JP6345933B2 - プラズマからのイオンビーム引き出し過程のゆらぎに対する信号安定性改善のためにイオン光学系パラメータを最適化する方法 - Google Patents

プラズマからのイオンビーム引き出し過程のゆらぎに対する信号安定性改善のためにイオン光学系パラメータを最適化する方法 Download PDF

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JP6345933B2
JP6345933B2 JP2013273543A JP2013273543A JP6345933B2 JP 6345933 B2 JP6345933 B2 JP 6345933B2 JP 2013273543 A JP2013273543 A JP 2013273543A JP 2013273543 A JP2013273543 A JP 2013273543A JP 6345933 B2 JP6345933 B2 JP 6345933B2
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ion
plasma
voltage
sample
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酒井　徹志
徹志 酒井
一司 平野
一司 平野
近藤　高史
高史 近藤
永田　洋一
洋一 永田
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Agilent Technologies Inc
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Agilent Technologies Inc
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JP2013273543A 2013-12-27 2013-12-27 プラズマからのイオンビーム引き出し過程のゆらぎに対する信号安定性改善のためにイオン光学系パラメータを最適化する方法 Active JP6345933B2 (ja)

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CN111312411B (zh) * 2018-12-11 2022-10-21 核工业西南物理研究院 液化惰性气体射流注入防护等离子体破裂的方法
KR102424020B1 (ko) * 2020-11-30 2022-07-25 영인에이스 주식회사 질량 분석기
KR102665131B1 (ko) * 2021-12-02 2024-05-13 영인에이스 주식회사 질량 분석기

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JPH07325020A (ja) * 1994-05-31 1995-12-12 Shimadzu Corp イオン分析装置の試料導入装置
JP4585069B2 (ja) * 1999-12-27 2010-11-24 アジレント・テクノロジーズ・インク 誘導結合プラズマ質量分析装置及び方法
JP2002260572A (ja) * 2001-02-28 2002-09-13 Hitachi Ltd 質量分析装置および質量分析方法
JP5308641B2 (ja) * 2007-08-09 2013-10-09 アジレント・テクノロジーズ・インク プラズマ質量分析装置
JP4986824B2 (ja) * 2007-11-27 2012-07-25 Ｊｘ日鉱日石金属株式会社 微量貴金属の高周波プラズマ質量分析装置を用いた分析方法

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