JP6385760B2 - Copying device - Google Patents

Description

  The present invention relates to a copying apparatus for copying a contact surface integrated with a copying member so as to be parallel to a specific surface of an object.

  The copying apparatus includes an apparatus base having a concave hemispherical surface and a copying member having a convex hemispherical surface (see, for example, Patent Document 1). The concave hemisphere of the apparatus base and the convex hemisphere of the copying member are set to the same radius of curvature. The copying member is assembled to the apparatus base so that both hemispheres overlap. In addition, the copying member is levitated by the air ejected from the concave hemisphere and swings along the concave hemisphere.

  In this type of copying apparatus, when a contact surface of a copying member is applied to a specific surface of a workpiece, the copying member swings along the specific surface of the workpiece, and the contact surface is parallel to the specific surface of the workpiece. . That is, the copying member follows the workpiece. Next, a suction force due to negative pressure is generated at the interface between the concave hemispherical surface of the apparatus base and the convex hemispherical surface of the copying member, and the copying member is attracted to the apparatus base. The copying state is held by locking the copying member by this adsorption.

JP 2002-359263 A

  By the way, downsizing of the copying apparatus is desired from the downsizing of the workpiece to be copied by the copying member. When the copying apparatus is downsized, the effective area of the concave hemispheric surface of the apparatus base and the convex hemispheric surface of the copying member is also reduced, and the force (levitation load) that causes the copying member to float by blowing air and the air are reduced. The force (holding force) for sucking and holding the copying member is also reduced. Further, in a copying apparatus, a heating device may be attached to the copying member and the heating device may be used as a part of the copying member. In this case, if the copying apparatus is reduced in size and the effective area of the concave hemisphere and the convex hemisphere is reduced, the heat transmitted from the heating apparatus cannot be dissipated from the copying member, and a member built in the copying apparatus (for example, adsorption) There is a risk that the magnet for air and the packing for air seal will deteriorate due to heat.

The present invention has been made in view of the above circumstances, and its object is to provide a reduction in the levitation force and holding power, the copying apparatus can be downsized while suppressing the thermal deterioration is there.

  A copying apparatus for solving the above problems includes a copying member having a convex spherical surface, and an apparatus base having a concave spherical surface that engages with the convex spherical surface, and the copying member has a pressure of air. Can be lifted with respect to the apparatus base, and the copying member is brought into contact with the object while swinging along the spherical surface, and the contact surface integrated with the copying member is used as a specific surface of the object. In the copying apparatus that makes the copying so as to be parallel to each other, when the direction in which the apparatus base and the copying member are stacked is the axial direction of the copying apparatus, in a plan view of the apparatus base in the axial direction, The apparatus base is a rectangular block shape having a long side and a short side, and the concave spherical surface is a circle whose diameter is a straight line centered on the center of the apparatus base and longer than the short side of the apparatus base. Is projected on the device base and surrounded by the circle on the device base. And summarized in that formed in the region.

In the copying apparatus, the apparatus base includes an annular porous material, and the annular porous material has a pair of long side edges in a plan view of the apparatus base in the axial direction, and a pair of The long spherical edge has an arc edge connecting one end or the other end, and the concave spherical surface is provided in the annular porous material.
Further, regarding the copying apparatus, in a plan view when the apparatus base is viewed in the axial direction, the copying member includes a pair of long side edges and an arc edge connecting one end and the other end of the pair of long side edges. The shape of the convex spherical surface in plan view is such that a circle centered on the center of the copying member and having a circular arc edge of the copying member as a part of the circumference is projected onto the copying member. It is preferable to have a shape.

  Further, in the copying apparatus, a side surface on the short side of the apparatus base is provided with an outwardly bulging portion and an attachment step portion that is recessed from the bulging portion, and the side surface on the short side side. In each case, a bifurcated side plate is preferably attached to the attachment step portion with the bulging portion sandwiched therebetween, and the copying member is preferably disposed inside the pair of side plates.

  In the copying apparatus, the end portion of the copying member enters the space surrounded by the bifurcated portion of the side plate and the bulging portion when the copying member swings in the direction along the long side edge of the copying member. An opening is provided.

According to the present invention, it can be downsized while suppressing the lowering of the floating load and retention, and thermal degradation.

The perspective view which shows the copying apparatus of embodiment from the baseplate side. The perspective view which shows the copying apparatus of embodiment from the copying member side. 1 is an exploded perspective view showing a copying apparatus according to an embodiment. (A) is sectional drawing along the long side direction of a fixed block, (b) is sectional drawing along the short side direction of a fixed block. (A) is a perspective view which shows the concave spherical surface in the cyclic | annular porous material of embodiment, (b) is a perspective view which shows the concave spherical surface in the cyclic | annular porous material of a comparative example. Sectional drawing which shows the state which the copying member rock | fluctuated toward the side plate.

  Hereinafter, an embodiment embodying a copying apparatus will be described with reference to FIGS. In the following description, the vertical (vertical) direction of the copying apparatus is the Z-axis direction, and the directions orthogonal to the Z-axis direction and orthogonal to each other on the same horizontal plane are the X-axis direction and the Y-axis direction. .

  As shown in FIG. 3, the copying apparatus 10 of the present embodiment includes an apparatus base 11 and a copying member 21 as main components, and the copying apparatus 10 preferably includes a cover 26 and a magnet holder 23. And a side plate 31 and a detent ring 41. In the copying apparatus 10, the cover 26, the magnet holder 23, and the apparatus base 11 are assembled in order, and a pair of side plates 31 are attached to the side surfaces of the apparatus base 11, and the side plates 31 prevent rotation. The ring 41 is supported so as to be swingable. Note that the Z-axis direction in which the cover 26, the magnet holder 23, the apparatus base 11, and the copying member 21 are stacked is the axial direction of the copying apparatus 10.

  As shown in FIGS. 3 and 4A, the apparatus base 11 includes a rectangular cylindrical fixed block 12 and an annular porous material 13 provided on the surface of the fixed block 12 facing the copying member 21. Including. In a plan view when the fixed block 12 is viewed along the Z-axis direction, the fixed block 12 has a rectangular shape having a long side and a short side. The fixed block 12 has a through-hole 12c that penetrates the fixed block 12 in the axial direction at a center in the long side direction and the short side direction. In addition, the fixed block 12 has an annular air supply / drain groove 15 opened toward the annular porous material 13 so as to surround the through hole 12c. The air supply / discharge groove 15 communicates with an air supply / discharge port B provided in the fixed block 12 via an air passage 15a. The fixed block 12 has an accommodation recess 12d so as to surround the air supply / discharge groove 15, and the annular porous material 13 is accommodated inside the accommodation recess 12d.

  When pressurized air as a pressurized fluid is supplied to the air supply / discharge port B from a pressure supply source (not shown), the pressurized air passes through the air passage 15a and the air supply / discharge groove 15 to form an annular porous material. 13 and is ejected from the entire annular porous material 13. On the contrary, when air is sucked from the air supply / discharge port B, air is sucked from the entire annular porous material 13.

  As a forming material of the annular porous material 13, for example, a metal material such as sintered aluminum, sintered copper, and sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, sintered carbon, sintered ceramics, and the like can be used.

  As shown in FIG. 3, when the annular porous material 13 is viewed along the Z-axis direction of the copying apparatus 10, the annular porous material 13 has a flat shape having a circular through hole 13 d at the center. The through hole 13 d has a larger diameter than the through hole 12 c of the fixed block 12. The annular porous material 13 has a pair of long side edges 13b parallel to each other on the outer edge and an arc edge 13c that connects one end or the other end of the pair of long side edges 13b. The annular porous material 13 has a concave spherical surface 13a composed of a concave surface along a part of the spherical surface. The concave spherical surface 13a is formed in a region surrounded by the pair of long side edges 13b, the pair of arc edges 13c, and the inner periphery of the through hole 13d in the annular porous material 13. The flat shape along the outer edge of the annular porous material 13 is substantially the same as the flat shape along the inner peripheral edge of the accommodating recess 12d, and the annular porous material 13 is accommodated in the accommodating recess 12d.

  Here, as shown in FIG. 5A, the straight line M extending in the long side direction of the fixed block 12 and passing through the center of the short side is the diameter, and the long side direction and the short side direction of the fixed block 12 are A circle centered on the center is defined as a virtual circle C. The length of the straight line M serving as the diameter is longer than the length of the short side of the fixed block 12. The pair of arc edges 13 c among the outer edges of the concave spherical surface 13 a are located on the virtual circle C, and the pair of long side edges 13 b of the concave spherical surface 13 a cross the virtual circle C along the long side of the fixed block 12. It is in the position to do. Therefore, the virtual circle C is larger than a circle whose diameter is the short side of the fixed block 12. The annular porous material 13 (concave spherical surface 13 a) is present in a region surrounded by the virtual circle C on the fixed block 12 when the virtual circle C is projected onto the fixed block 12. More specifically, the outer periphery of the annular porous material 13 is in a state along a part of the virtual circle C.

  In the copying apparatus 10, the air ejected from the concave spherical surface 13 a of the annular porous material 13 passes through the outer peripheral edge of the concave spherical surface 13 a and is discharged to the outside of the copying apparatus 10, and also passes through the through hole 13 d and passes through the center portion. Is discharged. In order to smoothly discharge air, the fixed block 12 is provided with an exhaust port (not shown) that communicates with the inside of the fixed block 12. Therefore, the air that has passed through the through hole 13d of the annular porous material 13 is discharged to the outside from the exhaust port.

  As shown in FIG. 4 (a), the through hole 12c of the fixed block 12 is communicated with a vacuum port V provided in the fixed block 12 through an air suction passage 17a. When air is sucked from the evacuation port V and the air supply / discharge port B by a suction pump (not shown), air is sucked from the through hole 12 c and the concave spherical surface 13 a, and the copying member 21 is adsorbed to the apparatus base 11. Fixed.

  As shown in FIGS. 3, 4 (a) and 4 (b), the copying apparatus 10 includes a magnet holder 23 attached to the fixed block 12. In the fixed block 12, an O-ring 12f surrounding the through hole 12c is mounted on the mounting surface (upper surface) of the magnet holder 23. The magnet holder 23 includes a cylindrical holder main body 24 inserted through the through hole 12 c of the fixed block 12 and a rectangular plate-shaped flange 25 extending outward from the outer periphery of the holder main body 24.

  As shown in FIG. 1, FIG. 2, or FIG. 4A, when the magnet holder 23 is viewed in the Z-axis direction of the copying apparatus 10, the flange 25 has a rectangular shape having a long side and a short side. It is the same as the planar view shape. An O-ring 12f is interposed between the mounting surface of the fixed block 12 and the surface of the flange 25 facing the mounting surface, and the space between the fixed block 12 and the flange 25 is sealed by the O-ring 12f. The magnet holder 23 is attached to the fixed block 12 by screwing a screw 27 inserted through the flange 25 into the fixed block 12.

  An annular magnet 22 is attached to the outer peripheral surface of the tip of the holder body 24. The magnet 22 is disposed opposite to the inner peripheral surface of the annular porous material 13 in the X-axis and Y-axis directions. The magnet holder 23 has a recess 25 a that is recessed in a circular shape from the flange 25 toward the holder body 24, and the recess 25 a communicates with the internal space of the holder body 24. The flange 25 is provided with an O-ring 25b surrounding the recess 25a. A rectangular plate-like cover 26 is attached to the flange 25 with screws 26a, and a piston 40 having a circular shape when viewed in the Z-axis direction is accommodated in a recess 25a closed by the cover 26.

  A piston ring 40a is mounted on the outer peripheral surface of the piston 40. Due to the presence of the piston 40 and the piston ring 40a, the internal space of the recess 25a is a first pressure acting chamber 44 close to the cover 26 and a second pressure close to the holder main body 24. A pressure acting chamber 45 is partitioned. Air is supplied to and discharged from the first pressure working chamber 44 through a first air supply / discharge port N formed in the cover 26. On the other hand, air is supplied to and discharged from the second pressure working chamber 45 through a second air supply / discharge port R formed in the flange 25.

  One end of a rod 53 is attached to the piston 40 by a screw 42, and in this embodiment, the piston 40 and the rod 53 constitute an actuator. The rod 53 is inserted through the holder body 24. A packing 24 b is attached to the inner peripheral surface of the holder main body 24, and seals between the inner peripheral surface of the holder main body 24 and the outer peripheral surface of the rod 53. In the rod 53, a hemispherical surface is formed at the projecting end from the holder main body 24, and a support member 54 is supported on the hemispherical surface so as to be rotatable in a three-dimensional direction. 4A and 4B show the case where the rod 53 is in the locked position, and the copying member 21 is supported by the rod 53 via the support member 54 and pressed against the apparatus base 11. Being held. That is, the copying member 21 is locked to the apparatus base 11.

  The copying member 21 has a flat block shape when viewed in the Z-axis direction, and faces the annular porous material 13 in the Z-axis direction. In the copying member 21, a convex spherical surface 20a is formed on the surface facing the annular porous material 13, and the curvature radius of the convex spherical surface 20a is the same as the curvature radius of the concave spherical surface 13a. The convex spherical surface 20a of the copying member 21 is engaged so as to overlap the concave spherical surface 13a of the annular porous material 13, and the copying member 21 can swing along the concave spherical surface 13a.

  As shown in FIG. 3, the convex spherical surface 20a of the copying member 21 is flat when viewed from the Z-axis direction. The convex spherical surface 20a has a pair of long side edges 20b parallel to each other on the outer edge, and an arc edge 20c that connects one end or the other end of the pair of long side edges 20b. The convex spherical surface 20a is formed in a region surrounded by a pair of long side edges 20b and a pair of arc edges 20c.

  The copying member 21 has a base portion 28 formed on the opposite surface of the convex spherical surface 20a in the Z-axis direction. The base portion 28 is formed in a square cylinder shape. Then, a rotation restricting pin 32 is attached to the pair of opposing side walls 28 a of the base portion 28. Further, the rotation restricting pin 32 is mounted such that its tip protrudes outward from the base portion 28. The pair of rotation restricting pins 32 are arranged on the same axis along the direction connecting the pair of opposing side walls 28a.

  In the fixed block 12, a side plate 31 is fixed to each of the side surfaces 12h where both short sides are located in a plan view viewed in the axial direction. Note that the side surface 12h of the fixed block 12 has a stepped shape, the bulging portion 18a bulging outward, the bulging portion 18a sandwiched from both sides along the short side direction, and retracted from the bulging portion 18a. It has a mounting step 18b.

  As shown in FIG. 1, the side plate 31 is formed in a bifurcated shape when viewed from the front (when viewed from the Y-axis direction). In the side plate 31, the bulging portion 18 a is sandwiched between the tip portions of the bifurcated portions, and the screws 35 are screwed from the side plate 31 to the mounting step portion 18 b in a state where the tip portion is in contact with the mounting step portion 18 b. Thus, the fixing block 12 is fixed to the side surface 12h. The outer surface of the side plate 31 and the outer surface of the bulging portion 18a are flush with each other.

  As shown in FIGS. 1 and 6, an opening S is formed between the inner surface of the bifurcated portion of the side plate 31 and the lower surface of the bulging portion 18a. Further, as shown in FIG. 4A, each side plate 31 is provided with a rotation restricting pin 34. Further, the rotation restricting pin 34 is mounted such that its tip protrudes toward the base portion 28. When the side plate 31 is attached to the fixed block 12, the pair of rotation restricting pins 34 face each other and are disposed on the same axis. In the present embodiment, the pair of rotation restricting pins 34 are linearly arranged along the Y-axis direction.

  As shown in FIGS. 4A and 4B, in the copying apparatus 10, the rotation restricting pins 32 and 34 are arranged at the same height in the Z-axis direction. The central axes of the rotation restricting pins 32 and 34 are arranged at the same height position. Further, the rotation restriction pin 32 of the copying member 21 and the rotation restriction pin 34 of the side plate 31 are arranged orthogonally. In this embodiment, they are arranged orthogonally on an XY plane formed by the X axis and the Y axis. The rotation restricting pins 32 and the rotation restricting pins 34 are alternately arranged at intervals of 90 degrees around the Z axis.

  As shown in FIGS. 1 and 3, the rotation prevention ring 41 is formed in a square ring shape surrounding the base portion 28 of the copying member 21. The rotation prevention ring 41 is supported so as to surround the base portion 28 of the copying member 21 on the inner peripheral surface thereof. The anti-rotation ring 41 has four pin insertion grooves 41a formed at equal intervals. In each pin insertion groove 41a, the rotation restricting pin 32 of the copying member 21 and the rotation restricting pin 34 of the side plate 31 are slidably engaged.

  A base plate 51 is fixed to the base portion 28 of the copying member 21 by screws 52, and a tool (not shown) is fixed to the base plate 51. Therefore, a tool is integrated with the copying member 21 via the base plate 51, and the tool swings integrally with the copying member 21. Therefore, the base plate 51 and the tool can also be regarded as a part of the copying member 21 and the center of curvature of the copying member 21 is on the tip surface of the tool (copying member 20) (not shown). Becomes a surface that contacts the workpiece, that is, a contact surface.

  FIG. 5A shows the annular porous material 13 of the present embodiment. On the other hand, FIG. 5B shows an annular porous material 60 of a comparative example. In the comparative example, the fixed block 12 is the same as that of the embodiment. In the comparative example, the receiving block 12 d is formed in the fixed block 12 concentrically with the through hole 12 c, and an annular annular porous material 60 is received in the receiving recess 61. The annular porous material 60 has an annular concave spherical surface 60a in plan view. When the circular porous material 60 (concave spherical surface 60a) of the comparative example is projected onto the fixed block 12 with a circle having a diameter that is substantially the same as the short side of the fixed block 12, the outer peripheral edge of the circle, It exists in the area | region enclosed with the inner periphery of the through-hole 12c. In this case, in the annular porous material 13 of the embodiment, the area of the concave spherical surface 13 a is larger than the area of the concave spherical surface 60 a of the annular porous material 60.

Hereinafter, the operation and action of the copying apparatus 10 in the present embodiment will be described.
The copying apparatus 10 is used, for example, in a state where the copying member 21 including the base plate 51 and the tool is arranged below the fixed block 12. When air is supplied from the first air supply / exhaust port N to the first pressure working chamber 44 in this state, the piston 40 is displaced downward, and the rod 53 and the support member 54 are lowered to move to the unlocking position. The copying member 21 and the support member 54 are separated from each other. The unlocking position is a position where the copying member 21 can swing without pressing the copying member 21 against the copying apparatus 10. When pressurized air is supplied from the air supply / discharge port B of the copying apparatus 10, the pressurized air is ejected from the entire concave spherical surface 13 a via the air passage 15 a and the air supply / discharge groove 15.

  The copying member 21 is in a state where the convex spherical surface 20a can swing along the concave spherical surface 13a, and static pressure is brought to the interface between the concave spherical surface 13a and the convex spherical surface 20a. In response to the pressure of the pressurized air, it floats from the device base 11 (fixed block 12). At the same time, the copying member 21 is attracted to the fixed block 12 by the magnetic force of the magnet 22. Then, the copying member 21 swings in a state where the concave spherical surface 13a and the convex spherical surface 20a are not in contact with each other by a balance between the force that floats from the apparatus base 11 (the floating load) and the force attracted to the fixed block 12. Held possible.

  In this state, in the copying apparatus 10, the tip surface of a tool (not shown) that is a part of the copying member 21 is pressed against a specific surface of an object (such as a substrate). At this time, if the object is inclined along the Y-axis direction, the tool that is a part of the copying member 21 swings around the X-axis so as to follow the inclination angle of the specific surface of the object. At this time, as shown in FIG. 6, the end portion of the long side edge enters the opening S in the swinging copying member 21.

  Thereby, even if the target object is inclined in the Y-axis direction, the tip surface of the tool follows the specific surface of the target object in parallel. On the other hand, if the target object is inclined along the X-axis direction, the tool that is a part of the copying member 21 swings around the Y-axis so as to follow the inclination angle of the specific surface of the target object. Thereby, even if the target object is inclined in the X-axis direction, the tip surface of the tool follows the specific surface of the target object in parallel.

  When the copying operation is finished, the supply of pressurized air to the air supply / discharge port B is stopped, and the injection of pressurized air from the annular porous material 13 is stopped. Then, air is evacuated from the evacuation port V and the air supply / discharge port B, and air is supplied to the second pressure working chamber 45 from the second air supply / discharge port R. Then, air is sucked from the through hole 12c and the concave spherical surface 13a, and the piston 40 receives the pressure of the second pressure acting chamber 45, so that the rod 53 and the support member 54 move from the unlocked position to the locked position. The lock position is a position where the copying member 21 is pressed against the apparatus base 11 and held by the rod 53 and the support member 54.

  Then, the copying member 21 is pressed against the annular porous material 13 of the apparatus base 11 by suction by evacuation, pressing from the support member 54, and magnetic force of the magnet 22. As a result, the copying member 21 is held on the apparatus base 11 so as not to swing, and the tool that is a part of the copying member 21 is held in a state in which the tip surface thereof follows the specific surface of the object. Thus, the convex spherical surface 20a of the copying member 21 is pressed against the concave spherical surface 13a by suction by vacuuming, pressing from the support member 54, and the magnetic force of the magnet 22, and the copying member 21 swings by this holding force. Locked to impossible.

According to the above embodiment, the following effects can be obtained.
(1) In the copying apparatus 10, the concave spherical surface 13a of the annular porous material 13 has a flat shape having a pair of long side edges 13b and a pair of arc edges 13c. For example, the area of the concave spherical surface 13a can be increased compared to the case where the concave spherical surface 13a is circular with the short side of the fixed block 12 as a diameter.

  When installing a plurality of copying apparatuses 10 side by side, it is preferable that their installation space can be made as small as possible. Therefore, in order to reduce the size of the copying apparatus having a square body in plan view and having a circular concave spherical surface, it is conceivable to make the body shorter and thinner in the parallel direction. When the body is thinned, a concave spherical surface 13a is formed by projecting a circle whose diameter is the maximum length that can be secured in the long side direction of the device base 11, instead of a circular concave concave spherical surface in a plan view. . For this reason, the area of the concave spherical surface 13a can be increased as compared with a concave spherical surface having a circular shape in plan view, which is simply a reduced diameter of the concave spherical surface. As a result, it is possible to reduce the size of the copying apparatus 10 while suppressing a decrease in the flying load and holding force of the copying member 21.

  (2) In the copying apparatus 10, the concave spherical surface 13a of the annular porous material 13 has a flat shape including a pair of long side edges 13b and a pair of arc edges 13c. For example, the effective area of the concave spherical surface 13a can be widened as compared with the case where the concave spherical surface 13a is circular with the short side of the fixed block 12 as a diameter. For this reason, the effective area of the concave spherical surface 13a can be increased while the copying apparatus 10 is downsized. Then, pressurized air is supplied and discharged between the concave spherical surface 13a having a wide effective area and the convex spherical surface 20a facing each other, thereby forming an air layer. For this reason, for example, when a heating device is attached to the base plate 51 as a tool, heat from the heating device is blocked by the air layer, and heat transfer from the annular porous material 13 to the fixed block 12 side is suppressed. It is possible to suppress deterioration of the magnet 22 and the piston ring 40a on the fixed block 12 side.

  (3) Pressurized air is supplied and discharged between the concave spherical surface 13a and the opposed convex spherical surface 20a, and the pressurized air flows along the convex spherical surface 20a and the concave spherical surface 13a, and then each spherical surface 13a. , 20a is discharged to the outside of the copying apparatus 10. At this time, the effective area of the concave spherical surface 13a was made as wide as possible, and the outer circumference of the concave spherical surface 13a was made as long as possible. Therefore, the distance and flow rate of the pressurized air flowing along the concave spherical surface 13a can be earned from the supply of the pressurized air to the discharge to the outside of the copying apparatus 10, and the concave spherical surface 13a and the convex spherical surface 20a can be added. Heat exchange efficiency with compressed air can be increased. As a result, for example, when a heating device is attached to the base plate 51, it is possible to make it difficult to transfer heat from the heating device to the fixed block 12 side than the annular porous material 13, and a magnet on the fixed block 12 side. 22 and piston ring 40a can be prevented from deteriorating. Further, the temperature rise of the outer surface of the copying apparatus 10 can be suppressed by the pressurized air discharged from the outer peripheral edge of each of the spherical surfaces 13a and 20a to the outside of the copying apparatus 10.

  (4) The copying apparatus 10 includes a magnet 22 for holding the copying member 21. The magnet 22 faces the copying member 21 through the through hole 13 d of the annular porous material 13. Therefore, the annular porous material 13 requires a through hole 13d for exposing the magnet 22, so that the area of the concave spherical surface 13a becomes smaller when the annular porous material 13 becomes smaller. On the other hand, in the present embodiment, the annular porous material 13 is flattened, so that the effective area of the concave spherical surface 13a is not reduced even though the through hole 13d is provided. Can hold.

  (5) The magnet holder 23 is configured to have a holder body 24 that is inserted into the through hole 12 c of the fixed block 12 and a flange 25 that is stacked on the fixed block 12. Then, a screw 27 inserted through the flange 25 was screwed into the fixed block 12 to fix the magnet holder 23 to the fixed block 12. Therefore, it is not necessary to provide a place where the screw 27 is screwed in the through hole 12c of the fixed block 12, and it is possible to contribute to downsizing of the copying apparatus 10.

  (6) The housing recess 12 d of the fixed block 12 is flat according to the flat shape of the annular porous material 13. In the fixed block 12, the part surrounding the housing recess 12d is a part that does not function as a bearing, and the mounting step part 18b and the bulging part 18a are formed in the part that does not function. And the side plate 31 was attached to the attachment step part 18b so that the bulging part 18a may be pinched | interposed with the side plate 31. FIG. Therefore, the side plate 31 can be attached by effectively using a part not related to the function of the copying apparatus 10, and the copying apparatus 10 can be downsized.

(7) The copying apparatus 10 includes a magnet 22 for holding the copying member 21. The magnet 22 faces the copying member 21 through the through hole 13 d of the annular porous material 13. Pressurized air from the air supply / discharge port B is discharged into the through hole 13d. For this reason, an air flow is generated around the magnet 22 and the heat dissipation of the magnet 22 can be enhanced. As a result, the temperature rise of the magnet 22 is suppressed, decrease in the magnetic force of the magnet 22 is suppressed.

  (8) In the copying apparatus 10, the cover 26, the flange 25 of the magnet holder 23, the fixed block 12, and the copying member 21 are laminated to form an outline. And the cover 26, the flange 25, the fixed block 12, and the copying member 21 are rectangular parallelepiped shapes. For this reason, the outline of the copying apparatus 10 can be formed in a rectangular parallelepiped shape and can be thinned.

  (9) The bulging portion 18a is formed on the side surface of the fixed block 12, and the forked side plate 31 is attached so as to sandwich the bulging portion 18a. An opening S was defined between the lower surface of the bulging portion 18 a and the inner surface of the bifurcated portion of the side plate 31. Even if the copying member 21 swings in the Y-axis direction (the direction along the long side edge), the end of the copying member 21 is allowed to enter the opening S, and the end of the copying member 21 is the side plate. It was made not to interfere with 31. Therefore, even if the copying apparatus 10 is downsized, the swing range of the copying member 21 is not narrowed.

  (10) A bifurcated side plate 31 is attached so as to sandwich the bulging portion 18 a of the fixed block 12, and an opening S is defined between the lower surface of the bulging portion 18 a and the inner side surface of the bifurcated portion of the side plate 31. did. The pressurized air that is supplied between the concave spherical surface 13 a and the convex spherical surface 20 a and flows along the spherical surfaces 13 a and 20 a is discharged from the opening S to the outside of the copying apparatus 10. For this reason, the temperature rise of the outer surface of the copying apparatus 10 can be suppressed by the pressurized air discharged from the opening S.

The above embodiment may be modified as follows.
○ The bulging portion 18a and the mounting step portion 18b are formed on the fixed block 12, and the side plate 31 is mounted on the mounting step portion 18b, but the bulging portion 18a and the mounting step portion 18b are not formed on the fixed block 12, The side plate 31 may be attached to the flat side surface 12h.

  The piston 40 and the rod 53 are used as the actuator for pressing and fixing the copying member 21 to the apparatus base 11, but a diaphragm may be used instead of the piston 40.

  The copying apparatus 10 has been embodied as a mechanism that adsorbs and holds the copying member 21 on the apparatus base 11 by pressing with the piston 40 and the rod 53, the magnetic force of the magnet 22, and suction by vacuuming as an actuator. Not exclusively. The copying apparatus 10 may be of a type that does not include an actuator and that holds the copying member 21 on the apparatus base 11 only by suction by vacuuming. In short, the method of holding the copying member 21 on the apparatus base 11 may be arbitrarily selected from at least one of suction by vacuuming, pressing by an actuator, and magnetic force of the magnet 22.

In the concave spherical surface 13a, if the length of the straight line M that is the diameter of the virtual circle C is longer than the short side of the fixed block 12, the length may be appropriately changed.
The piston 40 has a circular shape in plan view in the Z direction, but may have a flat shape such as an ellipse.

Next, the technical idea that can be grasped from the above embodiment and other examples will be described below.
(A) The copying apparatus in which the concave spherical surface is flat when viewed in the axial direction.
(B) A copying apparatus in which the actuator is a piston and a rod integrated with the piston.

  (C) The actuator can take a lock position for pressing and holding the copying member against the apparatus base, and a lock releasing position for releasing the lock without pressing the copying member against the apparatus base. Copy device.

  C: virtual circle as a circle, M ... straight line, S ... opening, 10 ... copying apparatus, 11 ... device base, 12h ... side surface, 13a ... concave spherical surface, 18a ... bulge, 18b ... mounting step, 20a ... convex spherical surface, 21 ... copying member, 20b ... long side edge, 20c ... arc edge, 31 ... side plate.

Claims (5)

A copying member having a convex spherical surface;
An apparatus base having a concave spherical surface engaged with the convex spherical surface,
The copying member can float with respect to the apparatus base under the pressure of air. The copying member is brought into contact with an object while swinging along the spherical surface, and is integrally contacted with the copying member. In a copying apparatus for copying a surface so as to be parallel to a specific surface of an object,
When the direction in which the apparatus base and the copying member are stacked is an axial direction of the copying apparatus, the apparatus base has a long side and a short side in a plan view of the apparatus base viewed in the axial direction. The device has a rectangular block shape, and the concave spherical surface is projected onto the device base when a circle centered on the center of the device base and having a straight line with a diameter longer than the short side of the device base is projected onto the device base. A copying apparatus, wherein the copying apparatus is formed in a region surrounded by the circle on a base , and an outer edge of the concave spherical surface is in a state along a part of the circle .
  The device base includes an annular porous material, and the annular porous material has a pair of long side edges and one end of the pair of long side edges in a plan view of the device base viewed in the axial direction. 2. The copying apparatus according to claim 1, wherein the copying apparatus has an arc edge connecting each other or the other ends, and the concave spherical surface is provided in the annular porous material. In a plan view of the apparatus base viewed in the axial direction, the copying member has a block shape having a pair of long side edges and an arc edge connecting one end and the other end of the pair of long side edges. The shape of the convex spherical surface in plan view is a shape obtained by projecting a circle centered on the center of the copying member and having a circular arc edge of the copying member as a part of the circumference onto the copying member. The copying apparatus according to claim 1 or 2 . On the side surface on the short side of the apparatus base, an outwardly bulging portion and an attachment step portion recessed from the bulging portion are provided, and each side surface on the short side has a bifurcated shape. side plate is attached to the mounting stepped portion in a state sandwiching the bulging portion one any one of claims 1 to 3, wherein the copying member is disposed inside the pair of side plates The copying apparatus according to item . The space surrounded by the bifurcated portion of the side plate and the bulging portion is provided with an opening into which the end portion of the copying member enters when swinging in the direction along the long side edge of the copying member. The copying apparatus according to claim 4 .