WO2015008559A1

WO2015008559A1 - Airflow generator

Info

Publication number: WO2015008559A1
Application number: PCT/JP2014/065532
Authority: WO
Inventors: 古樋知重
Original assignee: 株式会社村田製作所
Priority date: 2013-07-19
Filing date: 2014-06-12
Publication date: 2015-01-22
Also published as: JPWO2015008559A1; JP5874863B2; CN105409331A; CN105409331B

Abstract

Formed over an insulating base body (21) are a plurality of linear electrodes (22), a first external electrode (23F), a second external electrode (23A), and a third external electrode (23B), the surface thereof being covered by a dielectric film (24). The first external electrode (23F) is connected to one linear electrode (E_F) among the plurality of linear electrodes (22). The second external electrode (23A) is connected to odd-numbered linear electrodes among the plurality of linear electrodes (22) in an order counting away from the linear electrode (E_F). The third external electrode (23B) is connected to even-numbered linear electrodes among the plurality of linear electrodes (22) in the order counting away from the linear electrode (E_F). A periodic pulse power source (1) applies a wall-charge-forming pulse voltage (VF) to the first external electrode (23F) once per a prescribed period while applying two-phase pulse voltages (V1,V2) respectively to the second external electrode (23A) and the third external electrode (23B) at a rate of multiple times per the prescribed period.

Description

Airflow generator

The present invention relates to an airflow generation device that generates an airflow by applying a voltage to an electrode.

Patent Document 1 discloses an apparatus that generates an air flow by applying a periodic pulse voltage to a plurality of linear electrodes arranged in parallel.

A configuration example of an airflow generation device disclosed in Patent Document 1 will be described with reference to FIGS. 13 and 14. FIG. 13A is a diagram illustrating a configuration of a plurality of linear electrodes and a power source that applies a voltage to them, and FIG. 13B is a cross-sectional view of the insulating substrate in FIG. is there. FIG. 14 is a voltage waveform diagram output from the periodic pulse power supply 40 shown in FIG.

As shown in FIGS. 13A and 13B, a plurality of linear electrodes 52 are arranged on the upper surface of the insulating base 51 in parallel and at regular intervals. The periodic pulse power supply 40 outputs four-phase pulse voltages V1 to V4. The linear electrodes 52 are connected in common in every four in the arrangement order, and are connected to the periodic pulse power supply 40, respectively. A dielectric film 54 is formed on the entire surface of the insulating base 51 so as to cover the linear electrode 52.

The four waveforms shown in FIG. 14 are four-phase pulse voltage waveforms output from the periodic pulse power supply 40 shown in FIG. The drive voltage of each phase is repeatedly generated in the + V volt interval across the 0 V interval. Adjacent phases are shifted by ¼ period. In this way, the time waveform of the four-phase pulse voltage is sequentially and cyclically output as step pulses each of which lasts for a fixed time.

JP 2011-26096 A

In the airflow generation device shown in FIG. 13, the linear electrodes 52 are commonly connected every four in the arrangement order, and are connected to four sets of lead electrodes 53 respectively. In order to realize this configuration, wiring intersections occur at a plurality of locations in the middle of the linear electrode 52 or the extraction electrode 53. For this reason, for example, a multilayer substrate in which the formation layers of the linear electrode 52 and the extraction electrode 53 are separated and an interlayer connection conductor (via conductor) is provided, or a conductive wire covered with an insulator is used to make a three-dimensional intersection. There must be. That is, the linear electrode and the extraction electrode cannot be configured with a single-layer electrode pattern. As a result, there is a problem that the manufacturing cost increases.

In addition, in order to generate an airflow in one direction, the airflow generation device needs to have a phase number n of 3 or more. However, the above problem similarly occurs when the number of phases is other than 4.

Therefore, an object of the present invention is to provide an airflow generation device in which the linear electrode and the extraction electrode can be configured by a single layer electrode pattern.

The airflow generator of the present invention is configured as follows.

(1) an insulating substrate;
A plurality of linear electrodes arranged on the insulating substrate and covered with a dielectric film;
A first external electrode connected to one of the plurality of linear electrodes;
Among the plurality of linear electrodes, a second external electrode connected to the odd-numbered linear electrodes and a third external electrode connected to the even-numbered electrodes in order away from the linear electrode connected to the first external electrode. When,
A wall charge forming pulse voltage is applied to the first external electrode once per predetermined period, and a two-phase pulse voltage is applied to the second external electrode and the third external electrode at a plurality of times per predetermined period. A periodic pulse power supply to be applied respectively;
It is provided with.

As will be apparent from the detailed description of the operation, which will be described later, in the above configuration, although the voltage applied to the linear electrode is two-phase, air flow in a fixed direction is generated. Therefore, three-dimensional crossing is performed by connecting the second external electrode and the third external electrode from the opposite direction to the odd-numbered linear electrode and the even-numbered linear electrode among the plurality of linear electrodes. In addition, the linear electrode and the external electrode can be wired.

(2) The linear electrode to which the first external electrode is connected is, for example, a linear electrode disposed at the first end of the array. Thereby, the wiring from the first external electrode to the linear electrode to which it is connected does not intersect with the other linear electrodes and the second and third external electrodes.

(3) A fourth external electrode connected to the linear electrode disposed at the second end of the array among the plurality of linear electrodes is provided, and the periodic pulse power source includes the first external electrode or the first external electrode. It is preferable to include means for selectively applying the wall charge forming pulse voltage to four external electrodes and means for inverting the phase of the two-phase pulse voltage. That is, with this configuration, an air flow is generated from the first end of the plurality of arranged linear electrodes to the arrangement direction of the other linear electrodes, and conversely, the arrangement direction of the other linear electrodes from the second end. It is possible to select a state in which an airflow is generated.

(4) Preferably, the two-phase pulse voltage is a rectangular wave with a duty ratio of 50%, and the rise and fall times of each other coincide. That is, this simplifies the circuit configuration of the periodic pulse power supply. In addition, wall charges can be generated and transferred with high efficiency.

(5) The two-phase pulse voltage is generated at a rate of twice per predetermined period. That is, since the generation frequency of wall charges can be kept high, it is easy to ensure the flow rate of the generated airflow.

(6) It is preferable that a peak value of the wall charge forming pulse voltage is higher than a peak value of the two-phase pulse voltage. In other words, this makes it possible to achieve high wall charge formation efficiency and low power consumption.

According to the present invention, the linear electrode and the extraction electrode can be constituted by a single layer electrode pattern. For this reason, reduction of manufacturing cost, thinning, improvement of non-defective product rate, reduction of failure rate, and the like are expected.

FIGS. 1A and 1B are diagrams showing a configuration of an airflow generation device according to the first embodiment, and FIG. 1A shows an array electrode substrate 2 on which linear electrodes are formed and a periodic pulse power source corresponding thereto. FIG. 1B is a cross-sectional view of the array electrode substrate 2. FIG. 2 is a block diagram showing the configuration of the periodic pulse power supply 1. FIG. 3 is a waveform diagram of each pulse voltage generated by the periodic pulse power supply 1. FIG. 4 is an exploded perspective view of each layer of the array electrode substrate 2 shown in FIG. FIG. 5 is a plan view of the electrode layer 25 shown in FIG. 6 (A) is a voltage V _C is applied to the linear electrodes E _F, drawing linear electrodes E ₁ is ⁽¹⁾ shows a state of being kept at a ground potential state, FIG. 6 (B) both FIG. 6C shows a state in which a positive wall charge 28 and a negative wall charge 29 are formed between the electrodes. FIG. 6C shows a region 30 between the linear electrode E ₁ ⁽¹⁾ and its adjacent electrodes. FIG. 6 (D) is a diagram showing the state of creeping discharge, FIG. 6 (D) is a diagram showing the state of wall charges after the creeping discharge is stopped, and FIG. 6 (E) is after creeping discharge is stopped at a timing later than FIG. FIG. 6F is a diagram illustrating the state of wall charges after the creeping discharge is stopped at a timing later than FIG. 6E, and FIG. 6G is a diagram illustrating the state of wall charges. It is a figure which shows the mode of the wall charge after the creeping discharge stop in the later timing. FIGS. 7A and 7B are diagrams showing a configuration of an airflow generation device according to the second embodiment, and FIG. 7A shows an array electrode substrate 2 on which linear electrodes are formed and a periodic pulse power source corresponding thereto. FIG. 7B is a cross-sectional view of the array electrode substrate 2. 8A and 8B are waveform diagrams of each pulse voltage generated by the periodic pulse power supply 1, FIG. 8A is a waveform diagram of each pulse voltage in the forward direction mode, and FIG. 8B is a reverse direction. It is a wave form diagram of each pulse voltage in a mode. FIG. 9 is an exploded perspective view of each layer of the array electrode substrate 2 shown in FIG. FIG. 10 is a plan view of the electrode layer 25 shown in FIG. FIG. 11A is a waveform diagram of pulse voltages V _F , V ₁ , V ₂ , and V _{R according} to the third embodiment. FIG. 11B is a waveform diagram of further pulse voltages V _F , V ₁ , V ₂ and V _R according to the third embodiment. FIG. 12 is a waveform diagram of each pulse voltage generated by the periodic pulse power supply according to the fourth embodiment. FIG. 13A is a diagram illustrating a configuration of a plurality of linear electrodes and a power source that applies a voltage to them, and FIG. 13B is a cross-sectional view of the insulating substrate in FIG. is there. FIG. 14 is a waveform diagram of a pulse voltage output from the periodic pulse power supply 40 shown in FIG.

Hereinafter, several specific examples will be given with reference to the drawings to show a plurality of modes for carrying out the present invention. In each figure, the same reference numerals are assigned to the same portions. Each embodiment is an exemplification, and needless to say, partial replacement or combination of configurations shown in different embodiments is possible.

<< First Embodiment >>
FIGS. 1A and 1B are diagrams showing a configuration of an airflow generation device according to the first embodiment, and FIG. 1A shows an array electrode substrate 2 on which linear electrodes are formed and a periodic pulse power source corresponding thereto. FIG. 1B is a cross-sectional view of the array electrode substrate 2.

The array electrode substrate 2 includes an insulating base 21 such as a dielectric substrate and a plurality of linear electrodes 22 formed on the insulating base 21. A plurality of linear electrodes 22 are arranged in parallel and at regular intervals on the upper surface of the insulating substrate 21. The first external electrode 23F are connected to one linear electrode E _F of the plurality of linear electrodes 22. Further, among the plurality of linear electrode 22, the odd-numbered linear electrodes in order away from the connected linear electrode E _F to the first external electrode 23F (order of the x-direction in FIG. 1 (A)) 2 External electrode 23A is connected. Further, the third external electrode 23B is connected to the even-numbered linear electrodes.

A dielectric film 24 such as a resin film or a silicate glass film is formed on the entire surface of the insulating substrate 21 so as to cover the linear electrode 22. With this configuration, oxidation and sulfurization of the electrode are suppressed, and stable characteristics can be maintained over a long period of time.

Periodic pulse power supply 1 applies a wall charge forming pulse voltage V _F of once per predetermined cycle to the first external electrode 23F, the second outer electrode 23A and the third outer electrode 23B, a plurality of times per a predetermined period Two-phase pulse voltages V1 and V2 are applied at a ratio.

FIG. 2 is a block diagram showing the configuration of the periodic pulse power supply 1. As shown in FIG. 2, the periodic pulse power supply 1 includes a constant voltage DC power supply circuit 12, a gate driver circuit 13, and a timing signal generation circuit 11. Timing signal generating circuit 11 provides a timing signal for generating a pulse voltage, the gate driver circuit 13 in accordance with the timing signal, the voltage 0 to the input from the constant-voltage DC power supply circuit 12, Vc, the pulse voltage V is switched to V _T Outputs _F , V1, and V2. This gate driver circuit can be configured with, for example, a power MOS-FET as a main element.

FIG. 3 is a waveform diagram of each pulse voltage generated by the periodic pulse power supply 1. The wall charge forming pulse voltage V _F is a rectangular wave voltage having a cycle T and a duty ratio of 25%, which takes a binary value of 0 or V _C. In the example shown in FIG. 3, the wall charge forming pulse voltage V _F rises at time t1, and falls at time t2 after T / 4. That is, the voltage Vc is from time t1 to t2, and is 0 from time t2 to t5. For example, the voltage Vc is 700 V and the period T is 0.5 ms.

The pulse voltages V1 and V2 are rectangular wave voltages having a cycle of T / 2 and a duty ratio of 50%, which are binary values of 0 or V _T. In the example shown in FIG. 3, the pulse voltage V1 rises at a pulse voltage V _F time from the rising time t1 after T / 4 of t2, falls then standing still at the time t3 after T / 4. The pulse voltage V2 rises at the falling time t3 of the pulse voltage V1, and then falls at time t4 after T / 4. That is, the rising time t3 of the pulse voltage V2 coincides with the falling time of the pulse voltage V1. Voltage V _T is, for example, 400V.

By repeatedly outputting the above pulse voltage, the wall charge forming pulse voltage V _F is applied to the first external electrode 23F once per period T, and the second external electrode 23A and the third external electrode 23B are applied to the first external electrode 23F. Two-phase pulse voltages are applied at a rate of twice per period T.

FIG. 4 is an exploded perspective view of each layer of the array electrode substrate 2 shown in FIG. The array electrode substrate 2 includes an insulating base 21, an electrode layer 25, and a dielectric film 24, which are stacked in this order from the bottom layer. However, FIG. 4 is an exploded view for explaining the configuration to the last, and does not necessarily correspond to the manufacturing process.

FIG. 5 is a plan view of the electrode layer 25 shown in FIG. In the electrode layer 25, a plurality of linear electrodes 22 are arranged in parallel and at regular intervals. The width and interval of the linear electrodes 22 are both 50 μm, for example.

Among the plurality of linear electrode 22, the linear electrode E _F is positioned at one end. This linear electrode E _F have first external electrode 23F is turned on, the end of the first external electrode 23F are connected to the external connection terminal P _F. In addition, in the other linear electrodes E _i ^(j) , odd-numbered linear electrodes and even-numbered linear electrodes are commonly connected in the arrangement order (order in the x direction in FIG. 5). A linear electrode with an odd subscript number i is connected to the second external electrode 23A, and a linear electrode with an even subscript number i is connected to the third external electrode 23B. The end of the second external electrode 23A is connected to the external connection terminal P1, and the end of the third external electrode 23B is connected to the external connection terminal P2.

The uppermost dielectric film 24 shown in FIG. 4 covers the electrode layer 25. However, three portions corresponding to the external connection electrodes P1, P _F and P2 of the electrode layer 25 is opened.

The above voltages V _T and V _C are

Shall be satisfied. here,
V _TH : Threshold voltage required to cause creeping discharge between two adjacent linear electrodes V _TH ': Two adjacent lines at positions adjacent to the adjacent area when there is creeping discharge in the adjacent area Threshold voltage Q required to induce creeping discharge between the linear electrodes Q: formed on the dielectric film 24 of one linear electrode when creeping discharge occurs between two adjacent linear electrodes Absolute value of surface charge C _WC : Capacitance obtained from a potential difference generated when it is assumed that a wall charge is placed on the dielectric film 24 covering two adjacent linear electrodes.

The operation of the airflow generation device will be described with reference to FIG. 3 and FIGS. 6 (A) to 6 (G).

First, before the time t1, it is assumed that the surface of the dielectric film 24 has no true charge or is sufficiently small.

At time t1, as shown in FIG. 6 (A), voltage V _C is applied to the linear electrodes E _F, linear electrodes E ₁ ⁽¹⁾ is kept at a ground potential state. Linear electrodes E _F and E ₁ ⁽¹⁾ The potential difference V _C between the above formulas (2), the threshold voltage V _TH required to cause the creeping discharge between the linear electrodes E _F and the linear electrodes E ₁ ^(1). At this time, as shown in FIG. 6 (A), creeping discharge occurs in the gas region 30A between the linear electrode E _F and the linear electrodes E _{^{1 (1).}} The positive and negative charged particles generated by the creeping discharge are subjected to Coulomb force by the strong electric field between the two electrodes, and the charged particles 26 charged with positive electricity move in the + x direction toward the linear electrode E ₁ ⁽¹⁾ . , the charged particles 27 charged with negative electricity toward exercising the -x direction to the linear electrodes E _F. Since any electrode is covered with the dielectric film 24, the charged particles reach the surface of the dielectric film 24, stop moving, and do not reach the electrode. The charged particles that remain on the surface of the dielectric film 24 are referred to as “wall charges” in the present invention.

FIG. 6B shows a state where positive wall charges 28 and negative wall charges 29 are formed on the dielectric film 24. The effective potential difference (wall potential) created by the wall charge is opposite in polarity to the potential difference between the two electrodes. Therefore, the sum of the potential difference between the two electrodes is reduced by the formation of the wall charge, and the discharge continues. The potential difference becomes lower than the threshold value of the potential difference required. For this reason, the discharge between both electrodes stops in a very short time (generally several tens of ns). Here, the wall charges formed in the vicinity of the linear electrodes E _F and the linear electrodes E ₁ ⁽¹⁾ the magnitude of the sum, respectively, and -Q and + Q.

Next, at time t2, voltage V _T is applied to linear electrodes E ₁ ^(j) (j is a natural number; hereinafter the same unless otherwise specified) and E ₃ ^(j) . The other linear electrodes are placed in the ground potential state. First, E ₁ except E ₁ a ^{^{(1) (j),}} and in E ₃ ^(j), the potential difference between adjacent linear electrodes respectively is V _T. From Equation (1), this potential difference V _T is lower than the threshold voltage V _TH . Therefore, creeping discharge does not occur in the linear electrode that is not adjacent to the linear electrode E ₁ ⁽¹⁾ .

Next, attention is paid to the linear electrode E ₁ ⁽¹⁾ and the linear electrode adjacent thereto. First, as shown in FIG. 6 (B), the linear electrodes E _F and the linear electrodes E ₁ ^(1), each + Q and -Q wall charges 28, 29 are present in the vicinity thereof. Here, the potential difference (wall potential) V _WC between the two electrodes due to this wall charge is

It can be expressed. Therefore, the sum of a potential difference between the linear electrodes E ₁ ⁽¹⁾ and the linear electrode E _F V _total ^{1 (1) -F} is

It is. Further, the sum V _total ^{1 (1) -2 (1)} of the potential difference between the linear electrode E ₁ ⁽¹⁾ and the linear electrode E ₂ ⁽¹⁾ adjacent to the right is similarly expressed as follows:

It can be expressed. Here, the voltages expressed by the equations (4) and (5) are obtained from the equation (1):

Meet.

In this case, first, creeping discharge is generated by the sum of the potential difference between the electrodes between the linear electrodes E ₁ ⁽¹⁾ and the linear electrode E _F. On the other hand, the creeping discharge is not directly caused between the linear electrode E ₁ ⁽¹⁾ and the linear electrode E ₂ ⁽¹ ) by the formula (6), but is induced by the creeping discharge in the adjacent region. Creeping discharge occurs.

Thus, at time t2, creeping discharge occurs in the region 30B between the linear electrode E ₁ ⁽¹⁾ and its adjacent electrodes, as shown in FIG. 6C. As shown in FIG. 6 (C), the charged particles generated between the linear electrodes E ₁ ⁽¹⁾ and the linear electrode E _F, the wall charges of -Q and + Q, respectively are formed, also, the line If the charged particles generated between the electrode E ₁ ⁽¹⁾ and the linear electrode E ₂ ⁽¹⁾ also form -Q and + Q wall charges, respectively, The wall charges are as shown in FIG. That is, in the vicinity of the linear electrodes E _F, to join the + Q new charged particles with respect -Q wall charges, charge is lost. In the vicinity of the linear electrode E ₁ ⁽¹⁾ , -Q of charged particles is added from both adjacent electrodes to + Q of the wall charge, so that a new charge amount becomes -Q. In the vicinity of the linear electrode E ₂ ^(1), the wall charges of + Q by the charged particles generated between the linear electrodes E ₁ ⁽¹⁾ and the linear electrode E ₂ ⁽¹⁾ is formed.

Next, the phenomenon will be described caused by the pulse voltage V ₂ applied at time t3. The wall charge distribution in FIG. 6D is equivalent to a state in which the wall charge distribution in FIG. 6B is translated by one electrode in the + x direction. For this reason, the pulse voltage V ₂ applied at time t3 causes the phenomenon generated at time t2 to be translated by one electrode in the + x direction. Therefore, the wall charges after the creeping discharge is stopped are as shown in FIG.

Similarly, also described phenomenon caused by the pulse voltage V ₁ applied at time t4, the wall charges after the stop of the creeping discharge is as shown in FIG. 6 (F).

Next, the phenomenon will be described caused by pulsed voltage V _F and V ₂ is applied at time t5. State of the applied voltage and the wall charge at the linear electrode E _F and the linear electrodes adjacent thereto, since it is the same as at time t1, phenomenon occurs is the same. In addition, the applied voltage and wall charge state of the linear electrode E ₄ ⁽¹⁾ and the adjacent linear electrode E ₁ ⁽²⁾ are translated by one electrode in the + x direction with respect to the case at time t4. It has become. Therefore, the phenomenon that occurs in the linear electrode E ₄ ⁽¹⁾ and the adjacent linear electrode E ₁ ⁽²⁾ is also translated by one electrode in the + x direction with respect to the case at time t4. Therefore, the wall charge after the creeping discharge is stopped is as shown in FIG.

In FIG. 3, after time t6, the same waveform as that after time t2 is repeated. As is clear from the above description, even after time t6, when the voltage set shown in FIG. 3 is applied, the linear electrode E _F and the linear electrode E ₁ are applied by applying the wall charge forming pulse voltage V _F. New wall charges are generated on the surface of the dielectric film 24 in the vicinity of ⁽¹⁾ . In addition, by alternately applying the pulse voltages V1 and V2, the behavior is as if the wall charges are transferred in the + x direction.

Periodically Thus, the voltage applied to the linear electrodes E _i ^(j), despite having a spatial periodicity of every two, forming wall charges by applying a pulse voltage V _F for the wall charge formed Since it is performed only every T and is shifted in the + x direction while the wall charge history is preserved, the spatial period is every four linear electrodes E _i ^(j) . For this reason, although the voltage applied to the linear electrode E _i ^(j) is two-phase, it is possible to have a spatial direction with respect to the discharge generated on the surface and the formation of wall charges.

In any of the above creeping discharge processes, the generated positive and negative charged particles are subjected to Coulomb force from the strong electric field between the two electrodes, and the charged particles charged with positive electricity move in the + x direction and are charged with negative electricity. Charged particles move in the -x direction. Here, many kinds of charged particles are generated. For example, in standard air, many charged particles with positive electricity are positive ions of nitrogen molecules, and charged particles with negative electricity. Many of them are electrons. When positive and negative ions have the same valence, they have the same energy from the same potential difference, but since the momentum is proportional to the square root of mass, positive ions have an overwhelmingly large momentum compared to electrons. Positive and negative ions repeatedly collide with neutral molecules that make up the air during movement and give momentum to the air. However, since there is a large difference in momentum between positive ions and electrons, the volume force received by the air is the momentum of the positive ions. Is controlled in the + x direction. The volume force in the + x direction received by the air generates an air flow in the + x direction.

In the above description of the operation, the pulse voltage V2 is set to 0 V from time t1 to t2, but a voltage indicated by a broken line in FIG. 3 may be generated. That is, in FIG. 6A, a positive voltage may be applied to the linear electrode E ₂ ⁽¹⁾ . Even then, the linear electrode E _F, so causing creeping discharge between the linear electrodes E ₁ adjacent thereto ^(1), even if the pulse voltage V2 is generated at the t1-t2, unchanged the above operation .

In this configuration, the voltage applied to the linear electrodes E ₁ ^(j) to E ₄ ^(j) is only two phases, and the same voltage is applied to every two electrodes in the arrangement order of the linear electrodes. By utilizing the hysteresis of the wall charge, the period in the x direction related to the charge behavior is not a two-electrode period but a four-electrode period. This is one of the features of the present invention. Therefore, as is apparent from FIGS. 4 and 5, the linear electrode 22 and the

extraction electrodes

23A and 23B can be configured without intersecting at any location, and can be configured by, for example, a single electrode pattern.

As described above, since it can be easily configured with electrodes that do not intersect, it is expected to reduce the cost, reduce the thickness, improve the yield of non-defective products, and reduce the failure rate.

In addition, according to the present invention, the two-phase pulse voltage is a rectangular wave with a duty ratio of 50%, and the rise and fall times of each other coincide with each other, so that the circuit configuration of the periodic pulse power supply is simplified. . In addition, wall charges can be generated and transferred with high efficiency.

Further, the peak value (700V) of the wall charge forming pulse voltage is higher than the peak value (400V) of the two-phase pulse voltage, so that the wall charge forming efficiency is high and the peak voltage is relatively low. Since it is transferred, the power consumption can be reduced.

In addition, according to Paschen's law, the discharge start voltage is a function of the product of the atmospheric pressure and the distance between the electrodes. In air, the minimum value of the discharge start voltage is realized when the product of the atmospheric pressure and the distance between the electrodes is around 0.57 mmHg · cm, and the discharge start voltage at this time is 330V. Also, for the application of the present invention, if a power MOS-FET is used to generate a high voltage pulse, a drain-source voltage with an absolute rating value of 1000 V or less, such as 2SK2613, is relatively easily available. It is. Considering 5% as a margin for use, if the discharge start voltage is 950 V or less, the configuration of the apparatus is easy. Therefore, the pulse voltage applied to the linear electrode is suitable as a gas transport device if it is a value within the range of 330V to 950V.

The range of the repetition frequency of the pulse voltages V1 and V2 is preferably in the range of 1 kHz to 1 MHz. This is because a practical wind speed can be obtained at a frequency of 1 kHz or higher, and the circuit configuration of the periodic pulse power supply 1 is facilitated at a frequency of 1 MHz or lower.

<< Second Embodiment >>
FIGS. 7A and 7B are diagrams showing a configuration of an airflow generation device according to the second embodiment, and FIG. 7A shows an array electrode substrate 2 on which linear electrodes are formed and a periodic pulse power source corresponding thereto. FIG. 7B is a cross-sectional view of the array electrode substrate 2.

The array electrode substrate 2 includes an insulating base 21 and a plurality of linear electrodes 22 formed on the insulating base 21. A plurality of linear electrodes 22 are arranged in parallel and at regular intervals on the upper surface of the insulating substrate 21. Among the plurality of linear electrode 22, the first external electrode 23F are connected to one linear electrode E _F disposed on the first end. The fourth external electrode 23R is connected to one linear electrode E _R which is arranged on the second end. Among the plurality of linear electrode 22, the second external to the odd-numbered linear electrodes in order away from the connected linear electrode E _F to the first external electrode 23F (order of the x-direction in FIG. 7 (A)) The electrode 23A is connected. Further, the third external electrode 23B is connected to the even-numbered linear electrodes. The other structure of the array electrode substrate 2 is as shown in FIGS.

The periodic pulse power supply 1 applies the wall charge forming pulse voltages V _F and V _R once per predetermined period to the first external electrode 23F and the fourth external electrode 23R, and the second external electrode 23A and the third external electrode Two-phase pulse voltages V1 and V2 are respectively applied to 23B at a rate of a plurality of times per predetermined period. As will be described later, the periodic pulse power source includes means for selectively applying a wall charge forming pulse voltage to the first external electrode or the fourth external electrode and means for inverting the phase of the two-phase pulse voltage. .

FIGS. 8A and 8B are waveform diagrams of each pulse voltage generated by the periodic pulse power supply 1. The periodic pulse power source 1 has a mode for generating each pulse voltage in FIG. 8A (forward direction mode) and a mode for generating each pulse voltage in FIG. 8B (reverse direction mode). The forward direction mode is a mode for generating an air flow in the x direction shown in FIG. 7A, and the reverse direction mode is an air flow in the −x direction (opposite to the x direction) shown in FIG. This is the mode to be generated.

The wall charge forming pulse voltages V _F and V _R are rectangular wave voltages having a cycle T and a duty ratio of 25%, which are binary values of 0 or V _C. In the example shown in FIG. 8 (A), the wall charge forming pulse voltage V _F rises at time t1, and falls at time t2 after T / 4. That is, the voltage Vc is from time t1 to time t2, and 0 at other times. In the example shown in FIG. 8B, the wall charge forming pulse voltage V _R rises at time t1 and falls at time t2 after T / 4. That is, the voltage Vc is from time t1 to time t2, and 0 at other times.

The pulse voltages V1 and V2 are rectangular wave voltages having a cycle of T / 2 and a duty ratio of 50%, which are binary values of 0 or V _T. In the example shown in FIG. 8 (A), the pulse voltage V1 rises at a pulse voltage V _F time from the rising time t1 after T / 4 of t2, falls then standing still at the time t3 after T / 4. The pulse voltage V2 rises at the falling time t3 of the pulse voltage V1, and then falls at time t4 after T / 4. In the example shown in FIG. 8 (B), the pulse voltage V2 rises at a pulse voltage V time from the rising time t1 after T / 4 of the _R t2, falls then standing still at the time t3 after T / 4. The pulse voltage V1 rises at the falling time t3 of the pulse voltage V1, and then falls at time t4 after T / 4.

Periodic pulse power supply 1, the forward mode, to generate a pulse voltage V _F for the wall charge formed in the reverse mode, to generate a pulse voltage V _R wall charges formed. Further, the phases of the two-phase pulse voltages V1 and V2 are reversed in the forward direction mode and the reverse direction mode.

Note that in FIGS. 8A and 8B, a voltage indicated by a broken line may be generated. That is, as described with reference to FIGS. 3 and 6, the operation described above does not change even when a voltage indicated by a broken line is generated in FIGS. 8A and 8B.

FIG. 9 is an exploded perspective view of each layer of the array electrode substrate 2 shown in FIG. The array electrode substrate 2 includes an insulating base 21, an electrode layer 25, and a dielectric film 24, which are stacked in this order from the bottom layer.

FIG. 10 is a plan view of the electrode layer 25 shown in FIG. In the electrode layer 25, a plurality of linear electrodes 22 are arranged in parallel and at regular intervals. Besides various electrodes shown in FIG. 5, the linear electrode E _R, the fourth external electrode 23R and the external connection terminals P _R are formed.

The operation in the positive direction mode is the same as that shown in FIGS. 6A to 6G, and airflow is generated in the x direction. As is clear from FIGS. 8A and 8B and FIG. 10, in the forward mode and the reverse mode, the geometric order of the arrangement positions of the linear electrodes and the time order of the pulse voltage are opposite to each other. Therefore, the airflow is generated in the −x direction according to the same principle in the reverse mode.

As in the case of the first embodiment, the pulse voltage V2 in FIG. 8 (A) may be a voltage V _T at time t1 ~ t2. Similarly, in FIG. 8B, the pulse voltage V1 may be the voltage V _T at times t1 to t2.

<< Third Embodiment >>
In the third embodiment, another waveform example of each pulse voltage generated by the periodic pulse power supply is shown. FIG. 11A is a waveform diagram of pulse voltages V _F , V ₁ , V ₂ , and V _{R according} to the third embodiment. FIG. 11B is a waveform diagram of further pulse voltages V _F , V ₁ , V ₂ and V _R according to the third embodiment.

As shown in FIG. 11A, the pulse width of the wall charge forming pulse voltages V _F and V _R may be shorter than ¼ of one cycle T. The pulse widths of the two-phase pulse voltages V1 and V2 may be smaller than the duty ratio of 50%. If such a pulse voltage is used, there is an effect that the degree of freedom of the configuration method of the power supply circuit is increased.

Further, as shown in FIG. 11B, the pulse voltage may be a blunt waveform with suppressed harmonic components. When such a pulse voltage is used, noise radiation to the outside can be suppressed without significantly affecting the generation of airflow.

In addition, the voltage shown with a broken line may generate | occur | produce in FIG. 11 (A) and FIG. 11 (B). That is, as described with reference to FIGS. 3 and 6, the operation described above does not change even when a voltage indicated by a broken line is generated in FIGS. 11A and 11B.

<< Fourth Embodiment >>
FIG. 12 is a waveform diagram of each pulse voltage generated by the periodic pulse power supply according to the fourth embodiment. In the first to third embodiments, the two-phase pulse voltage is a pulse generated at a rate of twice per period T. Thereby, since the generation frequency of the wall charges can be kept high, it is easy to ensure the flow rate of the generated airflow. However, the present invention is not limited to this. In the example shown in FIG. 12, the two-phase pulse voltages V1 and V2 are generated at a rate of three times per period T. That is, in the example shown in FIG. 12, wall charges are generated from time t1 to t2, and the wall charges are transferred from time t2 to t7.

As described above, even if the two-phase pulse voltage is generated at a rate of three times (or more) per period T, the history of wall charges generated by the wall charge forming pulse voltage is preserved. It is shifted while being done.

In FIG. 12, a voltage indicated by a broken line may be generated. That is, as described with reference to FIGS. 3 and 6, the operation described above does not change even when a voltage indicated by a broken line is generated in FIG.

In addition, when the airflow generation device shown in each of the embodiments described above is operated in an atmosphere containing oxygen such as air, ozone is often generated along with creeping discharge. Therefore, this airflow generation device can also be used as a device that generates an airflow containing ozone. Since ozone can be used for deodorization, sterilization, and the like, when it is necessary to diffuse air containing ozone, it is possible to reduce costs and size by eliminating the need for a separate fan.

E ₁ to E ₄ ... Linear electrode
E _F , E _R ... Linear electrode
_{P1, P2, P F, P} R ... external connection terminal
V1, V2 ... Two-phase pulse voltage
V _F , V _R ... wall charge forming pulse voltage 1 ... periodic pulse power supply 2 ... array electrode substrate 11 ... timing signal generation circuit 12 ... constant voltage DC power supply circuit 13 ... gate driver circuit 21 ... insulating substrate 22 ... linear electrode 23F ... first external electrode 23A ... second external electrode 23B ... third external electrode 23R ... fourth external electrode 24 ... dielectric film 25 ... electrode layers 26, 27 ... charged

particles

28, 29 ... wall charges 30A, 30B ... region 40: Periodic pulse power supply 51 ... Insulating substrate 52 ... Linear electrode 53 ... Extraction electrode 54 ... Dielectric film

Claims

An insulating substrate;
A plurality of linear electrodes arranged on the insulating substrate and covered with a dielectric film;
A first external electrode connected to one of the plurality of linear electrodes;
Among the plurality of linear electrodes, a second external electrode connected to the odd-numbered linear electrodes and a third external electrode connected to the even-numbered electrodes in order away from the linear electrode connected to the first external electrode. When,
A wall charge forming pulse voltage is applied to the first external electrode once per predetermined period, and a two-phase pulse voltage is applied to the second external electrode and the third external electrode at a plurality of times per predetermined period. A periodic pulse power supply to be applied respectively;
An airflow generation device comprising:
The airflow generation device according to claim 1, wherein the linear electrode to which the first external electrode is connected is a linear electrode disposed at a first end of the array.
Of the plurality of linear electrodes, comprising a fourth external electrode connected to the linear electrode disposed at the second end of the array,
The periodic pulse power source includes means for selectively applying the wall charge forming pulse voltage to the first external electrode or the fourth external electrode, and means for inverting the phase of the two-phase pulse voltage. The airflow generation device according to claim 2.
The airflow generation device according to any one of claims 1 to 3, wherein the two-phase pulse voltage is a rectangular wave having a duty ratio of 50%, and the rise and fall times of each other coincide.
The airflow generation device according to any one of claims 1 to 4, wherein the two-phase pulse voltage is generated at a rate of twice per predetermined period.
The airflow generation device according to any one of claims 1 to 5, wherein a peak value of the wall charge forming pulse voltage is higher than a peak value of the two-phase pulse voltage.