JP6354865B2 - Ozone generator - Google Patents

Description

  The present invention relates to an ozone generator that generates creeping discharge along a dielectric surface and generates ozone from oxygen in a space facing the discharge surface.

  FIG. 6 is a diagram illustrating the configuration of a conventional ozone generator 100 (see, for example, Patent Document 1 to Patent Document 3). The ozone generating apparatus 100 includes a flat plate portion 101, a first planar conductor 104, and a second planar conductor 105. The flat plate portion 101 includes a base layer 102 and a surface layer 103 that are stacked on each other. The base layer 102 is made of a ceramic dielectric material such as alumina. The surface layer 103 is made of a dielectric material such as glass. The first planar conductor 104 and the second planar conductor 105 are provided at the interface between the base layer 102 and the surface layer 103. The first planar conductor 104 has a comb shape in plan view and includes a plurality of discharge portions 106 that are parallel to each other. The second planar conductor 105 has a comb shape like the first planar conductor 104 and includes a plurality of discharge portions 107 parallel to each other. The discharge unit 106 and the discharge unit 107 are alternately arranged with an interval.

  In the ozone generating apparatus 100, creeping discharge is generated along the surface (discharge surface) of the surface layer 103 made of a dielectric material by applying an alternating electric field between the discharge unit 106 and the discharge unit 107. By this creeping discharge, ozone is generated from oxygen in the space facing the discharge surface.

Patent No. 4220090 Japanese Patent Laid-Open No. 10-7405 JP 2014-58430 A

  In the ozone generator configured as described above, a high driving voltage is required to stably generate creeping discharge. Therefore, a large booster circuit is required for the drive voltage source of the ozone generator, which increases the size of the drive voltage source and increases the cost of the drive voltage source.

  Furthermore, since such a high drive voltage is applied, if there is a shape defect or the like in the discharge part, abnormal discharge such as spark discharge is likely to occur. When such abnormal discharge occurs, the ozone generator may be damaged or deteriorated.

  Therefore, an object of the present invention is to provide an ozone generator that can reduce the driving voltage.

  The ozone generator of the present invention comprises a dielectric part having a discharge surface that generates creeping discharge, and a conductor provided on the dielectric part so as to face the discharge surface, and a plurality of discharge parts arranged along the discharge surface. The discharge surface has recesses formed between the plurality of discharge portions.

  In this configuration, electric lines of force generated between the discharge portions are likely to spread from the concave portion of the discharge surface to the outside of the dielectric portion. For this reason, the electric field strength increases in the vicinity of the concave portion of the discharge surface, and creeping discharge is likely to occur. Therefore, it is possible to reduce the drive voltage required for creeping discharge.

  It is preferable that the lower surface of the concave portion is provided at a height equal to or higher than the lower surface of the discharge portion, with the discharge portion facing the discharge surface as an upper side.

  In this configuration, the electric field strength (discharge amount) in the vicinity of the lower surface of the recess can be increased, and the driving voltage necessary for generating creeping discharge can be reduced.

  It is preferable that the lower surface of the concave portion is provided at a height equal to or higher than the upper surface of the discharge portion, with the discharge portion facing the discharge surface as an upper side.

  Even in this configuration, the electric field strength (discharge amount) in the vicinity of the lower surface of the recess can be increased, and the driving voltage necessary for generating creeping discharge can be reduced. In addition, since the supply of oxygen to the recesses and the release of ozone from the recesses are facilitated, the amount of ozone generated can be increased.

  The ozone generating device includes a driving voltage source that outputs a driving voltage of N (N ≧ 3) phase having a repetitive pattern and a circulating phase difference, and the plurality of discharge units are arranged in the order n. It is preferable that the driving voltage of the (1 ≦ n ≦ N) phase is input from the driving voltage source. In this configuration, the electric field strength changes so as to circulate along the arrangement direction in the vicinity of the discharge surface. As a result, the gas in the vicinity of the discharge surface moves in the arrangement direction under the influence of the electric field strength. For this reason, the supply of oxygen to the recess and the detachment of ozone from the recess are promoted, and the amount of ozone generated can be increased.

  The ozone generator of the present invention is provided by covering a plate-like first dielectric layer, a pair of internal planar conductors provided on the first surface of the first dielectric layer, and the pair of internal planar conductors. A pair of internal planar conductors each having a lead portion and a plurality of discharge portions connected to the lead portion, and the second dielectric layer includes the second dielectric layer. A convex portion is provided on the second surface opposite to the surface facing the first surface, and at a position overlapping the plurality of discharge portions when the first surface is viewed in plan.

  It is preferable that the convex portion is provided on the second surface so as to cover the plurality of discharge portions when the first surface is viewed in plan.

  It is preferable that the discharge part of one internal plane conductor and the discharge part of the other internal plane conductor are alternately arranged along the surface direction of the first dielectric layer.

  It is preferable that the thickness of the convex portion is greater than 10 μm and is smaller than the width of the narrowest gap portion between the discharge portion of the one inner plane conductor and the discharge portion of the other inner plane conductor.

  According to the ozone generator of the present invention, the electric field strength is increased in the vicinity of the concave portion of the discharge surface, so that creeping discharge is likely to occur. As a result, the drive voltage can be lowered, the drive voltage source can be reduced in size and cost, and the reliability of the ozone generator can be improved.

FIG. 1A is a perspective view of an ozone generator 10 according to the first embodiment of the present invention. FIG. 1B is an exploded plan view showing the planar conductor forming surface 14 of the ozone generator 10. FIG. 2 is a side cross-sectional view of the ozone generator 10. FIG. 3A is an enlarged side view schematically showing lines of electric force generated in the vicinity of the concave portion 15 and the convex portion 16 in the ozone generation apparatus 10 according to the first embodiment of the present invention. FIG. 3B is an enlarged side view schematically showing electric lines of force generated on a flat surface in a conventional ozone generator for comparison. FIG. 4 is a diagram illustrating a flowchart of an example of a method for manufacturing the ozone generator 10. FIG. 5A is an electrical connection diagram of the ozone generator 60. FIG. 5B is a time waveform diagram of the drive voltages V _{1 to} V ₄ . FIG. 6 is a diagram illustrating the configuration of a conventional ozone generator 100.

<< First Embodiment >>
FIG. 1A is a perspective view of an ozone generator 10 according to the first embodiment of the present invention. The ozone generator 10 is plate-shaped and has, for example, a length of 5 mm, a width of 5 mm, and a thickness of 500 μm.

  The ozone generator 10 includes a dielectric part 11, a pair of internal planar conductors, and a drive voltage source 31. Specifically, the pair of inner planar conductors are a first inner planar conductor 21A and a second inner planar conductor 21B.

  The dielectric portion 11 is made of a dielectric material and has a plate shape having a top surface 11A and a bottom surface 11B. The dielectric portion 11 includes a second dielectric layer 12 on the top surface 11A side and a first dielectric layer 13 on the bottom surface 11B side, and the second dielectric layer 12 and the first dielectric layer 13 Are laminated. The surface on the second dielectric layer 12 side in the first dielectric layer 13 is a planar conductor forming surface 14 (corresponding to “the first surface of the first dielectric layer” in the present invention). Further, the surface opposite to the surface facing the planar conductor forming surface 14 in the second dielectric layer 12, that is, the top surface 11A corresponds to the “second surface of the second dielectric layer” in the present invention.

  The first inner planar conductor 21A and the second inner planar conductor 21B are provided inside the dielectric part 11, between the second dielectric layer 12 and the first dielectric layer 13, and more specifically Is provided on the planar conductor forming surface 14.

  FIG. 1B is an exploded plan view showing the planar conductor forming surface 14 of the ozone generator 10.

  Each of the first inner planar conductor 21A and the second inner planar conductor 21B has a comb shape in plan view. Specifically, the first inner planar conductor 21A and the second inner planar conductor 21B include a plurality of discharge portions 22A and 22B and lead portions 23A and 23B. The width of the first inner planar conductor 21A and the second inner planar conductor 21B is, for example, 50 μm. The thickness of the first inner planar conductor 21A and the second inner planar conductor 21B is, for example, 10 μm.

  The plurality of discharge portions 22A and 22B extend in a line shape and are parallel to each other. The lead portions 23A and 23B extend by connecting between one ends of the plurality of discharge portions 22A and 22B, and are drawn to a predetermined lead position. The discharge portions 22A and the discharge portions 22B are alternately arranged in a direction (arrangement direction) orthogonal to the extending direction (extension direction). In other words, the discharge portions 22 </ b> A and the discharge portions 22 </ b> B are alternately arranged along the surface direction of the first dielectric layer 13. Further, a gap portion 24 having a predetermined width in the arrangement direction is provided between the adjacent discharge portions 22A and 22B. The width of the gap portion 24 is, for example, 50 μm.

  A drive voltage is applied from the drive voltage source 31 shown in FIG. 1A between the first inner planar conductor 21A and the second inner planar conductor 21B configured as described above. As a result, an alternating electric field is generated between the discharge part 22A and the discharge part 22B. This alternating electric field extends not only inside the dielectric portion 11 but also outside the top surface 11A side of the dielectric portion 11, and the electric field strength in the vicinity of the top surface 11A of the dielectric portion 11 becomes more than a certain level. Then, creeping discharge occurs along the top surface 11A of the dielectric part 11. And ozone is produced | generated from the oxygen contained in the space facing 11 A of top surfaces of the dielectric part 11. FIG.

  Here, a more detailed configuration of the dielectric portion 11 will be described with reference to FIG. FIG. 2 is a side cross-sectional view of the ozone generator 10.

  The first dielectric layer 13 on the bottom surface side constituting the dielectric portion 11 is formed with a uniform thickness. On the other hand, the second dielectric layer 12 on the top surface side constituting the dielectric part 11 is configured to have a thin part and a thick part. Note that the thicknesses of the thick and thin portions of the second dielectric layer 12 are both smaller than the thickness of the first dielectric layer 13.

  Since the second dielectric layer 12 has a thin portion and a thick portion, a concave portion 15 and a convex portion 16 are formed on the top surface 11A of the dielectric portion 11, that is, on the surface of the second dielectric layer 12. Is done. The concave portion 15 and the convex portion 16 extend in parallel with the extending direction of the discharge portions 22A and 22B as shown in FIG. 1, and the same direction as the arrangement direction of the discharge portions 22A and 22B as shown in FIG. Are lined up alternately.

  The plurality of convex portions 16 cover the discharge portions 22A and 22B when viewed from the thickness direction (when the planar conductor forming surface 14 is viewed in plan), and overlap the discharge portions 22A or 22B in the thickness direction. For this reason, the arrangement intervals of the plurality of convex portions 16 substantially coincide with the arrangement intervals of the discharge portions 22A and 22B. Note that “substantially match” means that the plurality of convex portions 16 overlap the discharge portion 22A or the discharge portion 22B in the thickness direction. On the other hand, the arrangement interval of the plurality of recesses 15 is substantially the same as the arrangement interval of the discharge parts 22A and 22B. However, the plurality of recesses 15 do not overlap the discharge part 22A and the discharge part 22B in the thickness direction. Only the gap portion 24 between 22A and the discharge portion 22B overlaps with the thickness direction.

  FIG. 3A is an enlarged side view schematically showing lines of electric force generated in the vicinity of the concave portion 15 and the convex portion 16 in the ozone generation apparatus 10 according to the first embodiment of the present invention. FIG. 3B is an enlarged side view schematically showing electric lines of force generated on a flat surface in a conventional ozone generator for comparison.

  3A and 3B, when an alternating electric field is applied between the discharge part 22A and the discharge part 22B, the gap between the discharge part 22A and the discharge part 22B. A plurality of electric lines of force are generated. These lines of electric force are generated in the arrangement direction from the vicinity of the opposing end surfaces of the discharge portion 22A and the discharge portion 22B toward the gap portion 24 in the dielectric portion 11. These lines of electric force are concentrated at a high density in the vicinity of the end surfaces of the discharge portions 22A and 22B, but the density decreases as the distance from the end surfaces of the discharge portions 22A and 22B increases, and also spreads in the thickness direction.

  For this reason, as shown in FIG. 3A, when the recess 15 is provided at a position facing the gap portion 24, a relatively large number of electric lines of force among electric lines of force generated from the discharge portions 22A and 22B. However, it spreads to the outside of the dielectric part 11 through the recess 15. On the other hand, as shown in FIG. 3B, when the dielectric portion 11 has a flat shape without the concave portion 15 and the convex portion 16, relatively less electricity is generated among the lines of electric force generated from the discharge portions 22A and 22B. Only the lines of force extend outside the dielectric part 11.

  Therefore, when the recess 15 is provided as shown in FIG. 3A, the electric field strength is remarkably increased in the vicinity of the recess 15. Thereby, creeping discharge is stably generated along the surface of the recess 15. Thereby, ozone is efficiently produced | generated from the oxygen contained in gas.

  The above effect is obtained by the sample of the uneven ozone generator according to the first embodiment of the present invention shown in FIG. 3A and the flatness according to the conventional example shown in FIG. It has also been confirmed in an actual machine test using a sample of an ozone generator.

  Specifically, an alternating voltage having a phase difference of 180 ° is applied to the discharge portions 22A and 22B, the voltage is gradually increased, and it is confirmed at what voltage each sample starts discharge (light emission on the substrate surface). . As a result, the discharge start voltage, which was 600 V in the sample of the flat ozone generator according to the conventional example, decreases to 540 V in the sample of the uneven ozone generator according to the first embodiment of the present invention. Have confirmed.

  Moreover, when the samples of these ozone generators were each driven in a 6 liter container for 3 minutes at the same driving voltage (600 V), and the ozone concentration was measured with an ozone concentration measuring device (manufactured by Sugawara Jitsugyo), It was confirmed that the ozone concentration which was 23.8 ppm in the sample of the flat ozone generator according to the example is improved to 29.8 ppm in the sample of the uneven ozone generator according to the first embodiment of the present invention. doing.

  As described above, in the ozone generation apparatus 10 according to the present embodiment, by providing the recess 15 in the gap portion 24 between the discharge portions 22A and 22B, the electric field strength generated in the vicinity of the recess 15 can be remarkably increased. Even if the drive voltage applied to the portions 22A and 22B is lowered, it is possible to generate ozone by generating creeping discharge. Therefore, the rating of the drive voltage source 31 can be lowered, and the cost of the drive voltage source 31 can be reduced. Further, since the drive voltage can be lowered without performing electrode miniaturization as in the prior art, various problems such as short circuit, disconnection, and spark discharge associated with electrode miniaturization occur in the manufacturing process of the ozone generator 10. It does not occur and the reliability of the ozone generator 10 can be improved.

  In addition, the applicant also performed the verification regarding the thickness C of the convex part 16 and the depth D of the concave part 15 in the actual machine test.

  The thickness C of the convex portion 16 (thickness from the discharge portions 22A and 22B to the surface of the second dielectric layer 12) is the thickness of the thickest portion of the convex portion as shown in FIG. is there. The thickness C of the convex portion 16 is, for example, 25 μm. As a result of the verification regarding the thickness C of the convex portion 16, it is desirable that the thickness C of the convex portion 16 is at least thinner than the width of the narrowest gap portion 24 between the first inner planar conductor 21A and the second inner planar conductor 21B. . When the thickness C is larger than the width of the gap portion 24, it is difficult to spread the lines of electric force from the recess 15 to the outside, and it is confirmed that the effect of lowering the drive voltage by providing the recess 15 is impaired. It was done. Further, it is desirable that the thickness C of the convex portion 16 is greater than 10 μm, and if it is thinner than this, it is confirmed that dielectric breakdown occurs when a voltage is applied, and the reliability tends to decrease. That is, it is desirable that the thickness C of the convex portion 16 is thicker than 10 μm and is thinner than the width of the narrowest gap portion between the discharge portion of one inner plane conductor and the discharge portion of the other inner plane conductor.

  The depth D of the recess 15 is, as shown in FIG. 3A, the distance between the thickest portion of the second dielectric layer and the thinnest portion of the second dielectric layer in the thickness direction, That is, the difference between the thickest part of the second dielectric layer and the thinnest part of the second dielectric layer. In other words, the depth D of the recess 15 is such that the thickness from the planar conductor forming surface 14 to the top surface 11A shown in FIG. 2 is the thickest and the thickness from the planar conductor forming surface 14 to the top surface 11A is the thinnest. Is the distance between. The depth D of the recess 15 is, for example, 10 μm.

  Samples of an ozone generation device having depths D of the concave portions 15 of 10 μm, 25 μm, and 50 μm, respectively, are applied with alternating voltages whose phases are different by 180 ° to the discharge units 22A and 22B, and the voltages are gradually increased. It was confirmed at which voltage each sample started discharge (light emission on the substrate surface). As a result, the sample having a depth D of 10 μm is 600 V, the sample having a depth D of 25 μm is 500 V, the sample having a depth D of 50 μm is 438 V, and the deeper the depth D of the recess 15 is, the higher the discharge start voltage is. A tendency to decrease was obtained. This is considered to be because the electric field strength is the strongest in the vicinity of the planar conductor forming surface 14 because it is sandwiched between the discharge portions 22A and 22B.

  Moreover, each sample of these ozone generators was driven in a 6 liter container for 3 minutes at the same drive voltage (600 V), and the ozone concentration was measured with an ozone concentration meter (manufactured by Sugawara Jitsugyo). As a result, the sample with the depth D of the recess 15 of 10 μm is 29.8 ppm, the sample with the depth D of 25 μm is 32.3 ppm, the sample with the depth D of 50 μm is 15.3 ppm, and the recess 15 It has also been confirmed that the ozone concentration tends to decrease when the depth D of the first layer exceeds the depth (25 μm) reaching the planar conductor forming surface 14 from the surface of the second dielectric layer 12.

  This is because if the depth D of the concave portion 15 becomes too deep, plasma and ozone generated in the space inside the concave portion 15 remain inside the concave portion 15, and supply of oxygen to the concave portion 15 and separation of ozone hardly occur. It is thought to be. Therefore, it is considered that the depth D of the recess 15 is preferably deep within a range not exceeding the depth reaching the planar conductor forming surface 14 from the surface of the second dielectric layer 12. That is, it is desirable that the depth D of the recess 15 is deeper than 0 μm and not more than the depth from the surface of the second dielectric layer 12 to the planar conductor forming surface 14.

  Next, an example of a manufacturing method of the ozone generator 10 will be described. FIG. 4 is a diagram illustrating a flowchart of an example of a manufacturing process of the ozone generator 10.

  In the manufacture of the ozone generator 10, first, a sheet forming process is performed (S1). In the sheet forming step, for example, a dielectric slurry is obtained by mixing dielectric powder, a solvent, a dispersant, a binder, and the like. And the dielectric green sheet used as the 2nd dielectric material layer 12 and the 1st dielectric material layer 13 later is produced using a doctor blade etc.

Note that the dielectric sheet formed in this step is desirably formed larger than the size of the single ozone generator 10 in order to manufacture a plurality of ozone generators 10 at one time. The material of the dielectric sheet is Al ₂ O ₃ , SiO ₂ , ZrO ₂ , various glasses, oxides such as BaTiO ₃ , a mixture of glass and oxide filler such as LTCC, or a resin such as epoxy or polyimide. Any material having a high insulation property may be used. However, since the dielectric portion 11 may become extremely hot due to the influence of plasma generated at the time of discharge, an oxide is desirable from the viewpoint of stability against heat. The materials of the second dielectric layer 12 and the first dielectric layer 13 may be the same or different from each other, but the second dielectric layer 12 and the first dielectric layer may be different from each other. If the difference between the linear expansion rates is large at 13, the dielectric part 11 may be deteriorated due to expansion and contraction during discharge. For this reason, it is desirable that the materials of the second dielectric layer 12 and the first dielectric layer 13 are the same or have similar linear expansion coefficients.

  Next, a conductor formation process is performed in manufacture of the ozone production | generation apparatus 10 (S2). In the conductor forming step, an interlayer connection conductor is formed as necessary, and then a pattern of a conductor paste that will later become the first inner planar conductor 21A and the second inner planar conductor 21B is screen-printed on the dielectric green sheet. To do.

The material of the conductor paste used in this step may be any material as long as it can be laminated on the dielectric part 11, for example, when the dielectric part 11 is made of an oxide material. May employ Cu, Ag, Pd, Pt, or W as the main material of the conductor paste, or a resistance paste of RuO ₂ .

  Next, in the production of the ozone generator 10, a stacking process is performed (S3). In the laminating step, the dielectric green sheets on which the pattern of the conductor paste is formed are overlapped and a pressure is applied to produce a laminate in which the unfired conductor paste pattern and the dielectric green sheet are laminated.

  Next, in the production of the ozone generator 10, a baking process is performed (S4). In the firing step, for example, the unfired laminate is fired to have a predetermined temperature profile. Thereby, the laminated body of the dielectric part 11, the 1st internal plane conductor 21A, and the 2nd internal plane conductor 21B is produced.

  And in manufacture of the ozone production | generation apparatus 10, a recessed part formation process is performed (S5). In the recess forming step, the recess 15 is formed by grinding the position facing the gap portion 24 between the first inner planar conductor 21A and the second inner planar conductor 21B of the fired laminate by a method such as dicing.

  By the above manufacturing method, the ozone generator 10 of this embodiment can be manufactured. In addition to the above-described process of laminating and firing a dielectric green sheet on which a conductive paste pattern is formed, the ozone generator 10 of this embodiment can be manufactured by an appropriate process. For example, a process of printing a conductor paste and a dielectric paste on a fired substrate, or after firing the first dielectric layer 13, the first inner planar conductor 21A, and the second inner planar conductor 21B It is also possible to employ a process in which a green sheet to be the second dielectric layer 12 is laminated or a dielectric paste is printed.

  In addition, the method for forming the concave portions 15 and the convex portions 16 is not limited to a forming method in which a groove is cut in the fired dielectric portion 11, and other forming methods can also be used. For example, a method of cutting a groove in a green laminate, a method of forming a concave portion by pressure on a green laminate, a method of forming a convex portion 16 by stacking a plurality of thin dielectric sheets, a dielectric An appropriate method such as a method of forming the convex portion 16 by printing a body paste can be employed. In addition, the cross-sectional shape of the concave portion 15 and the convex portion 16 can also employ an appropriate shape such as a rectangular shape or a wave shape.

<< Second Embodiment >>
Next, an ozone generator 60 according to a second embodiment of the present invention will be described.

  FIG. 5A is an electrical connection diagram of the ozone generator 60.

  The ozone generator 60 according to this embodiment includes a dielectric part 61, a plurality of discharge parts 62, and a drive voltage source 63. The dielectric part 61 is a structure which has a recessed part and a convex part similarly to the structure of the above-mentioned embodiment.

For example, the plurality of discharge units 62 are divided into four groups, and the discharge units 62 of each group are arranged in order on the dielectric unit 61. The drive voltage source 63 is configured to output the same four-phase drive voltages V _{1 to} V ₄ as the number of sets, and each of the discharge units 62 has the drive voltages V _{1 to} V _{4 having} phase numbers corresponding to the set numbers. Is entered.

FIG. 5B is a time waveform diagram of the drive voltages V _{1 to} V ₄ . The drive voltages V _{1 to} V ₄ are rectangular wave alternating voltages with a phase difference of 90 ° in the order of the phase numbers. Therefore, the drive voltages V _{1 to} V ₄ have a relationship in which the phase difference circulates in the order of the phase numbers.

  Since it is configured in this manner, in the ozone generation device 60 according to the present embodiment, the distribution of the electric field intensity in the vicinity of the concave and convex portions changes so as to circulate along the arrangement direction of the discharge portions 62. . As a result, the gas in the space moves under the influence of the electric field strength in the vicinity of the concave portion and the convex portion, and the supply of oxygen to the concave portion and the separation of ozone from the concave portion are promoted. As a result, even if the recess is made deeper and the drive voltage is lowered, a decrease in ozone concentration can be suppressed. Further, since the gas flow is generated, dust and the like are hardly adsorbed on the discharge surface, and the reliability of the ozone generator 60 is improved.

In the present embodiment, although an example of using the pulse wave signal as the drive voltage V ₁ ~V _4, the drive voltage V ₁ ~V ₄ is also possible to use a sine wave signal or a rectangular wave signal to other Is possible. If a pulse wave signal or a rectangular wave signal is used, the voltage at which discharge is started can be lowered compared with the case where a sine wave signal is used, which is more preferable. In the present embodiment, an example in which the number of phases of the driving voltage is four is shown, but any integer can be adopted as long as the number of phases of the driving voltage is three or more. In the present embodiment, an example in which the same waveform pattern is obtained for each drive voltage has been described. For example, driving voltages having different amplitudes and repetition cycles can be used.

  In the above-described embodiment, the width of the first inner planar conductor 21A and the second inner planar conductor 21B is, for example, 50 μm, but may be 10 μm or more and 200 μm or less. More preferably, the width of the first inner planar conductor 21A and the second inner planar conductor 21B may be 30 μm or more and 100 μm or less. This is because if the width of the first inner planar conductor 21A and the second inner planar conductor 21B is 100 μm or less, it is suitable for driving at a low voltage, and thus a higher effect can be obtained. Further, if the widths of the first inner planar conductor 21A and the second inner planar conductor 21B are less than 30 μm, the difficulty of forming the wiring increases in production, and the yield deteriorates.

  Each embodiment described above is merely an example, and the operational effects of the present invention can be obtained in any configuration as long as the configuration is within the scope of the claims. The configurations disclosed in the embodiments may be combined in any way.

DESCRIPTION OF SYMBOLS 10 ... Ozone generator 11 ... Dielectric part 11A ... Top surface 11B ... Bottom 12 ... Second dielectric layer 13 ... First dielectric layer 14 ... Planar conductor formation surface 15 ... Concave part 16 ... Convex part 21A ... First Inner planar conductor 21B ... second inner planar conductors 22A, 22B ... discharge portions 23A, 23B ... leading portion 24 ... gap portion 31 ... driving voltage source

Claims (8)

A dielectric part having a discharge surface for generating creeping discharge;
A plurality of discharge portions arranged along the discharge surface, made of a conductor provided in the dielectric portion so as to face the discharge surface;
With
The discharge surface has a recess formed between the plurality of discharge portions,
Ozone generator. With the direction in which the discharge portion faces the discharge surface as the upper side, the lower surface of the concave portion is provided at a height equal to or higher than the lower surface of the discharge portion.
The ozone generator according to claim 1. With the direction in which the discharge part faces the discharge surface as the upper side, the lower surface of the recess is provided at a height higher than the upper surface of the discharge unit.
The ozone generator of Claim 1 or Claim 2. A drive voltage source for outputting an N (N ≧ 3) phase drive voltage having a repetitive pattern and a circulating phase difference;
In the plurality of discharge units, a driving voltage of an nth (1 ≦ n ≦ N) phase is input from the driving voltage source according to the arrangement order thereof.
The ozone generator in any one of Claim 1 thru | or 3. A plate-like first dielectric layer;
A pair of internal planar conductors provided on the first surface of the first dielectric layer;
A second dielectric layer provided over the pair of internal planar conductors;
With
The pair of internal planar conductors each have a lead portion and a plurality of discharge portions that are continuous from the lead portion,
The second dielectric layer has a convex portion on a second surface opposite to the surface facing the first surface and at a position overlapping the plurality of discharge portions in plan view of the first surface. An ozone generator.   The ozone generating apparatus according to claim 5, wherein the convex portion is provided on the second surface and so as to cover the plurality of discharge portions in a plan view of the first surface.   The ozone generation according to claim 5 or 6, wherein the discharge part of one inner plane conductor and the discharge part of the other inner plane conductor are alternately arranged along the surface direction of the first dielectric layer. apparatus.   The thickness of the said convex part is thicker than 10 micrometers, and is thinner than the width | variety of the narrowest gap part between the discharge part of said one internal plane conductor, and the discharge part of said other internal plane conductor. Ozone generator.

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