JP6294280B2 - 特殊な絞り板を備える荷電粒子顕微鏡 - Google Patents

特殊な絞り板を備える荷電粒子顕微鏡 Download PDF

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Publication number
JP6294280B2
JP6294280B2 JP2015203388A JP2015203388A JP6294280B2 JP 6294280 B2 JP6294280 B2 JP 6294280B2 JP 2015203388 A JP2015203388 A JP 2015203388A JP 2015203388 A JP2015203388 A JP 2015203388A JP 6294280 B2 JP6294280 B2 JP 6294280B2
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Japan
Prior art keywords
sample
diaphragm
microscope
aperture
charged particle
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JP2015203388A
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Japanese (ja)
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JP2016081929A (ja
JP2016081929A5 (https=
Inventor
ポトツェク パベル
ポトツェク パベル
マルチネス ヘンリクス マリア ヴァン ラールホヴェン フランシス
マルチネス ヘンリクス マリア ヴァン ラールホヴェン フランシス
ボウクホルベル フェイサル
ボウクホルベル フェイサル
ショエンマケルス レムコ
ショエンマケルス レムコ
クリスチャン ティエメイエール ピーター
クリスチャン ティエメイエール ピーター
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FEI Co
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FEI Co
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/045—Diaphragms
    • H01J2237/0451—Diaphragms with fixed aperture
    • H01J2237/0453—Diaphragms with fixed aperture multiple apertures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/21—Focus adjustment
    • H01J2237/216—Automatic focusing methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2015203388A 2014-10-16 2015-10-15 特殊な絞り板を備える荷電粒子顕微鏡 Active JP6294280B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP14189135.8A EP3010031B1 (en) 2014-10-16 2014-10-16 Charged Particle Microscope with special aperture plate
EP14189135.8 2014-10-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017222942A Division JP2018026369A (ja) 2014-10-16 2017-11-20 特殊な絞り板を備える荷電粒子顕微鏡

Publications (3)

Publication Number Publication Date
JP2016081929A JP2016081929A (ja) 2016-05-16
JP2016081929A5 JP2016081929A5 (https=) 2017-02-16
JP6294280B2 true JP6294280B2 (ja) 2018-03-14

Family

ID=51703072

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015203388A Active JP6294280B2 (ja) 2014-10-16 2015-10-15 特殊な絞り板を備える荷電粒子顕微鏡
JP2017222942A Pending JP2018026369A (ja) 2014-10-16 2017-11-20 特殊な絞り板を備える荷電粒子顕微鏡

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2017222942A Pending JP2018026369A (ja) 2014-10-16 2017-11-20 特殊な絞り板を備える荷電粒子顕微鏡

Country Status (4)

Country Link
US (1) US9934936B2 (https=)
EP (1) EP3010031B1 (https=)
JP (2) JP6294280B2 (https=)
CN (1) CN105529235B (https=)

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WO2017189212A1 (en) 2016-04-29 2017-11-02 Battelle Memorial Institute Compressive scanning spectroscopy
KR101773861B1 (ko) * 2016-05-20 2017-09-01 한국표준과학연구원 모노크로미터를 구비한 전자선장치
KR101787379B1 (ko) * 2016-05-25 2017-10-18 한국표준과학연구원 모노크로미터의 제조방법
US10541109B2 (en) * 2016-07-27 2020-01-21 Battelle Memorial Institute Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets
US10217190B2 (en) 2016-12-27 2019-02-26 Kla-Tencor Corporation System and method for reconstructing high-resolution point spread functions from low-resolution inspection images
CN106910665B (zh) * 2017-03-01 2019-07-12 聚束科技（北京）有限公司 一种全自动化的扫描电子显微镜及其探测方法
US10295677B2 (en) 2017-05-08 2019-05-21 Battelle Memorial Institute Systems and methods for data storage and retrieval
WO2019014561A1 (en) * 2017-07-14 2019-01-17 Thermo Electron Scientific Instruments Llc DEVICE FOR PROVIDING A VARIABLE SIZE OPENING FOR A SAMPLE IN A SPECTROMETER
JP6858722B2 (ja) * 2018-03-14 2021-04-14 株式会社日立製作所 電子ビーム装置及び試料検査方法
US10522323B2 (en) * 2018-04-05 2019-12-31 Fei Company Electron energy loss spectroscopy with adjustable energy resolution
EP3550585B1 (en) * 2018-04-05 2021-06-23 FEI Company Studying dynamic specimens in a transmission charged particle microscope
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EP3716312A1 (en) * 2019-03-28 2020-09-30 FEI Company Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets
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US11698336B2 (en) * 2019-09-30 2023-07-11 Jeol Ltd. Analysis method and analysis apparatus
JP7354037B2 (ja) * 2020-03-23 2023-10-02 株式会社日立ハイテクサイエンス 集束イオンビーム加工装置
EP3901902B1 (en) * 2020-04-20 2025-05-07 FEI Company Method implemented by a data processing apparatus, and charged particle beam device for inspecting a specimen using such a method
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KR102716276B1 (ko) * 2022-02-14 2024-10-15 한국전자통신연구원 광 정렬 장치

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Also Published As

Publication number Publication date
EP3010031B1 (en) 2017-03-22
US20160111247A1 (en) 2016-04-21
JP2018026369A (ja) 2018-02-15
CN105529235A (zh) 2016-04-27
JP2016081929A (ja) 2016-05-16
EP3010031A1 (en) 2016-04-20
CN105529235B (zh) 2018-11-02
US9934936B2 (en) 2018-04-03

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