CN105409331B - Air flow-producing device - Google Patents
Air flow-producing device Download PDFInfo
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- CN105409331B CN105409331B CN201480040424.9A CN201480040424A CN105409331B CN 105409331 B CN105409331 B CN 105409331B CN 201480040424 A CN201480040424 A CN 201480040424A CN 105409331 B CN105409331 B CN 105409331B
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L9/00—Disinfection, sterilisation or deodorisation of air
- A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
- A61L9/18—Radiation
- A61L9/20—Ultra-violet radiation
- A61L9/205—Ultra-violet radiation using a photocatalyst or photosensitiser
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L9/00—Disinfection, sterilisation or deodorisation of air
- A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
- A61L9/22—Ionisation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2209/00—Aspects relating to disinfection, sterilisation or deodorisation of air
- A61L2209/10—Apparatus features
- A61L2209/14—Filtering means
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00162—Controlling or regulating processes controlling the pressure
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- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
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- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0815—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes involving stationary electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0824—Details relating to the shape of the electrodes
- B01J2219/0826—Details relating to the shape of the electrodes essentially linear
- B01J2219/0828—Wires
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0875—Gas
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- C—CHEMISTRY; METALLURGY
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/24—Composition of the electrodes
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- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/60—Feed streams for electrical dischargers
- C01B2201/62—Air
Abstract
The present invention relates to a kind of air flow-producing device.Many wire electrodes (22), the 1st outer electrode (23F), the 2nd outer electrode (23A) and the 3rd outer electrode (23B) are formed with insulating properties matrix (21), surface is covered by dielectric film (24).1 wire electrode (E in 1st outer electrode (23F) and many wire electrodes (22)F) connection.It is in 2nd outer electrode (23A) and many wire electrodes (22), away from wire electrode (EF) order under odd number root wire electrode connection.It is in 3rd outer electrode (23B) and many wire electrodes (22), away from wire electrode (EF) order under even number root wire electrode connection.Recurrent pulses power supply (1) applies the Wall charge formation pulse voltage (V of each specified period 1 time to the 1st outer electrode (23F)F), and apply the pulse voltage (V1, V2) of 2 phases with the multiple ratio of each specified period to the 2nd outer electrode (23A) and the 3rd outer electrode (23B) respectively.
Description
Technical field
The present invention relates to apply the air flow-producing device produce air-flow by the voltage to electrode.
Background technology
Show by applying recurrent pulses voltage to many wire electrodes arranged in parallel to make in patent document 1
The device that air-flow is produced.
Reference picture 13 and Figure 14 are illustrated to the configuration example of the air flow-producing device shown in patent document 1.Figure 13's
(A) it is to represent many wire electrodes and to many figures of the structure of the power supply of wire electrode applied voltage, (B) of Figure 13 is Figure 13
(A) in insulating properties matrix profile.Figure 14 is the voltage of the output of recurrent pulses power supply 40 shown in Figure 13 (A)
Oscillogram.
As Figure 13 (A), (B) shown in, many wire electrodes 52 it is parallel and by constant interval ground arrangement form in insulating properties
The upper surface of matrix 51.Recurrent pulses power supply 40 exports the pulse voltage V1~V4 of 4 phases.Wire electrode 52 puts in order by it
Every 4 general connections and it is connected with recurrent pulses power supply 40 respectively.Entire surface on the surface of insulating properties matrix 51 is formed
There is dielectric film 54 to cover wire electrode 52.
4 waveforms shown in Figure 14 are the pulse electricity of 4 phases of the output of recurrent pulses power supply 40 shown in Figure 13 (A)
Corrugating.For the driving voltage of each phase, region repeated generation+V volts of 0V of interval is clipped.Adjacent phase is inclined one by one
Moved for 1/4 cycle.Like this, the time waveform of the pulse voltage of 4 phases by each as the step pulse of continued for constant time according to
It is secondary cyclically to export.
Patent document 1：Japanese Unexamined Patent Publication 2011-26096 publications
In the air flow-producing device shown in Figure 13, wire electrode 52 by its put in order every 4 it is general connection and with 4 groups
Extraction electrode 53 is connected respectively.In order to realize the structure, in multiple positions of the midway of wire electrode 52 or extraction electrode 53
Produce the cross part of wiring.Thus, for example using the forming layer of wire electrode 52 and extraction electrode 53 separated and layer is provided with
Between connect conductor (via conductors) multilager base plate, or use insulator covering wire, and must be allowed to solid
Intersect.I.e., it is impossible to constitute wire electrode and extraction electrode with the electrode pattern of individual layer.As a result, there is manufacturing cost increasing
Plus problem.
Additionally, said flow generation device is in order that air-flow is produced along a direction and needs number of phases n for more than 3, but it is above-mentioned
Problem is also produced in the same manner in the case of beyond the number of phases is for 4.
The content of the invention
Therefore, wire electrode and extraction can be constituted with the electrode pattern of individual layer it is an object of the invention to provide a kind of
The air flow-producing device of electrode.
Air flow-producing device of the invention is constituted as described below.
(1) air flow-producing device of the invention is characterised by possessing：
Insulating properties matrix；
Many wire electrodes, are arranged in above-mentioned insulating properties matrix, and are covered by dielectric film；
1st outer electrode, is connected with 1 wire electrode in above-mentioned many wire electrodes；
It is in 2nd outer electrode and the 3rd outer electrode, above-mentioned 2nd outer electrode and above-mentioned many wire electrodes, away from
The wire electrode connection of the odd number root being connected under the order of the wire electrode of above-mentioned 1st outer electrode, above-mentioned 3rd external electrical
It is in pole and above-mentioned many wire electrodes, away from the even number being connected under the order of the wire electrode of above-mentioned 1st outer electrode
The wire electrode connection of root；And
Recurrent pulses power supply, to the Wall charge formation pulse of 1 time of above-mentioned 1st outer electrode applying each specified period
Voltage, is applied to above-mentioned 2nd outer electrode and above-mentioned 3rd outer electrode with the multiple ratio of each above-mentioned specified period respectively
The pulse voltage of 2 phases.
According to it is aftermentioned it is shown be made apparent from dynamic being described in detail, according to said structure, although being applied in
Voltage to wire electrode is 2 phases, but still produces the air-flow of constant direction.Therefore, by many wire electrodes
The wire electrode of the wire electrode of odd number root and even number root connects the 2nd outer electrode and the from mutually opposing direction
3 outer electrodes, being capable of not the wiring of crossings on different level ground wire electrode and outer electrode.
(2) wire at the 1st end that the wire electrode for connecting above-mentioned 1st outer electrode is for example disposed on above-mentioned arrangement is electric
Pole.Thus, also will not be with other wire electricity to the wiring of the wire electrode being connected with the 1st outer electrode from the 1st outer electrode
Pole and the 2nd and the 3rd outer electrode intersect.
(3) wire electrode for being preferably provided with the 2nd end with the configuration in above-mentioned many wire electrodes in above-mentioned arrangement is connected
The 4th outer electrode, above-mentioned recurrent pulses power supply possess optionally to above-mentioned 1st outer electrode or the above-mentioned 4th outside
Electrode applies the unit and the list by the phasing back of the pulse voltage of above-mentioned 2 phase of above-mentioned Wall charge formation pulse voltage
Unit.That is, according to the structure, can select to make the row from the 1st end of many wire electrodes for being arranged to other wire electrodes
State and make what the air-flow from the 2nd end to the orientation of other wire electrodes was produced on the contrary that the air-flow of column direction is produced
State.
(4) pulse voltage of preferably above-mentioned 2 phase is the square wave of dutycycle 50%, the moment one of mutual rise and fall
Cause.I.e., thus, the circuit structure of recurrent pulses power supply simplifies.In addition, can expeditiously carry out Wall charge generation and
Transfer.
(5) ratio of the pulse voltage of above-mentioned 2 phase with each above-mentioned specified period when 2 times is produced.That is, thereby, it is possible to incite somebody to action
The generation frequency of Wall charge remain it is higher, so it is easy to ensure that produce air-flow flow.
(6) peak value of the preferably pulse voltage of above-mentioned 2 phase of peakedness ratio of above-mentioned Wall charge formation pulse voltage is high.That is,
Thus, the formation efficiency of Wall charge is high, and realizes low consumption electrification.
In accordance with the invention it is possible to constitute wire electrode and extraction electrode with the electrode pattern of individual layer.Therefore, manufacture is expected
The reduction of cost, slimming, raising, the reduction of fault rate of yields in manufacture etc..
Brief description of the drawings
(A), (B) of Fig. 1 is the figure of the structure for representing the air flow-producing device involved by the 1st implementation method, (A) of Fig. 1
It is to represent to be formed with the arrangement electrode base board 2 of wire electrode and the figure of the attachment structure for its recurrent pulses power supply 1,
(B) of Fig. 1 is the profile for arranging electrode base board 2.
Fig. 2 is the block diagram of the structure for representing recurrent pulses power supply 1.
Fig. 3 is the oscillogram of each pulse voltage that recurrent pulses power supply 1 is produced.
Fig. 4 is the exploded perspective view of every layer of the arrangement electrode base board 2 shown in Fig. 1.
Fig. 5 is the top view of the electrode layer 25 shown in Fig. 4.
(A) of Fig. 6 is represented to wire electrode EFApplied voltage VCAnd by wire electrode E1 (1)It is held at ground potential state
State figure, (B) of Fig. 6 is to represent the situation that positive Wall charge 28 and negative Wall charge 29 are formed between two electrodes
Figure, (C) of Fig. 6 is represented in wire electrode E1 (1)And the region 30 between the adjacent electrode in its left and right produces the shape of creeping discharge
The figure of condition, (D) of Fig. 6 is the figure of the situation for representing the Wall charge after creeping discharge stopping, and (E) of Fig. 6 is to represent Fig. 6 (D)
The figure of the situation of the Wall charge after the creeping discharge stopping at moment afterwards, (F) of Fig. 6 is to represent the moment after Fig. 6 (E)
Creeping discharge stop after Wall charge situation figure, (G) of Fig. 6 is the creeping discharge for representing the moment after Fig. 6 (F)
The figure of the situation of the Wall charge after stopping.
(A), (B) of Fig. 7 is the figure of the structure for representing the air flow-producing device involved by the 2nd implementation method, (A) of Fig. 7
It is to represent to be formed with the arrangement electrode base board 2 of wire electrode and the figure of the attachment structure for its recurrent pulses power supply 1,
(B) of Fig. 7 is the profile for arranging electrode base board 2.
(A), (B) of Fig. 8 is the oscillogram of each pulse voltage that recurrent pulses power supply 1 is produced, and (A) of Fig. 8 is square
To the oscillogram of each pulse voltage under pattern, (B) of Fig. 8 is the oscillogram of each pulse voltage under reverse direction pattern.
Fig. 9 is the exploded perspective view of every layer of the arrangement electrode base board 2 shown in Fig. 7.
Figure 10 is the top view of the electrode layer 25 shown in Fig. 9.
(A) of Figure 11 is the pulse voltage V involved by the 3rd implementation methodF、V1、V2、VROscillogram.(B) of Figure 11 be
Pulse voltage V involved by 3rd implementation methodF、V1、V2、VROther oscillograms.
Figure 12 is the oscillogram of each pulse voltage that the recurrent pulses power supply involved by the 4th implementation method is produced.
(A) of Figure 13 is the figure for representing many wire electrodes and the structure to the power supply of their applied voltages, (B) of Figure 13
It is the profile of the insulating properties matrix in Figure 13 (A).
Figure 14 is the oscillogram of the pulse voltage of the output of recurrent pulses power supply 40 shown in Figure 13 (A).
Specific embodiment
Hereafter, reference picture enumerates several specific examples to represent for implementing multiple modes of the invention.In each figure
In, assign same reference numerals to same area.Certainly, each implementation method is to illustrate, and can be carried out in different implementation methods
In the displacement or combination of the locality of structure that show.
《1st implementation method》
(A), (B) of Fig. 1 is the figure of the structure for representing the air flow-producing device involved by the 1st implementation method, (A) of Fig. 1
It is to represent to be formed with the arrangement electrode base board 2 of wire electrode and the figure of the attachment structure for its recurrent pulses power supply 1,
(B) of Fig. 1 is the profile for arranging electrode base board 2.
Arrangement electrode base board 2 possesses the insulating properties matrixes such as dielectric base plate 21 and is formed at many of the insulating properties matrix 21
Wire electrode 22.Many wire electrodes 22 are parallel and constant interval ground arrangement form is in the upper surface of insulating properties matrix 21.Outside 1st
1 wire electrode E in portion electrode 23F and these many wire electrodes 22FConnection.In addition, the 2nd outer electrode 23A with many
It is in wire electrode 22, away from the wire electrode E for being connected to the 1st outer electrode 23FFOrder (in (A) of Fig. 1, to x side
To order) under odd number root wire electrode connect.Also, the wire electrode of the 3rd outer electrode 23B and even number root connects
Connect.
Entire surface on the surface of insulating properties matrix 21 is formed with the dielectric films 24 such as resinous coat, silicate glass coating
To cover wire electrode 22.According to the structure, the characteristic that the oxidation of electrode, vulcanization to maintain for a long time stabilization can be suppressed.
The Wall charge formation pulse that each specified period of 1 pair of the 1st outer electrode 23F applying of recurrent pulses power supply is 1 time
Voltage VF, and respectively to the 2nd outer electrode 23A and the 3rd outer electrode 23B with the multiple ratio applying of each specified period
Pulse voltage V1, V2 of 2 phases.
Fig. 2 is the block diagram of the structure for representing recurrent pulses power supply 1.As shown in Fig. 2 recurrent pulses power supply 1 is by constant pressure
DC power supply circuit 12, gate driving circuit 13 and timing signal generator circuit 11 are constituted.Timing signal generator circuit 11 gives
The timing signal of pulse voltage is produced, gate driving circuit 13 switches from constant-voltage DC source circuit 12 according to the timing signal
The voltage 0, Vc, V of inputTAnd voltage pulse output VF、V1、V2.The gate driving circuit for example can be with power MOS-FET
Main element and constitute.
Fig. 3 is the oscillogram of each pulse voltage that recurrent pulses power supply 1 is produced.Wall charge is formed and uses pulse voltage VFIt is
Take 0 or VCThis 2 value, cycle T, the square-wave voltage of dutycycle 25%.In the example shown in Fig. 3, Wall charge is formed to be used
Pulse voltage VFRise in moment t1, the moment t2 after T/4 declines.That is, time t1~t2 be voltage Vc, time t2~
T5 is 0.For example, voltage Vc is 700V, cycle T is 0.5ms.
Pulse voltage V1 and V2 are to take 0 or VTThis 2 value, cycle T/2, the square-wave voltage of dutycycle 50%.
In example shown in Fig. 3, pulse voltage V1 is from pulse voltage VFRising moment t1 rise T/4 after moment t2 rise, it
The moment t3 after another T/4 declines afterwards.In addition, pulse voltage V2 rises in the decline moment t3 of pulse voltage V1, Zhi Hou
Moment t4 after another T/4 declines.That is, the moment one of the decline of the moment t3 and pulse voltage V1 of the rising of pulse voltage V2
Cause.Voltage VTFor example, 400V.
By exporting the pulse voltage of the above repeatedly, the Wall charge of 1 time in each cycle T is applied to the 1st outer electrode 23F
Pulse voltage V is used in formationF, and respectively to the 2nd outer electrode 23A and the 3rd outer electrode 23B with 2 times in each cycle T
Ratio applies the pulse voltage of 2 phases.
Fig. 4 is the exploded perspective view of every layer of the arrangement electrode base board 2 shown in Fig. 1.Arrangement electrode base board 2 is by insulating properties
Matrix 21, electrode layer 25 and dielectric film 24 stack gradually composition from lower floor in the order.But, Fig. 4 is only for
The exploded view of structure is illustrated, might not be corresponding with manufacturing process.
Fig. 5 is the top view of the electrode layer 25 shown in Fig. 4.In electrode layer 25, many wire electrodes 22 are parallel and constant
Compartment of terrain arrangement form.The width of wire electrode 22 and interval are for example 50 μm.
One end in many wire electrodes 22 is configured with wire electrode EF.1st outer electrode 23F and wire electrode EF
Conducting, end and the external connection terminals P of the 1st outer electrode 23FFConnection.In addition, for other wire electrode Ei (j)And
Speech, puts in order under (in Figure 5, to the order in x directions) at it, the wire electrode of odd number root and the wire of even number root
Electrode common connection respectively.Index number i is wire electrode and the 2nd outer electrode the 23A conducting of odd number, and index number i is even
Several wire electrodes and the 3rd outer electrode 23B are turned on.The end of the 2nd outer electrode 23A is connected with external connection terminals P1, and the 3rd
The end of outer electrode 23B is connected with external connection terminals P2.
The covering electrode layer 25 of dielectric film 24 of the superiors shown in Fig. 4.But, 3 external connections with electrode layer 25
Electrode P1, PFAnd the corresponding position openings of P2.
Additionally, above-mentioned voltage VTAnd VCMeet
[formula 1]
[formula 2]
VTII＜ VC…(2)
.Wherein,
VTH：Threshold voltage needed for causing creeping discharge between 2 adjacent wire electrodes
VTH’：When adjacent area has creeping discharge, in the adjacent 2 piece wire with the adjacent area adjoining position
Threshold voltage needed for inducing creeping discharge between electrode
Q：When producing creeping discharge between 2 adjacent wire electrodes, on the dielectric film 24 of single line shape electrode
The absolute value of the surface charge of formation
CWC：According to it is assumed that be placed with Wall charge on 2 adjacent dielectric films of wire electrode 24 covering
In the case of the electrostatic capacitance tried to achieve of potential difference that produces.
Effects of (G) of (A)~Fig. 6 of reference picture 3 and Fig. 6 to this air flow-producing device is illustrated.
First, if before time tl, there is no true electric charge or true electric charge considerably less on the surface of dielectric film 24.
In moment t1, shown in (A) of such as Fig. 6, wire electrode EFIt is applied in voltage VC, wire electrode E1 (1)It is held at ground
Potential state.According to formula (2), wire electrode EFWith E1 (1)Between potential difference VCMore than in wire electrode EFWith wire electrode E1 (1)
Between cause creeping discharge needed for threshold voltage VTH.Now, as shown in (A) of Fig. 6, in wire electrode EFWith wire electrode E1 (1)Between the region 30A of gas cause creeping discharge.The positive and negative charged particle produced in the creeping discharge passes through two electrodes
Between highfield and be subject to Coulomb force, the charged particle 26 of positively charged is moved to+x directions and tends to wire electrode E1 (1), with negative
The charged particle 27 of electricity is moved to-x directions and tends to wire electrode EF.Any electrode is covered by dielectric film 24, so band
Charged particle reaches the surface of dielectric film 24 and stop motion, will not reach electrode.In the present invention, will stay on the dielectric
The charged particle on the surface of film 24 is referred to as " Wall charge ".
(B) of Fig. 6 represents the situation that positive Wall charge 28 and negative Wall charge 29 are formed on dielectric film 24.By wall electricity
Effective potential difference (wall current potential) that lotus produces and two interelectrode potential differences are reversed polarity, so by forming Wall charge, two electricity
The summation of the potential difference of interpolar diminishes, the threshold value of the potential difference needed for becoming less than the continuation of electric discharge.Therefore, two interelectrode put
Electricity stops in very short time (general tens of ns).Here, it is located at wire electrode EFAnd wire electrode E1 (1)The wall being formed about
The summation of the size of electric charge is respectively-Q and+Q.
Next, in moment t2, wire electrode E1 (j)(j is natural number.Hereinafter, it is identical when being not particularly illustrated.) and E3 (j)It is applied in voltage VT.Other wire electrodes are placed in earthing potential state.First, except E1 (1)Outside E1 (j)And E3 (j)In, the potential difference between adjacent wire electrode is V respectivelyT.According to formula (1), potential difference VTLess than threshold voltage VTH.Cause
This, not with wire electrode E1 (1)Adjacent wire electrode, does not produce creeping discharge.
Next, focusing on wire electrode E1 (1)With wire electrode adjacent thereto.First, as shown in (B) of Fig. 6,
Wire electrode EFWith wire electrode E1 (1), the Wall charge 28,29 of+Q and-Q is respectively present in its vicinity.Here, based on the Wall charge
Two interelectrode potential difference (wall current potential) VWCIt is expressed as
[formula 3]
Therefore, wire electrode E1 (1)With wire electrode EFBetween potential difference summation Vtotal 1(1)-FFor
[formula 4]
In addition, wire electrode E1 (1)With in its right adjacent wire electrode E2 (1)Between potential difference summation Vtotal 1(1 )-2(1)It is expressed like
[formula 5]
Here, met according to formula (1) with formula (4) and the voltage of formula (5) expression
[formula 6]
VTH' ＜ Vtotal 1(1)-2(1)＜ VTH＜ Vtotal 1(1)-F (6)。
Now, first, in wire electrode E1 (1)With wire electrode EFBetween according to the summation of two interelectrode potential differences produce
Creeping discharge.On the other hand, in wire electrode E1 (1)With wire electrode E2 (1)Between, according to formula (6), though do not directly contribute along face
Electric discharge, but produce the creeping discharge induced by the creeping discharge in adjacent region.
Like this, in moment t2, shown in (C) of such as Fig. 6, in wire electrode E1 (1)And the adjacent electrode in its left and right between
Region 30B produces creeping discharge.As shown in (C) of Fig. 6, if setting by wire electrode E1 (1)With wire electrode EFBetween produce
Charged particle, the Wall charge of-Q and+Q is formed respectively, in addition, by wire electrode E1 (1)With wire electrode E2 (1)Between produce
Raw charged particle, also forms the Wall charge of-Q and+Q respectively, then the Wall charge after creeping discharge stops becomes (D) such as Fig. 6
It is shown.That is, in wire electrode EFVicinity, new charged particle+Q is added to Wall charge-Q, so electric charge disappears.In wire electricity
Pole E1 (1)Vicinity, charged particle-Q is added from the adjacent electrode in left and right to Wall charge+Q, thus the new quantity of electric charge turn into-Q.
In wire electrode E2 (1)Vicinity, by wire electrode E1 (1)With wire electrode E2 (1)Between the charged particle that produces form+Q
Wall charge.
Next, to the pulse voltage V by being applied in moment t32The phenomenon of generation is illustrated.In (D) of Fig. 6
The distribution that the distribution of Wall charge is equal to the Wall charge in (B) by Fig. 6 moves in parallel the state after 1 electrode part to+x directions.
Therefore, the pulse voltage V by being applied in moment t32, produce and the phenomenon produced in moment t2 moved in parallel 1 to+x directions
Phenomenon after electrode part.Therefore, the Wall charge after creeping discharge stops becomes as shown in (E) of Fig. 6.
For the pulse voltage V by being applied in moment t41The phenomenon of generation, similarly illustrates, creeping discharge stops
Wall charge afterwards becomes as shown in (F) of Fig. 6.
Next, to the pulse voltage V by being applied in moment t5FAnd V2The phenomenon of generation is illustrated.Wire electrode
EFSituation during with the applied voltage and the state of Wall charge in wire electrode adjacent thereto with moment t1 is identical, so producing
Phenomenon it is also identical.In addition, for wire electrode E4 (1)With wire electrode E adjacent thereto1 (2)In applied voltage and Wall charge
State for, situation during relative to moment t4 has moved in parallel 1 electrode part to+x directions.Therefore, in wire electrode E4 (1)
With wire electrode E adjacent thereto1 (2)The situation when phenomenon of generation is also relative to moment t4 has moved in parallel 1 electricity to+x directions
Pole part.Therefore, the Wall charge after creeping discharge stops becomes as shown in (G) of Fig. 6.
In figure 3, after moment t6 repeatedly with moment t2 after identical waveform.From the description above can be clear, when
After quarter t6, also when the setting of the voltage shown in Fig. 3 is applied, by Wall charge formation pulse voltage VFApplying, in wire
Electrode EFWith wire electrode E1 (1)The surface of dielectric film 24 of vicinity produce new Wall charge.In addition, by alternately applying arteries and veins
Rush voltage V1 and V2, the Wall charge is shown just like to the such action of+x directions transfer.
Like this, although to wire electrode Ei (j)The voltage of applying has a space periodicity of every 2, but Wall charge shape
Into according to Wall charge formation pulse voltage VFApplying only carried out by cycle T, and keep what the history of Wall charge was saved
Moved to+x directions under state, so space periodic turns into every 4 wire electrode Ei (j)Cycle.Therefore, although to wire electricity
Pole Ei (j)The voltage of applying is 2 phases, but on the electric discharge produced on surface and the formation of Wall charge, can make it have sky
Between directionality.
During any of the above-described creeping discharge, the positive and negative charged particle of generation is according to two interelectrode highfields
By Coulomb force, the charged particle of positively charged is moved to+x directions, and electronegative charged particle is moved to-x directions.Here, it is raw
Into various charged particles, but for example in the air of standard state, the charged particle of most of positively chargeds be nitrogen molecular just
Ion, most of electronegative charged particles are electronics.In the case where the valence of negative ions is equal, since being identical electricity
Potential difference just has identical energy, but momentum is in direct ratio with the square root of quality, so cation has compared with electronics overwhelming
The big momentum of property.Negative ions conflict repeatedly in motion with the neutral molecule for constituting air, and momentum is given to air, but
There is big difference in cation and electronics on momentum, so the body force that air is subject to is arranged by the momentum of cation, into
To tend to the direction in+x directions.The body force in+x the directions that the air is subject to produces the air-flow in+x directions.
In action specification illustrated above, time t1~t2 pulse voltages V2 is located at for 0V, but it is also possible to produce in Fig. 3
In the voltage that is represented by dashed line.I.e., it is also possible to wire electrode E in (A) of Fig. 62 (1)Apply positive voltage.In this case,
Also in wire electrode EFWith wire electrode E adjacent thereto1 (1)Between cause creeping discharge, even if so t1-t2 produce pulse
Voltage V2, above-mentioned action is also constant.
In this configuration, although to wire electrode E1 (j)~E4 (j)The voltage of applying is only 2 phases, by the arrangement of wire electrode
Order to every 2 applying identical voltages, but by using the history of Wall charge, the x direction related to the action of electric charge
Cycle was not 2 electrode cycles but 4 electrode cycles.This is one of feature of the invention.Therefore, can be clear according to Fig. 4 and Fig. 5,
Wire electrode 22 and extraction electrode 23A, 23B can not be constituted across in any case, for example can be by one layer of electrode
Pattern is constituted.
Like this, by can be easily configured by Uncrossed electrode, cost degradation, slimming are expected, in manufacture
The raising of yields, reduction of fault rate etc..
In addition, according to the present invention, the pulse voltage of 2 phases is the square wave of dutycycle 50%, mutual rise and fall
Moment is consistent, so the circuit structure of recurrent pulses power supply is simplified.In addition, the generation of Wall charge can be carried out expeditiously
And transfer.
In addition, the peak value (400V) of the pulse voltage of the peak value (700V) than above-mentioned 2 phase of Wall charge formation pulse voltage
Height, thus, the formation efficiency of Wall charge is high, and with relatively low voltage transfer Wall charge, it is achieved that low consumption electrification.
Additionally, according to Paschen (Paschen) law, discharge ionization voltage is the function of air pressure and the product of interelectrode distance.
In atmosphere, the minimum value of discharge ionization voltage is implemented around for 0.57mmHgcm in the product of air pressure and interelectrode distance, this
When discharge ionization voltage be 330V.In addition, in application of the invention, if the generation for high voltage pulse uses power
MOS-FET, then for example drain as 2SK2613 and the absolute rated value of voltage between source electrodes compares in the part of below 1000V
It is readily obtained.If 5% is considered as upper surplus is used, if discharge ionization voltage is in below 950V, the composition of device
It is easier to.Therefore, if being the value in the range of 330V to 950V to the pulse voltage that wire electrode applies, conveyed as gas
Device is more preferably.
It is the scope of 1kHz to 1MHz preferably as the scope of the repetition rate of above-mentioned pulse voltage V1, V2.Because
Frequency can obtain the wind speed of practicality in more than 1kHz, in the circuit structure of the frequency periodical pulse power 1 of below 1MHz
Into becoming easy.
《2nd implementation method》
(A), (B) of Fig. 7 is the figure of the structure for representing the air flow-producing device involved by the 2nd implementation method, (A) of Fig. 7
It is to represent to be formed with the arrangement electrode base board 2 of wire electrode and the figure of the attachment structure for its recurrent pulses power supply 1,
(B) of Fig. 7 is the profile for arranging electrode base board 2.
Arrangement electrode base board 2 possesses insulating properties matrix 21 and is formed at many wire electrodes 22 of the insulating properties matrix 21.
Many wire electrodes 22 are parallel and constant interval ground arrangement form is in the upper surface of insulating properties matrix 21.1st outer electrode 23F with
1 wire electrode E for being configured in the 1st end in these many wire electrodes 22FConnection.In addition, the 4th outer electrode 23R with
It is configured in 1 wire electrode E at the 2nd endRConnection.2nd outer electrode 23A with it is in many wire electrodes 22, away from being connected
In the wire electrode E of the 1st outer electrode 23FFOrder (in (A) of Fig. 7, to the order in x directions) under odd number root
Wire electrode is connected.Also, the 3rd outer electrode 23B is connected with the wire electrode of even number root.Arrange other of electrode base board 2
Structure is as shown in (A) (B) of Fig. 1.
Recurrent pulses power supply 1 couple of the 1st outer electrode 23F and the 4th outer electrode 23R apply each specified period 1 time
Wall charge formed use pulse voltage VF、VR, and respectively to the 2nd outer electrode 23A and the 3rd outer electrode 23B with each rule
The multiple ratio of fixed cycle applies pulse voltage V1, V2 of 2 phases.The recurrent pulses power supply possesses to the as shown in as after
1 outer electrode or the 4th outer electrode optionally apply the unit and the pulse electricity by 2 phases of Wall charge formation pulse voltage
The unit of the phasing back of pressure.
(A), (B) of Fig. 8 is the oscillogram of each pulse voltage that recurrent pulses power supply 1 is produced.Recurrent pulses power supply 1
The mould of each pulse voltage of the pattern (positive direction pattern) of each pulse voltage with (A) for producing Fig. 8 and (B) of generation Fig. 8
Formula (reverse direction pattern).Positive direction pattern is the pattern for making air-flow be produced to the x directions shown in Fig. 7 (A), and reverse direction pattern is
Make air-flow to Fig. 7 (A) shown in-x directions (rightabout in x directions) produce pattern.
Wall charge is formed and uses pulse voltage VF、VRIt is to take 0 or VCThis 2 value, cycle T, dutycycle 25% square wave electricity
Pressure.In the example shown in (A) in Fig. 8, Wall charge is formed and uses pulse voltage VFRise in moment t1, the moment t2 after T/4
Decline.That is, it is voltage Vc in time t1~t2, the moment beyond this is 0.In addition, in example shown in (B) in Fig. 8, wall
Electric charge is formed and uses pulse voltage VRRise in moment t1, the moment t2 after T/4 declines.That is, it is voltage Vc in time t1~t2,
Moment beyond this is 0.
Pulse voltage V1 and V2 are to take 0 or VTThis 2 value, cycle T/2, the square-wave voltage of dutycycle 50%.
In example shown in (A) of Fig. 8, pulse voltage V1 is from pulse voltage VFRising moment t1 rise T/4 after moment t2 on
Rise, the moment t3 after another T/4 declines afterwards.In addition, pulse voltage V2 rises in the decline moment t3 of pulse voltage V1, it
The moment t4 after another T/4 declines afterwards.In the example shown in (B) in Fig. 8, pulse voltage V2 is from pulse voltage VRIt is upper
The moment t1 for rising plays the moment t2 after T/4 and rises, and the moment t3 after another T/4 declines afterwards.In addition, pulse voltage V1 is in arteries and veins
The decline moment t3 for rushing voltage V1 rises, and the moment t4 after another T/4 declines afterwards.
Recurrent pulses power supply 1 makes Wall charge formation pulse voltage V under positive direction patternFProduce, in reverse direction mould
Under formula, make Wall charge formation pulse voltage VRProduce.In addition, under positive direction pattern and reverse direction pattern, making the pulse of 2 phases
The phasing back of voltage V1, V2.
In addition it is also possible to (A) in Fig. 8, in (B) of Fig. 8, the voltage that generation is represented by dashed line.That is, with using Fig. 3 with
And situation that Fig. 6 is illustrated is identical, even if (A) in Fig. 8, in (B) of Fig. 8, the voltage that generation is represented by dashed line, above-mentioned is dynamic
Make also constant.
Fig. 9 is the exploded perspective view of every layer of the arrangement electrode base board 2 shown in Fig. 7.Arrangement electrode base board 2 is by insulating properties
Matrix 21, electrode layer 25 and dielectric film 24 stack gradually composition from lower floor in the order.
Figure 10 is the top view of the electrode layer 25 shown in Fig. 9.Many wire electrodes 22 are parallel and constant interval ground arranges shape
Into in electrode layer 25.In addition to the various electrodes shown in Fig. 5, wire electrode E is also formed withR, the 4th outer electrode 23R and
External connection terminals PR。
Action under above-mentioned positive direction pattern is identical with the action shown in (G) of (A)~Fig. 6 of Fig. 6, and air-flow is to x directions
Produce.(A), (B) according to Fig. 8, Figure 10 can be clear, under positive direction pattern and reverse direction pattern, the configuration bit of wire electrode
The geometric order and the time sequencing of pulse voltage put are inversely related, so on reverse direction pattern, also according to phase
Same principle, air-flow is produced to-x directions.
Additionally, identical with the situation of the 1st implementation method, it is also possible in (A) of Fig. 8, pulse voltage V2 time t1~
T2 is voltage VT.It is equally possible that in (B) of Fig. 8, pulse voltage V1 is voltage V in time t1~t2T。
《3rd implementation method》
In the 3rd implementation method, other waveform examples of each pulse voltage that recurrent pulses power supply is produced are shown.Figure 11
(A) be pulse voltage V involved by the 3rd implementation methodF、V1、V2、VROscillogram.(B) of Figure 11 is the 3rd implementation method institute
The pulse voltage V being related toF、V1、V2、VRAnother other oscillograms.
As shown in (A) of Figure 11, Wall charge is formed and uses pulse voltage VF、VRPulse width can also be than the 1/4 of 1 cycle T
It is short.In addition, the pulse width of pulse voltage V1, V2 of 2 phases can also be smaller than dutycycle 50%.If using such pulse electricity
Pressure, then play the increased effect of the free degree of the constructive method of power circuit.
In addition, such as the pulse voltage of the blunt waveform of the circle that (B) of Figure 11 is shown, or harmonic component is inhibited by.
If using such pulse voltage, can less be produced to air-flow and suppressed with impacting to outside noise radiation.
In addition it is also possible to (A) in Figure 11, in (B) of Figure 11, the voltage that generation is represented by dashed line.That is, with use Fig. 3
And situation that Fig. 6 is illustrated is identical, even if (A) in Figure 11, in (B) of Figure 11, the voltage that generation is represented by dashed line is above-mentioned
Action it is also constant.
《4th implementation method》
Figure 12 is the oscillogram of each pulse voltage that the recurrent pulses power supply involved by the 4th implementation method is produced.The 1st
In~the 3 implementation method, the pulse voltage of 2 phases is the pulse produced with the ratio of 2 times in each cycle T.Thereby, it is possible to by wall
The generation frequency of electric charge remain it is higher, so it is easy to ensure that produce air-flow flow.But, the invention is not limited in
This.In the example shown in Figure 12, pulse voltage V1, V2 of 2 phases is produced with the ratio of 3 times in each cycle T.That is, in Figure 12
In shown example, in moment t1~t2 generation Wall charges, the Wall charge is in moment t2~t7 transfers.
Like this, produced with the ratio of 3 times in each cycle T (or more than 3 times) even if being configured to the pulse voltage of 2 phases
It is raw, also keep with forming the state being saved with the history of the Wall charge of pulse voltage generation mobile by Wall charge.
In addition it is also possible in fig. 12, the voltage that generation is represented by dashed line.That is, with illustrated using Fig. 3 and Fig. 6
Situation is identical, even if in fig. 12, the voltage that generation is represented by dashed line, above-mentioned action is also constant.
If additionally, making the air flow-producing device shown in each implementation method illustrated above in the oxygen containing atmosphere such as air
Middle action, then in most cases, ozone is generated along with creeping discharge.Therefore, this air flow-producing device can be used as producing
The device of bag air stream ozoniferous is given birth to use.Ozone can be used in deodorant, sterilizing etc., so needing diffusion package to contain ozone
Air in the case of, can be realized by the way that fan need not be set in addition cost degradation, miniaturization.
Description of reference numerals
E1~E4... wire electrode；EF、ER... wire electrode；P1、P2、PF、PR... external connection terminals；The phase arteries and veins of V1, V2 ... 2
Rush voltage；VF、VR... Wall charge formation pulse voltage；1 ... recurrent pulses power supply；2 ... arrangement electrode base boards；11 ... timings
Signal generating circuit；12 ... constant-voltage DC source circuits；13 ... gate driving circuits；21 ... insulating properties matrixes；22 ... wire electricity
Pole；The outer electrodes of 23F ... the 1st；The outer electrodes of 23A ... the 2nd；The outer electrodes of 23B ... the 3rd；The outer electrodes of 23R ... the 4th；24 ... electricity
Deielectric-coating；25 ... electrode layers；26th, 27 ... charged particles；28th, 29 ... Wall charges；30A, 30B ... region；40 ... recurrent pulses
Power supply；51 ... insulating properties matrixes；52 ... wire electrodes；53 ... extraction electrodes；54 ... dielectric films.
Claims (10)
1. a kind of air flow-producing device, possesses：
Insulating properties matrix；
Many wire electrodes, are arranged in the insulating properties matrix, and are covered by dielectric film；
1st outer electrode, is connected with 1 wire electrode in many wire electrodes；
2nd outer electrode and the 3rd outer electrode, the 2nd outer electrode with it is in many wire electrodes, away from being connected
In the odd number root under the order of the wire electrode of the 1st outer electrode wire electrode connect, the 3rd outer electrode with
It is in many wire electrodes, away from the even number root being connected under the order of the wire electrode of the 1st outer electrode
Wire electrode is connected；And
Recurrent pulses power supply, to the 1st outer electrode applying each specified period Wall charge formation pulse electricity of 1 time
Pressure, applies 2 to the 2nd outer electrode and the 3rd outer electrode with the multiple ratio of each specified period respectively
The pulse voltage of phase.
2. air flow-producing device according to claim 1, wherein,
The wire electrode for being connected with the 1st outer electrode is the wire electrode at the 1st end for being configured in the arrangement.
3. air flow-producing device according to claim 2, wherein,
The air flow-producing device possesses the wire with the 2nd end in many wire electrodes, to be configured in the arrangement
4th outer electrode of electrode connection,
The recurrent pulses power supply possesses optionally to the 1st outer electrode or the 4th outer electrode applying institute
State the unit and the unit by the phasing back of the pulse voltage of 2 phase of Wall charge formation pulse voltage.
4. the air flow-producing device according to any one in claims 1 to 3, wherein,
The pulse voltage of 2 phase is the square wave of dutycycle 50%, and the moment of mutual rise and fall is consistent.
5. the air flow-producing device according to any one in claims 1 to 3, wherein,
The pulse voltage of 2 phase is produced with the ratio of each specified period 2 times.
6. air flow-producing device according to claim 4, wherein,
The pulse voltage of 2 phase is produced with the ratio of each specified period 2 times.
7. the air flow-producing device according to any one in claims 1 to 3, wherein,
The peak value of the pulse voltage of 2 phases is high described in the peakedness ratio of the Wall charge formation pulse voltage.
8. air flow-producing device according to claim 4, wherein,
The peak value of the pulse voltage of 2 phases is high described in the peakedness ratio of the Wall charge formation pulse voltage.
9. air flow-producing device according to claim 5, wherein,
The peak value of the pulse voltage of 2 phases is high described in the peakedness ratio of the Wall charge formation pulse voltage.
10. air flow-producing device according to claim 6, wherein,
The peak value of the pulse voltage of 2 phases is high described in the peakedness ratio of the Wall charge formation pulse voltage.
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| JP2013-150006 | 2013-07-19 | ||
| PCT/JP2014/065532 WO2015008559A1 (en) | 2013-07-19 | 2014-06-12 | Airflow generator |
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| CN107207250B (en) * | 2015-02-13 | 2019-04-26 | 株式会社村田制作所 | Ozone generator |
| JP6547826B2 (en) * | 2015-06-08 | 2019-07-24 | 株式会社村田製作所 | Ozone generator |
| WO2019172034A1 (en) | 2018-03-05 | 2019-09-12 | 株式会社村田製作所 | Antimicrobial device and electric apparatus |
| CN108601196A (en) * | 2018-04-29 | 2018-09-28 | 航天慧能（江苏）环境工程有限公司 | The matrix plasma apparatus of fresh air system based on Internet of Things |
| CN112218418A (en) * | 2020-11-30 | 2021-01-12 | 清华大学 | Dielectric barrier surface discharge unit and electronic equipment |
| TWI826900B (en) * | 2021-03-03 | 2023-12-21 | 日商斯庫林集團股份有限公司 | Plasma generation apparatus and substrate processing apparatus |
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| CN1833313A (en) * | 2003-06-25 | 2006-09-13 | 积水化学工业株式会社 | Device and method for surface treatment such as plasma treatment |
| CN102307425A (en) * | 2011-06-24 | 2012-01-04 | 北京大学 | Combinable array plasma generating device |
| CN101920031B (en) * | 2009-12-31 | 2013-04-17 | 周云正 | Plasma air sterilization and purification device and air sterilization and purification method thereof |
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| JP2009284574A (en) * | 2008-05-19 | 2009-12-03 | Dainippon Printing Co Ltd | Two-phase driven static actuator |
| JP2010148207A (en) * | 2008-12-17 | 2010-07-01 | Dainippon Printing Co Ltd | Electrostatic actuator and manufacturing method therefor |
| US20120156091A1 (en) * | 2009-03-16 | 2012-06-21 | Drexel University | Methods and devices for treating surfaces with surface plasma` |
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| CN1833313A (en) * | 2003-06-25 | 2006-09-13 | 积水化学工业株式会社 | Device and method for surface treatment such as plasma treatment |
| CN101920031B (en) * | 2009-12-31 | 2013-04-17 | 周云正 | Plasma air sterilization and purification device and air sterilization and purification method thereof |
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