JP6297131B2 - ウェハスケールトランスデューサコーティング及び方法 - Google Patents

ウェハスケールトランスデューサコーティング及び方法 Download PDF

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Publication number
JP6297131B2
JP6297131B2 JP2016502833A JP2016502833A JP6297131B2 JP 6297131 B2 JP6297131 B2 JP 6297131B2 JP 2016502833 A JP2016502833 A JP 2016502833A JP 2016502833 A JP2016502833 A JP 2016502833A JP 6297131 B2 JP6297131 B2 JP 6297131B2
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Prior art keywords
transducer
protective layer
wafer
trenches
etching process
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JP2016502833A
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Japanese (ja)
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JP2016513941A5 (enExample
JP2016513941A (ja
Inventor
ダグラス コール，ポール
ダグラス コール，ポール
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ボルケーノ コーポレイション
ボルケーノ コーポレイション
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/02—Forming enclosures or casings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Medical Informatics (AREA)
  • Surgery (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Gynecology & Obstetrics (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2016502833A 2013-03-14 2014-03-14 ウェハスケールトランスデューサコーティング及び方法 Active JP6297131B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361781159P 2013-03-14 2013-03-14
US61/781,159 2013-03-14
PCT/US2014/028552 WO2014152987A1 (en) 2013-03-14 2014-03-14 Wafer-scale transducer coating and method

Publications (3)

Publication Number Publication Date
JP2016513941A JP2016513941A (ja) 2016-05-16
JP2016513941A5 JP2016513941A5 (enExample) 2017-08-10
JP6297131B2 true JP6297131B2 (ja) 2018-03-20

Family

ID=51530489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016502833A Active JP6297131B2 (ja) 2013-03-14 2014-03-14 ウェハスケールトランスデューサコーティング及び方法

Country Status (5)

Country Link
US (1) US10123775B2 (enExample)
EP (1) EP2973767B1 (enExample)
JP (1) JP6297131B2 (enExample)
CN (1) CN105122488B (enExample)
WO (1) WO2014152987A1 (enExample)

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JP6189033B2 (ja) * 2012-12-14 2017-08-30 株式会社日立製作所 超音波探触子の製造方法、超音波探触子、及び超音波診断装置
JP2017080132A (ja) 2015-10-29 2017-05-18 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、電子機器、および超音波画像装置
JP6569473B2 (ja) * 2015-10-29 2019-09-04 セイコーエプソン株式会社 超音波デバイス、超音波プローブ、電子機器、および超音波画像装置
US10618079B2 (en) 2016-02-29 2020-04-14 Qualcomm Incorporated Piezoelectric micromechanical ultrasonic transducers and transducer arrays
WO2018125185A1 (en) * 2016-12-30 2018-07-05 Intel Corporation Packaging for ultrasonic transducers
EP3645176A1 (en) * 2017-06-30 2020-05-06 Koninklijke Philips N.V. Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing
JP6922651B2 (ja) 2017-10-26 2021-08-18 セイコーエプソン株式会社 超音波デバイス、及び超音波測定装置
CN108652669A (zh) * 2018-03-14 2018-10-16 业成科技（成都）有限公司 超音波感测器及其运作方法
US11465177B2 (en) 2018-05-21 2022-10-11 Fujifilm Sonosite, Inc. PMUT ultrasound transducer with damping layer
US11890136B2 (en) * 2018-08-22 2024-02-06 Philips Image Guided Therapy Corporation Fluid barrier for intraluminal ultrasound imaging and associated devices, systems, and methods
CA3105459C (en) 2018-09-25 2023-08-15 Exo Imaging, Inc. Imaging devices with selectively alterable characteristics
KR102670111B1 (ko) * 2018-09-28 2024-05-27 재단법인대구경북과학기술원 초음파 트랜스듀서 장치의 제조 방법
DE102019101325A1 (de) * 2019-01-17 2020-07-23 USound GmbH Herstellungsverfahren für mehrere MEMS-Schallwandler
IL298685B2 (en) * 2020-03-05 2024-08-01 Exo Imaging Inc An ultrasound imaging device with programmable anatomy and flow imaging
US20230247894A1 (en) * 2020-04-16 2023-08-03 Vuereal Inc. Micro thin-film device
ES3062637T3 (en) * 2021-03-09 2026-04-13 Oneprojects Design And Innovation Ltd Catheter with rotatable image array
EP4348725A1 (de) * 2021-05-28 2024-04-10 Robert Bosch GmbH Verfahren zur herstellung eines mikro-elektronisch-mechanischen schwingungssystems und piezoelektrischer mikrogefertigter ultraschallwandler
US20240023929A1 (en) * 2022-07-20 2024-01-25 SoundCath, Inc. Ultrasonic catheter
US12599360B2 (en) 2022-10-24 2026-04-14 Boston Scientific Scimed, Inc. Ultrasonic imaging ablation catheter system and method
US12622670B2 (en) 2023-02-08 2026-05-12 Boston Scientific Scimed, Inc. Integrated cardiac mapping and piezoelectric micromachined ultrasonic transducer (pMUT) ultrasonic imaging catheter system and method
US12599361B2 (en) 2023-02-14 2026-04-14 Boston Scientific Scimed, Inc. Ultrasonic imaging system and method
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Also Published As

Publication number Publication date
CN105122488A (zh) 2015-12-02
EP2973767A1 (en) 2016-01-20
EP2973767A4 (en) 2016-11-23
US20140276087A1 (en) 2014-09-18
JP2016513941A (ja) 2016-05-16
WO2014152987A1 (en) 2014-09-25
CN105122488B (zh) 2018-01-26
US10123775B2 (en) 2018-11-13
EP2973767B1 (en) 2017-11-22

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