JP6337388B2 - クリーンルームの表面粒子検出用試験フィルム - Google Patents
クリーンルームの表面粒子検出用試験フィルム Download PDFInfo
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- JP6337388B2 JP6337388B2 JP2017521211A JP2017521211A JP6337388B2 JP 6337388 B2 JP6337388 B2 JP 6337388B2 JP 2017521211 A JP2017521211 A JP 2017521211A JP 2017521211 A JP2017521211 A JP 2017521211A JP 6337388 B2 JP6337388 B2 JP 6337388B2
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- surface particles
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- 239000002245 particle Substances 0.000 title claims description 130
- 238000012360 testing method Methods 0.000 title claims description 45
- 238000001514 detection method Methods 0.000 title description 13
- 239000012790 adhesive layer Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 36
- 230000001681 protective effect Effects 0.000 claims description 28
- 238000011109 contamination Methods 0.000 claims description 21
- 239000004698 Polyethylene Substances 0.000 claims description 6
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 6
- -1 polyethylene Polymers 0.000 claims description 6
- 229920000573 polyethylene Polymers 0.000 claims description 6
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 6
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 6
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 6
- 229920003002 synthetic resin Polymers 0.000 claims description 6
- 239000000057 synthetic resin Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 239000004793 Polystyrene Substances 0.000 claims description 3
- 239000004417 polycarbonate Substances 0.000 claims description 3
- 229920000515 polycarbonate Polymers 0.000 claims description 3
- 238000009826 distribution Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- 238000007689 inspection Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/10—Devices for withdrawing samples in the liquid or fluent state
- G01N1/20—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
- G01N15/0612—Optical scan of the deposits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N2001/028—Sampling from a surface, swabbing, vaporising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/2813—Producing thin layers of samples on a substrate, e.g. smearing, spinning-on
- G01N2001/2833—Collecting samples on a sticky, tacky, adhesive surface
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Hydrology & Water Resources (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Cleaning In General (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Description
Claims (8)
- クリーンルームにある表面粒子を検出する試験フィルムであって、
所定の厚さを有して透明な合成樹脂の材質からなる基板;
前記基板の一側に形成されて表面粒子が採取される第1粘着層;
前記第1粘着層に付着され、表面粒子を採取する際に前記第1粘着層から分離される離型フィルム;
前記基板の他側に形成された第2粘着層;および、
前記第2粘着層に付着されて前記基板を保護し、目盛りが表示されている保護フィルム;を含む、クリーンルームの表面粒子検出用試験フィルム。 - 前記基板は硬質の合成樹脂からなることを特徴とする、請求項1に記載のクリーンルームの表面粒子検出用試験フィルム。
- 前記基板は、ポリカーボネート(PC)、ポリメチルメタクリレート(PMMA)、ポリエチレン(PE)、ポリエチレンテレフタレート(PET)、ポリスチロール(PS)から選択されたいずれか一つからなることを特徴とする、請求項2に記載のクリーンルームの表面粒子検出用試験フィルム。
- 前記基板は、本体部、前記本体部の一端部に形成された把持部、および、前記本体部と把持部の間に形成された切開部を含み、
前記把持部を取って前記離型フィルムを容易に分離することができることを特徴とする、請求項1に記載のクリーンルームの表面粒子検出用試験フィルム。 - 前記離型フィルムが分離された状態で前記第1粘着層に表面粒子が付着して採取された後、分離された前記離型フィルムを再び前記第1粘着層に付着することを特徴とする、請求項1に記載のクリーンルームの表面粒子検出用試験フィルム。
- 採取された表面粒子によって前記離型フィルムに表れた気泡の数を計数し、気泡の大きさを見て汚染可否を判定できることを特徴とする、請求項5に記載のクリーンルームの表面粒子検出用試験フィルム。
- 前記保護フィルムは、前記第2粘着層に脱着できるように付着され、前記保護フィルムを分離したり、前記第2粘着層に別の保護フィルムを付着して使用できることを特徴とする、請求項1に記載のクリーンルームの表面粒子検出用試験フィルム。
- 前記保護フィルム上にカラーを有するカラーフィルムを付着したことを特徴とする、請求項1に記載のクリーンルームの表面粒子検出用試験フィルム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020140143564A KR101582461B1 (ko) | 2014-10-22 | 2014-10-22 | 클린룸의 표면 입자 검출용 시험 필름 |
KR10-2014-0143564 | 2014-10-22 | ||
PCT/KR2015/006847 WO2016064067A1 (ko) | 2014-10-22 | 2015-07-03 | 클린룸의 표면 입자 검출용 시험 필름 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017535768A JP2017535768A (ja) | 2017-11-30 |
JP6337388B2 true JP6337388B2 (ja) | 2018-06-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017521211A Active JP6337388B2 (ja) | 2014-10-22 | 2015-07-03 | クリーンルームの表面粒子検出用試験フィルム |
Country Status (6)
Country | Link |
---|---|
US (1) | US9964480B2 (ja) |
EP (1) | EP3211397B1 (ja) |
JP (1) | JP6337388B2 (ja) |
KR (1) | KR101582461B1 (ja) |
CN (1) | CN107209097B (ja) |
WO (1) | WO2016064067A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE540253C2 (en) * | 2016-07-01 | 2018-05-15 | Expertus Kemiteknik Ab | Device for surface sampling with removal device |
KR101809009B1 (ko) | 2017-08-02 | 2017-12-15 | 주식회사 제덱스 | 투명 또는 반투명 필름의 표면 이물 검출기 |
KR102309284B1 (ko) * | 2018-08-03 | 2021-10-06 | 주식회사 엘지에너지솔루션 | 고분자 솔루션의 미용해물 측정법 |
USD980729S1 (en) * | 2019-03-22 | 2023-03-14 | Expertus Kemiteknik Ab | Surface analysis tool |
CN109932292A (zh) * | 2019-03-29 | 2019-06-25 | 苏州精濑光电有限公司 | 一种落尘检测方法 |
EP3839474A1 (en) | 2019-12-20 | 2021-06-23 | Imec VZW | A collector for collecting particles in air and a device for detecting particles in air |
DE102020201935A1 (de) | 2020-02-17 | 2021-08-19 | Carl Zeiss Smt Gmbh | Partikelprüfsystem, Beprobungsstreifen, Projektionsbelichtungsanlage und Verfahren zur Prüfung einer Partikelbelastung einer Oberfläche |
DE102020212563A1 (de) | 2020-10-05 | 2022-04-07 | Carl Zeiss Smt Gmbh | Verfahren zur Bestimmung der Partikelbelastung einer Oberfläche |
Family Cites Families (23)
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JPS6225244A (ja) * | 1985-07-26 | 1987-02-03 | Hitachi Ltd | 付着塵挨の測定方法および装置 |
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SE521948C2 (sv) * | 1998-12-17 | 2003-12-23 | Act Ab | Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta |
GB2356063B (en) * | 1999-11-22 | 2001-10-24 | Genpak Ltd | Adhesive label with grid for microscope slide |
JP2002142797A (ja) * | 2000-11-09 | 2002-05-21 | Nitto Denko Corp | 固体表面の微生物試験法およびそのためのキット |
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JP2007135476A (ja) * | 2005-11-18 | 2007-06-07 | Nitto Denko Corp | 空中浮遊微生物の検出方法およびそのための粘着シート |
KR100567789B1 (ko) | 2006-02-20 | 2006-04-05 | 주식회사 현대교정인증기술원 | 입자측정기 및 입자측정방법 |
CN201034840Y (zh) * | 2007-04-18 | 2008-03-12 | 刘晋 | 物体印痕样本采集片 |
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JP2014048100A (ja) * | 2012-08-30 | 2014-03-17 | Sharp Corp | 粒子検出装置 |
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-
2014
- 2014-10-22 KR KR1020140143564A patent/KR101582461B1/ko active IP Right Grant
-
2015
- 2015-07-03 CN CN201580057283.6A patent/CN107209097B/zh active Active
- 2015-07-03 WO PCT/KR2015/006847 patent/WO2016064067A1/ko active Application Filing
- 2015-07-03 JP JP2017521211A patent/JP6337388B2/ja active Active
- 2015-07-03 US US15/520,528 patent/US9964480B2/en active Active
- 2015-07-03 EP EP15853099.8A patent/EP3211397B1/en active Active
Also Published As
Publication number | Publication date |
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US9964480B2 (en) | 2018-05-08 |
EP3211397A4 (en) | 2018-06-27 |
EP3211397B1 (en) | 2021-11-03 |
KR101582461B1 (ko) | 2016-01-05 |
EP3211397A1 (en) | 2017-08-30 |
CN107209097A (zh) | 2017-09-26 |
JP2017535768A (ja) | 2017-11-30 |
WO2016064067A1 (ko) | 2016-04-28 |
CN107209097B (zh) | 2019-11-08 |
US20170315038A1 (en) | 2017-11-02 |
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