JP6347260B2 - 三次元座標測定装置 - Google Patents

三次元座標測定装置 Download PDF

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Publication number
JP6347260B2
JP6347260B2 JP2016015850A JP2016015850A JP6347260B2 JP 6347260 B2 JP6347260 B2 JP 6347260B2 JP 2016015850 A JP2016015850 A JP 2016015850A JP 2016015850 A JP2016015850 A JP 2016015850A JP 6347260 B2 JP6347260 B2 JP 6347260B2
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Japan
Prior art keywords
carriage
surface plate
guide
coordinate measuring
dimensional coordinate
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JP2016015850A
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English (en)
Japanese (ja)
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JP2016145822A5 (enrdf_load_stackoverflow
JP2016145822A (ja
Inventor
幸男 菅野
幸男 菅野
圭一郎 五味
圭一郎 五味
藤田　隆
隆 藤田
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Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
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  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP2016015850A 2015-01-30 2016-01-29 三次元座標測定装置 Active JP6347260B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015016240 2015-01-30
JP2015016240 2015-01-30

Related Child Applications (1)

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JP2018074878A Division JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置

Publications (3)

Publication Number Publication Date
JP2016145822A JP2016145822A (ja) 2016-08-12
JP2016145822A5 JP2016145822A5 (enrdf_load_stackoverflow) 2017-11-30
JP6347260B2 true JP6347260B2 (ja) 2018-06-27

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ID=56686301

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2016015850A Active JP6347260B2 (ja) 2015-01-30 2016-01-29 三次元座標測定装置
JP2018074878A Active JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置
JP2018207341A Pending JP2019015746A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018229028A Pending JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置
JP2019002672A Active JP6880417B2 (ja) 2015-01-30 2019-01-10 三次元座標測定装置
JP2020200064A Active JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

Family Applications After (5)

Application Number Title Priority Date Filing Date
JP2018074878A Active JP6454953B2 (ja) 2015-01-30 2018-04-09 三次元座標測定装置
JP2018207341A Pending JP2019015746A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018229028A Pending JP2019056713A (ja) 2015-01-30 2018-12-06 三次元座標測定装置
JP2019002672A Active JP6880417B2 (ja) 2015-01-30 2019-01-10 三次元座標測定装置
JP2020200064A Active JP7463258B2 (ja) 2015-01-30 2020-12-02 三次元座標測定装置

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JP (6) JP6347260B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7360790B2 (ja) * 2018-10-23 2023-10-13 株式会社ミツトヨ 三次元測定機

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3774311A (en) * 1971-03-01 1973-11-27 Bendix Corp Carriage and bearing arrangement for a measuring machine
JPS61131612U (enrdf_load_stackoverflow) * 1985-02-04 1986-08-16
JPS62235514A (ja) * 1986-04-07 1987-10-15 Amada Co Ltd ３次元測定装置の駆動装置
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
US4815213A (en) * 1987-10-09 1989-03-28 Brown & Sharpe Manufacturing Co. Apparatus for temperature compensation of sensing means of a machine
GB8908854D0 (en) * 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US4928396A (en) * 1989-03-07 1990-05-29 The Warner & Swasey Company Coordinate measuring machine with improved carriage drive system
JP2501989B2 (ja) * 1991-12-06 1996-05-29 株式会社ミツトヨ 測定機
JP2776427B2 (ja) * 1992-05-14 1998-07-16 株式会社東京精密 座標測定機
JPH07139936A (ja) * 1993-11-15 1995-06-02 Tokyo Seimitsu Co Ltd 座標測定機
JPH09145342A (ja) * 1995-11-27 1997-06-06 Nikon Corp 直線案内装置のコードガイド装置
JPH11190339A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 静圧流体軸受
JP4722400B2 (ja) * 2004-01-26 2011-07-13 株式会社ミツトヨ ガイドレールの支持装置、ガイドレール装置、駆動装置および測定機
DE102005058504B3 (de) * 2005-12-02 2007-05-16 Zeiss Ind Messtechnik Gmbh Vorrichtung zum Bestimmen einer Messgröße an einem Messobjekt
JP2011135751A (ja) * 2009-12-25 2011-07-07 Nikon Corp 駆動装置および測定装置
JP2012127851A (ja) * 2010-12-16 2012-07-05 Nikon Corp ガイド機構および３次元測定機
JP2012220339A (ja) 2011-04-08 2012-11-12 Nikon Corp 形状測定装置、形状測定方法、及びそのプログラム
JP2014056352A (ja) * 2012-09-11 2014-03-27 Canon Inc 位置決め装置及び計測装置
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
JP2014238376A (ja) * 2013-06-10 2014-12-18 キヤノン株式会社 測定装置

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Publication number Publication date
JP6454953B2 (ja) 2019-01-23
JP2019015746A (ja) 2019-01-31
JP2019070666A (ja) 2019-05-09
JP2018124288A (ja) 2018-08-09
JP2019056713A (ja) 2019-04-11
JP6880417B2 (ja) 2021-06-02
JP7463258B2 (ja) 2024-04-08
JP2021043219A (ja) 2021-03-18
JP2016145822A (ja) 2016-08-12

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