JP 6403795B2 JP 2016559172 A JP2016559172 A JP 2016559172A JP 2016559172 A JP2016559172 A JP 2016559172A JP 6403795 B2 JP6403795 B2 JP 6403795B2
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- Prior art keywords
- rod
- shaped material
- high voltage
- electrodes
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000463 material Substances 0.000 title claims description 191
- 238000000034 method Methods 0.000 title claims description 49
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 9
- 230000015556 catabolic process Effects 0.000 claims description 56
- 239000012530 fluid Substances 0.000 claims description 37
- 230000033001 locomotion Effects 0.000 claims description 23
- 238000013467 fragmentation Methods 0.000 claims description 18
- 238000006062 fragmentation reaction Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000012634 fragment Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 26
- 239000010703 silicon Substances 0.000 description 26
- 239000013078 crystal Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C19/00—Other disintegrating devices or methods
- B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C19/00—Other disintegrating devices or methods
- B02C19/18—Use of auxiliary physical effects, e.g. ultrasonics, irradiation, for disintegrating
- B02C2019/183—Crushing by discharge of high electrical energy
Landscapes
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Food Science & Technology (AREA)
- Disintegrating Or Milling (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CH2014/000039 WO2015143572A1 (de) | 2014-03-26 | 2014-03-26 | Verfahren zum fragmentieren eines stangenartigen materials, insbesondere aus polykristallinem silizium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017515774A JP2017515774A (ja) | 2017-06-15 |
| JP6403795B2 true JP6403795B2 (ja) | 2018-10-10 |
Family
ID=50486685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016559172A Active JP6403795B2 (ja) | 2014-03-26 | 2014-03-26 | とりわけ多結晶シリコンからなるロッド状の材料を断片化するための方法 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP3122463B1 (zh) |
| JP (1) | JP6403795B2 (zh) |
| KR (1) | KR20160137539A (zh) |
| CN (1) | CN106132550B (zh) |
| CA (1) | CA2943892C (zh) |
| TW (1) | TWI652383B (zh) |
| WO (1) | WO2015143572A1 (zh) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3354622A1 (en) * | 2017-01-26 | 2018-08-01 | Omya International AG | Process for the preparation of fragmented natural calcium carbonate with a reduced content of impurities and products obtained thereof |
| CN107350056B (zh) * | 2017-08-24 | 2018-04-24 | 华中科技大学 | 一种用于流水作业的高压电脉冲破碎反应槽 |
| JP6947126B2 (ja) | 2018-06-12 | 2021-10-13 | 株式会社Sumco | シリコンロッドの破砕方法及び装置並びにシリコン塊の製造方法 |
| US20210269942A1 (en) * | 2018-07-04 | 2021-09-02 | Mitsubishi Materials Corporation | Method of fragmenting or method of generating cracks in semiconductor material, and method of manufacturing semiconductor material lumps |
| CN110215984B (zh) * | 2019-07-05 | 2021-04-13 | 东北大学 | 一种强化方铅矿破碎及分选的高压电脉冲预处理方法 |
| JP2021107042A (ja) * | 2019-12-27 | 2021-07-29 | 三菱マテリアル株式会社 | 半導体材料の破砕方法又はクラック発生方法、及び半導体材料塊の製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU554866B2 (en) * | 1982-05-21 | 1986-09-04 | De Beers Industrial Diamond Division (Proprietary) Limited | High voltage disintegration |
| CN86104470A (zh) * | 1986-06-27 | 1988-01-06 | Ceee公司 | 脉冲电能发射分裂物质的方法和设备 |
| DE19534232C2 (de) * | 1995-09-15 | 1998-01-29 | Karlsruhe Forschzent | Verfahren zur Zerkleinerung und Zertrümmerung von aus nichtmetallischen oder teilweise metallischen Bestandteilen konglomerierten Festkörpern und zur Zerkleinerung homogener nichtmetallischer Festkörper |
| DE19543914C1 (de) * | 1995-11-27 | 1997-01-02 | Marcon Immobilien Gmbh | Verfahren und Vorrichtung zur Bearbeitung von Feststoffen |
| JPH09192526A (ja) * | 1996-01-12 | 1997-07-29 | Kobe Steel Ltd | 放電破砕装置 |
| DE19727441A1 (de) * | 1997-06-27 | 1999-01-07 | Wacker Chemie Gmbh | Vorrichtung und Verfahren zum Zerkleinern von Halbleitermaterial |
| DE19727534C2 (de) * | 1997-06-28 | 2002-06-06 | Tzn Forschung & Entwicklung | Verfahren und Vorrichtung zum Reinigen von mineralischen Feststoffen, insbesondere von Kies und Sand |
| DE19736027C2 (de) * | 1997-08-20 | 2000-11-02 | Tzn Forschung & Entwicklung | Verfahren und Vorrichtung zum Aufschluß von Beton, insbesondere von Stahlbetonplatten |
-
2014
- 2014-03-26 EP EP14717391.8A patent/EP3122463B1/de active Active
- 2014-03-26 CA CA2943892A patent/CA2943892C/en active Active
- 2014-03-26 WO PCT/CH2014/000039 patent/WO2015143572A1/de active Application Filing
- 2014-03-26 JP JP2016559172A patent/JP6403795B2/ja active Active
- 2014-03-26 KR KR1020167025960A patent/KR20160137539A/ko not_active Application Discontinuation
- 2014-03-26 CN CN201480077501.8A patent/CN106132550B/zh active Active
- 2014-12-03 TW TW103142023A patent/TWI652383B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CA2943892A1 (en) | 2015-10-01 |
| CA2943892C (en) | 2021-11-09 |
| KR20160137539A (ko) | 2016-11-30 |
| WO2015143572A1 (de) | 2015-10-01 |
| JP2017515774A (ja) | 2017-06-15 |
| CN106132550B (zh) | 2020-02-21 |
| EP3122463A1 (de) | 2017-02-01 |
| CN106132550A (zh) | 2016-11-16 |
| EP3122463B1 (de) | 2018-06-27 |
| TWI652383B (zh) | 2019-03-01 |
| TW201538813A (zh) | 2015-10-16 |
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