JP6390966B2 - Magnetic flux density sensor - Google Patents

Description

  The present invention relates to a magnetic flux density sensor, and more particularly to a magnetic flux density sensor for measuring magnetic flux density.

  As a conventional method for detecting the magnetic flux density, for example, a method of measuring the magnetic flux density with a probe coil is known. This method is a method in which a magnetic flux density is measured by an induction voltage of a coil having a detection range as a cross-section by drilling a magnetic steel sheet.

  Further, a method for measuring a magnetic field with an MR element or a Hall element is known (see Patent Documents 1 to 3). This method is a method of measuring the magnetic flux density by measuring the voltage change of the MR element using the magnetoresistive effect or the electromotive force due to the Hall effect.

  Further, a method of measuring with a coil configured on a multilayer printed board is known (see Patent Document 4). In this method, a magnetic field generated by a current passing through the coil is detected on a printed circuit board by a detection toroidal coil.

  Moreover, the method of measuring with the thin film coil comprised on the printed circuit board installed between laminated cores is known (refer nonpatent literature 1). In this method, a thin film coil is formed in parallel with an electromagnetic steel sheet, and a magnetic flux penetrating the electromagnetic steel sheet is detected.

  A method for detecting magnetic flux density using a probe method is known (see Patent Document 5 and Non-Patent Document 2).

  In addition, a method for detecting a multidirectional magnetic flux density using a thin film coil and a probe method is known (see Non-Patent Document 3).

JP 2009-2699 A JP 2009-2911 A JP 2010-85338 A JP 2009-85620 A JP 2011-133383 A

2014 IEEJ National Conference 5-005 Kawasaki Steel Technical Report 35 (2003) 1, 21-27 IEEJ Transactions D, 130 (9), 1087-1093, 2010-09-01

  However, in the method of measuring the magnetic flux density with the probe coil, there is a problem that the magnetic steel sheet needs to be drilled and is affected by the removed portion and the coil shape due to the wire thickness. Further, there is a problem that the thickness of the coil wire diameter affects the magnetic circuit due to the sensor thickness between the electromagnetic steel sheets of the laminated core.

  Further, the techniques of Patent Documents 1 to 3 have a problem that a power source for driving the sensor element is necessary, and the sensor is thick and difficult to install without influence between the electromagnetic steel sheets of the laminated core. It was.

  Moreover, in the technique of patent document 4, there existed a subject that the magnetic flux which flows into an electromagnetic steel plate cannot be detected for the electric wire through which an electric current flows.

  Further, the technique of Non-Patent Document 1 has a problem that only the magnetic flux penetrating the electromagnetic steel sheet can be detected, and the magnetic flux inside the electromagnetic steel sheet cannot be detected.

  Moreover, in the technique of patent document 5 and nonpatent literature 2, since a probe is used, it is easy to include the error of the space | gap between a magnetic steel plate surface and a sensor, and the space for standing a probe on a magnetic steel plate surface is needed. There was a problem.

  Further, the technique of Non-Patent Document 3 has a problem that the same evaluation area cannot be detected because the sensors for detecting the direction are arranged side by side.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a magnetic flux density sensor capable of measuring each magnetic flux density in the three axial directions in a partial region of the surface of a conductor plate. And

  In order to achieve the above object, a magnetic flux density sensor according to a first aspect of the present invention surrounds a partial region on the surface of a conductor plate of a laminated core formed by laminating conductor plates formed of a conductive member. Two pairs of micro conductive portions composed of two micro conductive portions arranged, and two sets of lines arranged so that the line segments connecting the two micro conductive portions of the pair of micro conductive portions are orthogonal to each other A pair of micro-conductive portions, and two thin-film conductors each provided with one end connected to each of the micro-conductive portions of the pair of micro-conductive portions. A probe sensor including two connection line pairs each including a first connection line, and a probe coil sensor including a second connection line formed by a thin film conductor disposed so as to surround the partial region of the surface of the conductor plate Including the probe sensor and the probe coil sensor. The output, and is configured so as to output for measuring each of the magnetic flux density in three axial directions in the partial region of the surface of the conductor plate.

  In the magnetic flux density sensor according to the first invention, the thickness of the thin film conductor may be 1 micrometer or less.

  In the magnetic flux density sensor according to the first invention, the thin film conductor may be sputtered or plated.

  Further, in the magnetic flux density sensor according to the first invention, each of the first connection lines may be L-shaped.

  In the magnetic flux density sensor according to the first aspect of the present invention, the connection wire pair in the probe sensor is disposed on one surface of the conductor plate, and the second surface of the probe coil sensor is disposed on the other surface of the conductor plate. Two connecting lines may be arranged.

  In the magnetic flux density sensor according to the first aspect of the present invention, the first connection wire pair of the probe sensor is disposed on an insulating film provided on the surface of a conductor plate, and the second of the probe coil sensor. The connection line may be arranged on an insulating film provided on the surface of the conductor plate.

  In the magnetic flux density sensor according to the first aspect of the present invention, the connection line pair in the probe sensor is disposed on one surface of the conductor plate, and the insulating film provided on the probe sensor has the A second connection line in the probe coil sensor may be arranged.

  According to the magnetic flux density sensor of the present invention, two pairs of micro conductive portions composed of two micro conductive portions arranged so as to surround a partial region on the surface of the conductor plate of the laminated core, and the micro of the micro conductive portion pair. A probe sensor including two connection line pairs formed of a thin film conductor having one end connected to each of the conductive portions, and a thin film conductor formed so as to surround a partial region on the surface of the conductor plate. By using a probe coil sensor including two connecting lines, it is possible to measure each magnetic flux density in the three axial directions in a partial region of the surface of the conductor plate.

It is a figure which shows an example of a structure of the magnetic flux density sensor in a laminated core. It is a figure which shows an example of each apparatus for measuring a magnetic flux density from the voltage obtained by the magnetic flux density sensor in a laminated core. It is the schematic of the probe sensor in the magnetic flux density sensor which concerns on 1st Embodiment. It is the schematic of the search coil sensor in the magnetic flux density sensor which concerns on 1st Embodiment. It is a perspective view of the probe sensor and the probe coil sensor in the magnetic flux density sensor according to the first embodiment. It is sectional drawing of the magnetic flux density sensor which concerns on 1st Embodiment. It is a perspective view of the probe sensor and probe coil sensor in the magnetic flux density sensor concerning a 2nd embodiment. It is sectional drawing of the magnetic flux density sensor which concerns on 2nd Embodiment.

<Outline of Magnetic Flux Density Sensor According to Embodiment of the Present Invention>

  As shown in FIG. 1, the magnetic flux density sensor according to the embodiment of the present invention is one sheet constituting a laminated core in a laminated core 12 constituted by laminating electromagnetic steel sheets 10 used in a motor, a transformer, or the like. Alternatively, on the surface of a plurality of electromagnetic steel sheets, the magnetic flux in two directions (X-axis direction and Y-axis direction) perpendicular to the plate thickness direction (Z-axis direction) that is the stacking direction and the plate surface direction perpendicular to the stacking direction. A magnetic flux density sensor 100 for detecting the density is arranged. Then, as shown in FIG. 2, the voltage output from the magnetic flux density sensor 100 is measured by a voltage measuring device (oscilloscope) 14 through a sensor lead wire 18, and the computer 16 performs physical properties based on the obtained voltage. By calculating the magnetic flux density as a value, the three-dimensional magnetic flux density of the laminated core 12 is measured. Further, by measuring the magnetic flux density over time, the magnetic flux density distribution can be measured.

  In the embodiment of the present invention, the case where the magnetic flux density sensor is formed on the surface of the electromagnetic steel sheet in the laminated core formed by laminating the electromagnetic steel sheets will be described as an example, but the conductor formed of the conductive member It goes without saying that the magnetic flux density sensor can be formed on the surface of any material as long as it is a plate.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<Configuration of magnetic flux density sensor according to first embodiment of the present invention>

  A configuration of the magnetic flux density sensor according to the first embodiment of the present invention will be described. As shown in FIGS. 3 and 4, the magnetic flux density sensor 100 according to the embodiment of the present invention includes a probe sensor 120 and a probe coil sensor 130.

  As shown in FIG. 3, the probe sensor 120 is provided on one surface of the electromagnetic steel sheet 10 covered with the insulating film 26, and the probe sensor 120 includes the minute conduction part 20, the connection line 22, and the output. And a line connection land 24.

  As shown in FIG. 4, the probe coil sensor 130 is provided on the other surface of the electromagnetic steel sheet 10 covered with the insulating film 36, and the probe coil sensor 130 includes the connection line 32, the output line connection land 34, and the like. , Are combined.

  FIG. 5 shows a perspective view of the electromagnetic steel sheet 10 as seen from the back side. FIG. 6 shows an A-A ′ sectional view of the electromagnetic steel sheet 10 in FIG. 5. As shown in FIGS. 5 and 6, the probe sensor 120 is formed on one surface of the electromagnetic steel sheet 10, and the probe coil sensor 130 is formed on the other surface. The voltage measuring device 14 measures the output voltage of the probe sensor 120, and measures the output voltage of the coil sensor 130, so that the computer 16 detects the magnetic flux density in three directions.

  Next, the configurations of the probe sensor 120 and the probe coil sensor 130 will be described.

  As shown in FIG. 3, the four micro conductive portions 20 constituting the probe sensor 120 are arranged so as to surround a partial region on the surface of the electromagnetic steel sheet 10 covered with the insulating film 26. Two pairs of micro conductive parts composed of two micro conductive parts 20 are arranged so that the line segments connecting the two micro conductive parts 20 of the micro conductive part pair are orthogonal to each other. As shown in FIG. 4, each of the micro conductive portions 20 is disposed so as to be in contact with the surface of the electromagnetic steel sheet 10. In this way, by arranging two pairs of micro conductive portions in which two micro conductive portions 20 with respect to the X-axis direction and two micro conductive portions 20 with respect to the Y-axis direction are combined, X in the partial region of the electromagnetic steel sheet is arranged. The magnetic flux density in the axial direction and the Y-axis direction can be measured.

  As shown in FIG. 3, the connection line 22 constituting the probe sensor 120 is provided for each of the four micro conductive portions 20. Two connection line pairs are provided corresponding to the two pairs of minute conduction portions, and the connection line 22 of one connection line pair is connected to one end of each of the minute conduction portions 20 of the corresponding minute conduction portion pair. Is connected. The connection line 22 is an L-shaped connection line formed of a thin film conductor having a thickness of 1 micrometer. In the present embodiment, two connection line pairs including two L-shaped connection lines 22 are arranged in a cross shape in the central partial region of the electromagnetic steel sheet 10.

  Moreover, the connection line 22 is arrange | positioned on the insulating film 26 provided on the surface of the electromagnetic steel plate 10, as shown in FIG. A polyimide insulator is used for the insulating film 26. The connection line 22 includes an output line connection land 24 at an end portion that is not on the minute conduction portion 20 side, and the output line connection land 24 is connected to the voltage measurement device 14 via the sensor lead wire 18. In this embodiment, sputtering is used as the thin film conductor, but plating may also be used. Sputtering or plating used as a thin film conductor is characterized in that there is little influence even if it is interposed between laminated steel sheets.

  As shown in FIG. 4, the connecting wire 32 constituting the probe coil sensor 130 is formed of a thin film conductor arranged so as to surround a partial region of the surface of the electromagnetic steel sheet 10 covered with the insulating film 36. Output line connection lands 34 are provided at both ends of the connection line 32, and output lines for measuring a voltage in the Z-axis direction in a partial region of the electromagnetic steel sheet 10 are connected to the output line connection lands 34. In the present embodiment, the connection line 32 is provided for one turn. However, the present invention is not limited to this, and a plurality of turns may be provided.

<Operation of the magnetic flux density sensor according to the first embodiment of the present invention>

  The operation of the magnetic flux density sensor according to the first embodiment of the present invention will be described.

  The voltage output from the output line connecting land 24 of the probe sensor 120 is measured by the voltage measuring device 14, and the voltage output from the output line connecting land 34 of the probe coil sensor 130 is measured by the voltage measuring device 14. Measured by.

  Then, based on the output voltage value of the probe sensor 120 measured by the voltage measuring device 14, the computer 16 calculates the magnetic flux density in the X-axis direction and the Y-axis direction in the central partial region of the electromagnetic steel sheet 10. Further, the computer 16 calculates the magnetic flux density in the Z-axis direction in the central partial region of the electromagnetic steel sheet 10 based on the output voltage value of the probe coil sensor 130 measured by the voltage measuring device 14.

  As described above, according to the magnetic flux density sensor 100 according to the first embodiment, two sets of the two micro conductive portions 20 arranged so as to surround a partial region of the surface of the electromagnetic steel sheet 10 of the laminated core. A probe sensor 120 including a pair of micro conductive portions, and two connection line pairs formed of thin film conductors having one end connected to each of the micro conductive portions 20, and a partial region on the surface of the electromagnetic steel sheet 10. By configuring the magnetic flux density sensor 100 using the probe coil sensor 130 including the connection line 22 formed of the thin film conductors arranged in this manner, each of the three axial directions in the partial region of the surface of the electromagnetic steel sheet 10 is configured. Magnetic flux density can be measured.

  <Configuration of magnetic flux density sensor according to second embodiment of the present invention>

  Next, the configuration of the magnetic flux density sensor according to the second embodiment of the present invention will be described. In addition, about the part which becomes the same structure as the magnetic flux density sensor 100 of 1st Embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted.

  In the present embodiment, as described below, the point that the probe sensor 120 and the probe coil sensor 130 are formed in a multilayer structure on one surface of the electromagnetic steel sheet 10 is the same as the first embodiment. Is different.

  As shown in the perspective view of FIG. 7, the magnetic flux density sensor 100 according to the second embodiment has a probe sensor 120 and a probe coil sensor 130 disposed on one surface of the electromagnetic steel sheet 10.

  As shown in FIG. 7, the probe sensor 120 is provided on one surface of the electromagnetic steel sheet 10 covered with the insulating film 26, and includes a micro conductive portion 20, a connection line 22, and an output line connection land 24. , Including. The probe coil sensor 130 is provided on the probe sensor 120 covered with the insulating film 36, and is configured by combining the connection line 32 and the output line connection land 34.

  FIG. 8 shows a B-B ′ sectional view of the electromagnetic steel sheet 10 in FIG. 7. As shown in FIGS. 7 and 8, the probe sensor 120 is arranged on one surface of the electromagnetic steel sheet 10 covered with the insulating film 26. Then, the probe sensor 120 is formed so that the probe sensor 120 is covered with the insulating film 36 and the connecting wire 32 is arranged on the insulating film 36. The voltage measuring device 14 measures the output voltage of the probe sensor 120, and measures the output voltage of the coil sensor 130, so that the computer 16 detects the magnetic flux density in three directions.

  In addition, since the other structure and effect | action of the magnetic flux density sensor which concern on 2nd Embodiment are the same as that of the magnetic flux density sensor 100 of 1st Embodiment, detailed description is abbreviate | omitted.

  As described above, according to the magnetic flux density sensor 100 according to the second embodiment, the two sets of the two micro conductive portions 20 arranged so as to surround the partial region of the surface of the laminated steel sheet 10. A probe sensor 120 including a pair of micro conductive portions and two connection line pairs formed of thin film conductors each having one end connected to each of the micro conductive portions 20, and formed on the probe sensor 120. By configuring the magnetic flux density sensor 100 using the probe coil sensor 130 including the connection wire 22 formed of a thin film conductor disposed so as to surround a partial region of the surface of the electromagnetic steel sheet 10, the magnetic steel sheet 10 Each magnetic flux density in the triaxial direction in the partial region of the surface can be measured.

  The present invention is not limited to the above-described embodiment, and various modifications and applications can be made without departing from the gist of the present invention.

  For example, in the above-described embodiment, the connection line 22 is an L-shaped connection line. However, the connection line 22 is not limited to this, and any shape of connection line can be used as long as the connection line 22 can be arranged as two connection line pairs. Also good.

  In the above-described embodiment, the two connection line pairs including the two L-shaped connection lines 22 are arranged in a cross shape in the central partial region, but the present invention is not limited to this. It may be arranged in the upper and lower partial areas, or may be arranged in a non-cross shape according to the shape of the connection line 22.

DESCRIPTION OF SYMBOLS 10 Magnetic steel plate 12 Laminated core 14 Voltage measuring device 16 Computer 18 Sensor lead wire 20 Micro conduction part 22, 32 Connection line 24, 34 Output line connection land 26 Insulating film 36 Insulating film 100 Magnetic flux density sensor 120 Probe sensor 130 Coil sensor

Claims (7)

Two pairs of micro conductive portions comprising two micro conductive portions arranged so as to surround a partial region on the surface of the conductive plate of the laminated core formed by stacking conductive plates formed of conductive members. In addition, for each of the two sets of micro-conductive portions and the two sets of micro-conductive portions that are arranged so that the line segments connecting the two micro-conductive portions of the micro-conductive portion pair are orthogonal to each other A probe sensor including two connection line pairs each including two first connection lines formed of a thin film conductor having one end connected to each of the micro conductive parts of the micro conductive part pair;
A probe coil sensor including a second connection line formed of a thin film conductor disposed so as to surround the partial region of the surface of the conductor plate, and outputs the probe sensor and the probe coil sensor to the conductor. A magnetic flux density sensor as an output for measuring each magnetic flux density in the triaxial direction in a partial region of the surface of the plate.   The magnetic flux density sensor according to claim 1, wherein the thin film conductor has a thickness of 1 μm or less.   The magnetic flux density sensor according to claim 1, wherein the thin film conductor is formed by sputtering or plating.   The magnetic flux density sensor according to any one of claims 1 to 3, wherein each of the first connection lines is L-shaped. On one surface of the conductor plate, the connection line pair in the probe sensor is disposed,
The magnetic flux density sensor according to any one of claims 1 to 4, wherein a second connection line in the probe coil sensor is disposed on the other surface of the conductor plate. The connection line pair of the probe sensor is disposed on an insulating film provided on the surface of the conductor plate,
The magnetic flux density sensor according to claim 1, wherein the second connection line of the probe coil sensor is disposed on an insulating film provided on a surface of the conductor plate. On one surface of the conductor plate, the connection line pair in the probe sensor is disposed,
The magnetic flux density sensor according to any one of claims 1 to 4, wherein a second connection line in the probe coil sensor is disposed on an insulating film provided on the probe sensor.