TWI598205B - Profiling device - Google Patents

Description

Copying device

The present invention relates to a profiling apparatus for performing a profiling operation in such a manner that an abutting surface integrated with a contoured member is parallel to a specific surface of the object.

The copying device includes a device base having a concave hemispherical surface and a contoured member having a convex hemispherical surface (for example, refer to Japanese Laid-Open Patent Publication No. 2002-359263). The concave hemispherical surface of the device base and the convex hemisphere of the contoured member are set to have the same radius of curvature. The contoured member is attached to the apparatus base in such a manner that the two hemispheres are superposed. The contoured member floats from the concave hemispherical surface and oscillates along the concave hemispherical surface by the air ejected from the concave hemispherical surface.

In such a profiling device, when the abutting surface of the contoured member contacts the specific surface of the workpiece, the contoured member is rocked along the specific surface of the workpiece, and the abutting surface is parallel to the specific surface of the workpiece. That is, the contoured member can perform a contouring operation on the workpiece. Next, a suction force is generated by a negative pressure between the concave hemispherical surface of the apparatus base and the convex hemispherical surface of the contoured member, and the contoured member is adsorbed to the apparatus base. The adsorption is used to lock the contoured member and thereby maintain the profiled state.

"The subject to be solved by the invention"

Since the workpiece that the mimetic member mimics can be miniaturized, the miniaturization of the copying device has been desired. Once the profiling device is miniaturized, the effective area of the concave hemispherical surface of the device abutment and the convex hemispherical surface of the profiling member also becomes small. As a result, the force (floating load) for ejecting the air to float the contour member and the force (supporting force) for attracting the air to support the contour member are also reduced. Further, in some cases, a heating device is mounted on the contouring member in the copying device, and the heating device is used as a part of the contouring member. In this case, once the contouring device is miniaturized and the effective area of the concave hemispherical surface and the convex hemispherical surface is reduced, the heat transferred by the heating device cannot be sufficiently dissipated by the contoured member. Therefore, there is a possibility that the member (for example, the magnet for adsorption or the gasket for airtightness) provided in the copying device is deteriorated by heat.

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a copying apparatus capable of suppressing deterioration of a floating load and a supporting force and deterioration due to heat, and also achieving downsizing. "Methods for Solving Problems"

A copying device for solving the above problems, comprising: a contoured member having a convex spherical surface; and a device base having a concave spherical surface for receiving the convex spherical surface; the contoured member is capable of being subjected to air pressure And floating from the base of the apparatus, the arching member is swayed along the concave spherical surface, and the abutting surface that is integrated with the contoured member abuts against the object, and the abutting surface is parallel. The profiling operation is performed in a manner specific to the object. When the direction in which the apparatus base overlaps with the contour member is the axial direction of the contouring device, the apparatus base is a rectangular shape having a long side and a short side when viewed from the axial direction. When a circle having a diameter longer than a short side of the base of the apparatus is centered on the center of the apparatus base, when the axial direction is projected on the base of the apparatus, the concave spherical surface is formed in the foregoing Within the area of the abutment of the aforementioned device surrounded by a circle. "The effect of invention"

According to the present invention, it is possible to provide a copying apparatus capable of suppressing deterioration due to floating load and supporting force and deterioration due to heat; and miniaturization can be achieved.

According to an embodiment of the present invention, there is provided a copying apparatus comprising: a contoured member having a convex spherical surface; and a device base having a concave spherical surface for receiving the convex spherical surface; wherein the contoured member is capable of Floating from the base of the apparatus by the air pressure, and abutting the contoured member along the concave spherical surface, the abutting surface integrated with the contoured member abuts against the object, and The contouring operation is performed in such a manner that the abutting surface is parallel to a specific surface of the object. When the direction in which the device base overlaps with the contour member is the axial direction of the contouring device, the device base has a rectangular shape having a long side and a short side when viewed from the axial direction. When a circle having a diameter longer than a short side of the base of the apparatus is centered on the center of the apparatus base, when the axial direction is projected on the base of the apparatus, the concave spherical surface is formed in the circle The area of the aforementioned device abutment enclosed.

The diameter of the aforementioned circle is preferably equal to or smaller than the length of the longitudinal direction of the apparatus base.

Preferably, the device base includes an annular porous body having a pair of long sides and a pair of circular arc sides, each of which is opposite to the pair of long sides, in a plan view of the axial direction. One end and the other end are connected to each other; and the concave spherical surface is provided on the annular porous body.

Preferably, the convex spherical surface of the contoured member has a pair of long sides and a pair of circular arc sides, each of which is opposite to the pair of long sides, in a plan view of the axial direction One end and the other end are connected to each other.

The pair of circular arc sides of the convex spherical surface may be formed so as to overlap the pair of circular arc sides of the annular porous body.

Preferably, the side faces of the short side of the device base have a protruding portion protruding outward and two mounting segments; the mounting segments are formed by sandwiching the protruding portions from both sides in the short side direction, and The protruding portion is further recessed; in each of the side faces of the short side, a U-shaped side plate is respectively disposed on the two mounting sections to sandwich the protruding portion between the two ends thereof, and The aforementioned contoured member is disposed between a pair of side plates.

Preferably, the copying device has an opening surrounded by the side plate and the protruding portion, and when the contoured member is rocked along a long side thereof, an end portion of the side of the contoured member enters the foregoing Opening.

Hereinafter, an embodiment of the copying device of the present invention will be described with reference to Figs. 1 to 6 . In the following description, the upper and lower (vertical) directions of the copying device are referred to as the Z-axis direction, and the directions perpendicular to the Z-axis direction and vertically interlaced on the same horizontal plane are referred to as the X-axis direction and the Y-axis direction. .

As shown in Fig. 3, the copying device 10 of the present embodiment is a main constituent member having the device base 11 and the contoured member 21. The copying device 10 preferably includes a cover 26, a magnet support member 23, a pair of side plates 31, and a check ring 41. In the copying device 10, a cover 26, a magnet support member 23, and a device base 11 are sequentially mounted, and a pair of side plates 31 are mounted on the side of the device base 11, and are swingably supported by the side plates 31. Stop the loop 41. The direction in which the cover 26, the magnet support 23, the apparatus base 11, and the contoured member 21 are stacked is the Z-axis direction, that is, the axial direction of the contouring device 10.

As shown in FIG. 3 and FIG. 4(a), the apparatus base 11 includes a quadrangular cylindrical fixing block 12 and an annular porous body 13; the annular porous body 13 is mounted on the fixed block 12. The opposing faces of the contoured members 21 are opposed to each other. When viewed in plan from the Z-axis direction, the fixed block 12 has a rectangular shape having long sides and short sides. The fixing block 12 has a through hole 12c that penetrates the fixing block 12 in the axial direction at the center in the longitudinal direction and at the center in the short-side direction. Further, the fixing block 12 further has an annular air supply groove 15 that surrounds the through hole 12c and has an opening toward the annular porous body 13. The air supply groove 15 communicates with the air provided to the fixed block 12 via the air passage 15a. Further, the fixed block 12 has a housing recess 12d that surrounds the air supply groove 15, and an annular porous body 13 is accommodated inside the housing recess 12d.

When the pressurized air serving as the pressurized fluid is supplied to the air supply and exhaust port B from a pressure supply source (not shown), the pressurized air is supplied to the annular porous body via the air passage 15a and the air supply passage 15 . 13, and the entire annular porous body 13 is ejected. Conversely, when air is sucked from the drain B by air, air is taken up from the entire annular porous body 13.

As the material for forming the annular porous body 13, for example, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel can be used. In addition to this, a synthetic resin material such as a sintered trifluorochemical resin, a sintered tetrafluorinated resin, a sintered nylon resin, a sintered polyacetal resin, or a material such as sintered carbon or sintered ceramics may be used.

As shown in Fig. 3, when viewed in plan from the Z-axis direction of the copying device 10, the shape of the annular porous body 13 is an oblate shape having a circular through hole 13d at the center, that is, as a straight line The shape of the ends of the circle. The diameter of the through hole 13d is larger than the diameter of the through hole 12c of the fixed block 12. The annular porous body 13 has a pair of long side edges 13b parallel to each other, and has a pair of circular arc sides 13c which are respectively connected to one end or the other end of the pair of long side edges 13b. The annular porous body 13 has a concave spherical surface 13a which is recessed along one of the spherical surfaces. The concave spherical surface 13a is formed in a region surrounded by one of the long side 13b, the pair of circular arc sides 13c, and the inner periphery of the through hole 13d of the annular porous body 13. The oblate shape defined by the outer side of the annular porous body 13 is approximately the same as the oblate shape defined by the inner periphery of the housing recess 12d, and the annular porous body 13 is housed in the housing recess 12d.

In Fig. 5(a), a straight line M extending in the longitudinal direction of the fixed block 12 and passing through the center in the short-side direction is exemplified as a center in the longitudinal direction of the fixed block 12, and a center in the short-side direction. The imaginary circle C for the center. The length of the straight line M, although larger than the short side length of the fixed block 12, does not exceed the maximum length of the long side direction of the fixed block 12. A pair of circular arc sides 13c of the outer side of the concave spherical surface 13a are located on the imaginary circle C, and a pair of long side edges 13b of the outer side of the concave spherical surface 13a cross the imaginary circle C along the long side of the fixed block 12. Therefore, the imaginary circle C is a circle larger than a circle having a diameter of the short side of the fixed block 12. When the imaginary circle C is projected on the fixed block 12, the annular porous body 13 (the concave spherical surface 13a) is present in a region surrounded by the imaginary circle C on the fixed block 12. More specifically, a part of the outer side of the annular porous body 13 coincides with a part of the circumference of the imaginary circle C.

In the copying device 10, the air ejected from the concave spherical surface 13a of the annular porous body 13 is discharged to the outside of the copying device 10 through the periphery of the concave spherical surface 13a, and is passed to the center through the through hole 13d. The department is discharged. In order to smoothly discharge the air, an exhaust enthalpy (not shown) that communicates with the inside of the fixed block 12 may be provided. Thereby, the air that has passed through the through hole 13d of the annular porous body 13 can be discharged to the outside by the exhaust gas.

As shown in FIG. 4(a), the through hole 12c of the fixed block 12 communicates with the vacuum suction port V provided in the fixed block 12 via the air suction passage 17a. When air is sucked from the vacuum suction 埠V and the air to the drain 埠B by an air pump (not shown), since the air is sucked from the through hole 12c and the concave spherical surface 13a, the contoured member 21 is adsorbed and fixed to the apparatus base. 11.

As shown in FIGS. 3, 4(a) and 4(b), the copying device 10 has a magnet support 23 attached to the fixed block 12. On the upper surface of the fixed block 12, that is, the surface on which the magnet support member 23 is mounted, an O-ring 12f surrounding the through hole 12c is provided. The magnet support member 23 has a cylindrical support body 24 through which the support body can be inserted through the through hole 12c of the fixed block 12, and a rectangular plate-shaped flange 25 extending outward from the outer periphery of the support body 24.

As shown in FIG. 1, FIG. 2 or FIG. 4(a), when the magnet support 23 is viewed in plan from the Z-axis direction of the copying device 10, the shape of the top view of the flange 25 is the top view of the fixed block 12. The shapes are the same, and each has a rectangular shape with long sides and short sides. On the upper surface of the fixed block 12 and the surface facing the flange 25 of the upper surface, an O-ring 12f is interposed. The fixing block 12 and the flange 25 can be sealed by the O-ring 12f. The magnet support member 23 is attached to the fixed block 12 by screwing the screw 27 of the insertion flange 25 to the fixed block 12.

An annular magnet 22 is mounted on the outer peripheral surface of the front end of the support body 24. The magnet 22 is disposed to face the inner peripheral surface of the annular porous body 13 in the X-axis and Y-axis directions. The magnet support member 23 has a circular recessed portion 25a recessed from above the flange 25 toward the support body 24, and the recessed portion 25a is in communication with the internal space of the support body 24. In the flange 25, an O-ring 25b surrounding the recess 25a is provided. The flange 25 has a rectangular plate-shaped cover 26 that is attached by a screw 26a. The recessed portion 25a closed by the cover 26 houses a piston 40 that is circular when viewed from the Z-axis direction.

The piston ring 40a is mounted on the outer circumferential surface of the piston 40. Since the piston 40 and the piston ring 40a are present, the internal space of the recess 25a can be divided into: a first pressure acting chamber 44 close to the cover 26, and a support body The second pressure acting chamber 45 of 24. In the first pressure acting chamber 44, air is supplied and discharged through the first air supply and exhaust port N formed in the cover 26. On the other hand, in the second pressure acting chamber 45, air is supplied and discharged through the second air supply port R formed in the flange 25.

In the present embodiment, the actuator is constituted by the piston 40 and the rod 53, and one end portion of the rod 53 is attached to the piston 40 by a screw 42. The rod 53 is inserted through the support body 24. A gasket 24b is provided on the inner circumferential surface of the support body 24 to seal between the circumferential surface of the support body 24 and the outer circumferential surface of the rod 53. In the rod 53, the protruding end protruding from the support body 24 is formed with a hemispherical surface, and the support member 54 is supported on the hemispherical surface so as to be rotatable in a three-dimensional direction. 4(a) and 4(b) show the case where the lever 53 is in the locked position, the contour member 21 is supported by the rod 53 via the support member 54, and the contour member 21 is pressed, Supported on the device base 11 . That is, the contoured member 21 is locked to the state of the apparatus base 11.

The contoured member 21 has an oblate shape when viewed in plan in the Z-axis direction, and faces the annular porous body 13 in the Z-axis direction. A convex spherical surface 20a is formed on the opposing surface of the contoured member 21 and the annular porous body 13. The convex spherical surface 20a has a radius of curvature which is the same as the radius of curvature of the concave spherical surface 13a. The convex spherical surface 20a of the contoured member 21 is accommodated so as to be superposed on the concave spherical surface 13a of the annular porous body 13, and the contoured member 21 can be rocked along the concave spherical surface 13a.

As shown in FIG. 3, when viewed from the Z-axis direction, the outer side of the convex spherical surface 20a of the contoured member 21 has an oblate shape. Specifically, the outer side of the convex spherical surface 20a has a pair of long side edges 20b parallel to each other, and has a pair of circular arc sides 20c which are respectively connected to one end or the other end of the pair of long side edges 20b, respectively. The convex spherical surface 20a is formed in a region surrounded by a pair of long side edges 20b and a pair of circular arc sides 20c. As shown in Fig. 2, one of the convex spherical surfaces 20a is formed so as to overlap the circular arc side 13c with respect to one of the annular porous bodies 13 shown in Fig. 5(a).

A square-shaped seat portion 28 is formed on a surface of the contour member 21 opposite to the convex spherical surface 20a in the Z-axis direction. In the seat portion 28, a rotation restricting pin 32 is attached to a pair of opposing side walls 28a. The front end of the rotation restricting pin 32 protrudes to the outside of the seat portion 28. A pair of rotation restricting pins 32 are disposed on the same axis orthogonal to the pair of opposite side walls 28a.

When viewed in a plan view from the Z-axis direction, the side plates 31 are fixed to the respective side faces 12h on the short side of the fixed block 12. The side surface 12h of the fixed block 12 is set to have a height difference. Specifically, each of the side faces 12h has two protruding portion portions 18a that protrude to the outside and two protruding portion portions 18b that are recessed from the protruding portion 18a by the both sides in the short-side direction.

As shown in Fig. 1, when viewed from the front side (when viewed from the Y-axis direction), the side plates 31 are formed in a U shape. The side plate 31 is fixed to the side surface 12h of the fixed block 12 by screws 35. The fixing operation of fixing the side plate 31 to the side surface 12h is performed such that both end portions of the side plate 31 abut against the mounting portion 18b so that the protruding portion 18a is sandwiched between the both end portions. In this state, the side plate 31 is fixed to the attachment portion 18b by the screw 35. The outer surface of the side plate 31 is flush with the outer surface of the projection 18a to become a surface.

As shown in FIGS. 1 and 6, the side plate 31 is attached to the side surface 12h, and an opening S surrounded by the side plate 31 and the protruding portion 18a is formed. As shown in FIG. 4(a), a rotation restricting pin 34 is attached to each of the side plates 31. The front end of the rotation restricting pin 34 protrudes toward the seat portion 28. When the side plates 31 are mounted on the fixed block 12, the pair of rotation restricting pins 34 are disposed on the same axis, and the front ends thereof are opposed to each other. In the present embodiment, the pair of rotation restricting pins 34 are arranged in a straight line along the Y-axis direction.

As shown in FIGS. 4(a) and 4(b), each of the rotation restricting pins 32 and 34 is disposed at the same height in the Z-axis direction. The central axes of the respective rotation restricting pins 32, 34 are at the same height. The rotation restricting pin 32 of the contoured member 21 and the rotation restricting pin 34 of the side plate 31 are arranged orthogonally. In the present embodiment, the rotation restricting pin 32 and the rotation restricting pin 34 are arranged orthogonally in the XY plane formed by the X-axis and the Y-axis, and are alternately arranged around the Z-axis at intervals of 90 degrees.

As shown in FIGS. 1 and 3, the check ring 41 is formed in a quadrangular ring shape. The rotation preventing ring 41 is supported by the rotation restricting pin 32 of the contour member 21 and the rotation restricting pin 34 of the side plate 31 so that the inner peripheral surface surrounds the seat portion 28 of the contoured member 21. In the check ring 41, four pin insertion grooves 41a which are spaced at equal intervals are formed. The rotation restricting pin 32 of the contoured member 21 and the rotation restricting pin 34 of the side plate 31 are slidably engaged with the respective pin insertion grooves 41a.

The seat portion 28 of the contoured member 21 has a seat plate 51 fixed by a screw 52, and a tool (not shown) is fixed to the seat plate 51. Therefore, the tool is integrated with the contoured member 21 via the seat plate 51, and the tool can be integrally shaken with the contoured member 21. Therefore, the seat plate 51 and the tool can be regarded as a part of the contoured member 21. Since the center of curvature of the contoured member 21 is located on the distal end surface of the tool (the contoured member 21) (not shown), the distal end surface of the tool (not shown) becomes a surface that abuts against the workpiece, that is, the abutting surface.

The annular porous body 13 of the present embodiment is disclosed in Fig. 5(a). On the other hand, the annular porous body 60 of the comparative example is disclosed in Fig. 5 (b). The other portions of the fixing block 12 of the comparative example are the same as those of the embodiment except that the diameter of the housing recess 61 is smaller than the diameter of the housing recess 12d of the embodiment. In the comparative example, the fixing block 12 is formed with a housing recess 61 that is concentric with the through hole 12c, and the annular recessed body 60 is accommodated in the housing recess 61. The annular porous body 60 has a concave spherical surface 60a which is annular in plan view. When a circle having a diameter almost the same as the short side of the fixed block 12 is projected onto the fixed block 12, the annular porous body 60 (concave spherical surface 60a) of the comparative example exists on the circumference of the circle, and The area surrounded by the inner periphery of the through hole 12c is enclosed. In this case, the area of the concave spherical surface 13a of the annular porous body 13 of the embodiment is larger than the area of the concave spherical surface 60a of the annular porous body 60 of the comparative example.

Hereinafter, the operation and action of the copying device 10 in the present embodiment will be described.

For example, the copying device 10 is used in a state in which the contour member 21 including the seat plate 51 and the tool is disposed below the fixed block 12. In this state, when the air is supplied to the first pressure application chamber 44 by the first air supply port, the piston 40 is displaced downward, and the rod 53 and the support member 54 are lowered to move to the lock release. The position, the contoured member 21 and the support member 54 are separated. Further, the so-called lock release position means that the finger lever 53 and the support member 54 do not press the profile member 21 to the apparatus base 11 but can swing the contour member 21. Thereafter, when the pressurized air is supplied to the discharge port B by the air of the copying device 10, the pressurized air is ejected from the entire concave spherical surface 13a via the air passage 15a and the air supply groove 15.

The convex spherical surface 20a of the contoured member 21 is in a state of being rockable along the concave spherical surface 13a, so that a static pressure is generated between the concave spherical surface 13a and the convex spherical surface 20a, and the contoured member 21 is subjected to the pressure of pressurized air. The self-installation base 11 (fixed block 12) floats. At the same time, the contoured member 21 is attracted to the fixed block 12 by the magnetic force of the magnet 22. By balancing the force (floating load) of the contoured member 21 from the apparatus base 11 and the force attracted to the fixed block 12, it is possible to maintain the contoured member 21 at the same as the concave spherical surface 13a and convex. The spherical surface 20a is shaken in a state of contact.

In this state, the front end surface of the tool (not shown) of one of the contour members 21 is pressed to a specific surface of the object (substrate or the like). At this time, in the case where the object is inclined in the Y-axis direction, the tool serving as a part of the contour member 21 is swung around the X-axis according to the inclination angle of the specific surface of the object. At this time, as shown in FIG. 6, the end portion on the one side of the long side of the swallowed contour member 21 or the end portion on the one side in the Y-axis direction of the contour member 21 enters the opening portion S. .

Thereby, even if the object is inclined in the Y-axis direction, the front end surface of the tool can be subjected to the contouring operation parallel to the specific surface of the object. On the other hand, in the case where the object is inclined in the X-axis direction, the tool serving as a part of the contour member 21 is swung around the Y-axis according to the inclination angle of the specific face of the object. Thereby, even if the object is inclined in the X-axis direction, the front end surface of the tool can be contoured parallel to the specific surface of the object.

When the copying operation is completed, the supply of pressurized air to the air supply port B is stopped, and the discharge of the pressurized air from the annular porous body 13 is stopped. Next, a vacuum suction operation is performed in which the air is sucked by the vacuum suction 埠V and the air is sucked to the drain B, and the air is supplied to the second pressure action chamber 45 by the second air supply and exhaust port R. As a result, the air is sucked by the through hole 12c and the concave spherical surface 13a, and the piston 40 receives the pressure of the second pressure acting chamber 45, so that the rod 53 and the support member 54 are moved from the lock release position to the lock position. Further, the locking position refers to the lever 53 and the support member 54 being maintained at a position where the contour member 21 is pressed to the apparatus base 11.

The profile member 21 can be pressed against the annular porous body 13 of the apparatus base 11 by the suction force generated by the vacuum suction, the pressing force by the support member 54, and the magnetic force of the magnet 22. As a result, the contoured member 21 can be held on the apparatus base 11 without being shaken, and the tool serving as a part of the contoured member 21 can maintain its front end surface in a state of mimicking a specific surface of the object. Thus, the convex spherical surface 20a of the contoured member 21 is pressed against the concave spherical surface 13a by the suction force generated by the vacuum suction, the pressing force by the support member 54, and the magnetic force of the magnet 22, by such support. The force, the contoured member 21 is locked into a state in which it cannot be shaken.

According to the above embodiment, the following effects can be obtained.

(1) In the copying apparatus 10, the shape of the concave spherical surface 13a of the annular porous body 13 is an oblate shape having a pair of long side edges 13b and a pair of circular arc sides 13c. Therefore, for example, in the case where the periphery of the concave spherical surface 13a is a circular shape formed by the length of the short side of the fixed block 12, the area of the concave spherical surface 13a can be further increased.

In the case where a plurality of copying apparatuses 10 are arranged in an array, it is preferable to reduce the installation space of the apparatuses as much as possible. In order to realize a copying device having a circular concave spherical surface having a square body as viewed in a plan view, it is estimated that the thickness of the main body can be reduced by shortening the length in the direction in which the main body is arranged. In the present embodiment, when the main body is made thinner, the concave spherical surface in a plan view is not simply reduced, but a diameter which ensures the maximum length in the longitudinal direction of the apparatus base 11 is formed. The concave spherical surface 13a. Therefore, the area of the concave spherical surface 13a can be further increased as compared with a concave spherical surface having a circular shape in plan view. As a result, not only the reduction in the floating load and the supporting force of the contouring member 21 but also the downsizing of the copying device 10 can be suppressed.

(2) In the copying apparatus 10, the shape of the concave spherical surface 13a of the annular porous body 13 is an oblate shape having a pair of long side edges 13b and a pair of circular arc sides 13c. Thereby, for example, in the case where the periphery of the fixed block 12 has a circular shape with a short side length as compared with the concave spherical surface 13a, the effective area of the concave spherical surface 13a can be further increased. Therefore, the miniaturization of the copying device 10 can be achieved, and the effective area of the concave spherical surface 13a can be increased. Further, pressurized air can be supplied or discharged between the concave spherical surface 13a having an increased effective area and the opposing convex spherical surface 20a to form an air layer. Therefore, in the case where the tool mounted on the seat plate 51 is, for example, a heating device, since heat generated by the heating device is shielded by the air layer, heat conduction can be suppressed without transferring heat from the annular porous body 13 To the side of the fixed block 12. Therefore, it is possible to suppress deterioration of the magnet 22 or the piston ring 40a on the fixed block 12 side.

(3) Pressurized air can be supplied or discharged between the concave spherical surface 13a and the convex spherical surface 20a opposed thereto. The pressurized air flows along the convex spherical surface 20a and the concave spherical surface 13a, and is then released to the outside of the contouring device 10 by the outer periphery of each of the spherical surfaces 13a and 20a. In the present embodiment, the effective area of the concave spherical surface 13a has been expanded as much as possible; and the outer peripheral length of the concave spherical surface 13a is also increased as much as possible. Therefore, the distance and flow rate of the pressurized air flowing along the concave spherical surface 13a can be ensured from the supply of the pressurized air to the copying device 10 and the release of the pressurized air to the outside of the copying device 10. The heat exchange efficiency between the concave spherical surface 13a and the convex spherical surface 20a and the pressurized air can be improved. As a result, for example, when the heating device is mounted on the seat plate 51, heat generated by the heating device can be suppressed from being transmitted from the annular porous body 13 to the fixed block 12 side, so that the fixing block can be suppressed without being fixed. The magnet 22 on the 12 side or the piston ring 40a is deteriorated. Further, by the pressurized air discharged from the outer periphery of each of the spherical surfaces 13a and 20a toward the outside of the contouring device 10, it is possible to suppress the temperature of the outer surface of the copying device 10 from rising.

(4) The copying device 10 is provided with a magnet 22 for supporting the contoured member 21. The magnet 22 is opposed to the contoured member 21 in the through hole 13d of the annular porous body 13. Therefore, the annular porous body 13 must have a through hole 13d through which the magnet 22 is exposed. When the annular porous body 13 is reduced, the area of the concave spherical surface 13a also becomes small. On the other hand, since the annular porous body 13 of the present embodiment has an oblate shape, the effective area of the concave spherical surface 13a is not reduced even though the through hole 13d is provided, so that the contour can be supported by the magnet 22. Member 21.

(5) The magnet support member 23 has a support body 24 that is inserted through the through hole 12c of the fixed block 12, and a flange 25 that is stacked on the fixed block 12. Further, the magnet support member 23 is fixed to the fixed block 12 by screwing the screw 27 of the inserted flange 25 to the fixing block 12. Therefore, it is not necessary to provide a position at which the screw 27 is screwed in the through hole 12c of the fixed block 12, and thus it is possible to contribute to downsizing of the copying device 10.

(6) The housing recess 12d of the fixed block 12 has an oblate shape that coincides with the oblong annular porous body 13. In the fixed block 12, the portion surrounding the housing recess 12d is a portion having no bearing function. The mounting portion 18b and the protruding portion 18a are formed at a portion where the function is not provided. The side plate 31 is attached to the attachment portion 18b so as to sandwich the protruding portion 18a between the both end portions of the side plate 31. Therefore, the function of the copying device 10 can be effectively utilized to mount the side plate 31, and the size of the copying device 10 can be reduced.

(7) The copying device 10 is provided with a magnet 22 for supporting the contoured member 21. The magnet 22 is opposed to the contoured member 21 in the through hole 13d of the annular porous body 13. The pressurized air from the air to the drain B can be released into the through hole 13d. Therefore, the flow of air is generated around the magnet 22, so that the heat dissipation of the magnet 22 can be improved. As a result, the temperature rise of the magnet 22 can be suppressed, and the decrease in the magnetic force of the magnet 22 can be suppressed.

(8) The peripheral contour of the copying device 10 coincides with the peripheral contour when the cover 26, the flange 25 of the magnet support member 23, the fixed block 12, and the contoured member 21 are stacked. The cover 26, the flange 25, the fixed block 12, and the contoured member 21 are in the shape of a rectangular parallelepiped or a slightly rectangular parallelepiped. Therefore, the outer contour of the copying device 10 can be made into a substantially rectangular shape to achieve a thinner shape.

(9) A protruding portion 18a is formed on the side surface of the fixed block 12, and a U-shaped side plate 31 is attached so as to sandwich the protruding portion 18a. Further, an opening S surrounded by the side plate 31 and the protruding portion 18a is provided. Further, when the contoured member 21 is rocked in the Y-axis direction (in the direction of the long side), the end portion of the contoured member 21 is made such that the end portion of the contoured member 21 does not interfere with the obstruction of the side panel 31. Advance to the opening S. Thereby, even if the copying device 10 is miniaturized, the panning range of the copying member 21 is not reduced.

(10) The U-shaped side plate 31 is attached so as to surround the protruding portion 18a of the fixing block 12, and the opening S surrounded by the side plate 31 and the protruding portion 18a is provided. Further, the pressurized air supplied between the concave spherical surface 13a and the convex spherical surface 20a and flowing along the respective spherical surfaces 13a and 20a is discharged from the opening S to the outside of the contouring device 10. Therefore, by the pressurized air discharged from the opening S, it is possible to suppress the temperature of the outer surface of the copying device 10 from rising.

The above embodiment can also be modified as follows.

In the above embodiment, the protruding portion 18a and the mounting portion 18b are formed in the fixed block 12, and the side plate 31 is attached to the mounting portion 18b. However, the protruding portion 18a and the mounting portion 18b may not be formed in the fixing block 12, and the side plate 31 may be directly attached to the flat side surface 12h.

○ Although the piston 40 and the rod 53 are used as the actuator for pressing and fixing the contour member 21 to the apparatus base 11, a diaphragm may be used instead of the piston 40.

The copying device 10 of the above-described embodiment attracts the contoured member 21 by the pressing force of the piston 40 and the rod 53 as the actuator, the magnetic force of the magnet 22, and the suction force generated by the vacuum suction. Supported on the device base 11 . However, the method of holding the contoured member 21 on the apparatus base 11 is not limited thereto. For example, the copying device 10 may hold the contoured member 21 on the apparatus base 11 by using only the suction force generated by the vacuum suction without the actuator. In other words, the method of holding the contoured member 21 on the apparatus base 11 may be at least one selected from a suction force generated by a vacuum, a pressing force generated by an actuator, and a magnetic force of the magnet 22.

○ In the concave spherical surface 13a, the length of the straight line M of the virtual circle C diameter may be longer than the short side of the fixed block 12, and it may be appropriately changed.

○ The piston 40 is not necessarily circular when viewed in plan from the Z-axis direction, and may have an oblate shape such as a circular shape.

Here, the technical ideas that can be grasped by the above-described embodiments and modifications are described below.

(A) A profiling device in which the concave spherical surface has an oblate shape when viewed in the axial direction.

(B) A copying device in which the actuator is constituted by a piston and a rod integrated with the piston.

(C) A profiling device, wherein the actuator is movable between a locking position and a locking release position, the locking position being referred to by pressing the contoured member to be retained on the base of the device Position; the lock release position refers to a position where the aforementioned contour member is not pressed to the base of the apparatus.

B‧‧‧Air supply
M‧‧‧ Short side straight line
V‧‧‧vacuum attraction
C‧‧‧ imaginary circle
N‧‧‧1st air supply
R‧‧‧2nd air supply
S‧‧‧ openings
10‧‧‧Shaping device
11‧‧‧Device base
12c‧‧‧through holes
12h‧‧‧ side
12‧‧‧Fixed blocks
12f‧‧‧O-ring
13b‧‧‧Long side
13d‧‧‧through hole
13c, 20c‧‧‧ arc edge
15‧‧‧Air to the trench
15a‧‧‧Air access
17a‧‧‧Air suction path
18a‧‧‧Protruding
18b‧‧‧Installation section
20a‧‧‧ convex spherical, spherical
21‧‧‧Shaping components
22‧‧‧ magnet
23‧‧‧Magnetic support
24b‧‧‧ liner
24‧‧‧Support ontology
25‧‧‧Flange
25a‧‧‧ recess
26‧‧‧ Cover
26a‧‧‧screw
28‧‧‧
28a‧‧‧ Sidewall
31‧‧‧ side panels
13c, 20c‧‧‧ arc edge
40‧‧‧Piston
40a‧‧‧Piston ring
41‧‧‧stop ring
41a‧‧‧ pin insertion groove
44‧‧‧1st pressure chamber
45‧‧‧2nd pressure chamber
51‧‧‧ seat plate
53‧‧‧ pole
54‧‧‧Support members
32, 34‧‧‧Rotary limit pin
13a, 60a‧‧‧ concave spherical, spherical
12d, 61‧‧‧ containment recess
13, 60‧‧‧ annular porous body
35, 52‧‧‧ screws

Fig. 1 is a perspective view showing a copying device of an embodiment observed from a seat panel side. Fig. 2 is a perspective view showing the copying device of Fig. 1 in the middle of assembly as viewed from the side of the contour member. Figure 3 is an exploded perspective view of the copying device of Figure 1. 4(a) is a cross-sectional view of the copying device along the longitudinal direction of Fig. 1; and Fig. 4(b) is a cross-sectional view of the copying device taken along the short side of Fig. 1. Fig. 5 (a) is a perspective view showing a concave spherical surface of the annular porous body in the copying apparatus of Fig. 1; Fig. 5 (b) is a perspective view showing a concave spherical surface of the annular porous body of the comparative example. Figure. Fig. 6 is a cross-sectional view showing a state in which the contour member of the copying device of Fig. 1 is rocked toward the side plate on one side.

11‧‧‧Device base

12‧‧‧Fixed blocks

12c‧‧‧through holes

12d‧‧‧ containment recess

12h‧‧‧ side

13‧‧‧Circular porous body

13a‧‧‧ concave spherical

13b‧‧‧Long side

13c‧‧‧ arc edge

13d‧‧‧through hole

18a‧‧‧Protruding

18b‧‧‧Installation section

60‧‧‧Circular porous body

60a‧‧‧ concave spherical

61‧‧‧ containment recess

B‧‧‧Air supply

C‧‧‧ imaginary circle

V‧‧‧vacuum attraction

M‧‧‧ Short side straight line

Claims (7)

A profiling device, characterized in that: the profiling device has: a profiling member having a convex spherical surface; and a device base having a concave spherical surface for receiving the convex spherical surface; the profiling member is capable of being subjected to air pressure Floating from the base of the apparatus, and abutting the surface of the contoured member along the concave spherical surface, the abutting surface that is integrated with the contoured member abuts against the object, so that the abutting surface The contouring operation is performed in a manner parallel to a specific surface of the object; wherein when the direction in which the device base and the contour member are overlapped is set to the axial direction of the contouring device, the plan view is performed from the axial direction The device base is a rectangular shape having a long side and a short side; and a circle having a diameter longer than a center of the base of the apparatus and having a shorter side than a short side of the base of the apparatus, from the axial direction When projected onto the base of the apparatus, the concave spherical surface is formed in a region of the apparatus base surrounded by the circle. The copying device according to claim 1, wherein the diameter of the circle is equal to or smaller than a length of a longitudinal direction of the base of the apparatus. The copying device according to claim 2, wherein the device base includes an annular porous body, and the annular porous body has a pair of long sides and a plan view when viewed from the axial direction a pair of circular arc sides each of which is connected to one end and the other end of the pair of long sides, wherein the concave spherical surface is attached to the annular porous body. The copying device according to claim 3, wherein, in the plan view of the axial direction, the convex spherical surface of the contoured member has a pair of long sides and a pair of circular sides, the pair of circles The arc edges are respectively connected to one another and the other end of the pair of long sides. The copying device according to claim 4, wherein the pair of circular arc sides of the convex spherical surface are formed so as to overlap the pair of circular arc sides of the annular porous body. The copying device according to any one of the preceding claims, wherein the side surface of the short side of the apparatus base has a protruding portion that protrudes outward and two mounting segments, and the like The mounting portion is formed by sandwiching the protruding portion from both sides in the short-side direction and recessing the protruding portion; and in each of the short sides, each of the two mounting portions is provided with a U-shape The side plates are arranged to sandwich the aforementioned protrusion between the two end portions thereof, and the aforementioned contoured member is disposed between the pair of side plates. The copying device according to claim 6, wherein the copying device has an opening portion surrounded by the side plate and the protruding portion, and when the contoured member is rocked along a long side direction thereof, the contouring member The end on one side enters the aforementioned opening.