WO2016121423A1

WO2016121423A1 - Ozone generator

Info

Publication number: WO2016121423A1
Application number: PCT/JP2016/050182
Authority: WO
Inventors: 近川修; 川田秋一
Original assignee: 株式会社村田製作所
Priority date: 2015-01-30
Filing date: 2016-01-06
Publication date: 2016-08-04
Also published as: CN107108208A; JPWO2016121423A1; DE112016000283T5; CN107108208B; JP6350680B2

Abstract

Provided is an ozone generator which is able to consume less power and generate less heat despite the discharge parts thereof being thin in width. The ozone generator (10) comprises: a dielectric part (11) having a top surface (11A) that generates surface discharge; and a plurality of discharge parts (12A, 13A) which comprise conductors disposed in the dielectric part (11), have discharge ends (12C,13C) in proximity to and facing the top surface (11A), and are disposed side by side along the top surface (11A) with spaces therebetween, wherein the discharge parts (12A, 13A) satisfy La≥Lb where La is the size thereof in the discharge plane direction and Lb is the size thereof in the array direction.

Description

Ozone generator

The present invention relates to an ozone generator that generates creeping discharge along a dielectric surface and generates ozone from oxygen in a space facing the discharge surface.

FIG. 8 is a diagram illustrating a configuration of a conventional ozone generator 100 (see, for example, Patent Document 1). The ozone generating apparatus 100 includes a flat plate portion 101, a first planar conductor 104, and a second planar conductor 105. The flat plate portion 101 includes a base layer 102 and a surface layer 103 that are stacked on each other. The base layer 102 is made of a ceramic dielectric material such as alumina. The surface layer 103 is made of a dielectric material such as glass. The first planar conductor 104 and the second planar conductor 105 are provided at the interface between the base layer 102 and the surface layer 103. The first planar conductor 104 has a comb shape in plan view and includes a plurality of discharge portions 106 that are parallel to each other. The second planar conductor 105 has a comb shape like the first planar conductor 104 and includes a plurality of discharge portions 107 parallel to each other. The discharge unit 106 and the discharge unit 107 are alternately arranged with an interval.

In the ozone generating apparatus 100, a creeping discharge is generated along the surface (discharge surface) of the surface layer 103 made of a dielectric material by applying an alternating electric field between the discharge unit 106 and the discharge unit 107. By this creeping discharge, ozone is generated from oxygen in the space facing the discharge surface.

JP 2001-220113 A

In the ozone generator configured as described above, the electric field strength can be increased by narrowing the interval between the discharge portions, and the drive voltage can be lowered. In addition, creeping discharge occurs in each adjacent pair of discharge parts, so the ozone generation efficiency can be improved by increasing the number of discharge parts that can be arranged per unit area by narrowing the width of the discharge part and the adjacent interval. Can be high.

However, if the width of the discharge part is narrowed, the conductor resistance in the discharge part increases, and the power consumption and heat generation of the ozone generator increase. Then, the decomposition reaction of ozone was accelerated by heat generation, and there was a problem that the effect of improving the ozone generation efficiency by providing a large number of discharge parts was suppressed.

Therefore, an object of the present invention is to provide an ozone generator that can suppress power consumption and heat generation even if the width of the discharge part is narrowed.

The ozone generator of the present invention comprises a dielectric part having a discharge surface that causes creeping discharge, and a conductor provided in the dielectric part, and has a discharge end that is close to and faces the discharge surface, and the discharge A plurality of discharge portions arranged at intervals along the surface, wherein the discharge portion is La in the direction of the discharge surface facing the discharge surface, and is arranged along the discharge surface If Lb is its own dimension, La ≧ Lb.

In this configuration, even if the dimensions in the arrangement direction of the discharge parts are reduced, a larger dimension is ensured in the discharge surface direction, so that an increase in conductor resistance in the discharge part is suppressed. This can suppress power consumption and heat generation in the ozone generator.

Preferably, the dielectric part includes a plurality of dielectric layers stacked in the arrangement direction, and the plurality of discharge parts are each composed of a planar conductor provided between the dielectric layers.

This configuration can be manufactured by simply forming a planar conductor as a discharge portion on a dielectric sheet as a dielectric layer and stacking a plurality of dielectric sheets. Therefore, even a discharge portion whose dimension in the discharge surface direction is larger than that in the arrangement direction can be formed using a method such as screen printing. In the conventional configuration, if a method with low processing accuracy such as screen printing is used, the width and interval of the discharge parts cannot be reduced so much, and the short circuit between the discharge parts due to the processing accuracy, Problems such as breakage and damage due to arc discharge at places where the interval between the discharge portions becomes narrow may occur. However, in the configuration of the present application, the width and interval of the discharge part can be set with high accuracy according to the thickness of the dielectric sheet and the planar conductor, and the width and interval of the discharge part are extremely narrow and variation is reduced. Can do. Therefore, the problems that have occurred in the above-described conventional configuration hardly occur.

The discharge surface is preferably composed of end surfaces of the plurality of dielectric layers. Thereby, manufacture of an ozone generator becomes easier than the conventional structure which provides a dielectric layer so that a discharge end may be covered, and comprises a discharge surface.

The distance between the discharge surface and the discharge end is preferably narrower than the distance between the plurality of discharge portions. Thereby, even if it is a low drive voltage, creeping discharge can be produced stably.

The dielectric portion has a plurality of outer surfaces including one discharge surface, the discharge portion has a plurality of end portions including one discharge end, and the discharge end and the discharge surface face each other. The interval may be narrower than the interval between the other end and the other outer surface.

In addition, the dielectric portion has a plurality of outer surfaces including two or more discharge surfaces, the discharge portion has a plurality of end portions including two or more discharge ends, each discharge end, each discharge surface, May be configured such that the intervals at which they face each other are equal. In this case, the total area of the discharge surface can be increased using two or more outer surfaces of the dielectric portion as the discharge surface, and the amount of ozone generated can be increased.

Further, the dielectric portion may have a peripheral surface corresponding to the discharge surface, and the discharge end may extend while maintaining a constant distance from the peripheral surface of the dielectric portion. In this case, the total area of the discharge surface can be increased using the entire peripheral surface of the dielectric portion as the discharge surface, and the amount of ozone generated can also be increased.

The ozone generating device includes a driving voltage source that outputs a driving voltage of N (N ≧ 3) phase having a repetitive pattern and a circulating phase difference, and the plurality of discharge units are arranged in the order n. It is preferable that the driving voltage of the (1 ≦ n ≦ N) phase is input from the driving voltage source. In this configuration, the electric field intensity distribution near the discharge surface changes so as to circulate along the arrangement direction. As a result, the gas in the space moves near the discharge surface along the arrangement direction under the influence of the electric field strength. For this reason, the supply of oxygen to the discharge surface and the detachment of ozone from the discharge surface are promoted, and the amount of ozone generated can be increased. Further, the generation of gas flow makes it difficult for dust and the like to be adsorbed on the discharge surface, and the reliability of the ozone generator is improved.

The drive voltage is preferably a rectangular wave signal or a pulse wave signal. As a result, the voltage at which discharge is started can be reduced compared to when the alternating signal is a sine wave signal.

According to the ozone generating apparatus of the present invention, even when the discharge part is thinned in the arrangement direction, the dimension of the discharge part can be sufficiently secured in the discharge surface direction, and an increase in the conductor resistance can be suppressed. . Therefore, an increase in power consumption and heat generation in the ozone generator can be suppressed, and even if a large number of discharge parts are provided to increase the ozone generation efficiency, the ozone decomposition reaction can be prevented from being accelerated by heat.

1 is a perspective view of an ozone generator according to a first embodiment of the present invention. It is the left view, top view, right view, and bottom view of the ozone generator which concerns on the 1st Embodiment of this invention. It is a figure explaining the manufacturing method of the ozone generator which concerns on the 1st Embodiment of this invention. It is the left view and front view of the ozone generator which concern on the 2nd Embodiment of this invention. It is the left view and top view of an ozone generator which concern on the 3rd Embodiment of this invention. It is the left view and top view of an ozone generator which concern on the 4th Embodiment of this invention. It is the wiring diagram of the ozone generator which concerns on the 5th Embodiment of this invention, and the time waveform figure of a drive signal. It is a perspective view of the conventional ozone generator.

<< First Embodiment >>
FIG. 1 is a perspective view of an ozone generator 10 according to the first embodiment of the present invention.

The ozone generator 10 includes a dielectric part 11,

internal planar conductors

12 and 13, a terminal electrode 14, a terminal electrode 15, and a drive voltage source 16.

The dielectric portion 11 has a rectangular parallelepiped shape including a top surface 11A, a bottom surface 11B, a left side surface 11C, a right side surface 11D, a front surface 11E, and a back surface 11F.

A plurality of inner

planar conductors

12 and 13 are provided, and are arranged alternately in the dielectric portion 11 from the left side surface 11C side to the right side surface 11D side. The inner planar conductor 12 has a shape extending from the front surface 11E side to the back surface 11F side near the top surface 11A and extending from the top surface 11A side to the bottom surface 11B side close to the back surface 11F inside the dielectric portion 11. . The inner planar conductor 13 has a shape extending in the vicinity of the top surface 11A from the back surface 11F side to the front surface 11E side and close to the front surface 11E from the top surface 11A side to the bottom surface 11B side inside the dielectric portion 11. .

The

terminal electrodes

14 and 15 are provided on the bottom surface 11B and are formed of a strip-shaped planar conductor extending from the left side surface 11C side to the right side surface 11D side. The terminal electrode 14 is provided so as to be close to the side of the bottom surface 11 </ b> B on the front surface 11 </ b> E side, and is connected to the plurality of internal planar conductors 13. The terminal electrode 15 is provided so as to be close to the side of the bottom surface 11B on the back surface 11F side, and is connected to the plurality of internal planar conductors 12.

The driving voltage source 16 applies a driving voltage between the terminal electrode 14 and the terminal electrode 15 to generate an alternating electric field between the inner planar conductor 12 and the inner planar conductor 13.

In this configuration, when a driving voltage is applied between the terminal electrode 14 and the terminal electrode 15 from the driving voltage source 16, the inner planar conductor 12 and the inner planar conductor 13 are both close to the top surface 11A of the dielectric part 11; Creeping discharge occurs along the direction connecting the left side surface 11C and the right side surface 11D. Owing to the creeping discharge, ozone is generated from oxygen contained in the gas in the space facing the top surface 11A on the top surface 11A of the dielectric portion 11. The top surface 11A is a discharge surface in the present invention.

Here, the details of the internal structure of the dielectric portion 11 will be described. Hereinafter, the direction from the left side surface 11C of the dielectric portion 11 toward the right side surface 11D is referred to as an arrangement direction. A direction from the front surface 11E to the back surface 11F is referred to as a stretching direction. The direction from the bottom surface 11B toward the top surface 11A is referred to as a discharge surface direction. The length of the dielectric portions 11 in the arrangement direction is, for example, 3.2 mm, the length in the extending direction is, for example, 2.5 mm, and the length in the discharge surface direction is, for example, 2.5 mm.

FIG. 2 (A) is a left side view of the ozone generator 10. FIG. 2B is a plan view of the ozone generator 10. FIG. 2C is a right side view of the ozone generator 10. FIG. 2D is a front view of the ozone generator 10.

The dielectric part 11 includes a plurality of dielectric layers 21. Each of the plurality of dielectric layers 21 is a thin flat film having a main surface that faces the left side surface 11C and the right side surface 11D, and is laminated from the left side surface 11C to the right side surface 11D of the dielectric portion 11, The dielectric part 11 is configured. The thickness of the dielectric layer 21 is, for example, 20 μm. The thickness of the dielectric layer 21 is preferably 1 μm or more and 20 μm or less.

The inner

planar conductors

12 and 13 are alternately arranged on the main surface of each dielectric layer 21, that is, one laminated surface between the dielectric layers 21, and adjacent laminated surfaces inside the dielectric portion 11. ing.

The inner

planar conductors

12 and 13 include

discharge portions

12A and 13A and lead

portions

12B and 13B. The

discharge parts

12A and 13A are rectangular parallelepiped plate-like pattern portions extending in the extending direction. The

lead portions

12B and 13B are band-shaped pattern portions extending in the discharge surface direction.

The edges on the top surface 11A side of the

discharge parts

12A and 13A are separated from the top surface 11A by a certain dimension Lc and face the top surface 11A. The dimension Lc is, for example, 10 μm. The edges on the front surface 11E side and the back surface 11F side of the

discharge parts

12A and 13A are opposed to the front surface 11E or the back surface 11F by a predetermined dimension Le. Here, the dimension Lc is smaller than the dimension Le. That is, in the

discharge portions

12A and 13A, the edge on the top surface 11A side is closer to the outer surface of the dielectric portion 11 than the edge on the front surface 11E side and the back surface 11F side. The electric field generated between the

discharge parts

12A and 13A tends to leak to the outer surface of the dielectric part 11 that is the closest to the

discharge parts

12A and 13A. For this reason, in this dielectric part 11, creeping discharge arises not on the front surface 11E or the back surface 11F but on the top surface 11A. Accordingly, the top surface 11A of the dielectric portion 11 functions as a discharge surface that generates ozone, and the edges of the

discharge portions

12A and 13A on the top surface 11A side function as discharge ends 12C and 13C. In this embodiment, there is no discharge other than the top surface 11A.

Further, the arrangement interval between the discharge part 12A and the discharge part 13A is the dimension Ld. The dimension Ld is, for example, 20 μm. This dimension Ld is determined by the thickness of the dielectric layer 21. In the conventional ozone generating apparatus 100, since the first planar conductor 104 and the second planar conductor 105 are formed by fine line printing, a portion where the distance between the first planar conductor and the second planar conductor is narrow is short. It was difficult to form the dimension Ld to be 50 μm or less. However, since the ozone generator 10 according to the present embodiment is configured as described above, the arrangement interval between the discharge unit 12A and the discharge unit 13A can be sufficiently narrowed compared to the conventional configuration. As the dimension Ld is narrower, the discharge start voltage of the ozone generator 10 can be lowered. Further, the electric field strength of the alternating electric field generated between the discharge part 12A and the discharge part 13A can be increased as compared with the conventional configuration. Therefore, in the ozone generating apparatus 10 according to the present embodiment, creeping discharge can be stably generated on the top surface 11A of the dielectric portion 11 even if the driving voltage of the driving voltage source 16 is lower than that of the conventional one.

Moreover, the

discharge parts

12A and 13A have a dimension Lb in the arrangement direction. The dimension Lb is, for example, 5 μm. The dimension Lb is almost equal to the thickness of the inner

planar conductors

12 and 13, and the

discharge portions

12A and 13A can sufficiently narrow the width in the arrangement direction even when compared with the conventional configuration. As described above, since the width and the arrangement interval of the

discharge parts

12A and 13A can be sufficiently narrowed, the ozone generator 10 according to the present embodiment is opposed to the discharge surface (top surface 11A) of the dielectric part 11. Thus, the number of

discharge parts

12A and 13A per unit area that can be arranged can be greatly increased. As a result, the ozone generation efficiency per unit area on the discharge surface (top surface 11A) can be increased.

Moreover, the

discharge parts

12A and 13A have a dimension La in the discharge surface direction. The dimension La is, for example, 50 μm. Here, the dimension La is equal to or larger than the dimension Lb in the arrangement direction of the

discharge parts

12A and 13A. That is, La ≧ Lb. Therefore, in the

discharge parts

12A and 13A, even if the dimension Lb in the arrangement direction is extremely small, the dimension La in the discharge surface direction can be secured more than that. For this reason, the conductor resistances of the

discharge portions

12A and 13A do not increase remarkably. Therefore, in the ozone generation device 10 according to the present embodiment, the ozone generation device 10 can be used even if the dimension Lb in the arrangement direction of the

discharge portions

12A and 13A is significantly reduced in order to increase the ozone generation efficiency per unit area in the discharge portion. Power consumption and heat generation can be suppressed. By this, progress of the ozonolysis reaction in a discharge surface (top surface 11A) can be suppressed, and it can prevent that ozone generation efficiency falls by the influence of a heat | fever.

Moreover, the dimension Ld of the arrangement interval between the discharge part 12A and the discharge part 13A is larger than the dimension Lc between the discharge surface (top surface 11A) and the

discharge parts

12A, 13A. That is, since the

discharge portions

12A and 13A are closer to the top surface 11A than the distance between the

discharge portions

12A and 13A, the electric field generated between the

discharge portions

12A and 13A is likely to leak to the top surface 11A. It becomes a state. Also by this, in the ozone generating apparatus 10 according to the present embodiment, the driving voltage (discharge start voltage) necessary for causing creeping discharge on the top surface 11A of the dielectric part 11 can be lowered, Creeping discharge can be stably generated on the top surface 11A of the dielectric portion 11.

Furthermore, the

discharge portions

12A and 13A and the dielectric layer 21 can set the thicknesses (dimensions in the arrangement direction) with high accuracy. Therefore, the dimension Lb in the arrangement direction of the

discharge parts

12A and 13A and the dimension Ld of the arrangement interval of the

discharge parts

12A and 13A can be made substantially uniform in the discharge surface direction. For this reason, in the ozone production | generation apparatus 10 which concerns on this embodiment, the various problems resulting from the process variation which had arisen by the conventional structure hardly occur. Specifically, in the ozone generation apparatus 10 according to the present embodiment, short-circuit between the

discharge parts

12A and 13A, disconnection of the

discharge parts

12A and 13A, and occurrence of arc discharge between the

discharge parts

12A and 13A hardly occur. . Therefore, the ozone generator 10 has high reliability.

Next, as an example of a manufacturing method of the ozone generator 10, a manufacturing method in the case where the dielectric portion 11 is formed of a low-temperature fired ceramic substrate will be described. In addition, the dielectric part 11 can also be comprised with another dielectric material, for example, an alumina. FIG. 3 is a flowchart illustrating an example of the manufacturing process of the ozone generator 10.

In the production of the ozone generator 10, first, a dielectric sheet forming step is performed (S1). In the dielectric sheet forming step, for example, a glass ceramic slurry is obtained by mixing glass powder, filler powder, crystallinity adjusting agent, solvent, dispersant, organic binder, plasticizer, and the like. And the glass ceramic green sheet used as the dielectric material layer 21 later is produced from a glass ceramic slurry using a doctor blade etc. In order to manufacture a plurality of ozone generators 10 at a time, the glass ceramic green sheet is desirably formed larger than the size of the dielectric layer 21 of the single ozone generator 10.

Next, in the production of the ozone generator 10, a planar conductor forming step is performed (S2). In the planar conductor forming step, a metal paste such as silver, copper, and tungsten, a solvent, an organic binder, and the like are mixed and dispersed using a roll mill or the like to obtain a conductor paste. And the pattern of the conductor paste which becomes the internal plane conductor 12 or the internal plane conductor 13 later is screen-printed on the glass ceramic green sheet. In order to manufacture a plurality of ozone generators 10 at a time, not only the pattern of the conductor paste that becomes the inner

planar conductors

12 and 13 of the single ozone generator 10 but also the pattern of the plurality of conductor pastes is a large glass. It is desirable to print on a ceramic green sheet.

Next, in the production of the ozone generator 10, a lamination process is performed (S3). In the laminating step, for example, a plurality of glass ceramic green sheets on which planar conductors are formed are stacked and a pressure is applied to produce a laminate in which unfired planar conductor patterns and glass ceramic green sheets are laminated over a plurality of layers.

Next, in the production of the ozone generator 10, a firing step is performed (S4). In the firing step, for example, the unfired laminate is fired in an oxidizing atmosphere so as to have a predetermined temperature profile. Thereby, the laminated body (ozone generator 10) of the dielectric part 11 and the

internal plane conductors

12 and 13 is produced.

The ozone generator 10 of this embodiment can be manufactured by the above manufacturing method. In order to manufacture a plurality of ozone generators 10 at a time, individual pieces to be a plurality of ozone generators 10 are cut from a large-sized ceramic green sheet laminate in any step before or after the firing step. It is desirable to perform a brewing process.

By adopting such a manufacturing method, the

discharge portions

12A and 13A having special cross-sectional shapes having dimensions larger in the discharge surface direction than in the arrangement direction are obtained simply by stacking the sheets of the dielectric layer 21 on which the planar conductor is formed. Even the ozone generator 10 can be easily manufactured.

That is, according to this manufacturing method, the thickness of the planar conductor formed on the dielectric sheet is extremely thin compared to the dimension in the planar direction even in a method with low processing accuracy such as a screen printing method. The width in the arrangement direction of 12A and 13A can be made extremely narrow. Further, since the thickness of the dielectric sheet is extremely thin as compared with the dimension in the planar direction, the arrangement interval between the

discharge portions

12A and 13A can be extremely narrowed. Therefore, in the ozone generation apparatus 10 of the present embodiment, the ozone generation efficiency can be remarkably increased even when a method with low processing accuracy such as a screen printing method is used.

Further, according to this manufacturing method, the thickness of the dielectric sheet and the planar conductor becomes uniform with extremely high accuracy, so the width of the

discharge portions

12A and 13A in the arrangement direction of the

discharge portions

12A and 13A and the discharge portions 12A, Variation in the arrangement interval of 13A can be remarkably suppressed. For this reason, in the ozone generation apparatus 10 of this embodiment, the

discharge part

12A, 13A is disconnected, a short circuit occurs between the

discharge parts

12A, 13A, or the arc discharge between the

discharge parts

12A, 13A. , 13A can be prevented from being damaged.

<< Second Embodiment >>
Next, an ozone generator 30 according to the second embodiment of the present invention will be described.

FIG. 4 (A) is a left side view of the ozone generator 30. FIG. 4B is a front view of the ozone generator 30.

In the ozone generator 30, unlike the first embodiment described above, not only the top surface of the dielectric part but also the bottom surface functions as a discharge surface.

Specifically, the ozone generator 30 according to the second embodiment of the present invention is different from the first embodiment in that the inner plane conductor 32 is replaced with the

inner plane conductors

12 and 13 and the

terminal electrodes

14 and 15. , 33 and

terminal electrodes

34, 35. Since other configurations are the same, the same reference numerals as those in the first embodiment are given, and the description of the configurations is omitted.

A plurality of internal

planar conductors

32 and 33 are provided, and are provided alternately in the dielectric portion 11 from the left side surface 11C side to the right side surface 11D side. The

inner plane conductors

32 and 33 include rectangular parallelepiped plate-

like discharge portions

32A and 33A and line-shaped

lead portions

32B and 33B extending from the

discharge portions

32A and 33A to the front side or the back side.

The terminal electrode 34 is provided so as to cover the front surface 11 </ b> E, and is connected to the plurality of internal planar conductors 32. The terminal electrode 35 is provided so as to cover the back surface 11 </ b> F, and is connected to the plurality of internal planar conductors 33.

In this configuration, the inner

planar conductors

32 and 33 are opposed to the top surface 11A and the bottom surface 11B of the dielectric part 11 at the same interval. Therefore, the edge on the top surface 11A side and the edge on the bottom surface 11B side of the inner

planar conductors

32 and 33 both function as discharge ends 32C and 33C, and both the top surface 11A and the bottom surface 11B of the dielectric part 11 It will function as a discharge surface.

Therefore, when a drive voltage is applied between the terminal electrode 34 and the terminal electrode 35, an alternating electric field is generated between the inner

planar conductors

32 and 33, and the

discharge terminals

32C and 33C of the inner

planar conductors

32 and 33 are in close proximity to each other. Creeping discharge occurs on both the top surface 11A and the bottom surface 11B of the dielectric portion 11. By this creeping discharge, ozone can be generated from oxygen contained in the gas in the facing space on the top surface 11A and the bottom surface 11B. As described above, according to the ozone generator 30 according to the present embodiment, the discharge surface can be increased, and therefore, the amount of ozone generated per unit time can be increased.

<< Third Embodiment >>
Next, an ozone generator 40 according to a third embodiment of the present invention will be described.

FIG. 5 (A) is a left side view of the ozone generator 40. FIG. 5B is a plan view of the ozone generator 40.

In the ozone generator 40, unlike the first and second embodiments described above, the top surface, bottom surface, front surface, and back surface of the dielectric portion are configured as discharge surfaces.

Specifically, the ozone generator 40 according to the third embodiment of the present invention is different from the first embodiment in that the inner planar conductor 42 is replaced with the inner

planar conductors

12 and 13 and the

terminal electrodes

14 and 15. , 43 and

terminal electrodes

44, 45. Since other configurations are the same, the same reference numerals as those in the first embodiment are given, and the description of the configurations is omitted.

A plurality of inner

planar conductors

42 and 43 are provided, and are arranged alternately in the dielectric portion 11 from the left side surface 11C side to the right side surface 11D side. The inner

planar conductors

42 and 43 include rectangular

annular discharge portions

42A and 43A, and line-shaped

lead portions

42B and 43B extending to the inner openings of the

discharge portions

42A and 43A. In addition,

interlayer connection conductors

42D and 43D are provided in the inner openings of the

discharge portions

42A and 43A so as to be connected to the

lead portions

42B and 43B.

The terminal electrode 44 is provided so as to cover the left side surface 11C, and is connected to the plurality of internal planar conductors 42 via the interlayer connection conductor 42D. The terminal electrode 45 is provided so as to cover the right side surface 11D, and is connected to the plurality of internal planar conductors 43 through the interlayer connection conductor 43D.

In this configuration, the inner

planar conductors

42 and 43 are opposed to the top surface 11A, the bottom surface 11B, the front surface 11E, and the back surface 11F of the dielectric part 11 at the same interval. For this reason, the outer peripheral edge of the inner

planar conductors

42, 43, that is, the edge on the top surface 11A side, the edge on the bottom surface 11B side, the edge on the front surface 11E side, and the edge on the back surface 11F side are all discharged. The top surface 11A, the bottom surface 11B, the front surface 11E, and the back surface 11F of the dielectric portion 11 function as discharge surfaces.

Therefore, when a drive voltage is applied between the terminal electrode 44 and the terminal electrode 45, an alternating electric field is generated between the inner

planar conductors

42 and 43, and the discharge terminals 42C and 43C of the inner

planar conductors

42 and 43 are close to and opposed to each other. Creeping discharge occurs on any of the top surface 11A, bottom surface 11B, front surface 11E, and back surface 11F of the dielectric part 11. Owing to this creeping discharge, ozone can be generated from oxygen contained in the gas in the space on the top surface 11A, bottom surface 11B, front surface 11E, and back surface 11F. As described above, according to the ozone generator 40 according to the present embodiment, the discharge surface can be further increased, and therefore, the amount of ozone generated per unit time can be increased.

<< Fourth Embodiment >>
Next, an ozone generator 50 according to a fourth embodiment of the present invention will be described.

FIG. 6A is a left side view of the ozone generator 50. FIG. 6B is a plan view of the ozone generator 50.

In the ozone generating apparatus 50, unlike the first to third embodiments described above, the dielectric portion has a cylindrical shape having a peripheral surface, and the entire peripheral surface is configured as a discharge surface.

Specifically, the ozone generation device 50 according to the fourth embodiment of the present invention is different from the first embodiment in that it replaces the dielectric portion 11, the inner

planar conductors

12 and 13, and the

terminal electrodes

14 and 15. The dielectric portion 51, the inner planar conductors 52 and 53, and the

terminal electrodes

54 and 55 are provided. Since other configurations are the same, the same reference numerals as those in the first embodiment are given, and the description of the configurations is omitted.

The dielectric portion 51 has a columnar shape with a column axis extending along the arrangement direction, and has a peripheral surface 51A, a left side surface 11C, and a right side surface 11D (not shown) as outer surfaces.

A plurality of internal planar conductors 52 and 53 are provided, and are provided alternately inside the dielectric portion 51 from the left side surface 11C side to the right side surface 11D side. The inner planar conductors 52 and 53 include

annular discharge portions

52A and 53A, and line-shaped

lead portions

52B and 53B extending to the inner openings of the

discharge portions

52A and 53A. In addition,

interlayer connection conductors

52D and 53D are provided in the inner openings of the

discharge parts

52A and 53A so as to be connected to the

lead parts

52B and 53B.

The terminal electrode 54 is provided so as to cover the left side surface 11C, and is connected to the plurality of internal planar conductors 52 via the interlayer connection conductor 52D. The terminal electrode 55 is provided so as to cover the right side surface 11D, and is connected to the plurality of internal planar conductors 53 via the interlayer connection conductor 53D.

In this configuration, the inner planar conductors 52 and 53 face the entire surface of the peripheral surface 51A of the dielectric part 51 at the same interval. Therefore, the outer peripheral edges of the inner planar conductors 52 and 53 function as the discharge ends 52C and 53C, and the entire peripheral surface 51A of the dielectric portion 51 functions as the discharge surface.

Therefore, when a driving voltage is applied between the terminal electrode 54 and the terminal electrode 55, an alternating electric field is generated between the inner planar conductors 52 and 53, and the discharge terminals 52C and 53C of the inner planar conductors 52 and 53 are in close proximity to each other. Creeping discharge occurs on the entire surface of the peripheral surface 51A of the dielectric part 51. By this creeping discharge, ozone can be generated from oxygen contained in the gas in the facing space on the peripheral surface 51A. Thus, the ozone generating apparatus 50 according to the present embodiment can also increase the discharge surface, and therefore, the ozone generation amount per unit time can also be increased.

<< Fifth Embodiment >>
Next, an ozone generator 60 according to a fifth embodiment of the present invention will be described.

FIG. 7A is an electrical connection diagram of the ozone generator 60.

The ozone generator 60 according to the present embodiment has the same general configuration as that of the above-described embodiment, and includes a dielectric unit 61, a plurality of discharge units 62, and a drive voltage source 63. The plurality of discharge parts 62 are grouped into four groups, and the discharge parts 62 of each group are arranged in order. The drive voltage source 63 is configured to output the same four-phase drive voltages V ₁ to V ₄ as the number of sets. The discharge units 62 of each set are configured to receive drive voltages V ₁ to V ₄ having phase numbers corresponding to the set numbers.

FIG. 7B is a time waveform diagram of the drive voltages V ₁ to V ₄ . The drive voltages V ₁ to V ₄ have the same repeating pattern and a phase difference of 90 ° in the order of the phase numbers. Therefore, the drive voltages V ₁ to V ₄ have a relationship in which the phase difference circulates in the order of the phase numbers.

Since it is configured in this manner, in the ozone generator according to the present embodiment, the distribution of the electric field intensity near the discharge surface changes so as to circulate along the arrangement direction of the discharge portions 62. As a result, the gas in the space near the discharge surface moves along the arrangement direction under the influence of the electric field strength. For this reason, the supply of oxygen to the discharge surface and the detachment of ozone from the discharge surface are promoted, and the amount of ozone generated can be increased. Further, since the gas flow is generated, dust and the like are hardly adsorbed on the discharge surface, and the reliability of the ozone generator 60 is improved.

In the present embodiment, although an example of using the pulse wave signal as the drive voltage V _{1 ~} V _4, the drive voltage V _{1 ~} V ₄ is also possible to use a sine wave signal or a rectangular wave signal to other It is. If a pulse wave signal or a rectangular wave signal is used, the voltage at which discharge is started can be lowered compared with the case where a sine wave signal is used, which is more preferable. In the present embodiment, an example in which the number of phases of the driving voltage is four is shown, but any integer can be adopted as long as the number of phases of the driving voltage is three or more. In the present embodiment, an example in which the same pattern waveform is obtained for each drive voltage has been described. However, the pattern waveform of each drive voltage may not be the same. For example, driving voltages having different amplitudes and repetition cycles can be used.

Each embodiment described above is merely an example, and the effects of the present invention can be obtained in any configuration as long as the configuration is within the scope of the claims. The configurations disclosed in the embodiments may be combined in any way.

DESCRIPTION OF SYMBOLS 10 ... Ozone generator 11 ... Dielectric part 11A ... Top surface 11B ... Bottom 11C ... Left side 11D ... Right side 11E ... Front 11F ... Back

surface

12, 13 ...

Internal plane conductors

12A, 13A ...

Discharge part

12B, 13B ... Lead-out

part

12C, 13C ...

discharge terminals

14, 15 ... terminal electrode 16 ... drive voltage source 21 ... dielectric layer

Claims

A dielectric portion having a discharge surface that causes creeping discharge;
A plurality of discharge portions comprising a conductor provided in the dielectric portion, having discharge ends that are close to and opposed to the discharge surface, and arranged at intervals along the discharge surface;
With
The discharge part is La ≧ Lb, where La is the dimension in the direction of the discharge surface facing the discharge surface, and Lb is the dimension in the direction of alignment along the discharge surface.
Ozone generator.
The dielectric portion includes a plurality of dielectric layers stacked in the arrangement direction, and the plurality of discharge portions are each composed of a planar conductor provided between the dielectric layers.
The ozone generator according to claim 1.
The discharge surface is composed of end surfaces of the plurality of dielectric layers,
The ozone generator according to claim 2.
The interval between the discharge surface and the discharge end is narrower than the interval between the plurality of discharge portions,
The ozone generator in any one of Claim 1 thru | or 3.
The dielectric portion has a plurality of outer surfaces including the one discharge surface,
The discharge part has a plurality of ends including one discharge end,
The interval between the discharge end and the discharge surface is narrower than the interval between the other end and the other outer surface,
The ozone generator in any one of Claim 1 thru | or 4.
The dielectric portion has a plurality of outer surfaces including two or more discharge surfaces,
The discharge part has a plurality of ends including two or more discharge ends,
The intervals at which each discharge end and each discharge surface face are equal,
The ozone generator in any one of Claim 1 thru | or 4.
The dielectric part has a peripheral surface corresponding to the discharge surface,
The discharge end extends while maintaining a constant gap with the peripheral surface of the dielectric part,
The ozone generator in any one of Claim 1 thru | or 4.
The ozone generating device includes a driving voltage source that outputs a driving voltage of N (N ≧ 3) phase having a repetitive pattern and a circulating phase difference, and the plurality of discharge units are arranged in the order n. (1 ≦ n ≦ N) phase driving voltage is input from the driving voltage source;
The ozone generator in any one of Claim 1 thru | or 7.
The driving voltage is a rectangular wave signal or a pulse wave signal.
The ozone generator of Claim 8.