JP6387496B2 - 光触媒体の製造方法および光触媒体 - Google Patents
光触媒体の製造方法および光触媒体 Download PDFInfo
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- JP6387496B2 JP6387496B2 JP2013100830A JP2013100830A JP6387496B2 JP 6387496 B2 JP6387496 B2 JP 6387496B2 JP 2013100830 A JP2013100830 A JP 2013100830A JP 2013100830 A JP2013100830 A JP 2013100830A JP 6387496 B2 JP6387496 B2 JP 6387496B2
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- JP
- Japan
- Prior art keywords
- photocatalyst
- film
- titanium oxide
- photocatalytic
- dimensional solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011941 photocatalyst Substances 0.000 title claims description 60
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 35
- 239000007787 solid Substances 0.000 claims description 34
- 230000001699 photocatalysis Effects 0.000 claims description 32
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 25
- 239000000126 substance Substances 0.000 claims description 21
- 238000000231 atomic layer deposition Methods 0.000 claims description 20
- 238000013032 photocatalytic reaction Methods 0.000 claims description 20
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 33
- 239000007789 gas Substances 0.000 description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 17
- 238000000354 decomposition reaction Methods 0.000 description 11
- 238000012360 testing method Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000002441 X-ray diffraction Methods 0.000 description 8
- 239000011230 binding agent Substances 0.000 description 8
- 239000012530 fluid Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000000137 annealing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000003618 dip coating Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000003426 co-catalyst Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229920005610 lignin Polymers 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- HKJYVRJHDIPMQB-UHFFFAOYSA-N propan-1-olate;titanium(4+) Chemical compound CCCO[Ti](OCCC)(OCCC)OCCC HKJYVRJHDIPMQB-UHFFFAOYSA-N 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- -1 titanium alkoxide Chemical class 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
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- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Catalysts (AREA)
Description
次に、石英基板表面に、ALD法によってアナターゼ型酸化チタン膜を形成したので、その方法と膜の評価結果を説明する。
11 3次元立体
12 光触媒膜
UV 紫外線
L 処理すべき液体
B 生成した気泡
θ1 アナターゼ型酸化チタンの存在を示す回折角
20 トルエン分解試験装置
21 試験片
22 密閉式シャーレ
23 ガス採取用ゴム栓
24 光源
Claims (4)
- 透明な3次元立体を準備する工程と、
原子層堆積法を用いて、前記3次元立体の表面に均一な厚さのアモルファス構造の酸化チタン膜を形成する工程と、
前記酸化チタンを、原子層堆積法による形成温度より高い温度で熱処理しアナターゼ型酸化チタンとする工程と、
を有する光触媒体の製造方法。 - 前記光触媒膜は、実質的に光触媒反応に寄与する物質のみからなる、
請求項1に記載の光触媒体の製造方法。 - 前記光触媒膜は、前記3次元立体の表面に直接接して形成される、
請求項1または2に記載の光触媒体の製造方法。 - 透明な3次元立体と、
前記3次元立体の表面に原子層堆積法によって形成されたアモルファス構造の酸化チタンを、原子層堆積法による形成温度より高い温度で熱処理することにより得られたアナターゼ型酸化チタン膜と、
を有する光触媒体。
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JP2013100830A JP6387496B2 (ja) | 2013-05-13 | 2013-05-13 | 光触媒体の製造方法および光触媒体 |
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JP2013100830A JP6387496B2 (ja) | 2013-05-13 | 2013-05-13 | 光触媒体の製造方法および光触媒体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014221438A JP2014221438A (ja) | 2014-11-27 |
JP6387496B2 true JP6387496B2 (ja) | 2018-09-12 |
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JP2013100830A Active JP6387496B2 (ja) | 2013-05-13 | 2013-05-13 | 光触媒体の製造方法および光触媒体 |
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JP (1) | JP6387496B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2020054931A (ja) * | 2017-01-27 | 2020-04-09 | 国立研究開発法人科学技術振興機構 | 構造物及びその製造方法 |
JP7039238B2 (ja) | 2017-10-03 | 2022-03-22 | 株式会社ディスコ | レーザー照射機構 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0871573A (ja) * | 1994-09-01 | 1996-03-19 | Ebara Res Co Ltd | 光触媒による水処理方法及びその装置 |
WO2008136882A2 (en) * | 2007-02-14 | 2008-11-13 | The Board Of Trustees Of The Leland Stanford Junior University | Fabrication method of size-controlled, spatially distributed nanostructures by atomic layer deposition |
JP4939319B2 (ja) * | 2007-06-29 | 2012-05-23 | 信越石英株式会社 | 多孔質光触媒体の製造方法及び多孔質光触媒体並びに浄化装置 |
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