JP6291276B2 - Tube type ozone generator - Google Patents

Description

  The present invention relates to a tube-type ozone generator, and more particularly to the structure of a discharge tube.

  Ozone has a strong oxidizing action and is decomposed into harmless oxygen after the action. Therefore, ozone is frequently used for processing such as cleaning, sterilization, and deodorization in the fields of semiconductor manufacturing, food manufacturing, water treatment, and the like.

  Many of the ozone generators that generate ozone employ a silent discharge system.

  In a silent discharge type ozone generator, a gap (discharge gap) is provided between a pair of electrodes facing each other through a dielectric. When a high voltage is applied between the pair of electrodes, silent discharge is generated in the discharge gap. By flowing a source gas containing oxygen in the discharge gap, the source gas is ozonized and ozone is generated.

  As an ozone generator that employs such a silent discharge method, there is a tube-type ozone generator. In a tube-type ozone generator, a discharge tube having a tube shape is used as a dielectric constituting a unit that generates ozone. In the case of a tube-type ozone generator, a plurality of discharge tubes can be densely arranged in parallel, so that there is an advantage that the size is easily increased.

  The structure of the discharge tube in the tube-type ozone generator is disclosed in, for example, Patent Document 1 and Patent Document 2.

  The ozone generator of Patent Document 1 is provided with a cylindrical glass dielectric tube whose one end is spherically closed. A first electrode is formed on the inner surface of the dielectric tube, specifically, the inner surface of a portion extending from the spherical end to the side of the dielectric tube.

  A cylindrical second electrode is disposed so as to surround the outer side of the dielectric tube, and a discharge gap is formed between the dielectric tube and the second electrode.

  The source gas is ozonized while passing through a discharge gap to which a high voltage is applied. The ozonized gas is led out from the ozonized gas outlet where the spherical end is located.

  Patent Document 2 also discloses a conductive film metallized in the same manner as the first electrode of Patent Document 1.

JP 2012-144425 A WO-A1-2010021022

  Since the conventional electrode is formed by metallization on the inner peripheral surface of the dielectric tube, it cannot be separated from the dielectric tube. Therefore, when the electrode needs to be replaced, the entire dielectric tube must be replaced. Electrode formation by metallization is highly specific and disadvantageous in lack of productivity.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a tube-type ozone generator in which electrodes can be exchanged and the electrodes can be easily formed.

  The applicant has previously proposed an invention related to the present invention (Japanese Patent Application No. 2012-253606).

  An ozone generation unit provided in a tube-type ozone generator according to the present invention includes a cylindrical outer electrode tube and a discharge tube disposed inside the outer electrode tube with a discharge gap therebetween. . The discharge tube is connected to a cylindrical dielectric tube having an opening at at least one end, a cylindrical electrode film placed in close contact with the inner peripheral surface of the dielectric tube, and an external power source. A power supply for supplying power to the electrode film.

  And the said electrode film is formed by arrange | positioning the conductor which has elasticity, spirally shifting in the longitudinal direction of the said dielectric material tube.

  According to this ozone generator, the cylindrical electrode film installed in the dielectric tube is inserted into the dielectric tube in a removable state. Therefore, the electrode film can be removed from the dielectric tube and replaced.

  Moreover, since the electrode film is formed by spirally arranging the dielectric film on the dielectric tube using an elastic conductor, it can be easily installed even on a dielectric tube having a small opening and a long overall length. .

  That is, if it is a conductor which has elasticity, it can be made into an elongate cylindrical shape, for example by winding spirally, shifting a position to an elongate guide rod. Then, the guide rod wound with the conductor is inserted into the dielectric tube, and the conductor is expanded by its own elastic force by releasing the conductor from the guide rod by releasing the restraint of the conductor, so that the inner circumference of the dielectric tube A cylindrical electrode film in close contact with the surface can be formed. In this case, the guide bar becomes unnecessary after the conductor is released from the guide bar. Accordingly, the weight of the guide bar can be reduced as compared with the related invention.

  Furthermore, it is preferable that the electrode film is in close contact with the inner peripheral surface of the dielectric tube by expanding inside the dielectric tube by its own elastic force.

  By utilizing the elastic force of the electrode film itself, the electrode film is in close contact with the inner peripheral surface of the dielectric tube without applying an external force to the electrode film, so that the device can be formed more easily.

  Moreover, it is preferable that the said electrode film is arrange | positioned, overlapping the said conductor more than double, and shifting helically.

  By overlapping the conductors more than double, the conductors are likely to spread inside the dielectric, and the electrode film can be more closely brought into close contact with the peripheral surface of the dielectric.

  The electrode film may have an exposed end protruding from the opening.

  In this ozone generator, the electrode film is formed on the inner peripheral surface of the dielectric tube by close contact with the conductor instead of metallization. Therefore, if the length of the electrode film in the longitudinal direction of the dielectric tube is adjusted, An exposed end can be provided. By providing the exposed end portions, the exposed end portions may be electrically connected when electrically connecting each of the plurality of ozone generating units. That is, the electrical connection between the ozone generation units can be easily performed.

  Further, the electron supply includes an inner clip installed inside the electrode film and an outer clip installed outside the electrode film, and the exposed end is formed by the inner clip and the outer clip. It is preferable that the portion is sandwiched.

  In this case, since the exposed end portion of the electrode film is sandwiched between the inner clip and the outer clip, the electrode film and the electron supply can be brought into direct and uniform contact, and power can be stably supplied to the electrode film. be able to.

  According to the ozone generator of the present invention, the electrodes can be easily replaced and the electrode can be easily formed.

It is a schematic perspective view which shows the tube type ozone generator of 1st Embodiment. It is the schematic side view which a part was abbreviate | omitted in order to show the internal structure of an ozone generator. It is a schematic sectional drawing in the XX line in FIG. It is a schematic sectional drawing which shows the structure of an ozone generation unit. (A), (b) is the schematic which shows the installation process of an electrode film. (A), (b) is the schematic which shows the installation process of an electrode film. It is a disassembled perspective view of a power supply. It is the schematic which shows an example of the connection pattern between electric power supply. It is the schematic which shows an outer side clip pair. (A) is a top view, (b) is a front view. It is the schematic which shows a connection terminal. It is the schematic which shows the connection structure between power supply. (A) is a top view, (b) is the front view which abbreviate | omitted illustration of the rear part. It is the schematic which shows the construction clip used for the ozone generator of 2nd Embodiment. (A) is a top view, (b) is a front view. It is the schematic which shows the construction clip with a connection terminal. (A) is a top view, (b) is a front view. It is the schematic which shows the connection structure between the power supply in 2nd Embodiment. (A) is a top view, (b) is the front view which abbreviate | omitted illustration of the rear part. (A) is a top view which shows the modification of an outer side clip, (b) is a front view which shows the modification of a construction clip.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the following description is merely illustrative in nature and does not limit the present invention, its application, or its use.

(Configuration of ozone generator)
In FIG. 1, the tube-type ozone generator 1 of this embodiment is shown. The ozone generator 1 includes an apparatus main body 2, an auxiliary facility 3 including a control device, an operation panel, and the like that cooperate with the apparatus main body 2.

  The apparatus main body 2 is a stainless steel pressure-resistant container having excellent corrosion resistance, and ozone is generated therein. The apparatus main body 2 includes a cylindrical body portion 11 and two lid portions 12 that block both ends of the body portion 11. The apparatus main body 2 is supported by a pair of leg portions 13 and 13 in a horizontally placed state. One of the lid parts 12 is attached to the trunk part 11 via a hinge, and is a door that can be opened and closed.

  A raw material gas pipe 14, an ozone pipe 15, a cooling pipe 16 and the like are connected to the apparatus main body 2. Specifically, the source gas pipe 14 is connected to a source gas supply source (not shown), and a source gas such as oxygen or air is supplied to the apparatus main body 2 through the source gas pipe 14. The ozone pipe 15 is connected to an ozone supply destination (not shown), and ozone generated by the apparatus main body 2 is sent to the supply destination through the ozone pipe 15.

  The cooling pipe 16 has two cooling pipes 16a and 16b for incoming and outgoing water, each connected to a heat exchanger or the like not shown. Cooling water is circulated and supplied to the apparatus main body 2 through these cooling pipes 16a and 16b.

  As shown in FIG. 2, the inside of the apparatus main body 2 is partitioned into a source gas chamber 18, a cooling chamber 19, and an ozone chamber 20 by two partition plates 17 and 17 made of stainless steel. The source gas chamber 18 is disposed at one end of the apparatus main body 2 and communicates with the source gas pipe 14. The ozone chamber 20 is disposed at the other end of the apparatus main body 2 and communicates with the ozone pipe 15.

  The cooling chamber 19 is located between the source gas chamber 18 and the ozone chamber 20 and occupies most of the apparatus main body 2. The cooling chamber 19 communicates with the incoming cooling pipe 16a at the lower corner portion on the ozone chamber 20 side, and communicates with the outgoing cooling piping 16b at the upper corner portion on the source gas chamber 18 side. Inside the cooling chamber 19, a plurality of regulating plates 21 are installed at predetermined intervals. By these restriction plates 21, the inside of the cooling chamber 19 is partitioned in a staggered manner, and the cooling water is designed to meander and flow.

  Inside the apparatus main body 2, a plurality of ozone generation units 30 are installed so as to cross the cooling chamber 19 and extend in parallel along the longitudinal direction of the body 11.

  As shown in FIG. 3, the ozone generating units 30 are arranged in a dense state. Specifically, the triangles are arranged so that the pitch between the ozone generation units 30 located adjacent to each other has the same length. In each of these ozone generation units 30, ozone is generated from the raw material gas.

  FIG. 4 shows details of the ozone generation unit 30. The ozone generation unit 30 includes an outer electrode tube 31 and a discharge tube 32.

  The outer electrode tube 31 is made of a cylindrical stainless steel tube, and each end thereof is joined to each partition plate 17 without a gap. The outer electrode tube 31 is electrically grounded via the partition plate 17 and constitutes a low voltage side electrode. The periphery of the outer electrode tube 31 is filled with cooling water, and each ozone generation unit 30 is cooled by the cooling water. A discharge tube 32 is disposed concentrically inside the outer electrode tube 31.

(Discharge tube configuration)
The discharge tube 32 includes a dielectric tube 33, an electrode film 34, a power supply 40, and the like.

(Dielectric tube)
The dielectric tube 33 is a cylindrical member that is closed at one end and has an opening 33a at the other end, and is formed of, for example, glass. As general dimensions of the dielectric tube 33, the total length is 2 m, the outer diameter is about 10 mm to 30 mm, and the wall thickness is about 1 mm to 3 mm.

  That is, the dielectric tube 33 has an elongated bar shape with an extremely small opening 33a with respect to its entire length.

  The outer peripheral surface of the dielectric tube 33 faces the inner peripheral surface of the outer electrode tube 31 with a slight gap (discharge gap 36) therebetween. When a high voltage is applied between the outer electrode tube 31 and the electrode film 34 of the discharge tube 32, silent discharge is generated in the discharge gap 36.

  The closed end of the dielectric tube 33 is located in the ozone chamber 20, and the end of the dielectric tube 33 having the opening 33 a is located in the source gas chamber 18. Ozone is generated when the source gas flows from the source gas chamber 18 into the discharge gap 36 where the silent discharge is generated. The generated ozone flows out into the ozone chamber 20 and is sent out to the supply destination through the ozone pipe 15.

(Electrode film)
The electrode film 34 is made of a highly elastic metal material such as a stainless steel spring steel plate. The electrode film 34 is formed in a thin cylindrical shape, and is in close contact with the inner peripheral surface of the dielectric tube 33.

  That is, the electrode film 34 used in the ozone generator 1 is formed separately from the dielectric tube 33, unlike the metal film formed on the inner surface of the dielectric tube 33. Therefore, the electrode 34 can be attached to and detached from the dielectric tube 33. Therefore, in this ozone generator 1, only the electrode film 34 can be removed from the discharge tube 32 and replaced.

  Specifically, the electrode film 34 is formed using a strip-shaped conductor (band-shaped conductor 35). The strip-shaped conductor 35 is disposed in a spiral shape over a substantially entire length of the dielectric tube 33 while being displaced in the longitudinal direction of the dielectric tube 33. Thus, the belt-like conductor 35 expands in the radial direction by its own elastic force, and comes into close contact with the inner peripheral surface of the dielectric tube 33, thereby forming the electrode film 34.

  The two edge portions 35a, 35a of the adjacent strip conductors 35 preferably overlap each other, but may be in contact with each other without a gap or may have a slight gap. That is, it is preferable that the strip conductors 35 are arranged in a spiral shape while being displaced in the longitudinal direction of the dielectric tube 33 at a pitch smaller than the pitch of the width dimension.

  In this way, by forming the electrode film 34 using the strip-shaped conductor 35, the cylindrical electrode film 34 can be easily installed inside the elongated dielectric tube 33.

  Specifically, as shown in FIG. 5A, the strip conductor 35 can be used in a roll form. Therefore, the supply of the strip conductor 35 is facilitated, the installation work of the electrode film 34 to the dielectric tube 33 is facilitated, and the mass productivity is excellent.

  The strip-shaped conductor 35 is pulled out from the roll and wound around the guide rod G in a spiral shape. The guide rod G is an auxiliary member used when the electrode film 34 is installed on the dielectric tube 33. The guide rod G has an outer diameter smaller than the inner diameter of the dielectric tube 33 and has a length equal to or greater than that of the dielectric tube 33.

  The end portion on the winding start side of the belt-like conductor 35 is temporarily fixed to the tip portion of the guide rod G. The temporary fixing may be performed by overlapping and winding the strip-shaped conductor 35, or a temporary fixing portion capable of temporarily fixing the strip-shaped conductor 35 may be provided on the guide rod G.

  As a specific example of the temporary fixing portion, for example, a slit is provided at the distal end portion of the guide rod G, and a band-like conductor 35 is hooked on the slit, or a holding means capable of opening / closing control is provided at the distal end portion of the guide rod G. For example, the belt-like conductor 35 may be sandwiched by the clamping means.

  If the end on the winding start side is temporarily fixed, then the belt-like conductor 35 can be tightly wound around the guide rod G simply by winding the guide rod G spirally. Then, when the strip conductor 35 is wound around the guide rod G to a predetermined length, the strip conductor 35 is cut and the end of the strip conductor 35 on the winding end side using a clip C or the like as shown in FIG. The part is temporarily fixed to the guide rod G.

  As shown in FIG. 6A, the guide rod G around which the strip-shaped conductor 35 is spirally wound is inserted into the dielectric tube 33 from the front end side thereof. Then, after the insertion to a predetermined position, the guide rod G is appropriately rotated while releasing the restraints at both ends of the belt-like conductor 35.

  By doing so, as shown in FIG. 6B, the strip conductor 35 expands by its own elastic force, separates from the guide rod G, and comes into close contact with the inner peripheral surface of the dielectric tube 33. Thereafter, the guide rod G may be pulled out from the dielectric tube 33.

  The guide bar G is not essential. Only the strip conductor 35 may be spirally wound and inserted into the dielectric tube 33.

  The electrode film 34 is placed on the dielectric tube 33 with a part (also referred to as an exposed end 34a) protruding from the opening 33a. In addition, the edge part of the exposed end part 34a may remain uneven, and may be aligned by adjusting the overlapping state of the strip-shaped conductor 35 or cutting.

  In the ozone generator 1, an electron supply 40 is configured so as to stably supply power to the electrode film 34 using the exposed end 34 a.

(Electricity supply)
The power supply 40 is connected to the high voltage side of the external power source 37 and supplies power to the electrode film 34. As shown in FIGS. 4 and 7, the power supply 40 includes an inner clip 41, an outer clip 42, and the like.

  Both the inner clip 41 and the outer clip 42 are formed by metal pressing, multi-forming, a processing jig, etc., and are excellent in elasticity and electrical conductivity.

  The outer clip 42 is a cylindrical member partly divided in the axial direction, and has a C-shaped cross section. The inner diameter of the outer clip 42 is smaller than the inner diameter of the dielectric tube 33 in a no-load state where no external force is applied. Here, the length L2 in the axial direction of the exposed end portion 34a is not a problem as long as it is larger than 0, that is, exposed from the opening 33a, but is larger than the length L1 in the axial direction of the outer clip 42 (L2 ≧ L1). It is preferable that L2 ≧ 2L1 is more preferable.

  Similarly to the outer clip 42, the inner clip 41 is a cylindrical member having a C-shaped cross section. The outer diameter of the inner clip 41 is formed larger than the inner diameter of the dielectric tube 33 in an unloaded state. The axial length L3 of the inner clip 41 is formed to be at least larger than the axial length L1 of the inner clip 41.

  The outer clip 42 is expanded in diameter by applying an external force, and is fitted to the outside of the exposed end portion 34a in which the inner clip 41 is inserted. When the external force is removed in this manner, the outer clip 42 is contracted, so that the outer clip 42 is placed on the outer side of the electrode film 34 in a state of being pressed against the exposed end portion 34a from the outer side.

  The inner clip 41 is reduced in diameter by applying an external force, and is inserted inside the electrode film 34 until the tip is located inside the dielectric tube 33. Then, when the external force is removed, the inner clip 41 expands. Therefore, the inner clip 41 is placed inside the electrode film 34 in a state of being pressed against the electrode film 34 from the inside.

  As a result, the exposed end portion 34a is sandwiched between the inner clip 41 and the outer clip 42, and is in a state of being pressed from the inside and outside.

  As described above, the exposed end portion 34 a of the electrode film 34 that protrudes from the opening 33 a of the dielectric tube 33 is sandwiched between the inner clip 41 and the outer clip 42 so as to be in direct and uniform contact with the power supply 40. . Therefore, power can be stably supplied to the electrode film 34.

(Ozone generation efficiency)
By using the electrode film 34 formed in such a spiral shape, the ozone generation efficiency can be improved.

  In other words, prior to the present invention, the applicant of the present invention uses a terminal rod made of stainless steel or the like connected to an external power source (corresponding to a power supply) and an electrode film having one end joined to the terminal rod. A constructed discharge tube has been proposed (Japanese Patent Application No. 2012-253606).

  Specifically, the terminal rod has a length equivalent to that of the dielectric tube, and the metal conductor constituting the electrode film is formed in a rectangle whose long side has the same length as the terminal rod. . One long side of the metal conductor is joined to the terminal rod, and the other long side portion of the metal conductor expands inside the dielectric tube, thereby closely contacting the inner peripheral surface of the dielectric tube. A shaped electrode film is formed.

  The mechanism of the discharge tube 32 of this embodiment is unknown when compared with this discharge tube, but it has been confirmed that the ozone generation efficiency is improved by about 5%. Therefore, according to the ozone generator of this embodiment, the ozone generation efficiency can also be improved.

  Since the terminal rod is also unnecessary, there are advantages that the member cost can be reduced and the weight can be reduced. In particular, it is advantageous in a large ozone generator in which a large number of discharge tubes are installed.

(Connection between power supply)
As shown in a simplified manner in FIG. 8, the power supply 40 of each discharge tube 32 is electrically connected to each other. In FIG. 8, each of the feeders 40 is connected in series, that is, one feeder 40 is connected to one or two neighboring feeders 40, but the connection pattern between the feeders 40 is a specification. It is set appropriately according to

  In addition, connection terminals 43 that are electrically connected to the lead wires 44 are provided at a plurality of locations of the group of power supply 40 connected to each other. The lead wire 44 is electrically connected to an external power source 37 outside the figure. Power is supplied from the external power source 37 to the group of power supply units 40 through the connection terminals 43 and the lead wires 44.

  The connection of the group of the supply electrons 40 has a small gap between the adjacent supply electrons 40, and when the number of the supply electrons 40 is large, the number of man-hours is very large and the work is heavy.

  Therefore, in the ozone generator 1 of the present embodiment, the shapes of the inner clip 41 and the outer clip 42 are devised so that the connection of the power supply 40 can be easily performed.

(Specific configuration of the power supply)
First, as shown in FIG. 4, the inner clip 41 is formed such that the length L4 of the inner clip 41 protruding from the opening 33a of the dielectric tube 33 is at least twice the length L1 of the outer clip 42 in the axial direction. is set up. The reason why the number is twice or more is to allow at least two or more outer clips 42 to overlap the inner clip 41.

  As shown in FIG. 9, two outer clips 42 are integrally formed so as to sandwich two exposed end portions 34a at a time (also referred to as an outer clip pair 42P). A bent portion 45 that is bent is provided between the two outer clips 42, 42 connected in series. The dimension between the two outer clips 42 and 42 is set according to the pitch between the feeders 40 located adjacent to each other. Since the bent portion 45 is elastically deformed, it can cope with even a slight shift in pitch.

  In order to connect the lead wire 44, a part of the inner clip 41 is an inner clip 52 with a connection terminal in which a connection terminal 43 is provided directly on the inner clip 41 as shown in FIG. 10.

  By using a part of the inner clip 41 as the inner clip 52 with a connection terminal, the desired number of connection terminals 43 can be easily provided at a desired location.

  FIG. 11 shows the power supply 40 connected to each other using the outer clip pair 42P. The outer clip pair 42P is fitted into the two exposed end portions 34a and 34a adjacent to each other, thereby forming a supply pair in which the two supply electrons 40 and 40 are electrically connected. Furthermore, another outer clip pair 42P is fitted into the two exposed end portions 34a, 34a adjacent to the electron supply pair, and further, an electron supply pair is formed.

  Then, out of the two formed electron supply pairs, the two adjacent supply electrons 40 and 40 are arranged such that the outer clip pair 42P is overlapped in the longitudinal direction of the dielectric tube 33, and the two The inner clips 41 and 41 are sandwiched. As described above, the outer clip pairs 42P are alternately fitted into the exposed end portion 34a and the inner clip 41 of each of the feeders 40, whereby a large number of the feeders 40 can be easily connected.

<Modification>
The ozone generator of a modification is shown in FIGS. Since the basic configurations of the ozone generator and the discharge tube of the present modification are the same as those in the embodiment, the same reference numerals are used for the configurations having the same functions, and descriptions thereof are omitted.

  In the ozone generator 1 of this modification, the outer clip 42 is used alone, and the feeder 40 is separately provided with a construction clip 50 and a construction clip 51 with connection terminals as shown in FIG. 12 and FIG. .

  The erection clip 50 has a pair of insertion legs 50a extending opposite to each other, and an erection part 50b spanning one end of the insertion legs 50a. A bent portion 50c that can be elastically deformed is formed at an intermediate portion of the erection portion 50b. The dimension between the insertion legs 50a and 50a is set in accordance with the pitch between the power supply units 40 located adjacent to each other. Specifically, the size between the plug-in legs 50a and 50a is slightly smaller than the pitch between the power supply units 40 located adjacent to each other.

  Each insertion leg portion 50 a is formed in an inferior arc shape in cross section in accordance with the inner peripheral surface of the inner clip 41 installed in the dielectric tube 33 and the shape of the ozone generation unit 30.

  By applying an external force, the insertion leg portions 50a, 50a are expanded, and each insertion leg portion 50a is inserted into the two inner clips 41, 41 adjacent to each other, whereby the installation clip 50 is connected to the two inner clips 41, 41. It will be erected. By doing so, each insertion leg part 50a is crimped | bonded to the inner surface of each inner clip 41, and both inner clips 41 and 41 are electrically connected to each other. Since the bent portion 50c is elastically deformed, there is no problem even if there is a slight pitch shift between the inner clips 41, 41.

  FIG. 13 shows an erection clip 51 with connection terminals. In the installation clip 51 with the connection terminal, the connection terminal 43 capable of connecting the lead wire 44 is integrally provided on the installation section 50b.

  FIG. 14 shows the power supply 40 connected to each other using the installation clip 50 and the installation clip 51 with connection terminals. The connection by the erection clip 50 and the bridging clip 51 with the connection terminal is made by simply inserting the erection clip 50 and the bridging clip 51 with the connection terminal into the two adjacent inner clips 41, 41 from the direction in which the opening 33 a of the dielectric tube 33 faces. Therefore, workability is excellent.

  The connection terminal 43 can be easily provided only by using a part of the installation clip 50 as the installation clip 51 with the connection terminal.

  Further, as shown in FIG. 15A, three or more outer clips 42 may be connected. Further, as shown in FIG. 15B, two or more bridging clips 50 may be connected. A large number of connections is advantageous in terms of workability and electrical resistance. In particular, a large number of these, such as 10 or 20, may be used. Then, if one outer clip 42 or the like is required, one can be cut and used, and if two are required, two can be cut and used. Since it can be used by dividing it as necessary, it has excellent versatility.

  In the ozone generator 1 of the modification, instead of the installation clip 51 with the connection terminal, a part of the inner clip 41 may be used as the inner clip 52 with the connection terminal shown in FIG. 10 as in the first embodiment.

DESCRIPTION OF SYMBOLS 1 Ozone generator 30 Ozone generation unit 31 Outer electrode tube 32 Discharge tube 33 Dielectric tube 33a Opening 34 Electrode film 34a Exposed end 35 Strip-shaped conductor 36 Discharge gap 40 Electric supply 41 Inner clip 42 Outer clip G Guide rod

Claims (5)

A tube-type ozone generator,
A cylindrical outer electrode tube;
A discharge tube disposed inside the outer electrode tube across a discharge gap;
An ozone generation unit having
The discharge tube is
A cylindrical dielectric tube having an opening at at least one end;
A cylindrical electrode film placed in intimate contact with the inner peripheral surface of the dielectric tube;
A power supply connected to an external power source and supplying power to the electrode film;
Have
An ozone generator in which the electrode film is formed by arranging a conductor made of an elastic strip-shaped leaf spring while being spirally shifted in the longitudinal direction of the dielectric tube. In the ozone generator of Claim 1,
The electrode generator is an ozone generator in which the electrode film is in close contact with the inner peripheral surface of the dielectric tube by expanding inside the dielectric tube by its own elastic force. The ozone generator according to claim 2,
The said electrode film is an ozone generator formed by arrange | positioning the said conductor piled up more than double, shifting it helically. In the ozone generator of Claim 1,
The electrode film has an exposed end that protrudes from the opening. The ozone generator according to claim 4,
The power supply is
An inner clip installed inside the electrode membrane;
An outer clip installed outside the electrode membrane;
Have
An ozone generator in which the exposed end is sandwiched between the inner clip and the outer clip.

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