JP6351005B2 - 太陽電池セルの製造方法およびそれに用いる加熱装置 - Google Patents
太陽電池セルの製造方法およびそれに用いる加熱装置 Download PDFInfo
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
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- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
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Description
図3は、実施の形態に係る太陽電池セル70の製造方法を示すフローチャートである。まず光電変換部10を用意し、光電変換部10の第1主面10aに電極層を形成し(S10)、第1主面10aに形成した電極層を仮乾燥させる(S12)。次に、光電変換部10の第2主面10bに電極層を形成し(S14)、第1主面10aおよび第2主面10bの電極層を赤外光の照射により本乾燥させる(S16)。
光電変換部10の第1主面10aおよび第1主面10aと反対側の第2主面10bの少なくとも一方に熱硬化性樹脂を含む電極層40を設けることと、
電極層40に赤外光を照射して加熱することと、
赤外光の照射中に光電変換部10の周囲に気流Fを作ることと、を備える。
赤外光を照射することは、
第1主面10aに対向する第1放射体81から第1赤外光B1を照射することと、
第2主面10bに対向する第2放射体82から第2赤外光B2を照射することと、を含んでもよい。
第2放射体82は、第1赤外光B1の吸収により発熱して第2赤外光B2を放射してもよい。
太陽電池セル70の製造方法は、赤外光の照射により加熱される電極層40を用いて電極層下に位置する第1透明導電層17または第2透明導電層18の一部を局所的に加熱することをさらに備えてもよい。
光電変換部10の主面92aが鉛直方向Gに沿う向きとなるように光電変換部10を立てた状態で支持する支持部91と、
支持部91に支持される光電変換部10を挟んで互いに対向して設けられ、光電変換部10に向けて赤外光を放射する第1放射体81および第2放射体82と、
第1放射体81および第2放射体82の鉛直方向Gの下方に設けられる排気口95と、を備える。
排気口95は、支持部91に支持される光電変換部10の近傍において鉛直方向Gに流れる気流Fを生じさせる。
pn接合またはpin接合を有する発電層11と、
発電層11上に設けられる透明導電層(第1透明導電層17、第2透明導電層18)と、
透明導電層(第1透明導電層17、第2透明導電層18)上の一部に設けられる電極(受光面電極20、裏面電極30)と、を備える。
透明導電層(第1透明導電層17、第2透明導電層18)は、電極(受光面電極20、裏面電極30)下に位置する第1部分17a、18aと、第1部分17a、18aと結晶性の異なる第2部分17b、18bとを有する。
図9は、変形例に係る太陽電池セル70の製造方法を示すフローチャートである。本変形例における製造方法では、光電変換部10の主面に第1電極層を形成し(S20)、第1電極層を仮乾燥し(S22)、仮乾燥させた第1電極層の上に第2電極層を形成し(S24)、第1電極層および第2電極層に赤外光を照射して本乾燥させる(S26)。本変形例では、複数の電極層を積層させて受光面電極20または裏面電極30を形成する点で上述の実施の形態と異なる。以下、上述の実施の形態との相違点を中心に述べる。
電極層40を設けることは、
第1主面10aおよび第2主面10bの少なくとも一方に熱硬化性樹脂を含む第1電極層41を設けることと、
第1電極層41を加熱した後に、第1電極層上に熱硬化性樹脂を含む第2電極層42を設けることと、を含んでもよい。
少なくとも第2電極層42は、赤外光の照射により加熱されてもよい。
第1電極層41は、第1透明導電層17または第2透明導電層18との接触抵抗が第2電極層42より小さい材料で形成され、
第2電極層42は、第1電極層41よりバルク抵抗の小さい材料で形成されてもよい。
Claims (10)
- 光電変換部の第1主面および前記第1主面と反対側の第2主面の少なくとも一方面側に熱硬化性樹脂を含む電極層を設けることと、
前記電極層に、前記電極層と離間した位置に配置された放射体から赤外光を直接照射して加熱することと、
前記赤外光の照射中に前記光電変換部の前記一方面側を含む周囲に気流を作ることと、を備える太陽電池セルの製造方法。 - 前記光電変換部は、半導体基板を有し、前記電極層は、互いに平行に延びる複数のフィンガー電極と、前記フィンガー電極と交差して延びるバスバー電極とを有する請求項1に記載の太陽電池セルの製造方法。
- 前記放射体は、電気的に発熱して前記赤外光を放射する請求項1または2に記載の太陽電池セルの製造方法。
- 光電変換部の第1主面および前記第1主面と反対側の第2主面の少なくとも一方に熱硬化性樹脂を含む電極層を設けることと、
前記電極層に赤外光を照射して加熱することと、
前記赤外光の照射中に前記光電変換部の周囲に気流を作ることと、を備える太陽電池セルの製造方法であって、
前記光電変換部は、半導体基板を有し、
前記電極層は、互いに平行に延びる複数のフィンガー電極と、前記フィンガー電極と交差して延びるバスバー電極と、を有し、
前記赤外光を照射することは、
前記第1主面に対向する第1放射体から第1赤外光を照射することと、
前記第2主面に対向する第2放射体から第2赤外光を照射することと、を含み、
前記第1放射体は、電気的に発熱して前記第1赤外光を放射し、
前記第2放射体は、前記第1赤外光の吸収により発熱して前記第2赤外光を放射する太陽電池セルの製造方法。 - 光電変換部の第1主面および前記第1主面と反対側の第2主面の少なくとも一方に熱硬化性樹脂を含む電極層を設けることと、
前記電極層に赤外光を照射して加熱することと、
前記赤外光の照射中に前記光電変換部の周囲に気流を作ることと、を備える太陽電池セルの製造方法であって、
前記赤外光を照射することは、前記第1主面および前記第2主面が鉛直方向に沿う向きとなるように前記光電変換部を立てた状態で行われる太陽電池セルの製造方法。 - 光電変換部の第1主面および前記第1主面と反対側の第2主面の少なくとも一方に熱硬化性樹脂を含む電極層を設けることと、
前記電極層に赤外光を照射して加熱することと、
前記赤外光の照射中に前記光電変換部の周囲に気流を作ることと、を備える太陽電池セルの製造方法であって、
前記気流を作ることは、前記気流が鉛直方向に流れて前記光電変換部の下方の排気口に向かうようになされる太陽電池セルの製造方法。 - 前記電極層を設けることは、
前記第1主面および前記第2主面の少なくとも一方に熱硬化性樹脂を含む第1電極層を設けることと、
前記第1電極層を加熱した後に、前記第1電極層上に熱硬化性樹脂を含む第2電極層を設けることと、を含み、
少なくとも前記第2電極層は、前記赤外光の照射により加熱される請求項1から6のいずれか一項に記載の太陽電池セルの製造方法。 - 前記光電変換部は、前記第1主面、第1透明導電層、pn接合またはpin接合を有する発電層、第2透明導電層および前記第2主面が順に積層された構造を有し、
前記第1電極層は、前記第1透明導電層または前記第2透明導電層との接触抵抗が前記第2電極層より小さい材料で形成され、
前記第2電極層は、前記第1電極層よりバルク抵抗の小さい材料で形成される請求項7に記載の太陽電池セルの製造方法。 - 前記光電変換部は、前記第1主面、第1透明導電層、pn接合またはpin接合を有する発電層、第2透明導電層および前記第2主面が順に積層された構造を有し、
前記製造方法は、前記赤外光の照射により加熱される前記電極層を用いて前記電極層下に位置する前記第1透明導電層または前記第2透明導電層の一部を局所的に加熱することをさらに備える請求項1から8のいずれか一項に記載の太陽電池セルの製造方法。 - 光電変換部の主面に設けられる熱硬化性樹脂を加熱するための加熱装置であって、
前記光電変換部の主面が鉛直方向に沿う向きとなるように前記光電変換部を立てた状態で支持する支持部と、
前記支持部に支持される前記光電変換部を挟んで互いに対向して設けられ、前記光電変換部に向けて赤外光を放射する第1放射体および第2放射体と、
前記第1放射体および前記第2放射体の前記鉛直方向の下方に設けられる排気口と、を備え、
前記排気口は、前記支持部に支持される前記光電変換部の近傍において前記鉛直方向に流れる気流を生じさせる加熱装置。
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